CN113819998B - Multidimensional angular vibration sensor based on two-dimensional single-layer grating structure - Google Patents
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The invention belongs to the technical field of angle vibration sensors, and particularly relates to a multidimensional angle vibration sensor based on a two-dimensional single-layer grating structure, wherein a laser, a beam expander, a beam splitter prism, a two-dimensional grating and a reflecting mirror are arranged in the same optical axis direction, the reflecting mirror is connected with the two-dimensional grating through a limiter, the reflecting mirror is limited in position by the limiter and is arranged at the Talbot distance of the two-dimensional grating, the lower surface of the reflecting mirror is connected with the surface of an object to be detected, one side of the beam splitter prism is sequentially provided with a lens and a photoelectric detector, and the lens and the photoelectric detector are positioned in the direction perpendicular to the laser emergent direction of the laser. The invention is based on the two-dimensional grating Talbot image principle, combines a reflecting mirror structure to realize a single grating mirror image self-interference method, and can realize multidimensional angle measurement by only using a single light path and a single grating, thereby remarkably simplifying the sensor structure, reducing the sensor size and improving the device integration level.
Description
Technical Field
The invention belongs to the technical field of angular vibration sensors, and particularly relates to a multidimensional angular vibration sensor based on a two-dimensional single-layer grating structure.
Background
Accurate angular vibration measurement is an important technical field of the modern mechanical industry and is one of the basic conditions for promoting the progress and development of the modern industry. With the rapid development of precision machining, semiconductor manufacturing, and the like, the development of related high-precision manufacturing systems is increasingly urgent for the demands of small-volume, high-precision, and small-angle angular vibration sensors. Compared with the traditional mechanical and electromagnetic angle measurement technology, the optical angle measurement technology has the advantages of high sensitivity, high precision, non-contact and the like, and becomes a popular research direction of the angle measurement technology. The grating type optical detection method is widely applied to the angular vibration measuring sensor because of the advantages of simple structure, high stability, electromagnetic interference resistance and the like. At present, the main working principle of the device is based on the moire fringe effect of the double-layer grating, the imaging devices such as CCD and the like and image processing software are utilized to detect the transmission image of the double-layer grating, and the included angle change condition of the two-layer grating are calculated by analyzing image parameters. The method has the problems that 1, at least two imaging devices such as a grating, a CCD array and the like are needed, the size of the device is large, and the integration is difficult; 2. the angle measurement is carried out by analyzing the image, so that the response speed is low; 3. multidimensional measurements cannot be achieved. The above problems limit the further development of such devices to integration and miniaturization.
Disclosure of Invention
Aiming at the technical problems that the device is large in size, low in response speed and incapable of achieving multidimensional measurement, the invention provides the multidimensional angular vibration sensor based on the two-dimensional single-layer grating structure, which is small in device size, high in response speed and capable of achieving multidimensional angular measurement.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a multidimensional angle vibration sensor based on two-dimensional individual layer grating structure, includes laser instrument, beam expander, beam splitter prism, two-dimensional grating, stopper, speculum, lens and photoelectric detector, laser instrument, beam expander, beam splitter prism, two-dimensional grating and speculum set up in same optical axis direction, the speculum passes through the stopper to be connected with two-dimensional grating, the speculum passes through stopper restriction position, the speculum sets up in two-dimensional grating's taber distance department, the lower surface of speculum is connected with the object surface that awaits measuring, one side of beam splitter prism has set gradually lens and photoelectric detector, lens and photoelectric detector are located the perpendicular direction of laser instrument laser outgoing direction.
The limiter comprises a first universal joint, a limiting rod, a spring, a ball bush, a shell and a second universal joint, wherein the first universal joint is hinged to the top of the shell, the limiting rod is arranged in the shell, the spring is sleeved on the limiting rod, the ball bush is arranged between the spring and the bottom of the shell, and the limiting rod penetrates through the bottom of the shell and is connected with the second universal joint.
The first universal joint is connected with the two-dimensional grating, and the second universal joint is connected with the reflecting mirror.
The beam splitter prism adopts a polarization beam splitter or a semi-transparent semi-reflective lens.
The two-dimensional grating has a uniform grating period in the X and Y directions.
The Talbot distance is (1/2N+1/4) Z, the N=0, 1,2,3 …, the Z is a conversion period of the Talbot image in the Z-axis direction, theAnd d is a grating period, and lambda is the wavelength of the laser.
