CN104880147A - Magnetic micrometric displacement platform type corner reflecting mirror laser interferometer and calibration method and measuring method - Google Patents
Magnetic micrometric displacement platform type corner reflecting mirror laser interferometer and calibration method and measuring method Download PDFInfo
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- CN104880147A CN104880147A CN201510374210.1A CN201510374210A CN104880147A CN 104880147 A CN104880147 A CN 104880147A CN 201510374210 A CN201510374210 A CN 201510374210A CN 104880147 A CN104880147 A CN 104880147A
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Abstract
The invention relates to the field of precision testing technology and instruments, in particular to a magnetic micrometric displacement platform type corner reflecting mirror laser interferometer and a calibration method and a measuring method. The magnetic micrometric displacement platform type corner reflecting mirror laser interferometer comprises a laser source, a micro corner reflecting mirror, an interference measuring photoelectric detector, a movable corner reflecting mirror, a spectroscope set and a magnetic micrometric displacement platform, wherein the micro corner reflecting mirror is arranged on the magnetic micrometric displacement platform. The magnetic micrometric displacement platform type corner reflecting mirror laser interferometer further comprises a reflection measuring photoelectric detector, laser beams further form reflection laser beams after being reflected by the movable corner reflecting mirror into the spectroscope set, and the reflection laser beams are lased towards the reflection measuring photoelectric detector. According to the laser interferometer, since the reflection measuring photoelectric detector can measure the strength of the laser beams reflected by the movable corner reflecting mirror, the interference state of the laser interference light beams is determined according to the strength of the reflected laser beams, and the goal of anti-environment interference is achieved.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method and measuring method.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.At present, in most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure, such as, single frequency laser interferometer conventional at present.
Single frequency laser interferometer is the light beam sent from laser instrument, after beam-expanding collimation, be divided into two-way by spectroscope, and reflects can be combined in spectroscope from stationary mirror and moving reflector respectively and produce interference fringe.When moving reflector moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc., after shaping, amplification, input up-down counter calculate overall pulse number N, calculating formula Y=N × λ/2 are pressed again by robot calculator, in formula, λ is optical maser wavelength, calculates the displacement Y of moving reflector.
In actual use, present inventor finds, above-mentioned measurement structure and measuring method still also exist deficiency:
Also there is serious problem affected by environment in current single frequency laser interferometer, when laser interferometer moveable mirror moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc., when for the strongest constructive interference, the triggering level that signal exceedes counter goes on record, if environment changes, such as air turbulence, in air, impurity increases, lathe mist of oil, add the impact of cutting swarf on laser beam in man-hour, the intensity of laser beam is reduced, now, even there is the strongest constructive interference, also likely intensity is not counted lower than the triggering level of counter.
So, based on above-mentioned deficiency, need one at present badly and namely can environment resistant disturb, the laser interferometer of measuring accuracy can be improved again.
Summary of the invention
The object of the invention is to the deficiency for current laser interferometer environment resistant interference performance difference, provide a kind of can environment resistant interference laser interferometer.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of magnetic micro-displacement platform formula corner reflector laser interferometer, include lasing light emitter, fine motion corner reflector, interferometry photodetector, angle of critical deformation catoptron, spectroscope group and magnetic micro-displacement platform, described fine motion corner reflector is arranged on described magnetic micro-displacement platform, the laser beam of described lasing light emitter injection is divided into the first laser beam and the second laser beam after described spectroscope group, fine motion corner reflector described in first laser beam directive, spectroscope group described in directive again after the reflection of described fine motion corner reflector, interferometry photodetector described in directive after spectroscope group again, angle of critical deformation catoptron described in second laser beam directive, spectroscope group described in directive again after the reflection of described angle of critical deformation catoptron, interferometry photodetector described in directive after spectroscope group, first laser beam and the second laser beam are interfering during interferometry photodetector described in directive, described laser interferometer also includes reflection measurement photodetector, described second laser beam is also formed with reflection lasering beam after by spectroscope group described in described angle of critical deformation catoptron directive, reflection measurement photodetector described in described reflection lasering beam directive,
Described magnetic micro-displacement platform, include support platform and be arranged on the gearshift in described support platform, described support platform is provided with the first displacement piece, described first displacement piece is connected with institute displacement apparatus, institute's displacement apparatus drives described first displacement piece to move along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, the inclined-plane of described first displacement piece slides and is provided with the second displacement piece, snug fit between described first displacement piece and the second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by institute's displacement apparatus and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0 > A > 45, the magnetic magnetic part of tool is also provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes, described fine motion corner reflector is arranged in described second displacement piece, with the second displacement piece motion.
