CN205388457U - Many laser angle of wavelength correction formula ladder speculum laser interferometer - Google Patents
Many laser angle of wavelength correction formula ladder speculum laser interferometer Download PDFInfo
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- CN205388457U CN205388457U CN201520967088.4U CN201520967088U CN205388457U CN 205388457 U CN205388457 U CN 205388457U CN 201520967088 U CN201520967088 U CN 201520967088U CN 205388457 U CN205388457 U CN 205388457U
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Abstract
The utility model discloses a many laser angle of wavelength correction formula ladder speculum laser interferometer, including the laser source, the spectroscope, fixed ladder plane angle speculum, measurement angle reflecting mirror device, photoelectric detector group, wherein measurement angle reflecting mirror device includes measurement angle speculum and precise displacement device, the laser source includes n, individual collimated laser beam, N >= 2, photoelectric detector group is including a n photoelectric detector spare, the plane of reflection of fixed ladder plane angle speculum is a n ladder plane, two adjacent reflection plane intervals are (img file='DDA0000859615930000011. TIF'wi='283'he='139' /) (k is the natural number), one of them reflection plane back reflection of a branch of laser light incident a to photoelectric detector after the spectroscope effect, another shu jiguang of transmission in the while spectroscope also incides to this photoelectric detector after measurement angle speculum, spectroscope reflection. The laser Interferometer phenomenon that this laser interferometer produced is not only relevant with laser wavelength, and is still relevant with the high difference of stairstepping reflection plane, and this photoelectric detector group can detect the precision and reach lambda / other displacement of 2n level, in the measurement process, adopts wavelength correcting method to obtain environment equivalent wavelength simultaneously, is showing and is improving measurement accuracy.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly to a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has the features such as brightness height, good directionality, monochromaticity and coherence are good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: accurate length, angle measure as linear scale, grating, gauge block, precision lead screw detection；The control of the such as precision optical machinery of the position detecting system in precision instrument, correction；Position detecting system in large scale integrated circuit special equipment and detecting instrument；Minute sized measurement etc..In most of laser interference length-measuring systems, all have employed Michelson's interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation, and reflects from stationary mirror and moving reflector respectively and can be combined in spectroscope and produce interference fringe.When moving reflector moves, the light intensity of interference fringe changes by accepterPhotoelectricityConversion element and electronic circuit etc. are converted to electric impulse signal, shaped, amplify after input forward-backward counter calculate alwaysPulseNumber, then by electronic computer by calculating formula L=N × λ/2, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates the displacement L of moving reflector.When using single frequency laser interferometer, it is desirable to ambient atmosphere is in steady statue, various air turbulences all can cause DC level change to affect measurement result.
One of weakness of single frequency laser interferometer be exactly affected by environment seriously, severe at test environment, measure distance longer time, this shortcoming is very prominent.Its reason is in that it is a kind of DC measurement system, necessarily has the drawback of the gentle level drift of direct current light.When laser interferometer moveable mirror moves, photelectric receiver can export signal, if signal has exceeded the triggering level of enumerator, will be recorded, if and laser beam intensity changes, being possible to make photosignal make enumerator stop counting lower than the triggering level of enumerator, the main cause making laser intensity or interference signal Strength Changes is air turbulence, lathe mist of oil, the cutting swarf impact on light beam, there is skew or corrugated distortion in result light beam.
Single frequency laser interferometer is due to the problem of measurement structure, and its certainty of measurement is limited to the wavelength of laser, and its precision is generally only the integral multiple of its wavelength, is difficult to promote again, and measurement result is had considerable influence by the change simultaneously measuring environment.Along with commercial production is more and more higher to the requirement of accurate measurement, the certainty of measurement measuring instrument is had higher requirement.
Summary of the invention
It is an object of the invention to overcome existing laser interferometer measurement precision to be limited to optical maser wavelength, certainty of measurement is difficult to the deficiency promoted, a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and measuring method thereof are provided, this laser interferometer is on the basis of existing Michelson laser interferometer, adopting n light source n ladder plane angle reflecting mirror, certainty of measurement can reachImprove the certainty of measurement of this laser interferometer.The laser effective wavelength measured under environment can be obtained by measuring method of the present invention, further increases the certainty of measurement of this laser interferometer.Simultaneously because multi-pass interference state checker, the environmental change of optical path there is higher capacity of resisting disturbance.
In order to realize foregoing invention purpose, the invention provides techniques below scheme:
A kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, including lasing light emitter, spectroscope, fixed step plane angle reflecting mirror, measure corner reflector device, photodetector group, described measurement corner reflector device includes measuring corner reflector and accurate displacement device, described measurement corner reflector is arranged on described accurate displacement device, described accurate displacement device is arranged on testee, and described accurate displacement device provides with testee displacement in the same direction or reverse displacement for described measurement corner reflector.Described lasing light emitter includes n collimated laser beam, wherein n >=2, and described photodetector group includes n photoelectric detector；Described fixed step plane angle reflecting mirror (3) includes at a right angle two reflective steps face, and each described reflective steps face includes n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection is equal toWherein k is natural number, λ is the optical maser wavelength that lasing light emitter sends, and described measurement corner reflector includes at a right angle two plane of reflection；Every Shu Jiguang that described lasing light emitter sends, after described dichroic mirror, injects a corresponding plane of reflection respectively, and each described plane of reflection will often restraint laser-bounce each photoelectric detector to corresponding described photodetector group；Every Shu Jiguang that described lasing light emitter sends, after described spectroscope transmission, incides described measurement corner reflector back reflection each photoelectric detector to corresponding photodetector group respectively.
