CN102305596A - Device and method for controlling rotation error in interference detection of surface shape of spherical surface - Google Patents
Device and method for controlling rotation error in interference detection of surface shape of spherical surface Download PDFInfo
- Publication number
- CN102305596A CN102305596A CN201110106476A CN201110106476A CN102305596A CN 102305596 A CN102305596 A CN 102305596A CN 201110106476 A CN201110106476 A CN 201110106476A CN 201110106476 A CN201110106476 A CN 201110106476A CN 102305596 A CN102305596 A CN 102305596A
- Authority
- CN
- China
- Prior art keywords
- degree
- graticule
- seized
- parallel flat
- freedom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention discloses a device and a method for controlling a rotation error in the interference detection of a surface shape of a spherical surface. The device comprises an autocollimator and six detected surface devices which freely move, wherein an eye lens, a second dividing plate, a semi-transmitting semi-reflecting mirror, an objective lens and the six detected surface devices which freely move are sequentially arranged on the same optical axis; a first dividing plate, a converging lens and a light source are sequentially arranged above the semi-transmitting semi-reflecting mirror; an X-axis movement platform, a Z-axis movement platform, a Y-axis movement platform, a control two-dimension inclined platform, a U-shaped rotation table and parallel flat plates are sequentially arranged on a guide rail from bottom to top; the U-shaped rotation table is arranged on the side face of the control two-dimension inclined platform; and the parallel flat plates are arranged on the U-shaped rotation table. By the invention, the technical problem of difficulty in control of the rotation error caused by an alignment error of a mechanism during the detection of the spherical surface is solved, and an important application value is provided for the detection and processing of a high-quality optical element.
Description
Technical field
The present invention relates to the interfere measurement technique field of optical element, relate in particular to a kind of in sphere face shape interfere to be detected rotation error control device and method thereof.
Background technology
Along with the development of optical image technology, spherical surface shaped accuracy of detection demand is also increasingly high.Sphere interferes the detection technique can Rapid Realization spherical optics element high-precision test, and the interference detection technique of sphere face shape is updated and is used widely for this reason.Jensen had proposed a kind of absolute Calibrating Method that is suitable for real time interferometer in 1973, and both went on foot detection methods based on three of Feisuo interference system: the first step detects the opal position; Second step was detected 0 degree position; The 3rd step was detected 180 degree positions.This method can be removed the additional wave aberration of the sum of errors interferometer of reference mirror, thereby has improved seized accuracy of detection, in this method, needs three independently measurements, finally obtains seized face shape.This method has real-time high, and characteristics such as precision height are a kind of main method of sphere face shape absolute sense all the time.In actual detected; Because error and processing technology are debug by pick-up unit mechanism; Be difficult to the rotation error that control sphere face shape is interfered absolute sense; Promptly with respect to 0 degree detection position, seized of 180 degree inspection positions is big around optical axis Rotate 180 degree error, has influenced the precision that sphere face shape is detected.But along with the raising that the high Precision Detection of spherical optics element requires, sphere face shape interfere detect in rotation error limited the development of sphere high Precision Detection, still do not have at present suitable in sphere face shape is detected the device of control rotation error.
Summary of the invention
The objective of the invention is to the problems referred to above, provide a kind of and interfere rotation error control device and method thereof in the detection sphere face shape.
The rotation error control device comprises seized device of autocollimator and six-freedom degree motion in the interference of sphere face shape detects, and autocollimator comprises light source, convergent lens, first graticule, semi-transparent semi-reflecting lens, second graticule, eyepiece, object lens; On same optical axis, be provided with seized device of eyepiece, second graticule, semi-transparent semi-reflecting lens, object lens, six-freedom degree motion in order; The semi-transparent semi-reflecting lens top is provided with first graticule, convergent lens, light source in order; Seized device of six-freedom degree motion comprises X axle motion platform, Z axle motion platform, Y axle motion platform, controls two-dimentional sloping platform, U type universal stage, guide rail and parallel flat; Be provided with X axle motion platform, Z axle motion platform, Y axle motion platform on the guide rail from top to bottom successively, control two-dimentional sloping platform, U type universal stage and parallel flat; Control two-dimentional sloping platform side and be provided with U type universal stage; U type universal stage is provided with parallel flat.
Described parallel flat material is the sheet glass of drift angle for
on two sides, front and back.
