CN105371753B - A kind of optical maser wavelength modification method using wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer - Google Patents
A kind of optical maser wavelength modification method using wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer Download PDFInfo
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- CN105371753B CN105371753B CN201510846645.1A CN201510846645A CN105371753B CN 105371753 B CN105371753 B CN 105371753B CN 201510846645 A CN201510846645 A CN 201510846645A CN 105371753 B CN105371753 B CN 105371753B
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Abstract
The invention discloses a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and wavelength modification method, including lasing light emitter, spectroscope, fixed step plane corner reflector, measurement angle reflector apparatus, photodetector group, wherein measurement angle reflector apparatus includes measurement corner reflector and accurate displacement device, lasing light emitter includes n, individual collimated laser beam, n >=2, photodetector group includes n photoelectric detector, the reflecting surface of fixed step plane corner reflector is n ladder plane, and two neighboring plane of reflection spacing is(k is natural number)；Beam of laser after spectroscope acts on injects one of plane of reflection back reflection to a photodetector, while is also incident to the photodetector after the measured corner reflector of another beam of laser of transmission, dichroic mirror in spectroscope.Laser interference phenomenon is not only relevant with optical maser wavelength caused by the laser interferometer, it is also relevant with stairstepping plane of reflection height difference, the photodetector group is able to detect that precision reaches the displacement of λ/2n ranks, environment effective wavelength is obtained using wavelength modification method simultaneously, significantly improves measurement accuracy.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of wavelength amendment type multiple beam angle rank
Terraced reflector laser interference instrument and wavelength modification method.
Background technology
The appearance of laser, developed rapidly ancient interference technique, laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：Accurate length, angle measurement such as linear scale,Grating、Gauge block、Precision lead screwDetection；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..In most of laser interference length-measuring systems, Michelson's interferometer or similar light path are all employed
Structure.
The light beam that single frequency laser interferometer is sent from laser, two-way is divided into by spectroscope after beam-expanding collimation, and respectively
From stationary mirror and movablySpeculumReflect congregation and produce interference fringe on spectroscope.When moving reflector moves
When, the light intensity of interference fringe changes by recipientPhotoelectricityConversion element and electronic circuit etc. are converted to electric impulse signal, warp
Input forward-backward counter calculates always after shaping, amplificationPulseNumber, then calculating formula L=N × λ/2 are pressed by electronic computer, λ in formula
For optical maser wavelength (N be electric pulse sum), the displacement L of moving reflector is calculated.During using single frequency laser interferometer, it is desirable to week
Enclose air and be in stable state, various air turbulences can all cause DC level to change and influence measurement result.
One of weakness of single frequency laser interferometer be exactly it is affected by environment serious, it is severe in test environment, measurement distance compared with
When long, this shortcoming is very prominent.Its reason is that it is a kind of DC measurement system, necessarily with the gentle level zero of direct current light
The drawbacks of drift.When laser interferometer moveable mirror moves, photelectric receiver meeting output signal, if signal has exceeded counter
Triggering level will then be recorded, and if laser beam intensity changes, it is possible to make photosignal less than meter
The main reason for counting the triggering level of device and make counter stop counting, making laser intensity or interference signal Strength Changes is empty
Gas turbulent flow, lathe mist of oil,Cutting swarfInfluence to light beam, as a result light beam shifts or corrugated distorts.
The problem of single frequency laser interferometer is due to measurement structure, its measurement accuracy are limited to the wavelength of laser, its precision one
As be only the integral multiple of its wavelength, it is difficult to lifted again, while the change of measuring environment has considerable influence to measurement result.
With requirement more and more higher of the industrial production to accurate measurement, higher requirement is proposed to the measurement accuracy of measuring instrument.
The content of the invention
It is an object of the invention to overcome existing laser interferometer measurement precision to be limited to optical maser wavelength, measurement accuracy is difficult to
The deficiency of lifting, there is provided a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and wavelength modification method, this swashs
Optical interferometer is on the basis of existing Michelson laser interferometer, using n light source n ladder plane corner reflectors, measurement accuracy
It can reachImprove the measurement accuracy of the laser interferometer.Laser effective wavelength under measuring environment can pass through the present invention
The wavelength modification method obtains, and further increases the measurement accuracy of the laser interferometer.Simultaneously because multi-pass interferes shape
State checker, the environmental change to optical path have higher antijamming capability.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer and wavelength modification method, including lasing light emitter,
Spectroscope, fixed step plane corner reflector, measurement angle reflector apparatus, photodetector group, the measurement corner reflector dress
Put and be arranged on including measurement corner reflector and accurate displacement device, the measurement corner reflector on the accurate displacement device, institute
State accurate displacement device to be arranged on testee, the accurate displacement device provides for the measurement corner reflector and measured object
Displacement body displacement in the same direction or reverse.The lasing light emitter includes n collimated laser beam, wherein n >=2, the photodetector group
Including n photoelectric detector；The fixed step plane corner reflector (3) includes two reflective steps faces at a right angle, often
The individual reflective steps face includes n and is equal into the step-like plane of reflection, the spacing of the two neighboring plane of reflectionWherein k is natural number, λ is optical maser wavelength that lasing light emitter is sent, and the measurement corner reflector includes at a right angle
Two planes of reflection；Every Shu Jiguang that the lasing light emitter is sent is injected corresponding one respectively after the dichroic mirror
The plane of reflection, each photodetection of each plane of reflection by every beam laser reflection to the corresponding photodetector group
Device；Every Shu Jiguang that the lasing light emitter is sent incides the measurement corner reflector respectively after spectroscope transmission
Each photoelectric detector of back reflection photodetector group corresponding to.
