CN104697443B - A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method - Google Patents
A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method Download PDFInfo
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- CN104697443B CN104697443B CN201510144209.XA CN201510144209A CN104697443B CN 104697443 B CN104697443 B CN 104697443B CN 201510144209 A CN201510144209 A CN 201510144209A CN 104697443 B CN104697443 B CN 104697443B
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Abstract
The invention discloses a kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method, wherein interferometer includes lasing light emitter, spectroscope, photodetector group, stepped corner cube mirror group, mobile corner cube mirror and micromotion platform, wherein lasing light emitter includes n collimated laser beam, n >=2, photodetector group includes n photodetector, stepped corner cube mirror group is composed of by m stepped 1 conventional right-angle speculum of corner cube mirror and m, m >=2, the reflecting surface of each step type corner cube mirror is the n stairstepping plane of reflection, two neighboring plane of reflection spacing isK is natural number；Stepped corner cube mirror group connects micromotion platform.The laser interference phenomenon that the laser interferometer is produced is not only relevant with optical maser wavelength, it is also relevant with stairstepping plane of reflection height difference, acted on by micromotion platform, can further measure the fractional part not being measured in laser interference ripple, significantly improve measurement accuracy.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of motion compensation formula cascade is stepped
Corner reflector laser interferometer and measuring method.
Background technology
The appearance of laser, is developed rapidly ancient interference technique, and laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The measurement such as linear scale, grating, gauge block, the detection of precision lead screw of accurate length, angle；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..In most of laser interference length-measuring systems, Michelson's interferometer or similar light path are all employed
Structure.
The light beam that single frequency laser interferometer is sent from laser, is divided into two-way after beam-expanding collimation by spectroscope, and respectively
Congregation, which is reflected, from stationary mirror and moving reflector produces interference fringe on spectroscope.When moving reflector movement
When, the light intensity change of interference fringe is converted to electric impulse signal by photo-electric conversion element and electronic circuit in recipient etc., passes through
Input forward-backward counter calculates overall pulse number after shaping, amplification, then presses λ in calculating formula L=N × λ/2, formula by electronic computer
For optical maser wavelength (N is electric pulse sum), the displacement L of moving reflector is calculated.During using single frequency laser interferometer, it is desirable to week
Enclose air and be in stable state, various air turbulences can all cause DC level to change and influence measurement result.
One of weakness of single frequency laser interferometer be exactly it is affected by environment serious, it is severe in test environment, measurement distance compared with
When long, this shortcoming is very prominent.Its reason is that it is a kind of DC measurement system, necessarily with the gentle level zero of direct current light
The drawbacks of drift.When laser interferometer moveable mirror is moved, photelectric receiver meeting output signal, if signal has exceeded counter
Triggering level will then be recorded, and if laser beam intensity changes, it is possible to make photosignal less than meter
Count the triggering level of device and counter is stopped counting, the main cause for making laser intensity or interference signal Strength Changes is empty
Gas turbulent flow, lathe mist of oil, influence of the cutting swarf to light beam, as a result light beam is shifted or corrugated is distorted.
The problem of single frequency laser interferometer is due to measurement structure, its measurement accuracy is limited to the wavelength of laser, its precision one
As be only the integral multiple of its wavelength, it is difficult to be lifted again, while the change of measuring environment has considerable influence to measurement result.
Requirement more and more higher with industrial production to accurate measurement, the measurement accuracy to measuring instrument proposes higher requirement.
The content of the invention
It is an object of the invention to overcome existing laser interferometer measurement precision to be limited to optical maser wavelength, measurement accuracy is difficult to
The not enough of lifting cascades stepped corner reflector laser interferometer there is provided a kind of motion compensation formula, and the laser interferometer is existing
On the basis of Michelson laser interferometer, using the stepped corner cube mirror group of multiple light courcess, it is possible to increase the laser interferometer
Measurement accuracy, while the micromotion platform of adaptation results in the fractional part for the interference wave for being difficult to measure during laser interference
Point, it can further improve the measurement accuracy of the laser interferometer.Simultaneously because multi-pass interference state checker, to measurement
The environmental change of light path has higher antijamming capability.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of stepped corner reflector laser interferometer of motion compensation formula cascade, including lasing light emitter, spectroscope, step type are straight
Corner reflection microscope group, mobile corner cube mirror, photodetector group, micromotion platform, the lasing light emitter include n collimated laser beam,
Wherein n >=2, the photodetector group includes n photodetector；The stepped corner cube mirror group includes m ladder
Type corner cube mirror is composed of with m-1 conventional right-angle speculum, wherein m >=2, each stepped corner cube mirror
Reflecting surface is n individual into the step-like plane of reflection, and the two neighboring plane of reflection spacing isWherein k is
Natural number, λ are the optical maser wavelength that lasing light emitter is sent；The stepped right angle reflection of at least one in the stepped corner cube mirror group
Mirror or conventional right-angle speculum one end are connected with removable micromotion platform；The laser that the lasing light emitter is sent passes through the light splitting
Mirror, injects the stepped corner cube mirror group, through in the stepped corner cube mirror group respectively per Shu Jiguang after reflection
Corresponding each photodetector is reflected the laser light to after portion's reflection；The laser that the lasing light emitter is sent passes through the light splitting
Mirror, the every Shu Jiguang directly transmitted incides the mobile corner cube mirror back reflection to corresponding each photodetection respectively
Device.