As further preferred version, described spectroscope group includes the first spectroscope and the second spectroscope, the laser beam of described lasing light emitter injection is first mapped to the first spectroscope, the first laser beam is formed through the first dichroic mirror, the second laser beam is formed through the first spectroscope transmission, fine motion corner reflector described in first laser beam directive, first spectroscope described in directive again after reflection, and then transmitted through described first spectroscope, angle of critical deformation catoptron described in described second laser beam directive, the second spectroscope described in directive after described angle of critical deformation catoptron reflection, the first spectroscope described in directive after described second spectroscope transmission, and interfere with the first laser beam transmitted from described first spectroscope, interferometry photodetector described in directive after formation interfering beam, also described reflection lasering beam is formed by described second dichroic mirror by second spectroscopical described second laser beam described in described angle of critical deformation catoptron directive.
The laser interferometer of the application, because reflection measurement photodetector can measure the intensity of angle of critical deformation catoptron reflection lasering beam, according to the interference state of the intensity determination laser interference light beam of reflection lasering beam, so realizes the object of environment resistant interference;
And, in this application, fine motion angle is penetrated mirror and is arranged on magnetic micro-displacement platform, support platform is arranged gearshift and the first displacement piece, gearshift drives the first displacement piece motion, first displacement piece has an inclined-plane tilted relative to its sense of displacement, when gearshift provides certain shift value to drive the first displacement piece, due to the existence of restraint device, now, second displacement piece will produce certain shift value perpendicular on the first displacement piece sense of displacement, the shift value that shift value and the gearshift of the second displacement piece provide is relevant, also relevant to the inclined degree on the first displacement piece inclined-plane, namely, if the inclined-plane of the first displacement piece and the angle of its sense of displacement are A degree, when the shift value that gearshift provides is X, the shift value that second displacement piece produces is Y=Xtan (A), the sense of displacement of the second displacement piece and the sense of displacement of the first displacement piece perpendicular, so, when included angle A is less than 45 degree, the shift value that one is less than X value will be obtained, when further reducing included angle A, shift value Y also reduces thereupon, so, make in the scheme of the application, by changing the mode of precision with stroke, finally obtain the shift value that is less than the second displacement piece of gearshift output displacement value, directly enhance the precision of the application's magnetic micro-displacement platform, also the mobile accuracy of fine motion corner reflector is just directly enhanced, directly enhance the measuring accuracy of the application's laser interferometer.
As further preferred version, institute's displacement apparatus is Piezoelectric gearshift.The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, the displacement so making the gearshift of the application can provide enough little, further increases the precision of the application's micro-displacement platform, improves the measuring accuracy of the application's laser interferometer.
As further preferred version, described laser interferometer also includes disposal system, described disposal system is electrically connected with described interferometry photodetector and reflection measurement photodetector, startup and the stopping of described interferometry photodetector and reflection measurement photodetector is controlled by described disposal system, and make described interferometry photodetector data and reflection measurement photodetector data be stored in described disposal system, described disposal system is also electrically connected with the gearshift of described magnetic micro-displacement platform, startup and the stopping of institute's displacement apparatus is controlled by described disposal system, described disposal system is also electrically connected with described lasing light emitter, startup and the stopping of described lasing light emitter is controlled by described disposal system.In this application, by set handling system, the data of interferometry photodetector and the data of reflection measurement photodetector are stored, generate nominal data storehouse, compared by the data in real-time data and nominal data storehouse in actual measurement process, and then judge the interference situation of current light path; Disposal system is also electrically connected with the gearshift of magnetic micro-displacement platform, according to the output displacement of real-time measurement result command displacement device, and then realizes the cooperation control to fine motion corner reflector position, improves the adaptability of the laser interferometer of the application.
As further preferred version, the laser beam in described lasing light emitter, fine motion corner reflector, interferometry photodetector, spectroscope group, reflection measurement photodetector between any two is arranged in enclosure space and does not contact with Outdoor Space.In this application, laser beam between any two of lasing light emitter, fine motion corner reflector, interferometry photodetector, spectroscope group and these parts of reflection measurement photodetector is arranged in enclosure space, make carrying out in the process measured, laser beam between these parts above-mentioned can't be subject to the impact of environmental factor, and then ensure that the measuring accuracy of the application's laser interferometer.