The rotation error control method is in the interference of sphere face shape detects: the diverging light of light source, reflexes to object lens through semi-transparent semi-reflecting lens again and produces directional light in first graticule through the convergent lens imaging and focusing, is incident to parallel flat; If parallel flat is vertical with directional light, former road, reflected light edge is returned, again through object lens focusing in second graticule; On second graticule scale is arranged; Regulate the relative position of parallel flat and autocollimator, focus on the position of cross curve in second graticule observing behind the eyepiece, deviation is arranged as if the anglec of rotation of the universal stage on seized the device; The surperficial out of plumb of incident directional light and parallel flat; Behind eyepiece, observe cross curve and do not overlap with the center scale of second graticule, next, U type rotation universal stage; Use another surface of parallel flat to reflect, overlap with the center of second graticule up to rotating to the center of observing cross curve from the directional light of autocollimator outgoing; Seized device of six-freedom degree motion realized sextuple degree of freedom motion, is respectively the mobile z of optical axis direction, the axial mobile x that hangs down, y; Around the axial rotation of x
, around the axial rotation of y
; Rotation
around optical axis z direction; Wherein the degree of freedom of z direction is controlled seized over glaze to motion; Seized of the degree of freedom control and the reference surface common optical axis of x, y direction; Around the axial rotation of x
, around the attitude of seized of the degree of freedom of the axial rotation of y
control, around the degree of freedom of the rotation
of optical axis z direction control seized of 180 degree positions with respect to 0 degree position around optical axis self Rotate 180 degree.
Seized device of the present invention can realize that seized sextuple degree of freedom moves, and in actual detected, can reduce greatly owing to the influence to final detection result of seized site error and attitude error.The present invention is based on and to realize sextuple free-moving seized device, in sphere detects, realize high running accuracy making rotation error minimize, improved measuring accuracy, have using value for high-precision sphere detection.The Spin Control precision depends primarily on the precision of rotary table rotating shaft precision, autocollimator reading accuracy, the flat mirror front and rear surfaces of parallel glass.The rotating shaft precision is by own universal stage decision in the mechanism; The autocollimator that the present invention uses can realize 1 ' ' reading accuracy; Because two surfaces can not be desirable parallel before and after the restriction of processing technology, parallel flat, the processing technology of parallel flat can control to 5 ' ' the depth of parallelism.
Description of drawings
Fig. 1 interferes rotation error control device structural representation in the detection sphere face shape;
Fig. 2 is seized the apparatus structure synoptic diagram that has the six-freedom degree motion of the present invention;
Among the figure, the two-dimentional sloping platform of light source 1, convergent lens 2, first graticule 3, semi-transparent semi-reflecting lens 4, second graticule 5, eyepiece 6, object lens 7, seized device 8 of six-freedom degree motion, X axle motion platform 9, Z axle motion platform 10, Y axle motion platform 11, control 12, U type universal stage 13, guide rail 14, parallel flat 15, autocollimator 16.
Embodiment
Like Fig. 1, shown in 2; The rotation error control device comprises seized device 8 of autocollimator 17 and six-freedom degree motion in sphere face shape interfere to be detected, and autocollimator comprises light source 1, convergent lens 2, first graticule 3, semi-transparent semi-reflecting lens 4, second graticule 5, eyepiece 6, object lens 7; On same optical axis, be provided with seized device 8 of eyepiece 6, second graticule 5, semi-transparent semi-reflecting lens 4, object lens 7, six-freedom degree motion in order; Semi-transparent semi-reflecting lens 4 tops are provided with first graticule 3, convergent lens 2, light source 1 in order; Seized device 8 of six-freedom degree motion comprises the two-dimentional sloping platform of X axle motion platform 9, Z axle motion platform 10, Y axle motion platform 11, control 12, U type universal stage 13, guide rail 14 and parallel flat 15; Be provided with the two-dimentional sloping platform of X axle motion platform 9, Z axle motion platform 10, Y axle motion platform 11, control 12, U type universal stage 13 and parallel flat 15 on the guide rail 14 from top to bottom successively; Control two-dimentional sloping platform 12 sides and be provided with U type universal stage 13; U type universal stage 13 is provided with parallel flat 15.
Described parallel flat 15 materials are the sheet glass of drift angle for
on two sides, front and back.