Laser beam quantity, the quantity of photodetector of the laser interferometer are n (n >=2), and to correspond, rank
Ladder type corner cube mirror group includes m stepped corner cube mirror and is composed of with m-1 conventional right-angle speculum, wherein each
Stepped corner cube mirror has two reflective steps faces at a right angle, and each reflective steps face includes the n plane of reflection, conventional
The reflecting surface of corner cube mirror is two orthogonal planes, and stepped corner cube mirror and conventional right-angle speculum is (referred to as
Corner cube mirror) keep dislocation to be oppositely arranged to reflect.Therefore, every Shu Jiguang of lasing light emitter transmitting is divided into two-way, wherein one
Road laser by dichroic mirror to stepped corner cube mirror group, the reflective steps inside all stepped corner cube mirrors
Behind face and the reflection of conventional right-angle speculum, then reflex to spectroscope at 45 °, after transmit and be ultimately incident upon on detector
One of photodetector；Another road laser of the laser of lasing light emitter transmitting after directly being transmitted in spectroscope, it is incident
Spectroscope is re-reflected into after to mobile corner cube mirror, spectroscope reflects it to same photodetector again, and the photoelectricity is visited
Surveying device can detect whether this two-way optical path difference produces interference state, i.e. phase during mobile corner cube mirror is subjected to displacement
Long interference or destructive interference.Because the plane of reflection on stepped corner cube mirror is into stairstepping, therefore lasing light emitter transmitting
The light path of light path after the cascaded surface reflection that each Shu Jiguang passes through stepped corner cube mirror is differed, while lasing light emitter is sent out
The every Shu Jiguang penetrated is divided into the retardation values reached after two-way after corresponding photodetector and differed, laser interferometer production
Raw interference is not only relevant with the wavelength of laser, goes back and two plane of reflection height differences in reflective steps face have relation,
Because the two neighboring plane of reflection spacing h of the cascaded surface (i.e. the stairstepping plane of reflection) is equal toWherein k
It is the optical maser wavelength that lasing light emitter is sent for natural number, λ, the difference brings the two beam laser optical path differences of the two neighboring plane of reflection to beOne of step type corner cube mirror is re-shoot away by two secondary reflections, and the two beams laser passes through one
Optical path difference after stepped corner cube mirror isThe step type constituted by m stepped corner cube mirror is straight
Optical path difference after corner reflection microscope group isBecause k λ can't influence the interference shape of the laser beam in optical path difference formula
State, onlyDifference can just produce influence to the interference state of the laser beam, therefore, as long as moving corner cube mirror
Relative displacement, moves it distance and is equal to or integer timesDistance, the photodetector on the detector can just detect
Go out its change for being in laser interference state, therefore the accuracy of detection of the laser interferometer then accordingly brings up to optical maser wavelength
Relative to existing laser interferometer can only accuracy of detection be laser wavelength lambda for, the measurement accuracy is significantly improved, should
Measurement accuracy is that the spacing of the two neighboring plane of reflection in reflective steps face on stepped corner cube mirror (is alternatively referred to as height
Or thickness) and lasing light emitter optical maser wavelength determine.
Further, since at least one stepped corner cube mirror or conventional right-angle reflection in stepped corner cube mirror group
Micromotion platform is connected with mirror, the micromotion platform refers to that it can occur very small displacement, and precision reaches the micro-displacement knot of nanometer
Structure, such as when one of stepped corner cube mirror is connected on micromotion platform, micromotion platform is moved, the stepped right angle
The Shu Jiguang optical path differences inside speculum group are the shift length of twice of micromotion platform.It is mobile when micromotion platform is remained stationary as
When certain displacement occurs for corner cube mirror, the photodetector can measure length accuracy and beLaser interference ripple quantity,
Because the precision that photodetector is now measured is integer timesLaser interference wave number amount, and not comprising being less thanLength
Part Δ d is spent, the part also can not possibly simultaneously be embodied not and with the interference quantity of laser interference ripple, therefore the measurement
Laser interference wave number amount it is corresponding apart from d sizes react be in fact in the actual distance that mobile corner cube mirror is subjected to displacement it is whole
It is several times as much asLength thereof；When mobile corner cube mirror is remained stationary as, micromotion platform is subjected to displacement, corresponding stepped straight
Corner reflector can be also subjected to displacement, and the stepped corner cube mirror after being subjected to displacement can change the light path of correspondence laser beam, by
Two beam laser optical path differences received by this photodetector change, and laser interference state change can be produced, until photoelectricity
Detector is detected when generating a laser interference wave number amount, and micromotion platform stop motion now occurs according to micromotion platform
The distance of displacement, which can be calculated, to be obtained moving being less than for corner cube mirror displaced portionThe displacement Δ d of length.
