CN205619874U - Laser wavelength revises formula corner reflection mirror laser interferometer - Google Patents
Laser wavelength revises formula corner reflection mirror laser interferometer Download PDFInfo
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- CN205619874U CN205619874U CN201520966057.7U CN201520966057U CN205619874U CN 205619874 U CN205619874 U CN 205619874U CN 201520966057 U CN201520966057 U CN 201520966057U CN 205619874 U CN205619874 U CN 205619874U
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Abstract
The utility model relates to a precision measurement technology and instrument field, in particular to laser wavelength revises formula corner reflection mirror laser interferometer, laser wavelength revises formula corner reflection mirror laser interferometer, including laser source, fixed corner reflection mirror, photoelectric detector, measurement angle reflecting mirror device and spectroscope, measurement angle reflecting mirror device includes measurement angle speculum and precise displacement device, the precise displacement device does the measurement angle speculum provides and is surveyed displacement of object syntropy or reverse displacement. In this application, also measuring out with the fractional part triangle L who exceeds half laser wavelength in the testee actual displacement and replenishing the displacement testing result, and then make the displacement result that obtains that laser interferometer measures of this application more accurate, simultaneously at the distance measurement in -process, the precise displacement device carries out the accurate displacement of a plurality of integer wavelength, asks the equivalent laser wavelength of environment, further improvement through the distance of accuracy is counter the utility model discloses laser interferometer's measurement accuracy.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly to a kind of optical maser wavelength amendment type
Corner reflector laser interferometer.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has brightness height, direction
Good, the monochromaticity of property and feature, the laser interferometry techniques comparative maturity such as coherence is good.Laser interference
Measurement system is applied widely: accurate length, measurement such as linear scale, grating, gauge block, the precision of angle
The detection of leading screw；The control of the such as precision optical machinery of the position detecting system in precision instrument, correction；Extensive collection
Become the position detecting system in circuit special equipment and detecting instrument；Minute sized measurement etc..At present, exist
In most of laser interference length-measuring systems, all have employed Michelson's interferometer or similar light channel structure, than
As, the most conventional single frequency laser interferometer.
Single frequency laser interferometer is the light beam sent from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation,
And reflect from stationary mirror and moving reflector can be combined in spectroscope respectively and produce interference fringe.
When moving reflector moves, the light intensity of interference fringe changes by the photo-electric conversion element in receptor and electronics
Circuits etc. are converted to electric impulse signal, shaped, amplify after input forward-backward counter and calculate overall pulse number N,
Again by electronic computer by calculating formula L=N × λ/2, in formula, λ is optical maser wavelength, calculates the position of moving reflector
Shifting amount L.
In actual use, inventors herein have recognized that, laser is only done by current single frequency laser interferometer
The integer part relating to ripple counts, i.e. can only count during the strongest constructive interference when the most capable and experienced relating to
Number, and for laser interference during, be then difficult to during the strongest non-constructive interference count so that, its survey
Accuracy of measurement is limited to the wavelength of laser, and its precision is only the integral multiple of half optical maser wavelength, but in reality
In measurement, the shift value that testee produces is the most all random, it is impossible to be just half optical maser wavelength
Integral multiple, i.e. there is also the fractional part beyond half optical maser wavelength, this partial distance can not
Reflected by above-mentioned receptor, so also cannot calculate.Simultaneously because the change of atmospheric environment,
Such as the change of temperature, humidity and air pressure, optical maser wavelength changes in the environment, and this directly contributes laser
The precision of interfeerometry ranging reduces.
Although, in conventional arts, the half wavelength of laser has had high precision, but, with
The progress of science and technology, in Technology of Precision Measurement field, the required precision of accurate measurement is more and more higher,
The precision of this half optical maser wavelength, the most day by day can not meet the requirement of people again.
So, based on above-mentioned deficiency, need a kind of laser interferometer that more high measurement accuracy can be provided at present badly.
Summary of the invention
Present invention aims to current laser interferometer precision and be limited to optical maser wavelength, and measure environment
The deficiency that optical maser wavelength is had a direct impact, it is provided that a kind of laser interferometer with more high measurement accuracy.
