CN205619875U - Wavelength correction formula multiple beam ladder planar mirror laser interferometer - Google Patents
Wavelength correction formula multiple beam ladder planar mirror laser interferometer Download PDFInfo
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- CN205619875U CN205619875U CN201520966075.5U CN201520966075U CN205619875U CN 205619875 U CN205619875 U CN 205619875U CN 201520966075 U CN201520966075 U CN 201520966075U CN 205619875 U CN205619875 U CN 205619875U
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Abstract
The utility model discloses a wavelength correction formula multiple beam ladder planar mirror laser interferometer, including laser source, spectroscope, fixed mirror, measurement reflecting mirror device, photoelectric detector group, wherein the laser source includes the individual collimated laser beam of n (n >= 2), and photoelectric detector group is including a n photoelectric detector spare. Measuring reflecting mirror device and including measurement speculum and precise displacement device, fixed mirror's plane of reflection is a n ladder plane, and two adjacent reflection plane intervals are 2 (k is the natural number) of lambda / 2n+k lambda /, every shu jiguang becomes two bundles behind the spectroscope, wherein a branch of spectroscope of following after fixed mirror reflects passs through, arrives photoelectric detector, and another shujiguang also incides to this photoelectric detector after measurement speculum, spectroscope reflect in proper order simultaneously. The laser Interferometer phenomenon that this laser interferometer produced is not only relevant with laser wavelength, and is still relevant with the high difference of notch cuttype reflection plane, and this photoelectric detector group can detect the precision and reach lambda / other displacement of 2n level, and laser wavelength is revised to the while in the measurement process, reduces the environment and to the influence of laser Interferometer measurement result, is showing and improving measurement accuracy.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly to a kind of wavelength amendment type how light
Bundle ladder planar reflector laser interference instrument.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has brightness height, directivity
Good, monochromaticity and feature, the laser interferometry techniques comparative maturity such as coherence is good.Laser interference is surveyed
Amount system is applied widely: accurate length, the measurement such as linear scale, grating of angle, gauge block, accurate silk
The detection of thick stick；The control of the such as precision optical machinery of the position detecting system in precision instrument, correction；Large-scale integrated
Position detecting system in circuit special equipment and detecting instrument；Minute sized measurement etc..Swash at great majority
In interference of light length measurement system, all have employed Michelson's interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation,
And reflect from stationary mirror and moving reflector can be combined in spectroscope respectively and produce interference fringe.
When moving reflector moves, the light intensity of interference fringe changes by the photo-electric conversion element in accepter and electronics
Circuits etc. are converted to electric impulse signal, shaped, amplify after input forward-backward counter and calculate overall pulse number,
Again by electronic computer by calculating formula L=N × λ/2, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates
Go out the displacement L of moving reflector.When using single frequency laser interferometer, it is desirable to ambient atmosphere is in steady statue,
Various air turbulences all can cause DC level change to affect measurement result.
One of weakness of single frequency laser interferometer be exactly affected by environment seriously, severe at test environment, measure
When distance is longer, this shortcoming is the most prominent.Its reason is that it is a kind of DC measurement system, necessarily has
There is the drawback of direct current light gentle level drift.When laser interferometer moveable mirror moves, photelectric receiver meeting
Output signal, if signal has exceeded the triggering level of enumerator, will be recorded, and if laser
Beam intensity changes, it is possible to make photosignal be less than the triggering level of enumerator and make enumerator stop
Counting, the main cause making laser intensity or interference signal Strength Changes is air turbulence, lathe mist of oil,
The cutting swarf impact on light beam, there is skew or corrugated distortion in result light beam.
Single frequency laser interferometer is limited to the wavelength of laser due to the problem of measurement structure, its certainty of measurement, its
Precision is typically only the integral multiple of its wavelength, is difficult to promote again, measures the change of environment to survey simultaneously
Amount result has considerable influence.Along with commercial production is more and more higher, to measuring instrument to the requirement of accurate measurement
Certainty of measurement is had higher requirement.
Summary of the invention
It is an object of the invention to overcome existing laser interferometer measurement precision to be limited to optical maser wavelength, measure essence
Degree is difficult to the deficiency that promotes, it is provided that a kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument and
Its measuring method, this laser interferometer, on the basis of existing Michelson laser interferometer, uses multiple light courcess
Multi-ladder plane mirror, can detect the precision of λ/2n, improve laser for n ladder plane mirror
The certainty of measurement of interferometer.Measuring the laser effective wavelength under environment can be by measuring method of the present invention
Obtain, further increase the certainty of measurement of this laser interferometer.Simultaneously because multi-pass interference state is alternately
Conversion, the environmental change to optical path has higher capacity of resisting disturbance.
In order to realize foregoing invention purpose, the invention provides techniques below scheme:
A kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument, including lasing light emitter, spectroscope,
Stationary mirror, measurement reflector apparatus, photodetector group, it is characterised in that described measurement reflecting mirror
Device includes measuring reflecting mirror and accurate displacement device, and described measurement reflecting mirror is arranged on described accurate displacement dress
Putting, described accurate displacement device is arranged on testee, and described accurate displacement device is that described measurement is anti-
Penetrate mirror to provide with testee displacement in the same direction or reverse displacement.Described lasing light emitter includes n collimated laser beam,
Wherein n >=2, described photodetector group includes n photoelectric detector, the reflection of described stationary mirror
Face is n the plane of reflection becoming notch cuttype, and the spacing of adjacent two planes of reflection is equal to λ/2n+k λ/2, wherein
K be random natural number, λ be the optical maser wavelength that lasing light emitter sends；Every Shu Jiguang that each described lasing light emitter sends
After described dichroic mirror, it is respectively perpendicular and injects a corresponding plane of reflection, each described plane of reflection
Each photoelectric detector of correspondence by corresponding laser-bounce to described photodetector group；Described lasing light emitter is sent out
The often bundle laser beam gone out, after described spectroscope transmission, is respectively perpendicular after inciding described measurement reflecting mirror anti-
It is mapped to each corresponding photoelectric detector of photodetector group.