The laser beam quantity of this laser interferometer, the quantity of stairstepping plane of reflection quantity and photoelectric detector is n (n >=2), and be one_to_one corresponding, namely each laser that lasing light emitter is launched is divided into two-way, beam of laser passes through dichroic mirror after one of them plane of the cascaded surface of fixed step plane angle reflecting mirror, reflex to one of them photoelectric detector in photodetector group, another bundle laser straight is re-reflected into same photoelectric detector after being connected in spectroscope after transmission to incide measurement corner reflector, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at measurement corner reflector.Owing to fixed step plane angle reflecting mirror being stepped reflective surface, so each Shu Jiguang that lasing light emitter is launched is differed by the light path of the light path after the cascaded surface reflection of fixed step plane angle reflecting mirror, each laser that simultaneously lasing light emitter is launched arrive the photoelectric detector of correspondence after being divided into two-way after retardation values all differ, phenomenon can be interfered not only relevant with the wavelength of laser, also having relation with the level difference of the ladder plane of reflection, adjacent two level differences of this cascaded surface (i.e. the stairstepping plane of reflection) are equal toOwing to angle of incidence is 45 degree, equivalent optical path isNamely the height difference in adjacent steps face can be the same or different, and owing to every Shu Jiguang is after each plane of reflection reflects, light path is difference to some extent, and the height difference regardless of adjacent two planes of reflection is how many, and its optical path difference is λ/n+k λ.
Owing in above-mentioned optical path difference formula, k λ can't affect the interference state of this beam laser, only the interference state of this beam laser just can be produced impact by difference λ/n, therefore, as long as measuring corner reflector to move the distance of λ/2n or the distance of integer times λ/2n, the at least one of which of the photoelectric detector in this photodetector group is capable of detecting when the change that its laser interference state occurs, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this certainty of measurement is significantly improved, namely this certainty of measurement is determined by the spacing (being alternatively referred to as height or thickness) of each two ladder plane of the cascaded surface of fixed step plane angle reflecting mirror and the optical maser wavelength of lasing light emitter.
Owing to adopting multi-pass interferometry, in measurement process, the DC level that each photodetector detects should alternate, if the change measuring environment of a certain light path causes the DC level that photodetector is measured to offset, and there is not alternate in the DC level that the photodetector of other optical path detects, now think that this optical path is affected by measuring the impact of environment, ignore the change of its level.If the change measuring environment of a plurality of light path causes the DC level that multiple photodetector is measured to offset, then it is assumed that measure environment and change, ignore the change of its level.Just it is counted only for the situation strictly meeting multi-pass interference state alternate in measurement process, namely multi-pass interferometry introduces AC signal, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal.
It should be noted that adjacent two level differences are equal toThe real simply difference determining whether laser is in the strongest interference state or the most weak interference stateDifference k λ/2 increased are the height difference in order to increase adjacent two reflectings surface of cascaded surface, and parameter is more greatly for the ease of process and assemble.
Preferably, described fixed step plane angle reflecting mirror includes corner reflector body and n-1 reflection sheet combines, and the thickness of each described reflection sheet isWherein k is natural number.
This cascaded surface is superimposed upon on corner reflector body is formed by 2 × (n-1) individual reflection sheet, and corner reflector body surface is laser interferometer normal mirror, and wherein the thickness of each reflection sheet isK is natural number, and namely the thickness of each reflection sheet can be the same or different, but two cascaded surfaces should symmetry.
Preferably, each described reflection sheet thickness is
Preferably, described corner reflector body and reflection sheet are formed in one body, it is to avoid the reflection sheet of piecemeal links together the height error of two ladder planes that adjacent two reflection sheets produced are formed.
Preferably, n described lasing light emitter is equally spaced, and the spacing of adjacent two described laser beams is equal to the integral multiple of optical maser wavelength.
Preferably, the spacing between the laser beam that adjacent two described lasing light emitters send is the optical maser wavelength of 100-10000 times.
nullIn the such scheme of the application，Owing to measurement corner reflector is arranged on accurate displacement device，And accurate displacement device is arranged on testee，When testee is subjected to displacement，Testee drives accurate displacement device，And then drive measurement corner reflector，So，When testee is subjected to displacement，In displacement process，Change due to optical interference circuit light path，Make，The laser interference state of corresponding light beam also changes therewith，Before starting to measure work，Start accurate displacement device，Measurement corner reflector is made to produce displacement，The direction of displacement of described measurement corner reflector is with the direction of displacement of testee on the same line，When in photodetector group, any one photodetector detects the strongest constructive interference，Stop accurate displacement device，And all photodetectors counting in photodetector group is reset，Then start to measure the displacement of testee again，In the interference state change procedure of corresponding laser beam，The total degree N of all photodetectors register correspondence the strongest constructive interferences of optical interference circuit in photodetector group，When testee mobile end，When remaining static，Photodetector group stops counting；Now, measurement corner reflector is made to move on the direction of displacement of testee by accurate displacement device, and observe photodetector group, when in photodetector group, any one photodetector detects the strongest constructive interference, stop accurate displacement device, and read accurate displacement device for measuring the shift value △ L that corner reflector provides.
If displacement △ L is identical with the direction of displacement of testee, then shift value L=N × λ/(2n) of the actual generation of testee+(λ/(2n)-△ L), wherein △ L < λ/(2n), in formula, λ is optical maser wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then the shift value L=N × λ of the actual generation of testee/(2n)+△ L, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength.
