CN104930968A - Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method - Google Patents
Magnetic micro-displacement platform-type step planar mirror laser interferometer, calibration method, and measuring method Download PDFInfo
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- CN104930968A CN104930968A CN201510369129.4A CN201510369129A CN104930968A CN 104930968 A CN104930968 A CN 104930968A CN 201510369129 A CN201510369129 A CN 201510369129A CN 104930968 A CN104930968 A CN 104930968A
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Abstract
The invention relates to the precision test technology and apparatus field, and especially relates to a magnetic micro-displacement platform-type step planar mirror laser interferometer, a calibration method, and a measuring method. The magnetic micro-displacement platform-type step planar mirror laser interferometer comprises a laser source, a micro-moving step planar mirror, an interference measuring photoelectric detector set, a mobile planar mirror, a spectroscope set, and a magnetic micro-displacement platform. The laser source emits z laser beams to the spectroscope set. The interferometer further includes a reflection measuring photoelectric detector set. The second laser beam set, when being emitted from the mobile planar mirror to the spectroscope set, also forms a reflection laser beam set. All laser beams of the reflection laser beam set are emitted to separate reflection measuring photoelectric detectors respectively. The laser interferometer can determine the interference state of laser interference light beams according to the intensity of the reflection laser beam set, therefore, the purpose of environment interference resistance can be achieved.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of magnetic micro-displacement platform formula ladder planar reflector laser interference instrument and scaling method and measuring method.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.At present, in most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure, such as, single frequency laser interferometer conventional at present.
Single frequency laser interferometer is the light beam sent from laser instrument, after beam-expanding collimation, be divided into two-way by spectroscope, and reflects can be combined in spectroscope from stationary mirror and moving reflector respectively and produce interference fringe.When moving reflector moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc., after shaping, amplification, input up-down counter calculate overall pulse number N, calculating formula Y=N × λ/2 are pressed again by robot calculator, in formula, λ is optical maser wavelength, calculates the displacement Y of moving reflector.
In actual use, present inventor finds, above-mentioned measurement structure and measuring method still also exist deficiency:
Also there is serious problem affected by environment in current single frequency laser interferometer, when laser interferometer moveable mirror moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc., when for the strongest constructive interference, the triggering level that signal exceedes counter goes on record, if environment changes, such as air turbulence, in air, impurity increases, lathe mist of oil, add the impact of cutting swarf on laser beam in man-hour, the intensity of laser beam is reduced, now, even there is the strongest constructive interference, also likely intensity is not counted lower than the triggering level of counter.
So, based on above-mentioned deficiency, need one at present badly and namely can environment resistant disturb, the laser interferometer of measuring accuracy can be improved again.
Summary of the invention
The object of the invention is to the deficiency for current laser interferometer environment resistant interference performance difference, provide a kind of can environment resistant interference laser interferometer.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of magnetic micro-displacement platform formula ladder planar reflector laser interference instrument, include lasing light emitter, fine motion ladder plane mirror, interferometry photodetector group, plane of motion catoptron, spectroscope group and magnetic micro-displacement platform, described fine motion ladder plane mirror is arranged on described magnetic micro-displacement platform, described lasing light emitter restraints laser beam to described spectroscope group injection z, wherein z be greater than or equal to 2 positive integer, described interferometry photodetector group includes z interferometry photodetector, each interferometry photodetector is corresponding with beam of laser bundle, the reflecting surface of described fine motion ladder plane mirror includes z the plane of reflection, z the described plane of reflection is that notch cuttype is arranged, each plane of reflection is corresponding with beam of laser bundle, each laser beam is divided into the first laser beam group and the second laser beam group after described spectroscope group, fine motion ladder plane mirror described in described first laser beam group directive, spectroscope group described in directive again after the reflection of described fine motion ladder plane mirror, interferometry photodetector group described in directive after described spectroscope group again, plane of motion catoptron described in described second laser beam group directive, spectroscope group described in directive again after the reflection of described plane of motion catoptron, corresponding interfering with the first laser beam group of interferometry photodetector group described in directive after described spectroscope group, form coherence laser beam group, each interfering beam each self-corresponding described interferometry photodetector of directive respectively of coherence laser beam group, described magnetic micro-displacement platform formula ladder planar reflector laser interference instrument also includes reflection measurement photodetector group, described reflection measurement photodetector group includes z reflection measurement photodetector, described second laser beam group is also formed with reflection lasering beam group after by spectroscope group described in described plane of motion catoptron directive, the described reflection measurement photodetector of directive one of each laser beam difference correspondence of described reflection lasering beam group,
Described magnetic micro-displacement platform, include support platform and be arranged on the gearshift in described support platform, described support platform is provided with the first displacement piece, described first displacement piece is connected with institute displacement apparatus, institute's displacement apparatus drives described first displacement piece to move along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, the inclined-plane of described first displacement piece slides and is provided with the second displacement piece, snug fit between described first displacement piece and the second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by institute's displacement apparatus and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0 > A > 45, the magnetic magnetic part of tool is also provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes, described fine motion ladder plane mirror is arranged in described second displacement piece, with the second displacement piece motion.
