CN204439011U - Anti-interference ladder plane reflection laser interferometer - Google Patents
Anti-interference ladder plane reflection laser interferometer Download PDFInfo
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- CN204439011U CN204439011U CN201520184605.0U CN201520184605U CN204439011U CN 204439011 U CN204439011 U CN 204439011U CN 201520184605 U CN201520184605 U CN 201520184605U CN 204439011 U CN204439011 U CN 204439011U
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Abstract
The utility model discloses a kind of anti-interference ladder plane reflection laser interferometer, comprise lasing light emitter, spectroscope, stationary mirror, mobile mirror, photodetector group, wherein lasing light emitter comprises n (n >=2) individual collimated laser beam, photodetector group comprises n photoelectric detector, the reflecting surface of stationary mirror is n ladder plane, and adjacent two plane of reflection spacing are λ/2n+k λ/2 (k is natural number); Beam of laser after spectroscope effect injects one of them plane of reflection back reflection to a photodetector, and in spectroscope, the another beam of laser of transmission is also incident to this photodetector after mobile mirror, dichroic mirror simultaneously.The laser interference phenomenon that this laser interferometer produces is not only relevant with optical maser wavelength, and also relevant with notch cuttype plane of reflection height difference, this photodetector group can detect that precision reaches the displacement of λ/2n rank, significantly improves measuring accuracy.
Description
Technical field
The utility model relates to a kind of Precision Inspection and instrument field, particularly one anti-interference ladder plane reflection laser interferometer.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.In most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation, and reflects can be combined in spectroscope from stationary mirror and moving reflector respectively and produce interference fringe.When moving reflector moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receptacle and electronic circuit etc., after shaping, amplification, input up-down counter calculate overall pulse number, calculating formula L=N × λ/2 are pressed again by robot calculator, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates the displacement L of moving reflector.When using single frequency laser interferometer, require that ambient atmosphere is in steady state (SS), various air turbulence all can cause DC level change and affect measurement result.
One of weakness of single frequency laser interferometer is exactly seriously affected by environment, and severe at test environment, when measuring distance is longer, this shortcoming is very outstanding.Its reason is that it is a kind of direct current measurement system, must have the drawback of the gentle level drift of direct current light.When laser interferometer moveable mirror moves, photelectric receiver can output signal, if signal has exceeded the triggering level of counter, will go on record, if and laser beam intensity changes, with regard to likely making photosignal make counter stop counting lower than the triggering level of counter, the main cause of laser intensity or interference signal Strength Changes is made to be air turbulence, lathe mist of oil, cutting swarf is on the impact of light beam, and skew or corrugated distortion occur result light beam.
Single frequency laser interferometer is owing to measuring the problem of structure, and its measuring accuracy is limited to the wavelength of laser, and its precision can only be generally the integral multiple of its wavelength, is difficult to promote again, and the change of measurement environment simultaneously has considerable influence to measurement result.Along with the requirement of commercial production to precision measurement is more and more higher, the measuring accuracy of surveying instrument is had higher requirement.
Utility model content
The purpose of this utility model is that overcoming existing laser interferometer measurement precision is limited to optical maser wavelength, measuring accuracy is difficult to the deficiency promoted, a kind of anti-interference ladder plane reflection laser interferometer is provided, this laser interferometer is on the basis of existing Michelson laser interferometer, adopt multiple light courcess multi-ladder plane mirror, the precision of λ/2n can be detected for n ladder plane mirror, improve the measuring accuracy of laser interferometer.Simultaneously due to multi-pass interference state checker, there is higher antijamming capability to the environmental change of optical path.
In order to realize above-mentioned utility model object, the utility model provides following technical scheme:
A kind of anti-interference ladder plane reflection laser interferometer, comprise lasing light emitter, spectroscope, stationary mirror, mobile mirror, photodetector group, it is characterized in that, described lasing light emitter comprises n collimated laser beam, wherein n >=2, described photodetector group comprises n photoelectric detector, the reflecting surface of described stationary mirror is n the plane of reflection becoming notch cuttype, the spacing of adjacent two planes of reflection equals λ/2n+k λ/2, and wherein k is random natural number, λ is the optical maser wavelength that lasing light emitter sends; Every Shu Jiguang that each described lasing light emitter sends is after described dichroic mirror, and vertically inject a corresponding plane of reflection respectively, each described plane of reflection is by corresponding laser reflection each photoelectric detector of correspondence to described photodetector group; The often bundle laser beam that described lasing light emitter sends, after described spectroscope transmission, impinges perpendicularly on described mobile mirror back reflection each photoelectric detector to the correspondence of photodetector group respectively.
