CN105509636A - Wavelength correction type multi-beam-angle stepped reflector laser interferometer and measuring method thereof - Google Patents
Wavelength correction type multi-beam-angle stepped reflector laser interferometer and measuring method thereof Download PDFInfo
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- CN105509636A CN105509636A CN201510848301.4A CN201510848301A CN105509636A CN 105509636 A CN105509636 A CN 105509636A CN 201510848301 A CN201510848301 A CN 201510848301A CN 105509636 A CN105509636 A CN 105509636A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
Abstract
The invention discloses a wavelength correction type multi-beam-angle stepped reflector laser interferometer comprising a laser source, a spectroscope, a fixed stepped plane angle reflector, a measurement angle reflector unit, and a photoelectric detector group. The measurement angle reflector unit includes a measurement angle reflector and a precise displacement device. The laser source includes n parallel laser beams, wherein the n is larger than or equal to 2. The photoelectric detector group consists of n photoelectric detectors. The reflection planes of the fixed stepped plane angle reflector are n stepped planes; the space between each two reflection planes is expressed by a formula, wherein a k in the formula is a natural number. One beam of laser processed by the spectroscope is transmitted into one reflection plane and then is reflected to one photoelectric detector; and another beam of laser transmitted in the spectroscope is reflected by the measurement angle reflector and the spectroscope and enters the photoelectric detector. The laser interference phenomenon generated by the laser interferometer not only is associated with the laser wavelength but also is associated with the height difference value of the stepped reflection planes. The photoelectric detector group can detect displacement with the precision of a lambda/2n level. During the measurement process, the environment equivalent wavelength can be obtained by using the wavelength correction method, so that the measurement precision is improved obviously.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and measuring method thereof.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.In most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation, and reflects can be combined in spectroscope from stationary mirror and moving reflector respectively and produce interference fringe.When moving reflector moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receptacle and electronic circuit etc., after shaping, amplification, input up-down counter calculate overall pulse number, calculating formula L=N × λ/2 are pressed again by robot calculator, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates the displacement L of moving reflector.When using single frequency laser interferometer, require that ambient atmosphere is in steady state (SS), various air turbulence all can cause DC level change and affect measurement result.
One of weakness of single frequency laser interferometer is exactly seriously affected by environment, and severe at test environment, when measuring distance is longer, this shortcoming is very outstanding.Its reason is that it is a kind of direct current measurement system, must have the drawback of the gentle level drift of direct current light.When laser interferometer moveable mirror moves, photelectric receiver can output signal, if signal has exceeded the triggering level of counter, will go on record, if and laser beam intensity changes, with regard to likely making photosignal make counter stop counting lower than the triggering level of counter, the main cause of laser intensity or interference signal Strength Changes is made to be air turbulence, lathe mist of oil, cutting swarf is on the impact of light beam, and skew or corrugated distortion occur result light beam.
Single frequency laser interferometer is owing to measuring the problem of structure, and its measuring accuracy is limited to the wavelength of laser, and its precision can only be generally the integral multiple of its wavelength, is difficult to promote again, and the change of measurement environment simultaneously has considerable influence to measurement result.Along with the requirement of commercial production to precision measurement is more and more higher, the measuring accuracy of surveying instrument is had higher requirement.
Summary of the invention
The object of the invention is to overcome existing laser interferometer measurement precision and be limited to optical maser wavelength, measuring accuracy is difficult to the deficiency promoted, a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and measuring method thereof are provided, this laser interferometer is on the basis of existing Michelson laser interferometer, adopt n light source n ladder plane angle catoptron, measuring accuracy can reach
improve the measuring accuracy of this laser interferometer.Laser effective wavelength under measurement environment can be obtained by measuring method of the present invention, further increases the measuring accuracy of this laser interferometer.Simultaneously due to multi-pass interference state checker, there is higher antijamming capability to the environmental change of optical path.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, comprise lasing light emitter, spectroscope, fixed step plane angle catoptron, measured angular reflector apparatus, photodetector group, described measured angular reflector apparatus comprises measured angular catoptron and accurate displacement device, described measured angular catoptron is arranged on described accurate displacement device, described accurate displacement device is arranged on testee, described accurate displacement device for described measured angular catoptron provide with testee displacement in the same way or reverse displacement.Described lasing light emitter comprises n collimated laser beam, wherein n>=2, and described photodetector group comprises n photoelectric detector; Described fixed step plane angle catoptron (3) comprises two reflective steps faces at a right angle, and each described reflective steps face comprises n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection equals
wherein k is natural number, λ is the optical maser wavelength that lasing light emitter sends, and described measured angular catoptron comprises two planes of reflection at a right angle; Every Shu Jiguang that described lasing light emitter sends, after described dichroic mirror, injects a corresponding plane of reflection respectively, and each described plane of reflection will often restraint laser reflection each photoelectric detector to corresponding described photodetector group; Every Shu Jiguang that described lasing light emitter sends, after described spectroscope transmission, incides described measured angular catoptron back reflection each photoelectric detector to corresponding photodetector group respectively.
