CN101113890A - Multidimensional full field optical calibrator - Google Patents
Multidimensional full field optical calibrator Download PDFInfo
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- CN101113890A CN101113890A CNA2007100725538A CN200710072553A CN101113890A CN 101113890 A CN101113890 A CN 101113890A CN A2007100725538 A CNA2007100725538 A CN A2007100725538A CN 200710072553 A CN200710072553 A CN 200710072553A CN 101113890 A CN101113890 A CN 101113890A
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Abstract
The invention provides a multidimensional full field optical calibration device used for the hyperboloidal reflection mirror which includes collimated light source, a beam microscopy, an optical reference arm, an optical measurement and a receive device; the collimated light beam issued by the collimated light source collimator the beam irradiates into the beam microscopy, the beam microscopy divides the collimated light source into two parts, the reflection part is after reflected by the reflection mirror II and then permeated the beam microscopy to be a reference light; the transmission part is converged to part of mirror of the measured hyperboloidal reflection mirror by the convergence lens, the extension of the convergence light in the intersection of a focus of the hyperboloidal reflection mirror, after reflected by the measured hyperbolic reflection mirror, converge to a standard spherical reflection mirror, the extension of the light converges to the core of the spherical reflection mirror, after reflected by the spherical reflection mirror, returns along the original track, then reflected by the measured hyperboloidal reflection mirror and the convergence lens mirror and semi- reflection mirror, to be a test light; reference light and convergence light converge to the receive device. The device for the invention can measure the surface morphology and measurement parameters of the hyperboloidal reflection mirror which have different scales and high reflection.
Description
(1) technical field
What the present invention relates to is a kind of multidimensional whole-field optically check system of optics check system, particularly a kind of hyperboloidal mirror.
(2) background technology
Optics omni-directional visual technology has at home and abroad obtained to pay close attention to widely in recent years, and application comprises a lot of military affairs and civil areas such as robot vision, the monitoring of fire point, target range monitoring, lorry backsight, lunar rover, Marsokhod, security protection.Militarily this system can be placed on and monitor the track of attacking guided missile on the target ship, can be applied on robot or the battlebus as the environmental observation means, can be used as the rear portion observing system of motor van at civil area, perhaps as the core component of public place security monitoring, the fire point monitoring of important place.The advantage of this technology is to utilize a CCD camera lens to carry out 360 degree visual fields monitorings, compares with the traditional multi-cam or the method for rotation camera, and level of integrated system is higher, stability is better.
The core component of optics fully-directional visual system is the catoptron of a high reflectance, with on every side 360 the degree image imagings near the CCD central point.Present alternative mirror shapes has pyramid, taper shape, semisphere, paraboloid of revolution shape, ellipsoid shape and hyperboloid of revolution shape.The catoptron of different shape relatively by analysis, hyperboloid of revolution shape catoptron (hereinafter to be referred as hyperbolic mirror) since can around the image imaging of large scale in very little scope, be convenient to utilize digital CCD shooting and record, use more convenient.
In the optics fully-directional visual system, the reflectivity and the surface topography of catoptron are most important to imaging effect, and it is extremely important therefore catoptron to be carried out meticulous measurement.If the mirror shapes that processing obtains departs from ideal form or reflectivity is inhomogeneous, then can influence the observation and the measurement of correspondence position object.At present, the optical measurement of non-spherical reflectors such as hyperboloid is a difficult problem, does not have ready-made instrument to measure the reflectivity and the surface topography of the high reflectance hyperbolic mirror of different scale.
Traditional surface measurement method requires tested surface to have certain diffuse reflective nature, does not meet the test request of hyperboloidal mirror; The test of spherical reflector can be adopted Tai Man-Green's interferometer, but improper to hyperboloidal mirror; If single catoptron for a certain fixed measure, also have and utilize a non-spherical lens (compensator) to carry out (list of references: Guo Peiji of the measurement of full field of measured lens, Yu Jingchi, improve the precision of compensator detection method with correction method, the optical precision process, 14 volumes, 2 phase 202-206 pages or leaves, 2006), but this compensator detection method can not be as the means of testing of serial hyperboloidal mirror, and the processing of this aspheric mirror (compensator) also is very difficult.
