CN102252824B - Compound differential type long-focus measuring device based on Talbot effect - Google Patents
Compound differential type long-focus measuring device based on Talbot effect Download PDFInfo
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- CN102252824B CN102252824B CN 201110090601 CN201110090601A CN102252824B CN 102252824 B CN102252824 B CN 102252824B CN 201110090601 CN201110090601 CN 201110090601 CN 201110090601 A CN201110090601 A CN 201110090601A CN 102252824 B CN102252824 B CN 102252824B
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Abstract
The invention discloses a compound differential type long-focus measuring device based on a Talbot effect. The light of a laser source runs through a polaroid, a lambda/4 wave plate, a microscope objective and a collimating mirror, to be divided into two beams by a beam splitter prism, wherein one beam is incident to a standard lens, a first grating and a second grating, to form moire fringes on first ground glass, the first CCD (Charge Coupled Device) is used for collecting the fringes and inputting the fringes to a computer so as to calculate the angle alpha 1 of the fringes, to get a standard lens focus; the other beam is incident to a long-focus lens to be measured, reflected by a reflector and then incident to third and fourth gratings, to form moire fringes on second ground glass, and a second CCD is used for collecting the fringes and inputting the fringes to the computer so as to calculate the angle alpha 2 of the fringes; the alpha 1 and alpha 2 are subjected to differential treatment and the alpha 1 is corrected to obtain a long-focus value; and the standard lens focus and the known standard value thereof are subjected to differential treatment and the long-focus value to be measured is corrected to obtain a focus value of the long-focus lens to be measured finally. According to the device disclosed by the invention, the external interference is eliminated by adopting the two differential treatments, and the high precision measurement for the long-focus lens can be realized.
Description
Technical field
The invention belongs to the optic test field, relate in particular to a kind of composite difference formula Long focal length measurement device based on Tabo effect.
Background technology
In optics, astronomy and the field such as military, long-focus lens is very crucial basic components, is bringing into play more and more important effect, and required focal length is increasing, and bore is also increasing.In large scale system, such as national portfire, long-focus lens is crucial collective optics.The use of long-focus lens needs corresponding detection technique, but high precision detects the measurement that particularly is accurate to several millimeters even hundreds of micron and still has a lot of difficulties at present.The current focal length measuring technique is a lot, just can Measurement accuracy to 2 meter such as spherometer, and precision has ten thousand/.But the increase along with focal length, increase to tens meters to tens meters etc., present method all needs to draw light beam very long mostly, be subject to external interference particularly the impact of air turbulence and external shock be difficult to eliminate, and the aberration in the light path own is difficult to realize high-acruracy survey along with the also increase of measurement impact of the increase focusing position of focal length.Therefore the long-focus precision measurement method and the device that are easy to realize have very large application space.
Summary of the invention
The objective of the invention is for the deficiencies in the prior art, a kind of composite difference formula Long focal length measurement device based on Tabo effect is provided.
A kind of composite difference formula Long focal length measurement device based on Tabo effect comprises LASER Light Source, polaroid, λ/4 wave plates, microcobjective, collimating mirror, Amici prism, long-focus lens to be measured, catoptron, standard lens, the first grating, the second grating, the first frosted glass, a CCD, the 3rd grating, the 4th grating, the second frosted glass and the 2nd CCD; Behind light process polaroid, λ/4 wave plates, microcobjective and the collimating mirror that LASER Light Source is sent, be divided into the two-way light beam by Amici prism, wherein one road light incides standard lens, the first grating and the second grating, form Moire fringe at the first frosted glass, a CCD gathers striped input Computer and calculates angle [alpha]
1, obtain the focal length of standard lens; Another road light incides long-focus lens to be measured, returns to incide the 3rd grating and the 4th grating through mirror reflects, forms Moire fringe at the second frosted glass, and the 2nd CCD gathers striped input computing machine and calculates stripe angle α
2, obtain long focus length of lens to be measured; To α obtained above
1And α
2Do differential corrections long-focus value to be measured, will record standard focal length and actual standard focal length difference and continue to revise long-focus value to be measured, thereby obtain high precision long focus length of lens value to be measured.
Described the first grating, the second grating, the 3rd grating and the 4th grating are the periodicity linear gratings of even structure, and the cycle is 20～100 microns, and thickness is 0.5 ~ 3 millimeter.Described the first grating and the 3rd grating are placed on the automatically controlled displacement platform.Described the second grating and the 4th grating are placed on the automatically controlled angular displacement platform.
The invention has the beneficial effects as follows:
1. the present invention utilizes the composite difference formula to improve measuring accuracy, eliminate the error that the external disturbances such as outside air disturbance, vibrations and flashing be qualitative bring by the method for twice difference, and can revise accurately measured value, thereby obtaining point-device long-focus value, precision can reach ten thousand/.
2. the present invention utilizes Tabo effect and Moire fringe technology, the technology of this diffractometry has higher precision than existing interferometry, need not light path to be elongated compact conformation, measuring accuracy is very high, can realize the high-acruracy survey of long-focus lens and optical system focal length.
