CN107121095B - A kind of method and device of precise measurement super-large curvature radius - Google Patents
A kind of method and device of precise measurement super-large curvature radius Download PDFInfo
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- CN107121095B CN107121095B CN201710427891.2A CN201710427891A CN107121095B CN 107121095 B CN107121095 B CN 107121095B CN 201710427891 A CN201710427891 A CN 201710427891A CN 107121095 B CN107121095 B CN 107121095B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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Abstract
The invention discloses a kind of device and method of precise measurement super-large curvature radius, which includes: detected element, light source；Spectroscope, inclination are placed between detected element and light source, and the illumination for issuing light source is mapped to detected element surface, will be on the reflected light back to the first grating and the second grating of detected element reflection；First grating and the second grating；For the Taibo picture and the second grating formation Moire fringe that under the irradiation of reflected parallel light, the first grating generates at the second grating；Imaging system；For acquiring Moire fringe image, and transmit it to computer；Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then the radius of curvature of detected element is calculated.The apparatus structure is simple, and is able to achieve the precise measurement to optical element super-large curvature radius.
Description
Technical field
The invention belongs to optical element radius of curvature measurement field more particularly to a kind of precise measurement super-large curvature radius
Method and device.
Background technique
Optical elements of large caliber system is large-scale high power laser system, such as domestic IC F laser driver, American National point
The thousands of all kinds of optics that must be used in fiery device (NIF) and French megajoule laser engineering (Mega-Joule Project)
Element.Only 400 × 500 or more all kinds of bore optical elements just have 8000, wherein being used for the focal length of space filtering and focusing
Just there are 1000 or so away from lens system, therefore effective parameter inspection must be carried out for these large-aperture long-focus optical systems
It surveys.Also big in U.S. LIGO (laser interferometer Gravitational Wave Observatory) system
Amount uses bigbore optical element.
Optical elements of large caliber is dry due to bore big (250mm or more), radius of curvature big (being greater than 10 meters), air agitation etc.
The factor of disturbing seriously affects the precision of test.The spherometer of existing curvature radius measurement method such as contact, from imaging curvature half
Cable diameter gauge and use principle of interference radius of curvature measurement instrument can be realized small radius of curvature (less than 10 meters) high-precision
Measurement.But for super-large curvature radius (being greater than 5000m), it is difficult to obtain using traditional radius measurement means high-precision
How measurement is realized and a large amount of is had great importance using the high-precision measurement of element to these major projects to this kind of.
Therefore, it is necessary to develop a kind of detecting instrument for capableing of accurate super-large curvature radius, it is supplied to laser fusion, gravitation
The precise measurement instrument of optical element in the country such as wave measurement large project, as lens from processing each process to final
The detection foundation and standard that qualification is checked and accepted, to meet the requirement to these optical element quality.
Summary of the invention
In order to solve the problems, such as to be difficult to realize measurement optical element super-large curvature radius in the prior art, the invention proposes
A kind of method and device of precise measurement super-large curvature radius.The apparatus structure is simple, and is able to achieve bent to optical element super large
The precise measurement of rate radius.
First aspect present invention proposes a kind of device of precise measurement super-large curvature radius, including；
Detected element, light source；
Spectroscope, inclination are placed between detected element and light source, and the illumination for issuing light source is mapped to detected element table
Face, will be on the reflected light back to the first grating and the second grating of detected element reflection；
First grating and the second grating；For under the irradiation of reflected parallel light, the first grating to generate at the second grating
Taibo picture and the second grating formed Moire fringe；
Imaging system；For acquiring Moire fringe image, and transmit it to computer；
Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then detected element is calculated
Radius of curvature.
Preferably, the device that first aspect present invention provides further include: be set between spectroscope and light source and for inciting somebody to action
The transmitting light that light source issues becomes the collimation lens of directional light.When light source is closer from detected element, collimation lens is set to
Between light source and spectroscope, diverging light can be become into directional light.
Preferably, the device that first aspect present invention provides further include: for adjusting the pin hole in light emission direction, using
In the first high precision displacement platform of fixed laser and pin hole, the second high-precision for fixing the second grating and imaging system
Displacement platform and high precision displacement for driving the first high precision displacement platform and the second high precision displacement platform mobile drive
Dynamic device.
The laser and pin hole being fixed on the first high precision displacement platform, under the driving of high precision displacement driver,
It can be accurately moved to different positions, by repeatedly measuring the combination power value under different light source positions, and then solved
The radius of curvature for calculating detected element, can effectively eliminate the influence of the collimation of illuminating bundle in this way.