The rotation error control method is in the interference of sphere face shape detects: the diverging light of light source 1, reflexes to object lens 7 through semi-transparent semi-reflecting lens 4 again and produces directional lights in first graticule 3 through convergent lens 2 imaging and focusing, is incident to parallel flat 15; If parallel flat 15 is vertical with directional light, reflected light returns along former road, focuses on second graticule 5 through object lens 7 again; On second graticule 5 scale is arranged; Regulate the relative position of parallel flat 15 and autocollimator, observe focusing on the position of cross curve in second graticule 5 in eyepiece 6 backs, if seized the anglec of rotation of installing the universal stage 13 on 8 has deviation; The surperficial out of plumb of incident directional light and parallel flat 15; Behind eyepiece, observe cross curve and do not overlap with the center scale of second graticule, next, U type rotation universal stage 13; Use another surface of parallel flat 15 to reflect, overlap with the center of second graticule up to rotating to the center of observing cross curve from the directional light of autocollimator outgoing; Seized the device 8 of six-freedom degree motion realized sextuple degree of freedom motion, is respectively the mobile z of optical axis direction, the axial mobile x that hangs down, y; Around the axial rotation of x
, around the axial rotation of y
; Rotation
around optical axis z direction; Wherein the degree of freedom of z direction is controlled seized over glaze to motion; Seized of the degree of freedom control and the reference surface common optical axis of x, y direction; Around the axial rotation of x
, around the attitude of seized of the degree of freedom of the axial rotation of y
control, around the degree of freedom of the rotation
of optical axis z direction control seized of 180 degree positions with respect to 0 degree position around optical axis self Rotate 180 degree.
In conjunction with the Zygo digital wavefront interferometer, use the reference mirror of F/0.65, detect F/0.68 by microscopy, sphere face shape interfere detect in the method for application of rotation error control device following:
1) seized device, autocollimator are placed in the preceding appropriate location of Zygo digital wavefront interferometer, reference mirror are installed and by microscopy.
2) move seized device, make that camera lens to be measured and reference lens are confocal, judge that confocal standard is still two bright spots coincidences after reflecting from seized camera lens reflection and reference lens in the center of cross curve; Autocollimator is installed in the appropriate location, rotates universal stage, camera lens to be measured is carried out 0 degree position probing make that the cross curve that sheet glass reflects can be seen in the center of graticule in autocollimator.Adjusting is minimum by the fringe number of microscopy on the interferogram on the Zygo digital wavefront interferometer display, guarantees that simultaneously the cross curve that sheet glass reflects can be seen in the center of graticule in autocollimator.Cooperate Zygo digital wavefront interferometer software systems to take multiple measurements record data.
3) with universal stage Rotate 180 degree, camera lens to be measured is carried out 180 degree position probing, basis for estimation is: because parallel flat Rotate 180 degree too, the cross curve that sheet glass reflects can be seen in the center of graticule in autocollimator.Adjusting is minimum by the fringe number of microscopy on the interferogram on the Zygo digital wavefront interferometer display, guarantees that simultaneously the cross curve that sheet glass reflects can be seen in the center of graticule in autocollimator.Cooperate Zygo digital wavefront interferometer software systems to take multiple measurements record data.
4) experimental data is handled, the gained result is as shown in table 1.
Table 1 utilizes the rotation error control device to record seized PV value and RMS value
。
Claims (3)
1. rotation error control device in sphere face shape interfere to be detected; It is characterized in that comprising seized the device (8) of autocollimator (16) and six-freedom degree motion, autocollimator comprises light source (1), convergent lens (2), first graticule (3), semi-transparent semi-reflecting lens (4), second graticule (5), eyepiece (6), object lens (7); On same optical axis, be provided with seized the device (8) of eyepiece (6), second graticule (5), semi-transparent semi-reflecting lens (4), object lens (7), six-freedom degree motion in order; Semi-transparent semi-reflecting lens (4) top is provided with first graticule (3), convergent lens (2), light source (1) in order; Seized the device (8) of six-freedom degree motion comprises X axle motion platform (9), Z axle motion platform (10), Y axle motion platform (11), controls two-dimentional sloping platform (12), U type universal stage (13), guide rail (14) and parallel flat (15); Be provided with X axle motion platform (9), Z axle motion platform (10), Y axle motion platform (11) on the guide rail (14) from top to bottom successively, control two-dimentional sloping platform (12), U type universal stage (13) and parallel flat (15); Control two-dimentional sloping platform (12) side and be provided with U type universal stage (13); U type universal stage (13) is provided with parallel flat (15).
2. according to claim 1 a kind of in sphere face shape interfere to be detected the rotation error control device, it is characterized in that described parallel flat (15) material be before and after the sheet glass of drift angle for
on two sides.