The quantity of the laser beam quantity of the laser interferometer, stairstepping plane of reflection quantity and photoelectric detector is n
(n >=2), and to correspond, i.e. each laser of lasing light emitter transmitting is divided into two-way, and beam of laser is arrived by dichroic mirror
After one of plane of the cascaded surface of fixed step plane corner reflector, one of light for reflexing in photodetector group
Electric explorer part, another beam laser straight is connected on transmit in spectroscope after incide measurement corner reflector after be re-reflected into same light
Electric explorer part, the photoelectric detector can detect this two-way optical path difference is during measurement corner reflector is subjected to displacement
The most strong interference state of no generation or most weak interference state.Due to being stepped reflective surface on fixed step plane corner reflector, institute
The light path of light path after the cascaded surface reflection for passing through fixed step plane corner reflector with each Shu Jiguang of lasing light emitter transmitting is not
Identical, at the same each laser of lasing light emitter transmitting be divided into reach after two-way corresponding to retardation values after photoelectric detector it is equal
Differ, can interfere that phenomenon is not only relevant with the wavelength of laser, also have with the level difference of the ladder plane of reflection
Relation, the two neighboring level difference of the cascaded surface (i.e. the stairstepping plane of reflection) are equal toDue to incidence
Angle is 45 degree, and equivalent optical path isThat is the height difference in adjacent steps face can be the same or different, due to every beam
Laser is after the reflection of each plane of reflection, light path difference, no matter the height difference of the two neighboring plane of reflection how much, its light
Path difference is λ/n+k λ.
Because k λ can't influence the interference state of the beam laser, only difference λ/n just meetings in above-mentioned optical path difference formula
The interference state of the beam laser is had an impact, therefore, as long as measurement corner reflector moves λ/2n distance or integer
Times λ/2n distance, at least one of which of the photoelectric detector in the photodetector group are capable of detecting when that its laser is done
The change of state generation is related to, therefore the accuracy of detection of the laser interferometer is then changed into λ/2n, relative to existing laser interferometer only
Energy accuracy of detection is for laser wavelength lambda, the measurement accuracy is significantly improved, and the measurement accuracy is i.e. by fixed step plane
The spacing (alternatively referred to as height or thickness) of each two ladder plane of the cascaded surface of corner reflector and the laser wave of lasing light emitter
It is long to determine.
Due to using multi-pass interferometry, in measurement process, the DC level that each photodetector detects should be handed over
For change, if the DC level that the change of the measuring environment of a certain light path causes photodetector to measure shifts, and its
The DC level that the photodetector of its optical path detects do not occur alternately change, now think the optical path be by
To the influence of measuring environment, ignore its level change.If the change of the measuring environment of a plurality of light path causes multiple photodetections
The DC level of device measurement shifts, then it is assumed that measuring environment changes, and ignores its level change.Only for measuring
Strictly meet that the situation that multi-pass interference state alternately changes just counts to it in journey, i.e., introduced in multi-pass interferometry
AC signal, by the measurement that the measures conversion of DC level in traditional laser interferometry is AC signal.
It should be noted that two neighboring level difference is equal toReally determine whether laser is in
The simply difference of most strong interference state or most weak interference stateIncreased difference k λ/2 are adjacent in order to increase cascaded surface
The height difference of two reflectings surface, larger parameter is for the ease of process and assemble.
Preferably, the fixed step plane corner reflector includes corner reflector body and n-1 reflection sheet combination
Form, the thickness of each reflection sheet isWherein k is natural number.
The cascaded surface is superimposed upon on corner reflector body by 2 × (n-1) individual reflection sheets and formed, this body surface of corner reflector
Face is laser interferometer normal mirror, wherein the thickness of each reflection sheet isK is natural number, i.e., every
The thickness of individual reflection sheet can be the same or different, but two cascaded surfaces should be symmetrical.
Preferably, each reflection sheet thickness is
Preferably, the corner reflector body and reflection sheet are formed in one body, avoid the reflection sheet of piecemeal from connecting
The height error for two ladder planes that caused two neighboring reflection sheet is formed together.
Preferably, the n lasing light emitters are equally spaced, and the spacing of the two neighboring laser beam is equal to optical maser wavelength
Integral multiple.
Preferably, the spacing between the laser beam that the two neighboring lasing light emitter is sent is 100-10000 times of laser
Wavelength.
In the such scheme of the application, due to measurement corner reflector is arranged on accurate displacement device, and accurate displacement
Device is arranged on testee, and when testee is subjected to displacement, testee drives accurate displacement device, and then drives and survey
Angulation speculum, in this way, when testee is subjected to displacement, in displacement process, due to the change of optical interference circuit light path, make
, the laser interference state of corresponding light beam also changes therewith, starts before measuring work, starts accurate displacement device, make measurement angle
Speculum produce displacement, it is described measurement corner reflector direction of displacement and testee direction of displacement on the same line, when
When any one photodetector detects most strong constructive interference in photodetector group, stop accurate displacement device, and by light
All photodetectors, which count, in electric explorer group resets, and then starts to measure the displacement of testee again, in corresponding laser beam
Interference state change procedure in, all photodetectors registers correspond to the most strong constructive interference of optical interference circuit in photodetector group
Total degree N, when testee mobile end, when remaining static, photodetector group stops counting；Now, essence is passed through
Mil moving device makes measurement corner reflector be moved on the direction of displacement of testee, and observes photodetector group, works as photoelectricity
When any one photodetector detects most strong constructive interference in detector group, stop accurate displacement device, and read precision
The shift value △ L that gearshift provides for measurement corner reflector.
If displacement △ L are identical with the direction of displacement of testee, shift value L=N × λ caused by testee reality/
(2n)+(λ/(2n)-△ L), wherein △ L ＜ λ/(2n), λ is optical maser wavelength in formula；
If the direction of displacement of displacement △ L and testee on the contrary, if shift value L=N × λ caused by testee reality/
(2n)+△ L, wherein △ L ＜ λ/(2n), λ is optical maser wavelength in formula.