Collimated laser beam quantity, notch cuttype plane of reflection quantity and the light that the lasing light emitter of this laser interferometer produces
The quantity of electric explorer part is n (n >=2), and is one_to_one corresponding, and every Shu Jiguang that i.e. lasing light emitter is launched divides equally
For two-way, after a road laser is by dichroic mirror to one of them plane of the cascaded surface of stationary mirror,
Vertical reflection is to one of them photoelectric detector in photodetector group, and another road laser straight is connected on light splitting
Incide after transmission in mirror measurement reflecting mirror after again vertical reflection to same photoelectric detector, this light electrical resistivity survey
Survey device and can detect whether this two-way optical path difference produces the most capable and experienced during measurement reflecting mirror is subjected to displacement
Relate to state or the most weak interference state.Owing to being notch cuttype reflecting surface on stationary mirror, so lasing light emitter is launched
Each Shu Jiguang reflected by the cascaded surface of stationary mirror after the light path of light path differ, swash simultaneously
Every Shu Jiguang that light source is launched arrives the retardation values the most not phase after the photoelectric detector of correspondence after being divided into two-way
With, it is possible to interfere phenomenon not only relevant with the wavelength of laser, go back and the level of the ladder plane of reflection
Difference has relation, and adjacent two level differences of this cascaded surface (i.e. the notch cuttype plane of reflection) are equal to
λ/2n+k λ/2, the i.e. height difference in adjacent steps face can be the same or different, owing to every Shu Jiguang is often
After the reflection of the individual plane of reflection, light path difference, the height difference regardless of adjacent two planes of reflection is how many,
Its optical path difference is λ/n+k λ.
Owing in above-mentioned optical path difference formula, k λ can't affect the interference state of this beam laser, only difference λ/n
Just the interference state of this beam laser can be produced impact, therefore, as long as measuring reflecting mirror to move λ/2n
Distance or the distance of integer times λ/2n, one of them of the photoelectric detector in this photodetector group
It is capable of detecting when that its laser interference state reaches the strongest interference state, therefore the accuracy of detection of this laser interferometer is then
Become λ/2n, can only be for accuracy of detection be laser wavelength lambda relative to existing laser interferometer, this measurement essence
Degree is significantly improved, and this certainty of measurement is i.e. by each two ladder plane of the cascaded surface of stationary mirror
Spacing (alternatively referred to as height or thickness) and the optical maser wavelength of lasing light emitter determine.
Owing to using multi-pass interferometry, during measurement, the DC level that each photodetector detects
Should alternate, if the change measuring environment of a certain light path causes the unidirectional current that photodetector measures
Flat offset, and the DC level that the photodetector of other optical path detects does not occurs alternately to become
Change, now think that this optical path is affected by measuring the impact of environment, ignore the change of its level.If it is a plurality of
The DC level that the change measuring environment of light path causes multiple photodetector to measure offsets, then it is assumed that
Measurement environment changes, and ignores the change of its level.Do only for strictly meeting multi-pass during measuring
It is just counted by the situation relating to state alternate, i.e. introduces AC signal in multi-pass interferometry,
The measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal.
It should be noted that adjacent two level differences are equal to λ/2n+k λ/2, whether real decision laser
Being in the simply difference λ/2n of the strongest interference state, difference k λ/2 of increase are to increase cascaded surface adjacent two
The height difference of individual reflecting surface.
Preferably, described stationary mirror include plane mirror body and the combination of n-1 reflection sheet and
Becoming, the thickness of each described reflection sheet is λ/2n+k λ/2, and wherein k is natural number.
This cascaded surface is superimposed upon on plane mirror body by n-1 reflection sheet and forms, and plane mirror is originally
Surface is laser interferometer normal mirror, and the thickness of the most each reflection sheet is λ/2n+k λ/2, k
For natural number, the thickness of the most each reflection sheet can be the same or different.
Preferably, each described reflection sheet thickness is λ/2n.
Preferably, described plane mirror body and the identical reflection sheet of n-1 thickness are formed in one
Body, it is to avoid the reflection sheet of piecemeal links together two ladders that adjacent two reflection sheets produced are formed
The height error of plane.
In the such scheme of the application, owing to measurement reflecting mirror is arranged on accurate displacement device, and accurate
Gearshift is arranged on testee, and when testee is subjected to displacement, testee drives accurate displacement
Device, and then drive measurement reflecting mirror, so, when testee is subjected to displacement, in displacement process,
Change due to optical interference circuit light path so that, the laser interference state of corresponding light beam changes the most therewith, starts
Before measuring work, start accurate displacement device, make measurement reflecting mirror produce displacement, described measurement reflecting mirror
The direction of displacement of direction of displacement and testee on the same line, when any one light in photodetector group
When electric explorer detects the strongest constructive interference, stop accurate displacement device, and by institute in photodetector group
There is photodetector counting to reset, start to measure the displacement of testee the most again, doing of corresponding laser beam
Relate in state change process, all photodetectors register the strongest phases of correspondence optical interference circuit in photodetector group
The long total degree N interfered, when testee mobile end, when remaining static, photodetector group is stopped
Only counting；Now, measurement reflecting mirror is made to move on the direction of displacement of testee by accurate displacement device,
And observe photodetector group, when in photodetector group, any one photodetector detects the longest
During interference, stop accurate displacement device, and read accurate displacement device for measuring the shift value that reflecting mirror provides
△L。
If displacement △ L is identical with the direction of displacement of testee, then the shift value L=N of the actual generation of testee
× λ/(2n)+(λ/(2n)-△ L), wherein △ L ＜ λ/(2n), in formula, λ is optical maser wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then the shift value L=N of the actual generation of testee
× λ/(2n)+△ L, wherein △ L ＜ λ/(2n), in formula, λ is optical maser wavelength.
So, by said structure, testee actual displacement will exceed 1/ (2n) individual optical maser wavelength part △
L also measures and adds in displacement detecting result, and then makes to obtain measured by the laser interferometer of the application
Displacement result more accurate, its degree of accuracy is higher than 1/ (2n) individual optical maser wavelength, is specifically dependent upon accurate displacement dress
Put the displacement accuracy that can be provided by.
