CN103149013A - Collimator tube reticle high-precision adjusting method based on plane interference principle - Google Patents
Collimator tube reticle high-precision adjusting method based on plane interference principle Download PDFInfo
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Abstract
The invention discloses a collimator tube reticle high-precision adjusting method based on a plane interference principle. The collimator tube reticle high-precision adjusting method based on the plane interference principle resolves the problems that a collimator tube reticle is low in fixed focus precision and not capable of carrying out quantitative interpretation. According to the collimator tube reticle high-precision adjusting method based on the plane interference principle, a spherical reflector, collimator tubes and an interferometer are enabled to be adjusted to share the same optical axis, the focus of the spherical reflector and the focus on the axis of the collimator tubes are parfocalized, the reticle is enabled to be brought in a light path, a pitching azimuth angle of the reticle is fine-tuned, and front-back defocusing adjustment is carried out on the reticle along a direction of the optical axis; computation is carried out on interference fringes collected by the interferometer, a defocusing amount Delta d of the reticle is obtained through a Power value of a Zernike coefficient, a interfering beam caliber D and mathematic relation of a collimator tube focal length f', and the collimator tube reticle high-precision adjusting method based on the plane interference principle is achieved. The collimator tube reticle high-precision adjusting method based on the plane interference principle is capable of figuring out real-time misalignment of the reticle, avoiding blindness of finding a turning point through manual visual interpretation, and improving adjusting efficiency and precision.
Description
Technical field
The invention belongs to optical detection and integration techno logy field, be specifically related to a kind of parallel light tube graticule high precision Method of Adjustment based on the plane interference principle.
Background technology
Parallel light tube will be positioned at all kinds of differentiation target imagings on its focal plane to the infinite distance by optical system, the optical target that has different spectral characteristics, radiation characteristic, geometrical property in order to imitation is that the core that optical parametric detection, demarcation, evaluation of imaging quality are used detects utensil.Wherein graticule is to adopt photoetching method to be replicated on glass substrate in specific geometric figure, realizes that by optical system imaging to the infinite distance of parallel light tube optical parametric detects.According to the principle of work of parallel light tube, only have figure and pattern ruled surface when graticule to be positioned at the parallel light tube optical system focal plane, its outgoing beam just possesses the feature of parallel beam, simulation be the infinite distance optical target.Graticule is debug the scope of application and the key property that precision directly determines parallel light tube in focal plane.Conventional parallel light tube graticule focuses method and comprises pentaprism scanning method, road junction shadowing method, autocollimation method, maximum grey-scale contrast method, and adopts sphericity interferometer to coordinate the autocollimation scaling method of plane mirror.Front several method of testings need artificial interpretation defocusing amount, and can't quantitatively measure the misalignment rate of graticule, can realize under laboratory condition that the graticule focal plane about 100 μ m is debug precision.The autocollimation scaling method adopts sphericity interferometer and parallel light tube, plane mirror to consist of the autocollimation optical interference circuit, need graticule is carried out once inside out in debuging process, Focus accuracy is subjected to the mechanical return Accuracy, and its graticule Focus accuracy can be increased to 10 μ m.When the parallel light tube focal length is 3～5 times of optical system focal length to be measured, above-mentionedly focus request for utilization and the measuring accuracy requirement that method all can satisfy parallel light tube.But when parallel light tube focal length used and optical system focal length to be measured quite even slightly hour, according to enlargement ratio formula and depth of focus formula, the graticule focal plane of employing said method is debug the request for utilization that precision can't satisfy parallel light tube.
The graticule that coordinates parallel light tube to use in the optical detection experiment mainly comprises the Porro tester that detects for focal length, and the vertical line that it is arranged according to certain intervals by array is inscribed on glass substrate; Be used for the crosshair graticule of alignment measurement, it is inscribed on glass substrate by one group of cross type vertical line; Be used for resolving power test target or black and white strip plate that image quality detects, the former delineates the resolution check pattern that array is made of the interval striped on glass substrate according to national standard, and the latter delineates the black and white strip line pair of particular space frequency on glass substrate.Conventional graticule reflectivity is lower, is difficult to find the geometric center of graticule.