In this way, by said structure, will also be surveyed beyond the individual optical maser wavelength part △ L of 1/ (2n) in testee actual displacement
Measure to add in displacement detecting result, and then cause the displacement result obtained measured by the laser interferometer of the application more
Accurately, its accuracy is higher than the individual optical maser wavelength integral multiples of 1/ (2n), is specifically dependent upon the displacement that accurate displacement device can be provided
Precision.
As the preferred scheme of the application, the accurate displacement device includes support platform and is arranged on the support platform
On drive device, the support platform is engaged with the testee, and the drive device is the measurement corner reflector
Displacement on testee direction of displacement is provided.
As the preferred scheme of the application, the drive device is Piezoelectric drive device.
In this programme, the function ceramics that mechanical energy and electric energy can be changed mutually using Piezoelectric drive device
Material, the micro-displacement of its caused deformation quantity very little under electric field action, no more than thousand a ten thousandths of size itself,
With good repetitive distortion recovery capability, stability is good, precision is high, further increases the essence of the application accurate displacement device
True property and reliability.
As the preferred scheme of the application, the accurate displacement device also includes first be arranged in the support platform
Displacement piece and the second displacement part being arranged in first displacement piece, the drive device match with first displacement piece
Close, provide the displacement along the support platform for first displacement piece, first displacement piece has one relative to its displacement
The inclined inclined-plane in direction, the second displacement part are slidably arranged on the inclined-plane of first displacement piece, make the second displacement
Part can slide along the inclined-plane of first displacement piece, snug fit between first displacement piece and second displacement part, the survey
Angulation speculum is arranged on the second displacement part, and restraint device, the restraint device are additionally provided with the support platform
The second displacement part is limited along the motion on the first displacement piece direction of displacement so that when the first displacement piece is by the driving
Device is driven when producing displacement, and the second displacement part is driven by first displacement piece and produces displacement, also, described the
The direction of displacement of two displacement pieces and the direction of displacement of first displacement piece are perpendicular, inclined-plane and its position of first displacement piece
The angle for moving direction is A degree, 0<A<45.
In the such scheme of the application, drive device is engaged with the first displacement piece, is provided for the first displacement piece along branch
The displacement of platform is supportted, the first displacement piece has one to be slidably arranged in relative to the inclined inclined-plane of its direction of displacement, second displacement part
On the inclined-plane of first displacement piece, second displacement part is set to be slided along the inclined-plane of the first displacement piece, when accurate displacement device works,
Drive device provides certain displacement and promotes the first displacement piece, now, because restraint device limits second displacement part along first
Motion on displacement piece direction of displacement, make the direction of displacement of second displacement part and the direction of displacement of the first displacement piece perpendicular, such as
This, the displacement of second displacement part and drive device are that the displacement that the first displacement piece provides is related, also with the first displacement piece
Inclined-plane is related to the angle of its direction of displacement.
That is, if the inclined-plane of the first displacement piece and the angle of its direction of displacement are A degree, when the displacement that drive device provides is
During X, second displacement part in the drive device direction of motion caused displacement be Y=Xtan (A), in this way, when folder
When angle A is less than 45 degree, a displacement for being less than X values will be obtained, when further reducing included angle A, displacement Y also subtracts therewith
It is small, so so that in the scheme of the application, accurate displacement device directly enhances this in a manner of changing precision by stroke
Apply for the precision of accurate displacement device, also just further improve the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, it is additionally provided between first displacement piece and the support platform with magnetic
Magnetic part, the second displacement part has magnetic, and the second displacement part and the magnetic part are there is a natural attraction between the sexes state.So that
First displacement piece can keep being brought into close contact with second displacement part when being promoted, and ensure the essence of the application accurate displacement device
Degree, and then ensure the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, flexible member is additionally provided with the second displacement part.So that the first displacement piece
It when being promoted, can keep being in contact condition with second displacement part, ensure the precision of the application accurate displacement device, and then
Ensure the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, the second displacement part is integral type structure with the measurement corner reflector.
In such scheme, second displacement part is integral type structure with measurement corner reflector, that is to say, that directly second
One corner reflection face is set in displacement piece, makes itself to form measurement corner reflector, in this way, simplifying the application laser interferometer
Structure, convenient debugging and use.
Although at present, there is also the device of measurement air refraction, to the atmospheric temperature, humidity and air pressure of single locus
Measure, optical maser wavelength is modified by wavelength compensation formula, but it is merely able to detect local air, and
In the displacement measurement field of the application, because its displacement is carried out in a region, the air of each position in the region
All be present situations such as variant, to be especially in the presence of larger thermograde, moist gradient and barometric gradient in each parameter, joined with single-point
There will be larger error for number amendment optical maser wavelength.
So for these reasons, in this application, inventor provide a kind of optical maser wavelength amendment of laser interferometer
Method, detect under current measuring environment, the environment effective wavelength λ ' of laser, and the λ ' values are the equivalent ripple of current measuring environment
It is long, so the problem of directly avoiding different zones air refraction difference and bringing, in this way, reducing the mistake that environmental factor is brought
Difference, and then the further measurement accuracy for improving the application laser interferometer and its measuring method.
Disclosed herein as well is a kind of optical maser wavelength modification method using above-mentioned laser interferometer, comprise the steps：
Step A：In needing to carry out the environment of displacement measurement using laser interferometer, wavelength amendment type multiple beam angle is installed
Ladder reflecting mirror laser interferometer；
Step B：Measurement angle reflector apparatus is arranged on testee；
Step C：Wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer is debugged, forms it into satisfactory light
Road, and make each optical interference circuit all in interference state；
Step D:Start accurate displacement device, move measurement corner reflector, when having any one in photodetector group
When detecting most strong constructive interference, stop accurate displacement device, and photodetector group is counted and reset；Step E：It is again started up
Accurate displacement device, traverse measurement corner reflector, make the most strong constructive interference of all photodetectors registers in photodetector group
Total degree be M (M is positive integer), and read measurement angle mirror displacements value Z corresponding to most strong M times constructive interference；
Step F：According to Z=(M × λ ')/(2n), n is photodetector number, is drawn under current measuring environment, laser
Effective wavelength λ '=2nZ/M.