The power of the laser is more than 1mW, and the incident light wavelength lambda of the laser and the grating period d of the two-dimensional grating satisfy the relation: 0.2d < lambda <5d, wherein the grating material of the two-dimensional grating is Al, and the transmittance of the two-dimensional grating at the incident wavelength is not lower than 50%.
The two-dimensional grating is provided with a substrate at an incident wavelength, the substrate is made of a semiconductor or metal with low transmittance, and the thickness of the substrate is 300nm.
The laser outputs laser, the beam expander changes the light of the laser into parallel light beams with the diameter larger than 2mm, the parallel light passes through the beam splitting prism to generate transmission light and then enters the two-dimensional grating, the transmission light is periodically distributed in space after the two-dimensional grating under the action of an optical self-imaging mechanism, then the transmission light is reflected by the reflecting mirror and reversely transmitted to pass through the two-dimensional grating again, the secondary transmission light reversely transmits and is reflected by the beam splitting prism, part of the transmission light changes the transmission direction and is focused by the lens and then is detected by the photoelectric detector, when the surface of an object to be detected is inclined, namely, the angle changes, the reflecting mirror is driven to generate angle changes, the angle changes of the reflection light are caused, the secondary modulation transmission light intensity of the two-dimensional grating 4 is changed, the output signal intensity of the photoelectric detector is detected and counted, and the inclination angle and the angular vibration frequency of the surface of the object to be detected are detected.
Compared with the prior art, the invention has the beneficial effects that:
the invention is based on the two-dimensional grating Talbot image principle, combines a reflecting mirror structure to realize a single grating mirror image self-interference method, and can realize multi-dimensional angle measurement by using only a single light path and a single grating, thereby remarkably simplifying the sensor structure, reducing the sensor size and improving the device integration level; according to the invention, through a light intensity detection mode, rapid and real-time angle detection is realized, and the response rate of the device is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the structure of the stopper of the present invention;
FIG. 3 is a schematic diagram of a two-dimensional grating and mirror connection according to the present invention;
FIG. 4 is a cross-sectional view of a two-dimensional grating of the present invention;
FIG. 5 is a top view of a two-dimensional grating of the present invention;
FIG. 6 is a diagram of simulation results of a Talbot image on the XY plane of a two-dimensional grating according to the present invention;
FIG. 7 is a diagram of simulation results of a taber image on the XZ plane of the two-dimensional grating of the present invention;
FIG. 8 is a graph showing the intensity distribution of Talbot images in the Z direction of a two-dimensional grating according to the present invention;
FIG. 9 is a schematic diagram showing the effect of the tilt angle of the equivalent model on the transmitted light intensity;
FIG. 10 is a graph showing the change of the light intensity according to the inclination angle of the equivalent model.
Wherein: 1 is a laser, 2 is a beam expander, 3 is a beam splitter prism, 4 is a two-dimensional grating, 5 is a limiter, 6 is a reflector, 7 is a lens, 8 is a photodetector, 9 is a substrate, 501 is a first universal joint, 502 is a limit rod, 503 is a spring, 504 is a ball bushing, 505 is a housing, and 506 is a second universal joint.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
A multidimensional angle vibration sensor based on a two-dimensional single-layer grating structure is shown in fig. 1, and comprises a laser 1, a beam expander 2, a beam splitting prism 3, a two-dimensional grating 4, a limiter 5, a reflecting mirror 6, a lens 7 and a photoelectric detector 8, wherein the laser 1, the beam expander 2, the beam splitting prism 3, the two-dimensional grating 4 and the reflecting mirror 6 are arranged on the same optical axis direction, the reflecting mirror 6 is connected with the two-dimensional grating 4 through the limiter 5, the reflecting mirror 6 is limited in position through the limiter 5, the reflecting mirror 6 is arranged at the Talbot distance of the two-dimensional grating 4, the lower surface of the reflecting mirror 6 is connected with the surface of an object to be detected, one side of the beam splitting prism 3 is sequentially provided with the lens 7 and the photoelectric detector 8, and the lens 7 and the photoelectric detector 8 are positioned on the vertical direction of the laser 1 in the laser emergent direction.
