CN104880147B - The scaling method and measuring method of a kind of magnetic micro-displacement platform formula corner reflector laser interferometer - Google Patents
The scaling method and measuring method of a kind of magnetic micro-displacement platform formula corner reflector laser interferometer Download PDFInfo
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- CN104880147B CN104880147B CN201510374210.1A CN201510374210A CN104880147B CN 104880147 B CN104880147 B CN 104880147B CN 201510374210 A CN201510374210 A CN 201510374210A CN 104880147 B CN104880147 B CN 104880147B
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Abstract
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method and measuring method, the magnetic micro-displacement platform formula corner reflector laser interferometer, include lasing light emitter, fine motion corner reflector, interferometry photodetector, mobile corner reflector, light splitting microscope group and magnetic micro-displacement platform, the fine motion corner reflector is arranged on the magnetic micro-displacement platform, also include reflection measurement photodetector, laser beam is also formed with reflection laser beam after reflexing to the light splitting microscope group through the mobile corner reflector, the reflection laser beam is to the reflection measurement photodetector.The laser interferometer of the application, because reflection measurement photodetector can measure the intensity of mobile corner reflector reflection laser beam, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam, so realizes the purpose of environment resistant interference.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of magnetic micro-displacement platform formula angle is anti-
Penetrate the scaling method and measuring method of mirror laser interferometer.
Background technology
The appearance of laser, is developed rapidly ancient interference technique, and laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The measurement such as linear scale, grating, gauge block, the detection of precision lead screw of accurate length, angle；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..At present, in most of laser interference length-measuring systems, Michelson's interferometer or similar is all employed
Light channel structure, such as, and the single frequency laser interferometer commonly used at present.
Single frequency laser interferometer is the light beam sent from laser, is divided into two-way by spectroscope after beam-expanding collimation, and divide
Congregation is not reflected from stationary mirror and moving reflector produce interference fringe on spectroscope.When moving reflector is moved
When dynamic, the light intensity change of interference fringe is converted to electric impulse signal by photo-electric conversion element and electronic circuit in receiver etc.,
Input forward-backward counter calculates overall pulse number N after shaped, amplification, then presses calculating formula Y=N × λ/2, formula by electronic computer
Middle λ is optical maser wavelength, calculates the displacement Y of moving reflector.
In actual use, inventors herein have recognized that, above-mentioned measurement structure and measuring method are still existed not
Foot：
The problem of current single frequency laser interferometer also has affected by environment serious, laser interferometer moveable mirror is moved
When dynamic, the light intensity change of interference fringe is converted to electric impulse signal by photo-electric conversion element and electronic circuit in receiver etc.,
When for most strong constructive interference, the triggering level that signal exceedes counter is recorded, if environment changes, such as empty
Impurity increases in gas turbulent flow, air, lathe mist of oil, influence of the cutting swarf to laser beam during processing so that the intensity of laser beam
Reduction, now, even there is most strong constructive interference, it is also possible to which intensity is less than the triggering level of counter without being counted.
So, based on above-mentioned deficiency, need badly at present it is a kind of i.e. can environment resistant interference, the sharp of measurement accuracy can be improved again
Optical interferometer.
The content of the invention
It is an object of the invention to can there is provided one kind for the not enough of current laser interferometer environment resistant interference performance difference
The laser interferometer of environment resistant interference.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of magnetic micro-displacement platform formula corner reflector laser interferometer, includes lasing light emitter, fine motion corner reflector, interference
Photodetector, mobile corner reflector, light splitting microscope group and magnetic micro-displacement platform are measured, the fine motion corner reflector is arranged on institute
State on magnetic micro-displacement platform, the laser beam that the lasing light emitter is projected is divided into first laser beam and second after the light splitting microscope group
Laser beam, first laser beam is to the fine motion corner reflector, after being reflected through the fine motion corner reflector again described in directive point
Light microscopic group, then the interferometry photodetector described in directive after light splitting microscope group, second laser beam is to the mobile corner reflection
Mirror, light splitting microscope group described in directive, the interferometry described in directive after light splitting microscope group again after the mobile corner reflector reflection
Photodetector, first laser beam is interfered with second laser beam in interferometry photodetector described in directive, described
Laser interferometer also includes reflection measurement photodetector, and the second laser beam is by the mobile corner reflector directive institute
State and reflection laser beam is also formed with after light splitting microscope group, the reflection laser beam is to the reflection measurement photodetector；
The magnetic micro-displacement platform, includes support platform and the gearshift being arranged in the support platform, institute
State and the first displacement piece is provided with support platform, first displacement piece is connected with institute displacement apparatus, institute's displacement apparatus band
Move first displacement piece to move along the support platform, first displacement piece is inclined relative to its direction of displacement with one
Slided on inclined-plane, the inclined-plane of first displacement piece and be provided with second displacement part, first displacement piece and second displacement part it
Between snug fit, restraint device is additionally provided with the support platform, the restraint device limits the second displacement part along institute
State the motion on the first displacement piece direction of displacement so that when the first displacement piece is driven by institute's displacement apparatus and when producing displacement,
The second displacement part is driven by first displacement piece and produces displacement, the direction of displacement of the second displacement part and described the
The direction of displacement of one displacement piece is perpendicular, and the inclined-plane of first displacement piece and the angle of its direction of displacement are A degree, 0 ＜ A ＜
45, the magnetic magnetic part of tool, the second displacement part tool are additionally provided between first displacement piece and the support platform
It is magnetic, the second displacement part and the magnetic part are there is a natural attraction between the sexes state, the fine motion corner reflector is arranged on described the
In two displacement pieces, moved with second displacement part.