(3) summary of the invention
The object of the present invention is to provide a kind of multidimensional whole-field optically calibration equipment of the hyperboloidal mirror that can measure the hyperboloidal mirror surface topography and the reflectivity parameter of different scale, high reflectance.
The object of the present invention is achieved like this: it comprises collimated light source, beam splitter, reference path, measurement light path and receiving trap; The collimated light beam that collimated light source sends is injected beam splitter, and beam splitter is divided into transmission and reflection two-way with collimated light beam, and one the tunnel as reference light, and reference path is provided with catoptron II and forms reference arm, sees through beam splitter after catoptron II reflection again; Another road is as detecting light, detecting light path is provided with by plus lens, the gage beam that tested hyperbolic mirror becomes with standard sphere reflector group, detecting light converges on the partial mirror of tested hyperbolic mirror through plus lens, converging the light extended line intersects on the focus of tested hyperbolic mirror, after tested hyperbolic mirror reflection, converge on the standard spherical reflector, the extended line of light converges at the centre of sphere of spherical reflector, after the spheric reflection mirror reflection, return along former road, again through tested hyperbolic mirror and plus lens and half-reflecting mirror reflection, as test light; Reference light and detection light are pooled to receiving trap.
The present invention can also comprise some architectural features like this:
1, the transmitted light of beam splitter is as detecting light, reflected light as reference light.
2, the reflected light of beam splitter is as detecting light, transmitted light as reference light.
3, described tested hyperbolic mirror is installed on the bidimensional rotating mechanism, and one dimension wherein is that the rotating shaft of another sense of rotation is perpendicular to tested bi-curved axis along the rotating shaft of tested hyperboloid axis rotation.
4, be installed in can be along in the travel mechanism that radiation direction moves forward and backward for described catoptron II.
5, described receiving trap is made of imaging len and CCD.
6, described collimated light source is made up of laser instrument, beam expanding lens, collimation lens and catoptron I, and catoptron I injects beam splitter with collimated light beam.
7, the transmission of described beam splitter, reflectance should be near 50%.
The present invention adopts distortion Tai Man-Green's interferometer, and laser beam enters interferometer after expanding bundle, collimation through filtering.Be divided into two bundles through beam splitter, the reflecting part after catoptron II reflection, sees through beam splitter as reference light as the reference light path again, and catoptron II can move forward and backward along radiation direction, makes the interference image contrast that receives the highest.The transmission part is as measuring light path, converge to through plus lens on the partial mirror of tested hyperbolic mirror, converging the light extended line intersects on the focus of tested hyperbolic mirror, after tested hyperbolic mirror reflection, converge on the standard spherical reflector, the extended line of light converges at the centre of sphere of spherical reflector; After the spheric reflection mirror reflection, Yan Yuanlu returns, again through tested hyperbolic mirror and plus lens and half-reflecting mirror reflection, as test light.At last, reference light and converge light and interfere at the receiving trap place obtains having the interference fringe of tested hyperbolic mirror information.
If interference fringe bends, illustrate that then hyperbolic mirror surface, corresponding position is level and smooth inadequately, or departed from desirable hyperboloid, can measure tested catoptron according to the degree of striped bending and depart from desirable bi-curved degree.If the contrast of interference fringe significant change occurs in certain part, illustrate that then the corresponding coating reflectivity in this place is not ideal enough.
Because this installs the part that each measurement can only be measured hyperbolic mirror, therefore need carry out the bidimensional rotation to hyperbolic mirror.One dimension is along the rotation of hyperboloid axis, guarantees that hyperbolic mirror 360 degree all can obtain test; The rotating shaft of another sense of rotation is used to guarantee that perpendicular to bi-curved axis the minute surface of different azimuth all obtains test.
(4) description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural drawing of the rotation of tested hyperboloid two dimension and standard reflection sphere system in of the present invention.