As the preferred version of the application, described accurate displacement device includes support platform and is arranged on described
Driving means on support platform, described support platform matches with described testee, and described driving means is
Described measurement reflecting mirror provides the displacement on testee direction of displacement.
As the preferred version of the application, described driving means is Piezoelectric driving means.
In this programme, employing Piezoelectric driving means can be by the merit of mutual to mechanical energy and electric energy phase transformation
Energy ceramic material, its deformation quantity produced under electric field action is the least, the ten million of the most own size
The micro-displacement of/mono-, has good repetitive distortion recovery capability, and good stability, precision are high, enter one
Step improves accuracy and the reliability of the application accurate displacement device.
As the preferred version of the application, described accurate displacement device also includes being arranged in described support platform
The first displacement piece and the second displacement piece of being arranged in described first displacement piece, described driving means is with described
First displacement piece matches, and provides along the displacement of described support platform for described first displacement piece, and described first
Displacement piece has an inclined-plane tilted relative to its direction of displacement, and described second displacement piece is slidably arranged in described
On the inclined-plane of the first displacement piece, make described second displacement piece can slide along the inclined-plane of described first displacement piece, institute
Stating snug fit between the first displacement piece and the second displacement piece, described measurement reflecting mirror is arranged on described second
Moving on part, described support platform is additionally provided with restraint device, described restraint device limits described second displacement
Part moving along described first displacement piece direction of displacement so that when the first displacement piece is by described driving means band
When moving and produce displacement, described second displacement piece is driven by described first displacement piece and produces displacement, and,
The direction of displacement of described second displacement piece is perpendicular with the direction of displacement of described first displacement piece, described first
Moving the inclined-plane of part with the angle of its direction of displacement is A degree, 0 < A < 45.
In the such scheme of the application, driving means matches with the first displacement piece, is that the first displacement piece carries
For along the displacement of support platform, the first displacement piece has an inclined-plane tilted relative to its direction of displacement, and second
Displacement piece is slidably arranged on the inclined-plane of the first displacement piece, makes the second displacement piece can be along the inclined-plane of the first displacement piece
Sliding, when accurate displacement device works, driving means provides certain displacement to promote the first displacement piece,
Now, owing to restraint device limits the second displacement piece moving along the first displacement piece direction of displacement, second is made
The direction of displacement of displacement piece and the direction of displacement of the first displacement piece are perpendicular, so, and the displacement of the second displacement piece
Measure relevant to the displacement that driving means provides for the first displacement piece, also with the inclined-plane of the first displacement piece and its position
The angle moving direction is correlated with.
That is, if the angle of the inclined-plane of the first displacement piece and its direction of displacement is A degree, when driving means offer
When displacement is X, the second displacement piece is at the displacement being perpendicular in the driving means direction of motion produce
Y=Xtan (A), so, when included angle A is less than 45 degree, will obtain a displacement less than X value, when
When further reducing included angle A, displacement Y reduces, so the most therewith so that in the scheme of the application,
Accurate displacement device, by the way of changing precision with stroke, directly enhances the essence of the application accurate displacement device
Degree, the most further improves the certainty of measurement of the application laser interferometer.
As the preferred version of the application, between described first displacement piece and described support platform, it is additionally provided with tool
Magnetic magnetic part, described second displacement piece has magnetic, and described second displacement piece with described magnetic part is
State that there is a natural attraction between the sexes.Make the first displacement piece when being promoted, it is possible to keep fitting tightly with the second displacement piece,
Ensure the precision of the application accurate displacement device, and then ensure the certainty of measurement of the application laser interferometer.
As the preferred version of the application, described second displacement piece and described measurement reflecting mirror are integral type structure.
In such scheme, the second displacement piece is integral type structure with measurement reflecting mirror, say, that directly
Second displacement piece arranges a reflecting surface so that it is itself formed and measure reflecting mirror, so, simplify this Shen
Please the structure of laser interferometer, convenient debugging and using.
Although at present, there is also the device measuring air refraction, atmospheric temperature, the humidity to single locus
And air pressure measures, by wavelength compensation formula, optical maser wavelength is modified, but its be merely able to right
Local air detects, and in the displacement measurement field of the application, owing to its displacement is in a region
Inside carrying out, in this region, each parameter of the air of each position all there are difference, is especially in the presence of bigger temperature
, bigger mistake will be there is with single-point parameters revision optical maser wavelength in the situations such as gradient, moist gradient and barometric gradient
Difference.
So, for these reasons, in this application, during measuring, detection is current measures under environment,
The environment effective wavelength λ ' of laser, and this λ ' value is currently to measure the effective wavelength of environment, so directly avoiding
The problem that zones of different air refraction is different and brings, so, reduces the error that environmental factors is brought,
And then further improve the certainty of measurement of the application laser interferometer and measuring method thereof.
Disclosed herein as well is a kind of for above-mentioned wavelength amendment type multiple beam ladder planar reflector laser interference
The measuring method of instrument, it includes following step:
Step one: install wavelength amendment type multiple beam ladder planar reflector laser interference instrument；
Step 2: measurement reflector apparatus is arranged on testee；
Step 3: debugging wavelength amendment type multiple beam ladder planar reflector laser interference instrument, makes formation meet the requirements
Light path, and make each optical interference circuit all in interference state；
Step 4: before starting to measure work, starts accurate displacement device, makes measurement reflecting mirror produce displacement, described
Measure the direction of displacement of direction of displacement and testee of reflecting mirror on the same line, when photodetector group
In when having any one the strongest constructive interference to be detected, stop accurate displacement device, and by photodetector group
Counting resets；
Step 5: start to measure work, testee starts mobile, all photodetectors in photodetector group
The total degree N of the strongest constructive interference of the corresponding optical interference circuit of record；
Step 6: testee displacement terminates, and remains static, is again started up accurate displacement device, makes measurement
Reflecting mirror produces displacement, and the described direction of displacement of measurement reflecting mirror and the direction of displacement of testee are with always
On line, when in photodetector group, any one photodetector detects the strongest constructive interference again, stop
Only described accurate displacement device, makes measurement reflecting mirror stop；
Step 7: read the shift value △ L that accurate displacement device provides for described measurement reflecting mirror；
Step 8: during record measurement, the strongest constructive interference total degree N and the measurement of photodetector group record are anti-
Penetrate mirror shift value △ L.