As the preferred scheme of the application, in the step D and E, the most strong constructive interference can also be most weak cancellation
Interference.In this programme, in optical maser wavelength makeover process, photodetector is to record most weak cancellation in each laser interference light path
The total degree of interference, the amendment for the optical maser wavelength that so can still realize.
In such scheme, by detecting the effective wavelength λ ' in measuring environment, i.e., the wavelength of laser is modified, such as
This reduces the error that environmental factor is brought, and then the further measurement for improving the application laser interferometer and its measuring method
Precision.
Compared with prior art, beneficial effects of the present invention：
(1) the wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer lasing light emitter transmitting laser beam quantity,
Stairstepping plane of reflection quantity and the quantity of photoelectric detector are n (n >=2), and are corresponded, due to lasing light emitter transmitting
The light path of light path on the cascaded surface that each Shu Jiguang passes through fixed step plane corner reflector after Different Plane reflection is different, simultaneously
Each laser of lasing light emitter transmitting be divided into reach after two-way corresponding to retardation values after photoelectric detector differ, it is each
Photoelectric detector can detect whether corresponding two beam laser can interfere phenomenon, and the generation of the interference is not only
It is relevant with the wavelength of laser, go back and the level difference of cascaded surface has relation, because the two neighboring plane of the cascaded surface is high
Degree difference is equal toBecause incidence angle is 45 degree, equivalent optical path isTherefore, as long as measurement corner reflection
Mirror moves λ/2n distance or integer times λ/2n distance, and the photoelectric detector in the photodetector group can only it
In one be capable of detecting when that it is in the most strong interference state of laser, therefore the accuracy of detection of the laser interferometer is λ/2n；Relative to
Existing laser interferometer can only accuracy of detection be laser wavelength lambda for, its measurement accuracy has obtained significant raising.While by
In use multi-pass interferometry, measurement process, the DC level that each photodetector detects should alternately change, if
The DC level that the change of the measuring environment of a certain light path causes photodetector to measure shifts, and other optical paths
The DC level that photodetector detects does not occur alternately to change, and it is by measuring environment now to think the optical path
Influence, ignore its level change.If the change of the measuring environment of a plurality of light path causes the direct current of multiple photodetector measurements
Level shifts, then it is assumed that measuring environment changes, and ignores its level change.Strictly meet only in measurement process
The situation that multi-pass interference state alternately changes just counts to it, i.e., introduces AC signal in multi-pass interferometry, will
The measures conversion of DC level is the measurement of AC signal in traditional laser interferometry, improves the anti-interference energy of interferometer
Power.
(2) by detecting the effective wavelength λ ' of laser in measuring environment, optical maser wavelength is modified, in this way, reducing ring
The error that border factor is brought, and then the further measurement accuracy for improving the application laser interferometer.
Brief description of the drawings：
Fig. 1 is laser light when multi-wavelength amendment type multiple beam angle of the present invention ladder reflecting mirror laser interferometer uses
Road schematic diagram；
Fig. 2 is the structural representation of lasing light emitter in Fig. 1；
Fig. 3 is the structural representation of the stairstepping plane of reflection of fixed step plane corner reflector in Fig. 1；
Fig. 4 is measurement corner reflector and second displacement part integral structure figure.
Marked in figure：
1st, lasing light emitter, 11, laser beam one, 12, laser beam two, 13, laser beam three, 14, laser beam four, 2, spectroscope, 3,
Fixed step plane corner reflector, 31, speculum body, 32, reflection sheet, 4, measurement angle reflector apparatus, 5, photodetection
Device group, 51, photoelectric detector one, 52, photoelectric detector two, 53, photoelectric detector three, 54, photoelectric detector four,
6th, accurate displacement device, 7, measurement corner reflector, 8, support platform, 9, drive device, 10, restraint device, 11, magnetic part, 12,
Testee, the 13, first displacement piece, 14, second displacement part, 15, inclined-plane, 16, elastic original paper.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of the above-mentioned theme of the present invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
As shown in figure 1, a kind of wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, including lasing light emitter 1, light splitting
Mirror 2, fixed step plane corner reflector 3, measurement angle reflector apparatus 4, photodetector group 5, the measurement angle speculum group 4
Including measurement corner reflector 7 and accurate displacement device 6, measurement corner reflector 7 includes two planes of reflection at a right angle, the survey
Angulation speculum 7 is arranged on the accurate displacement device 6, and the accurate displacement device 6 is arranged on testee 12, described
Accurate displacement device 6 provides and the displacement of testee 12 displacement in the same direction or reverse for the measurement corner reflector 7；
The lasing light emitter 1 includes n collimated laser beam, n >=2, and photodetector group 5 also includes n photoelectric detector,
The reflecting surface of fixed step plane corner reflector 3 is the symmetrical n stairstepping plane of reflection, the spacing h of the two neighboring plane of reflection
It is equal toWherein k is random natural number, λ is optical maser wavelength that lasing light emitter 1 is sent；Lasing light emitter 1 is sent each
Laser beam injects a corresponding ladder reflecting surface respectively after the reflection of spectroscope 2, and each ladder reflecting surface will be anti-per Shu Jiguang
It is mapped to corresponding photoelectric detector；Each laser beam that lasing light emitter 1 is sent incides survey respectively after the transmission of spectroscope 2
Corresponding photoelectric detector is re-reflected into after angulation speculum 7.It should be noted that the λ in text swashs for what lasing light emitter 1 was sent
Optical wavelength, every beam optical maser wavelength that lasing light emitter 1 is sent is.