As further preferred scheme, the light splitting microscope group includes the first spectroscope and the second spectroscope, described to swash
The laser beam that light source is projected first is mapped to the first spectroscope, through the first dichroic mirror formation first laser beam, through the first spectroscope
Transmission forms second laser beam, and first laser beam is to the fine motion corner reflector, after reflection again first point described in directive
Light microscopic, then again transmitted through first spectroscope, the second laser beam is to the mobile corner reflector, through the movement
Second spectroscope described in directive after corner reflector reflection, the first spectroscope described in directive after being transmitted through second spectroscope, and
And interfered with the first laser beam that is transmitted from first spectroscope, form interferometry described in directive after interfering beam
Photodetector, second spectroscopical second laser beam is also by described second point as described in the mobile corner reflector directive
Light microscopic reflects to form the reflection laser beam.
The laser interferometer of the application, because reflection measurement photodetector can measure mobile corner reflector reflection laser
The intensity of beam, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam, so realizes environment resistant interference
Purpose；
Also, in this application, fine motion angle is penetrated mirror and is arranged on magnetic micro-displacement platform, displacement is set to fill in support platform
Put and drive the motion of the first displacement piece with the first displacement piece, gearshift, the first displacement piece has one to incline relative to its direction of displacement
Oblique inclined-plane, when gearshift, which provides certain shift value, drives the first displacement piece, due to the presence of restraint device, now,
Second displacement part will produce certain shift value, the shift value of second displacement part on the first displacement piece direction of displacement
It is related to the shift value that gearshift is provided, it is related also to the inclined degree on the first displacement piece inclined-plane, i.e. to set the first displacement piece
The angle on inclined-plane and its direction of displacement is A degree, when the shift value that gearshift is provided is X, the displacement that second displacement part is produced
Value is Y=Xtan (A), and the direction of displacement of second displacement part and the direction of displacement of the first displacement piece are perpendicular, in this way, working as angle
When A is less than 45 degree, a shift value for being less than X values will be obtained, when further reducing included angle A, shift value Y also subtracts therewith
It is small, so so that in the scheme of the application, by way of changing precision with stroke, finally give one and be less than gearshift
The shift value of the second displacement part of output displacement value, directly enhances the precision of the application magnetic micro-displacement platform, also just directly
The mobile accuracy of fine motion corner reflector is improved, the measurement accuracy of the application laser interferometer is directly enhanced.
As further preferred scheme, institute's displacement apparatus is Piezoelectric gearshift.Piezoelectric ceramics can be by
Mechanical energy and the ceramic material of the mutual phase transformation of electric energy, its deformation quantity very little produced under electric field action are no more than
The micro-displacement of thousand a ten thousandths of size itself, with good repetitive distortion recovery capability, stability is good, precision is high, so
Enable the gearshift of the application to provide sufficiently small displacement, further increase the precision of the application micro-displacement platform,
Improve the measurement accuracy of the application laser interferometer.
As further preferred scheme, the laser interferometer also includes processing system, the processing system and institute
Interferometry photodetector and the electrical connection of reflection measurement photodetector are stated, controls the interference to survey by the processing system
The startup and stopping of photodetector and reflection measurement photodetector are measured, and makes the interferometry photodetector data
With reflection measurement photodetector data storage in the processing system, the processing system is also flat with the magnetic micro-displacement
The gearshift electrical connection of platform, the startup and stopping of institute's displacement apparatus, the processing system are controlled by the processing system
Also electrically connected with the lasing light emitter, the startup and stopping of the lasing light emitter are controlled by the processing system.In this application, lead to
Setting processing system is crossed, the data of data and reflection measurement photodetector to interferometry photodetector are stored,
Nominal data storehouse is generated, is compared in actual measurement process by real-time data and the data in nominal data storehouse, and then
Judge the interference situation of current light path；Gearshift of the processing system also with magnetic micro-displacement platform is electrically connected, according to real-time
Measurement result command displacement device output displacement, and then realize the coordination of fine motion corner reflector position controlled, improve this
The adaptability of the laser interferometer of application.
As further preferred scheme, the lasing light emitter, fine motion corner reflector, interferometry photodetector, point
Laser beam in light microscopic group, reflection measurement photodetector between any two be arranged in closing space without with external environment condition
Space is contacted.In this application, lasing light emitter, fine motion corner reflector, interferometry photodetector, light splitting microscope group and reflection measurement
Laser beam between these part any twos of photodetector is arranged in closing space so that in the process measured
In, the laser beam between these above-mentioned parts can't be effected by environmental factors, and then ensure that the application laser interference
The measurement accuracy of instrument.
As further preferred scheme, the laser beam between the light splitting microscope group and the mobile corner reflector is exposed to
Among surrounding air.In actual use, mobile corner reflector is arranged on testee, is moved with testee, so
In the application, the laser beam between light splitting microscope group and mobile corner reflector is exposed among surrounding air, this is so that first
Apply for that laser interferometer is simple in construction, while also facilitating the arrangement of the application laser interferometer.
As further preferred scheme, the second displacement part is integral type structure with the fine motion corner reflector.
In the application, second displacement part and fine motion corner reflector are set to integral structure, that is to say, that in the scheme of the application,
The one side of second displacement part is polished or plated film, the reflecting surface of fine motion corner reflector is made, the reflecting surface is formed
Reflecting surface participate in laser interferometer light path reflection in, in this way, directly eliminate traditional fine motion corner reflector this
One part, also just eliminates the matching relationship between second displacement part and fine motion corner reflector, directly eliminates second displacement part
The presence of mismatch error between fine motion corner reflector, so, not only facilitate the light path adjustment work of the application, but also letter
Change the structure of the application laser interferometer, reduced manufacturing cost and later stage maintenance cost, particularly also reduce this
Apply for the error amount of laser interferometer inside configuration, further improve the measurement accuracy of the application laser interferometer.