The laser beam quantity of this laser interferometer, the quantity of stepped appearance plane of reflection quantity and photoelectric detector is n (n >=2), and be one_to_one corresponding, namely each laser that lasing light emitter is launched is divided into two-way, beam of laser is by after dichroic mirror to one of them plane of the cascaded surface of fixed step plane angle catoptron, reflex to one of them photoelectric detector in photodetector group, another bundle laser straight reflexes to same photoelectric detector after being connected on and inciding measured angular catoptron after transmission in spectroscope again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at measured angular catoptron.Due to fixed step plane angle catoptron being stepped reflective surface, so each Shu Jiguang that lasing light emitter is launched is not identical by the light path of the light path after the cascaded surface reflection of fixed step plane angle catoptron, the retardation values arrived after each laser that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also have relation with the level difference of the ladder plane of reflection, adjacent two level differences of this cascaded surface (i.e. the stepped appearance plane of reflection) equal
because incident angle is 45 degree, equivalent optical path is
namely the height difference in adjacent steps face can be the same or different, and because every Shu Jiguang is after each plane of reflection reflection, light path is difference to some extent, and the height difference regardless of adjacent two planes of reflection is how many, and its optical path difference is λ/n+k λ.
Because in above-mentioned optical path difference formula, k λ can't affect the interference state of this beam laser, only have difference λ/n just can have an impact to the interference state of this beam laser, therefore, as long as measured angular catoptron carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, one of them of photoelectric detector in this photodetector group can detect the change that its laser interference state occurs, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of every two ladder planes of the cascaded surface of fixed step plane angle catoptron and the optical maser wavelength of lasing light emitter.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely introduce AC signal in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal.
It should be noted that, adjacent two level differences equal
whether real decision laser is in the just difference of the strongest interference state or the most weak interference state
difference k λ/2 increased are the height difference in order to increase adjacent two reflectings surface of cascaded surface, and parameter is more greatly for the ease of process and assemble.
Preferably, described fixed step plane angle catoptron comprises corner reflector body and n-1 reflection sheet combines, and the thickness of each described reflection sheet is
wherein k is natural number.
This cascaded surface is superimposed upon on corner reflector body by 2 × (n-1) individual reflection sheets and forms, and corner reflector body surface is laser interferometer normal mirror, and wherein the thickness of each reflection sheet is
k is natural number, and namely the thickness of each reflection sheet can be the same or different, but two cascaded surfaces should be symmetrical.
Preferably, each described reflection sheet thickness is
Preferably, described corner reflector body and reflection sheet are formed in one body, the height error of two ladder planes that adjacent two reflection sheets avoiding the reflection sheet of piecemeal to link together producing are formed.
Preferably, n described lasing light emitter is equally spaced, and the spacing of adjacent two described laser beam equals the integral multiple of optical maser wavelength.
Preferably, the spacing between the laser beam that sends of adjacent two described lasing light emitters is 100-10000 optical maser wavelength doubly.
In the such scheme of the application, due to measured angular catoptron is arranged on accurate displacement device, and accurate displacement device is arranged on testee, when testee is subjected to displacement, testee drives accurate displacement device, and then drive measured angular catoptron, so, when testee is subjected to displacement, in displacement process, due to the change of optical interference circuit light path, make, the laser interference state of corresponding light beam also changes thereupon, before starting surveying work, start accurate displacement device, measured angular catoptron is made to produce displacement, the sense of displacement of described measured angular catoptron and the sense of displacement of testee are on the same line, when any one photodetector in photodetector group detects the strongest constructive interference, stop accurate displacement device, and photodetector countings all in photodetector group are reset, and then start the displacement of measuring testee, in the interference state change procedure of corresponding laser beam, the total degree N of the strongest constructive interference of the corresponding optical interference circuit of all photodetectors register in photodetector group, when testee mobile end, when remaining static, photodetector group stops counting, now, by accurate displacement device, measured angular catoptron is moved on the sense of displacement of testee, and observe photodetector group, when any one photodetector in photodetector group detects the strongest constructive interference, stop accurate displacement device, and read the shift value △ L that accurate displacement device provides for measured angular catoptron.
If displacement △ L is identical with the sense of displacement of testee, then shift value L=N × λ/(2n)+(λ/(2n)-△ L) of the actual generation of testee, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength;
If displacement △ L is contrary with the sense of displacement of testee, then the shift value L=N × λ of the actual generation of testee/(2n)+△ L, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength.
So, pass through said structure, also measure add in displacement detecting result by exceeding 1/ (2n) individual optical maser wavelength part △ L in testee actual displacement, and then make the displacement result that obtains measured by the laser interferometer of the application more accurate, its degree of accuracy, higher than 1/ (2n) individual optical maser wavelength, specifically depends on the displacement accuracy that accurate displacement device can provide.
As the preferred version of the application, described accurate displacement device comprises support platform and is arranged on the drive unit in described support platform, described support platform matches with described testee, and described drive unit is the displacement that described measured angular catoptron is provided on testee sense of displacement.
As the preferred version of the application, described drive unit is Piezoelectric drive unit.