In order to realize foregoing invention purpose, the invention provides techniques below scheme:
A kind of optical maser wavelength amendment type corner reflector laser interferometer, including lasing light emitter, fixed angles reflecting mirror,
Photodetector, measurement corner reflector device and spectroscope, described measurement corner reflector device includes measuring angle
Reflecting mirror and accurate displacement device, the laser beam of described lasing light emitter injection is divided into first to swash after described spectroscope
Light beam and the second laser beam, fixed angles reflecting mirror described in the first laser beam directive, through described fixed angles reflecting mirror
Spectroscope described in directive again after reflection, then photodetector described in directive after spectroscope, the second laser beam
Corner reflector is measured, spectroscope described in directive, warp again after described measurement corner reflector reflects described in directive
Photodetector described in directive after spectroscope, the first laser beam and the second laser beam are in photodetection described in directive
Interfering during device, described measurement corner reflector is arranged on described accurate displacement device, described accurate displacement
Device is arranged on testee, and described accurate displacement device provides and measured object for described measurement corner reflector
Displacement body is in the same direction or reverse displacement.
In the such scheme of the application, owing to measurement corner reflector is arranged on accurate displacement device, and smart
Mil moving device is arranged on testee, and when testee is subjected to displacement, testee drives accurate position
Moving device, and then drive measurement corner reflector, so, when testee is subjected to displacement, at displacement process
In, due to the change of the second laser beam light path so that, the first laser beam and the interference state of the second laser beam
Change the most therewith, before starting to measure work, start accurate displacement device, make measurement corner reflector produce displacement,
The direction of displacement of described measurement corner reflector and the direction of displacement of testee on the same line, when light electrical resistivity survey
When survey device detects the strongest constructive interference, stop accurate displacement device, and photodetector counting reset,
Start to measure the displacement of testee the most again, changed at the first laser beam and the second laser beam interference state
Cheng Zhong, the times N of the strongest constructive interference of photodetectors register, when testee mobile end, it is in quiet
Only during state, photodetector stops counting；Now, measurement corner reflector is made to exist by accurate displacement device
Move on the direction of displacement of testee, and observe photodetector, when photodetector detects the strongest phase
During long interference, stop accurate displacement device, and read accurate displacement device for measuring the position that corner reflector provides
Shifting value △ L.
If displacement △ L is identical with the direction of displacement of testee, then, the shift value of the actual generation of testee
L=N × λ/2+ (λ/2-△ L), wherein △ L ＜ λ/2, in formula, λ is optical maser wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then, the shift value of the actual generation of testee
L=N × λ/2+ △ L, wherein △ L ＜ λ/2, in formula, λ is optical maser wavelength.
So, by said structure, testee actual displacement will exceed the fractional part of half optical maser wavelength
Point △ L also measures and adds in displacement detecting result, and then makes measured by the laser interferometer of the application
The displacement result obtained is more accurate, and its degree of accuracy is higher than half optical maser wavelength, is specifically dependent upon accurate displacement
The displacement accuracy that device can be provided by.
As the preferred version of the application, described accurate displacement device includes support platform and is arranged on described
Driving means on support platform, described support platform matches with described testee, and described driving means is
Described measurement corner reflector provides the displacement on testee direction of displacement.
As the preferred version of the application, described driving means is Piezoelectric driving means.
In this programme, employing Piezoelectric driving means can be by the merit of mutual to mechanical energy and electric energy phase transformation
Energy ceramic material, its deformation quantity produced under electric field action is the least, the ten million of the most own size
The micro-displacement of/mono-, has good repetitive distortion recovery capability, and good stability, precision are high, enter one
Step improves accuracy and the reliability of the application accurate displacement device.