Disclosed herein as well is a kind of scaling method for above-mentioned laser interferometer structure,
A kind of scaling method for magnetic micro-displacement platform formula corner reflector laser interferometer, comprises the steps：
Step 1: position adjustment：Adjust lasing light emitter, fine motion corner reflector, light splitting microscope group, interferometry photodetection
Device, reflection measurement photodetector, the position for moving corner reflector and magnetic micro-displacement platform；
Step 2: adjustment light path：Start the lasing light emitter, it is further accurate to adjust fine motion corner reflector, light splitting microscope group, do
The position of measurement photodetector, reflection measurement photodetector, mobile corner reflector and magnetic micro-displacement platform is related to, makes laser
The light path of interferometer reaches design requirement；
Step 3: generation is most capable and experienced to relate to database：The magnetic micro-displacement platform is controlled in the environment of air cleaning, is made
Second displacement part is moved, and is stopped when the interfering beam of interferometry photodetector described in directive is most strong constructive interference described
Magnetic micro-displacement platform, the position of fixed second displacement part, records now reflection measurement photodetector reading and interferometry
Photodetector reading, changing air ambient changes the reflection measurement photodetector reading, while it is anti-to record several
Measurement photodetector reading and corresponding interferometry photodetector reading is penetrated, obtains most capable and experienced relating to database.
The laser interferometer structure and scaling method of the application, in most strong constructive interference, changes measuring environment, record
Reflection measurement photodetector reading and interferometry photodetector reading formation it is most capable and experienced relate to database, actually measuring
Cheng Zhong, if there is causing interferometry photodetector normally to detect most strong constructive interference due to environmental factor
When, it can be related to according to reflection measurement photodetector reading and interferometry photodetector reading with most capable and experienced in database
Data are compared, if there is there is matched data, then the position is most strong constructive interference, so that the laser of the application is done
Interferometer realizes the ability of environment resistant interference.
As further preferred scheme, the scaling method of the application also includes Step 4: generating most weak interference data
Storehouse：The magnetic micro-displacement platform is controlled in the environment of air cleaning, second displacement part is moved, surveyed when interfering described in directive
The interfering beam of amount photodetector stops the magnetic micro-displacement platform when being most weak destructive interference, is consolidated second displacement part
It is fixed, now reflection measurement photodetector reading and interferometry photodetector reading are recorded, change air ambient makes described
Reflection measurement photodetector reading changes, while recording several reflection measurement photodetector readings and corresponding interference
Photodetector reading is measured, most weak interference data storehouse is obtained.
As further preferred scheme, also include step 5, generate 1/n wavelength-interferometric databases, n is to be more than or wait
2 positive integer：The magnetic micro-displacement platform is controlled in the environment of air cleaning, second displacement part is moved, works as directive
When the interfering beam of the interferometry photodetector is most strong constructive interference, it is further continued for moving the distance of 1/2n wavelength, remembers
Now reflection measurement photodetector reading and interferometry photodetector reading are recorded, then change air ambient makes described anti-
The reading change of measurement photodetector is penetrated, while recording several reflection measurement photodetector readings and corresponding interference survey
Photodetector reading is measured, 1/n wavelength-interferometric databases are obtained.
When two beam laser are interfered, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, is all marked to most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics
It is fixed, that is to say, that, can be according to reflection measurement photodetector when carrying out actual measurement using the laser interferometer of the application
Reading and interferometry photodetector reading relate to database, most weak interference data storehouse, 1/n wavelength-interferometric databases with most capable and experienced
In data be compared, according to the match condition of data determine the position be most strong constructive interference, most weak destructive interference or
1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, and also improve measurement accuracy.
Above-mentioned laser interferometer and the measuring method of scaling method are used the invention also discloses a kind of,
A kind of measuring method of use magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method：
In actual measuring environment, mobile corner reflector is arranged on object being measured, if the reflection measurement photoelectricity
The signal reading that detector measurement is arrived be x, the signal reading that the interferometry photodetector measurement is obtained be y, by x values with
Y values are compared in database, most weak interference data storehouse, 1/n wavelength-interferometric databases in most capable and experienced relate to, when x values and y values with most
The capable and experienced a certain class value related in database matches, then it is assumed that this position is most strong constructive interference position, when x values and y values and most
A certain class value in weak interference data storehouse matches, then it is assumed that this position is most weak destructive interference position, when x values and y values and 1/n
A certain class value in wavelength-interferometric database matches, then it is assumed that this position is 1/n wavelength-interferometrics position.
The measuring method of the application, the interference situation of current interfering beam is determined by x values and y values, anti-ring is realized with this
The ability of border interference, while also improving measurement accuracy.
As further preferred scheme, the matching threshold Δ of y values is set, if most capable and experienced relate to database, most weak interference number
It is y ' according to the corresponding numerical value of interferometry photodetector in storehouse, 1/n wavelength-interferometric databases, number is related to most capable and experienced according to x values
According to storehouse, most weak interference data storehouse, 1/n wavelength-interferometrics database carry out y ' inquiry, make if there is y ' | y-y'|<Δ, then area
The database divided where y ', if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position, if
Y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric databases
It is interior, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
The corresponding numerical value of reflection measurement photodetector is x ' in storehouse, in actually measurement, selects the x ' closest to actual measured value x to make
For matching value, database, most weak interference data storehouse, the progress y ' progress of 1/n wavelength-interferometrics database are related to most capable and experienced according to x ' values
Inquiry, makes if there is y ' | y-y'|<Δ, repartitions the database where y ', if y ' is related in database most capable and experienced, recognizes
It is most strong constructive interference position for this position, if y ' is in most weak interference data storehouse, then it is assumed that this position is dry for most weak cancellation
Position is related to, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, the size of the matching threshold Δ ensures, when carrying out data query, to work as satisfaction |
y-y'|<During Δ, y ' is unique value.When matching threshold Δ is larger, it is possible that one group of x value and y values match two groups or
Multigroup x ' values and y ' values, make troubles to measurement, so first matching threshold Δ, makes one group of x value and y values in measurement process most
One group of x ' value and y ' values are matched, is convenient for measuring.
