CN104697438B - A kind of application method of motion compensation formula corner reflector laser interferometer - Google Patents
A kind of application method of motion compensation formula corner reflector laser interferometer Download PDFInfo
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- CN104697438B CN104697438B CN201510143547.1A CN201510143547A CN104697438B CN 104697438 B CN104697438 B CN 104697438B CN 201510143547 A CN201510143547 A CN 201510143547A CN 104697438 B CN104697438 B CN 104697438B
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Abstract
The invention discloses a kind of application method of motion compensation formula corner reflector laser interferometer, wherein laser interferometer includes lasing light emitter, spectroscope, fine motion corner reflector, measurement corner reflector, photodetector, also include removable micromotion platform, fine motion corner reflector includes a right angle reflecting surface to cave inward with measurement corner reflector, and fine motion corner reflector is connected on micromotion platform；The micromotion platform is preferably piezoelectric ceramics.The improved type angle reflector laser interference instrument is by setting a removable micromotion platform, it is subjected to displacement fine motion corner reflector, conjunction measuring corner reflector, lasing light emitter, spectroscope, photodetector, the fractional part for the interference wave for being difficult to measure during laser interference can be obtained, can further improve the measurement accuracy of the laser interferometer.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of motion compensation formula corner reflector swashs
Optical interferometer and application method.
Background technology
The appearance of laser, developed rapidly ancient interference technique, laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The detection measured such as linear scale, grating, gauge block, precision lead screw of accurate length, angle；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..In most of laser interference length-measuring systems, Michelson's interferometer or similar light path are all employed
Structure.
The light beam that single frequency laser interferometer is sent from laser, two-way is divided into by spectroscope after beam-expanding collimation, and respectively
Congregation, which is reflected, from stationary mirror and moving reflector produces interference fringe on spectroscope.When moving reflector moves
When, the light intensity of interference fringe changes is converted to electric impulse signal by the photo-electric conversion element in recipient and electronic circuit etc., passes through
Input forward-backward counter calculates overall pulse number after shaping, amplification, then presses calculating formula L=N × λ/2 by electronic computer, λ in formula
For optical maser wavelength (N be electric pulse sum), the displacement L of moving reflector is calculated.
One of weakness of single frequency laser interferometer is that only the integer part of laser interference ripple is counted, and for laser
Interference situation present in interventional procedures less than a wavelength is difficult to measure, and measurement accuracy is limited.
The problem of single frequency laser interferometer is due to measurement structure, its measurement accuracy are limited to the wavelength of laser, its precision one
As be only the integral multiple of its wavelength, it is difficult to be lifted again.It is right with requirement more and more higher of the industrial production to accurate measurement
The measurement accuracy of measuring instrument proposes higher requirement.
The content of the invention
It is an object of the invention to overcome integer in the only measurable acquisition laser interference of existing laser interferometer measurement precision
Times wavelength, the drawbacks of measurement accuracy is difficult to lifting, there is provided a kind of motion compensation formula corner reflector laser interferometer, while also provide
A kind of application method, the laser interferometer are this using piezoelectric ceramics on the basis of existing Michelson laser interferometer
Micro-displacement structure, except measurement corner reflector integral multiple can be obtained in addition to the displacement part of optical maser wavelength, moreover it is possible to measure
The displacement part of optical maser wavelength is yielded less than, therefore the laser interferometer greatly improves the survey of conventional laser interference measuring instrument
Accuracy of measurement.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of motion compensation formula corner reflector laser interferometer, including lasing light emitter, spectroscope, fine motion corner reflector, measurement
Corner reflector, in addition to moveable micromotion platform, the fine motion corner reflector include one with the measurement corner reflector
The right angle reflecting surface to cave inward, the fine motion corner reflector are connected on micromotion platform.
It is divided into two beam laser when the laser that the lasing light emitter is sent is to spectroscope, wherein beam of laser is penetrated after dichroic mirror
Enter fine motion corner reflector, photodetector is incided after the reflection of fine motion corner reflector；Another beam of laser is after spectroscope transmits
Measurement corner reflector is incided, reflexes to photodetector through measuring corner reflector, photodetector can detect two beam laser
Interference situation.