As the preferred version of the application, described accurate displacement device also includes being arranged in described support platform
The first displacement piece and the second displacement piece of being arranged in described first displacement piece, described driving means is with described
First displacement piece matches, and provides along the displacement of described support platform for described first displacement piece, and described first
Displacement piece has an inclined-plane tilted relative to its direction of displacement, and described second displacement piece is slidably arranged in described
On the inclined-plane of the first displacement piece, make described second displacement piece can slide along the inclined-plane of described first displacement piece, institute
Stating snug fit between the first displacement piece and the second displacement piece, described measurement corner reflector is arranged on described second
In displacement piece, described support platform being additionally provided with restraint device, described restraint device limits described second
Move part moving along described first displacement piece direction of displacement so that when the first displacement piece is by described driving means
When driving and produce displacement, described second displacement piece is driven by described first displacement piece and produces displacement, and,
The direction of displacement of described second displacement piece is perpendicular with the direction of displacement of described first displacement piece, described first
Moving the inclined-plane of part with the angle of its direction of displacement is A degree, 0 < A < 45.
In the such scheme of the application, driving means matches with the first displacement piece, is that the first displacement piece carries
For along the displacement of support platform, the first displacement piece has an inclined-plane tilted relative to its direction of displacement, and second
Displacement piece is slidably arranged on the inclined-plane of the first displacement piece, makes the second displacement piece can be along the inclined-plane of the first displacement piece
Sliding, when accurate displacement device works, driving means provides certain displacement to promote the first displacement piece,
Now, owing to restraint device limits the second displacement piece moving along the first displacement piece direction of displacement, second is made
The direction of displacement of displacement piece and the direction of displacement of the first displacement piece are perpendicular, so, and the displacement of the second displacement piece
Measure relevant to the displacement that driving means provides for the first displacement piece, also with the inclined-plane of the first displacement piece and its position
The angle moving direction is correlated with.
That is, if the angle of the inclined-plane of the first displacement piece and its direction of displacement is A degree, when driving means offer
When displacement is X, the second displacement piece is at the displacement being perpendicular in the driving means direction of motion produce
Y=Xtan (A), so, when included angle A is less than 45 degree, will obtain a displacement less than X value, when
When further reducing included angle A, displacement Y reduces, so the most therewith so that in the scheme of the application,
Accurate displacement device, by the way of changing precision with stroke, directly enhances the essence of the application accurate displacement device
Degree, the most further improves the certainty of measurement of the application laser interferometer.
As the preferred version of the application, between described first displacement piece and described support platform, it is additionally provided with tool
Magnetic magnetic part, described second displacement piece has magnetic, and described second displacement piece with described magnetic part is
State that there is a natural attraction between the sexes.Make the first displacement piece when being promoted, it is possible to keep fitting tightly with the second displacement piece,
Ensure the precision of the application accurate displacement device, and then ensure the certainty of measurement of the application laser interferometer.
As the preferred version of the application, described second displacement piece and described measurement corner reflector are integral type knot
Structure.
In such scheme, the second displacement piece is integral type structure with measurement corner reflector, say, that straight
It is connected in the second displacement piece and a reflecting surface is set so that it is itself formed and measure corner reflector, so, simplify
The structure of the application laser interferometer, convenient debugging and use.
In reality measures environment, the certainty of measurement of laser interferometer is also affected by actual environment of measuring, by
In measuring environment in reality, the change of the temperature of air, humidity and air pressure, all can cause air dielectric
Change, and then the wavelength of laser also can be changed so that final result of calculation exists error；
Although at present, there is also the device measuring air refraction, atmospheric temperature, the humidity to single locus
And air pressure measures, by wavelength compensation formula, optical maser wavelength is modified, but its be merely able to right
Local air detects, and in the displacement measurement field of the application, owing to its displacement is in a region
Inside carrying out, in this region, each parameter of the air of each position all there are difference, is especially in the presence of bigger temperature
, bigger mistake will be there is with single-point parameters revision optical maser wavelength in the situations such as gradient, moist gradient and barometric gradient
Difference.
So, for these reasons, in this application, during measuring, detection is current measures under environment,
The environment effective wavelength λ ' of laser, so directly avoiding zones of different air refraction difference and asking of bringing
Topic, so, reduces the error that environmental factors is brought, and then further improves the application laser interferometer
Certainty of measurement.