As further preferred scheme, the size of the matching threshold Δ is set according to the required precision of actual measurement
It is fixed, when needing high-precision measured value, using less matching threshold, when not needing high-acruracy survey value, using larger
Matching threshold.
As further preferred scheme, if Δ=5%.
In the measuring method of the application, by setting matching threshold Δ, according to setting the need for Surveying Actual Precision
Size with threshold value Δ, during being convenient for measuring with this, the match selection of data, reduction measurement difficulty.
Compared with prior art, beneficial effects of the present invention：
, can be by movement after being changed by setting reflection measurement photodetector, laser interferometry environment
Corner reflector reflection laser intensity is measured, and laser interference state is no longer directly big by the signal of interferometry photodetector
It is small to determine, but together decided on by reflection measurement photodetector with interferometry photodetector, realize laser interferometer
The ability of environment resistant interference.
The beneficial effect of other embodiments of the application：
The laser interferometer of the application, can not only determine the position of most strong constructive interference, but also can determine most weak
The position and 1/n wavelength-interferometrics position of destructive interference, so so that the laser interferometer of the application can not only environment resistant do
Disturb, and be engaged with fine motion corner reflector, further improve measurement accuracy.
Brief description of the drawings：
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention；
Fig. 2 is the light path schematic diagram after fine motion corner reflector is moved；
Fig. 3 is the structural representation of magnetic micro-displacement platform,
Marked in figure：
1- lasing light emitters, 2- fine motion corner reflectors, 3- movement corner reflectors, 4- interferometry photodetectors, 5- spectroscopes
Group, 6- reflection measurement photodetectors, 7- first laser beams, 8- second laser beams, 9- reflection laser beams, 10- magnetic micro-displacements
Platform, the spectroscopes of 51- first, the spectroscopes of 52- second, 101- support platforms, 102- gearshifts, the displacement pieces of 103- first,
104- inclined-planes, 105- second displacement parts, 106- restraint devices, 107- magnetic parts, 11- processing systems.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of above-mentioned theme of the invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
Embodiment 1, magnetic micro-displacement platform formula corner reflector laser interferometer, includes lasing light emitter 1, fine motion corner reflector
2nd, interferometry photodetector 4, mobile corner reflector 3, light splitting microscope group 5 and magnetic micro-displacement platform 10, the fine motion angle are anti-
Penetrate mirror 2 to be arranged on the magnetic micro-displacement platform 10, the laser beam that the lasing light emitter 1 is projected divides after the light splitting microscope group 5
For first laser beam 7 and second laser beam 8, fine motion corner reflector 2 described in the directive of first laser beam 7, through the fine motion corner reflection
Light splitting microscope group 5 described in directive, then the interferometry photodetector 4 described in directive after light splitting microscope group 5 again after mirror 2 reflects, the
Mobile corner reflector 3 described in the directive of dual-laser beam 8, light splitting microscope group described in directive again after being reflected through the mobile corner reflector 3
5, the interferometry photodetector 4 described in directive after light splitting microscope group 5, first laser beam 7 is with second laser beam 8 described in directive
Interfered during interferometry photodetector 4, the magnetic micro-displacement platform formula corner reflector laser interferometer also includes
Reflection measurement photodetector 6, the second laser beam 8 is gone back after the light splitting microscope group 5 as described in the mobile directive of corner reflector 3
It is formed with reflection laser beam 9, reflection measurement photodetector 6 described in the directive of reflection laser beam 9；
The magnetic micro-displacement platform 10, includes support platform 101 and the displacement being arranged in the support platform 101
The first displacement piece 103, first displacement piece 103 and institute's displacement apparatus are provided with device 102, the support platform 101
102 connections, institute's displacement apparatus 102 drives first displacement piece 103 to be moved along the support platform 101, described first
Moving part 103 has one relative to the inclined inclined-plane 104 of its direction of displacement, slides and sets on the inclined-plane 104 of first displacement piece 103
It is equipped with second displacement part 105, snug fit between first displacement piece 103 and second displacement part 105, the support platform
Restraint device 106 is additionally provided with 101, the restraint device 106 limits the second displacement part 105 along first displacement piece
Motion on 103 direction of displacement so that described when the first displacement piece 103 is driven by institute's displacement apparatus 102 and when producing displacement
Second displacement part 105 is driven by first displacement piece 103 and produces displacement, the direction of displacement of the second displacement part 105 with
The direction of displacement of first displacement piece 103 is perpendicular, the inclined-plane 104 of first displacement piece 103 and the folder of its direction of displacement
Angle is A degree, and 0 ＜ A ＜ 45 are additionally provided with the magnetic magnetic of tool between first displacement piece 103 and the support platform 101
Part 107, the second displacement part 105 has magnetic, and the second displacement part 105 and the magnetic part 107 are there is a natural attraction between the sexes shape
State, the fine motion corner reflector 2 is arranged on the second displacement part 105, is moved with second displacement part 105.
As the preferred scheme of the present embodiment, the light splitting microscope group 5 includes the first spectroscope 51 and the second spectroscope 52,
The laser beam that the lasing light emitter 1 is projected first is mapped to the first spectroscope 51, and first laser beam 7 is reflected to form through the first spectroscope 51,
Transmitted through the first spectroscope 51 and form second laser beam 8, fine motion corner reflector 2 described in the directive of first laser beam 7, after reflection again
First spectroscope 51 described in secondary directive, then again transmitted through first spectroscope 51, shifting described in the directive of second laser beam 8
Dynamic corner reflector 3, the second spectroscope 52 described in directive after being reflected through the mobile corner reflector 3, through second spectroscope 52
First spectroscope 51 described in directive after transmission, and occur with the first laser beam 7 that transmits from first spectroscope 51 dry
Relate to, interferometry photodetector 4 described in directive after interfering beam is formed, second as described in the mobile directive of corner reflector 3
The second laser beam 8 of spectroscope 52 also reflects to form the reflection laser beam 9 by second spectroscope 52.