As further preferred version, the laser beam between described spectroscope group and described angle of critical deformation catoptron is exposed among surrounding air.When reality uses, angle of critical deformation catoptron is arranged on testee, move with testee, so in this application, laser beam between spectroscope group and angle of critical deformation catoptron is exposed among surrounding air, first be make the application's laser interferometer structure simple, also facilitate the layout of the application's laser interferometer simultaneously.
As further preferred version, described second displacement piece and described fine motion corner reflector are integral type structure.In this application, second displacement piece and fine motion corner reflector are set to integral structure, that is in the scheme of the application, the one side of the second displacement piece is carried out polishing or plated film, make it the reflecting surface becoming fine motion corner reflector, making this reflecting surface form reflecting surface participates in the light path reflection of laser interferometer, so, directly eliminate traditional these parts of fine motion corner reflector, also the matching relationship between the second displacement piece and fine motion corner reflector is just eliminated, directly eliminate the existence of mismatch error between the second displacement piece and fine motion corner reflector, so, not only facilitate the light path adjustment work of the application, but also simplify the structure of the application's laser interferometer, reduce manufacturing cost and later stage maintenance cost, particularly also reduce the error amount of the application's laser interferometer inside configuration, further improve the measuring accuracy of the application's laser interferometer
Disclosed herein as well is a kind of scaling method for above-mentioned laser interferometer structure,
For a scaling method for magnetic micro-displacement platform formula corner reflector laser interferometer, comprise the steps:
Step one, position adjustment: the position of adjusting lasing light emitter, fine motion corner reflector, spectroscope group, interferometry photodetector, reflection measurement photodetector, angle of critical deformation catoptron and magnetic micro-displacement platform;
Step 2, adjustment light path: start described lasing light emitter, the position of further accurate adjustment fine motion corner reflector, spectroscope group, interferometry photodetector, reflection measurement photodetector, angle of critical deformation catoptron and magnetic micro-displacement platform, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the strongest constructive interference, fix the position of the second displacement piece, record now reflection measurement photodetector reading and interferometry photodetector reading, changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
The laser interferometer structure of the application and scaling method, when the strongest constructive interference, change measurement environment, record reflection measurement photodetector reading and interferometry photodetector reading form the most capable and experienced database that relates to, in actual measurement process, if exist when to cause interferometry photodetector the strongest constructive interference normally can not be detected due to environmental factor, can compare with the most capable and experienced data related in database according to reflection measurement photodetector reading and interferometry photodetector reading, if have matched data, then this position is the strongest constructive interference, the laser interferometer of the application is so made to realize the ability of environment resistant interference.
As further preferred version, the scaling method of the application also includes step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the most weak destructive interference, second displacement piece is fixed, record now reflection measurement photodetector reading and interferometry photodetector reading, changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain the most weak interference data storehouse.
As further preferred version, also include step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive is the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record now reflection measurement photodetector reading and interferometry photodetector reading, then changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain 1/n wavelength-interferometric database.
When two bundle laser interfere, optical path difference between the strongest adjacent constructive interference and the most weak destructive interference is half wavelength, in the scaling method of the application, to the strongest constructive interference, the most weak destructive interference, 1/n wavelength-interferometric is all demarcated, that is, when adopting the laser interferometer of the application to carry out actual measurement, can according to reflection measurement photodetector reading and interferometry photodetector reading and the most capable and experienced database that relates to, the most weak interference data storehouse, data in 1/n wavelength-interferometric database are compared, determine that this position is the strongest constructive interference according to the match condition of data, the most weak destructive interference or 1/n wavelength-interferometric.The laser interferometer of the application environment resistant can not only be disturbed, but also improve measuring accuracy.
The invention also discloses a kind of measuring method adopting above-mentioned laser interferometer and scaling method,
A kind of measuring method adopting magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method:
In actual measurement environment, angle of critical deformation catoptron is arranged on object being measured, if the signal reading that described reflection measurement photodetector measures is x, the signal reading that the measurement of described interferometry photodetector obtains is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
The measuring method of the application, determines the interference situation of current interfering beam by x value and y value, realize the ability of environment resistant interference, also improve measuring accuracy simultaneously with this.