Disclosed herein as well is a kind of measurement for above-mentioned optical maser wavelength amendment type corner reflector laser interferometer
Method, it includes following step:
Step one: install corner reflector laser interferometer of the present invention；
Step 2: measurement corner reflector device is arranged on testee；
Step 3: debug corner reflector laser interferometer of the present invention, makes the satisfactory light path of formation,
Further, the first laser beam and the second laser beam is made to be in interference state；
Step 4: before starting to measure work, starts accurate displacement device, makes measurement corner reflector produce displacement,
The direction of displacement of described measurement corner reflector and the direction of displacement of testee on the same line, when light electrical resistivity survey
When survey device detects the strongest constructive interference, stop accurate displacement device, and photodetector counting is reset；
Step 5: start to measure work, testee starts mobile, photodetectors register the first laser beam
Times N with the second the strongest constructive interference of laser beam；
Step 6: testee displacement terminates, and remains static, is again started up accurate displacement device, makes
Measure corner reflector and produce displacement, the direction of displacement of described measurement corner reflector and the direction of displacement of testee
On the same line, when photodetector detects the strongest constructive interference again, stop described accurate displacement
Device, makes measurement corner reflector stop；
Step 7: read the shift value △ L that accurate displacement device provides for described measurement corner reflector；
Step 8: during record measurement, the strongest constructive interference times N and the measurement angle of photodetectors register are anti-
Penetrate mirror shift value △ L.
Step 9: be again started up accurate displacement device, traverse measurement corner reflector, makes photodetectors register
The number of times M (M is positive integer) of strong constructive interference, and read the measurement angle that M constructive interference the strongest is corresponding
Mirror displacements value Z.According to Z=M × λ '/2, draw under current measurement environment, effective wavelength the λ '=2Z/ of laser
M。
Step 10: calculate the shift value of testee.
If displacement △ L is identical with the direction of displacement of testee, then, the shift value L=N of the actual generation of testee
× λ '/2+ (λ '/2-△ L), wherein △ L ＜ λ '/2, in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then, the shift value of the actual generation of testee
L=N × λ '/2+ △ L, wherein △ L ＜ λ '/2, in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing the displacement of testee by measurement corner reflector shift value △ L
In value, directly enhance the certainty of measurement of testee displacement.Meanwhile, by detection measure in environment etc.
Length λ ', is i.e. modified the wavelength of laser, so reduces the error that environmental factors is brought, Jin Erjin
The certainty of measurement that improve the application laser interferometer of one step.
As the preferred version of the application, in described step 4 to step 9, the strongest described constructive interference also may be used
To be the most weak destructive interference.In this programme, during measuring, photodetector is record first
Laser beam and the number of times of the most weak destructive interference of the second laser beam, the most still can obtain a precision higher
The shift value L of testee.
Compared with prior art, beneficial effects of the present invention:
1, the fractional part △ L exceeding half optical maser wavelength in testee actual displacement is also measured benefit
It is charged in displacement detecting result, and then makes the displacement result that obtains measured by the laser interferometer of the application more
Adding accurately, its precision is higher than half optical maser wavelength, is specifically dependent upon the displacement that accurate displacement device can be provided by
Precision；
2, during environment is measured in detection, the effective wavelength λ ' of laser, is modified optical maser wavelength, so, reduces
The error that environmental factors is brought, and then further improve the certainty of measurement of the application laser interferometer.
Accompanying drawing illustrates:
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention；
Fig. 2 is to measure corner reflector and schematic diagram that the second displacement piece is integral type structure in the present invention,
Labelling in figure:
1-lasing light emitter, 2-fixed angles reflecting mirror, 3-photodetector, 4-measures corner reflector device, 5-light splitting
Mirror, 6-measures corner reflector, 7-accurate displacement device, 8-the first laser beam, and 9-the second laser beam, 10-is tested
Object, 11-support platform, 12-driving means, 13-the first displacement piece, 14-the second displacement piece, 15-inclined-plane,
16-restraint device, 17-magnetic part.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But should be by
This is interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to below example, all real based on present invention institute
Existing technology belongs to the scope of the present invention.