The laser interferometer of the present embodiment, reflects because reflection measurement photodetector 6 can measure mobile corner reflector 3
The intensity of laser beam, the interference state of laser interference light beam is determined according to the intensity of reflection laser beam, so realizes that environment resistant is done
The purpose disturbed；
Also, in the present embodiment, fine motion corner reflector 2 is arranged on magnetic micro-displacement platform 10, in support platform 101
The displacement piece 103 of gearshift 102 and first is set, and gearshift 102 drives the first displacement piece 103 to move, the first displacement piece 103
With one relative to the inclined inclined-plane 104 of its direction of displacement, the first displacement is driven when gearshift 102 provides certain shift value
During part 103, due to the presence of restraint device 106, now, second displacement part 105 is perpendicular to the direction of displacement of the first displacement piece 103
On will produce certain shift value, the shift value of second displacement part 105 is related to the shift value that gearshift 102 is provided, also with
The inclined degree on the inclined-plane 104 of the first displacement piece 103 is related, i.e. set the inclined-plane 104 and its direction of displacement of the first displacement piece 103
Angle is A degree, and when the shift value that gearshift 102 is provided is X, the shift value that second displacement part 105 is produced is Y=Xtan
(A), the direction of displacement of second displacement part 105 and the direction of displacement of the first displacement piece 103 are perpendicular, in this way, when included angle A is less than 45
When spending, a shift value for being less than X values will be obtained, when further reducing included angle A, shift value Y also reduces therewith, in this way,
So that in the scheme of the present embodiment, by way of changing precision with stroke, finally giving one and being exported less than gearshift 102
The shift value of the second displacement part 105 of shift value, directly enhances the precision of the present embodiment magnetic micro-displacement platform, also just directly
The mobile accuracy of fine motion corner reflector 2 is improved, and then improves the measurement accuracy of the application laser interferometer.
As further preferred scheme, institute's displacement apparatus 102 is Piezoelectric gearshift.Piezoelectric ceramics can
By mechanical energy and the ceramic material of the mutual phase transformation of electric energy, its deformation quantity very little produced under electric field action does not surpass at most
The micro-displacement of thousand a ten thousandths of size itself is crossed, with good repetitive distortion recovery capability, stability is good, precision is high, such as
This enables the gearshift 102 of the application to provide sufficiently small X values, further increases the application micro-displacement platform 10
Precision, improves the measurement accuracy of the application laser interferometer.
As further preferred scheme, the laser interferometer also includes processing system 11, the processing system 11
Electrically connected with the interferometry photodetector 4 and reflection measurement photodetector 6, institute is controlled by the processing system 11
The startup and stopping of interferometry photodetector 4 and reflection measurement photodetector 6 are stated, and makes the interferometry photoelectricity
The data of detector 4 and the data storage of reflection measurement photodetector 6 in the processing system 11, the processing system 11 also with
The gearshift 102 of the magnetic micro-displacement platform 10 is electrically connected, and institute's displacement apparatus 102 is controlled by the processing system 11
Startup and stopping, the processing system 11 also electrically connects with the lasing light emitter 1, controls described to swash by the processing system 11
The startup and stopping of light source 1.In this application, by setting processing system 11, to the data of interferometry photodetector 4 and
The data of reflection measurement photodetector 6 are stored, generation nominal data storehouse, by counting in real time in actual measurement process
It is compared according to the data with nominal data storehouse, and then judges the interference situation of current light path；Processing system 11 is gone back and magnetic
The gearshift 102 of micro-displacement platform 10 is electrically connected, according to the output displacement of real-time measurement result command displacement device 102,
And then realize that the coordination to the position of fine motion corner reflector 2 is controlled, improve the adaptability of the laser interferometer of the application.
As further preferred scheme, the lasing light emitter 1, fine motion corner reflector 2, interferometry photodetector 4,
Laser beam in light splitting microscope group 5, reflection measurement photodetector 6 between any two be arranged in closing space without with outside
Environment space is contacted.In this application, lasing light emitter 1, fine motion corner reflector 2, interferometry photodetector 4, the and of light splitting microscope group 5
Laser beam between these part any twos of reflection measurement photodetector 6 is arranged in closing space so that surveyed
During amount, the laser beam between these above-mentioned parts can't be effected by environmental factors, and then ensure that the application
The measurement accuracy of laser interferometer.
As further preferred scheme, the laser beam exposure between the light splitting microscope group 5 and the mobile corner reflector 3
Among surrounding air.In actual use, mobile corner reflector 3 is arranged on testee, is moved with testee, so
In this application, the laser beam between light splitting microscope group 5 and mobile corner reflector 3 is exposed among surrounding air, made first
The application laser interferometer is obtained simple in construction, while also facilitating the arrangement of the application laser interferometer.
As further preferred scheme, the second displacement part 105 is integral type knot with the fine motion corner reflector 2
Structure, in this application, is set to integral structure, that is to say, that in the application by second displacement part 105 and fine motion corner reflector 2
Scheme in, the one side of second displacement part 105 is set to the shape of the reflecting surface of fine motion corner reflector 2, and polish or plated film, makes
The face forms reflecting surface and participated in the light path reflection of laser interferometer, in this way, directly eliminating traditional fine motion angle
This part of speculum 2, also just eliminates the matching relationship between second displacement part 105 and fine motion corner reflector 2, directly eliminates
The presence of mismatch error between second displacement part 105 and fine motion corner reflector 2, so, not only facilitate the application laser and do
The light path adjustment work of interferometer, and the structure of the application laser interferometer is also simplify, reduce manufacturing cost and the later stage protects
Maintenance cost is supported, the error amount of the application laser interferometer inside configuration is particularly also reduced, further improves this Shen
Please laser interferometer measurement accuracy.