(5) embodiment
For example the present invention is done description in more detail below in conjunction with accompanying drawing:
In conjunction with Fig. 1, the composition of the multidimensional whole-field optically calibration equipment of hyperboloidal mirror comprises collimated light source, beam splitter, reference path, measurement light path and receiving trap.Collimated light source is made up of laser instrument 1, beam expanding lens 2, collimation lens 3 and catoptron I4.The collimated light beam that collimated light source sends is injected beam splitter 5 by catoptron I with collimated light beam.Beam splitter is with the collimated light beam separated into two parts, and the reflecting part sees through beam splitter again as reference light after catoptron II6 reflection; Transmissive portions lease making plus lens 7 converges on the partial mirror of tested hyperbolic mirror 8, converging the light extended line intersects on the focus of tested hyperbolic mirror, after tested hyperbolic mirror reflection, converge on the standard spherical reflector 9, the extended line of light converges at the centre of sphere of spherical reflector, and after the spheric reflection mirror reflection, Yan Yuanlu returns, again through tested hyperbolic mirror and plus lens and half-reflecting mirror reflection, as test light.Reference light and converge light and be pooled to receiving trap, receiving trap is made of imaging len 10 and CCD camera 11.In conjunction with Fig. 2, described tested hyperbolic mirror is installed on the bidimensional rotating mechanism 12, and one dimension wherein is that the rotating shaft of another sense of rotation is perpendicular to tested bi-curved axis along the rotating shaft of tested hyperboloid axis rotation.Described catoptron II is installed in can be along in the travel mechanism that radiation direction moves forward and backward.The transmission of described beam splitter, reflectance should be near 50%.
Below the principle of the present invention and the course of work are further described:
Fig. 1 is the structural representation of the multidimensional whole-field optically check system of hyperboloidal mirror of the present invention.Utilize laser instrument expansion bundle, collimation to obtain collimated light beam, through catoptron 1 light beam is injected interference system, the part that whole dotted line comprises belongs to the collimated light source part, also can obtain collimated light beam by other approach, but requires the monochromaticity of light source to satisfy relevant requirement.The collimated light beam that collimated light source sends is through the beam splitter separated into two parts: a part of light, as the beam splitter reflected light among the figure as the reference light beam, through one can before and after after the standard flat mirror reflects of translation, Yan Yuanlu returns, again after the beam splitter transmission as with reference to light.Another part light, converge on the focus of tested hyperbolic mirror through a plus lens as the beam splitter transmitted light among the figure, through converging to after the reflection of hyperbolic mirror on another focus, be positioned at the standard sphere mirror reflects of second focus of hyperboloid by a centre of sphere, return along former road, through tested hyperbolic mirror reflection, become directional light behind plus lens again, conduct is by photometry after the beam splitter reflection.In fact, reference path and measurement light path can be exchanged with respect to the orientation of beam splitter, to not influence of measurement result.Reference light and interfered by photometry is received device and receives.Receiving trap can be made of imaging len and CCD, and dot-and-dash line surrounds part among the figure.
Fig. 2 has shown the structure of rotation of tested hyperboloid two dimension and standard reflection sphere system.Wherein the rotating shaft of one dimension rotation is the central rotating shaft of hyperbolic mirror, guarantees that the various piece of tested hyperbolic mirror 360 degree scopes obtains testing verification.Another dimension rotating shaft is carried out rotation among a small circle perpendicular to this central rotating shaft, guarantees that the minute surface of different radii can obtain testing verification.The standard spherical reflector guarantees that light beam can return along former road as the witness mark benchmark time.
The course of work of the present invention and principle are:
1, utilize this check system to carry out the measurement of hyperbolic mirror surface topography:
If the surface working precision of tested hyperbolic mirror is not high, make partial mirror depart from the hyperboloid of revolution, through behind this check system, the striped distortion can take place in the corresponding position.Utilize two-dimentional whirligig can guarantee that the various piece of whole hyperbolic mirror is all accurately measured.The no matter bore and the focal length size of hyperbolic mirror, all can be by regulating the accurate measurement that the anglec of rotation and mobile standard reflection spherical mirror guarantee the hyperbolic mirror whole audience, after the focal length of tested hyperbolic mirror changes, need to regulate the catoptron front and back position in the reference path, guarantee reference light and equal substantially, reach best interference effect by the light path of photometry.