Laser beam quantity, cascaded surface plane quantity and the photodetector group 5 that the lasing light emitter 1 of the laser interferometer is sent
Photoelectric detector quantity is n (n >=2), and to correspond, i.e., every Shu Jiguang that lasing light emitter 1 is launched is divided into two-way, and one
After Shu Jiguang reflexes to one of plane of the cascaded surface of fixed step plane corner reflector 3 by spectroscope 2, it is reflected back point
Light microscopic 2 is again incident on one of photoelectric detector in photodetector group 5, and another beam laser straight is connected in spectroscope 2
Spectroscope 2 is re-reflected into after measurement corner reflector 7 is incided after transmission, spectroscope 2 reflects it to same photodetection again
Device, the photoelectric detector can detect whether this two-way optical path difference produces during measurement corner reflector 7 is subjected to displacement
Raw most strong interference state or most weak interference state.Due to the cascaded surface on fixed step plane corner reflector 3, so lasing light emitter 1
The light path of light path after the cascaded surface reflection that each Shu Jiguang of transmitting passes through fixed step plane corner reflector 3 differs,
Each laser that lasing light emitter 1 is launched simultaneously be divided into reach after two-way corresponding to retardation values after photodetector group 5 not phase
Together, it can interfere that phenomenon is not only relevant with the wavelength of laser, also and the level difference of cascaded surface has relation, due to this
The two neighboring level difference h of cascaded surface is equal toBecause incidence angle is 45 degree, equivalent optical path isTherefore, as long as measurement corner reflector 7 moves λ/2n distance or integer times λ/2n distance, the photoelectricity
Photodetector group 5 on detector has one of them to be capable of detecting when that it is in the most strong interference state of laser, therefore the laser
The accuracy of detection of interferometer is then changed into λ/2n, relative to existing laser interferometer can only accuracy of detection be laser wavelength lambda for,
The measurement accuracy is significantly improved, and the measurement accuracy is by adjacent the two of the cascaded surface of fixed step plane corner reflector 3
The spacing (alternatively referred to as height or thickness) of individual ladder plane and the optical maser wavelength of lasing light emitter 1 determine.
It is anti-that the fixed step plane corner reflector 3 includes the individual thickness h identicals of corner reflector body 31 and 2 × (n-1)
Penetrate thin slice 32 to combine, the thickness h of each reflection sheet 32 isFixed step plane corner reflector 3 it is every
Individual cascaded surface is superimposed upon on corner reflector body 31 by n-1 thickness h identical reflection sheet 32 and formed, corner reflector body
31 be the laser interferometer normal mirror that surface is plane, wherein the thickness h of each reflection sheet 32 isTogether
When, the individual thickness h identical reflection sheets 32 of corner reflector body 31 and 2 × (n-1) can be formed in one body, avoid point
The reflection sheet 32 of block link together caused by the height error of two ladder planes that is formed of two neighboring reflection sheet 32.
As shown in Fig. 2 the n laser beam that all lasing light emitters 1 are sent is equally spaced, now, n=4, k=0 is selected, swashed
The laser beam that light source 1 is sent is respectively laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14, and two neighboring
The spacing e of laser beam is equal to the integral multiple of optical maser wavelength.Spacing e between two neighboring laser beam is preferably 100-10000 times
Optical maser wavelength.Preferably, if selecting two neighboring laser beam spacing e as 1000 times of optical maser wavelength, preferably 663 nanometers
Optical maser wavelength, then the spacing e for the adjacent laser beams that adjacent laser source 1 is sent be 6.63 millimeters.Corresponding photodetector
The photoelectric detector that group 5 receives laser is also respectively four, i.e. photoelectric detector 1, photoelectric detector 2 52, light
Electric explorer part 3 53, photoelectric detector 4 54.
Now, the stairstepping plane of reflection on fixed step plane corner reflector 3 also accordingly elects four as, as shown in figure 3,
From four planes of reflection into stairstepping plane in order to processing and reduce cost.The light path route is what laser beam 1 was sent
Laser is divided into two-way in spectroscope 2, incides fixed step plane corner reflector 3 after the mirror 2 that is split all the way reflection, is reflected to
Transmitted again after spectroscope 2 and incide photoelectric detector 1, the another way of the laser then directly enters after the transmission of spectroscope 2
Measurement corner reflector 7 is mapped to, after being reflected to spectroscope 2, spectroscope 2 is again by the laser reflection to photoelectric detector one
51.By that analogy, other laser beams 2 12, laser beam 3 13, laser beam 4 14 respectively by the plane of reflection reflect and respectively by
Photoelectric detector 2 52, photoelectric detector 3 53, photoelectric detector 4 54 receive.According to calculating, as a result of four
The individual stairstepping plane of reflection, the difference in height of the two neighboring plane of reflection areBecause incidence angle is 45 degree, equivalent optical path isTherefore the laser sent by laser beam 1, laser beam 2 12, laser beam 3 13, laser beam 4 14 passes through Fixed-order
Retardation values after terraced plane corner reflector 3 reflects are respectively a1λ、a2λ-λ/4、a3λ-λ/2、a4λ -3 λ/4, wherein a1、a2、a3、
a4For natural number.
When laser beam 1 is in most strong interference state, i.e., the laser that laser beam 1 is sent is divided into the light after two-way
Path difference value is a1λ, laser can be measured by photoelectric detector 1 and be in most strong interference state, now laser beam 2 12
To optical interference circuit, laser beam 3 13 to optical interference circuit and laser beam 4 14 to the two-way retardation values point of optical interference circuit
It is not：a2λ-λ/4、a3λ-λ/2、a4λ -3 λ/4, three's light path are now in non-most strong interference state.