As further preferred version, the matching threshold Δ of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, interferometry photodetector is corresponding is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, reflection measurement photodetector is corresponding is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, the size of described matching threshold Δ ensures when carrying out data query, when meeting | during y-y'|< Δ, y ' is unique value.When matching threshold Δ is larger, may occur that one group of x value and y value match two groups or organize x ' value and y ' value more, make troubles to measurement, so first matching threshold Δ, make one group of x value and y value coupling one group of x ' value and y ' value at most in measuring process, be convenient for measuring.
As further preferred version, the size of described matching threshold Δ sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopts less matching threshold, when not needing high-acruracy survey value, adopts larger matching threshold.
As further preferred version, if Δ=5%.
In the measuring method of the application, by arranging the size that need arrange matching threshold Δ of matching threshold Δ Δ according to Surveying Actual Precision, being convenient for measuring in process with this, the match selection of data, reducing and measuring difficulty.
Compared with prior art, beneficial effect of the present invention:
By arranging reflection measurement photodetector, after laser interferometry environment changes, can by measuring angle of critical deformation catoptron reflects laser intensity, the no longer direct signal magnitude by interferometry photodetector of laser interference state is determined, but jointly determined by reflection measurement photodetector and interferometry photodetector, realize the ability of the environment resistant interference of laser interferometer, and, owing to have employed magnetic micro-displacement platform, further improve the precision of the application's laser interferometer.
The beneficial effect of other embodiments of the application:
The laser interferometer of the application, the position of the strongest constructive interference can not only be determined, but also position and the 1/n wavelength-interferometric position of the most weak destructive interference can be determined, so, the laser interferometer of the application can not only environment resistant be disturbed, and match with fine motion corner reflector, further improve measuring accuracy.
Accompanying drawing illustrates:
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention;
Fig. 2 is the light path schematic diagram after fine motion corner reflector moves;
Fig. 3 is the structural representation of magnetic micro-displacement platform,
Mark in figure:
1-lasing light emitter, 2-fine motion corner reflector, 3-angle of critical deformation catoptron, 4-interferometry photodetector, 5-spectroscope group, 6-reflection measurement photodetector, 7-first laser beam, 8-second laser beam, 9-reflection lasering beam, 10-magnetic micro-displacement platform, 51-first spectroscope, 52-second spectroscope, 101-support platform, 102-gearshift, 103-first displacement piece, 104-inclined-plane, 105-second displacement piece, 106-restraint device, 107-magnetic part, 11-disposal system.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1, magnetic micro-displacement platform formula corner reflector laser interferometer, include lasing light emitter 1, fine motion corner reflector 2, interferometry photodetector 4, angle of critical deformation catoptron 3, spectroscope group 5 and magnetic micro-displacement platform 10, described fine motion corner reflector 2 is arranged on described magnetic micro-displacement platform 10, the laser beam that described lasing light emitter 1 penetrates is divided into the first laser beam 7 and the second laser beam 8 after described spectroscope group 5, fine motion corner reflector 2 described in first laser beam 7 directive, spectroscope group 5 described in directive again after described fine motion corner reflector 2 reflects, interferometry photodetector 4 described in directive after spectroscope group 5 again, angle of critical deformation catoptron 3 described in second laser beam 8 directive, spectroscope group 5 described in directive again after described angle of critical deformation catoptron 3 reflects, interferometry photodetector 4 described in directive after spectroscope group 5, first laser beam 7 and the second laser beam 8 are interfering during interferometry photodetector 4 described in directive, described magnetic micro-displacement platform formula corner reflector laser interferometer also includes reflection measurement photodetector 6, described second laser beam 8 is also formed with reflection lasering beam 9 after by spectroscope group 5 described in described angle of critical deformation catoptron 3 directive, reflection measurement photodetector 6 described in described reflection lasering beam 9 directive,
Described magnetic micro-displacement platform 10, the gearshift 102 including support platform 101 and be arranged in described support platform 101, described support platform 101 is provided with the first displacement piece 103, described first displacement piece 103 is connected with institute displacement apparatus 102, institute's displacement apparatus 102 drives described first displacement piece 103 to move along described support platform 101, described first displacement piece 103 has an inclined-plane 104 tilted relative to its sense of displacement, the inclined-plane 104 of described first displacement piece 103 slides and is provided with the second displacement piece 105, snug fit between described first displacement piece 103 and the second displacement piece 105, described support platform 101 is also provided with restraint device 106, described restraint device 106 limits described second displacement piece 105 along moving on described first displacement piece 103 sense of displacement, make when the first displacement piece 103 is driven by institute's displacement apparatus 102 and produces displacement, described second displacement piece 105 is driven by described first displacement piece 103 and produces displacement, the sense of displacement of described second displacement piece 105 and the sense of displacement of described first displacement piece 103 perpendicular, the inclined-plane 104 of described first displacement piece 103 is A degree with the angle of its sense of displacement, 0 > A > 45, the magnetic magnetic part 107 of tool is also provided with between described first displacement piece 103 and described support platform 101, described second displacement piece 105 has magnetic, state that described second displacement piece 105 and described magnetic part 107 are that there is a natural attraction between the sexes, described fine motion corner reflector 2 is arranged in described second displacement piece 105, move with the second displacement piece 105.
