CN107764518B - A kind of optical lens focal length measuring equipment and method - Google Patents
A kind of optical lens focal length measuring equipment and method Download PDFInfo
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- CN107764518B CN107764518B CN201710879447.4A CN201710879447A CN107764518B CN 107764518 B CN107764518 B CN 107764518B CN 201710879447 A CN201710879447 A CN 201710879447A CN 107764518 B CN107764518 B CN 107764518B
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- optical lens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
A kind of measuring device and method of heavy caliber focal length optical lens focal length, device include interferometer, standard spherical reflector, photoelectric auto-collimator, laser tracker and data processing unit.The directional light that adjustment optical system for testing is emitted the optical axis of optical lens with interferometer is parallel, a small-bore standard spherical reflector is placed in rear focus theoretical position, by standard spherical surface reflector alignment to rear focus physical location, the spatial position of laser tracker measurement standard spherical reflector.Interferometer deflection, measures deflection angle, by standard spherical surface reflector alignment to rear focus physical location, measures standard spherical reflector spatial position at this time with laser tracker.Data processing unit calculates the focal length for obtaining optical lens according to the spatial position change amount of interferometer deflection angle and standard spherical reflector.The present invention can be used for the focometry of different-waveband heavy caliber focal length optical lens, have highly important application in the adjustment and test of space optical remote sensor.
Description
Technical field
The present invention relates to the measuring devices and method of heavy caliber focal length optical lens focal length, belong to aerospace optical remote sensing technology
Field.
Background technique
In the technical fields such as optical measurement and remote sensing mapping, it all be unable to do without high-precision optical lens.Focal length is as light
One of most important parameter of camera lens is learned, participates in the calculation processing after image obtains to critical datas such as target size, distances, therefore
Guarantee that the accuracy of focometry is particularly significant.
The focometry of optical lens mainly uses magnifying power method, precision angle method, fourier spectrum point both at home and abroad at present
Analysis method and Taibo Moire technique.Magnifying power method is higher to glass sieve plate graduating accuracy and parallel light tube focal length accuracy requirement, for growing
The error of burnt optical lens focometry is larger, and for details, reference can be made to a kind of focimeters of document CN201520125766.2.It is logical
Cross the precision angle method that pentaprism and graticle combine, measurement accuracy by human eye collimating fault, division of the graticule precision and
The limitation of graticle placement position, the subjective factor that measurement result introduces is more, even with repeatedly measuring the side being averaged
Method, measurement error are at most controlled to ± 1%, and for details, reference can be made to a kind of raising long-focus directional lights of document CN201010179464.5
The method of pipe focal length detection accuracy.Fourier analysis method is calculated using the measured value of the interference fringe spacing on frequency plane
Lens focus, it is very high to the dimensional measurement required precision of object and picture, and the determination of focal plane position acquires a certain degree of difficulty, specifically
It can be found in document Dong Yongmian, symmetrical double circular hole Fourier transform interference the Schlieren method surveys focal length [J], laser technology, 2001,25 (1):
70-72.Taibo Moire technique is the amplification characteristic using Taibo from imaging and moiré topography, by being put into before and after tested camera lens
Moire fringe situation of change calculates focal length, to the stated accuracy requirement of grating space and grid line angle during focometry
It is very high, and need frequently to move tested camera lens in test process, apply, tool cumbersome in heavy caliber focal length optical lens
Body can be found in document CN201310001055.X one kind and be based on the matched long focus length of lens measurement method of Moire fringe.Red
In the outer and focometry of ultraviolet optics camera lens, also needs using corresponding photodetector acquisition image and handle, but be limited by
Existing infrared and UV photodetector pixel dimension and photosensitive property, traditional measurement method are more difficult to realize the high-precision of focal length
Degree measurement.
Summary of the invention
Technology of the invention solves the problems, such as: in place of overcome the deficiencies in the prior art, providing a kind of optical lens focal length survey
Device and method is measured, solves that existing heavy caliber focal length optical lens focal-length measurement method is cumbersome, measurement accuracy is difficult to
The problems such as guarantee.
The technical scheme is that a kind of optical lens focal length measuring equipment, including interferometer, standard spheric reflection
Mirror, photoelectric auto-collimator, laser tracker and data processing unit；The diameter range of standard spherical reflector is 5mm to 20mm,
Standard spherical reflector is placed on optical lens rear focus theoretical position, and interferometer is to optical lens emitting parallel light, optics
Directional light is converged in rear focus position by camera lens, and standard spherical reflector reflects the light of convergence, and interferometer reception is marked
The reflection of director sphere reflecting mirror and the light by optical lens；The emergent light angle value of photoelectric auto-collimator stellar interferometer swashs
The spatial position of the optical tracker system measurement standard spherical reflector centre of sphere；Data processing unit according to interferometer deflect front and back laser with
The emergent light angle of the interferometer of the spatial position and photoelectric auto-collimator measurement of the standard spherical reflector centre of sphere of track instrument measurement
Value calculates and obtains optical lens focal length.