Therefore, the laser interferometry instrument, which can be measured accurately, obtains moving corner cube mirror displacement more accurate
Length, its measurement accuracy, which can be measured, to be less thanThe displacement part of length, so as to improve measurement accuracy.
Due to using in multi-pass interferometry, measurement process, the DC level that each photodetector is detected should be handed over
For change, if the DC level that the change of the measuring environment of a certain light path causes photodetector to measure shifts, and its
The DC level that the photodetector of its optical path is detected do not occur alternately change, now think the optical path be by
To the influence of measuring environment, ignore the change of its level.If the change of the measuring environment of a plurality of light path causes multiple photodetections
The DC level of device measurement shifts, then it is assumed that measuring environment changes, and ignores the change of its level.Only for measuring
The strict situation for meeting the alternating change of multi-pass interference state is just counted to it in journey, i.e., introduced in multi-pass interferometry
AC signal, by the measurement that the measures conversion of DC level in traditional laser interferometry is AC signal.
Preferably, phase on the reflective steps face of each stepped corner cube mirror in the stepped corner cube mirror group
The spacing of adjacent two planes of reflection is equal, is equal toWherein λ is the optical maser wavelength that lasing light emitter is sent.
Because the spacing of the two neighboring plane of reflection on the reflective steps face of each stepped corner cube mirror is equal toBecause incidence angle is 45 degree, and there are m stepped corner cube mirror, therefore the two neighboring plane of reflection that can convert
The optical path difference of the two beam laser reflected is λ/n, as long as mobile corner cube mirror movement integer times λ/2n distance, accordingly
Photodetector just can detect the interference situation of two-way laser, improve accuracy of detection.
Preferably, in the stepped corner cube mirror group all stepped corner cube mirrors be each attached to it is removable described
On micromotion platform, stepped corner cube mirror can be moved integrally.
Preferably, the groups of stepped corner cube mirror group includes three, i.e., stepped corner cube mirror one, ladder
Type corner cube mirror two, corner cube mirror three, wherein the stepped corner cube mirror one, stepped corner cube mirror two are parallel
Set and be connected on the micromotion platform, the corner cube mirror three is relative to the stepped corner cube mirror one, ladder
Type corner cube mirror two is set.
Preferably, the micromotion platform is piezoelectric ceramics.
Piezoelectric ceramics be it is a kind of can be by mechanical energy and the ceramic material of the mutual phase transformation of electric energy, it is under electric field action
The deformation quantity very little of generation, is no more than the micro-displacement of thousand a ten thousandths of size itself, with repetitive distortion recovery capability,
Stability is good, precision is high.
Preferably, the displacement for connecting the piezoelectric ceramics surface generation of the stepped corner cube mirror group is institute
The optical maser wavelength of lasing light emitter is stated, its displacement accuracy reaches nano-precision.
Preferably, the n laser beam that the lasing light emitter is sent is equally spaced, and two neighboring laser beam spacing be equal to swash
The integral multiple of optical wavelength.
Preferably, the spacing between two neighboring laser beam is 100-10000 times of optical maser wavelength.