Step 9: be again started up accurate displacement device, traverse measurement reflecting mirror, makes photodetector group record the strongest
The total degree M (M is positive integer) of constructive interference, and it is anti-to read M measurement corresponding to the strongest constructive interference
Penetrate mirror shift value Z.According to Z=M × λ '/(2n), draw under current measurement environment, the effective wavelength λ ' of laser
=2nZ/M.
Step 10: calculate the shift value of testee.
If displacement △ L is identical with the direction of displacement of testee, then, the shift value L=N of the actual generation of testee
× λ '/(2n)+(λ '/(2n)-△ L), wherein △ L ＜ λ '/(2n), in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee, then, the shift value L=N of the actual generation of testee
× λ '/(2n)+△ L, wherein △ L ＜ λ '/(2n), in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing the shift value of testee by measurement mirror displacements value △ L
In, directly enhance the certainty of measurement of testee displacement.Meanwhile, the equivalence in environment is measured by detection
Wavelength X ', i.e. the wavelength of laser is modified, so reduces the error that environmental factors is brought, and then enter one
The certainty of measurement that improve the application laser interferometer and measuring method thereof of step.
As the preferred version of the application, in described step 4 to step 9, the strongest described constructive interference also may be used
To be the most weak destructive interference.In this programme, during measuring, photodetector group be record right
Should the total degree of the most weak destructive interference of each laser interference light path, the most still can obtain a precision higher
The shift value L of testee.
Compared with prior art, beneficial effects of the present invention:
(1) the laser beam quantity of lasing light emitter transmitting of this high accuracy ladder plane reflection laser interferometer, ladder
The quantity of type plane of reflection quantity and photoelectric detector is n (n >=2), and one_to_one corresponding, due to lasing light emitter
The each Shu Jiguang launched is by the light path of the light path after Different Plane reflects on the cascaded surface of stationary mirror not
With, every Shu Jiguang that lasing light emitter is launched simultaneously arrives the light path after the photoelectric detector of correspondence after being divided into two-way
Difference all differs, and each photoelectric detector can detect whether the two-way laser of correspondence can be done
Relating to phenomenon, the generation of this interference is not only relevant with the wavelength of laser, goes back and the level of cascaded surface is poor
Value has relation, owing to adjacent two level differences of this cascaded surface are equal to λ/2n+k λ/2, therefore, as long as
Measure reflecting mirror and move distance or the distance of integer times λ/2n of λ/2n, in this photodetector group
Photoelectric detector one of them can only be capable of detecting when that it is in light laser interference state, therefore this laser is done
The accuracy of detection of interferometer is λ/2n；Can only accuracy of detection be laser wavelength lambda relative to existing laser interferometer
For, its certainty of measurement has obtained significant raising.Simultaneously because use multi-pass interferometry, measured
Cheng Zhong, the DC level that each photodetector detects should alternate, if the measurement ring of a certain light path
The DC level that the change in border causes photodetector to measure offsets, and the light electrical resistivity survey of other optical path
There is not alternate in the DC level that survey device detects, now thinks that this optical path is affected by measurement ring
The impact in border, ignores the change of its level.If the change measuring environment of a plurality of light path causes multiple smooth electrical resistivity survey
The DC level surveying device measurement offsets, then it is assumed that measures environment and changes, and ignores the change of its level.
Just it is counted only for the situation strictly meeting multi-pass interference state alternate during measuring
Number, i.e. introduces AC signal, by DC level in traditional laser interferometry in multi-pass interferometry
Measure the measurement being converted to AC signal, improve the capacity of resisting disturbance of interferometer.
(2) during during measuring, environment is measured in detection, the effective wavelength λ ' of laser, repaiies optical maser wavelength
Just, so, reduce the error that environmental factors is brought, and then further improve the application laser interferometer
Certainty of measurement.
Accompanying drawing illustrates:
Fig. 1 is laser during wavelength amendment type multiple beam ladder planar reflector laser interference instrument of the present invention use
Light path schematic diagram；
Fig. 2 is the structural representation of lasing light emitter in Fig. 1；
Fig. 3 is the structural representation of the notch cuttype plane of reflection of stationary mirror in Fig. 1.
Fig. 4 is for measuring reflecting mirror and the second displacement piece integral structure figure
Labelling in figure:
1, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four,
2, spectroscope, 3, stationary mirror, 31, the plane of reflection one, 32, the plane of reflection two, 33, reflection flat
Face three, 34, the plane of reflection four, 35, reflecting mirror body, 36, reflection sheet, 4, measure reflecting mirror, 5,
Photodetector group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photodetector
Part three, 54, photoelectric detector four, 6, accurate displacement device, 7, measure reflecting mirror, 8, support platform,
9, driving means, 10, restraint device, 11, magnetic part, 12, testee, the 13, first displacement piece,
14, the second displacement piece, 15, inclined-plane.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But should be by
This is interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to below example, all real based on present invention institute
Existing technology belongs to the scope of the present invention.
As it is shown in figure 1, a kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument, including swashing
Light source 1, spectroscope 2, stationary mirror 3, measurement reflector apparatus 4, photodetector group 5, described survey
Amount reflecting mirror group 4 includes measuring reflecting mirror 7 and accurate displacement device 6, measures reflecting mirror 7 and includes at a right angle
Two planes of reflection, described measurement reflecting mirror 7 is arranged on described accurate displacement device 6, described accurate position
Moving device 6 is arranged on testee 12, and described accurate displacement device 6 provides for described measurement reflecting mirror 7
With testee 12 displacement in the same direction or reverse displacement；
Described lasing light emitter 1 includes n collimated laser beam, n >=2, and photodetector group 5 also includes n light
Electric explorer part, the reflecting surface of stationary mirror 3 is n the notch cuttype plane of reflection, and adjacent two ladders are anti-
Penetrate spacing h of plane equal to λ/2n+k λ/2, wherein k be natural number, λ be the laser wave that lasing light emitter 1 sends
Long；The often bundle laser beam that lasing light emitter 1 sends, after spectroscope 2 reflects, is respectively perpendicular and injects corresponding one
Reflection sheet 36, each reflection sheet 36 will often restraint laser-bounce to corresponding photoelectric detector；Lasing light emitter
The 1 corresponding laser beam sent, after spectroscope 2 transmission, is respectively perpendicular after inciding measurement reflecting mirror 7 the most anti-
It is mapped to the photoelectric detector of correspondence.It should be noted that the λ in literary composition is the laser wave that lasing light emitter 1 sends
Long, the often bundle optical maser wavelength that lasing light emitter 1 sends all as.