To prevent influence of the air draught to measurement, preferably, whole device is sealed with cover.
Second aspect of the present invention, which provides, a kind of provides the precise measurement super-large curvature radius of system using first aspect
Method specifically includes:
(1) to precise measurement super-large curvature radius system demarcated due to tested focal length value be from first block of grating to
The distance of focus can obtain the accurate standard mirror of multiple groups focal length by accurately moving measured lens along optical axis, realize multisystem
Accurate Calibration；
(2) it drives the first high precision displacement platform to be moved to corresponding position using high precision displacement driver, avoids shining
The influence of the collimation of Mingguang City's beam；
(3) the second high precision displacement platform is driven to be moved to corresponding position using high precision displacement driver, record the
The grid line angle theta of the distance between one grating and the second grating z, the first grating and the second grating；
(4) Moire fringe image is acquired using imaging system, and Moire fringe image is transmitted to computer；
(5) computer is handled moiré topography picture is received, and determines the angle [alpha] of Moire fringe, and is calculated
The radius of curvature Δ r of detected element；
Wherein, s is the distance between the first grating and detected element optical axis, and r is the radius of detected element, value are as follows:
For the period P of the first grating1With the period P of the second grating2Ratio；
The calculation formula of the angle [alpha] of Moire fringe are as follows:
P′1For the period of Taibo picture, according to the enlargement ratio relationship of Taibo pictureIt obtains；
Δ z is the uncertainty of z, and Δ s is the uncertainty of s, and Δ θ is the uncertainty of θ, and Δ α is the uncertainty of α,
Δ β is the uncertainty of β.
Preferably, uncertainty Δ z and uncertainty Δ s is obtained by high-precision optical grating ruler measurement, value is respectively reached
0.1mm and 0.01mm.
Preferably, the acquisition methods of uncertainty Δ α are as follows: since α is the angle of the calculated Moire fringe of computer,
Using the black and white strip pattern with accurately determining angle of a precise Printing, adopted by the image of multiple measuring system
Collecting system obtains the image of pattern and is calculated with the method for Moire fringe angle calculation, obtains the uncertainty Δ α of α,
Value reaches 0.003 °.
The acquisition methods of uncertainty Δ θ are as follows: when tested reflecting surface is plane, while the grid line angle of two blocks of gratings is
At 0 degree, theoretically the period of Morie fringe is infinitely great (acquired image is uniform grayscale image), with this as the starting point, is led to
The angle that accurate turntable controls grid line between two blocks of gratings is crossed, the uncertainty of grid line angle is determined by precision rotation platform,
It is possible thereby to obtain the uncertainty Δ θ of θ, value reaches 0.003 °.
Preferably, the acquisition methods of uncertainty Δ β are as follows: due to the ratio in the period that β is two gratings, pass through scanning
The precise measurement of Electronic Speculum can accurately obtain the uncertainty Δ β of β, value 0.00001.
The device of precise measurement super-large curvature radius of the present invention, is combined with most basic optical gauge, and structure is simple,
It is at low cost and easy to operate during measurement, it can be realized the precise measurement to optical element super-large curvature radius.
Detailed description of the invention
Fig. 1 is first structural schematic diagram of the device for the precise measurement super-large curvature radius applied in embodiment 1；
Fig. 2 is second structural schematic diagram of the device for the precise measurement super-large curvature radius applied in embodiment 1；
Fig. 3 is repeatedly to measure the tested radius of resolving by accurate mobile light source using device shown in FIG. 1 in embodiment 2
Schematic diagram；
Fig. 4 is repeatedly to measure the tested radius of resolving by accurate mobile light source using device shown in Fig. 2 in embodiment 2
Schematic diagram.
Specific embodiment
In order to more specifically describe the present invention, with reference to the accompanying drawing and specific embodiment is to technical solution of the present invention
It is described in detail.
Embodiment 1
As shown in Figure 1, it is 5000m that the device of the precise measurement super-large curvature radius of the present embodiment application, which includes: radius,
Detected element, infrared laser, the microcobjective for playing collimating effect, rise light splitting imaging len, pin hole, period ratio be
1.004018 grating 1 and grating 2, CCD, frosted glass plate, computer and the high precision displacement driver for supporting grating 2, it is red
Outer laser and pin hole are fixed on high precision displacement platform one, and grating 2, frosted glass plate and CCD are fixed on high precision displacement
On platform two.