Summary of the invention
In order to solve problems of the prior art, the invention provides a kind of parallel light tube graticule high precision Method of Adjustment based on the plane interference principle, the method has solved existing parallel light tube graticule Focus accuracy and can't satisfy under parallel light tube focal length and the suitable service condition of optical system focal length to be measured, and Focus accuracy is lower, technical matters that can't quantitative interpretation.By the present invention, graticule figure delineation face can be debug to parallel light tube optical system best focal plane deviation in ± 2 μ m scopes, guarantee that the high precision that the focal length parallel light tube suitable with optical system focal length to be measured can be used for optical system detects and demarcation.
The technical scheme that technical solution problem of the present invention adopts is as follows:
Based on the parallel light tube graticule high precision Method of Adjustment of plane interference principle, the method comprises the steps:
Near step 1 a: at first relative aperture is placed in the focal plane of parallel light tube more than or equal to the spherical reflector of parallel light tube relative aperture focal length value theoretical according to it, will the flat interferometer suitable with the parallel light tube bore put the exit to parallel light tube, the parallel beam of flat interferometer outgoing is focused on the focal plane of parallel light tube through the parallel light tube optical system;
Step 2: observe interference fringe, attitude and relative position to flat interferometer and spherical reflector are adjusted, until zero order interference fringe and wave aberration minimum occur, determine spherical reflector, parallel light tube and flat interferometer common optical axis, spheric reflection mirror foci and directional light tubular axis part of the body cavity above the diaphragm housing the heart and lungs point parfocalization;
Step 3: will break up plate and be mounted in focus adjusting mechanism on focal surface of collimator tube, make delineation one side of target pattern be arranged towards flat interferometer, and spherical reflector is shifted out light path, the fine setting focus adjusting mechanism, with the graticule center and flat interferometer sends and the hot spot that converges after parallel light tube focuses on aligns, then finely tune the angle of pitch, the position angle of graticule, and along optical axis direction, graticule is carried out front and back out of focus adjustment;
Step 4: the interference fringe to the step 3 of flat interferometer collection is calculated, obtain the Zernike coefficient relevant to wave aberration, the defocusing amount Δ d of graticule and the Power value in the Zernike coefficient, interfering beam bore D and parallel light tube focal distance f ' mathematical relation as follows:
By above formula, calculate the defocusing amount of graticule, and judge each step to adjustment direction and the distance of graticule by result of calculation, realization is based on the parallel light tube graticule high precision Method of Adjustment of plane interference principle.
The invention has the beneficial effects as follows: the present invention adopts the operation steps of twice adjustment to realize debuging the rapid alignment of light path.The Zernike FACTOR P ower item that obtains according to digital interference instrument calculating interference fringe and the mathematics relation between graticule defocusing amount Δ d, quantitatively calculate the real-time size of graticule and direction, and instruct further precision to debug, has objectivity, avoided the artificial visual interpretation to seek the blindness of swivel point, improved and debug efficient, compare present method can will debug precision improve, be applicable to assembling and the adjustment of all kinds of parallel light tube graticules that use the optical laboratory.
Description of drawings
Fig. 1 Method of Adjustment of the present invention is aimed at arrangenent diagram.
Fig. 2 Method of Adjustment of the present invention is debug arrangenent diagram.
The design figure of Fig. 3 graticule of the present invention.
In figure: 1, spherical reflector, 2, parallel light tube, 3, micro-adjusting mechanism, 4, the digital plane interferometer, 5, optical table, 6, the digital interference instrument power supply, 7, extraordinary graticule, 8, computing machine and 9, parallel light tube focus adjusting mechanism.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further details.