As the preferred version of the present embodiment, described spectroscope group 5 includes the first spectroscope 51 and the second spectroscope 52, the laser beam that described lasing light emitter 1 penetrates first is mapped to the first spectroscope 51, the first laser beam 7 is reflected to form through the first spectroscope 51, the second laser beam 8 is formed through the first spectroscope 51 transmission, fine motion corner reflector 2 described in first laser beam 7 directive, first spectroscope 51 described in directive again after reflection, and then transmitted through described first spectroscope 51, angle of critical deformation catoptron 3 described in described second laser beam 8 directive, the second spectroscope 52 described in directive after described angle of critical deformation catoptron 3 reflects, the first spectroscope 51 described in directive after described second spectroscope 52 transmission, and interfere with the first laser beam 7 transmitted from described first spectroscope 51, interferometry photodetector 4 described in directive after formation interfering beam, also described reflection lasering beam 9 is reflected to form by described second spectroscope 52 by described second laser beam 8 of the second spectroscope 52 described in described angle of critical deformation catoptron 3 directive.
The laser interferometer of the present embodiment, because reflection measurement photodetector 6 can measure the intensity of angle of critical deformation catoptron 3 reflection lasering beam, according to the interference state of the intensity determination laser interference light beam of reflection lasering beam, so realizes the object of environment resistant interference;
And, in the present embodiment, fine motion corner reflector 2 is arranged on magnetic micro-displacement platform 10, support platform 101 is arranged gearshift 102 and the first displacement piece 103, gearshift 102 drives the first displacement piece 103 to move, first displacement piece 103 has an inclined-plane 104 tilted relative to its sense of displacement, when gearshift 102 provides certain shift value to drive the first displacement piece 103, due to the existence of restraint device 106, now, second displacement piece 105 will produce certain shift value perpendicular on the first displacement piece 103 sense of displacement, the shift value of the second displacement piece 105 is relevant to the shift value that gearshift 102 provides, also relevant to the inclined degree on the first displacement piece 103 inclined-plane 104, namely, if the inclined-plane of the first displacement piece 103 104 is A degree with the angle of its sense of displacement, when the shift value that gearshift 102 provides is X, the shift value that second displacement piece 105 produces is Y=Xtan (A), the sense of displacement of the second displacement piece 105 and the sense of displacement of the first displacement piece 103 perpendicular, so, when included angle A is less than 45 degree, the shift value that one is less than X value will be obtained, when further reducing included angle A, shift value Y also reduces thereupon, so, make in the scheme of the present embodiment, by changing the mode of precision with stroke, finally obtain the shift value that is less than the second displacement piece 105 of gearshift 102 output displacement value, directly enhance the precision of the present embodiment magnetic micro-displacement platform, also the mobile accuracy of fine motion corner reflector 2 is just directly enhanced, and then improve the measuring accuracy of the application's laser interferometer.
As further preferred version, institute's displacement apparatus 102 is Piezoelectric gearshift.The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, the X value so making the gearshift 102 of the application can provide enough little, further increases the precision of the application's micro-displacement platform 10, improves the measuring accuracy of the application's laser interferometer.