Further, as shown in fig. 2, the limiter 5 includes a first universal joint 501, a limit rod 502, a spring 503, a ball bushing 504, a housing 505 and a second universal joint 506, the first universal joint 501 is hinged to the top of the housing 505, the limit rod 502 is disposed in the housing 505, the spring 503 is sleeved on the limit rod 502, the ball bushing 504 is disposed between the spring 503 and the bottom of the housing 505, and the limit rod 502 passes through the bottom of the housing 505 to be connected with the second universal joint 506.
Further, as shown in fig. 3, a first gimbal 501 is connected to the two-dimensional grating 4, and a second gimbal 506 is connected to the mirror 6.
Further, it is preferable that the prism 3 is a polarizing beam splitter or a half mirror.
Further, as shown in fig. 4 and 5, the two-dimensional grating 4 has a uniform grating period in the X and Y directions, the two-dimensional grating 4 is provided with a substrate 9 at the incident wavelength, the substrate 9 is made of a semiconductor or metal with low transmittance, and the thickness of the substrate 9 is 300nm.
Further, the Talbot distance is (1/2N+1/4) Z, N=0, 1,2,3 …, Z is the transformation period of the Talbot image in the Z axis direction,d is the grating period and λ is the laser wavelength.
Further, the power of the laser 1 is >1mW, and the relationship between the wavelength λ of the incident light of the laser 1 and the grating period d of the two-dimensional grating 4 is: 0.2d < lambda <5d, the grating material of the two-dimensional grating 4 is Al, and the transmittance of the two-dimensional grating 4 at the incident wavelength is not lower than 50%.
The working flow of the invention is as follows: the laser 1 outputs laser, the beam expander 2 changes the light of the laser 1 into parallel light beams with the diameter larger than 2mm, the parallel light passes through the beam splitting prism 3 to generate transmission light, the transmission light enters the two-dimensional grating 4, the transmission light is periodically distributed in space after the two-dimensional grating 4 under the action of an optical self-imaging mechanism, then the transmission light is reflected by the reflecting mirror 6 and reversely transmitted and passes through the two-dimensional grating 4 again, the secondary transmission light reversely transmitted and is reflected by the beam splitting prism 3, part of the transmission light changes the transmission direction and is focused by the lens 7 and then is detected by the photoelectric detector 8, when the surface of an object to be detected is inclined, namely, the angle change is carried out, the reflecting mirror 6 is driven to generate the angle change, the angle change of the reflection light is caused, the secondary modulation transmission light intensity of the two-dimensional grating 4 is changed, the output signal intensity of the photoelectric detector 8 is detected, the counting is carried out, and the inclination angle and the angular vibration frequency of the surface of the object to be detected.
The specific analysis is as follows:
as shown in fig. 6 and 7, when the system parameters are set reasonably, the light intensity periodic distribution occurs in three directions in the space behind the two-dimensional grating 4, X, Y, Z. In the Z direction, as can be seen from fig. 7, positive and negative images alternately appear in sequence along the Z axis direction, and the positive and negative images have the same shape and size. For the in-plane (XY direction) position, the positive image distribution position corresponds to the grating line (Al line portion) of the grating, and the negative image position corresponds to the grating slit (etched portion) of the grating.
The transformation period of Talbot image in the Z-axis direction is
Where d is the grating period, λ is the laser wavelength, and Z is the period of the taber image in the out-of-plane direction.
For a mirror single grating structure, when the two-dimensional grating 4 is spaced apart from the mirror 6 by L, the structure can be equivalent to two mirror two-dimensional grating structures with a spacing of 2L. When the distance L is (1/2N+1/4) Z and the inclination angle is 0 degree (N=0, 1,2,3 …), the lower layer grating in the equivalent model is just at the position of the integral multiple Talbot image of the upper layer grating, and the lower layer grating lines are overlapped with the Talbot image positive image, so that the structural transmittance is minimum. The output signal of the photodetector 8 is minimal.
When the surface of the object to be measured is inclined, the reflecting mirror 6 is driven to incline. In this case, the equivalent double-layer grating model is equivalent to that in which the lower layer grating is inclined with respect to the upper layer grating. Assuming that the mirror 6 is tilted about the Y-axis, the lower grating position in the equivalent model is shown in fig. 9. As can be seen from the figure, when the inclination occurs, the positions of the lower grating lines and the taber image positive image, which are originally strictly overlapped, are dislocated, so that part of light can penetrate through the lower grating, and the output signal intensity of the photodetector 8 is increased.