Based on the parallel light tube graticule high precision Method of Adjustment of plane interference principle, the method comprises the steps:
Step 1: as shown in Figure 1, at first with the spherical reflector 1 of a relative aperture more than or equal to parallel light tube 2 relative apertures, as the coarse adjustment benchmark, spherical reflector 1 is placed near the focal plane of parallel light tube 2 together with micro-adjusting mechanism 3 focal length value theoretical according to it, the digital plane interferometer 4 suitable with parallel light tube 2 bores put to the exit end of parallel light tube 2, made the bore of digital plane interferometer 4 substantially cover parallel light tube 2 bores.Said modules is placed on optical table 5, opens digital interference instrument power supply 6, and the parallel beam of digital plane interferometer 4 outgoing focuses on the focal plane of parallel light tube 2 through parallel light tube 2 optical systems.
Step 2: observe the interference fringe that focused beam forms with reference light after spherical reflector 1 reflection, by regulating micro-adjusting mechanism 3, digital flat interferometer 4 and attitude and the relative position of spherical reflector 1 are adjusted, until zero order interference fringe occurs, and minimum by the wave aberration numerical value that interference fringe calculates, the optical axis, parallel light tube 2 optical axises, the interferometer 4 optical axis conllinear that show spherical reflector 1, focus parfocalization on spherical reflector 1 focus and parallel light tube 2 axles.
Step 3: special differentiation plate 7 is mounted in focus adjusting mechanism 9 on parallel light tube 2 focal planes, makes a side that delineation has target pattern towards digital plane interferometer 4, and spherical reflector 1 is shifted out light path, this moment, interference fringe disappeared.Fine setting parallel light tube focus adjusting mechanism 9, to be positioned at the 7 centers delineations of extraordinary graticule and the zone of collimating point be arranged with digital plane interferometer 4 sends and the hot spot that converges after parallel light tube focusing aligns, then finely tune the angle of pitch and the position angle of extraordinary graticule 7, and along optical axis direction, extraordinary graticule 7 is carried out front and back out of focus adjustment; According to the interference of light principle, only have the optimal focal plane that is positioned at parallel light tube 2 optical systems when the pattern ruled surface of extraordinary graticule 7, it is minimum that zero order fringe and wave aberration just can appear again.
Step 4: the interference fringe of the step 3 by 8 pairs of interferometer collections of computing machine is calculated, and obtains the Zernike coefficient relevant to wave aberration, and Power item wherein is the Zernike coefficient relevant to extraordinary graticule defocusing amount.The defocusing amount Δ d of extraordinary graticule and Power value, interfering beam bore D and the parallel light tube focal distance f of Zernike coefficient ' mathematical relation as follows:
By above formula, calculate the defocusing amount of extraordinary graticule 7, and direction is adjusted in the sign judgement by result of calculation, by adjusting position and the attitude of the extraordinary graticule 7 of parallel light tube focus adjusting mechanism 9 successive adjustments, makes the Power value near 0.000 λ (take the ZYGO interferometer as example); During less than 0.003 λ, for the parallel light tube of focal length 550mm, bore 50mm, extraordinary graticule 7 defocusing amount Δ d are 2.1 μ m when the Power value.Realization is based on the extraordinary graticule high precision of the parallel light tube Method of Adjustment of plane interference principle.
Delineation pattern for the graticule of mentioning in background technology in the present invention improves.As shown in Figure 3, design the circular target surface of a Φ (2 ± 0.01) mm in the geometric center of graticule, be coated with highly reflecting films (λ=550nm～700nm) and the scuffing that prevents circular target surface in long-term use procedure and improve the diaphragm of duplicate measurements precision.Can realize aiming at of graticule center and optical axis in debuging process, and make the plane wave that the digital plane interferometer sends focus to this circle target surface center and reflection formation optical interference circuit through parallel light tube, and form the interference fringe with higher contrast, adopting this special type graticule is the necessary condition that this Method of Adjustment is realized.