Because fine motion corner reflector is connected on micromotion platform, micromotion platform refers to that very small displacement can occurs in it,
Precision reaches nano-precision.When micromotion platform remains stationary as, and certain displacement occurs for measurement corner reflector, photodetector can
The quantity for the laser interference ripple that wavelength is λ is measured, what is now measured due to photodetector is integer laser interference ripple, and
Distance part Δ d not comprising less than optical maser wavelength, the part is not and simultaneously can not possibly be with the interference of laser interference ripple yet
Quantity embodies, therefore distance d sizes reaction corresponding to the laser interference wave number amount of the measurement is measurement corner reflector in fact
The part of integer times optical maser wavelength in the actual distance being subjected to displacement；When measurement corner reflector remains stationary as, micromotion platform is sent out
Raw displacement, corresponding fine motion corner reflector can be also subjected to displacement, and the fine motion corner reflector after being subjected to displacement can change the Shu Ji
The light path of light, thus two beam laser optical path differences received by photodetector change, laser interference, Zhi Daoguang can be produced
Electric explorer detects when generating a laser interference ripple, i.e., most strong interference state or most weak interference state, micromotion platform stop
Stop bit moves, and it is sharp that being less than for measurement angle mirror displacements part can be calculated in the distance being now subjected to displacement according to micromotion platform
The displacement Δ d of optical wavelength.
Therefore, the laser interferometry instrument can be accurately obtained the more accurate long of measurement corner reflector displacement
Degree, can measure the displacement part less than laser interference wavelength, so as to improve measurement accuracy.
Preferably, the micromotion platform is piezoelectric ceramics.
Piezoelectric ceramics is a kind of ceramic material that can change mechanical energy and electric energy mutually, and it is under electric field action
Caused deformation quantity very little, it is no more than the micro-displacement of thousand a ten thousandths of size itself, there is repetitive distortion recovery capability,
Stability is good, precision is high.
Preferably, displacement maximum caused by the piezoelectric ceramics surface of the fine motion corner reflector is connected equal to described
The optical maser wavelength of lasing light emitter, its displacement accuracy can reach nanometer.
The invention also discloses a kind of application method of motion compensation formula corner reflector laser interferometer, including following step
Suddenly：
Step 1: the fine motion corner reflector is fixed on the micromotion platform, the lasing light emitter, light splitting are adjusted
Mirror, fine motion corner reflector, measurement corner reflector, the position of photodetector；
Step 2: starting the lasing light emitter, the laser that the lasing light emitter is sent to the spectroscope is anti-through the spectroscope
Laser light incident after penetrating reflexes to the photodetector to the fine motion corner reflector through the fine motion corner reflector；It is described
The laser that lasing light emitter is sent incides the measurement corner reflector, through described to the spectroscope after spectroscope transmission
Measurement corner reflector reflexes to the photodetector, and photodetector can detect laser interference state, and optical interference circuit is adjusted
Whole completion；
Step 3: measurement corner reflector is fixed on to the original position of the Relative ranging of measurand first, now
Control the micromotion platform to move, fine motion corner reflector is moved along laser light incident direction, when the photodetector measures one
During individual laser interference ripple, most strong interference state or most weak interference state, the fixed micromotion platform.By the measurement corner reflector
In optical interference circuit direction displacement d, the quantity that the corresponding photodetector measures the laser interference ripple that wavelength is λ is N, this
When according to laser wavelength lambda calculate obtain it is described measurement corner reflector displacement
Step 4: the fixed measurement corner reflector, controls the micromotion platform to move, makes the fine motion corner reflector edge
The direction movement of the laser light incident, when the photodetector measures a laser interference ripple again, now micromotion platform
Displacement is l, then can obtain the measurement corner reflector and be less than optical maser wavelength part in the displacement of optical interference circuit direction