The collimated laser beam quantity of the lasing light emitter generation of this laser interferometer, the quantity of notch cuttype plane of reflection quantity and photoelectric detector is n (n >=2), and be one_to_one corresponding, namely every Shu Jiguang that lasing light emitter is launched is divided into two-way, one road laser is by after dichroic mirror to one of them plane of the cascaded surface of stationary mirror, vertical reflection is to one of them photoelectric detector in photodetector group, another road laser straight is connected in spectroscope and incides after mobile mirror vertical reflection after transmission to same photoelectric detector again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce the strongest interference state or the most weak interference state at mobile mirror.Owing to stationary mirror being notch cuttype reflecting surface, so each Shu Jiguang that lasing light emitter is launched is not identical by the light path of the light path after the cascaded surface reflection of stationary mirror, the retardation values arrived after every Shu Jiguang that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of the ladder plane of reflection, because adjacent two level differences of this cascaded surface (i.e. the notch cuttype plane of reflection) equal λ/2n+k λ/2, namely the height difference in adjacent steps face can be the same or different, because every Shu Jiguang is after each plane of reflection reflection, light path is difference to some extent, height difference regardless of adjacent two planes of reflection is how many, its optical path difference is λ/n+k λ.
Because in above-mentioned optical path difference formula, k λ can't affect the interference state of this beam laser, only have difference λ/n just can have an impact to the interference state of this beam laser, therefore, as long as mobile mirror carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, one of them of photoelectric detector in this photodetector group can detect that its laser interference state reaches the strongest interference state, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of every two ladder planes of the cascaded surface of stationary mirror and the optical maser wavelength of lasing light emitter.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely introduce AC signal in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal.
It should be noted that, adjacent two level differences equal λ/2n+k λ/2, and whether real decision laser is in the just difference λ/2n of the strongest interference state, and difference k λ/2 of increase are the height difference in order to increase adjacent two reflectings surface of cascaded surface.
Preferably, described stationary mirror comprises plane mirror body and n-1 reflection sheet combines, and the thickness of each described reflection sheet is λ/2n+k λ/2, and wherein k is natural number.
This cascaded surface is superimposed upon on plane mirror body by n-1 reflection sheet and forms, plane mirror body surface is laser interferometer normal mirror, wherein the thickness of each reflection sheet is λ/2n+k λ/2, k is natural number, and namely the thickness of each reflection sheet can be the same or different.
Preferably, each described reflection sheet thickness is λ/2n.
Preferably, described plane mirror body and the identical reflection sheet of n-1 thickness are formed in one body, the height error of two ladder planes that adjacent two reflection sheets avoiding the reflection sheet of piecemeal to link together producing are formed.
Compared with prior art, the beneficial effects of the utility model: the laser beam quantity of the lasing light emitter transmitting of this anti-interference ladder plane reflection laser interferometer, the quantity of notch cuttype plane of reflection quantity and photoelectric detector is n (n >=2), and one_to_one corresponding, the each Shu Jiguang launched due to lasing light emitter is different by the light path of the light path after Different Plane reflection on the cascaded surface of stationary mirror, the retardation values arrived after every Shu Jiguang that lasing light emitter is launched simultaneously is divided into two-way after corresponding photoelectric detector is all not identical, whether each photoelectric detector can detect corresponding two-way laser can interfere phenomenon, the generation of this interference is not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level differences of this cascaded surface equal λ/2n+k λ/2, therefore, as long as mobile mirror carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photoelectric detector in this photodetector group one of them can only can detect that it is in the strongest interference state of laser, therefore the accuracy of detection of this laser interferometer is λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, its measuring accuracy obtains significant raising.Simultaneously owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
Accompanying drawing illustrates:
Laser optical path schematic diagram when Fig. 1 is anti-interference ladder plane reflection laser interferometer use described in the utility model;
Fig. 2 is the structural representation of lasing light emitter in Fig. 1;
Fig. 3 is the structural representation of the stepped appearance plane of reflection of stationary mirror in Fig. 1.