So, pass through said structure, add in displacement detecting result by testee actual displacement is also measured beyond 1/ (2n) individual optical maser wavelength part △ L, and then make the displacement result obtained measured by the laser interferometer of the application more accurate, its degree of accuracy is higher than 1/ (2n) individual optical maser wavelength, is specifically dependent upon the displacement accuracy that accurate displacement device can be provided by.
Preferred version as the application, described accurate displacement device includes the driving device supporting platform and being arranged on described support platform, described support platform matches with described testee, the displacement that described driving device provides on testee direction of displacement for described measurement corner reflector.
As the preferred version of the application, described driving device is Piezoelectric driving device.
In this programme, adopt the ceramic material that mechanical energy and electric energy can be changed mutually by Piezoelectric driving device, its deformation quantity produced under electric field action is only small, micro-displacement no more than 1st/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further increase accuracy and the reliability of the application accurate displacement device.
nullPreferred version as the application，Described accurate displacement device also includes the first displacement piece being arranged on described support platform and the second displacement piece being arranged in described first displacement piece，Described driving device matches with described first displacement piece，The displacement along described support platform is provided for described first displacement piece，Described first displacement piece has an inclined-plane tilted relative to its direction of displacement，Described second displacement piece is slidably arranged on the inclined-plane of described first displacement piece，Make described second displacement piece can slide along the inclined-plane of described first displacement piece，Snug fit between described first displacement piece and the second displacement piece，Described measurement corner reflector is arranged in described second displacement piece，Described support platform is additionally provided with restraint device，Described restraint device restriction described second displacement piece moving along described first displacement piece direction of displacement，Make when the first displacement piece is driven by described driving device and produces displacement，Described second displacement piece is driven by described first displacement piece and produces displacement，And，The direction of displacement of described second displacement piece is perpendicular with the direction of displacement of described first displacement piece，The inclined-plane of described first displacement piece and the angle of its direction of displacement are A degree，0<A<45.
In the such scheme of the application, driving device and the first displacement piece match, there is provided along the displacement supporting platform for the first displacement piece, first displacement piece has an inclined-plane tilted relative to its direction of displacement, second displacement piece is slidably arranged on the inclined-plane of the first displacement piece, make the second displacement piece can slide along the inclined-plane of the first displacement piece, when accurate displacement device works, driving device provides certain displacement to promote the first displacement piece, now, owing to restraint device limits the second displacement piece moving along the first displacement piece direction of displacement, the direction of displacement making the direction of displacement of the second displacement piece and the first displacement piece is perpendicular, so, the displacement that the displacement of the second displacement piece provides for the first displacement piece to driving device is relevant, also relevant to the angle on the inclined-plane of the first displacement piece Yu its direction of displacement.
Namely, if the angle of the inclined-plane of the first displacement piece and its direction of displacement is A degree, when the displacement that driving device provides is X, second displacement piece be perpendicular in the driving device direction of motion produce displacement be Y=Xtan (A), so, when included angle A is less than 45 degree, a displacement less than X value will be obtained, when further reducing included angle A, displacement Y also reduces therewith, so, make in the scheme of the application, accurate displacement device is by the way of changing precision by stroke, directly enhance the precision of the application accurate displacement device, also just further improve the certainty of measurement of the application laser interferometer.
As the preferred version of the application, being additionally provided with the magnetic magnetic part of tool between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.Make the first displacement piece when being promoted, it is possible to keep fitting tightly with the second displacement piece, it is ensured that the precision of the application accurate displacement device, and then ensure the certainty of measurement of the application laser interferometer.
As the preferred version of the application, described second displacement piece and described measurement corner reflector are integral type structure.
In such scheme, the second displacement piece is integral type structure with measurement corner reflector, say, that, directly a reflecting surface is set in the second displacement piece so that it is itself formed and measure corner reflector, so, simplify the structure of the application laser interferometer, convenient debugging and use.
Although at present, there is also the device measuring air refraction, the atmospheric temperature of single locus, humidity and air pressure are measured, by wavelength compensation formula, optical maser wavelength is modified, but it is merely able to local air is detected, and in the displacement measurement field of the application, owing to its displacement is to carry out in a region, in this region, each parameter of the air of each position all has difference, it is especially in the presence of the situations such as bigger thermograde, moist gradient and barometric gradient, will there is bigger error with single-point parameters revision optical maser wavelength.
So, for these reasons, in this application, in measurement process, detection is current measures under environment, the environment effective wavelength λ ' of laser, and this λ ' value is currently measure the effective wavelength of environment, so the problem directly avoiding zones of different air refraction difference and bringing, so, reduce the error that environmental factors is brought, and then further improve the certainty of measurement of the application laser interferometer and measuring method thereof.
Disclosed herein as well is a kind of measuring method for above-mentioned wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, it includes following step:
Step one: install wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer；
Step 2: measurement corner reflector device is arranged on testee；
Step 3: debugging wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, makes the satisfactory light path of formation, and makes each optical interference circuit all in interference state；
Step 4: before starting to measure work, start accurate displacement device, measurement corner reflector is made to produce displacement, the direction of displacement of described measurement corner reflector is with the direction of displacement of testee on the same line, when photodetector group there being any one the strongest constructive interference detected, stop accurate displacement device, and photodetector group counting is reset；
Step 5: start to measure work, testee starts mobile, the total degree N of the strongest constructive interference of all photodetectors register correspondence optical interference circuits in photodetector group；
Step 6: testee displacement terminates, remain static, it is again started up accurate displacement device, measurement corner reflector is made to produce displacement, the direction of displacement of described measurement corner reflector is with the direction of displacement of testee on the same line, when any one photodetector detects the strongest constructive interference again in photodetector group, stop described accurate displacement device, make measurement corner reflector stop；
Step 7: read the shift value △ L that accurate displacement device provides for described measurement corner reflector；
Step 8: the strongest constructive interference total degree N and measurement corner reflector shift value △ L of photodetector group record in record measurement process.