Laser beam quantity, cascaded surface plane quantity and the photodetection that the lasing light emitter 1 of this laser interferometer sends
The photoelectric detector quantity of device group 5 is n (n >=2), and is one_to_one corresponding, and i.e. lasing light emitter 1 transmitting is every
Shu Jiguang is divided into two-way, and a road laser reflexes to its of the cascaded surface of stationary mirror 3 by spectroscope 2
In after a plane, be reflected back one of them light electrical resistivity survey that spectroscope 2 is again incident in photodetector group 5
Surveying device, another road laser straight is connected in spectroscope 2 after impinging perpendicularly on measurement reflecting mirror 7 after transmission the most anti-
Being mapped to spectroscope 2, spectroscope 2 reflects it to same photoelectric detector again, and this photoelectric detector is i.e.
Can detect this two-way optical path difference is measuring during reflecting mirror 7 is subjected to displacement whether produce interference state, i.e.
Constructive interference or destructive interference.Due to the cascaded surface on stationary mirror 3, so lasing light emitter 1 transmitting is each
Shu Jiguang is differed by the light path of the light path after the cascaded surface reflection of stationary mirror 3, laser simultaneously
Every Shu Jiguang that source 1 is launched arrives the retardation values after the photodetector group 5 of correspondence the most not after being divided into two-way
Identical, it is possible to interfere phenomenon not only relevant with the wavelength of laser, go back and the level difference of cascaded surface
There is relation, owing to adjacent two level differences h of this cascaded surface are equal to λ/2n+k λ/2, therefore, as long as
Measure reflecting mirror 7 and move distance or the distance of integer times λ/2n of λ/2n, on this photodetector
Photodetector group 5 all have one of them to be capable of detecting when it is in light laser interference state, therefore this laser
The accuracy of detection of interferometer then becomes λ/2n, can only accuracy of detection be laser relative to existing laser interferometer
For wavelength X, this certainty of measurement is significantly improved, and this certainty of measurement is i.e. by the rank of stationary mirror 3
The spacing (alternatively referred to as height or thickness) of adjacent two ladder planes of tread and the optical maser wavelength of lasing light emitter 1
Determine.
This stationary mirror 3 includes plane mirror body 35 and the identical reflection sheet of n-1 thickness h
36 combine, and the thickness h of each described reflection sheet 36 is λ/2n.This cascaded surface passes through n-1 thickness
Reflection sheet 36 identical for h is superimposed upon on plane mirror body 35 and forms, and plane mirror body 35 is
Surface is the laser interferometer normal mirror of plane, and the thickness h of the most each reflection sheet 36 is
λ/2n.Meanwhile, this plane mirror body 35 and the identical reflection sheet 36 of n-1 thickness h can be
One-body molded body, it is to avoid the reflection sheet 36 of piecemeal link together produce adjacent two reflection sheets 36
The height error of two the ladder planes formed.
As in figure 2 it is shown, n the laser beam that all of lasing light emitter 1 sends is equally spaced, now, select n=4,
K=0, the laser beam that lasing light emitter 1 sends be respectively laser beam 1, laser beam 2 12, laser beam 3 13,
Laser beam 4 14, and spacing d of adjacent two laser beams is equal to the integral multiple of optical maser wavelength.663 are selected to receive
The optical maser wavelength of rice, spacing d of the adjacent laser beams that adjacent laser source 1 sends is 4 millimeters.Corresponding light
Electric explorer group 5 receives the photoelectric detector of laser and is also respectively four, i.e. photoelectric detector 1,
Photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54.
Now, the notch cuttype plane of reflection on stationary mirror 3 elects four the most accordingly as, i.e. the plane of reflection one
31, the plane of reflection 2 32, the plane of reflection 3 33, the plane of reflection 4 34, as it is shown on figure 3, select four instead
Penetrate plane and become notch cuttype plane so that processing and reducing cost.This light path route is that laser beam 1 sends
Laser is divided into two-way at spectroscope 2, and a road is split after mirror 2 reflects and incides stationary mirror 3, is reflected
Plane 1 reflex to spectroscope 2 after transmission incide photoelectric detector 1 again, another of this laser
Road then directly incides measurement reflecting mirror 7, after being reflected to spectroscope 2, spectroscope after spectroscope 2 transmission
2 again by this laser-bounce to photoelectric detector 1.By that analogy, other laser beam 2 12, swash
Light beam 3 13, laser beam 4 14 are respectively by the plane of reflection 2 32, the plane of reflection 3 33, the plane of reflection 4 34
Reflection, and respectively by photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54
Receive.According to calculating, owing to have employed four notch cuttype planes of reflection, the height of adjacent two planes of reflection
Difference is λ/8, is therefore sent out by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14
The laser gone out retardation values after stationary mirror 3 reflects is respectively a1λ、a2λ-λ/4、a3λ-λ/2、
a4λ-3 λ/4, wherein a1、a2、a3、a4For natural number.
When laser beam 1 is in the strongest interference state, the laser that i.e. laser beam 1 sends is divided into two
Retardation values behind road is a1λ, can measure laser by photoelectric detector 1 and be in the most capable and experienced relating to
State, now laser beam 2 12 institute to optical interference circuit, laser beam 3 13 institute to optical interference circuit and laser beam
4 14 the two-way retardation values of optical interference circuit is respectively as follows: a2λ-λ/4、a3λ-λ/2、a4λ-3 λ/4, San Zheguang
Road is now in the strongest non-interference state.