In this programme, adopt the ceramic material that mechanical energy and electric energy can be changed mutually by Piezoelectric drive unit, its deformation quantity produced under electric field action is very little, be no more than at most the micro-displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further increase accuracy and the reliability of the application's accurate displacement device.
As the preferred version of the application, described accurate displacement device also comprises the first displacement piece be arranged in described support platform and the second displacement piece be arranged in described first displacement piece, described drive unit matches with described first displacement piece, for described first displacement piece provides the displacement along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, described second displacement piece is slidably arranged on the inclined-plane of described first displacement piece, described second displacement piece can be slided along the inclined-plane of described first displacement piece, snug fit between described first displacement piece and the second displacement piece, described measured angular catoptron is arranged in described second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by described drive unit and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, and, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0<A<45.
In the such scheme of the application, drive unit matches with the first displacement piece, for the first displacement piece provides the displacement along support platform, first displacement piece has an inclined-plane tilted relative to its sense of displacement, second displacement piece is slidably arranged on the inclined-plane of the first displacement piece, second displacement piece can be slided along the inclined-plane of the first displacement piece, when accurate displacement device works, drive unit provides certain displacement to promote the first displacement piece, now, because restraint device limits the second displacement piece along moving on the first displacement piece sense of displacement, make the sense of displacement of the sense of displacement of the second displacement piece and the first displacement piece perpendicular, so, the displacement of the second displacement piece is relevant to the displacement that drive unit provides for the first displacement piece, also relevant with the angle of its sense of displacement to the inclined-plane of the first displacement piece.
Namely, if the inclined-plane of the first displacement piece and the angle of its sense of displacement are A degree, when the displacement that drive unit provides is X, second displacement piece is being Y=Xtan (A) perpendicular to the displacement that drive unit direction of motion produces, so, when included angle A is less than 45 degree, the displacement that one is less than X value will be obtained, when further reducing included angle A, displacement Y also reduces thereupon, so, make in the scheme of the application, accurate displacement device is by changing the mode of precision with stroke, directly enhance the precision of the application's accurate displacement device, also just further improve the measuring accuracy of the application's laser interferometer.
As the preferred version of the application, be also provided with the magnetic magnetic part of tool between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.Making the first displacement piece when being pushed, can keep fitting tightly with the second displacement piece, ensure the precision of the application's accurate displacement device, and then ensure the measuring accuracy of the application's laser interferometer.
As the preferred version of the application, described second displacement piece and described measured angular catoptron are integral type structure.
In such scheme, the second displacement piece and measured angular catoptron are integral type structure, that is, directly a reflecting surface is set in the second displacement piece, makes itself to form measured angular catoptron, so, simplify the structure of the application's laser interferometer, convenient debugging and use.
Although at present, also there is the device measuring air refraction, the atmospheric temperature of single locus, humidity and air pressure are measured, by wavelength compensation formula, optical maser wavelength is revised, but it is merely able to detect local air, and in the displacement measurement field of the application, because its displacement carries out in a region, in this region, each parameter of the air of each position all has difference, particularly there is the situations such as larger thermograde, moist gradient and barometric gradient, comparatively big error will be there is with single-point parameters revision optical maser wavelength.
So, for these reasons, in this application, in measuring process, under detecting current measurement environment, the environment effective wavelength λ ' of laser, and this λ ' value is the effective wavelength of current measurement environment, so the problem directly avoiding zones of different air refraction difference and bring, so, reduce the error that environmental factor is brought, and then further improve the measuring accuracy of the application's laser interferometer and measuring method thereof.
Disclosed herein as well is a kind of measuring method for above-mentioned wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, it includes following step:
Step one: install wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer;
Step 2: measured angular reflector apparatus is arranged on testee;
Step 3: debugging wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, makes the satisfactory light path of formation, and make each optical interference circuit be in interference state;
Step 4: before starting surveying work, start accurate displacement device, measured angular catoptron is made to produce displacement, the sense of displacement of described measured angular catoptron and the sense of displacement of testee are on the same line, when there being any one the strongest constructive interference to be detected in photodetector group, stop accurate displacement device, and photodetector group counting is reset;
Step 5: start surveying work, testee starts mobile, the total degree N of the strongest constructive interference of the corresponding optical interference circuit of all photodetectors register in photodetector group;
Step 6: testee displacement terminates, remain static, again start accurate displacement device, measured angular catoptron is made to produce displacement, the sense of displacement of described measured angular catoptron and the sense of displacement of testee are on the same line, when any one photodetector in photodetector group detects the strongest constructive interference again, stop described accurate displacement device, measured angular catoptron is stopped;
Step 7: read the shift value △ L that accurate displacement device provides for described measured angular catoptron;
Step 8: the strongest constructive interference total degree N and the measured angular mirror displacements value △ L that record photodetector group record in measuring process.
Step 9: again start accurate displacement device, traverse measurement corner reflector, makes the total degree M of the strongest constructive interference of photodetector group record (M is positive integer), and reads measured angular mirror displacements value Z corresponding to M constructive interference the strongest.According to Z=M × λ '/(2n), under drawing current measurement environment, effective wavelength the λ '=2nZ/M of laser.