Step 9: be again started up accurate displacement device, traverse measurement corner reflector, makes the total degree M (M is positive integer) of the photodetector group the strongest constructive interference of record, and reads the measurement corner reflector shift value Z that M constructive interference the strongest is corresponding.According to Z=M × λ '/(2n), draw under current measurement environment, effective wavelength the λ '=2nZ/M of laser.
Step 10: calculate the shift value of testee.
If displacement △ L is identical with the direction of displacement of testee, then, shift value L=N × λ '/(2n) of the actual generation of testee+(λ '/(2n)-△ L), wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then, the shift value L=N × λ ' of the actual generation of testee/(2n)+△ L, wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing measuring corner reflector shift value △ L in the shift value of testee, directly enhances the certainty of measurement of testee displacement., by detecting the effective wavelength λ ' measured in environment, namely the wavelength of laser is modified meanwhile, so reduces the error that environmental factors is brought, and then further improve the certainty of measurement of the application laser interferometer and measuring method thereof.
As the preferred version of the application, described step 4 is to step 9, and the strongest described constructive interference can also is that the most weak destructive interference.In this programme, in measurement process, photodetector group is the total degree of the most weak destructive interference recording corresponding each laser interference light path, so still can obtain the shift value L of a higher testee of precision.
Compared with prior art, beneficial effects of the present invention:
(1) the laser beam quantity that the lasing light emitter of this wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer is launched, the quantity of stairstepping plane of reflection quantity and photoelectric detector is n (n >=2), and one_to_one corresponding, the each Shu Jiguang launched due to lasing light emitter is different by the light path of the light path after Different Plane reflection on the cascaded surface of fixed step plane angle reflecting mirror, each laser that simultaneously lasing light emitter is launched arrive the photoelectric detector of correspondence after being divided into two-way after retardation values all differ, each photoelectric detector can detect whether two bundle laser of correspondence can interfere phenomenon, the generation of this interference is not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, owing to adjacent two level differences of this cascaded surface are equal toOwing to angle of incidence is 45 degree, equivalent optical path isTherefore, as long as measuring corner reflector to move the distance of λ/2n or the distance of integer times λ/2n, photoelectric detector in this photodetector group one of them can only be capable of detecting when that it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer is λ/2n；Can only accuracy of detection being for laser wavelength lambda relative to existing laser interferometer, its certainty of measurement obtains significant raising.Simultaneously because adopt multi-pass interferometry, in measurement process, the DC level that each photodetector detects should alternate, if the change measuring environment of a certain light path causes the DC level that photodetector is measured to offset, and there is not alternate in the DC level that the photodetector of other optical path detects, now think that this optical path is affected by measuring the impact of environment, ignore the change of its level.If the change measuring environment of a plurality of light path causes the DC level that multiple photodetector is measured to offset, then it is assumed that measure environment and change, ignore the change of its level.Just it is counted only for the situation strictly meeting multi-pass interference state alternate in measurement process, namely multi-pass interferometry introduces AC signal, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the capacity of resisting disturbance of interferometer.
(2) in measurement process, the effective wavelength λ ' of laser in environment is measured in detection, and optical maser wavelength is modified, and so, reduces the error that environmental factors is brought, and then further improves the certainty of measurement of the application laser interferometer.
Accompanying drawing illustrates:
Fig. 1 is the laser optical path schematic diagram during ladder reflecting mirror laser interferometer use of wavelength amendment type multiple beam angle of the present invention；
Fig. 2 is the structural representation of lasing light emitter in Fig. 1；
Fig. 3 is the structural representation of the stairstepping plane of reflection of fixed step plane angle reflecting mirror in Fig. 1.
Fig. 4 is for measuring corner reflector and the second displacement piece integral structure figure
Labelling in figure:
1, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3, fixed step plane angle reflecting mirror, 31, reflecting mirror body, 32, reflection sheet, 4, measure corner reflector device, 5, photodetector group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photoelectric detector three, 54, photoelectric detector four, 6, accurate displacement device, 7, measure corner reflector, 8, support platform, 9, driving device, 10, restraint device, 11, magnetic part, 12, testee, 13, first displacement piece, 14, second displacement piece, 15, inclined-plane.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But this should not being interpreted as, the scope of the above-mentioned theme of the present invention is only limitted to below example, and all technology realized based on present invention belong to the scope of the present invention.