Embodiment 2, as shown, a kind of scaling method for magnetic micro-displacement platform formula corner reflector laser interferometer,
Comprise the steps：
Step 1: position adjustment：Adjust lasing light emitter 1, fine motion corner reflector 2, light splitting microscope group 5, measured interference light electrical resistivity survey
Survey the position of device 4, reflection measurement photodetector 6, mobile corner reflector 3 and magnetic micro-displacement platform 10；
Step 2: adjustment light path：Start the lasing light emitter 1, further accurate adjustment fine motion corner reflector 2, light splitting microscope group
5th, the position of interferometry photodetector 4, reflection measurement photodetector 6, mobile corner reflector 3 and magnetic micro-displacement platform 10
Put, the light path of laser interferometer is reached design requirement；
Step 3: generation is most capable and experienced to relate to database：The magnetic micro-displacement platform 10 is controlled in the environment of air cleaning,
Second displacement part 105 is moved, is stopped when the interfering beam of interferometry photodetector 4 described in directive is most strong constructive interference
Only the magnetic micro-displacement platform 10, makes second displacement part be fixed by 105, records the now reading of reflection measurement photodetector 6
With the reading of interferometry photodetector 4, changing air ambient changes the reading of reflection measurement photodetector 6, simultaneously
Several readings of reflection measurement photodetector 6 and the corresponding reading of interferometry photodetector 4 are recorded, obtains most capable and experienced
Relate to database.
The laser interferometer structure and scaling method of the present embodiment, in most strong constructive interference, change measuring environment, note
The reading of the record reflection measurement photodetector 6 and formation of the reading of interferometry photodetector 4 is most capable and experienced relates to database, is surveyed actual
During amount, if there is causing interferometry photodetector 4 normally to detect most strong phase due to environmental factor
During long interference, number with most capable and experienced can be related to according to the reading of reflection measurement photodetector 6 and the reading of interferometry photodetector 4
It is compared according to the data in storehouse, if there is there is matched data, then the position is most strong constructive interference, so that this implementation
The laser interferometer of example realizes the ability of environment resistant interference.
As the preferred scheme of the present embodiment, the scaling method of the present embodiment also includes Step 4: generating most weak interference
Database：The magnetic micro-displacement platform 10 is controlled in the environment of air cleaning, second displacement part 105 is moved, when penetrating
To the interferometry photodetector 4 interfering beam be most weak destructive interference when stop the magnetic micro-displacement platform 10,
Fixed second displacement part 105, record now read by the reading of reflection measurement photodetector 6 and interferometry photodetector 4
Number, changing air ambient changes the reading of reflection measurement photodetector 6, while recording several reflection measurement photoelectricity
The reading of detector 6 and the corresponding reading of interferometry photodetector 4, obtain most weak interference data storehouse.
As further preferred scheme, the scaling method of the application also includes Step 5: generating 1/n wavelength-interferometric numbers
According to storehouse, n is the positive integer for being more than or waiting 2：The magnetic micro-displacement platform 10 is controlled in the environment of air cleaning, makes second
Move part 105 to be moved, when the interfering beam of interferometry photodetector 4 described in directive is most strong constructive interference, be further continued for
The distance of mobile 1/2n wavelength, records the now reading of reflection measurement photodetector 6 and the reading of interferometry photodetector 4,
Then changing air ambient changes the reading of reflection measurement photodetector 6, while recording several reflection measurement photoelectricity
The reading of detector 6 and the corresponding reading of interferometry photodetector 4, obtain 1/n wavelength-interferometric databases.
When two beam laser are interfered, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, is all marked to most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics
It is fixed, that is to say, that, can be according to reflection measurement photodetector when carrying out actual measurement using the laser interferometer of the application
6 readings and the reading of interferometry photodetector 4 relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data with most capable and experienced
Data in storehouse are compared, according to the match condition of data determine the position be most strong constructive interference, most weak destructive interference also
It is 1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, and also improve measurement accuracy.
The measurement side of embodiment 3, a kind of use magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method
Method：
It is described dry if the signal reading that the reflection measurement photodetector 6 is measured is x in actual measuring environment
It is y to relate to measurement photodetector 4 and measure obtained signal reading, and x values and y values are related into database, most weak interference number most capable and experienced
According to being compared in storehouse, 1/n wavelength-interferometric databases, when x values and y values and the most capable and experienced a certain class value phase related in database
Match somebody with somebody, then it is assumed that this position is most strong constructive interference position, when x values and y values and a certain class value phase in most weak interference data storehouse
Match somebody with somebody, then it is assumed that this position is most weak destructive interference position, when x values and y values and a certain class value phase in 1/n wavelength-interferometric databases
Matching, then it is assumed that this position is 1/n wavelength-interferometrics position.
The measuring method of the present embodiment, the interference situation of current interfering beam is determined by x values and y values, is realized with this anti-
The ability of environmental disturbances, while also improving measurement accuracy.