As further preferred version, described spectroscope group includes the first spectroscope and the second spectroscope, the z of described lasing light emitter injection restraints laser beam and is first mapped to the first spectroscope, the first laser beam group is formed through the first dichroic mirror, the second laser beam group is formed through the first spectroscope transmission, fine motion ladder plane mirror described in first laser beam group directive, first spectroscope described in directive again after reflection, and then transmitted through described first spectroscope, second spectroscope described in described second laser beam group directive, plane of motion catoptron described in directive after described second spectroscope transmission, the second spectroscope described in directive again after the reflection of described plane of motion catoptron, the first spectroscope described in directive after described second spectroscope transmission, and interfere with the first laser beam group transmitted from described first spectroscope, interferometry photodetector group described in directive after formation coherence laser beam group, also described reflection lasering beam group is formed by described second dichroic mirror by second spectroscopical described second laser beam group described in described plane of motion catoptron directive.
The laser interferometer of the application, because reflection measurement photodetector group can measure the intensity of plane of motion catoptron reflection lasering beam group, according to the interference state of the intensity determination laser interference light beam of reflection lasering beam group, so realizes the object of environment resistant interference;
And, in this application, fine motion ladder plane mirror is arranged on magnetic micro-displacement platform, support platform is arranged gearshift and the first displacement piece, gearshift drives the first displacement piece motion, first displacement piece has an inclined-plane tilted relative to its sense of displacement, when gearshift provides certain shift value to drive the first displacement piece, due to the existence of restraint device, now, second displacement piece will produce certain shift value perpendicular on the first displacement piece sense of displacement, the shift value that shift value and the gearshift of the second displacement piece provide is relevant, also relevant to the inclined degree on the first displacement piece inclined-plane, namely, if the inclined-plane of the first displacement piece and the angle of its sense of displacement are A degree, when the shift value that gearshift provides is X, the shift value that second displacement piece produces is Y=Xtan (A), the sense of displacement of the second displacement piece and the sense of displacement of the first displacement piece perpendicular, so, when included angle A is less than 45 degree, the shift value that one is less than X value will be obtained, when further reducing included angle A, shift value Y also reduces thereupon, so, make in the scheme of the application, by changing the mode of precision with stroke, finally obtain the shift value that is less than the second displacement piece of gearshift output displacement value, directly enhance the precision of the application's magnetic micro-displacement platform, also the mobile accuracy of fine motion ladder plane mirror is just directly enhanced, directly enhance the measuring accuracy of the application's laser interferometer.
As further preferred version, institute's displacement apparatus is Piezoelectric gearshift.The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, the X value so making the gearshift of the application can provide enough little, further increases the precision of the application's magnetic micro-displacement platform, improves the measuring accuracy of the application's laser interferometer.
As further preferred version, described laser interferometer also includes disposal system, described disposal system is electrically connected with described interferometry photodetector and reflection measurement photodetector, startup and the stopping of described interferometry photodetector and reflection measurement photodetector is controlled by described disposal system, and make described interferometry photodetector data and reflection measurement photodetector data be stored in described disposal system, described disposal system is also electrically connected with the gearshift of described magnetic micro-displacement platform, startup and the stopping of institute's displacement apparatus is controlled by described disposal system, described disposal system is also electrically connected with described lasing light emitter, startup and the stopping of described lasing light emitter is controlled by described disposal system.In this application, by set handling system, the data of interferometry photodetector and the data of reflection measurement photodetector are stored, generate nominal data storehouse, compared by the data in real-time data and nominal data storehouse in actual measurement process, and then judge the interference situation of current light path; Disposal system is also electrically connected with the gearshift of magnetic micro-displacement platform, according to the output displacement of real-time measurement result command displacement device, and then realizes the cooperation control to fine motion ladder plane mirror position, improves the adaptability of the laser interferometer of the application.