Further to improve a kind of measurement essence of stepped corner reflector laser interferometer of motion compensation formula cascade of the invention
Degree, the present invention also provides a kind of a kind of measurement side of the above-mentioned stepped corner reflector laser interferometer of motion compensation formula cascade
Method, to detect the fraction length for the laser interference ripple for failing to measure, step includes：
Step 1: all stepped corner cube mirror one end of the stepped corner cube mirror group are fixed on described micro-
On moving platform, the lasing light emitter, spectroscope, stepped corner cube mirror group, mobile corner cube mirror, photodetector are adjusted
The position of group；
Step 2: start the lasing light emitter, the laser that the lasing light emitter is sent to the dichroic mirror, after reflection
Laser injects the corresponding stepped corner cube mirror group, is reflexed to through the stepped corner cube mirror group corresponding described
Photodetector group；The laser that the lasing light emitter is sent is to the spectroscope, and the laser light incident after transmission is straight to the movement
Corner reflector, the photodetector group is reflexed to through the mobile corner cube mirror, and photodetector group can detect to swash
Interference of light state, optical interference circuit adjustment is completed；
Step 3: the mobile corner cube mirror to be fixed on to the original position of measurand first, the fine motion is controlled
Platform is moved, until one of them in the photodetector group detects most light laser interference state or most weak laser interference shape
State, now fixes the stepped corner cube mirror group, by the mobile corner cube mirror in optical interference circuit direction displacement
D, the quantity that the correspondence photodetector group measures the laser interference ripple that wavelength is λ is N, i.e., n photodetector is detected
The sum of laser interference ripple be N, the displacement for obtaining the mobile corner cube mirror is now calculated according to laser wavelength lambda
Step 4: the fixed mobile corner cube mirror, controls the micromotion platform movement, makes all m ladders
Type corner cube mirror is moved along laser light incident direction, is done when one of them in the photodetector group measures a laser again
When relating to ripple, i.e. most light laser interference state or most weak laser interference state, now the micromotion platform displacement is l, then may be used
Obtain that mobile corner cube mirror photodetector group in the step 3 is not detected at apart from length Δ d be ml,
Thus, more accurately value is the displacement that can obtain than mobile corner cube mirror described in step 3
Because the moving direction of micromotion platform in above-mentioned steps four is the direction along laser light incident, then its micromotion platform
Displacement l equivalent to the light path 2ml for adding the beam laser, if the light path incrementss of the beam laser are exactly equal to move
Another light beam light path amount 2 Δ d for being less than that the partial distance Δ d of optical maser wavelength brings in dynamic corner cube mirror displacement, i.e., 2
Δ d=2ml, then Δ d=ml, therefore the displacement of mobile corner cube mirror can be obtained more accurately value is
When the direction of displacement of stepped corner cube mirror is the direction along laser reflection, the displacement of its micromotion platform
L is equivalent to the light path 2ml of the beam laser is reduced, if the light path decrement of the beam laser adds mobile corner cube mirror and moved
It is less than another light beam light path amount that the partial distance Δ d of optical maser wavelength is brought in dynamic distance, is exactly equal to an interference wavelengthI.e.It therefore, it can the displacement of mobile corner cube mirror obtained by this method
More accurate value is
Compared with prior art, beneficial effects of the present invention：
1st, the present invention overcomes integral multiple wavelength in the only measurable acquisition laser interference of existing laser interferometer, and measurement accuracy is difficult
The drawbacks of to be lifted, on the basis of existing Michelson laser interferometer, micro-displacement structure is combined in laser interference light path,
To obtain the fraction length for the laser interference ripple for being difficult to obtain in laser interference ranging, the laser interferometer is further improved
Measurement accuracy, it is easy to operate, calculate simple, good reliability；
2nd, just it is counted for strict meet when multi-pass interference state alternately changes in measurement process, i.e.,
AC signal is introduced in multi-pass interferometry, is exchange by the measures conversion of DC level in traditional laser interferometry
The measurement of signal, improves the antijamming capability of interferometer.
Brief description of the drawings：
Fig. 1 is that the laser optical path that motion compensation formula of the present invention is cascaded when stepped corner reflector laser interferometer is used is illustrated
Figure；
Fig. 2 is the structural representation of lasing light emitter in Fig. 1；
Fig. 3 is the structural representation of stepped corner cube mirror in Fig. 1.
Marked in figure：
1st, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3,
Stepped corner cube mirror group, 31, stepped corner cube mirror one, 32, stepped corner cube mirror two, 33, corner cube mirror
Three, 4, mobile corner cube mirror, 5, photodetector group, 51, photodetector one, 52, photodetector two, 53, photoelectricity visits
Survey device three, 54, photodetector four, 6, micromotion platform.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of above-mentioned theme of the invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
As shown in figure 1, a kind of stepped corner reflector laser interferometer of motion compensation formula cascade, including lasing light emitter 1, light splitting
Mirror 2, stepped corner cube mirror group 3, mobile corner cube mirror 4, photodetector group 5, micromotion platform 6, the lasing light emitter 1 include
N collimated laser beam, wherein n >=2, photodetector group 5 equally include n photodetector, stepped corner cube mirror group 3
It is composed of including m stepped corner cube mirror with m-1 conventional right-angle speculum, wherein m >=2, each step type right angle
Speculum includes two orthogonal reflectings surface, and each reflecting surface is between the n stepped plane of reflection, the two neighboring plane of reflection
Away from for(k is natural number).One end of stepped corner cube mirror group 3 is connected with removable micromotion platform 6；
The laser that lasing light emitter 1 is sent passes through spectroscope 2, stepped corner cube mirror group 3 is injected respectively per Shu Jiguang after reflection, through rank
Corresponding each photodetector is reflected the laser light to after the internal reflection of ladder type corner cube mirror group 3, wherein stepped right angle is anti-
The internal reflection for penetrating microscope group 3 be by stepped corner cube mirror and conventional corner cube mirror alternating reflex, i.e., one of them
Stepped corner cube mirror is reflexed to after conventional corner cube mirror reflexes to another stepped corner cube mirror again, then
The stepped corner cube mirror is re-reflected into another conventional corner cube mirror；The laser that lasing light emitter 1 is sent passes through spectroscope
2, the every Shu Jiguang directly transmitted incide the mobile back reflection of corner cube mirror 4 to corresponding each photodetector respectively.