2, utilize this check system to carry out the measurement of hyperbolic mirror surface reflectivity:
If the surface coating effect of tested hyperbolic mirror is good inadequately, make reflectivity inhomogeneous, through behind this check system, the fringe contrast of correspondence position can change.By contrasting the interference fringe contrast of tested hyperbolic mirror diverse location correspondence, can measure the whole audience reflectivity of this hyperbolic mirror.When tested bi-curved reflectivity is low, need adjust the splitting ratio of beam splitter, guarantee that the interference fringe contrast that obtains is the highest.
Claims (8)
1. the multidimensional whole-field optically calibration equipment of a hyperboloidal mirror, it comprises collimated light source, beam splitter, reference path, measurement light path and receiving trap; It is characterized in that: the collimated light beam that collimated light source sends is injected beam splitter, and beam splitter is divided into transmission and reflection two-way with collimated light beam, and one the tunnel as reference light, and reference path is provided with catoptron II and forms reference arm, sees through beam splitter after catoptron II reflection again; Another road is as detecting light, detecting light path is provided with by plus lens, the gage beam that tested hyperbolic mirror becomes with standard sphere reflector group, detecting light converges on the partial mirror of tested hyperbolic mirror through plus lens, converging the light extended line intersects on the focus of tested hyperbolic mirror, after tested hyperbolic mirror reflection, converge on the standard spherical reflector, the extended line of light converges at the centre of sphere of spherical reflector, after the spheric reflection mirror reflection, return along former road, again through tested hyperbolic mirror and plus lens and half-reflecting mirror reflection, as test light; Reference light and detection light are pooled to receiving trap.
2. the multidimensional whole-field optically calibration equipment of hyperboloidal mirror according to claim 1 is characterized in that: the transmitted light of beam splitter is as detecting light, reflected light as reference light.
3. the multidimensional whole-field optically calibration equipment of hyperboloidal mirror according to claim 1 is characterized in that: the reflected light of beam splitter is as detecting light, transmitted light as reference light.
4. according to the multidimensional whole-field optically calibration equipment of claim 1,2 or 3 described hyperboloidal mirrors, it is characterized in that: described tested hyperbolic mirror is installed on the bidimensional rotating mechanism, one dimension wherein is that the rotating shaft of another sense of rotation is perpendicular to tested bi-curved axis along the rotating shaft of tested hyperboloid axis rotation.
5. according to the multidimensional whole-field optically calibration equipment of claim 1,2 or 3 described hyperboloidal mirrors, it is characterized in that: described catoptron II is installed in can be along in the travel mechanism that radiation direction moves forward and backward.
6. according to the multidimensional whole-field optically calibration equipment of claim 1,2 or 3 described hyperboloidal mirrors, it is characterized in that: described receiving trap is made of imaging len and CCD.
7. according to the multidimensional whole-field optically calibration equipment of claim 1,2 or 3 described hyperboloidal mirrors, it is characterized in that: described collimated light source is made up of laser instrument, beam expanding lens, collimation lens and catoptron I, and catoptron I injects beam splitter with collimated light beam.
8. according to the multidimensional whole-field optically calibration equipment of claim 1,2 or 3 described hyperboloidal mirrors, it is characterized in that: the transmission of described beam splitter, reflectance should be near 50%.