Moving λ/8 when measuring reflecting mirror 7, the two-way laser retardation values making lasing light emitter 1 be divided into increases λ/4
Time, the laser light path difference of other lasing light emitters increases λ/4, now, the laser that laser beam 1 sends the most accordingly
The retardation values being divided into two-way is a1λ+λ/4, are in the strongest non-interference state, and laser beam 2 12 sends swashs
Light is divided into the retardation values of two-way and then becomes a2λ, therefore photoelectric detector 2 52 is able to detect that interference light
Road is in the strongest interference state, and the laser of laser beam 3 13 and laser beam 4 14 is also at non-the most capable and experienced relating to shape
State.When measuring reflecting mirror 7 and moving λ/4, optical interference circuit will be in and the most capable and experienced to relate to shape by laser beam 3 13 institute
State, can measure the strongest interference state of laser by photoelectric detector 3 53.
It is similar to, when measuring reflecting mirror 7 and moving 3 λ/8, makes the two-way laser light path that laser beam 1 is divided into
When difference increases by 3 λ/4, the laser light path difference of other laser beams increases by 3 λ/4, now laser beam 4 14 the most accordingly
The laser sent is divided into the retardation values of two-way and then becomes a4λ, the two-way light path that its laser is divided into will be in the longest
Interference state, can measure laser interference state by photoelectric detector 4 54.
Again, when measuring reflecting mirror 7 and moving λ/2, the two-way laser light path difference that laser beam 1 is divided into is made
When value increases λ, the laser light path difference of other laser beams increases λ the most accordingly, and laser beam 1 institute is to interfering light
Road will be in again the strongest interference state, can be measured by photoelectric detector 1 that laser is the most capable and experienced relates to shape
State.Therefore, for the measurement essence corresponding to the laser interferometer corresponding to four-step planar laser catoptric arrangement
Degree, just for λ/8, is i.e. measured reflecting mirror 7 displacement and is equaled to or more than λ/8, and corresponding photodetector group 5 can
Enough observe the interference state significant change of the light path of the four bundle laser that lasing light emitter 1 launches.
Therefore, the ladder plane of reflection quantity increasing stationary mirror 3 can improve certainty of measurement, when using 8
The laser mirror structure of the ladder plane of reflection, the corresponding certainty of measurement corresponding to laser interferometer is then
λ/16, when using stationary mirror 3 structure of the n ladder plane of reflection, the certainty of measurement of this laser interferometer
Become λ/2n the most accordingly.
Owing to using multi-pass interferometry, during measurement, the DC level that each photodetector detects
Should alternate, if the change measuring environment of a certain light path causes the unidirectional current that photodetector measures
Flat offset, and the DC level that the photodetector of other optical path detects does not occurs alternately to become
Change, now think that this optical path is affected by measuring the impact of environment, ignore the change of its level.If it is a plurality of
The DC level that the change measuring environment of light path causes multiple photodetector to measure offsets, then it is assumed that
Measurement environment changes, and ignores the change of its level.Do only for strictly meeting multi-pass during measuring
It is just counted by the situation relating to state alternate, i.e. introduces AC signal in multi-pass interferometry,
The measurement of DC level in traditional laser interferometry is converted to the measurement of AC signal, improves interference
The capacity of resisting disturbance of instrument.
In the present embodiment, owing to measurement reflecting mirror 7 is arranged on accurate displacement device 6, and accurate displacement
Device 6 is arranged on testee 12, and when testee 12 is subjected to displacement, testee 12 drives essence
Mil moving device 6, and then drive measurement reflecting mirror 7, so, when testee 12 is subjected to displacement,
In displacement process, the interference state of each laser interference light path that laser interferometer of the present invention is corresponding is the most therewith
Change, before starting to measure work, starts accurate displacement device 6, makes measurement reflecting mirror 7 produce displacement, described
The direction of displacement of measurement reflecting mirror 7 with the direction of displacement of testee 12 on the same line, works as photodetection
When any one photodetector detects the strongest constructive interference in device group 5, stop accurate displacement device 6, and
All photodetectors counting in photodetector group 5 is reset, starts the most again to measure testee 12
Displacement, in the interference state change procedure of corresponding each laser interference light path, each photoelectricity of photodetector group 5
The total degree N of the strongest constructive interference of detector record, when testee 12 mobile end, remains static
Time, photodetector group 5 stops counting；Now, measurement reflecting mirror 7 is made to exist by accurate displacement device 6
Move on the direction of displacement of testee 12, and observe photodetector group 5, when in photodetector group 5
When any one photodetector detects the strongest constructive interference, stop accurate displacement device 6, and read precision
Gearshift 6 is for measuring the shift value △ L that reflecting mirror 7 provides.
If displacement △ L is identical with the direction of displacement of testee 12, then, the actual position produced of testee 12
Shifting value L=N × λ/(2n)+(λ/(2n)-△ L), wherein △ L ＜ λ/(2n), in formula, λ is optical maser wavelength；
And, if displacement △ L is contrary with the direction of displacement of testee 12, then, testee 12 is actual to be produced
Shift value L=N × λ/(2n)+△ L, wherein △ L ＜ λ/(2n), in formula, λ is optical maser wavelength.
So, by said structure, testee 12 actual displacement will exceed the portion of laser wavelength lambda/(2n)
Divide △ L also to measure and add in displacement detecting result, and then the laser interferometer of the application is surveyed
The displacement result measured is more accurate, and its precision is higher than half optical maser wavelength, is specifically dependent upon accurate displacement
The displacement accuracy that device 6 can be provided by.
Embodiment 2,
Such as Fig. 1, shown in 4, laser interferometer as described in Example 1, described accurate displacement device 6 includes
Support platform 8 and the driving means 9 being arranged in described support platform 8, described support platform 8 and described quilt
Surveying object 12 to match, described driving means 9 provides testee 12 for described measurement reflecting mirror 7
Moving the displacement on direction, described driving means 9 is Piezoelectric driving means.
In the present embodiment, the Piezoelectric driving means 9 of employing is can be by mutual to mechanical energy and electric energy
The ceramic material of conversion, its deformation quantity produced under electric field action is the least, chi the most own
The micro-displacement of very little 1/10000000th, has good repetitive distortion recovery capability, good stability, precision
Height, further increases the precision of accurate displacement device 6 in the present embodiment.