The beam splitter prism 3 mainly changes the transmission direction of the reverse secondary transmission light of the two-dimensional grating 4, and can be replaced by optical elements such as a polarization beam splitter, a semi-transparent semi-reflective lens and the like;
in order to ensure that the two-dimensional grating 4 has higher diffraction efficiency and good self-imaging effect, the materials and structural parameters of the two-dimensional grating 4 need to be strictly set. For example, as shown in fig. 6, when the two-dimensional grating 4 is an Al grating, the grating period in the X-axis and Y-axis directions is 2 μm, and the grating thickness is 300nm, a good taber image effect can be generated after the two-dimensional grating 4, and the light intensity spatial distribution period in the in-plane direction (X/Y direction) is the same as the grating period. As shown in fig. 7, there is a periodically varying light intensity distribution in the vertical direction (Z direction) of the gate line. Further, as shown in fig. 8, the light intensity is sinusoidally distributed in the Z direction.
Wherein the reflecting mirror 6 is connected with the surface of the object to be measured. When the angle of the surface of the object to be measured changes, the reflecting mirror 6 is driven to incline, and then the two-dimensional grating 4 is caused to change in the reverse secondary transmission light intensity, so that the output signal intensity of the photoelectric detector 8 changes. As shown in fig. 10, when the reflecting mirror 6 is tilted (i.e., an angle change occurs), the equivalent model is changed, and the light intensity received by the photodetector 8 is changed, so that the angle change can be measured by measuring the change in the intensity of the output signal of the photodetector 8. The intensity of the light received by the photoelectric detector 8 under different angles is calibrated, and the current angle value can be obtained through a table look-up method. For example, according to Table 1, the detected light intensity at the maximum measurement angle (3.25 ℃) is the standard value I 0 When the light intensity received by the photodetector 8 is 0.4I 0 At this time, the mirror angle was found to be 0.25 °. Whenever the light intensity detected by the photodetector 8 reaches 0.4I 0 When the vibration frequency of the object to be measured at a specific angle can be obtained according to the counting times per second.
| Sequence number | Equivalent model angle | Relative light intensity |
| 1 | 0.25 | 0.40 |
| 2 | 0.5 | 0.43 |
| 3 | 0.75 | 0.46 |
| 4 | 1 | 0.47 |
| 5 | 1.25 | 0.51 |
| 6 | 1.5 | 0.56 |
| 7 | 1.75 | 0.61 |
| 8 | 2 | 0.65 |
| 9 | 2.25 | 0.75 |
| 10 | 2.5 | 0.83 |
| 11 | 2.75 | 0.88 |
| 12 | 3 | 0.95 |
| 13 | 3.25 | 1.00 |
Table 1 table of the relative light intensity with the inclination angle of the equivalent model
The parameters of the specific implementation mode are as follows:
laser wavelength: λ=1.5 μm;
laser power: 1.2mW;
two-dimensional grating period: d=2 μm;
two-dimensional grating duty cycle: 0.61;
two-dimensional grating material: al;
substrate material: siO (SiO) 2 ；
Substrate thickness: 300nm.
The light intensity distribution after obtaining the two-dimensional grating 4 when the two-dimensional grating thickness thereof is set to 300nm according to the setting parameters is shown in fig. 6 and 7. In the XY direction, the Talbot period is identical to the grating period and is 2 μm. In the Z direction, taber image distance z=5.3 μm is obtainable from formula (1). To ensure good detection efficiency, the mirror is set at l= (10+1/4) z= 54.325 μm.
When the object to be measured tilts around the Y axis, the reflecting mirror is driven to tilt in the same direction, so that the positions of the grating lines of the lower layer and the Talbot image positive image in the equivalent structure in the X axis direction are misplaced, and cannot strictly block light, and the detection light intensity of the photoelectric detector 8 is increased. Under the case parameters, the relation between the inclination angle and the detected light intensity is shown in table 1. By detecting the intensity of light and counting the intensity of light, the inclination angle and the angle vibration frequency of the Y-axis direction of the object to be detected can be detected. For example, the detected light intensity at 3.25 DEG is taken as a standard value I 0 When the received light intensity of the photodetector 8 in 1s is 0.4I 0 When the count number of (2) is 100, the vibration frequency of the object to be measured around the Y-axis direction at an angle of 0.25 degrees is 100Hz.