3. light path compactness of the present invention simply is easy to realize, utilizes the computer controlled automatic grating to move to regulate talbot distance and grating angle, can realize automatically measuring and the data processing.
Description of drawings
Fig. 1 is based on the composite difference formula Long focal length measurement apparatus structure synoptic diagram of Tabo effect;
Fig. 2 is composite difference process flow diagram of the present invention.
Embodiment
Principle of work of the present invention: the light beam that LASER Light Source is sent is through polaroid and λ/4 wave plate outgoing, enter microcobjective and collimating mirror, form a branch of parallel beam, this parallel beam is divided into the two-way light beam by Amici prism, wherein one road light beam incides standard lens, the first grating and the second grating, the first frosted glass in the second grating back forms Moire fringe, and a CCD gathers striped input Computer and calculates angle [alpha]
1, obtain the focal length of standard lens; Other one road light incides long-focus lens to be measured, returns to incide the 3rd grating and the 4th grating through mirror reflects, forms Moire fringe at the second frosted glass, and the 2nd CCD gathers striped input computing machine and calculates stripe angle α
2, obtain long focus length of lens to be measured.The stripe angle α that the Moire fringe that the one CCD13 collects calculates
1The angle [alpha] that the Moire fringe that collects with the 2nd CCD17 calculates
2Do for the first time calculus of differences, obtain the new stripe angle α of a correction
1, according to α
1Calculate the preliminary focal length value of long-focus lens to be measured; The angle [alpha] that the Moire fringe that collects according to the 2nd CCD17 calculates
2Calculate standard lens focometry value, should value and standard lens focal length exact value do for the second time calculus of differences, and then the preliminary focal length value of long-focus lens to be measured is revised in continuation, thereby obtain long focus length of lens value to be measured, such combined type difference processing can be eliminated the impact of the factors such as air turbulence, external shock and flashing be qualitative, obtains the focal length value of high-precision long-focus lens.Wherein polaroid and λ/4 wave plates can guarantee the light beam one-way transmission, and avoiding reflect stray light to enter laser instrument affects Laser output, thereby affects measuring accuracy.
As shown in Figure 1, a kind of composite difference formula Long focal length measurement device based on Tabo effect comprises LASER Light Source 1, polaroid 2, λ/4 wave plates 3, microcobjective 4, collimating mirror 5, Amici prism 6, long-focus lens to be measured 7, catoptron 8, standard lens 9, the first grating 10, the second grating 11, the first frosted glass 12, a CCD 13, the 3rd grating 14, the 4th grating 15, the second frosted glass 16 and the 2nd CCD17; Behind light process polaroid 2, λ/4 wave plates 3, microcobjective 4 and the collimating mirror 5 that LASER Light Source 1 is sent, be divided into the two-way light beam by Amici prism 6, wherein one road light incides standard lens 9, the first grating 10 and the second grating 11, form Moire fringe at the first frosted glass 12, a CCD13 gathers striped input Computer and calculates angle [alpha]
1, obtain the focal length of standard lens; Another road light incides long-focus lens 7 to be measured, reflects through catoptron 8 and incides the 3rd grating 14 and the 4th grating 15, forms Moire fringe at the second frosted glass 16, and the 2nd CCD17 gathers striped input computing machine and calculates stripe angle α
2, obtain long focus length of lens to be measured; The stripe angle α that the Moire fringe that the one CCD13 collects calculates
1The angle [alpha] that the Moire fringe that collects with the 2nd CCD17 calculates
2Do for the first time calculus of differences, obtain the new stripe angle α of a correction
1, according to α
1Calculate the preliminary focal length value of long-focus lens to be measured; The angle [alpha] that the Moire fringe that collects according to the 2nd CCD17 calculates
2Calculate standard lens focometry value, should value and standard lens focal length exact value do for the second time calculus of differences, and then continue to revise the preliminary focal length value of long-focus lens to be measured, thereby obtain high-precision long focus length of lens value to be measured.
Described the first grating 10, the second grating 11, the 3rd grating 14 and the 4th grating 15 are periodicity linear gratings of even structure, and the cycle is 20～100 microns, and thickness is 0.5 ~ 3 millimeter; Described the first grating 10 and the 3rd grating 14 are placed on the automatically controlled displacement platform, and it is mobile at optical axis direction automatically to control the first grating 10 and the 3rd grating 14; Described the second grating 11 and the 4th grating 15 are placed on the automatically controlled angular displacement platform, can automatically control the second grating 11 and the 4th grating 15 rotates in the vertical optical axis direction.