Embodiment 3,
Such as Fig. 1, shown in 4, laser interferometer as described in Example 2, described accurate displacement device 6 also wraps
Include the first displacement piece 13 being arranged in described support platform 8 and be arranged in described first displacement piece 13
Second displacement piece 14, described driving means 9 matches with described first displacement piece 13, for described first displacement
Part 13 provides the displacement along described support platform 8, described first displacement piece 13 to have one relative to its displacement
The inclined-plane 15 that direction tilts, described second displacement piece 14 is slidably arranged in the inclined-plane of described first displacement piece 13
On 15, make described second displacement piece 14 can slide along the inclined-plane 15 of described first displacement piece 13, described first
Snug fit between displacement piece 13 and the second displacement piece 14, described measurement reflecting mirror 7 is arranged on described second
In displacement piece 14, described support platform 8 being additionally provided with restraint device 10, described restraint device 10 limits
Described second displacement piece 14 moving along described first displacement piece 13 direction of displacement so that when the first displacement
When part 13 is driven by described driving means 9 and produces displacement, described second displacement piece 14 is by described first
Move part 13 to drive and produce displacement, and, the direction of displacement of described second displacement piece 14 and described first
The direction of displacement moving part 13 is perpendicular, the inclined-plane 15 of described first displacement piece 13 and the angle of its direction of displacement
For A degree, preferably 0 < A < 45.
In an embodiment, driving means 9 matches with the first displacement piece 13, provides for the first displacement piece 13
Along the displacement of support platform 8, the first displacement piece 13 has an inclined-plane 15 tilted relative to its direction of displacement,
Second displacement piece 14 is slidably arranged on the inclined-plane 15 of the first displacement piece 13, makes the second displacement piece 14 can edge
The inclined-plane 15 of the first displacement piece 13 slides, and when accurate displacement device 6 works, driving means 9 provides one
Fixed displacement promotes the first displacement piece 13, now, owing to restraint device 10 limits the second displacement piece 14 edge
Motion on first displacement piece 13 direction of displacement, makes direction of displacement and first displacement piece of the second displacement piece 14
The direction of displacement of 13 is perpendicular, and so, the displacement of the second displacement piece 14 and driving means 9 are the first displacement
The displacement that part 13 provides is correlated with, also with the angle phase on the inclined-plane 15 of the first displacement piece 13 with its direction of displacement
Close.
That is, if the inclined-plane of the first displacement piece 13 15 is A degree with the angle of its direction of displacement, when driving means 9
When the displacement provided is X, the second displacement piece 14 is being perpendicular in driving means 9 direction of motion position of generation
Shifting amount is Y=Xtan (A).Preferably, when included angle A is less than 45 degree, one will be obtained less than X value
Displacement, when further reducing included angle A, displacement Y reduces, so the most therewith so that at this
In embodiment, accurate displacement device 6, by the way of changing precision with stroke, directly enhances the present embodiment essence
The precision of mil moving device 6, the most further improves the certainty of measurement of the present embodiment laser interferometer.
Embodiment 4,
As shown in Figure 4, laser interferometer as described in Example 3, described first displacement piece 13 and described
Being additionally provided with the magnetic magnetic part 11 of tool between support platform 8, described second displacement piece 14 has magnetic, institute
Stating the second displacement piece 14 and described magnetic part 11 for there is a natural attraction between the sexes state, described second displacement piece 14 is with described
Measuring reflecting mirror 7 is integral type structure.Make the first displacement piece 13 when being promoted, measure reflecting mirror 7 energy
Enough holding, fits tightly with the second displacement piece 14, it is ensured that the precision of the application accurate displacement device 6, Jin Erbao
The certainty of measurement of card the application laser interferometer, the second displacement piece 14 is integral type structure with measurement reflecting mirror 7,
It is to say, directly arrange a reflecting surface in the second displacement piece 14 so that it is itself formed and measure reflecting mirror 7,
So, the structure of the present embodiment laser interferometer, convenient debugging and use are simplified.
Embodiment 5,
Such as Fig. 1, shown in 4, a kind of for above-mentioned wavelength amendment type multiple beam ladder planar reflector laser interference
The measuring method of instrument, it includes following step:
Step one: install wavelength amendment type multiple beam ladder planar reflector laser interference instrument；
Step 2: measurement reflector apparatus 4 is arranged on testee 12；
Step 3: debugging wavelength amendment type multiple beam ladder planar reflector laser interference instrument, makes formation meet the requirements
Light path, and make each optical interference circuit all in interference state；
Step 4: before starting to measure work, starts accurate displacement device 6, makes measurement reflecting mirror 7 produce displacement, institute
State the direction of displacement of direction of displacement and the testee 12 of measuring reflecting mirror 7 on the same line, when light electrical resistivity survey
When survey device group 5 has any one the strongest constructive interference to be detected, stop accurate displacement device 6, and by photoelectricity
Detector set 5 counting resets；
Step 5: start to measure work, testee 12 starts mobile, all smooth electrical resistivity surveys in photodetector group 5
Survey the total degree N of the strongest constructive interference of device record correspondence optical interference circuit；
Step 6: testee 12 displacement terminates, and remains static, and is again started up accurate displacement device 6, makes
Measure reflecting mirror 7 and produce displacement, the direction of displacement of described measurement reflecting mirror 7 and the displacement side of testee 12
To on the same line, when in photodetector group 5, any one photodetector detects the strongest phase again
During long interference, stop described accurate displacement device 6, make measurement reflecting mirror 7 stop；
Step 7: read the shift value △ L that accurate displacement device 6 provides for described measurement reflecting mirror 7；
Step 8: during record measurement, the strongest constructive interference total degree N and the measurement of photodetector group record are anti-
Penetrate mirror shift value △ L.
Step 9: be again started up accurate displacement device 6, traverse measurement reflecting mirror 7, makes photodetector group 5 record
The total degree M (M is positive integer) of the strongest constructive interference, and read M survey corresponding to the strongest constructive interference
Amount reflecting mirror 7 shift value Z.According to Z=M × λ '/(2n), draw under current measurement environment, the equivalence of laser
Wavelength X '=2nZ/M.