Similarly, when the object to be measured tilts around the X axis, the lower layer grating in the equivalent model is dislocated with the position of the Talbot image positive image in the Y axis direction, and cannot strictly block light, so that the detection light intensity of the photoelectric detector 8 is increased. According to the same method, the detection of the angular vibration of the object to be detected around the X axis can be realized.
The preferred embodiments of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present invention, and the various changes are included in the scope of the present invention.
Claims (8)
1. A multidimensional angular vibration sensor based on a two-dimensional single-layer grating structure is characterized in that: including laser instrument (1), beam expander (2), beam splitting prism (3), two-dimensional grating (4), stopper (5), speculum (6), lens (7) and photoelectric detector (8), laser instrument (1), beam expander (2), beam splitting prism (3), two-dimensional grating (4) and speculum (6) set up in same optical axis direction, speculum (6) are connected with two-dimensional grating (4) through stopper (5), speculum (6) limit position through stopper (5), speculum (6) set up in the taber distance department of two-dimensional grating (4), the lower surface of speculum (6)The surface of an object to be detected is connected, a lens (7) and a photoelectric detector (8) are sequentially arranged on one side of the beam splitting prism (3), and the lens (7) and the photoelectric detector (8) are positioned in the vertical direction of the laser emission direction of the laser (1); the Talbot distance is (1/2N+1/4) Z, the N=0, 1,2,3 …, the Z is a conversion period of the Talbot image in the Z-axis direction, theAnd d is a grating period, and lambda is the wavelength of the laser.
2. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 1, wherein: the limiter comprises a first universal joint (501), a limiting rod (502), a spring (503), a ball bushing (504), a shell (505) and a second universal joint (506), wherein the first universal joint (501) is hinged to the top of the shell (505), the limiting rod (502) is arranged in the shell (505), the spring (503) is sleeved on the limiting rod (502), the ball bushing (504) is arranged between the spring (503) and the bottom of the shell (505), and the limiting rod (502) penetrates through the bottom of the shell (505) to be connected with the second universal joint (506).
3. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 2, wherein: the first universal joint (501) is connected with the two-dimensional grating (4), and the second universal joint (506) is connected with the reflecting mirror (6).
4. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 1, wherein: the beam splitter prism (3) adopts a polarization beam splitter or a semi-transparent semi-reflective lens.
5. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 1, wherein: the two-dimensional grating (4) has a uniform grating period in the X and Y directions.
6. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 1, wherein: the power of the laser (1) is more than 1mW, and the incident light wavelength lambda of the laser (1) and the grating period d of the two-dimensional grating (4) meet the relation: 0.2d < lambda <5d, wherein the grating material of the two-dimensional grating (4) is Al, and the transmittance of the two-dimensional grating (4) at the incident wavelength is not lower than 50%.
7. A multi-dimensional angular vibration sensor based on a two-dimensional single-layer grating structure according to claim 1, wherein: the two-dimensional grating (4) is provided with a substrate (9) at an incident wavelength, the substrate (9) is made of a semiconductor or metal with low transmittance, and the thickness of the substrate (9) is 300nm.
8. The method for controlling the multidimensional angular vibration sensor based on the two-dimensional single-layer grating structure according to claim 1, wherein the method comprises the following steps: comprises the following steps: the laser device comprises a laser device (1), a beam expander (2) and a photoelectric detector (8), wherein the laser device (1) outputs laser, the beam expander (2) converts light of the laser device (1) into parallel light beams with the diameter larger than 2mm, the parallel light beams are transmitted by a beam splitting prism (3) to be incident into a two-dimensional grating (4), under the action of an optical self-imaging mechanism, the transmitted light is periodically distributed in space after the two-dimensional grating (4), then the transmitted light is reflected by a reflecting mirror (6) and reversely transmitted again to pass through the two-dimensional grating (4), part of the light is reversely transmitted and reflected by the beam splitting prism (3), and the light intensity is detected by the photoelectric detector (8) after being focused by a lens (7), when the surface of an object to be detected is inclined, namely, the angle change drives the reflecting mirror (6) to generate the angle change, so that the secondary modulation transmitted light intensity of the two-dimensional grating (4) is changed, the output signal intensity of the photoelectric detector (8) is changed, the signal intensity is output by detecting the photoelectric detector (8), and the inclination angle and the angle vibration frequency of the surface of the object to be detected are detected.
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