Step 10: the shift value calculating testee.
If displacement △ L is identical with the sense of displacement of testee, then, shift value L=N × λ '/(2n) of the actual generation of testee+(λ '/(2n)-△ L), wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength;
If displacement △ L is contrary with the sense of displacement of testee, then, the shift value L=N × λ ' of the actual generation of testee/(2n)+△ L, wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing in the shift value of testee by measured angular mirror displacements value △ L, directly enhances the measuring accuracy of testee displacement., by detecting the effective wavelength λ ' in measurement environment, namely the wavelength of laser being revised meanwhile, so reducing the error that environmental factor is brought, and then further improve the measuring accuracy of the application's laser interferometer and measuring method thereof.
As the preferred version of the application, described step 4 is in step 9, and the strongest described constructive interference can also be the most weak destructive interference.In this programme, carrying out in measuring process, photodetector group is the total degree of the most weak destructive interference of recording corresponding each laser interference light path, so still can obtain the shift value L of the higher testee of precision.
Compared with prior art, beneficial effect of the present invention:
(1) the laser beam quantity of the lasing light emitter transmitting of this wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, the quantity of stepped appearance plane of reflection quantity and photoelectric detector is n (n>=2), and one_to_one corresponding, the each Shu Jiguang launched due to lasing light emitter is different by the light path of the light path after Different Plane reflection on the cascaded surface of fixed step plane angle catoptron, the retardation values arrived after each laser that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, whether each photoelectric detector can detect two corresponding bundle laser can interfere phenomenon, the generation of this interference is not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level differences of this cascaded surface equal
because incident angle is 45 degree, equivalent optical path is
therefore, as long as measured angular catoptron carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photoelectric detector in this photodetector group one of them can only can detect that it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer is λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, its measuring accuracy obtains significant raising.Simultaneously owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
(2) in measuring process, detect the effective wavelength λ ' of laser in measurement environment, optical maser wavelength is revised, so, reduce the error that environmental factor is brought, and then further improve the measuring accuracy of the application's laser interferometer.
Accompanying drawing illustrates:
Laser optical path schematic diagram when Fig. 1 is wavelength amendment type multiple beam angle of the present invention ladder reflecting mirror laser interferometer use;
Fig. 2 is the structural representation of lasing light emitter in Fig. 1;
Fig. 3 is the structural representation of the stepped appearance plane of reflection of fixed step plane angle catoptron in Fig. 1.
Fig. 4 is measured angular catoptron and the second displacement piece integral structure figure
Mark in figure:
1, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3, fixed step plane angle catoptron, 31, catoptron body, 32, reflection sheet, 4, measured angular reflector apparatus, 5, photodetector group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photoelectric detector three, 54, photoelectric detector four, 6, accurate displacement device, 7, measured angular catoptron, 8, supporting platform, 9, drive unit, 10, restraint device, 11, magnetic part, 12, testee, 13, first displacement piece, 14, second displacement piece, 15, inclined-plane.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
As shown in Figure 1, a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, comprise lasing light emitter 1, spectroscope 2, fixed step plane angle catoptron 3, measured angular reflector apparatus 4, photodetector group 5, described measured angular catoptron group 4 comprises measured angular catoptron 7 and accurate displacement device 6, measured angular catoptron 7 comprises two planes of reflection at a right angle, described measured angular catoptron 7 is arranged on described accurate displacement device 6, described accurate displacement device 6 is arranged on testee 12, described accurate displacement device 6 for described measured angular catoptron 7 provide with testee 12 displacement in the same way or reverse displacement,
Described lasing light emitter 1 comprises n collimated laser beam, n>=2, and photodetector group 5 also comprises n photoelectric detector, and the reflecting surface of fixed step plane angle catoptron 3 is symmetrical n the stepped appearance plane of reflection, and the spacing h of adjacent two planes of reflection equals
wherein k is random natural number, λ is the optical maser wavelength that lasing light emitter 1 sends; Each laser beam that lasing light emitter 1 sends, after spectroscope 2 reflects, injects a corresponding ladder reflecting surface respectively, and each ladder reflecting surface will often restraint laser reflection to corresponding photoelectric detector; Each laser beam that lasing light emitter 1 sends, after spectroscope 2 transmission, reflexes to corresponding photoelectric detector again after inciding measured angular catoptron 7 respectively.It should be noted that, the λ in literary composition is the optical maser wavelength that lasing light emitter 1 sends, and the often bundle optical maser wavelength that lasing light emitter 1 sends is all the same.