Step 10: calculate the shift value of testee 12.
If displacement △ L is identical with the direction of displacement of testee 12, then, the actual shift value produced of testee 12
L=N × λ '/(2n)+(λ '/(2n)-△ L), wherein △ L ＜ λ '/(2n), in formula, λ ' is laser effective wavelength；
If displacement △ L is contrary with the direction of displacement of testee 12, then, the actual shift value produced of testee 12
L=N × λ '/(2n)+△ L, wherein △ L ＜ λ '/(2n), in formula, λ ' is laser effective wavelength.
The measuring method of the application, owing to replenishing testee 12 by measuring reflecting mirror 7 shift value △ L
In shift value, directly enhance the certainty of measurement of testee 12 displacement.Meanwhile, environment is measured by detection
In effective wavelength λ ', i.e. the wavelength of laser is modified, so reduces the error that environmental factors is brought,
And then further improve the certainty of measurement of the application laser interferometer.
Embodiment 6,
Such as Fig. 1, shown in 4, measuring method as described in Example 5, in described step 4 to step 9, institute
State the strongest constructive interference and can also is that the most weak destructive interference.In this programme, during measuring, light
Electric explorer group 5 is to record the number of times of each the most weak destructive interference of laser interference light path, the most still can obtain
The shift value L of the testee 12 that one precision is higher.
Above example only in order to the present invention is described and and unrestricted technical scheme described in the invention, although
This specification with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention not office
It is limited to above-mentioned detailed description of the invention, the most any the present invention is modified or equivalent；And all do not take off
From technical scheme and the improvement thereof of the spirit and scope invented, it all should contain the claim model in the present invention
In the middle of enclosing.
Claims (6)
- null1. a wavelength amendment type multiple beam ladder planar reflector laser interference instrument，Including lasing light emitter (1)、Spectroscope (2)、Stationary mirror (3)、Measure reflector apparatus (4)、Photodetector group (5)，It is characterized in that，Described measurement reflector apparatus (4) includes measuring reflecting mirror (7) and accurate displacement device (6)，Described measurement reflecting mirror (7) is arranged on described accurate displacement device (6)，Described accurate displacement device (6) is arranged on testee，Described accurate displacement device (6) is that described measurement reflecting mirror (7) provides with testee displacement in the same direction or reverse displacement，Described lasing light emitter (1) includes n collimated laser beam，Wherein n >=2，Described photodetector group (5) includes n photoelectric detector，The reflecting surface of described stationary mirror (3) is n the plane of reflection becoming notch cuttype，The spacing of adjacent two planes of reflection is equal to λ/2n+k λ/2，Wherein k is natural number、λ is the optical maser wavelength that lasing light emitter (1) sends；The laser that each described lasing light emitter (1) sends is after described spectroscope (2) reflects, vertically injecting a corresponding plane of reflection, corresponding laser beam is reflexed to each photoelectric detector of the described photodetector group (5) of correspondence by each described plane of reflection；Every Shu Jiguang that described lasing light emitter (1) sends, after described spectroscope (2) transmission, is respectively perpendicular each photoelectric detector inciding described measurement reflecting mirror (4) back reflection to corresponding photodetector group (5).
- A kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument the most according to claim 1, it is characterized in that, described accurate displacement device includes support platform and the driving means being arranged in described support platform, described support platform matches with described testee, the displacement that described driving means provides on testee direction of displacement for described measurement reflecting mirror.
- A kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument the most according to claim 2, it is characterised in that described driving means is Piezoelectric driving means.
- null4. according to a kind of wavelength amendment type multiple beam ladder planar reflector laser interference instrument described in Claims 2 or 3，It is characterized in that，Also include the first displacement piece being arranged in described support platform and the second displacement piece being arranged in described first displacement piece，Described driving means matches with described first displacement piece，The displacement along described support platform is provided for described first displacement piece，Described first displacement piece has an inclined-plane tilted relative to its direction of displacement，Described second displacement piece is slidably arranged on the inclined-plane of described first displacement piece，Make described second displacement piece can slide along the inclined-plane of described first displacement piece，Snug fit between described first displacement piece and the second displacement piece，Described measurement reflecting mirror is arranged in described second displacement piece，It is additionally provided with restraint device in described support platform，Described restraint device limits described second displacement piece moving along described first displacement piece direction of displacement，Make when the first displacement piece is driven by described driving means and produces displacement，Described second displacement piece is driven by described first displacement piece and produces displacement，And，The direction of displacement of described second displacement piece is perpendicular with the direction of displacement of described first displacement piece，The inclined-plane of described first displacement piece and the angle of its direction of displacement are A degree，0<A<45.
- 5. wavelength amendment type multiple beam ladder planar reflector laser interference instrument as claimed in claim 4, it is characterized in that, the magnetic magnetic part of tool it is additionally provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes.
- 6. wavelength amendment type multiple beam ladder planar reflector laser interference instrument as claimed in claim 4, it is characterised in that described second displacement piece and described measurement reflecting mirror are integral type structure.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105300275A (en) * | 2015-11-27 | 2016-02-03 | 成都信息工程大学 | Wavelength correction type multi-beam and multistep plane reflecting mirror laser interferometer and measuring method thereof |
| CN108592827A (en) * | 2018-06-28 | 2018-09-28 | 北方民族大学 | Precision angle sensor and its measurement method |
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- 2015-11-27 CN CN201520966075.5U patent/CN205619875U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105300275A (en) * | 2015-11-27 | 2016-02-03 | 成都信息工程大学 | Wavelength correction type multi-beam and multistep plane reflecting mirror laser interferometer and measuring method thereof |
| CN105300275B (en) * | 2015-11-27 | 2018-02-06 | 成都信息工程大学 | A kind of measuring method using wavelength amendment type multiple beam ladder planar reflector laser interference instrument |
| CN108592827A (en) * | 2018-06-28 | 2018-09-28 | 北方民族大学 | Precision angle sensor and its measurement method |
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