When measurement corner reflector 7 moves λ/8, when making two beam laser retardation values increase λ that lasing light emitter 1 is divided into/4, its
The laser optical path difference of his lasing light emitter also accordingly increases λ/4, and now, the laser that laser beam 1 is sent is divided into the retardation values of two-way
For a1λ+λ/4, in non-most strong interference state, and the retardation values that the laser that laser beam 2 12 is sent is divided into two-way are then changed into a2
λ, therefore photoelectric detector 2 52 is able to detect that optical interference circuit is in most strong interference state, laser beam 3 13 and laser beam four
14 laser is also at non-most strong interference state.When measuring corner reflector 7 and moving λ/4, the institute of laser beam 3 13 is to optical interference circuit
Most strong interference state will be in, the most strong interference state of laser can be measured by photoelectric detector 3 53.
It is similar, when measuring corner reflector 7 and moving 3 λ/8, increase the two beam laser retardation values that laser beam 1 is divided into
When adding 3 λ/4, the laser optical path difference of other laser beams also accordingly increases by 3 λ/4, and the laser that now laser beam 4 14 is sent is divided into two
The retardation values on road are then changed into a4λ, the two-way light path that its laser is divided into will be in most strong interference state, and pass through photoelectric detector
4 54 can measure the most strong interference state of laser.
Again, when measuring corner reflector 7 and moving λ/2, the two beam laser retardation values increase λ that is divided into laser beam 1
When, the laser optical path difference of other laser beams also accordingly increases λ, and the institute of laser beam 1 will be in most capable and experienced to optical interference circuit and relate to shape again
State, the most strong interference state of laser can be measured by photoelectric detector 1.Therefore, reflected for four-step planar laser
The measurement accuracy corresponding to laser interferometer corresponding to structure is just λ/8, that is, measure corner reflector 7 displacement be equal to or more than λ/
8, corresponding photodetector group 5 is that the interference state for the light path that can observe the four beam laser that lasing light emitter 1 is launched substantially becomes
Change.
Therefore, the ladder plane of reflection quantity for increasing fixed step plane corner reflector 3 can improve measurement accuracy, when adopting
With the laser mirror structure of the 8 ladder planes of reflection, the measurement accuracy corresponding to corresponding laser interferometer is then λ/16, when
Using the n ladder planes of reflection fixed step plane 3 structure of corner reflector when, the measurement accuracy of the laser interferometer just mutually strains
For λ/2n.
Due to using multi-pass interferometry, in measurement process, the DC level that each photodetector detects should be handed over
For change, if the DC level that the change of the measuring environment of a certain light path causes photodetector to measure shifts, and its
The DC level that the photodetector of its optical path detects do not occur alternately change, now think the optical path be by
To the influence of measuring environment, ignore its level change.If the change of the measuring environment of a plurality of light path causes multiple photodetections
The DC level of device measurement shifts, then it is assumed that measuring environment changes, and ignores its level change.Only for measuring
Strictly meet that the situation that multi-pass interference state alternately changes just counts to it in journey, i.e., introduced in multi-pass interferometry
AC signal, by the measurement that the measures conversion of DC level in traditional laser interferometry is AC signal, improve interference
The antijamming capability of instrument.
In the present embodiment, due to measurement corner reflector 7 is arranged on accurate displacement device 6, and accurate displacement device 6 is set
Put on testee 12, when testee 12 is subjected to displacement, testee 12 drives accurate displacement device 6, and then drives
Corner reflector 7 is measured, in this way, when testee 12 is subjected to displacement, in displacement process, laser interferometer pair of the present invention
The interference state for each laser interference light path answered also changes therewith, starts before measuring work, starts accurate displacement device 6, make survey
Angulation speculum 7 produces displacement, and the direction of displacement of the measurement corner reflector 7 is with the direction of displacement of testee 12 with always
On line, when any one photodetector detects most strong constructive interference in photodetector group 5, stop accurate displacement device
6, and all photodetectors in photodetector group 5 are counted and reset, then start to measure the displacement of testee 12 again, it is right
In the interference state change procedure for each laser interference light path answered, 5 each photodetectors register of photodetector group is most strong mutually long
The total degree N of interference, when the mobile end of testee 12, when remaining static, photodetector group 5 stops counting；Now,
Measurement corner reflector 7 is moved on the direction of displacement of testee 12 by accurate displacement device 6, and observe photodetector
Group 5, when any one photodetector detects most strong constructive interference in photodetector group 5, stop accurate displacement device
6, and read the shift value △ L that accurate displacement device 6 provides for measurement corner reflector 7.
If displacement △ L are identical with the direction of displacement of testee 12, shift value L=N caused by the reality of testee 12
× λ/(2n)+(λ/(2n)-△ L), wherein △ L ＜ λ/(2n), λ is optical maser wavelength in formula；
And if displacement △ L and testee 12 direction of displacement on the contrary, if, shift value L caused by the reality of testee 12
=N × λ/(2n)+△ L, wherein △ L ＜ λ/(2n), λ is optical maser wavelength in formula.
In this way, by said structure, laser wavelength lambda/(2n) part △ L will be exceeded in the actual displacement of testee 12
Measure and add in displacement detecting result, and then cause the displacement result obtained measured by the laser interferometer of the application
More accurate, its precision is higher than half of optical maser wavelength, is specifically dependent upon the displacement accuracy that accurate displacement device 6 can be provided.
Embodiment 2
As Figure 1-4, laser interferometer as described in Example 1, the accurate displacement device 6 include support platform 8
With the drive device 9 being arranged in the support platform 8, the support platform 8 is engaged with the testee 12, the drive
Dynamic device 9 provides the displacement on the direction of displacement of testee 12 for the measurement corner reflector 7, and the drive device 9 is pressure
Electroceramics type drive device.