Claims (3)
1. based on the parallel light tube graticule high precision Method of Adjustment of plane interference principle, it is characterized in that, the method comprises the steps:
Near step 1 a: at first relative aperture is placed in the focal plane of parallel light tube more than or equal to the spherical reflector of parallel light tube relative aperture focal length value theoretical according to it, will the flat interferometer suitable with the parallel light tube bore put the exit to parallel light tube, the parallel beam of flat interferometer outgoing is focused on the focal plane of parallel light tube through the parallel light tube optical system;
Step 2: observe interference fringe, attitude and relative position to flat interferometer and spherical reflector are adjusted, until zero order interference fringe and wave aberration minimum occur, determine spherical reflector, parallel light tube and flat interferometer common optical axis, spheric reflection mirror foci and directional light tubular axis part of the body cavity above the diaphragm housing the heart and lungs point parfocalization;
Step 3: will break up plate and be mounted in focus adjusting mechanism on focal surface of collimator tube, make delineation one side of target pattern be arranged towards flat interferometer, and spherical reflector is shifted out light path, the fine setting focus adjusting mechanism, with the graticule center and flat interferometer sends and the hot spot that converges after parallel light tube focuses on aligns, then finely tune the angle of pitch, the position angle of graticule, and along optical axis direction, graticule is carried out front and back out of focus adjustment;
Step 4: the interference fringe to the step 3 of flat interferometer collection is calculated, obtain the Zernike coefficient relevant to wave aberration, the defocusing amount Δ d of graticule and the Power value in the Zernike coefficient, interfering beam bore D and parallel light tube focal distance f ' mathematical relation as follows:
By above formula, calculate the defocusing amount of graticule, and judge adjustment direction and distance to graticule by result of calculation, realize the parallel light tube graticule high precision Method of Adjustment based on the plane interference principle.
2. the parallel light tube graticule high precision Method of Adjustment based on the plane interference principle as claimed in claim 1, is characterized in that, described spherical reflector is regulated relative position with parallel light tube and flat interferometer by micro-adjusting mechanism.
3. the parallel light tube graticule high precision Method of Adjustment based on the plane interference principle as claimed in claim 1, is characterized in that, the target surface that the geometric center of described differentiation plate has a Φ (2 ± 0.01) mm plates highly reflecting films on target surface.
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Cited By (5)
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| CN105571833A (en) * | 2015-12-23 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Wave-aberration indoor detection method of large-caliber photoelectric detection system at different elevations |
| CN108196364A (en) * | 2018-01-04 | 2018-06-22 | 中国人民解放军国防科技大学 | Method for calculating optical system detuning amount based on plane mirror view field adjustment |
| CN108426699A (en) * | 2018-01-29 | 2018-08-21 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection method of optical system image planes defocusing amount |
| CN109580173A (en) * | 2018-11-26 | 2019-04-05 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
| CN110887637A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Coaxial collimator optical axis leading-out device and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105571833A (en) * | 2015-12-23 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Wave-aberration indoor detection method of large-caliber photoelectric detection system at different elevations |
| CN105571833B (en) * | 2015-12-23 | 2018-06-22 | 中国科学院长春光学精密机械与物理研究所 | Wave aberration indoor detection method under the heavy caliber photoelectric detecting system difference elevation angle |
| CN108196364A (en) * | 2018-01-04 | 2018-06-22 | 中国人民解放军国防科技大学 | Method for calculating optical system detuning amount based on plane mirror view field adjustment |
| CN108196364B (en) * | 2018-01-04 | 2020-04-17 | 中国人民解放军国防科技大学 | Method for calculating optical system detuning amount based on plane mirror view field adjustment |
| CN108426699A (en) * | 2018-01-29 | 2018-08-21 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection method of optical system image planes defocusing amount |
| CN108426699B (en) * | 2018-01-29 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | A kind of detection method of optical system image planes defocusing amount |
| CN109580173A (en) * | 2018-11-26 | 2019-04-05 | 中国科学院长春光学精密机械与物理研究所 | Using interferometer to non-achromatic optical system adjustment detection method and system |
| CN110887637A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Coaxial collimator optical axis leading-out device and method |
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