As shown in Figure 1, a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, including lasing light emitter 1, spectroscope 2, fixed step plane angle reflecting mirror 3, measure corner reflector device 4, photodetector group 5, described measurement corner reflector group 4 includes measuring corner reflector 7 and accurate displacement device 6, measure corner reflector 7 and include at a right angle two plane of reflection, described measurement corner reflector 7 is arranged on described accurate displacement device 6, described accurate displacement device 6 is arranged on testee 12, described accurate displacement device 6 provides with testee 12 displacement in the same direction or reverse displacement for described measurement corner reflector 7；
Described lasing light emitter 1 includes n collimated laser beam, n >=2, and photodetector group 5 also includes n photoelectric detector, and the reflecting surface of fixed step plane angle reflecting mirror 3 is symmetrical n the stairstepping plane of reflection, and the spacing h of adjacent two planes of reflection is equal toWherein k is random natural number, λ is the optical maser wavelength that lasing light emitter 1 sends；Each laser beam that lasing light emitter 1 sends, after spectroscope 2 reflects, injects a corresponding ladder reflecting surface respectively, and each ladder reflecting surface will often restraint the laser-bounce photoelectric detector to correspondence；Each laser beam that lasing light emitter 1 sends, after spectroscope 2 transmission, incides the photoelectric detector being re-reflected into correspondence after measuring corner reflector 7 respectively.It should be noted that the λ in literary composition is the optical maser wavelength that lasing light emitter 1 sends, the often bundle optical maser wavelength that lasing light emitter 1 sends is all the same.
The laser beam quantity that the lasing light emitter 1 of this laser interferometer sends, the photoelectric detector quantity of cascaded surface plane quantity and photodetector group 5 is n (n >=2), and be one_to_one corresponding, namely every Shu Jiguang that lasing light emitter 1 is launched is divided into two-way, after beam of laser reflexes to one of them plane of cascaded surface of fixed step plane angle reflecting mirror 3 by spectroscope 2, it is reflected back one of them photoelectric detector that spectroscope 2 is again incident in photodetector group 5, another bundle laser straight is re-reflected into spectroscope 2 after being connected in spectroscope 2 after transmission to incide measurement corner reflector 7, spectroscope 2 reflects it to same photoelectric detector again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at measurement corner reflector 7.Due to the cascaded surface on fixed step plane angle reflecting mirror 3, so each Shu Jiguang that lasing light emitter 1 is launched is differed by the light path of the light path after the cascaded surface reflection of fixed step plane angle reflecting mirror 3, each laser that simultaneously lasing light emitter 1 is launched arrive the photodetector group 5 of correspondence after being divided into two-way after retardation values all differ, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, owing to adjacent two level difference h of this cascaded surface are equal toOwing to angle of incidence is 45 degree, equivalent optical path isTherefore, as long as measuring corner reflector 7 to move the distance of λ/2n or the distance of integer times λ/2n, photodetector group 5 on this photodetector all has one of them to be capable of detecting when, and it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this certainty of measurement is significantly improved, namely this certainty of measurement is determined by the spacing (being alternatively referred to as height or thickness) of adjacent two ladder planes of the cascaded surface of fixed step plane angle reflecting mirror 3 and the optical maser wavelength of lasing light emitter 1.
The reflection sheet 32 that this fixed step plane angle reflecting mirror 3 includes the individual thickness h of corner reflector body 31 and 2 × (n-1) identical combines, and the thickness h of each described reflection sheet 32 isEach cascaded surface of fixed step plane angle reflecting mirror 3 passes through n-1 the identical reflection sheet 32 of thickness h and is superimposed upon on corner reflector body 31 and forms, corner reflector body 31 is the laser interferometer normal mirror that surface is plane, and wherein the thickness h of each reflection sheet 32 isSimultaneously, the reflection sheet 32 that this individual thickness h of corner reflector body 31 and 2 × (n-1) is identical can be formed in one body, it is to avoid the reflection sheet 32 of piecemeal links together the height error of two ladder planes that adjacent two reflection sheets 32 produced are formed.
As shown in Figure 2, n the laser beam that all of lasing light emitter 1 sends is equally spaced, now, select n=4, k=0, the laser beam that lasing light emitter 1 sends respectively laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14, and the spacing e of adjacent two laser beams is equal to the integral multiple of optical maser wavelength.Spacing e between adjacent two laser beams is preferably the optical maser wavelength of 100-10000 times.Preferably, if 1000 times that select adjacent two laser beam spacing e to be optical maser wavelength, then the preferred optical maser wavelength of 663 nanometers, then the spacing e of the adjacent laser beams that adjacent laser source 1 sends is 6.63 millimeters.Corresponding photodetector group 5 receives the photoelectric detector of laser also respectively four, namely photoelectric detector 1, photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54.
Now, the stairstepping plane of reflection on fixed step plane angle reflecting mirror 3 also elects four accordingly as, as it is shown on figure 3, select four planes of reflection to become stairstepping plane so that processing and reducing cost.This light path route is that the laser that laser beam 1 sends is divided into two-way at spectroscope 2, one tunnel is split after mirror 2 reflects and incides fixed step plane angle reflecting mirror 3, transmission incide photoelectric detector 1 again after being reflected to spectroscope 2, measurement corner reflector 7 is then directly incided on another road of this laser after spectroscope 2 transmission, after being reflected to spectroscope 2, spectroscope 2 is again by this laser-bounce to photoelectric detector 1.By that analogy, other laser beam 2 12, laser beam 3 13, laser beam 4 14 are reflected by the plane of reflection respectively and are received by photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54 respectively.According to calculating, owing to have employed four stairstepping planes of reflection, the difference in height of adjacent two planes of reflection isOwing to angle of incidence is 45 degree, equivalent optical path isTherefore the laser sent by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14 retardation values respectively a after fixed step plane angle reflecting mirror 3 reflects1λ、a2λ-λ/4、a3λ-λ/2、a4λ-3 λ/4, wherein a1、a2、a3、a4For natural number.