As the preferred scheme of the present embodiment, the matching threshold Δ of y values is set, if most capable and experienced relate to database, most weak interference
The corresponding numerical value of interferometry photodetector is y ' in database, 1/n wavelength-interferometric databases, is related to according to x values to most capable and experienced
Database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ' inquiry, make if there is y ' | y-y'|<Δ, then
The database where y ' is distinguished, if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position, such as
Fruit y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric data
In storehouse, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
The corresponding numerical value of reflection measurement photodetector is x ' in storehouse, in actually measurement, selects the x ' closest to actual measured value x to make
For matching value, database, most weak interference data storehouse, the progress y ' progress of 1/n wavelength-interferometrics database are related to most capable and experienced according to x ' values
Inquiry, makes if there is y ' | y-y'|<Δ, repartitions the database where y ', if y ' is related in database most capable and experienced, recognizes
It is most strong constructive interference position for this position, if y ' is in most weak interference data storehouse, then it is assumed that this position is dry for most weak cancellation
Position is related to, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
As the preferred scheme of the present embodiment, the size of the matching threshold Δ ensures when carrying out data query, when full
Foot | y-y'|<During Δ, y ' is unique value.When matching threshold Δ is larger, it is possible that one group of x value and y values match two groups
Or multigroup x ' values and y ' values, made troubles to measurement, so first matching threshold Δ, makes one group of x value and y in measurement process
Value at most one group of x ' value of matching and y ' values, are convenient for measuring.
As the preferred scheme of the present embodiment, the size of the matching threshold Δ is carried out according to the required precision of actual measurement
Setting, when needing high-precision measured value, using less matching threshold, wishes very fast when not needing high-acruracy survey value
During measurement, using larger matching threshold.
As further preferred scheme, if Δ=5%.
In the measuring method of the present embodiment, by setting matching threshold Δ, set according to the need for Surveying Actual Precision
The size of matching threshold Δ, during being convenient for measuring with this, the match selection of data, reduction measurement difficulty.
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (8)
1. a kind of scaling method for magnetic micro-displacement platform formula corner reflector laser interferometer, magnetic micro-displacement platform formula angle
Reflector laser interference instrument, include lasing light emitter, fine motion corner reflector, interferometry photodetector, mobile corner reflector, point
Light microscopic group and magnetic micro-displacement platform, the fine motion corner reflector are arranged on the magnetic micro-displacement platform, the lasing light emitter
The laser beam of injection is divided into first laser beam and second laser beam after the light splitting microscope group, and the first laser beam is to described
Fine motion corner reflector, light splitting microscope group described in directive, then the directive after light splitting microscope group again after being reflected through the fine motion corner reflector
The interferometry photodetector, the second laser beam is to the mobile corner reflector, through the mobile corner reflector
Light splitting microscope group described in directive again after reflection, the interferometry photodetector described in directive after light splitting microscope group, described first swashs
Light beam is interfered with second laser beam in interferometry photodetector described in directive, it is characterised in that the magnetic is micro-
Displacement platform formula corner reflector laser interferometer also includes reflection measurement photodetector, and the second laser beam is by described
Reflection laser beam is also formed with after light splitting microscope group described in mobile corner reflector directive, the reflection laser beam is surveyed to the reflection
Measure photodetector；
The magnetic micro-displacement platform, includes support platform and the gearshift being arranged in the support platform, the branch
The first displacement piece is provided with support platform, and first displacement piece is connected with institute displacement apparatus, displacement apparatus drive institute of institute
State the first displacement piece to move along the support platform, first displacement piece is inclined relative to its direction of displacement oblique with one
Slided on face, the inclined-plane of first displacement piece and be provided with second displacement part, between first displacement piece and second displacement part
Restraint device is additionally provided with snug fit, the support platform, the restraint device limits the second displacement part described in
Motion on first displacement piece direction of displacement so that when the first displacement piece is driven by institute's displacement apparatus and when producing displacement, institute
State second displacement part to be driven by first displacement piece and produce displacement, the direction of displacement of the second displacement part and described first
The direction of displacement of displacement piece is perpendicular, and the inclined-plane of first displacement piece and the angle of its direction of displacement are A degree, 0 ＜ A ＜ 45,
The magnetic magnetic part of tool is additionally provided between first displacement piece and the support platform, the second displacement part has magnetic
Property, the second displacement part and the magnetic part are there is a natural attraction between the sexes state, and the fine motion corner reflector is arranged on the second
Move on part, moved with second displacement part, the light splitting microscope group includes the first spectroscope and the second spectroscope, and the lasing light emitter is penetrated
The laser beam gone out is first mapped to the first spectroscope, through the first dichroic mirror formation first laser beam, through the first spectroscope transmission
Into second laser beam, first laser beam is to the fine motion corner reflector, the first spectroscope described in directive again after reflection, so
Afterwards again transmitted through first spectroscope, the second laser beam is to the mobile corner reflector, through the mobile corner reflection
Mirror reflection after the second spectroscope described in directive, through second spectroscope transmit after the first spectroscope described in directive, and with from
The first laser beam that first spectroscope is transmitted is interfered, and forms measured interference light electrical resistivity survey described in directive after interfering beam
Device is surveyed, second spectroscopical second laser beam is anti-also by second spectroscope as described in the mobile corner reflector directive
Penetrate to form the reflection laser beam, it is characterised in that comprise the steps：
Step 1: position adjustment：Adjust lasing light emitter, it is fine motion corner reflector, light splitting microscope group, interferometry photodetector, anti-
Penetrate the position of measurement photodetector, mobile corner reflector and magnetic micro-displacement platform；
Step 2: adjustment light path：Start the lasing light emitter, further accurate adjustment fine motion corner reflector, light splitting microscope group, interference is surveyed
The position of photodetector, reflection measurement photodetector, mobile corner reflector and magnetic micro-displacement platform is measured, makes laser interference
The light path of instrument reaches design requirement；
Step 3: generation is most capable and experienced to relate to database：The magnetic micro-displacement platform is controlled in the environment of air cleaning, makes second
Displacement piece is moved, and the magnetic is stopped when the interfering beam of interferometry photodetector described in directive is most strong constructive interference
Micro-displacement platform, is fixed second displacement part, records now reflection measurement photodetector reading and measured interference light electrical resistivity survey
Device reading is surveyed, changing air ambient changes the reflection measurement photodetector reading, while recording several reflection measurements
Photodetector reading and corresponding interferometry photodetector reading, obtain most capable and experienced relating to database.