Mark in figure:
1, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3, stationary mirror, 31, the plane of reflection one, 32, the plane of reflection two, 33, the plane of reflection three, 34, the plane of reflection four, 35, catoptron body, 36, reflection sheet, 4, mobile mirror, 5, photodetector group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photoelectric detector three, 54, photoelectric detector four.
Embodiment
Below in conjunction with test example and embodiment, the utility model is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the utility model is only limitted to following embodiment, all technology realized based on the utility model content all belong to scope of the present utility model.
As shown in Figure 1, a kind of multiple beam ladder planar reflector laser interference instrument and using method, comprise lasing light emitter 1, spectroscope 2, stationary mirror 3, mobile mirror 4, photodetector group 5, wherein lasing light emitter 1 comprises n collimated laser beam, n >=2, photodetector group 5 also comprises n photoelectric detector, the reflecting surface of stationary mirror 3 is n the notch cuttype plane of reflection, the spacing h of adjacent two ladder planes of reflection equals λ/2n+k λ/2, and wherein k is natural number, λ is the optical maser wavelength that lasing light emitter 1 sends; The often bundle laser beam that lasing light emitter 1 sends, after spectroscope 2 reflects, vertically injects a corresponding reflection sheet 36 respectively, and each reflection sheet 36 will often restraint laser reflection to corresponding photoelectric detector; The corresponding laser beam that lasing light emitter 1 sends, after spectroscope 2 transmission, reflexes to corresponding photoelectric detector again after impinging perpendicularly on mobile mirror 4 respectively.It should be noted that, the λ in literary composition is the optical maser wavelength that lasing light emitter 1 sends, and the often bundle optical maser wavelength that lasing light emitter 1 sends is all the same.
The laser beam quantity that the lasing light emitter 1 of this laser interferometer sends, the photoelectric detector quantity of cascaded surface plane quantity and photodetector group 5 is n (n >=2), and be one_to_one corresponding, namely every Shu Jiguang that lasing light emitter 1 is launched is divided into two-way, one road laser reflexes to one of them plane of the cascaded surface of stationary mirror 3 by spectroscope 2 after, be reflected back spectroscope 2 and reenter one of them photoelectric detector be mapped in photodetector group 5, another road laser straight reflexes to spectroscope 2 after being connected on and impinging perpendicularly on mobile mirror 4 after transmission in spectroscope 2 again, spectroscope 2 reflects it to same photoelectric detector again, this photoelectric detector can detect this two-way optical path difference and be subjected to displacement in process whether produce interference state at mobile mirror 4, i.e. constructive interference or destructive interference.Due to the cascaded surface on stationary mirror 3, so each Shu Jiguang that lasing light emitter 1 is launched is not identical by the light path of the light path after the cascaded surface reflection of stationary mirror 3, the retardation values arrived after every Shu Jiguang that lasing light emitter 1 is launched simultaneously is divided into two-way after corresponding photodetector group 5 is all not identical, phenomenon can be interfered not only relevant with the wavelength of laser, also there is relation with the level difference of cascaded surface, because adjacent two level difference h of this cascaded surface equal λ/2n+k λ/2, therefore, as long as mobile mirror 4 carries out the distance of mobile λ/2n or integral multiple in the distance of λ/2n, photodetector group 5 on this photodetector all has one of them to detect, and it is in most light laser interference state, therefore the accuracy of detection of this laser interferometer then becomes λ/2n, can only accuracy of detection be for laser wavelength lambda relative to existing laser interferometer, this measuring accuracy is significantly improved, namely this measuring accuracy is determined by the spacing (also can be described as height or thickness) of adjacent two ladder planes of the cascaded surface of stationary mirror 3 and the optical maser wavelength of lasing light emitter 1.