As shown in Fig. 2 four laser beams are equally spaced, i.e., from n=4, respectively laser beam 1, laser beam 2 12,
Laser beam 3 13, laser beam 4 14, and integral multiples of the spacing e equal to optical maser wavelength of two neighboring laser beam.It is two neighboring to swash
Spacing e between light beam is 100-10000 times of optical maser wavelength.If it is optical maser wavelength to select two neighboring laser beam spacing e
10000 times, then 663 nanometers of optical maser wavelength may be selected, then the spacing d of two neighboring laser beam is 6.63 millimeters.Correspondence
Photodetector group 5 also be respectively four, i.e. photodetector 1, photodetector 2 52, photodetector 3 53, light
Electric explorer 4 54.
In addition, groups of stepped corner cube mirror group 3 includes three, i.e., stepped corner cube mirror 1, step type
Corner cube mirror 2 32, corner cube mirror 3 33, wherein stepped corner cube mirror 1, stepped corner cube mirror 2 32 connect
It is connected on micromotion platform 6, can be subjected to displacement with micromotion platform 6, and corner cube mirror 3 33 is anti-relative to stepped right angle
Penetrate mirror and set, realize the translation of light path with reversely.The reflection of the stepped corner cube mirror of each step type corner cube mirror group 3
Cascaded surface is also accordingly included corresponding to four planes of reflection and lasing light emitter 1, photodetector group 5, as shown in figure 3, from four
The plane of reflection is into stairstepping plane in order to processing and reduce cost.The light path route is that the laser that laser beam 1 is sent is dividing
Light microscopic 2 is divided into two-way, and the mirror 2 that is split all the way reflection is injected stepped corner cube mirror group 3 and reflected, i.e., stepped right angle is anti-
Four planes of reflection of mirror 1 are penetrated respectively by every beam laser reflection to the plane of reflection of corner cube mirror 3 33, corner cube mirror
3 33 plane of reflection will be re-reflected into stepped corner cube mirror 2 32 per Shu Jiguang respectively again, finally anti-by stepped right angle
Four on mirror 2 32 planes of reflection are penetrated to reflex to after spectroscope 2, then transmit respectively and inject photodetector 1, photoelectricity visit
Survey device 2 52, photodetector 3 53, photodetector 4 54；Another road of the laser then directly enters after the transmission of spectroscope 2
Mobile corner cube mirror 4 is mapped to, is reflected to after spectroscope 2, spectroscope 2 is again by the laser reflection to photodetector one
51st, photodetector 2 52, photodetector 3 53, photodetector 4 54.
Because stepped corner cube mirror group 3 has selected two stepped corner cube mirrors, therefore, what lasing light emitter 1 was sent
The light path of light path after the reflective steps face reflection that each Shu Jiguang passes through stepped corner cube mirror group 3 is differed, simultaneously
Every Shu Jiguang that lasing light emitter 1 is sent, which is divided into, to be reached the retardation values of corresponding photodetector group 5 and differs after two-way, can
Interfere that phenomenon is not only relevant with the wavelength of laser, also and the level difference of cascaded surface has relation.
N=4, the two neighboring plane of reflection in the reflective steps face of each step type corner cube mirror are selected in the present embodiment
Height differenceThe optical path difference △ d that the two beam laser that the two neighboring plane of reflection is reflected can be calculated are λ/4, because
This, as long as the photoelectricity that mobile corner cube mirror 4 is moved on the distance of λ/8 or the distance of integer times λ/8, the detector is visited
Surveying device group 5 then has one of them to be capable of detecting when that it is in most light laser interference state or most weak laser interference state, therefore should
The accuracy of detection of laser interferometer is then changed into λ/8, relative to existing laser interferometer can only accuracy of detection be laser wavelength lambda and
Speech, the measurement accuracy is significantly improved, and the measurement accuracy is to be reflected by the stepped right angle of stepped corner cube mirror group 3
The two neighboring stepped spacing (alternatively referred to as height or thickness) and the optical maser wavelength of lasing light emitter 1 of the cascaded surface of mirror are determined
It is fixed.
When laser beam 1 is in most strong interference state, i.e., the laser that laser beam 1 is sent is divided into the light after two-way
Path difference value is integral multiple a1λ, a1For natural number, most strong interference state can be measured by photodetector 1, now laser
Beam 2 12 to optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 to the two-way light path of optical interference circuit
Difference is respectively：a2λ-λ/4、a3λ-λ/2、a4λ -3 λ/4, a2、a3、a4For natural number, three's light path is now in non-most capable and experienced
Relate to state.