Be based on as shown in Figure 2 the composite difference process flow diagram of the composite difference formula Long focal length measurement method and apparatus of Tabo effect, calculate the Moire fringe angle [alpha] that a CCD13 gathers
1Moire fringe angle [alpha] with the 2nd CCD17 collection
2The α that obtains revising after the difference processing for the first time
1Thereby obtain the preliminary focal length value of long-focus lens to be measured, for the first time difference can be eliminated the impact of the factors such as air turbulence, vibrations and flashing be qualitative, because the stripe pattern that two CCD collect is to be obtained by the two-way light beam that Amici prism 6 is told, is a kind of omnibus system; Moire fringe angle [alpha] according to the 2nd CCD17 collection
2Calculate the focometry value of standard lens, the accurate focal length value of this value and known standard lens is done for the second time difference processing, the correction that obtains is incorporated in the preliminary focal length value of long-focus lens to be measured, thereby obtain the accurately very high long focus length of lens value to be measured of precision, difference processing can further be eliminated error for the second time, thereby obtains high precision long focus length of lens value.
Claims (4)
1. the composite difference formula Long focal length measurement device based on Tabo effect is characterized in that comprising LASER Light Source (1), polaroid (2), λ/4 wave plates (3), microcobjective (4), collimating mirror (5), Amici prism (6), long-focus lens to be measured (7), catoptron (8), standard lens (9), the first grating (10), the second grating (11), the first frosted glass (12), a CCD(13), the 3rd grating (14), the 4th grating (15), the second frosted glass (16) and the 2nd CCD(17); Behind light process polaroid (2), λ/4 wave plates (3), microcobjective (4) and the collimating mirror (5) that LASER Light Source (1) is sent, be divided into the two-way light beam by Amici prism (6), wherein one road light incides standard lens (9), the first grating (10) and the second grating (11), form Moire fringe, a CCD(13 at the first frosted glass (12)) gather striped input Computer and calculate angle [alpha]
1, obtain the focal length of standard lens; Another road light incides long-focus lens to be measured (7), reflect through catoptron (8) and to incide the 3rd grating (14) and the 4th grating (15), form Moire fringe, the 2nd CCD(17 at the second frosted glass (16)) collection striped input computing machine calculating stripe angle α
2, obtain long focus length of lens to be measured; To α obtained above
1And α
2Do differential corrections long-focus value to be measured, will record standard focal length and actual standard focal length difference and continue to revise long-focus value to be measured, thereby obtain high precision long focus length of lens value to be measured.
2. according to claims 1 described a kind of composite difference formula Long focal length measurement device based on Tabo effect, it is characterized in that, described the first grating (10), the second grating (11), the 3rd grating (14) and the 4th grating (15) are the periodicity linear gratings of even structure, cycle is 20～100 microns, and thickness is 0.5 ~ 3 millimeter.
3. according to claims 1 described a kind of composite difference formula Long focal length measurement device based on Tabo effect, it is characterized in that described the first grating (10) and the 3rd grating (14) are placed on the automatically controlled displacement platform.
4. according to claims 1 described a kind of composite difference formula Long focal length measurement device based on Tabo effect, it is characterized in that described the second grating (11) and the 4th grating (15) are placed on the automatically controlled angular displacement platform.
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063413B (en) * | 2012-12-24 | 2015-06-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
| CN103063414B (en) * | 2012-12-24 | 2015-06-24 | 南京理工大学 | Focal length measuring device adopting symmetrical grating |
| CN103063415B (en) * | 2013-01-05 | 2015-09-02 | 浙江大学 | A kind of long focus length of lens measuring method based on Moire fringe coupling |
| CN107702641B (en) * | 2016-08-09 | 2020-08-18 | 广西师范大学 | System and method for detecting transmission wave surface of aspheric lens |
| CN107121095B (en) * | 2017-06-08 | 2019-10-18 | 杭州电子科技大学 | A kind of method and device of precise measurement super-large curvature radius |
| CN107941473A (en) * | 2017-12-06 | 2018-04-20 | 西南技术物理研究所 | A kind of Long focal length measurement device with fringe contrast automatic regulation function |
| CN109799078B (en) * | 2019-03-08 | 2020-05-15 | 中国科学院长春光学精密机械与物理研究所 | Collimator focal length measuring device and method using moire fringe amplification effect |
| CN113237898A (en) * | 2021-05-21 | 2021-08-10 | 七海测量技术（深圳）有限公司 | Detection apparatus for Moire interference light detects glass surface defect |
| CN113819998B (en) * | 2021-09-18 | 2024-01-16 | 中北大学 | Multidimensional angular vibration sensor based on two-dimensional single-layer grating structure |
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| JPS60247133A (en) * | 1984-05-22 | 1985-12-06 | Yoshiaki Nakano | Focal-length measuring method of lens by using moire fringe |
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| CN101852676A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Method and device for multifocal holographic differential confocal super-long focus measurement |
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Application publication date: 20111123 Assignee: Hangzhou Zhida Electro-Optical Co.,Ltd. Assignor: Zhejiang University Contract record no.: 2013330000357 Denomination of invention: Compound differential type long-focus measuring device based on Talbot effect Granted publication date: 20130327 License type: Exclusive License Record date: 20131127 |
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