The measuring device further includes laser beam expander, and laser beam expander is placed in interferometer and optical lens to be tested
Between；The light admission port for the directional light covering optical lens that the laser being emitted from interferometer is emitted after laser beam expander expands
Diameter.Interferometer and laser beam expander are installed in on horizontal and pitch angle regulatory function pedestal.
Method using device measurement optical lens focal length includes the following steps:
1) optical system for testing is debugged, it is parallel to adjust the directional light that optical lens to be tested is emitted its optical axis with interferometer, root
Standard spherical reflector is adjusted according to the interference fringe on interferometer, makes the sphere center position and optical lens picture of standard spherical reflector
Square focus physical location is overlapped.
2) the emergent light angle value (h of photoelectric auto-collimator stellar interferometer is used1, v1), this is measured using laser tracker
Spatial position (the x of the markers director sphere reflecting mirror centre of sphere1, y1, z1)；
3) 0.15 ° -0.25 ° of interferometer is deflected, standard spherical surface reflector position is adjusted according to interference fringe on interferometer, is made
The sphere center position of standard spherical reflector and the rear focus physical location of optical lens are overlapped, and are measured using photoelectric auto-collimator
Emergent light angle value (the h of interferometer at this time2, v2), the space of the standard spherical reflector centre of sphere at this time is measured using laser tracker
Position (x2, y2, z2)；
4) spatial position for the standard spherical reflector centre of sphere that front and back laser tracker measures twice is deflected according to interferometer
The emergent light angle value of the interferometer measured twice with photoelectric auto-collimator, data processing unit calculate the coke for obtaining optical lens
Away fromWherein, d is the variable quantity that interferometer deflects front and back standard spherical reflector centre of sphere spatial position,θ is the angle value of interferometer deflection, θ=arccos (cos (h2-
h1)·cos(v2-v1))。
Compared with the prior art, the invention has the advantages that:
1) the method for the present invention is on the basis of optical lens wavefront optical system for testing, the light wave received using laser interferometer
The wavefront power value characteristic very sensitive to the position of standard spherical reflector, variation and laser by rear focus position
The focal length value of optical lens can be obtained by simple mathematical computations for the variation of interferometer emergent light angle.It is marked by experiment
Large-aperture optical camera lens focal length that is fixed, the use of the method for the present invention focal length measurement being 1.5m, measurement error is less than 0.2%, and optics
The bigger measurement error of lens focus is smaller, and the measurement error 1% of opposite traditional measurement method, measurement accuracy has obtained certain mention
It is high.
2) the method for the present invention is completed to regard on optical lens axis and outside axis during focometry by the rotation of interferometer
The test of field focal position, without rotating or moving large-aperture long-focus optical lens bulky, that quality is heavy, very big journey
Reduce operation difficulty and risk to degree.
3) interferometer that the method for the present invention only needs to change corresponding spectral coverage can realize that visible light, infrared and ultraviolet heavy caliber are long
The high-acruracy survey of burnt optical lens focal length gets rid of photodetector in traditional non-visible optics lens focus measurement method
The limitation of pixel dimension and photosensitive property, measurement accuracy is consistent with visible optical lens focus measurement accuracy, greatly improves
Infrared, the measurement of ultraviolet optics lens focus precision.
Detailed description of the invention
Fig. 1 be the device of the invention schematic diagram；
Fig. 2 is the schematic diagram for being interferometer laser beam expander and pedestal of the present invention.
Specific embodiment
As shown in Figure 1, being the device of the invention schematic diagram, including interferometer 1, standard spherical reflector 3, photoelectric auto-collimation
Instrument 4, laser tracker 5 and data processing unit.The optical frames that interferometer 1, optical lens 2 and standard spherical reflector 3 are built
First 2 wavefront optical system for testing is the basic optical path that focometry is carried out using method of the invention, and standard spherical reflector 3 is placed on
2 rear focus theoretical position of optical lens；Interferometer 1 converges directional light to 2 emitting parallel light of optical lens, optical lens 2
In rear focus position, standard spherical reflector 3 reflects the light of convergence, and interferometer 1 receives anti-by standard spherical reflector 3
Penetrate and pass through the light of optical lens；Photoelectric auto-collimator 4 and laser tracker 5 are respectively used to stellar interferometer 1 and are emitted optic angle
The spatial position of degree and 3 centre of sphere of standard spherical reflector.Data processing unit deflects front and back standard spheric reflection according to interferometer 1
The spatial position of 3 centre of sphere of mirror and the emergent light angle value of interferometer 1 calculate the focal length for obtaining optical lens 2.Wherein standard spherical surface
The diameter range of reflecting mirror 3 is 5mm to 20mm.