As further preferred version, the laser beam in described lasing light emitter, fine motion ladder plane mirror, interferometry photodetector group, spectroscope group, reflection measurement photodetector group between any two is arranged in enclosure space and does not contact with Outdoor Space.In this application, laser beam between any two of lasing light emitter, fine motion ladder plane mirror, interferometry photodetector group, spectroscope group and these parts of reflection measurement photodetector group is arranged in enclosure space, make carrying out in the process measured, laser beam between these parts above-mentioned can't be subject to the impact of environmental factor, and then ensure that the measuring accuracy of the application's laser interferometer.
As further preferred version, the laser beam between described spectroscope group and described plane of motion catoptron is exposed among surrounding air.When reality uses, plane of motion catoptron is arranged on testee, move with testee, so in this application, laser beam between spectroscope group and plane of motion catoptron is exposed among surrounding air, first be make the application's laser interferometer structure simple, also facilitate the layout of the application's laser interferometer simultaneously.
As further preferred version, described second displacement piece and described fine motion ladder plane mirror are integral type structure.In this application, second displacement piece and fine motion ladder plane mirror are set to integral structure, that is in the scheme of the application, the one side of the second displacement piece is set to the shape of fine motion ladder plane mirror reflecting surface, and polishing or plated film, making this face form reflecting surface participates in the light path reflection of laser interferometer, so, directly eliminate traditional these parts of fine motion ladder plane mirror, also the matching relationship between the second displacement piece and fine motion ladder plane mirror is just eliminated, directly eliminate the existence of mismatch error between the second displacement piece and fine motion ladder plane mirror, so, not only facilitate the light path adjustment work of the application, but also simplify the structure of the application's laser interferometer, reduce manufacturing cost and later stage maintenance cost, particularly also reduce the error amount of the application's laser interferometer inside configuration, further improve the measuring accuracy of the application's laser interferometer.
Disclosed herein as well is a kind of scaling method adopting above-mentioned laser interferometer structure,
For a scaling method for magnetic micro-displacement platform formula ladder planar reflector laser interference instrument, comprise the steps:
Step one, position adjustment: the position of adjusting lasing light emitter, fine motion ladder plane mirror, spectroscope group, interferometry photodetector group, reflection measurement photodetector group, plane of motion catoptron and magnetic micro-displacement platform;
Step 2, adjustment light path: start described lasing light emitter, the position of further accurate adjustment fine motion ladder plane mirror, spectroscope group, interferometry photodetector group, reflection measurement photodetector group, plane of motion catoptron and magnetic micro-displacement platform, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: choose an interferometry photodetector in interferometry photodetector group as demarcation interferometry photodetector, choose a reflection measurement photodetector in reflection measurement photodetector group as demarcation reflection measurement photodetector, described demarcation interferometry photodetector is corresponding with same a branch of laser beam that described demarcation reflection measurement photodetector and described lasing light emitter penetrate, described magnetic micro-displacement platform is controlled under the environment of air cleaning, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the strongest constructive interference, the position of the second displacement piece is fixed, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading that several demarcate reflection measurement photodetector reading and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
As further preferred version, repeating said steps three, chooses different demarcation reflection measurement photodetectors at every turn and demarcates interferometry photodetector, obtains z and the most capable and experiencedly relates to database.Owing to being repeated step 3, obtain z the database that relates to the most capable and experienced, the quantity of the database of direct increase, more be beneficial to the matching inquiry of data in testing process, and, realizing multiwavelength laser source, fine motion ladder plane mirror and z, the most capable and experienced to relate between database mutually collaborative, improves the measuring accuracy of laser interferometer.
The laser interferometer structure of the application and scaling method, when the strongest constructive interference, change measurement environment, record is demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading and forms the most capable and experienced database that relates to, in actual measurement process, if exist when to cause interferometry photodetector group the strongest constructive interference normally can not be detected due to environmental factor, can compare with the most capable and experienced data related in database according to demarcation reflection measurement photodetector reading and demarcation interferometry photodetector reading, if have matched data, then this position is the strongest constructive interference, the laser interferometer of the application is so made to realize the ability of environment resistant interference.