This stationary mirror 3 comprises plane mirror body 35 and the identical reflection sheet 36 of n-1 thickness h combines, and the thickness h of each described reflection sheet 36 is λ/2n.This cascaded surface is superimposed upon on plane mirror body 35 by the reflection sheet 36 that n-1 thickness h is identical and forms, and plane mirror body 35 is the laser interferometer normal mirror that surface is plane, and wherein the thickness h of each reflection sheet 36 is λ/2n.Meanwhile, this plane mirror body 35 and the identical reflection sheet 36 of n-1 thickness h can be formed in one body, the height error of two ladder planes that adjacent two reflection sheets 36 avoiding the reflection sheet 36 of piecemeal to link together producing are formed.
As shown in Figure 2, n the laser beam that all lasing light emitters 1 send is equally spaced, now, select n=4, k=0, the laser beam that lasing light emitter 1 sends is respectively laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14, and the spacing d of adjacent two laser beam equals the integral multiple of optical maser wavelength.Select the optical maser wavelength of 663 nanometers, the spacing d of the adjacent laser beams that adjacent laser source 1 sends is 4 millimeters.The photoelectric detector that corresponding photodetector group 5 receives laser is also respectively four, i.e. photoelectric detector 1, photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54.
Now, the notch cuttype plane of reflection on stationary mirror 3 is also corresponding elects four as, the i.e. plane of reflection 1, the plane of reflection 2 32, the plane of reflection 3 33, the plane of reflection 4 34, as shown in Figure 3, selects four planes of reflection to become notch cuttype plane so that process and reduce costs.This light path route is that the laser that laser beam 1 sends is divided into two-way at spectroscope 2, one tunnel is split after mirror 2 reflects and incides stationary mirror 3, transmission incide photoelectric detector 1 again after being reflexed to spectroscope 2 by the plane of reflection 1, another road of this laser is then direct incides mobile mirror 4 after spectroscope 2 transmission, after being reflected to spectroscope 2, spectroscope 2 again by this laser reflection to photoelectric detector 1.By that analogy, other laser beam 2 12, laser beam 3 13, laser beam 4 14 are reflected by the plane of reflection 2 32, the plane of reflection 3 33, the plane of reflection 4 34 respectively, and are received by photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54 respectively.According to calculating, owing to have employed four notch cuttype planes of reflection, the difference in height of adjacent two planes of reflection is λ/8, and the retardation values of laser after stationary mirror 3 reflects therefore sent by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14 is respectively a
1λ, a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, wherein a
1, a
2, a
3, a
4for natural number.
When laser beam 1 be in the strongest interference state time, the retardation values after the laser that namely laser beam 1 sends is divided into two-way is a
1λ, can measure laser by photoelectric detector 1 and be in the strongest interference state, now laser beam 2 12 to optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 the two-way retardation values of optical interference circuit is respectively: a
2λ-λ/4, a
3λ-λ/2, a
4λ-3 λ/4, three's light path is now all in the strongest non-interference state.
When mobile mirror 4 moves λ/8, when the two-way laser retardation values that lasing light emitter 1 is divided into increases λ/4, laser light path difference also corresponding increase λ/4 of other lasing light emitters, now, the retardation values that the laser that laser beam 1 sends is divided into two-way is a
1λ+λ/4, are in the strongest non-interference state, and the retardation values that the laser that laser beam 2 12 sends is divided into two-way then becomes a
2λ, therefore photoelectric detector 2 52 can detect that optical interference circuit is in the strongest interference state, and the laser of laser beam 3 13 and laser beam 4 14 is also in the strongest non-interference state.When mobile mirror 4 moves λ/4, laser beam 3 13 will be in the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 3 53.
Similar, when mobile mirror 4 moves 3 λ/8, when the two-way laser retardation values that laser beam 1 is divided into increases by 3 λ/4, laser light path difference also corresponding increase by 3 λ/4 of other laser beam, the retardation values that the laser that now laser beam 4 14 sends is divided into two-way then becomes a
4λ, the two-way light path that its laser is divided into will be in constructive interference state, can measure laser interference state by photoelectric detector 4 54.