When laser beam 1 is in the strongest interference state, the laser that namely laser beam 1 sends be divided into two-way after retardation values be a1λ, can measure laser by photoelectric detector 1 and be in the strongest interference state, now laser beam 2 12 to optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 the two-way retardation values of optical interference circuit is respectively as follows: a2λ-λ/4、a3λ-λ/2、a4λ-3 λ/4, three's light path is now in the strongest non-interference state.
Moving λ/8 when measuring corner reflector 7, when making the two bundle laser retardation values that lasing light emitter 1 is divided into increase λ/4, the laser light path difference of other lasing light emitters also increases λ/4 accordingly, and now, it is a that the laser that laser beam 1 sends is divided into the retardation values of two-way1λ+λ/4, are in the strongest non-interference state, and the laser that laser beam 2 12 sends is divided into the retardation values of two-way and then becomes a2λ, therefore photoelectric detector 2 52 is able to detect that optical interference circuit is in the strongest interference state, and the laser of laser beam 3 13 and laser beam 4 14 is also at the strongest non-interference state.When measuring corner reflector 7 and moving λ/4, optical interference circuit will be in the strongest interference state by laser beam 3 13, can measure the strongest interference state of laser by photoelectric detector 3 53.
Similar, when measuring corner reflector 7 and moving 3 λ/8, when making the two bundle laser retardation values that laser beam 1 is divided into increase by 3 λ/4, the laser light path difference of other laser beams also increases by 3 λ/4 accordingly, and the laser that now laser beam 4 14 sends is divided into the retardation values of two-way and then becomes a4λ, the two-way light path that its laser is divided into will be in the strongest interference state, can measure the strongest interference state of laser by photoelectric detector 4 54.
Again, when measuring corner reflector 7 and moving λ/2, when making the two bundle laser retardation values that laser beam 1 is divided into increase λ, the laser light path difference of other laser beams also increases λ accordingly, optical interference circuit will be in again the strongest interference state by laser beam 1, can measure the strongest interference state of laser by photoelectric detector 1.Therefore, for the certainty of measurement corresponding to the laser interferometer corresponding to four-step planar laser catoptric arrangement just for λ/8, namely corner reflector 7 displacement is measured equal to or more than λ/8, the four interference state significant changes of light path restrainting laser that namely corresponding photodetector group 5 can observe that lasing light emitter 1 launches.
Therefore, the ladder plane of reflection quantity increasing fixed step plane angle reflecting mirror 3 can improve certainty of measurement, when the laser mirror structure adopting the 8 ladder planes of reflection, the corresponding certainty of measurement corresponding to laser interferometer is then λ/16, when adopting fixed step plane angle reflecting mirror 3 structure of the n ladder plane of reflection, the certainty of measurement of this laser interferometer just becomes λ/2n accordingly.
Owing to adopting multi-pass interferometry, in measurement process, the DC level that each photodetector detects should alternate, if the change measuring environment of a certain light path causes the DC level that photodetector is measured to offset, and there is not alternate in the DC level that the photodetector of other optical path detects, now think that this optical path is affected by measuring the impact of environment, ignore the change of its level.If the change measuring environment of a plurality of light path causes the DC level that multiple photodetector is measured to offset, then it is assumed that measure environment and change, ignore the change of its level.Just it is counted only for the situation strictly meeting multi-pass interference state alternate in measurement process, namely multi-pass interferometry introduces AC signal, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the capacity of resisting disturbance of interferometer.
nullIn the present embodiment，Owing to measurement corner reflector 7 is arranged on accurate displacement device 6，And accurate displacement device 6 is arranged on testee 12，When testee 12 is subjected to displacement，Testee 12 drives accurate displacement device 6，And then drive measurement corner reflector 7，So，When testee 12 is subjected to displacement，In displacement process，The interference state of each laser interference light path that laser interferometer of the present invention is corresponding also changes therewith，Before starting to measure work，Start accurate displacement device 6，Measurement corner reflector 7 is made to produce displacement，The direction of displacement of described measurement corner reflector 7 is with the direction of displacement of testee 12 on the same line，When in photodetector group 5, any one photodetector detects the strongest constructive interference，Stop accurate displacement device 6，And all photodetectors counting in photodetector group 5 is reset，Then start to measure the displacement of testee 12 again，In the interference state change procedure of corresponding each laser interference light path，The total degree N of each the strongest constructive interference of photodetectors register of photodetector group 5，When testee 12 mobile end，When remaining static，Photodetector group 5 stops counting；Now, measurement corner reflector 7 is made to move on the direction of displacement of testee 12 by accurate displacement device 6, and observe photodetector group 5, when in photodetector group 5, any one photodetector detects the strongest constructive interference, stop accurate displacement device 6, and read accurate displacement device 6 for measuring the shift value △ L that corner reflector 7 provides.
If displacement △ L is identical with the direction of displacement of testee 12, then, actual shift value L=N × λ/(2n)+(λ/(the 2n)-△ L) produced of testee 12, wherein △ L < λ/(2n), in formula, λ is optical maser wavelength；
And, if displacement △ L is contrary with the direction of displacement of testee 12, then, actual shift value L=N × λ/(2n)+△ L, wherein △ L < λ/(2n) produced of testee 12, in formula, λ is optical maser wavelength.
So, pass through said structure, the part △ L exceeding laser wavelength lambda/(2n) in testee 12 actual displacement is also measured and adds in displacement detecting result, and then make the displacement result obtained measured by the laser interferometer of the application more accurate, its precision is higher than half optical maser wavelength, is specifically dependent upon the displacement accuracy that accurate displacement device 6 can be provided by.