In the present embodiment, the Piezoelectric drive device 9 used can change mechanical energy and electric energy mutually
Ceramic material, its caused deformation quantity very little under electric field action, it is no more than thousand a ten thousandths of size itself
Micro-displacement, there is good repetitive distortion recovery capability, stability is good, precision is high, further increases smart in the present embodiment
The precision of mil moving device 6.
Embodiment 3
As Figure 1-4, laser interferometer as described in Example 2, the accurate displacement device 6 also include being arranged on institute
State the first displacement piece 13 and the second displacement part 14 being arranged in first displacement piece 13 in support platform 8, the driving
Device 9 is engaged with first displacement piece 13, and the displacement along the support platform 8, institute are provided for first displacement piece 13
State the first displacement piece 13 and be slidably arranged in institute relative to the inclined inclined-plane 15 of its direction of displacement, the second displacement part 14 with one
On the inclined-plane 15 for stating the first displacement piece 13, the second displacement part 14 is set to be slided along the inclined-plane 15 of first displacement piece 13,
Snug fit between first displacement piece 13 and second displacement part 14, the measurement corner reflector 7 are arranged on the second
Move on part 14, restraint device 10 is additionally provided with the support platform 8, the restraint device 10 limits the second displacement part 14
Motion along on the direction of displacement of the first displacement piece 13 so that when the first displacement piece 13 is driven by the drive device 9 and produce
During raw displacement, the second displacement part 14 is driven by first displacement piece 13 and produces displacement, also, the second displacement part
14 direction of displacement and the direction of displacement of first displacement piece 13 are perpendicular, inclined-plane 15 and its position of first displacement piece 13
The angle for moving direction is A degree, preferably 0<A<45.
In embodiment, drive device 9 is engaged with the first displacement piece 13, is provided for the first displacement piece 13 along support platform
8 displacement, the first displacement piece 13 have one to be slidably arranged in relative to the inclined inclined-plane 15 of its direction of displacement, second displacement part 14
On the inclined-plane 15 of first displacement piece 13, second displacement part 14 is set to be slided along the inclined-plane 15 of the first displacement piece 13, in accurate displacement
When device 6 works, drive device 9 provides certain displacement and promotes the first displacement piece 13, now, because restraint device 10 limits
Second displacement part 14 makes direction of displacement and the first displacement of second displacement part 14 along the motion on the direction of displacement of the first displacement piece 13
The direction of displacement of part 13 is perpendicular, in this way, the displacement of second displacement part 14 is what the first displacement piece 13 provided with drive device 9
Displacement is related, also related with the angle of its direction of displacement to the inclined-plane 15 of the first displacement piece 13.
That is, if the inclined-plane 15 of the first displacement piece 13 and the angle of its direction of displacement are A degree, when the position that drive device 9 provides
When shifting amount is X, second displacement part 14 in the direction of motion of drive device 9 caused displacement be Y=Xtan (A).
Preferably, when included angle A is less than 45 degree, a displacement for being less than X values will be obtained, when further reducing included angle A, position
Shifting amount Y also reduces therewith, so so that in the present embodiment, accurate displacement device 6 by stroke in a manner of changing precision, directly
The precision for improving the present embodiment accurate displacement device 6 is connect, also just further improves the survey of the present embodiment laser interferometer
Accuracy of measurement.
Embodiment 4
As shown in figure 4, laser interferometer as described in Example 3, first displacement piece 13 and the support platform 8 it
Between be additionally provided with the magnetic magnetic part 11 of tool, the second displacement part 14 has magnetic, the second displacement part 14 with it is described
Magnetic part 11 is there is a natural attraction between the sexes state, and the second displacement part 14 is integral type structure with the measurement corner reflector 7.So that the
When being promoted, measurement corner reflector 7 can keep being brought into close contact with second displacement part 14 one displacement piece 13, ensure the application essence
The precision of mil moving device 6, and then ensure the measurement accuracy of the application laser interferometer, second displacement part 14 and measurement corner reflection
Mirror 7 is integral type structure, that is to say, that a corner reflection face is directly set on second displacement part 14, makes itself to form measurement
Corner reflector 7, in this way, the structure of the present embodiment laser interferometer is simplified, convenient debugging and use.
Embodiment 5
Laser interferometer as described in Example 3, the second displacement part 14 are additionally provided with flexible element 16 so that
First displacement piece 13 can keep being in contact condition with second displacement part 14, ensure the application accurate displacement when being promoted
The precision of device, and then ensure the measurement accuracy of the application laser interferometer.
Embodiment 6
As Figure 1-4, a kind of optical maser wavelength modification method using embodiment 1-5 any one laser interferometer, bag
Include following step：
Step A：In needing to carry out the environment of displacement measurement using laser interferometer, wavelength amendment type multiple beam angle is installed
Ladder reflecting mirror laser interferometer；
Step B：Measurement angle reflector apparatus 4 is arranged on testee 12；
Step C：Wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer is debugged, forms it into satisfactory light
Road, and make each optical interference circuit all in interference state；
Step D:Start accurate displacement device 6, move measurement corner reflector 7, it is any one when having in photodetector group 5
It is individual when detecting most strong constructive interference, stop accurate displacement device, and photodetector group is counted and reset；
Step E：Accurate displacement device is again started up, traverse measurement corner reflector, makes all photoelectricity in photodetector group
The total degree that detector records most strong constructive interference is M (M is positive integer), and reads and measured corresponding to most strong M times constructive interference
Corner reflector shift value Z；
Step F：According to Z=(M × λ ')/(2n), n is photodetector number, is drawn under current measuring environment, laser
Effective wavelength λ '=2nZ/M.