Embodiment 1,
As shown in Figure 1, 2, a kind of optical maser wavelength amendment type corner reflector laser interferometer, including lasing light emitter 1,
Fixed angles reflecting mirror 2, photodetector 3, measurement corner reflector device 4 and spectroscope 5, described measurement angle
Reflector apparatus 4 includes measuring corner reflector 6 and accurate displacement device 7, the laser of described lasing light emitter 1 injection
The first laser beam 8 and the second laser beam 9 it is divided into, described in the first laser beam 8 directive after spectroscope 5 described in Shu Jing
Fixed angles reflecting mirror 2, spectroscope 5 described in directive again after described fixed angles reflecting mirror 2 reflects, then through point
Photodetector 3 described in directive after light microscopic 5, measures corner reflector 6 described in the second laser beam 9 directive, through institute
State after measurement corner reflector 6 reflection spectroscope 5 described in directive, light electrical resistivity survey described in directive after spectroscope 5 again
Surveying device 3, the first laser beam 8 interferes when photodetector 3 described in directive with the second laser beam 9, institute
Stating measurement corner reflector 6 to be arranged on described accurate displacement device 7, described accurate displacement device 7 is arranged on
On testee 10, described accurate displacement device 7 provides and testee 10 for described measurement corner reflector 6
Displacement is in the same direction or reverse displacement.
In the present embodiment, owing to measurement corner reflector 6 is arranged on accurate displacement device 7, and accurate position
Moving device 7 is arranged on testee 10, and when testee 10 is subjected to displacement, testee 10 drives
Accurate displacement device 7, and then drive measurement corner reflector 6, so, when testee 10 is subjected to displacement,
In displacement process, due to the change of the second laser beam 9 light path so that the first laser beam 8 and the second laser
The interference state of bundle 9 changes the most therewith, before starting to measure work, starts accurate displacement device 7, makes measurement angle
Reflecting mirror 6 produces displacement, the direction of displacement of described measurement corner reflector 6 and the direction of displacement of testee 10
On the same line, when photodetector 3 detects the strongest constructive interference, stop accurate displacement device 7,
And photodetector 3 is counted clearing, start to measure the displacement of testee 10 the most again, at the first laser
In bundle 8 and the second laser beam 9 interference state change procedure, photodetector 3 records the strongest constructive interference
Times N, when testee 10 mobile end, when remaining static, photodetector 3 stops counting；
Now, measurement corner reflector 6 is made to move on the direction of displacement of testee 10 by accurate displacement device 7,
And observe photodetector 3, when photodetector 3 detects the strongest constructive interference, stop accurate displacement dress
Put 7, and read accurate displacement device 7 for measuring the shift value △ L that corner reflector 6 provides.
If displacement △ L is identical with the direction of displacement of testee 10, then, the actual position produced of testee 10
Shifting value L=N × λ/2+ (λ/2-△ L), wherein △ L ＜ λ/2, in formula, λ is optical maser wavelength；
And, if displacement △ L is contrary with the direction of displacement of testee 10, then, testee 10 is actual to be produced
Shift value L=N × λ/2+ △ L, wherein △ L ＜ λ/2, in formula, λ is optical maser wavelength.
So, by said structure, testee 10 actual displacement will exceed the decimal of half optical maser wavelength
Part △ L also measures and adds in displacement detecting result, and then makes the laser interferometer institute of the application
Measuring the displacement result obtained more accurate, its precision is higher than half optical maser wavelength, is specifically dependent upon accurate position
The displacement accuracy that moving device 7 can be provided by.
Embodiment 2,
As shown in Figure 1, 2, laser interferometer as described in Example 1, described accurate displacement device 7 includes
Support platform 11 and the driving means 12 being arranged in described support platform 11, described support platform 11 and institute
Stating testee 10 to match, described driving means 12 provides at measured object for described measurement corner reflector 6
Displacement on body 10 direction of displacement, described driving means 12 is Piezoelectric driving means.