Again, when mobile mirror 4 moves λ/2, when the two-way laser retardation values that laser beam 1 is divided into increases λ, the laser light path difference also corresponding increase λ of other laser beam, laser beam 1 will be in again the strongest interference state to optical interference circuit, can measure the strongest interference state of laser by photoelectric detector 1.Therefore, be just λ/8 for the measuring accuracy corresponding to the laser interferometer corresponding to four-step planar laser reflection configuration, namely mobile mirror 4 displacement is equal to or greater than λ/8, and namely corresponding photodetector group 5 can observe the interference state significant change of the light path of the four bundle laser that lasing light emitter 1 is launched.
Therefore, the ladder plane of reflection quantity increasing stationary mirror 3 can improve measuring accuracy, when the laser mirror structure of the employing 8 ladder plane of reflection, the corresponding measuring accuracy corresponding to laser interferometer is then λ/16, when adopting stationary mirror 3 structure of the n ladder plane of reflection, the measuring accuracy of this laser interferometer is just corresponding becomes λ/2n.
Owing to adopting multi-pass interferometry, in measuring process, the DC level that each photodetector detects should alternately change, if the DC level that the change of the measurement environment of a certain light path causes photodetector to measure offsets, and there is not alternately change in the DC level that the photodetector of other optical path detects, now think that this optical path is the impact being subject to measurement environment, ignore the change of its level.If the DC level that the change of the measurement environment of many light paths causes multiple photodetector to measure offsets, then think that measurement environment changes, ignore the change of its level.Only the situation strictly meeting the alternately change of multi-pass interference state in measuring process is just counted it, namely AC signal is introduced in multi-pass interferometry, the measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves the antijamming capability of interferometer.
Above embodiment only in order to the utility model is described and and technical scheme described by unrestricted the utility model, although this instructions has been described in detail the utility model with reference to each above-mentioned embodiment, but the utility model is not limited to above-mentioned embodiment, therefore anyly the utility model is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of utility model, it all should be encompassed in the middle of right of the present utility model.
Claims (4)
1. an anti-interference ladder plane reflection laser interferometer, comprise lasing light emitter (1), spectroscope (2), stationary mirror (3), mobile mirror (4), photodetector group (5), it is characterized in that, described lasing light emitter (1) comprises n collimated laser beam, wherein n >=2, described photodetector group (5) comprises n photoelectric detector, the reflecting surface of described stationary mirror (3) is n the plane of reflection becoming notch cuttype, the spacing of adjacent two planes of reflection equals λ/2n+k λ/2, wherein k is natural number, λ is the optical maser wavelength that lasing light emitter (1) sends, the laser that each described lasing light emitter (1) sends is after described spectroscope (2) reflection, vertically inject a corresponding plane of reflection, each described plane of reflection is by corresponding laser beam reflection each photoelectric detector to corresponding described photodetector group (5), every Shu Jiguang that described lasing light emitter (1) sends, after described spectroscope (2) transmission, impinges perpendicularly on described mobile mirror (4) back reflection each photoelectric detector to corresponding photodetector group (5) respectively.
2. anti-interference ladder plane reflection laser interferometer according to claim 1, it is characterized in that, described stationary mirror (3) comprises plane mirror body (35) and n-1 reflection sheet (36) combines, the thickness of each described reflection sheet (36) is λ/2n+k λ/2, and wherein k is natural number.
3. anti-interference ladder plane reflection laser interferometer according to claim 2, is characterized in that, each described reflection sheet (36) thickness is λ/2n.
4. anti-interference ladder plane reflection laser interferometer according to claim 3, is characterized in that, described catoptron body (35) and the identical reflection sheet (36) of n-1 thickness are formed in one body.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104713474A (en) * | 2015-03-30 | 2015-06-17 | 北方民族大学 | Multi-beam ladder plane mirror laser interferometer |
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2015
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104713474A (en) * | 2015-03-30 | 2015-06-17 | 北方民族大学 | Multi-beam ladder plane mirror laser interferometer |
| CN104713474B (en) * | 2015-03-30 | 2017-12-08 | 北方民族大学 | A kind of multiple beam ladder planar reflector laser interference instrument |
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