The distance, delta d being not detected at be l, thus, can obtain described in step 3 measure corner reflector displacement it is more smart
True value is
Because the moving direction of micromotion platform in step 4 is the direction along laser light incident, then the shifting of its micromotion platform
Dynamic distance l is equivalent to the light path 2l for adding the beam laser, if the light path incrementss of the beam laser are exactly equal to measurement angle
Another light beam light path amount 2 the Δ d, i.e. 2 Δ d=brought in speculum displacement less than the partial distance Δ d of optical maser wavelength
2l, then Δ d=l, therefore can obtain measurement corner reflector displacement more accurately value is
Preferably, the direction of displacement of the fine motion corner reflector in the step 4 is along the side of the laser reflection
To, then more accurately value is the displacement of the measurement corner reflector finally obtained
When the direction of displacement of fine motion corner reflector is the direction along laser reflection, the displacement l phases of its micromotion platform
When in the light path 2l for reducing the beam laser, if the light path decrement of the beam laser is plus measurement corner reflector displacement
In be less than another light beam light path amount for bringing of partial distance Δ d of optical maser wavelength, be exactly equal to an interference wavelength 2 Δ d+2l
=λ, i.e.,Therefore, more accurately value is the displacement for the measurement corner reflector that can be obtained by this method
Compared with prior art, beneficial effects of the present invention：The improved type angle reflector laser interference instrument is by setting one
Individual removable micromotion platform, the fine motion corner reflector with the right angle plane of reflection is arranged on micromotion platform, conjunction measuring angle
Speculum, lasing light emitter, spectroscope, photodetector, swash except integer times in measurement corner reflector displacement can be obtained
The length thereof of optical wavelength, moreover it is possible to which the partial distance less than optical maser wavelength that measurement obtains being difficult to measure during laser interference is grown
Degree, improves the measurement accuracy of the laser interferometer, easy to operate, calculate simple, good reliability.
Brief description of the drawings：
Fig. 1 is that laser optical path when a kind of motion compensation formula corner reflector laser interferometer of the present invention uses is illustrated
Figure.
Marked in figure：
1st, lasing light emitter, 2, spectroscope, 3, fine motion corner reflector, 4, measurement corner reflector, 5, photodetector, 6, fine motion puts down
Platform.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of the above-mentioned theme of the present invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
As shown in figure 1, a kind of motion compensation formula corner reflector laser interferometer, including lasing light emitter 1, spectroscope 2, fine motion angle
Speculum 3, measurement corner reflector 4, photodetector 5, micromotion platform 6, wherein fine motion corner reflector 3 and measurement corner reflector 4
Include the right angle to cave inward a reflecting surface, fine motion corner reflector 3 is connected on micromotion platform 6, the fine motion corner reflector 3
It is the corner reflector that can be subjected to displacement, the displacement of its fine motion is by caused by the movement of micromotion platform 6.
To two beam laser are divided into during spectroscope 2, wherein beam of laser reflects the laser that the lasing light emitter 1 is sent through spectroscope 2
Fine motion corner reflector 3 is injected afterwards, and photodetector 5 is incided after the reflection of fine motion corner reflector 3；Another beam of laser is through spectroscope
Measurement corner reflector 4 is incided after 2 transmissions, reflexes to photodetector 5 through measuring corner reflector 4, photodetector 5 can be examined
Survey the interference situation of two beam laser.
Signified micromotion platform 6 of the invention refers to that the device of very small displacement can occurs in it, and its mobile accuracy can be small
To nanometer range.Because fine motion corner reflector 3 is connected on micromotion platform 6, when measurement corner reflector 4 remains stationary as, fine motion is put down
Platform 6 is subjected to displacement, and corresponding fine motion corner reflector 3 can be also subjected to displacement, the fine motion corner reflector 3 after being subjected to displacement can increase or
Reduce to should Shu Jiguang light path, thus two beam laser optical path differences received by photodetector 5 change, occur
Interference change.