In the present embodiment, the Piezoelectric driving means 12 of employing is can be by mutual to mechanical energy and electric energy
The ceramic material of conversion, its deformation quantity produced under electric field action is the least, chi the most own
The micro-displacement of very little 1/10000000th, has good repetitive distortion recovery capability, good stability, precision
Height, further increases the precision of accurate displacement device 7 in the present embodiment.
Embodiment 3,
As shown in Figure 1, 2, laser interferometer as described in Example 2, described accurate displacement device 7 also wraps
Include the first displacement piece 13 being arranged in described support platform 11 and be arranged in described first displacement piece 13
Second displacement piece 14, described driving means 12 matches with described first displacement piece 13, for described first
Moving part 13 provides the displacement along described support platform 11, described first displacement piece 13 to have one relative to its position
Moving the inclined-plane 15 that direction tilts, described second displacement piece 14 is slidably arranged in the oblique of described first displacement piece 13
On face 15, make described second displacement piece 14 can slide along the inclined-plane 15 of described first displacement piece 13, described
Snug fit between first displacement piece 13 and the second displacement piece 14, described measurement corner reflector 6 is arranged on institute
State in the second displacement piece 14, described support platform 11 is additionally provided with restraint device 16, described restraint device
16 limit described second displacement piece 14 moving along described first displacement piece 13 direction of displacement so that when the
When one displacement piece 13 is driven by described driving means 12 and produces displacement, described second displacement piece 14 is described
First displacement piece 13 drives and produces displacement, and, the direction of displacement of described second displacement piece 14 is with described
The direction of displacement of the first displacement piece 13 is perpendicular, inclined-plane 15 and its direction of displacement of described first displacement piece 13
Angle be A degree, preferably 0 < A < 45.
In an embodiment, driving means 12 matches with the first displacement piece 13, provides for the first displacement piece 13
Along the displacement of support platform 11, the first displacement piece 13 has an inclined-plane 15 tilted relative to its direction of displacement,
Second displacement piece 14 is slidably arranged on the inclined-plane 15 of the first displacement piece 13, makes the second displacement piece 14 can edge
The inclined-plane 15 of the first displacement piece 13 slides, and when accurate displacement device 7 works, driving means 12 provides one
Fixed displacement promotes the first displacement piece 13, now, owing to restraint device 16 limits the second displacement piece 14 edge
Motion on first displacement piece 13 direction of displacement, makes direction of displacement and first displacement piece of the second displacement piece 14
The direction of displacement of 13 is perpendicular, and so, the displacement of the second displacement piece 14 and driving means 12 are first
The displacement that moving part 13 provides is correlated with, also with the angle on the inclined-plane 15 of the first displacement piece 13 with its direction of displacement
Relevant.
That is, if the inclined-plane of the first displacement piece 13 15 is A degree with the angle of its direction of displacement, driving means is worked as
When 12 displacements provided are X, the second displacement piece 14 is being perpendicular in driving means 12 direction of motion generation
Displacement be Y=Xtan (A).Preferably, when included angle A is less than 45 degree, one will be obtained and be less than
The displacement of X value, when further reducing included angle A, displacement Y reduces, so the most therewith so that
In the present embodiment, accurate displacement device 7, by the way of changing precision with stroke, directly enhances the present embodiment
The precision of accurate displacement device 7, the most further improves the certainty of measurement of the present embodiment laser interferometer.
Embodiment 4,
As in figure 2 it is shown, laser interferometer as described in Example 3, described first displacement piece 13 and described
Being additionally provided with the magnetic magnetic part 17 of tool between support platform 11, described second displacement piece 14 has magnetic,
Described second displacement piece 14 and described magnetic part 17 are that there is a natural attraction between the sexes state, described second displacement piece 14 and institute
State measurement corner reflector 6 for integral type structure.Make the first displacement piece 13 when being promoted, measure corner reflection
Mirror 6 can keep fitting tightly with the second displacement piece 14, it is ensured that the precision of the application accurate displacement device 7,
And then the certainty of measurement of guarantee the application laser interferometer, the second displacement piece 14 is one with measurement corner reflector 6
Body formula structure a, say, that directly reflecting surface is set in the second displacement piece 14 so that it is itself formed and survey
Angulation reflecting mirror 6, so, simplifies the structure of the present embodiment laser interferometer, convenient debugging and use.