After to precise measurement super-large curvature radius system calibrating；
Firstly, driving the first high precision displacement platform to be moved to corresponding position using high precision displacement driver, avoid
The influence of the collimation of illuminating bundle；
Then, it drives the second high precision displacement platform to be moved to corresponding position using high precision displacement driver, records
The distance between first grating and the second grating z are that the grid line angle theta of 10m, the first grating and the second grating are 0.3 °；
Next, acquiring Moire fringe image using imaging system, and Moire fringe image is transmitted to computer；
Finally, computer is handled moiré topography picture is received, determine that the angle [alpha] of Moire fringe is
37.4813 °, and the radius of curvature of detected element is calculated are as follows:
Δ r=2*0.1mm (Δ z)+2*0.01mm (Δ s)+24.89m (Δ z)+3.11m (Δ β)+20.67m (Δ θ)+
0.135m (Δ α)=48.80522m
Relative measurement error are as follows:
It is very big to can be seen that Δ z, Δ θ, Δ β influence measurement accuracy from above-mentioned analysis.If can reduce Δ z (makes
10 meters of measurement is less than 0.1mm, strictly controlled environment factor such as temperature humidity, using Reneshaw grating scale apart from uncertainty
It can be further improved precision).According to the radius of specific measuring cell, initial parameter setting, such as grating grid are advanced optimized
Angle, the parameters such as screen periods ratio, can also further increase measurement accuracy.
The present embodiment can also carry out the measurement of detected element radius using structure shown in Fig. 2, in Fig. 2, not collimate
Lens, and playing light splitting is spectroscope.
Embodiment 2
It is taken multiple measurements under the light source position of difference using system described in Fig. 1 by the position of accurate movement light source
Combination power value, schematic illustration is as shown in Figure 3.
Since the light that laser issues is constantly present certain focal power after colimated light system, it is impossible to accomplish ideal
Directional light.Assuming that this focal power isThe focal length for the tested surface that tested radius is R is R/2, then combines focal powerAre as follows:
Wherein d is the distance between colimated light system equivalent lens and measured lens.
Test macro initial position is debugged, and light source is placed near collimation lens focal length.Measured lens are put
It sets in measurement position, acquires Moire fringe, measure the angle of Moire fringe and calculate measured value R at this time1；Accurately to Forward
Dynamic light source δ1, Moire fringe image is acquired, measured value R at this time is calculated2；Continue accurate forward movement light source δ2, identical behaviour
Make, acquires Moire fringe image, measured value R3 at this time is calculated by computer.
According to set imaging formula, Wo Menyou:
U expression thing is away from v1、v2、v3It indicates the image distance under three kinds of states, by above-mentioned various calculating, obtains measured lens
Radius R.
The present embodiment can also pass through the position of accurate movement light source using structure shown in Fig. 2, take multiple measurements not
With the combination power value under point light source position, schematic illustration is as shown in Figure 4.
Technical solution of the present invention and beneficial effect is described in detail in above-described specific embodiment, Ying Li
Solution is not intended to restrict the invention the foregoing is merely presently most preferred embodiment of the invention, all in principle model of the invention
Interior done any modification, supplementary, and equivalent replacement etc. are enclosed, should all be included in the protection scope of the present invention.