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| CNB2007100725538A CN100541114C (en) | 2007-07-24 | 2007-07-24 | The multidimensional whole-field optically calibration equipment of hyperboloidal mirror |
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| CNB2007100725538A CN100541114C (en) | 2007-07-24 | 2007-07-24 | The multidimensional whole-field optically calibration equipment of hyperboloidal mirror |
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| CN102305596A (en) * | 2011-04-27 | 2012-01-04 | 浙江大学 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
| CN102419160A (en) * | 2011-08-22 | 2012-04-18 | 中海阳新能源电力股份有限公司 | Comparison method based comprehensive on-line test system for curved surface of reflector |
| CN103438831A (en) * | 2013-09-16 | 2013-12-11 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis elliptical mirror |
| CN106114889A (en) * | 2016-08-31 | 2016-11-16 | 哈尔滨工程大学 | A kind of Fresnel optical guide and the integrated configuration method of arrester wires |
| CN109195735A (en) * | 2016-04-21 | 2019-01-11 | 分子前景公司 | Optical drift corrects system and method |
| CN109799079A (en) * | 2019-03-29 | 2019-05-24 | 云南电网有限责任公司电力科学研究院 | A kind of the common optical axis calibrator and method of multispectral camera |
| CN110646169A (en) * | 2019-10-28 | 2020-01-03 | 沈阳仪表科学研究院有限公司 | Method for measuring reflectivity of curved surface optical film element |
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| CN111750800A (en) * | 2019-03-28 | 2020-10-09 | 精工爱普生株式会社 | Three-dimensional measuring device and robot system |
| CN111964607A (en) * | 2020-08-24 | 2020-11-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Curved surface standard device applied to calibration of large-size scanning and measuring instrument |
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2007
- 2007-07-24 CN CNB2007100725538A patent/CN100541114C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102305596B (en) * | 2011-04-27 | 2013-06-05 | 浙江大学 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
| CN102305596A (en) * | 2011-04-27 | 2012-01-04 | 浙江大学 | Device and method for controlling rotation error in interference detection of surface shape of spherical surface |
| CN102419160A (en) * | 2011-08-22 | 2012-04-18 | 中海阳新能源电力股份有限公司 | Comparison method based comprehensive on-line test system for curved surface of reflector |
| CN102419160B (en) * | 2011-08-22 | 2014-08-13 | 中海阳能源集团股份有限公司 | Comparison method based comprehensive on-line test system for curved surface of reflector |
| CN103438831A (en) * | 2013-09-16 | 2013-12-11 | 上海现代先进超精密制造中心有限公司 | Detection device and detection method of off-axis elliptical mirror |
| CN109195735A (en) * | 2016-04-21 | 2019-01-11 | 分子前景公司 | Optical drift corrects system and method |
| CN106114889A (en) * | 2016-08-31 | 2016-11-16 | 哈尔滨工程大学 | A kind of Fresnel optical guide and the integrated configuration method of arrester wires |
| CN106114889B (en) * | 2016-08-31 | 2018-06-12 | 哈尔滨工程大学 | A kind of integrated configuration method of Fresnel optical guide device and arrester wires |
| CN111750800A (en) * | 2019-03-28 | 2020-10-09 | 精工爱普生株式会社 | Three-dimensional measuring device and robot system |
| CN111750800B (en) * | 2019-03-28 | 2022-04-26 | 精工爱普生株式会社 | Three-dimensional measuring device and robot system |
| CN109799079A (en) * | 2019-03-29 | 2019-05-24 | 云南电网有限责任公司电力科学研究院 | A kind of the common optical axis calibrator and method of multispectral camera |
| CN109799079B (en) * | 2019-03-29 | 2024-04-09 | 云南电网有限责任公司电力科学研究院 | Common optical axis adjustment device and method for multispectral camera |
| US20220307940A1 (en) * | 2019-08-14 | 2022-09-29 | Mloptic Corp | Measurement apparatus for surface shape of highly reflective mirror |
| CN110646169B (en) * | 2019-10-28 | 2022-03-08 | 沈阳仪表科学研究院有限公司 | Method for measuring reflectivity of curved surface optical film element |
| CN110646169A (en) * | 2019-10-28 | 2020-01-03 | 沈阳仪表科学研究院有限公司 | Method for measuring reflectivity of curved surface optical film element |
| CN111650201A (en) * | 2020-07-15 | 2020-09-11 | Oppo（重庆）智能科技有限公司 | Detection device and detection method |
| CN111650201B (en) * | 2020-07-15 | 2023-06-06 | Oppo（重庆）智能科技有限公司 | Detection device and detection method |
| CN111964607A (en) * | 2020-08-24 | 2020-11-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Curved surface standard device applied to calibration of large-size scanning and measuring instrument |
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