Embodiment 2,
Such as Fig. 1, shown in 4, laser interferometer as described in Example 1, described accurate displacement device 6 includes the driving device 9 supporting platform 8 and being arranged on described support platform 8, described support platform 8 matches with described testee 12, described driving device 9 provides the displacement on testee 12 direction of displacement for described measurement corner reflector 7, and described driving device 9 is Piezoelectric driving device.
In the present embodiment, the Piezoelectric driving device 9 adopted is the ceramic material that can mechanical energy and electric energy be changed mutually, its deformation quantity produced under electric field action is only small, micro-displacement no more than 1st/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, further increase the precision of accurate displacement device 6 in the present embodiment.
Embodiment 3,
nullSuch as Fig. 1、Shown in 4，Laser interferometer as described in Example 2，Described accurate displacement device 6 also includes the first displacement piece 13 being arranged on described support platform 8 and the second displacement piece 14 being arranged in described first displacement piece 13，Described driving device 9 matches with described first displacement piece 13，The displacement along described support platform 8 is provided for described first displacement piece 13，Described first displacement piece 13 has an inclined-plane 15 tilted relative to its direction of displacement，Described second displacement piece 14 is slidably arranged on the inclined-plane 15 of described first displacement piece 13，Make described second displacement piece 14 can slide along the inclined-plane 15 of described first displacement piece 13，Snug fit between described first displacement piece 13 and the second displacement piece 14，Described measurement corner reflector 7 is arranged in described second displacement piece 14，Described support platform 8 is additionally provided with restraint device 10，Described restraint device 10 limits described second displacement piece 14 moving along described first displacement piece 13 direction of displacement，Make when the first displacement piece 13 is driven by described driving device 9 and produces displacement，Described second displacement piece 14 is driven by described first displacement piece 13 and produces displacement，And，The direction of displacement of described second displacement piece 14 is perpendicular with the direction of displacement of described first displacement piece 13，The inclined-plane 15 of described first displacement piece 13 is A degree with the angle of its direction of displacement，Preferably 0 < A < 45.
nullIn an embodiment，Driving device 9 matches with the first displacement piece 13，There is provided along the displacement supporting platform 8 for the first displacement piece 13，First displacement piece 13 has an inclined-plane 15 tilted relative to its direction of displacement，Second displacement piece 14 is slidably arranged on the inclined-plane 15 of the first displacement piece 13，Make the second displacement piece 14 can slide along the inclined-plane 15 of the first displacement piece 13，When accurate displacement device 6 works，Driving device 9 provides certain displacement to promote the first displacement piece 13，Now，Owing to restraint device 10 limits the second displacement piece 14 moving along the first displacement piece 13 direction of displacement，The direction of displacement making the direction of displacement of the second displacement piece 14 and the first displacement piece 13 is perpendicular，So，The displacement that the displacement of the second displacement piece 14 provides for the first displacement piece 13 to driving device 9 is relevant，Also relevant with the angle of its direction of displacement to the inclined-plane 15 of the first displacement piece 13.
That is, if the inclined-plane 15 of the first displacement piece 13 is A degree with the angle of its direction of displacement, when the displacement that driving device 9 provides is X, the second displacement piece 14 is Y=Xtan (A) at the displacement being perpendicular in driving device 9 direction of motion to produce.Preferably, when included angle A is less than 45 degree, a displacement less than X value will be obtained, when further reducing included angle A, displacement Y also reduces therewith, so, make in the present embodiment, accurate displacement device 6 is by, in the way of changing precision by stroke, directly enhancing the precision of the present embodiment accurate displacement device 6, also just further improve the certainty of measurement of the present embodiment laser interferometer.
Embodiment 4,
As shown in Figure 4, laser interferometer as described in Example 3, the magnetic magnetic part 11 of tool it is additionally provided with between described first displacement piece 13 and described support platform 8, described second displacement piece 14 has magnetic, state that described second displacement piece 14 and described magnetic part 11 be that there is a natural attraction between the sexes, described second displacement piece 14 and described measurement corner reflector 7 are integral type structure.Make the first displacement piece 13 when being promoted, measure corner reflector 7 can keep fitting tightly with the second displacement piece 14, ensureing the precision of the application accurate displacement device 6 and then the certainty of measurement of guarantee the application laser interferometer, the second displacement piece 14 is integral type structure with measurement corner reflector 7, that is, directly a reflecting surface is set in the second displacement piece 14 so that it is itself formed and measure corner reflector 7, so, simplify the structure of the present embodiment laser interferometer, convenient debugging and use.
Embodiment 5,
Such as Fig. 1, shown in 4, a kind of measuring method for above-mentioned wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, it includes following step:
Step one: install wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer；
Step 2: measurement corner reflector device 4 is arranged on testee 12；
Step 3: debugging wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, makes the satisfactory light path of formation, and makes each optical interference circuit all in interference state；
Step 4: before starting to measure work, start accurate displacement device 6, measurement corner reflector 7 is made to produce displacement, the direction of displacement of described measurement corner reflector 7 is with the direction of displacement of testee 12 on the same line, when photodetector group 5 there being any one the strongest constructive interference detected, stop accurate displacement device 6, and photodetector group 5 is counted clearing；
Step 5: start to measure work, testee 12 starts mobile, the total degree N of the strongest constructive interference of all photodetectors register correspondence optical interference circuits in photodetector group 5；
Step 6: testee 12 displacement terminates, remain static, it is again started up accurate displacement device 6, measurement corner reflector 7 is made to produce displacement, the direction of displacement of described measurement corner reflector 7 is with the direction of displacement of testee 12 on the same line, when any one photodetector detects the strongest constructive interference again in photodetector group 5, stop described accurate displacement device 6, make measurement corner reflector 7 stop；
Step 7: read the shift value △ L that accurate displacement device 6 provides for described measurement corner reflector 7；
Step 8: the strongest constructive interference total degree N and measurement corner reflector 7 shift value △ L of photodetector group 5 record in record measurement process.