The laser beam quantity that the lasing light emitter 1 of this laser interferometer sends, the photoelectric detector quantity of cascaded surface plane quantity and photodetector group 5 is n (n >=2), and be one_to_one corresponding, namely every Shu Jiguang that lasing light emitter 1 is launched is divided into two-way, beam of laser reflexes to one of them plane of the cascaded surface of fixed step plane angle catoptron 3 by spectroscope 2 after, be reflected back spectroscope 2 and reenter one of them photoelectric detector be mapped in photodetector group 5, another bundle laser straight reflexes to spectroscope 2 after being connected on and inciding measured angular catoptron 7 after transmission in spectroscope 2 again, spectroscope 2 reflects it to same photoelectric detector again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at measured angular catoptron 7.Due to the cascaded surface on fixed step plane angle catoptron 3, so each Shu Jiguang that lasing light emitter 1 is launched is not identical by the light path of the light path after the cascaded surface reflection of fixed step plane angle catoptron 3, the retardation values arrived after each laser that lasing light emitter 1 is launched simultaneously is divided into two-way after corresponding photodetector group 5 is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level difference h of this cascaded surface equal
because incident angle is 45 degree, equivalent optical path is
therefore, as long as measured angular catoptron 7 carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photodetector group 5 on this photodetector all has one of them to detect, and it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of adjacent two ladder planes of the cascaded surface of fixed step plane angle catoptron 3 and the optical maser wavelength of lasing light emitter 1.
The reflection sheet 32 that this fixed step plane angle catoptron 3 comprises the individual thickness h of corner reflector body 31 and 2 × (n-1) identical combines, and the thickness h of each described reflection sheet 32 is
each cascaded surface of fixed step plane angle catoptron 3 is superimposed upon on corner reflector body 31 by the reflection sheet 32 that n-1 thickness h is identical and forms, corner reflector body 31 is the laser interferometer normal mirror of surface for plane, and wherein the thickness h of each reflection sheet 32 is
simultaneously, the reflection sheet 32 that the individual thickness h of this corner reflector body 31 and 2 × (n-1) is identical can be formed in one body, the height error of two ladder planes that adjacent two reflection sheets 32 avoiding the reflection sheet 32 of piecemeal to link together producing are formed.
As shown in Figure 2, n the laser beam that all lasing light emitters 1 send is equally spaced, now, select n=4, k=0, the laser beam that lasing light emitter 1 sends is respectively laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14, and the spacing e of adjacent two laser beam equals the integral multiple of optical maser wavelength.Spacing e between adjacent two laser beam is preferably 100-10000 optical maser wavelength doubly.Preferably, if select adjacent two laser beam spacing e to be 1000 times of optical maser wavelength, then the optical maser wavelength of preferred 663 nanometers, the spacing e of adjacent laser beams that so adjacent laser source 1 sends is 6.63 millimeters.The photoelectric detector that corresponding photodetector group 5 receives laser is also respectively four, i.e. photoelectric detector 1, photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54.
Now, the stepped appearance plane of reflection on fixed step plane angle catoptron 3 is also corresponding elects four as, as shown in Figure 3, selects four planes of reflection to become stepped appearance plane so that process and reduce costs.This light path route is that the laser that laser beam 1 sends is divided into two-way at spectroscope 2, one tunnel is split after mirror 2 reflects and incides fixed step plane angle catoptron 3, transmission incide photoelectric detector 1 again after being reflected to spectroscope 2, another road of this laser is then direct incides measured angular catoptron 7 after spectroscope 2 transmission, after being reflected to spectroscope 2, spectroscope 2 again by this laser reflection to photoelectric detector 1.By that analogy, other laser beam 2 12, laser beam 3 13, laser beam 4 14 are reflected by the plane of reflection respectively and are received by photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54 respectively.According to calculating, owing to have employed four stepped appearance planes of reflection, the difference in height of adjacent two planes of reflection is
because incident angle is 45 degree, equivalent optical path is
therefore the retardation values of laser after the reflection of fixed step plane angle catoptron 3 sent by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14 is respectively a
1λ, a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, wherein a
1, a
2, a
3, a
4for natural number.
When laser beam 1 be in the strongest interference state time, the retardation values after the laser that namely laser beam 1 sends is divided into two-way is a
1λ, can measure laser by photoelectric detector 1 and be in the strongest interference state, now laser beam 2 12 to optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 the two-way retardation values of optical interference circuit is respectively: a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, three's light path is now all in the strongest non-interference state.
When measured angular catoptron 7 moves λ/8, when the two bundle laser retardation values that lasing light emitter 1 is divided into increase λ/4, laser light path difference also corresponding increase λ/4 of other lasing light emitters, now, the retardation values that the laser that laser beam 1 sends is divided into two-way is a
1λ+λ/4, are in the strongest non-interference state, and the retardation values that the laser that laser beam 2 12 sends is divided into two-way then becomes a
2λ, therefore photoelectric detector 2 52 can detect that optical interference circuit is in the strongest interference state, and the laser of laser beam 3 13 and laser beam 4 14 is also in the strongest non-interference state.When measured angular catoptron 7 moves λ/4, laser beam 3 13 will be in the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 3 53.
Similar, when measured angular catoptron 7 moves 3 λ/8, when the two bundle laser retardation values that laser beam 1 is divided into increase by 3 λ/4, laser light path difference also corresponding increase by 3 λ/4 of other laser beam, the retardation values that the laser that now laser beam 4 14 sends is divided into two-way then becomes a
4λ, the two-way light path that its laser is divided into will be in the strongest interference state, can measure the strongest interference state of laser by photoelectric detector 4 54.