When the mobile movement of corner cube mirror 4 λ/8, two-way laser retardation values increase λ/4 for being divided into laser beam 1 are swashed
Other laser beams optical path difference △ d of light source 1 also accordingly increase λ/4, and now, the laser that laser beam 1 is sent is divided into the light of two-way
Path difference value is a1λ+λ/4, in non-most strong interference state, and the laser that laser beam 2 12 is sent is divided into the retardation values of two-way then
It is changed into a2λ, therefore photodetector 2 52 is able to detect that optical interference circuit will be in most strong interference state, passes through photodetector
2 52, which can measure it, is in most strong interference state, and the laser of laser beam 3 13 and laser beam 4 14, which is in, non-most capable and experienced relates to shape
State.As the mobile movement of corner cube mirror 4 λ/4, the institute of laser beam 3 13 will be in most strong interference state to optical interference circuit, pass through light
Electric explorer 3 53 can measure most strong interference state.
It is similar, when mobile corner cube mirror 4 moves 3 λ/8, the two-way laser retardation values for being divided into laser beam 4 14
When increasing by 3 λ/4, the laser optical path difference of other laser beams also accordingly increases by 3 λ/4, and the laser that now laser beam 4 14 is sent is divided into
The retardation values of two-way are then changed into a4λ, the two-way light path that its laser beam is divided into will be in most strong interference state, pass through photodetection
Device 4 54 can measure most strong interference state.
Again, as the mobile movement of corner cube mirror 4 λ/2, increase the two-way laser retardation values that laser beam 1 is divided into
Plus during λ, the laser optical path difference of other laser beams also accordingly increases λ, and the institute of laser beam 1 will be in most capable and experienced to optical interference circuit again
State is related to, most strong interference state can be measured by photodetector 1.Therefore, for four-step laser reflection structure institute
Measurement accuracy corresponding to corresponding laser interferometer is just λ/8, that is, moves the displacement of corner cube mirror 4 equal to or more than λ/8, phase
The photodetector group 5 answered can either observe the interference state significant change of the light path for four laser that lasing light emitter 1 is launched.
Above-mentioned signified micromotion platform 6 refers to its device that can occur very small displacement, and its mobile accuracy is nanometer
Precision.
It is preferred that the micromotion platform 6 is piezoelectric ceramics.Piezoelectric ceramics be it is a kind of can be by mechanical energy and the mutual phase transformation of electric energy
Ceramic material, its deformation quantity very little produced under electric field action is no more than thousand a ten thousandths of size itself
Micro-displacement, with repetitive distortion recovery capability, stability is good, precision is high.
Further to improve a kind of measurement essence of stepped corner reflector laser interferometer of motion compensation formula cascade of the invention
Degree, the present invention also provides a kind of a kind of measurement side of the above-mentioned stepped corner reflector laser interferometer of motion compensation formula cascade
Method, detection fails the fractional part of the laser interference ripple measured, and step includes：
Step 1: by all stepped corner cube mirrors of stepped corner cube mirror group 3, i.e., stepped corner cube mirror
One 31, stepped one end of corner cube mirror 2 32 is fixed on micromotion platform 6, adjusts lasing light emitter 1, spectroscope 2, step type straight
Corner reflection microscope group 3, mobile corner cube mirror 4, the position of photodetector group 5；
Step 2: starting lasing light emitter 1, the laser that lasing light emitter 1 is sent is reflected to spectroscope 2, and laser after reflection is injected
Corresponding stepped corner cube mirror group 3, is reflexed to every in corresponding photodetector group 5 through stepped corner cube mirror group 3
Individual photodetector；The laser that lasing light emitter 1 is sent to spectroscope 2, the laser light incident after transmission to mobile corner cube mirror 4,
Photodetector group 5 is reflexed to through mobile corner cube mirror 4, photodetector group 5 can detect laser interference state, interference
Light path adjustment is completed；
Step 3: mobile corner cube mirror 4 to be fixed on to the original position of measurand first, control micromotion platform 6 is moved
It is dynamic, until one of them in photodetector group 5 detects the most strong interference state of laser or most weak interference state, now Fixed-order
Ladder type corner cube mirror group 3, mobile corner cube mirror 4 is surveyed in optical interference circuit direction displacement d, correspondence photodetector group 5
The quantity for obtaining the laser interference ripple that wavelength is λ is that N (do by the laser that n photodetector i.e. in photodetector group 5 is detected
The sum for relating to ripple is N), the displacement for obtaining mobile corner cube mirror 4 is now calculated according to laser wavelength lambda
Step 4: the fixed mobile corner cube mirror 4, controls the micromotion platform 6 to move, make all m ranks
Ladder type corner cube mirror is moved along laser light incident direction, when one of them in the photodetector group 5 measures a laser again
During interference wave, i.e. most light laser interference state or most weak laser interference state, now the displacement of micromotion platform 6 is l, then may be used