Embodiment 5,
As shown in Figure 1, 2, a kind of measurement for above-mentioned optical maser wavelength amendment type corner reflector laser interferometer
Method, it includes following step:
Step one: install corner reflector laser interferometer of the present invention；
Step 2: measurement corner reflector device 4 is arranged on testee 10；
Step 3: debug corner reflector laser interferometer of the present invention, makes the satisfactory light path of formation,
Further, the first laser beam 8 and the second laser beam 9 is made to be in interference state；
Step 4: before starting to measure work, starts accurate displacement device 7, makes measurement corner reflector 6 produce position
Move, the direction of displacement of described measurement corner reflector 6 and the direction of displacement of testee 10 on the same line,
When photodetector 3 detects the strongest constructive interference, stop accurate displacement device 7, and by photodetector
3 countings reset；
Step 5: start to measure work, testee 10 starts mobile, and photodetector 3 records first and swashs
Light beam 8 and the times N of the second the strongest constructive interference of laser beam 9；
Step 6: testee 10 displacement terminates, and remains static, and is again started up accurate displacement device 7,
Measurement corner reflector 6 is made to produce displacement, the direction of displacement of described measurement corner reflector 6 and testee 10
Direction of displacement on the same line, when photodetector 3 detects the strongest constructive interference again, stops institute
State accurate displacement device 7, make measurement corner reflector 6 stop；
Step 7: read the shift value △ L that accurate displacement device 7 provides for described measurement corner reflector 6；
Step 8: the strongest constructive interference times N of recording light electric explorer 3 record and measurement corner reflector 6
Shifting value △ L.
Step 9: be again started up accurate displacement device 7, traverse measurement corner reflector 6, make photodetector 3
Record the number of times M (M is positive integer) of the strongest constructive interference, and it is corresponding to read M constructive interference the strongest
Measure corner reflector shift value Z.According to Z=M × λ '/2, draw under current measurement environment, the equivalent ripple of laser
Long λ '=2Z/M.
Step 10: calculate the shift value of testee 10.
If displacement △ L is identical with the direction of displacement of testee 10, then, the actual position produced of testee 10
Shifting value L=N × λ '/2+ (λ '/2-△ L), wherein △ L ＜ λ '/2, in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee 10, then, the actual position produced of testee 10
Shifting value L=N × λ '/2+ △ L, wherein △ L ＜ λ '/2, in formula, λ ' is laser effective wavelength.
The measuring method of the present embodiment, owing to replenishing testee by measurement corner reflector 6 shift value △ L
In the shift value of 10, directly enhance the certainty of measurement of testee 10 displacement.Meanwhile, measured by detection
Effective wavelength λ ' in environment, is i.e. modified the wavelength of laser, so reduces the mistake that environmental factors is brought
Difference, and then further improve the certainty of measurement of the application laser interferometer.
Embodiment 7,
As shown in Figure 1, 2, measuring method as described in Example 6, in described step 4 to step 9, institute
State the strongest constructive interference and can also is that the most weak destructive interference.In this programme, during measuring, light
Electric explorer 3 is record the first laser beam 8 and number of times of the second the most weak destructive interference of laser beam 9, so depends on
So can obtain the shift value L of a higher testee of precision 10.
Above example only in order to the present invention is described and and unrestricted technical scheme described in the invention, although
This specification with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention not office
It is limited to above-mentioned detailed description of the invention, the most any the present invention is modified or equivalent；And all do not take off
From technical scheme and the improvement thereof of the spirit and scope invented, it all should contain the claim model in the present invention
In the middle of enclosing.