Again, when measured angular catoptron 7 moves λ/2, when the two bundle laser retardation values that laser beam 1 is divided into increase λ, the laser light path difference also corresponding increase λ of other laser beam, laser beam 1 will be in again the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 1.Therefore, be just λ/8 for the measuring accuracy corresponding to the laser interferometer corresponding to four-step planar laser reflection configuration, namely measured angular catoptron 7 displacement is equal to or greater than λ/8, and namely corresponding photodetector group 5 can observe the interference state significant change of the light path of the four bundle laser that lasing light emitter 1 is launched.
Therefore, the ladder plane of reflection quantity increasing fixed step plane angle catoptron 3 can improve measuring accuracy, when the laser mirror structure of the employing 8 ladder plane of reflection, the corresponding measuring accuracy corresponding to laser interferometer is then λ/16, when adopting fixed step plane angle catoptron 3 structure of the n ladder plane of reflection, the measuring accuracy of this laser interferometer is just corresponding becomes λ/2n.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
In the present embodiment, due to measured angular catoptron 7 is arranged on accurate displacement device 6, and accurate displacement device 6 is arranged on testee 12, when testee 12 is subjected to displacement, testee 12 drives accurate displacement device 6, and then drive measured angular catoptron 7, so, when testee 12 is subjected to displacement, in displacement process, the interference state of each laser interference light path that laser interferometer of the present invention is corresponding also changes thereupon, before starting surveying work, start accurate displacement device 6, measured angular catoptron 7 is made to produce displacement, the sense of displacement of described measured angular catoptron 7 and the sense of displacement of testee 12 are on the same line, when any one photodetector in photodetector group 5 detects the strongest constructive interference, stop accurate displacement device 6, and photodetector countings all in photodetector group 5 are reset, and then start the displacement of measuring testee 12, in the interference state change procedure of corresponding each laser interference light path, the total degree N of the strongest constructive interference of each photodetectors register of photodetector group 5, when testee 12 mobile end, when remaining static, photodetector group 5 stops counting, now, by accurate displacement device 6, measured angular catoptron 7 is moved on the sense of displacement of testee 12, and observe photodetector group 5, when any one photodetector in photodetector group 5 detects the strongest constructive interference, stop accurate displacement device 6, and read the shift value △ L that accurate displacement device 6 provides for measured angular catoptron 7.
If displacement △ L is identical with the sense of displacement of testee 12, then, shift value L=N × λ/(2n)+(λ/(the 2n)-△ L) that testee 12 reality produces, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength;
And if displacement △ L is contrary with the sense of displacement of testee 12, then, shift value L=N × λ/(2n)+△ L that testee 12 reality produces, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength.
So, pass through said structure, the part △ L exceeding laser wavelength lambda/(2n) in testee 12 actual displacement is also measured and adds in displacement detecting result, and then make the displacement result that obtains measured by the laser interferometer of the application more accurate, its precision, higher than half optical maser wavelength, specifically depends on the displacement accuracy that accurate displacement device 6 can provide.
Embodiment 2,
As shown in Fig. 1,4, laser interferometer as described in Example 1, the drive unit 9 that described accurate displacement device 6 comprises support platform 8 and is arranged in described support platform 8, described support platform 8 matches with described testee 12, described drive unit 9 is the displacement that described measured angular catoptron 7 is provided on testee 12 sense of displacement, and described drive unit 9 is Piezoelectric drive unit.
In the present embodiment, the Piezoelectric drive unit 9 adopted is ceramic material mechanical energy and electric energy can changed mutually, its deformation quantity produced under electric field action is very little, be no more than at most the micro-displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further increase the precision of accurate displacement device 6 in the present embodiment.
Embodiment 3,
As Fig. 1, shown in 4, laser interferometer as described in Example 2, described accurate displacement device 6 also comprises the first displacement piece 13 be arranged in described support platform 8 and the second displacement piece 14 be arranged in described first displacement piece 13, described drive unit 9 matches with described first displacement piece 13, for described first displacement piece 13 provides the displacement along described support platform 8, described first displacement piece 13 has an inclined-plane 15 tilted relative to its sense of displacement, described second displacement piece 14 is slidably arranged on the inclined-plane 15 of described first displacement piece 13, described second displacement piece 14 can be slided along the inclined-plane 15 of described first displacement piece 13, snug fit between described first displacement piece 13 and the second displacement piece 14, described measured angular catoptron 7 is arranged in described second displacement piece 14, described support platform 8 is also provided with restraint device 10, described restraint device 10 limits described second displacement piece 14 along moving on described first displacement piece 13 sense of displacement, make when the first displacement piece 13 is driven by described drive unit 9 and produces displacement, described second displacement piece 14 is driven by described first displacement piece 13 and produces displacement, and, the sense of displacement of described second displacement piece 14 and the sense of displacement of described first displacement piece 13 perpendicular, the inclined-plane 15 of described first displacement piece 13 is A degree with the angle of its sense of displacement, preferred 0<A<45.