Obtain that the mobile corner cube mirror 4 photodetector group 5 in the step 3 is not detected at apart from length Δ d be ml,
Thus, can obtaining described in step 3 the displacement of mobile corner cube mirror 4, more accurately value is
Because the moving direction of micromotion platform in above-mentioned steps four is the direction along laser light incident, then its micromotion platform
Displacement l, equivalent to the light path 4l for adding the beam laser, if the light path incrementss of the beam laser are exactly equal to move
It is less than another light beam light path amount 2 Δ d that the partial distance Δ d of optical maser wavelength is brought in the dynamic displacement of corner cube mirror 4, i.e.,
2 Δ d=4l, then Δ d=2l, therefore the displacement of mobile corner cube mirror 4 can be obtained more accurately value is
If the direction of displacement of the stepped corner cube mirror in step 4 is the direction along laser reflection, its fine motion is put down
The displacement l of platform reduces the light path 4l of the beam laser, if the light path decrement of the beam laser adds movement, right angle is anti-
Another light beam light path amount brought in the displacement of mirror 3 less than the partial distance Δ d of optical maser wavelength is penetrated, one is exactly equal to and does
Relate to wavelengthI.e.Therefore the mobile corner cube mirror that can be obtained by this method
More accurately value is displacement
As shown in figure 1, to include stepped corner cube mirror 1, stepped right angle anti-for stepped corner cube mirror group 3
Mirror 2 32 and corner cube mirror 3 33 are penetrated, now m=2, wherein stepped corner cube mirror 1 and stepped corner cube mirror
2 32 plane of reflection is right angle cascaded surface, and the plane of reflection that corner cube mirror 3 33 is is right-angle plane.When micromotion platform 6
Moving direction is the direction along laser light incident, then the displacement l of its micromotion platform 6, equivalent to the reflection of stepped right angle
Mirror 1 and stepped corner cube mirror 2 32 are moved apart from l along laser light incident direction, and corner cube mirror 3 33 is kept not
It is dynamic, the light path 4l of the beam laser is now added, if the light path incrementss of the beam laser are exactly equal to move corner cube mirror 4
Another light beam light path amount 2 the Δ d, i.e. 2 Δ d=4l, then Δ brought in displacement less than the partial distance Δ d of optical maser wavelength
D=2l, therefore the displacement of mobile corner cube mirror 4 can be obtained more accurately value is
Due to using in multi-pass interferometry, measurement process, the DC level that each photodetector is detected should be handed over
For change, if the DC level that the change of the measuring environment of a certain light path causes photodetector to measure shifts, and its
The DC level that the photodetector of its optical path is detected do not occur alternately change, now think the optical path be by
To the influence of measuring environment, ignore the change of its level.If the change of the measuring environment of a plurality of light path causes multiple photodetections
The DC level of device measurement shifts, then it is assumed that measuring environment changes, and ignores the change of its level.Only for measuring
The strict situation for meeting the alternating change of multi-pass interference state is just counted to it in journey, i.e., introduced in multi-pass interferometry
AC signal, by the measurement that the measures conversion of DC level in traditional laser interferometry is AC signal.
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (9)
1. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade, including lasing light emitter (1), spectroscope (2), ladder
Type corner cube mirror group (3), mobile corner cube mirror (4), photodetector group (5), micromotion platform (6), it is characterised in that：
The lasing light emitter (1) includes n collimated laser beam, wherein n >=2, and the photodetector group (5) includes n photoelectricity and visited
Survey device；
The stepped corner cube mirror group (3) includes m stepped corner cube mirror and matched with m-1 conventional right-angle speculum
Composition, wherein m >=2, the reflecting surface of each stepped corner cube mirror are individual into the step-like plane of reflection, adjacent two for n
The individual plane of reflection spacing isWherein k is that natural number, λ are the optical maser wavelength that lasing light emitter (1) is sent；
Stepped corner cube mirror or conventional right-angle the speculum one end of at least one in the stepped corner cube mirror group (3) connects
It is connected to removable micromotion platform (6)；
The laser that the lasing light emitter (1) sends passes through the spectroscope (2), injects the ladder respectively per Shu Jiguang after reflection
Type corner cube mirror group (3), is reflected the laser light to corresponding each after stepped corner cube mirror group (3) internal reflection
The photodetector；The laser that the lasing light emitter (1) sends passes through the spectroscope (2), the every Shu Jiguang directly transmitted points
Mobile corner cube mirror (4) back reflection is not incided to corresponding each photodetector.
2. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 1, its feature exists
In two neighboring reflection is flat on the reflective steps face of the stepped corner cube mirror in the stepped corner cube mirror group (3)
The spacing in face is equal, is equal toWherein λ is the optical maser wavelength that lasing light emitter (1) is sent.
3. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 1, its feature exists
In all stepped corner cube mirrors are each attached to the removable micromotion platform in the stepped corner cube mirror group (3)
(6) on.
4. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 3, its feature exists
In the stepped corner cube mirror group (3) includes three stepped corner cube mirrors, i.e., stepped corner cube mirror one
(31), stepped corner cube mirror two (32), corner cube mirror three (33), wherein the stepped corner cube mirror one (31),
Stepped corner cube mirror two (32) be arranged in parallel and is connected on the micromotion platform (6), the corner cube mirror three (33)
Relatively described stepped corner cube mirror one (31), stepped corner cube mirror two (32) are set.
5. stepped corner reflector laser interferometer is cascaded according to a kind of any described motion compensation formulas of claim 1-4, its
It is characterised by, the micromotion platform (6) is piezoelectric ceramics.
6. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 5, its feature exists
In the n laser beam that the lasing light emitter (1) is launched is equally spaced, and the spacing of two neighboring laser beam is equal to optical maser wavelength
Integral multiple.
7. a kind of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 6, its feature exists
In the spacing between the two neighboring laser beam that the lasing light emitter (1) sends is 100-10000 times of optical maser wavelength.
8. a kind of measuring method of the stepped corner reflector laser interferometer of motion compensation formula cascade, including such as claim 1-7
Any described stepped corner reflector laser interferometer of a kind of motion compensation formula cascade, it is characterised in that step includes：
Step 1: all stepped corner cube mirror one end of the stepped corner cube mirror group (3) are fixed on described micro-
On moving platform (6), the lasing light emitter (1), spectroscope (2), stepped corner cube mirror group (3), mobile right angle reflection are adjusted
The position of mirror (4), photodetector group (5)；
Step 2: starting the lasing light emitter (1), the laser that the lasing light emitter (1) sends to the spectroscope (2) reflects, through anti-
Laser after penetrating injects the corresponding stepped corner cube mirror group (3), is reflected through the stepped corner cube mirror group (3)
To the corresponding photodetector group (5)；The laser that the lasing light emitter (1) sends is to the spectroscope (2), after transmission
Laser light incident reflexes to the photodetector group to the mobile corner cube mirror (4) through the mobile corner cube mirror (4)
(5), photodetector group (5) can detect laser interference state, and optical interference circuit adjustment is completed；
Step 3: the mobile corner cube mirror (4) to be fixed on to the original position of measurand first, the fine motion is controlled to put down
Platform (6) is mobile, until one of them in the photodetector group (5) detects most light laser interference state or most weak laser is dry
State is related to, the stepped corner cube mirror group (3) is now fixed, by the mobile corner cube mirror (4) in optical interference circuit side
To displacement d, the quantity that the correspondence photodetector group (5) measures the laser interference ripple that wavelength is λ is N, i.e., n photoelectricity
The sum for the laser interference ripple that detector is detected is N, is now calculated according to laser wavelength lambda and obtains the mobile corner cube mirror
(4) displacement
Step 4: the fixed mobile corner cube mirror (4), controls the micromotion platform (6) mobile, make all m ranks
Ladder type corner cube mirror is moved along laser light incident direction, when one of them in the photodetector group (5) measures one again
During laser interference ripple, i.e. most light laser interference state or most weak laser interference state, now micromotion platform (6) displacement
For l, then can obtain that the mobile corner cube mirror (4) photodetector group (5) in the step 3 is not detected at away from
It is ml from length △ d, thus, can obtains more more accurate than the displacement of mobile corner cube mirror (4) described in step 3
It is worth and is
9. a kind of measuring method of stepped corner reflector laser interferometer of motion compensation formula cascade according to claim 8,
Characterized in that, the direction of displacement of the micromotion platform (6) in the step 4 is along the direction of the laser reflection, then
More accurately value is the displacement of mobile corner cube mirror (4) described in the ratio finally obtained
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| CN104964641B (en) * | 2015-06-29 | 2017-10-10 | 成都信息工程大学 | A kind of magnetic micro-displacement platform formula cascade ladder corner reflector laser interferometer and scaling method and measuring method |
| CN105371754B (en) * | 2015-11-27 | 2018-02-02 | 成都信息工程大学 | A kind of measuring method that ladder corner reflector laser interferometer is cascaded using wavelength amendment type multiple beam |
| CN105371756B (en) * | 2015-12-01 | 2018-03-27 | 成都信息工程大学 | A kind of wavelength amendment type multiple beam cascade ladder corner reflector laser interferometer and wavelength modification method |
| CN107014311B (en) * | 2017-05-25 | 2023-05-26 | 南京理工大学 | Novel ball screw nut inner raceway molded surface detection device and method thereof |
| CN111537453A (en) * | 2020-04-23 | 2020-08-14 | 山东省科学院激光研究所 | Two-dimensional multi-point reflection long-optical-path gas sensor probe and gas sensor |
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