As further preferred version, described laser interferometer also includes disposal system 11, described disposal system 11 is electrically connected with described interferometry photodetector 4 and reflection measurement photodetector 6, startup and the stopping of described interferometry photodetector 4 and reflection measurement photodetector 6 is controlled by described disposal system 11, and make described interferometry photodetector 4 data and reflection measurement photodetector 6 data be stored in described disposal system 11, described disposal system 11 is also electrically connected with the gearshift 102 of described magnetic micro-displacement platform 10, startup and the stopping of institute's displacement apparatus 102 is controlled by described disposal system 11, described disposal system 11 is also electrically connected with described lasing light emitter 1, startup and the stopping of described lasing light emitter 1 is controlled by described disposal system 11.In this application, by set handling system 11, the data of interferometry photodetector 4 and the data of reflection measurement photodetector 6 are stored, generate nominal data storehouse, compared by the data in real-time data and nominal data storehouse in actual measurement process, and then judge the interference situation of current light path; Disposal system 11 is also electrically connected with the gearshift 102 of magnetic micro-displacement platform 10, according to the output displacement of real-time measurement result command displacement device 102, and then the cooperation control realized fine motion corner reflector 2 position, improve the adaptability of the laser interferometer of the application.
As further preferred version, the laser beam in described lasing light emitter 1, fine motion corner reflector 2, interferometry photodetector 4, spectroscope group 5, reflection measurement photodetector 6 between any two is arranged in enclosure space and does not contact with Outdoor Space.In this application, laser beam between any two of lasing light emitter 1, fine motion corner reflector 2, interferometry photodetector 4, spectroscope group 5 and these parts of reflection measurement photodetector 6 is arranged in enclosure space, make carrying out in the process measured, laser beam between these parts above-mentioned can't be subject to the impact of environmental factor, and then ensure that the measuring accuracy of the application's laser interferometer.
As further preferred version, the laser beam between described spectroscope group 5 and described angle of critical deformation catoptron 3 is exposed among surrounding air.When reality uses, angle of critical deformation catoptron 3 is arranged on testee, move with testee, so in this application, laser beam between spectroscope group 5 and angle of critical deformation catoptron 3 is exposed among surrounding air, first be make the application's laser interferometer structure simple, also facilitate the layout of the application's laser interferometer simultaneously.
As further preferred version, described second displacement piece 105 is integral type structure with described fine motion corner reflector 2, in this application, second displacement piece 105 and fine motion corner reflector 2 are set to integral structure, that is in the scheme of the application, the one side of the second displacement piece 105 is set to the shape of fine motion corner reflector 2 reflecting surface, and polishing or plated film, making this face form reflecting surface participates in the light path reflection of laser interferometer, so, directly eliminate traditional these parts of fine motion corner reflector 2, also the matching relationship between the second displacement piece 105 and fine motion corner reflector 2 is just eliminated, directly eliminate the existence of mismatch error between the second displacement piece 105 and fine motion corner reflector 2, so, not only facilitate the light path adjustment work of the application's laser interferometer, but also simplify the structure of the application's laser interferometer, reduce manufacturing cost and later stage maintenance cost, particularly also reduce the error amount of the application's laser interferometer inside configuration, further improve the measuring accuracy of the application's laser interferometer.
Embodiment 2, as diagram, a kind of scaling method for magnetic micro-displacement platform formula corner reflector laser interferometer, comprises the steps:
Step one, position adjustment: the position of adjusting lasing light emitter 1, fine motion corner reflector 2, spectroscope group 5, interferometry photodetector 4, reflection measurement photodetector 6, angle of critical deformation catoptron 3 and magnetic micro-displacement platform 10;
Step 2, adjustment light path: start described lasing light emitter 1, the position of further accurate adjustment fine motion corner reflector 2, spectroscope group 5, interferometry photodetector 4, reflection measurement photodetector 6, angle of critical deformation catoptron 3 and magnetic micro-displacement platform 10, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: under the environment of air cleaning, control described magnetic micro-displacement platform 10, second displacement piece 105 is moved, when the interfering beam of interferometry photodetector 4 described in directive stops described magnetic micro-displacement platform 10 for during the strongest constructive interference, second displacement piece is fixed by 105, record now reflection measurement photodetector 6 reading and interferometry photodetector 4 reading, changing air ambient makes described reflection measurement photodetector 6 reading change, record interferometry photodetector 4 reading of several reflection measurement photodetector 6 readings and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
The laser interferometer structure of the present embodiment and scaling method, when the strongest constructive interference, change measurement environment, record reflection measurement photodetector 6 reading and interferometry photodetector 4 reading form the most capable and experienced database that relates to, in actual measurement process, if exist when to cause interferometry photodetector 4 the strongest constructive interference normally can not be detected due to environmental factor, can compare with the most capable and experienced data related in database according to reflection measurement photodetector 6 reading and interferometry photodetector 4 reading, if have matched data, then this position is the strongest constructive interference, the laser interferometer of the present embodiment is so made to realize the ability of environment resistant interference.