In an embodiment, drive unit 9 matches with the first displacement piece 13, for the first displacement piece 13 provides the displacement along support platform 8, first displacement piece 13 has an inclined-plane 15 tilted relative to its sense of displacement, second displacement piece 14 is slidably arranged on the inclined-plane 15 of the first displacement piece 13, second displacement piece 14 can be slided along the inclined-plane 15 of the first displacement piece 13, when accurate displacement device 6 works, drive unit 9 provides certain displacement to promote the first displacement piece 13, now, because restraint device 10 limits the second displacement piece 14 along moving on the first displacement piece 13 sense of displacement, make the sense of displacement of the sense of displacement of the second displacement piece 14 and the first displacement piece 13 perpendicular, so, the displacement of the second displacement piece 14 is relevant to the displacement that drive unit 9 provides for the first displacement piece 13, also relevant with the angle of its sense of displacement to the inclined-plane 15 of the first displacement piece 13.
That is, if the inclined-plane 15 of the first displacement piece 13 is A degree with the angle of its sense of displacement, when the displacement that drive unit 9 provides is X, the second displacement piece 14 is being Y=Xtan (A) perpendicular to the displacement that drive unit 9 direction of motion produces.Preferably, when included angle A is less than 45 degree, the displacement that one is less than X value will be obtained, when further reducing included angle A, displacement Y also reduces thereupon, so, make in the present embodiment, accurate displacement device 6, by changing the mode of precision with stroke, directly enhances the precision of the present embodiment accurate displacement device 6, also just further improves the measuring accuracy of the present embodiment laser interferometer.
Embodiment 4,
As shown in Figure 4, laser interferometer as described in Example 3, the magnetic magnetic part 11 of tool is also provided with between described first displacement piece 13 and described support platform 8, described second displacement piece 14 has magnetic, state that described second displacement piece 14 and described magnetic part 11 be that there is a natural attraction between the sexes, described second displacement piece 14 and described measured angular catoptron 7 are integral type structure.Make the first displacement piece 13 when being pushed, measured angular catoptron 7 can keep fitting tightly with the second displacement piece 14, ensure the precision of the application's accurate displacement device 6, and then ensure the measuring accuracy of the application's laser interferometer, the second displacement piece 14 is integral type structure with measured angular catoptron 7, that is, directly a reflecting surface is set in the second displacement piece 14, makes itself to form measured angular catoptron 7, so, simplify the structure of the present embodiment laser interferometer, convenient debugging and use.
Embodiment 5,
As shown in Fig. 1,4, a kind of measuring method for above-mentioned wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, it includes following step:
Step one: install wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer;
Step 2: measured angular reflector apparatus 4 is arranged on testee 12;
Step 3: debugging wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, makes the satisfactory light path of formation, and make each optical interference circuit be in interference state;
Step 4: before starting surveying work, start accurate displacement device 6, measured angular catoptron 7 is made to produce displacement, the sense of displacement of described measured angular catoptron 7 and the sense of displacement of testee 12 are on the same line, when there being any one the strongest constructive interference to be detected in photodetector group 5, stop accurate displacement device 6, and photodetector group 5 is counted clearing;
Step 5: start surveying work, testee 12 starts mobile, the total degree N of the strongest constructive interference of the corresponding optical interference circuit of all photodetectors register in photodetector group 5;
Step 6: testee 12 displacement terminates, remain static, again start accurate displacement device 6, measured angular catoptron 7 is made to produce displacement, the sense of displacement of described measured angular catoptron 7 and the sense of displacement of testee 12 are on the same line, when any one photodetector in photodetector group 5 detects the strongest constructive interference again, stop described accurate displacement device 6, measured angular catoptron 7 is stopped;
Step 7: read the shift value △ L that accurate displacement device 6 provides for described measured angular catoptron 7;
Step 8: the strongest constructive interference total degree N that in record measuring process, photodetector group 5 records and measured angular catoptron 7 shift value △ L.
Step 9: again start accurate displacement device 6, traverse measurement corner reflector 7, makes photodetector group 5 record the total degree M (M is positive integer) of the strongest constructive interference, and read measured angular catoptron 7 shift value Z corresponding to M constructive interference the strongest.According to Z=M × λ '/(2n), under drawing current measurement environment, effective wavelength the λ '=2nZ/M of laser.
Step 10: the shift value calculating testee 12.
If displacement △ L is identical with the sense of displacement of testee 12, then, shift value L=N × λ '/(2n) that testee 12 reality produces+(λ '/(2n)-△ L), wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength;
If displacement △ L is contrary with the sense of displacement of testee 12, then, shift value L=N × λ ' that testee 12 reality produces/(2n)+△ L, wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to being replenished in the shift value of testee 12 by measured angular catoptron 7 shift value △ L, directly enhances the measuring accuracy of testee 12 displacement.