Claims (1)
1. a kind of method of precise measurement super-large curvature radius, realizes the device of the precise measurement super-large curvature radius of the method
Include:
Detected element, light source；
Spectroscope, inclination are placed between detected element and light source, and the illumination for issuing light source is mapped to detected element surface, will
On the reflected light back to the first grating and the second grating of detected element reflection；
First grating and the second grating；For the Thailand that under the irradiation of reflected parallel light, the first grating generates at the second grating
Uncle is as forming Moire fringe with the second grating；
Imaging system；For acquiring Moire fringe image, and transmit it to computer；
Computer；The angle of Moire fringe is determined for handling Moire fringe image, and then the curvature of detected element is calculated
Radius；
Collimation lens between spectroscope and light source and for the transmitting light that light source issues to be become to directional light；
For adjust light emission direction pin hole, for fixed laser and pin hole the first high precision displacement platform, be used for
Fix the second high precision displacement platform of the second grating and imaging system and for driving the first high precision displacement platform and the
The mobile high precision displacement driver of two high precision displacement platforms；
The method of the precise measurement super-large curvature radius the following steps are included:
(1) precise measurement super-large curvature radius system is demarcated, since tested focal length value is from first block of grating to coke
The distance of point can obtain the accurate standard mirror of multiple groups focal length by accurately moving measured lens along optical axis, realize multisystem
Accurate Calibration；
(2) it drives the first high precision displacement platform to be moved to corresponding position using high precision displacement driver, avoids illumination light
The influence of the collimation of beam；
(3) it drives the second high precision displacement platform to be moved to corresponding position using high precision displacement driver, records the first light
The grid line angle theta of the distance between grid and the second grating z, the first grating and the second grating；
(4) Moire fringe image is acquired using imaging system, and Moire fringe image is transmitted to computer；
(5) computer is handled moiré topography picture is received, and determines the angle [alpha] of Moire fringe, and is calculated tested
The radius of curvature Δ r of element；
Wherein, s is the distance between the first grating and detected element optical axis, and r is the radius of detected element, value are as follows:
For the period P of the first grating1With the period P of the second grating2Ratio；
The calculation formula of the angle [alpha] of Moire fringe are as follows:
P′1For the period of Taibo picture, according to the enlargement ratio relationship of Taibo pictureIt obtains；
Δ z is the uncertainty of z, and Δ s is the uncertainty of s, and Δ θ is the uncertainty of θ, and Δ α is the uncertainty of α, and Δ β is
The uncertainty of β；
Uncertainty Δ z and uncertainty Δ s is obtained by high-precision optical grating ruler measurement, and value respectively reaches 0.1mm and 0.01mm；
The acquisition methods of uncertainty Δ α are as follows: due to the angle that α is the calculated Moire fringe of computer, by repeatedly measuring
The image capturing system of system obtains the image of pattern and is calculated with the method for Moire fringe angle calculation, obtains α not
Degree of certainty Δ α, value reach 0.003 °；
The acquisition methods of uncertainty Δ θ are as follows: when tested reflecting surface is plane, while the grid line angle of two blocks of gratings is 0 degree
When, theoretically the period of Morie fringe is infinity, with this as the starting point, controls grid between two blocks of gratings by accurate turntable
The uncertainty of the angle of line, grid line angle is determined that, thus to obtain the uncertainty Δ θ of θ, value reaches by precision rotation platform
0.003°；
The acquisition methods of uncertainty Δ β are as follows: due to the ratio in the period that β is two gratings, pass through the accurate survey of scanning electron microscope
Amount, the accurate uncertainty Δ β for obtaining β, value 0.00001.
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| US11821755B1 (en) * | 2023-07-19 | 2023-11-21 | Mloptic Corp. | Moiré-based distance measurement method |
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| CN109883357B (en) * | 2019-04-19 | 2020-08-11 | 北京理工大学 | Transverse subtraction differential confocal paraboloid vertex curvature radius measuring method |
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| WO2021128517A1 (en) * | 2019-12-23 | 2021-07-01 | 深圳市速普仪器有限公司 | Radius of curvature measurement apparatus and radius of curvature measurement method |
| CN117804349B (en) * | 2024-03-01 | 2024-04-30 | 中国科学技术大学 | Grating displacement sensor debugging method based on moire fringe correlation calculation |
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| JP4512822B2 (en) * | 2004-10-20 | 2010-07-28 | 国立大学法人 筑波大学 | Line condensing type Fourier domain interference shape measuring device |
| TW200944749A (en) * | 2008-04-21 | 2009-11-01 | Jing-Heng Chen | Vertical reflective type moire measurement structure for measuring the surface curvature of an object |
| CN101957182B (en) * | 2010-08-04 | 2012-08-08 | 中国科学院光电技术研究所 | Large-caliber high-gradient optical mirror surface on-line measuring system |
| CN101995230A (en) * | 2010-10-29 | 2011-03-30 | 浙江大学 | Talbot effect-based aspheric surface detection system |
| CN102252824B (en) * | 2011-04-12 | 2013-03-27 | 浙江大学 | Compound differential type long-focus measuring device based on Talbot effect |
| CN102331336B (en) * | 2011-06-15 | 2013-05-15 | 浙江大学 | Method and device for measuring focal distance of long-focal-length and large-aperture lens |
| CN102313642B (en) * | 2011-08-30 | 2013-06-05 | 浙江大学 | High-precision focus detection device for long-focus lens |
| CN103063413B (en) * | 2012-12-24 | 2015-06-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
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Inventor after: Hou Changlun Inventor after: Xin Qing Inventor after: Cang Yue Inventor before: Hou Changlun Inventor before: Xin Qing Inventor before: Cang Yue |