Specifically, when micromotion platform 6 remains stationary as, and certain displacement occurs for measurement corner reflector 4, if the displacement to be measured
Actual value is d '.The quantity for the laser interference ripple that wavelength is λ can be measured by photodetector 5, because photodetector 5 is surveyed
What is measured is integer laser interference wave number amount, and the laser interference wave number amount of the measurement is corresponding to be in fact apart from size reaction
The partial-length d of integer times optical maser wavelength in the actual distance that measurement corner reflector 4 is subjected to displacement, and not comprising in actual value
Less than the partial distance Δ d of optical maser wavelength.When measurement corner reflector 4 remains stationary as, micromotion platform 6 is subjected to displacement, corresponding micro-
Dynamic corner reflector 3 can also be subjected to displacement l, and the fine motion corner reflector 3 after being subjected to displacement can change the light path of the Shu Jiguang, thus
Two beam laser optical path differences received by photodetector 5 change, and can produce the change of laser interference, work as photodetector
5 detect when generating a laser interference ripple, and micromotion platform 6 stops movement, it is assumed that the position amount that micromotion platform 6 occurs is
L, what the displacement occurred according to micromotion platform 6 can be calculated measurement corner reflector 4 displaced portion is less than optical maser wavelength
Displacement Δ d.So the laser interferometry instrument can be accurately obtained the more accurate of the measurement displacement of corner reflector 4
Length, the displacement part less than laser interference wavelength can be measured, so as to improve measurement accuracy.
It is preferred that the micromotion platform 6 is piezoelectric ceramics, piezoelectric ceramics is a kind of can to change mechanical energy and electric energy mutually
Ceramic material, its caused deformation quantity very little under electric field action, it is no more than thousand a ten thousandths of size itself
Micro-displacement, there is repetitive distortion recovery capability, stability is good, precision is high.
The invention also discloses a kind of application method of motion compensation formula corner reflector laser interferometer, including following step
Suddenly：
Step 1: fine motion corner reflector 3 is fixed on the micromotion platform 6, lasing light emitter 1, spectroscope 2, micro- is adjusted
Dynamic corner reflector 3, measurement corner reflector 4, the position of photodetector 5；
Step 2: starting lasing light emitter 1, the laser that lasing light emitter 1 is sent reflects to the spectroscope 2, anti-through the spectroscope 2
The fine motion corner reflector 3 is incident upon, the photodetector 5 is reflexed to through the fine motion corner reflector 3；What lasing light emitter 1 was sent
Laser incides measurement corner reflector 4 after the spectroscope 2 transmission, light is reflexed to through measuring corner reflector 4 to spectroscope 2
Electric explorer 5, photodetector 5 can detect laser interference state, and optical interference circuit adjustment is completed；
Step 3: measurement corner reflector 4 is fixed on to the original position of the Relative ranging of measurand first, now
Control micromotion platform 6 moves, and fine motion corner reflector 3 is moved along laser light incident direction, when photodetector 5 measures a laser
During interference wave, i.e., most strong interference state or most weak interference state, the fixed micromotion platform 6.The measurement corner reflector 4 is existed
Optical interference circuit direction displacement d, the quantity that corresponding photodetector 5 measures the laser interference ripple that wavelength is λ is N, now root
The displacement for obtaining the measurement corner reflector 4 is calculated according to laser wavelength lambda
Step 4: fixation measuring corner reflector 4, control micromotion platform 6 moves, and makes fine motion corner reflector 3 in laser light incident
Direction is moved, and when photodetector 5 measures an interference wave again, now micromotion platform displacement is set to distance l, then may be used
To obtain the part less than optical maser wavelength for failing to be measured by photodetector 5 in the tested measurement displacement of corner reflector 4
Length, therefore step 3 can be obtained survey the exact value of displacement and be
In above-mentioned steps four, when the moving direction of micromotion platform 6 is the direction along laser light incident, then its micromotion platform
6 displacement l is equivalent to the light path 2l for adding the beam laser, if the light path incrementss of the beam laser are exactly equal to survey
Another light beam light path amount 2 Δ d brought in the displacement of angulation speculum 4 less than the partial distance Δ d of optical maser wavelength, i.e., 2
Δ d=2l, then Δ d=l, therefore can obtain measurement corner reflector 4 displacement more accurately value isWhen the direction of displacement of fine motion corner reflector 3 is the direction along laser reflection, its micromotion platform 6
Displacement l equivalent to the light path 2l for reducing the beam laser, if the light path decrement of the beam laser adds measurement angle