Embodiment 6,
As shown in Fig. 1,4, measuring method as described in Example 5, described step 4 is in step 9, and the strongest described constructive interference can also be the most weak destructive interference.In this programme, carrying out in measuring process, photodetector group 5 records the number of times of the most weak destructive interference of each laser interference light path, so still can obtain the shift value L of the higher testee 12 of precision.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (8)
1. a wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, comprise lasing light emitter (1), spectroscope (2), fixed step plane angle catoptron (3), measured angular reflector apparatus (4), photodetector group (5), it is characterized in that:
Described measured angular reflector apparatus (4) comprises measured angular catoptron (7) and accurate displacement device (6), described measured angular catoptron (7) is arranged on described accurate displacement device (6), described accurate displacement device (6) is arranged on testee, described accurate displacement device (6) for described measured angular catoptron (7) provide with testee displacement in the same way or reverse displacement;
Described lasing light emitter (1) comprises n collimated laser beam, wherein n >=2, and described photodetector group (5) comprises n photoelectric detector;
Described fixed step plane angle catoptron (3) comprises two reflective steps faces at a right angle, and each described reflective steps face comprises n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection equals
wherein k is natural number, λ is the optical maser wavelength that lasing light emitter (1) sends, and described measured angular catoptron (7) comprises two planes of reflection at a right angle;
Every Shu Jiguang that described lasing light emitter (1) sends is after described spectroscope (2) reflection, inject a corresponding plane of reflection respectively, each described plane of reflection will often restraint laser reflection each photoelectric detector to corresponding described photodetector group (5); Every Shu Jiguang that described lasing light emitter (1) sends, after described spectroscope (2) transmission, incides described measured angular catoptron (7) back reflection each photoelectric detector to corresponding photodetector group (5) respectively.
2. a kind of wavelength amendment type multiple beam angle according to claim 1 ladder reflecting mirror laser interferometer, it is characterized in that, described accurate displacement device comprises support platform and is arranged on the drive unit in described support platform, described support platform matches with described testee, and described drive unit is the displacement that described measured angular catoptron is provided on testee sense of displacement.
3., according to a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer shown in claim 2, it is characterized in that, described drive unit is Piezoelectric drive unit.
4. a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer according to Claims 2 or 3, it is characterized in that, also comprise the first displacement piece be arranged in described support platform and the second displacement piece be arranged in described first displacement piece, described drive unit matches with described first displacement piece, for described first displacement piece provides the displacement along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, described second displacement piece is slidably arranged on the inclined-plane of described first displacement piece, described second displacement piece can be slided along the inclined-plane of described first displacement piece, snug fit between described first displacement piece and the second displacement piece, described measured angular catoptron is arranged in described second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by described drive unit and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, and, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0<A<45.
5. wavelength amendment type multiple beam angle as claimed in claim 4 ladder reflecting mirror laser interferometer, it is characterized in that, the magnetic magnetic part of tool is also provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.
6. wavelength amendment type multiple beam angle as claimed in claim 4 ladder reflecting mirror laser interferometer, it is characterized in that, described second displacement piece and described measured angular catoptron are integral type structure.
7. adopt a measuring method for wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer as described in claim 1-6 any one, it is characterized in that, it comprises the steps:
Step one: install wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer;
Step 2: measured angular reflector apparatus is arranged on testee;
Step 3: debugging wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, makes the satisfactory light path of formation, and make each optical interference circuit be in interference state;
Step 4: before starting surveying work, start accurate displacement device, measured angular catoptron is made to produce displacement, the sense of displacement of described measured angular catoptron and the sense of displacement of testee are on the same line, when there being any one the strongest constructive interference to be detected in photodetector group, stop accurate displacement device, and photodetector group counting is reset;
Step 5: start surveying work, testee starts mobile, the total degree N of the strongest constructive interference of the corresponding optical interference circuit of all photodetectors register in photodetector group;
Step 6: testee displacement terminates, remain static, again start accurate displacement device, measured angular catoptron is made to produce displacement, the sense of displacement of described measured angular catoptron and the sense of displacement of testee are on the same line, when any one photodetector in photodetector group detects the strongest constructive interference again, stop described accurate displacement device, measured angular catoptron is stopped;
Step 7: read the shift value △ L that accurate displacement device provides for described measured angular catoptron;
Step 8: the strongest constructive interference total degree N and the measured angular mirror displacements value △ L that record photodetector group record in measuring process.
Step 9: again start accurate displacement device, traverse measurement corner reflector, makes the total degree M of the strongest constructive interference of photodetector group record (M is positive integer), and reads measured angular mirror displacements value Z corresponding to M constructive interference the strongest.According to Z=M × λ '/(2n), under drawing current measurement environment, effective wavelength the λ '=2nZ/M of laser.
Step 10: the shift value calculating testee.
If displacement △ L is identical with the sense of displacement of testee, then, shift value L=N × λ '/(2n) of the actual generation of testee+(λ '/(2n)-△ L), wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength;
If displacement △ L is contrary with the sense of displacement of testee, then, the shift value L=N × λ ' of the actual generation of testee/(2n)+△ L, wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength.
8. measuring method as claimed in claim 7, it is characterized in that, described step 4 is in step 9, and the strongest described constructive interference can also be the most weak destructive interference.
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