The schematic diagram of laser beam expander and pedestal is as shown in Figure 2.Laser beam expander is placed in interferometer 1 and to be tested
Between optical lens 2；The directional light that the laser being emitted from interferometer 1 is emitted after laser beam expander expands covers optical lens
2 clear aperture.Interferometer 1 and laser beam expander are installed in the pedestal with horizontal and pitch angle regulatory function
On.
A kind of measurement method of heavy caliber focal length optical lens focal length of the present invention, detailed process is as follows:
1) optical system for testing is debugged.2 clear aperture of optical lens is placed within the scope of the emergent light bore of interferometer 1, is adjusted
The directional light that optical lens 2 is emitted its optical axis with interferometer 1 is consistent, and fastens optical frames with the fixed device such as screw, briquetting
First 2 at this time where position.3 position of adjustment standard spherical reflector make on interferometer 1 visible interference fringe be not more than 3,
Power value approaches 0 as far as possible, and the sphere center position of standard spherical reflector 3 is the rear focus actual bit of optical lens 2 at this time
It sets.
2) the emergent light angle value (h of 4 stellar interferometer 1 of photoelectric auto-collimator is used1, v1), it is surveyed using laser tracker 5
Measure the centre of sphere spatial position (x of standard spherical reflector 3 at this time1, y1, z1)。
3) inclined field optical path is tested.1 pedestal of interferometer is adjusted, the level of interferometer 1 or pitch angle are deflected 0.2 °, deflection
Afterwards the emergent light of interferometer 1 still have to covering optical lens 2 clear aperture, using 4 stellar interferometer 1 of photoelectric auto-collimator this
When emergent light angle value (h2, v2).Standard spherical reflector 3 is placed in the rear focus theory position of 2 inclined optical paths of optical lens
It sets, adjustment 3 position of standard spherical reflector makes on interferometer 1 that visible interference fringe is not more than 3, power value becomes as far as possible
Nearly 0, the sphere center position of standard spherical reflector 3 is the rear focus physical location of 2 inclined optical paths of optical lens at this time, is used
Laser tracker 5 measures the centre of sphere spatial position (x of standard spherical reflector 3 at this time2, y2, z2)。
4) data processing unit calculates focal length.According to laser tracker 5 and photoelectric auto-collimator 4 measured value twice, utilize
Space geometry mathematic calculation, the variable quantity that 3 centre of sphere spatial position of standard spherical reflector can be obtained areThe deflection angle angle value of 1 emergent light of interferometer is θ=arccos
(cos(h2-h1)·cos(v2-v1)).According to precision angle method principle, the focal length for obtaining optical lens 2 is calculated
The method of the spatial position of 5 measurement standard spherical reflector 3 of laser tracker are as follows: revolved with laser tracker 5 two
The intersection point of shaft is that coordinate origin establishes space coordinates, utilizes auto-collimation principle, laser distance measuring principle and precision angle principle
Calculate coordinate value (x, y, z) of the centre of sphere in space coordinates of standard spherical reflector 3.
The method of the emergent light angle value for the interferometer 1 that photoelectric auto-collimator 4 measures are as follows: adjust light using auto-collimation principle
Electric autocollimator 4 keeps its emergent light optical axis parallel with the standard flat mirror front surface normal direction of interferometer 1, at this time interferometer 1
The relative angle angle value of 4 emergent light of emergent light and photoelectric auto-collimator is defined as (0,0).It is flat according to standard when interferometer 1 deflects
The reflected light of face mirror variable quantity of pixel position on 4 detector of photoelectric auto-collimator calculates the opposite deflection angle of interferometer 1
Degree.
The content that description in the present invention is not described in detail belongs to the well-known technique of professional and technical personnel in the field.
Claims (10)
1. a kind of optical lens focal length measuring equipment, it is characterised in that: including interferometer (1), standard spherical reflector (3), light
Electric autocollimator (4), laser tracker (5) and data processing unit；Standard spherical reflector (3) is placed on optical lens (2)
Rear focus theoretical position；Directional light is converged in picture to optical lens (2) emitting parallel light, optical lens (2) by interferometer (1)
Square focal position, standard spherical reflector (3) reflect the light of convergence, and interferometer (1) is received by standard spherical reflector (3)
Reflection and the light for passing through optical lens；The emergent light angle value of photoelectric auto-collimator (4) stellar interferometer (1), laser tracking
The spatial position of instrument (5) measurement standard spherical reflector (3) centre of sphere；Data processing unit deflects front and back mark according to interferometer (1)
The spatial position of director sphere reflecting mirror (3) centre of sphere and the emergent light angle value of interferometer (1) calculate and obtain optical lens (2)
Focal length.