Although at present, there is also the device of measurement air refraction, to the atmospheric temperature, humidity and air pressure of single locus
Measure, optical maser wavelength is modified by wavelength compensation formula, but it is merely able to detect local air, and
In the displacement measurement field of the application, because its displacement is carried out in a region, the air of each position in the region
All be present situations such as variant, to be especially in the presence of larger thermograde, moist gradient and barometric gradient in each parameter, joined with single-point
There will be larger error for number amendment optical maser wavelength.
So for these reasons, in this application, inventor provide a kind of optical maser wavelength amendment of laser interferometer
Method, detect under current measuring environment, the environment effective wavelength λ ' of laser, and the λ ' values are the equivalent ripple of current measuring environment
It is long, so the problem of directly avoiding different zones air refraction difference and bringing, in this way, reducing the mistake that environmental factor is brought
Difference, and then the further measurement accuracy for improving the application laser interferometer and its measuring method.
Embodiment 7
As Figure 1-4, optical maser wavelength modification method as described in Example 6, the step D into step E, it is described most
Strong constructive interference can also be most weak destructive interference.
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to above-mentioned each embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (2)
1. a kind of optical maser wavelength modification method using wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, its feature
It is, comprises the steps：
Step A：In needing to carry out the environment of displacement measurement using laser interferometer, installation wavelength amendment type multiple beam angle ladder
Reflector laser interference instrument；
Step B：Measurement angle reflector apparatus is arranged on testee；
Step C：Wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer is debugged, forms it into satisfactory light path,
And make each optical interference circuit all in interference state；
Step D:Start accurate displacement device, move measurement corner reflector, when there is any one detection in photodetector group
To during most strong constructive interference, stop accurate displacement device, and photodetector group is counted and reset；
Step E：Accurate displacement device is again started up, traverse measurement corner reflector, makes all photodetections in photodetector group
The total degree that device records most strong constructive interference is M, and M is positive integer, and reads measurement corner reflection corresponding to most strong M times constructive interference
Mirror shift value Z；
Step F：According to Z=(M × λ ')/(2n), n is photodetector number, is drawn under current measuring environment, laser it is equivalent
Wavelength X '=2nZ/M；
Wavelength amendment type multiple beam angle ladder reflecting mirror laser interferometer, including lasing light emitter, spectroscope, fixed step plane angle are anti-
Mirror, measurement angle reflector apparatus, photodetector group are penetrated, the measurement angle reflector apparatus includes measurement corner reflector and precision
Gearshift, the measurement corner reflector are arranged on the accurate displacement device, and the accurate displacement device is arranged on tested
On object, the accurate displacement device provides and testee displacement displacement in the same direction or reverse for the measurement corner reflector；
The lasing light emitter includes n collimated laser beam, wherein n >=2, and the photodetector group includes n photoelectric detector；
The fixed step plane corner reflector includes two reflective steps faces at a right angle, and each reflective steps face includes n
Into the step-like plane of reflection, the spacing of the two neighboring plane of reflection is equal toWherein k is natural number, λ is sharp
The optical maser wavelength that light source is sent, the measurement corner reflector include two planes of reflection at a right angle；
Every Shu Jiguang that the lasing light emitter is sent injects a corresponding plane of reflection, often respectively after the dichroic mirror
Each photoelectric detector of the individual plane of reflection by every beam laser reflection to the corresponding photodetector group；It is described to swash
Every Shu Jiguang that light source is sent incides the measurement corner reflector back reflection to correspondingly respectively after spectroscope transmission
Photodetector group each photoelectric detector；
The accurate displacement device includes support platform and the drive device being arranged in the support platform, the support platform
It is engaged with the testee, the drive device is provided on testee direction of displacement for the measurement corner reflector
Displacement, the drive device are Piezoelectric drive device, in addition to the first displacement piece being arranged in the support platform
With the second displacement part being arranged in first displacement piece, the drive device is engaged with first displacement piece, for institute
Displacement of the first displacement piece offer along the support platform is stated, first displacement piece has one to be tilted relative to its direction of displacement
Inclined-plane, the second displacement part is slidably arranged on the inclined-plane of first displacement piece, makes the second displacement part can be along institute
The inclined-plane for stating the first displacement piece slides, snug fit between first displacement piece and second displacement part, the measurement corner reflection
Mirror is arranged on the second displacement part, is additionally provided with restraint device in the support platform, described in the restraint device limitation
Second displacement part is along the motion on the first displacement piece direction of displacement so that when the first displacement piece is driven by the drive device
And when producing displacement, the second displacement part is driven by first displacement piece and produces displacement, also, the second displacement part
Direction of displacement and the direction of displacement of first displacement piece it is perpendicular, the inclined-plane of first displacement piece and its direction of displacement
Angle is A degree, 0<A<45, set on the second displacement part and have elastic component so that second displacement part and the first displacement piece are protected
Hold contact condition；It is additionally provided between first displacement piece and the support platform and has magnetic magnetic part, described second
Displacement piece has magnetic, and the second displacement part and the magnetic part are there is a natural attraction between the sexes state；The second displacement part with it is described
Measurement corner reflector is integral type structure.
2. wavelength modification method as claimed in claim 1, it is characterised in that the step D is into step E, the most strong phase
Long interference can also be most weak destructive interference.
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| JPH11142243A (en) * | 1997-11-13 | 1999-05-28 | Yokogawa Electric Corp | Interferometer and fourier transform-type spectral apparatus using the same |
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| EP2108918A1 (en) * | 2008-04-07 | 2009-10-14 | Mitutoyo Corporation | Laser interferometer, measurement method and measurement program |
| CN102490027A (en) * | 2011-12-16 | 2012-06-13 | 深圳市大族激光科技股份有限公司 | Lifting platform |
| CN104697440A (en) * | 2015-03-30 | 2015-06-10 | 北方民族大学 | Multi-light-beam cascading staircase angle reflector laser interferometer and measurement method thereof |
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