As the preferred version of the present embodiment, the scaling method of the present embodiment also includes step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform 10, second displacement piece 105 is moved, when the interfering beam of interferometry photodetector 4 described in directive stops described magnetic micro-displacement platform 10 for during the most weak destructive interference, second displacement piece 105 is fixed, record now reflection measurement photodetector 6 reading and interferometry photodetector 4 reading, changing air ambient makes described reflection measurement photodetector 6 reading change, record interferometry photodetector 4 reading of several reflection measurement photodetector 6 readings and correspondence simultaneously, obtain the most weak interference data storehouse.
As further preferred version, the scaling method of the application also includes step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer: under the environment of air cleaning, control described magnetic micro-displacement platform 10, second displacement piece 105 is moved, when the interfering beam of interferometry photodetector 4 described in directive is the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record now reflection measurement photodetector 6 reading and interferometry photodetector 4 reading, then changing air ambient makes described reflection measurement photodetector 6 reading change, record interferometry photodetector 4 reading of several reflection measurement photodetector 6 readings and correspondence simultaneously, obtain 1/n wavelength-interferometric database.
When two bundle laser interfere, optical path difference between the strongest adjacent constructive interference and the most weak destructive interference is half wavelength, in the scaling method of the application, to the strongest constructive interference, the most weak destructive interference, 1/n wavelength-interferometric is all demarcated, that is, when adopting the laser interferometer of the application to carry out actual measurement, can according to reflection measurement photodetector 6 reading and interferometry photodetector 4 reading and the most capable and experienced database that relates to, the most weak interference data storehouse, data in 1/n wavelength-interferometric database are compared, determine that this position is the strongest constructive interference according to the match condition of data, the most weak destructive interference or 1/n wavelength-interferometric.The laser interferometer of the application environment resistant can not only be disturbed, but also improve measuring accuracy.
Embodiment 3, a kind of measuring method adopting magnetic micro-displacement platform formula corner reflector laser interferometer and scaling method:
In actual measurement environment, if the signal reading that described reflection measurement photodetector 6 measures is x, the signal reading obtained measured by described interferometry photodetector 4 is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
The measuring method of the present embodiment, determines the interference situation of current interfering beam by x value and y value, realize the ability of environment resistant interference, also improve measuring accuracy simultaneously with this.
As the preferred version of the present embodiment, the matching threshold Δ of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, interferometry photodetector is corresponding is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, reflection measurement photodetector is corresponding is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As the preferred version of the present embodiment, the size of described matching threshold Δ ensures when carrying out data query, when meeting | during y-y'|< Δ, y ' is unique value.When matching threshold Δ is larger, may occur that one group of x value and y value match two groups or organize x ' value and y ' value more, make troubles to measurement, so first matching threshold Δ, make one group of x value and y value coupling one group of x ' value and y ' value at most in measuring process, be convenient for measuring.
As the preferred version of the present embodiment, the size of described matching threshold Δ sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopts less matching threshold, when wishing comparatively fast to measure when not needing high-acruracy survey value, adopt larger matching threshold.
As further preferred version, if Δ=5%.