Step 9: be again started up accurate displacement device 6, traverse measurement corner reflector 7, makes photodetector group 5 record the total degree M (M is positive integer) of the strongest constructive interference, and reads the measurement corner reflector 7 shift value Z that M constructive interference the strongest is corresponding.According to Z=M × λ '/(2n), draw under current measurement environment, effective wavelength the λ '=2nZ/M of laser.
Step 10: calculate the shift value of testee 12.
If displacement △ L is identical with the direction of displacement of testee 12, then, shift value L=N × λ '/(2n) of the actual generation of testee 12+(λ '/(2n)-△ L), wherein △ L < λ '/(2n), in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee 12, then, actual shift value L=N × λ '/(2n)+△ L, wherein △ L < λ '/(2n) produced of testee 12, in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing measuring corner reflector 7 shift value △ L in the shift value of testee 12, directly enhances the certainty of measurement of testee 12 displacement.
Embodiment 6,
Such as Fig. 1, shown in 4, measuring method as described in Example 5, described step 4 is to step 9, and the strongest described constructive interference can also is that the most weak destructive interference.In this programme, in measurement process, photodetector group 5 is to record the number of times of each laser interference the most weak destructive interference of light path, so still can obtain the shift value L of a higher testee of precision 12.
Above example only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this specification with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned detailed description of the invention, therefore any the present invention modified or equivalent replaces；And all are without departing from the technical scheme of spirit and scope of invention and improvement thereof, it all should be encompassed in the middle of scope of the presently claimed invention.
Claims (6)
1. a wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, including lasing light emitter (1), spectroscope (2), fixed step plane angle reflecting mirror (3), measure corner reflector device (4), photodetector group (5), it is characterised in that:
Described measurement corner reflector device (4) includes measuring corner reflector (7) and accurate displacement device (6), described measurement corner reflector (7) is arranged on described accurate displacement device (6), described accurate displacement device (6) is arranged on testee, and described accurate displacement device (6) provides with testee displacement in the same direction or reverse displacement for described measurement corner reflector (7)；
Described lasing light emitter (1) includes n collimated laser beam, wherein n >=2, and described photodetector group (5) includes n photoelectric detector；
Described fixed step plane angle reflecting mirror (3) includes at a right angle two reflective steps face, and each described reflective steps face includes n and becomes the step-like plane of reflection, and the spacing of adjacent two planes of reflection is equal toWherein k is natural number, λ is the optical maser wavelength that lasing light emitter (1) sends, and described measurement corner reflector (7) includes at a right angle two plane of reflection；
Every Shu Jiguang that described lasing light emitter (1) sends is after described spectroscope (2) reflects, injecting a corresponding plane of reflection respectively, each described plane of reflection will often restraint laser-bounce each photoelectric detector to corresponding described photodetector group (5)；Every Shu Jiguang that described lasing light emitter (1) sends, after described spectroscope (2) transmission, incides described measurement corner reflector (7) back reflection each photoelectric detector to corresponding photodetector group (5) respectively.
2. a kind of wavelength amendment type multiple beam angle according to claim 1 ladder reflecting mirror laser interferometer, it is characterized in that, described accurate displacement device includes the driving device supporting platform and being arranged on described support platform, described support platform matches with described testee, the displacement that described driving device provides on testee direction of displacement for described measurement corner reflector.
3. a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer according to claim 2, it is characterised in that described driving device is Piezoelectric driving device.
null4. a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer according to Claims 2 or 3，It is characterized in that，Also include the first displacement piece being arranged on described support platform and the second displacement piece being arranged in described first displacement piece，Described driving device matches with described first displacement piece，The displacement along described support platform is provided for described first displacement piece，Described first displacement piece has an inclined-plane tilted relative to its direction of displacement，Described second displacement piece is slidably arranged on the inclined-plane of described first displacement piece，Make described second displacement piece can slide along the inclined-plane of described first displacement piece，Snug fit between described first displacement piece and the second displacement piece，Described measurement corner reflector is arranged in described second displacement piece，Described support platform is additionally provided with restraint device，Described restraint device restriction described second displacement piece moving along described first displacement piece direction of displacement，Make when the first displacement piece is driven by described driving device and produces displacement，Described second displacement piece is driven by described first displacement piece and produces displacement，And，The direction of displacement of described second displacement piece is perpendicular with the direction of displacement of described first displacement piece，The inclined-plane of described first displacement piece and the angle of its direction of displacement are A degree，0<A<45.
5. wavelength amendment type multiple beam angle as claimed in claim 4 ladder reflecting mirror laser interferometer, it is characterized in that, the magnetic magnetic part of tool it is additionally provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.
6. wavelength amendment type multiple beam angle as claimed in claim 4 ladder reflecting mirror laser interferometer, it is characterised in that described second displacement piece and described measurement corner reflector are integral type structure.
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| CN105509636B (en) * | 2015-11-27 | 2018-02-06 | 成都信息工程大学 | A kind of measuring method using wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer |
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