Claims (6)
1. an optical maser wavelength amendment type corner reflector laser interferometer, it is characterised in that include lasing light emitter, fix
Corner reflector, photodetector, measurement corner reflector device and spectroscope, described measurement corner reflector device
Including measuring corner reflector and accurate displacement device, the laser beam of described lasing light emitter injection is after described spectroscope
Being divided into the first laser beam and the second laser beam, fixed angles reflecting mirror described in the first laser beam directive, through described solid
Determine after corner reflector reflection spectroscope described in directive again, then photodetector described in directive after spectroscope,
Corner reflector is measured, after described measurement corner reflector reflects again described in directive described in second laser beam directive
Spectroscope, photodetector described in directive after spectroscope, the first laser beam and the second laser beam are in directive institute
Interfering when stating photodetector, described measurement corner reflector is arranged on described accurate displacement device, institute
Stating accurate displacement device to be arranged on testee, described accurate displacement device is that described measurement corner reflector carries
For and testee displacement in the same direction or reverse displacement.
2. optical maser wavelength amendment type corner reflector laser interferometer as claimed in claim 1, it is characterised in that institute
State accurate displacement device and include support platform and the driving means being arranged in described support platform, described support
Platform matches with described testee, and described driving means provides at measured object for described measurement corner reflector
Displacement on displacement body direction.
3. optical maser wavelength amendment type corner reflector laser interferometer as claimed in claim 2, it is characterised in that institute
Stating driving means is Piezoelectric driving means.
4. optical maser wavelength amendment type corner reflector laser interferometer as claimed in claim 2 or claim 3, it is characterised in that
Also include the first displacement piece being arranged in described support platform and be arranged in described first displacement piece second
Displacement piece, described driving means matches with described first displacement piece, provides along institute for described first displacement piece
Stating the displacement of support platform, described first displacement piece has an inclined-plane tilted relative to its direction of displacement, institute
State the second displacement piece to be slidably arranged on the inclined-plane of described first displacement piece, make described second displacement piece can be along institute
The inclined-plane stating the first displacement piece slides, and snug fit between described first displacement piece and the second displacement piece is described
Measure corner reflector to be arranged in described second displacement piece, described support platform be additionally provided with restraint device,
Described restraint device limits described second displacement piece moving along described first displacement piece direction of displacement so that
When the first displacement piece is driven by described driving means and produces displacement, described second displacement piece is by described first
Displacement piece drives and produces displacement, and, the direction of displacement of described second displacement piece and described first displacement piece
Direction of displacement perpendicular, the inclined-plane of described first displacement piece and the angle of its direction of displacement are A degree, 0 < A < 45.
5. optical maser wavelength amendment type corner reflector laser interferometer as claimed in claim 4, it is characterised in that institute
State and between the first displacement piece and described support platform, be additionally provided with the magnetic magnetic part of tool, described second displacement
Part has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.
6. optical maser wavelength amendment type corner reflector laser interferometer as claimed in claim 4, it is characterised in that institute
Stating the second displacement piece with described measurement corner reflector is integral type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520966057.7U CN205619874U (en) | 2015-11-27 | 2015-11-27 | Laser wavelength revises formula corner reflection mirror laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520966057.7U CN205619874U (en) | 2015-11-27 | 2015-11-27 | Laser wavelength revises formula corner reflection mirror laser interferometer |
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| Publication Number | Publication Date |
|---|---|
| CN205619874U true CN205619874U (en) | 2016-10-05 |
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| CN201520966057.7U Expired - Fee Related CN205619874U (en) | 2015-11-27 | 2015-11-27 | Laser wavelength revises formula corner reflection mirror laser interferometer |
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| CN (1) | CN205619874U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105352435A (en) * | 2015-11-27 | 2016-02-24 | 成都信息工程大学 | Laser wavelength correction type corner reflector laser interferometer and measuring method |
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2015
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105352435A (en) * | 2015-11-27 | 2016-02-24 | 成都信息工程大学 | Laser wavelength correction type corner reflector laser interferometer and measuring method |
| CN105352435B (en) * | 2015-11-27 | 2018-03-27 | 成都信息工程大学 | Using the measuring method of optical maser wavelength amendment type corner reflector laser interferometer |
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Granted publication date: 20161005 Termination date: 20171127 |