A use install according to claim 1 sphere face shape interfere detect in the rotation error control method, the diverging light that it is characterized in that light source (1), reflexes to object lens (7) through semi-transparent semi-reflecting lens (4) again and produces directional light in first graticule (3) through convergent lens (2) imaging and focusing; Be incident to parallel flat (15); If parallel flat (15) is vertical with directional light, reflected light returns along former road, focuses on second graticule (5) through object lens (7) again; Second graticule has scale on (5); Regulate the relative position of parallel flat (15) and autocollimator, observe focusing on the position of cross curve in second graticule (5) in eyepiece (6) back, if the anglec of rotation of the universal stage (13) on seized the device (8) has deviation; The surperficial out of plumb of incident directional light and parallel flat (15); Behind eyepiece, observe cross curve and do not overlap with the center scale of second graticule, next, U type rotation universal stage (13); Use another surface of parallel flat (15) to reflect, overlap with the center of second graticule up to rotating to the center of observing cross curve from the directional light of autocollimator outgoing; Seized the device (8) of six-freedom degree motion realized sextuple degree of freedom motion, is respectively the mobile z of optical axis direction, the axial mobile x that hangs down, y; Around the axial rotation of x
, around the axial rotation of y
; Rotation
around optical axis z direction; Wherein the degree of freedom of z direction is controlled seized over glaze to motion; Seized of the degree of freedom control and the reference surface common optical axis of x, y direction; Around the axial rotation of x
, around the attitude of seized of the degree of freedom of the axial rotation of y
control, around the degree of freedom of the rotation
of optical axis z direction control seized of 180 degree positions with respect to 0 degree position around optical axis self Rotate 180 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110106476 CN102305596B (en) | 2011-04-27 | 2011-04-27 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110106476 CN102305596B (en) | 2011-04-27 | 2011-04-27 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102305596A true CN102305596A (en) | 2012-01-04 |
| CN102305596B CN102305596B (en) | 2013-06-05 |
Family
ID=45379482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110106476 Expired - Fee Related CN102305596B (en) | 2011-04-27 | 2011-04-27 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102305596B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102997869A (en) * | 2012-12-24 | 2013-03-27 | 南京东利来光电实业有限责任公司 | Optical fiber end face verticality tester and testing method |
| CN103134443A (en) * | 2013-01-30 | 2013-06-05 | 中国科学院光电技术研究所 | Large-caliber large-caliber-thickness-ratio reflector surface shape auto-collimation detection device and method |
| CN104075671A (en) * | 2014-07-10 | 2014-10-01 | 华中农业大学 | Large-view-field photoelectric auto-collimator for secondary imaging |
| CN105371782A (en) * | 2015-12-02 | 2016-03-02 | 上海大学 | Rotary-type spherical interference splicing measuring device and regulation method thereof |
| CN106323191A (en) * | 2015-06-23 | 2017-01-11 | 南京理工大学 | Device for detecting cylindrical mirror absolute surface by using conjugate difference method |
| CN106596057A (en) * | 2016-11-14 | 2017-04-26 | 北京空间机电研究所 | Surface shape inspection method of large-aperture reflector assembly |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106949849A (en) * | 2017-03-17 | 2017-07-14 | 衢州学院 | Bearing ball deviation from spherical form method for quick based on laser interference Holographic test method |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030090798A1 (en) * | 2001-11-14 | 2003-05-15 | Evans Christopher James | Apparatus and method for calibrating an interferometer using a selectively rotatable sphere |
| CN101113890A (en) * | 2007-07-24 | 2008-01-30 | 哈尔滨工程大学 | Multidimensional full field optical calibrator |
| CN101561260A (en) * | 2008-04-16 | 2009-10-21 | 周其 | Optical fibre end face surveymeter |
| CN101915554A (en) * | 2009-03-11 | 2010-12-15 | 富士能株式会社 | Method for measuring three-dimensional shape and device |
-
2011
- 2011-04-27 CN CN 201110106476 patent/CN102305596B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030090798A1 (en) * | 2001-11-14 | 2003-05-15 | Evans Christopher James | Apparatus and method for calibrating an interferometer using a selectively rotatable sphere |
| CN101113890A (en) * | 2007-07-24 | 2008-01-30 | 哈尔滨工程大学 | Multidimensional full field optical calibrator |