2. scaling method as claimed in claim 1, it is characterised in that also include Step 4: generating most weak interference data storehouse：
The magnetic micro-displacement platform is controlled in the environment of air cleaning, moves second displacement part, when interferometry described in directive
The interfering beam of photodetector stops the magnetic micro-displacement platform when being most weak destructive interference, is consolidated second displacement part
It is fixed, now reflection measurement photodetector reading and interferometry photodetector reading are recorded, change air ambient makes described
Reflection measurement photodetector reading changes, while recording several reflection measurement photodetector readings and corresponding interference
Photodetector reading is measured, most weak interference data storehouse is obtained.
3. scaling method as claimed in claim 2, it is characterised in that also include Step 5: generating 1/n wavelength-interferometric data
Storehouse, n is the positive integer for being more than or waiting 2：The magnetic micro-displacement platform is controlled in the environment of air cleaning, makes second displacement part
It is mobile, when the interfering beam of interferometry photodetector described in directive is most strong constructive interference, it is further continued for moving 1/2n ripples
Long distance, records now reflection measurement photodetector reading and interferometry photodetector reading, then changes air
Environment changes the reflection measurement photodetector reading, at the same record several reflection measurement photodetector readings and
Corresponding interferometry photodetector reading, obtains 1/n wavelength-interferometric databases.
4. the measuring method of the scaling method described in a kind of use claim 3, it is characterised in that in actual measuring environment,
If the signal reading that the reflection measurement photodetector is measured is x, what the interferometry photodetector measurement was obtained
Signal reading is y, and x values and y values are carried out in database, most weak interference data storehouse, 1/n wavelength-interferometric databases in most capable and experienced relate to
Compare, when x values and y values match with the most capable and experienced a certain class value related in database, then it is assumed that this position is most strong constructive interference
Position, when x values and y values match with a certain class value in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference
Position, when x values and y values match with a certain class value in 1/n wavelength-interferometric databases, then it is assumed that this position is dry for 1/n wavelength
Relate to position.
5. measuring method as claimed in claim 4, it is characterised in that the matching threshold Δ of setting y values, if most strong interference data
The corresponding numerical value of interferometry photodetector is y ' in storehouse, most weak interference data storehouse, 1/n wavelength-interferometric databases, according to x values
To the most capable and experienced inquiry for relating to database, most weak interference data storehouse, 1/n wavelength-interferometrics database progress y ', make if there is y ' | y-
Y'| ＜ Δs, repartition the database where y ', if y ' is related in database most capable and experienced, then it is assumed that this position is most strong mutually long
Interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n
In wavelength-interferometric database, then it is assumed that this position is 1/n wavelength-interferometrics position.
6. measuring method as claimed in claim 5, it is characterised in that set and most capable and experienced relate to database, most weak interference data storehouse, 1/
The corresponding numerical value of reflection measurement photodetector is x ' in n wavelength-interferometric databases, in actually measurement, and selection is closest actual
Measured value x x ' relates to database, most weak interference data storehouse, 1/n wavelength-interferometric data according to x ' values as matching value to most capable and experienced
Storehouse carries out y ' and inquired about, and makes if there is y ' | y-y'| ＜ Δs, the database where y ' is repartitioned, if y ' is related to most capable and experienced
In database, then it is assumed that this position is most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position
For most weak destructive interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
7. the measuring method as described in claim 5 or 6, it is characterised in that the size of the matching threshold Δ ensures carrying out
During data query, when satisfaction | during y-y'| ＜ Δs, y ' is unique value.
8. measuring method as claimed in claim 7, it is characterised in that the size of the matching threshold Δ is according to actual measurement
Required precision is set, when needing high-precision measured value, using less matching threshold, when not needing high-acruracy survey
During value, using larger matching threshold.
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| CN109059777B (en) * | 2018-08-08 | 2019-10-29 | 中国十七冶集团有限公司 | A kind of method of fully-automatic laser interference observation |
| CN110057303B (en) * | 2019-05-22 | 2021-05-11 | 广东工业大学 | Linear displacement measuring device |
| CN110514139B (en) * | 2019-08-13 | 2021-11-26 | 桂林电子科技大学 | Device and method for detecting surface shape change of reflector of laser interferometry system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
| JPH07260584A (en) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | Michelson interferometer |
| CN1280293A (en) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | Measuring method of ohject displacement in nanometer precision |
| EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
| CN101590605A (en) * | 2009-04-21 | 2009-12-02 | 寿震森 | Fine adjustment vertical platform |
| CN102490027A (en) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | Lifting platform |
| CN204705318U (en) * | 2015-06-29 | 2015-10-14 | 成都信息工程大学 | A kind of magnetic micro-displacement platform formula corner reflector laser interferometer |
-
2015
- 2015-06-29 CN CN201510374210.1A patent/CN104880147B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4886363A (en) * | 1988-09-06 | 1989-12-12 | Eastman Kodak Company | Quadratic frequency modulated absolute distance measuring interferometry |
| JPH07260584A (en) * | 1994-03-16 | 1995-10-13 | Toshiba Corp | Michelson interferometer |
| CN1280293A (en) * | 2000-08-03 | 2001-01-17 | 中国科学院上海光学精密机械研究所 | Measuring method of ohject displacement in nanometer precision |
| EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
| CN101590605A (en) * | 2009-04-21 | 2009-12-02 | 寿震森 | Fine adjustment vertical platform |
| CN102490027A (en) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | Lifting platform |
| CN204705318U (en) * | 2015-06-29 | 2015-10-14 | 成都信息工程大学 | A kind of magnetic micro-displacement platform formula corner reflector laser interferometer |
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