In the measuring method of the present embodiment, by arranging matching threshold Δ, needing according to Surveying Actual Precision the size that matching threshold Δ is set, being convenient for measuring in process with this, the match selection of data, reduce and measure difficulty.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (10)
1. a magnetic micro-displacement platform formula corner reflector laser interferometer, include lasing light emitter, fine motion corner reflector, interferometry photodetector, angle of critical deformation catoptron, spectroscope group and magnetic micro-displacement platform, described fine motion corner reflector is arranged on described magnetic micro-displacement platform, the laser beam of described lasing light emitter injection is divided into the first laser beam and the second laser beam after described spectroscope group, fine motion corner reflector described in described first laser beam directive, spectroscope group described in directive again after the reflection of described fine motion corner reflector, interferometry photodetector described in directive after spectroscope group again, angle of critical deformation catoptron described in described second laser beam directive, spectroscope group described in directive again after the reflection of described angle of critical deformation catoptron, interferometry photodetector described in directive after spectroscope group, described first laser beam and the second laser beam are interfering during interferometry photodetector described in directive, it is characterized in that, described magnetic micro-displacement platform formula corner reflector laser interferometer also includes reflection measurement photodetector, described second laser beam is also formed with reflection lasering beam after by spectroscope group described in described angle of critical deformation catoptron directive, reflection measurement photodetector described in described reflection lasering beam directive,
Described magnetic micro-displacement platform, include support platform and be arranged on the gearshift in described support platform, described support platform is provided with the first displacement piece, described first displacement piece is connected with institute displacement apparatus, institute's displacement apparatus drives described first displacement piece to move along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, the inclined-plane of described first displacement piece slides and is provided with the second displacement piece, snug fit between described first displacement piece and the second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by institute's displacement apparatus and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0 > A > 45, the magnetic magnetic part of tool is also provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes, described fine motion corner reflector is arranged in described second displacement piece, with the second displacement piece motion.
2. magnetic micro-displacement platform formula corner reflector laser interferometer as claimed in claim 1, it is characterized in that, described spectroscope group includes the first spectroscope and the second spectroscope, the laser beam of described lasing light emitter injection is first mapped to the first spectroscope, the first laser beam is formed through the first dichroic mirror, the second laser beam is formed through the first spectroscope transmission, fine motion corner reflector described in first laser beam directive, first spectroscope described in directive again after reflection, and then transmitted through described first spectroscope, angle of critical deformation catoptron described in described second laser beam directive, the second spectroscope described in directive after described angle of critical deformation catoptron reflection, the first spectroscope described in directive after described second spectroscope transmission, and interfere with the first laser beam transmitted from described first spectroscope, interferometry photodetector described in directive after formation interfering beam, also described reflection lasering beam is formed by described second dichroic mirror by second spectroscopical described second laser beam described in described angle of critical deformation catoptron directive.
3., for a scaling method for the magnetic micro-displacement platform formula corner reflector laser interferometer described in claim 1 or 2 any one, it is characterized in that, comprise the steps:
Step one, position adjustment: the position of adjusting lasing light emitter, fine motion corner reflector, spectroscope group, interferometry photodetector, reflection measurement photodetector, angle of critical deformation catoptron and magnetic micro-displacement platform;
Step 2, adjustment light path: start described lasing light emitter, the position of further accurate adjustment fine motion corner reflector, spectroscope group, interferometry photodetector, reflection measurement photodetector, angle of critical deformation catoptron and magnetic micro-displacement platform, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the strongest constructive interference, second displacement piece is fixed, record now reflection measurement photodetector reading and interferometry photodetector reading, changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
4. scaling method as claimed in claim 3, it is characterized in that, also include step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the most weak destructive interference, second displacement piece is fixed, record now reflection measurement photodetector reading and interferometry photodetector reading, changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain the most weak interference data storehouse.
5. scaling method as claimed in claim 4, it is characterized in that, also include step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam of interferometry photodetector described in directive is the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record now reflection measurement photodetector reading and interferometry photodetector reading, then changing air ambient makes described reflection measurement photodetector reading change, record the interferometry photodetector reading of several reflection measurement photodetector readings and correspondence simultaneously, obtain 1/n wavelength-interferometric database.
6. the magnetic micro-displacement platform formula corner reflector laser interferometer of an employing as described in claim 1 or 2 any one and the measuring method of scaling method according to claim 5, it is characterized in that, in actual measurement environment, if the signal reading that described reflection measurement photodetector measures is x, the signal reading that the measurement of described interferometry photodetector obtains is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
7. measuring method as claimed in claim 6, it is characterized in that, the matching threshold D of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, interferometry photodetector is corresponding is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|<D, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
8. measuring method as claimed in claim 7, it is characterized in that, database is related to if the most capable and experienced, the most weak interference data storehouse, the numerical value that in 1/n wavelength-interferometric database, reflection measurement photodetector is corresponding is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|<D, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
9. measuring method as claimed in claim 7 or 8, it is characterized in that, the size of described matching threshold D ensures when carrying out data query, when meeting | during y-y'|<D, y ' is unique value.
10. measuring method as claimed in claim 9, it is characterized in that, the size of described matching threshold D sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopting less matching threshold, when not needing high-acruracy survey value, adopting larger matching threshold.
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