Another light beam light path amount brought in the displacement of speculum 4 less than the partial distance Δ d of optical maser wavelength, is exactly equal to one
Interfere the Δ d+2l=λ of wavelength 2, i.e.,Therefore, can by this method obtain measurement corner reflector 4 movement away from
It is from more accurate value
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to above-mentioned each embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (4)
1. a kind of application method of motion compensation formula corner reflector laser interferometer, it is characterised in that including corner reflector laser
Interferometer, the corner reflector laser interferometer, including lasing light emitter (1), spectroscope (2), fine motion corner reflector (3), measurement angle
Speculum (4), photodetector (5), and moveable micromotion platform (6), the fine motion corner reflector (3) and measurement angle are anti-
Penetrate mirror (4) and include the right angle to cave inward a reflecting surface, the fine motion corner reflector (3) is connected to the micromotion platform
(6) on, the application method of the corner reflector laser interferometer comprises the following steps：
Step 1: the fine motion corner reflector (3) is fixed on the micromotion platform (6), adjust the lasing light emitter (1),
Spectroscope (2), fine motion corner reflector (3), measurement corner reflector (4), the position of photodetector (5)；
Step 2: starting the lasing light emitter, the laser that the lasing light emitter (1) sends is to the spectroscope (2), through the spectroscope
(2) laser light incident after reflecting reflexes to the photoelectricity to the fine motion corner reflector (3) through the fine motion corner reflector (3)
Detector (5)；The laser that the lasing light emitter (1) sends incides to the spectroscope (2) after the spectroscope (2) transmission
The measurement corner reflector (4), the photodetector (5), photodetector are reflexed to through the measurement corner reflector (4)
(5) laser interference state can be detected, optical interference circuit adjustment is completed；
Step 3: the original position that corner reflector (4) is fixed on the Relative ranging of measurand, this time control will be measured first
It is mobile to make the micromotion platform (6), fine motion corner reflector (3) is moved along laser light incident direction, when the photodetector (5)
When measuring a laser interference ripple, i.e., most strong interference state or most weak interference state, the fixed micromotion platform (6)；By described in
Measure corner reflector (4) and measure the laser that wavelength is λ in optical interference circuit direction displacement d, the corresponding photodetector (5)
The quantity of interference wave is N, and the displacement for obtaining the measurement corner reflector (4) is now calculated according to laser wavelength lambda
Step 4: the fixed measurement corner reflector (4), controls the micromotion platform (6) mobile, makes the fine motion corner reflector
(3) moved along the direction of the laser light incident, when the photodetector (5) measures a laser interference ripple again, now
Micromotion platform (6) displacement is l, then it is small in the displacement of optical interference circuit direction can to obtain the measurement corner reflector (4)
The distance, delta d being not detected in optical maser wavelength part is l, thus, can obtain and corner reflector (4) is measured described in step 3
Displacement more accurately value is
2. a kind of application method of motion compensation formula corner reflector laser interferometer according to claim 1, its feature exist
In the micromotion platform (6) is piezoelectric ceramics.
3. a kind of application method of motion compensation formula corner reflector laser interferometer according to claim 2, its feature exist
In, connect displacement maximum caused by the piezoelectric ceramics of the fine motion corner reflector (3) equal to the lasing light emitter (1) swash
Optical wavelength.
4. a kind of application method of motion compensation formula corner reflector laser interferometer according to claim 1, its feature exist
In the direction of displacement of the fine motion corner reflector (3) in the step 4 is along the direction of the laser reflection, then most
More accurately value is the displacement of the measurement corner reflector (4) obtained afterwards
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| CN105352435B (en) * | 2015-11-27 | 2018-03-27 | 成都信息工程大学 | Using the measuring method of optical maser wavelength amendment type corner reflector laser interferometer |
| CN105277118B (en) * | 2015-11-27 | 2018-03-27 | 成都信息工程大学 | A kind of optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer |
| CN106989678A (en) * | 2017-06-14 | 2017-07-28 | 山东同其智能科技有限公司 | A kind of device of utilization laser interferometry displacement |
| CN111780664B (en) * | 2020-06-29 | 2021-11-09 | 四川大学 | Output method for simultaneously outputting dual-frequency stripes with orthogonal polarization directions |
| CN112525171B (en) * | 2020-11-24 | 2022-09-13 | 四川省机械技术服务中心有限责任公司 | Large-space high-precision pose measurement system |
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| CN101067546A (en) * | 2006-06-20 | 2007-11-07 | 哈尔滨工业大学 | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component |
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