| CN101561260A (en) * | 2008-04-16 | 2009-10-21 | 周其 | Optical fibre end face surveymeter |
| CN101915554A (en) * | 2009-03-11 | 2010-12-15 | 富士能株式会社 | Method for measuring three-dimensional shape and device |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102997869A (en) * | 2012-12-24 | 2013-03-27 | 南京东利来光电实业有限责任公司 | Optical fiber end face verticality tester and testing method |
| CN103134443A (en) * | 2013-01-30 | 2013-06-05 | 中国科学院光电技术研究所 | Large-caliber large-caliber-thickness-ratio reflector surface shape auto-collimation detection device and method |
| CN103134443B (en) * | 2013-01-30 | 2015-12-23 | 中国科学院光电技术研究所 | A kind of large-caliber large-caliber-thicknreflector reflector surface shape auto-collimation detection device and method |
| CN104075671B (en) * | 2014-07-10 | 2016-08-17 | 华中农业大学 | A kind of secondary imaging big visual field photoelectric auto-collimator |
| CN104075671A (en) * | 2014-07-10 | 2014-10-01 | 华中农业大学 | Large-view-field photoelectric auto-collimator for secondary imaging |
| CN106323191A (en) * | 2015-06-23 | 2017-01-11 | 南京理工大学 | Device for detecting cylindrical mirror absolute surface by using conjugate difference method |
| CN105371782A (en) * | 2015-12-02 | 2016-03-02 | 上海大学 | Rotary-type spherical interference splicing measuring device and regulation method thereof |
| CN106596057A (en) * | 2016-11-14 | 2017-04-26 | 北京空间机电研究所 | Surface shape inspection method of large-aperture reflector assembly |
| CN106596057B (en) * | 2016-11-14 | 2019-06-18 | 北京空间机电研究所 | A kind of face shape method of inspection of large caliber reflecting mirror component |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106949849A (en) * | 2017-03-17 | 2017-07-14 | 衢州学院 | Bearing ball deviation from spherical form method for quick based on laser interference Holographic test method |
| CN111504344A (en) * | 2020-05-15 | 2020-08-07 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
| CN111504344B (en) * | 2020-05-15 | 2022-03-11 | 天津时空经纬测控技术有限公司 | Calibration system and method for calibrating non-contact attitude measurement equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102305596B (en) | 2013-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102305596B (en) | Device and method for controlling rotation error in interference detection of surface shape of spherical surface | |
| WO2017107777A1 (en) | Method for measuring surface shape error of rotary symmetrical unknown aspheric surface, and measurement device thereof | |
| JP6193218B2 (en) | Method and apparatus for non-contact measurement of surfaces | |
| CN101865670B (en) | Plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer | |
| EP2177870B1 (en) | Optical wave interference measuring apparatus | |
| JP5971965B2 (en) | Surface shape measuring method, surface shape measuring apparatus, program, and optical element manufacturing method | |
| CN102175433B (en) | Lens center error measurement system based on interference principle | |
| CN104848802B (en) | Normal tracking mode differential confocal non-spherical measuring method and system | |
| CN102788563A (en) | Device and method for adjusting tilt of measured mirror in matching measurement of flat sub-aperture | |
| CN104315985A (en) | Interference measuring method for thickness of center of lens | |
| CN102589472A (en) | Method for highly precisely eliminating adjustment error in spherical surface shape interference detection | |
| KR20110065365A (en) | Method and apparatus for measuring aspherical body | |
| Wu et al. | Precise 3-D microscopic profilometry using diffractive image microscopy and artificial neural network in single-exposure manner | |
| CN113203553A (en) | Lens center error measuring system and measuring method | |
| JP2005509874A (en) | High-speed in-situ acquisition of aspheric Fizeau | |
| CN102494631A (en) | Rotating around optical axis alignment error analysis method | |
| JP2014115077A (en) | Lens measuring method and device for measuring surface shift and surface tilt of lens | |
| JP2010528273A (en) | Apparatus and method for measuring the shape of a freeform surface | |
| JP3702733B2 (en) | Alignment method and mechanism of optical inspection apparatus | |
| JP5904896B2 (en) | Lens inspection apparatus and lens inspection method | |
| JP5010964B2 (en) | Angle measuring method and apparatus | |
| JP2008304200A (en) | Method for adjusting height position of eccentricity measuring head | |
| Su et al. | Optical testing for meter size aspheric optics | |
| CN109341587A (en) | Splicing measuring device and method | |
| JP6482061B2 (en) | Mask stage and stage apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20160427 |