2. a kind of optical lens focal length measuring equipment according to claim 1, it is characterised in that: further include laser beam expanding dress
It sets；The laser beam expander is placed between interferometer (1) and optical lens to be tested (2)；What is be emitted from interferometer (1) swashs
The clear aperture for directional light covering optical lens (2) that light is emitted after laser beam expander expands.
3. a kind of optical lens focal length measuring equipment according to claim 2, it is characterised in that: the interferometer (1) and
Laser beam expander is installed in on horizontal and pitch angle regulatory function pedestal.
4. a kind of optical lens focal length measuring equipment according to claim 1 to 3, it is characterised in that: the mark
The diameter range of director sphere reflecting mirror (3) is 5mm to 20mm.
5. a kind of method for carrying out optical lens focometry using measuring device as described in claim 1, it is characterised in that:
Include the following steps:
1) optical system for testing is debugged；
2) the emergent light angle value of stellar interferometer (1) measures the spatial position of standard spherical reflector (3) centre of sphere at this time；
3) interferometer (1) is deflected, standard spherical reflector (3) position is adjusted according to interference fringe on interferometer (1), makes standard ball
The rear focus physical location of face reflecting mirror (3) sphere center position and optical lens (2) is overlapped, the emergent light of stellar interferometer (1)
Angle value measures the spatial position of standard spherical reflector (3) centre of sphere at this time；
4) spatial position of standard spherical reflector (3) centre of sphere measured twice according to interferometer (1) deflection front and back and measurement
The emergent light angle value of interferometer (1), data processing unit calculate the focal length f for obtaining optical lens (2).
6. a kind of measurement method of optical lens focal length according to claim 5, is characterized in that: the step 1) debugging is surveyed
Try optical path method particularly includes: it is flat to adjust the directional light that optical lens to be tested (2) is emitted its optical axis and interferometer (1)
Row adjusts standard spherical reflector (3) according to the interference fringe on interferometer (1), makes standard spherical reflector (3) sphere center position
It is overlapped with the rear focus physical location of optical lens (2).
7. a kind of measurement method of optical lens focal length according to claim 5, it is characterised in that: data processing unit meter
Calculate the focal length for obtaining optical lens (2)Wherein, d is that interferometer (1) deflects front and back standard spherical reflector (3) ball
The variable quantity of heart spatial position, θ are the angle value of interferometer (1) deflection.
8. a kind of measurement method of optical lens focal length according to claim 7, it is characterised in that: the interferometer (1)
Deflect the calculation formula of the variable quantity of standard spherical reflector (3) centre of sphere spatial position of front and back are as follows:
Wherein, (x1, y1, z1) it is the spatial position for debugging optical system for testing markers director sphere reflecting mirror (3) centre of sphere, (x2, y2, z2) be
Test the spatial position of inclined field optical path markers director sphere reflecting mirror (3) centre of sphere.
9. a kind of measurement method of optical lens focal length according to claim 7, it is characterised in that: the interferometer (1)
Deflection angle angle value θ=arccos (cos (h2-h1)·cos(v2-v1))；Wherein, (h1, v1) it is to interfere when debugging optical system for testing
The emergent light angle value of instrument (1), (h2, v2) be test inclined field optical path when interferometer (1) emergent light angle value.
10. a kind of measurement method of optical lens focal length according to claim 5-9 any one, it is characterised in that: partially
Become a cadre interferometer (1) when the angular range that deflects be 0.15 ° -0.25 °.
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| CN109238659B (en) * | 2018-09-26 | 2022-02-11 | 北京理工大学 | Lens focal length measuring technology and device based on experimental light ray tracing principle |
| CN109253867B (en) * | 2018-09-27 | 2020-08-14 | 北京空间机电研究所 | Optical system focal length measuring system and method |
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| JP2010091468A (en) * | 2008-10-09 | 2010-04-22 | Olympus Corp | Aberration measurement apparatus |
| CN101852677A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Method for improving focal distance detection precision of long focal distance collimator |
| CN102564731A (en) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Device for measuring focal length and wavefront distortion of lens |
| CN102519397B (en) * | 2011-12-06 | 2015-02-04 | 中国科学院光电技术研究所 | Method for measuring curvature radius of optical spherical surface |
| CN103063415B (en) * | 2013-01-05 | 2015-09-02 | 浙江大学 | A kind of long focus length of lens measuring method based on Moire fringe coupling |
| CN104034352B (en) * | 2014-06-06 | 2017-02-15 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring field curvature of space camera by adopting laser tracker and interference check |
| CN204479272U (en) * | 2015-03-04 | 2015-07-15 | 陶沙 | A kind of focimeter |
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