As further preferred version, also include step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the most weak destructive interference, the position of the second displacement piece is fixed, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading that several demarcate reflection measurement photodetector reading and correspondence simultaneously, obtain the most weak interference data storehouse.
As further preferred version, repeating said steps four, chooses different demarcation reflection measurement photodetectors at every turn and demarcates interferometry photodetector, obtains z interference data storehouse the most weak.
As further preferred version, also include step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer, described magnetic micro-displacement platform is controlled under the environment of air cleaning, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive is for the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, then changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading demarcating reflection measurement photodetector reading and correspondence described in several simultaneously, obtain 1/n wavelength-interferometric database.
When two bundle laser interfere, optical path difference between the strongest adjacent constructive interference and the most weak destructive interference is half wavelength, in the scaling method of the application, to the strongest constructive interference, the most weak destructive interference, 1/n wavelength-interferometric is all demarcated, that is, when adopting the laser interferometer of the application to carry out actual measurement, according to demarcation reflection measurement photodetector reading and interferometry photodetector reading and the most capable and experienced database that relates to can be demarcated, the most weak interference data storehouse, data in 1/n wavelength-interferometric database are compared, determine that this position is the strongest constructive interference according to the match condition of data, the most weak destructive interference or 1/n wavelength-interferometric.The laser interferometer of the application environment resistant can not only be disturbed, but also improve measuring accuracy.
As further preferred version, repeating said steps five, chooses different demarcation reflection measurement photodetectors at every turn and demarcates interferometry photodetector, obtaining z 1/n wavelength-interferometric database.
The invention also discloses a kind of measuring method adopting above-mentioned laser interferometer and scaling method,
A kind of measuring method adopting magnetic micro-displacement platform formula ladder planar reflector laser interference instrument and scaling method:
In actual measurement environment, if the signal reading that described demarcation reflection measurement photodetector measures is x, the signal reading that the measurement of described demarcation interferometry photodetector obtains is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
The measuring method of the application, determines the interference situation of current interfering beam by x value and y value, realize the ability of environment resistant interference, also improve measuring accuracy simultaneously with this.
As further preferred version, the matching threshold Δ of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to measured interference light electric explorer in 1/n wavelength-interferometric database is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to reflection measurement photodetector in 1/n wavelength-interferometric database is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, the size of described matching threshold Δ ensures when carrying out data query, when meeting | during y-y'|< Δ, y ' is unique value.When matching threshold Δ is larger, may occur that one group of x value and y value match two groups or organize x ' value and y ' value more, make troubles to measurement, so first matching threshold Δ, make one group of x value and y value coupling one group of x ' value and y ' value at most in measuring process, be convenient for measuring.
As further preferred version, the size of described matching threshold Δ sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopts less matching threshold, when not needing high-acruracy survey value, adopts larger matching threshold.
As further preferred version, if Δ=5%.
In the measuring method of the application, by arranging matching threshold Δ, needing according to Surveying Actual Precision the size that matching threshold Δ is set, being convenient for measuring in process with this, the match selection of data, reduce and measure difficulty.
Compared with prior art, beneficial effect of the present invention:
The magnetic micro-displacement platform formula ladder planar reflector laser interference instrument of the application, first by arranging multiple beam, fine motion ladder plane mirror and corner reflector improve the measuring accuracy of laser interferometer, simultaneously by arranging reflection measurement photodetector, after laser interferometry environment changes, can by measuring plane of motion catoptron reflects laser intensity, the no longer direct signal magnitude by interferometry photodetector group of laser interference state is determined, but jointly determined by reflection measurement photodetector and interferometry photodetector group, greatly can improve the antijamming capability of laser interferometer, further, the application have employed magnetic micro-displacement platform, further improves the measuring accuracy of the laser interferometer of the application.
The beneficial effect of other embodiments of the application:
The laser interferometer of the application, the position of the strongest constructive interference can not only be determined, but also position and the 1/n wavelength-interferometric position of the most weak destructive interference can be determined, so, the laser interferometer of the application environment resistant can not only be disturbed, but also improve measuring accuracy; Further, cooperatively interact between the measuring method of the application, scaling method, multi-beam laser source, fine motion ladder plane mirror, further improve the measuring accuracy of the application's laser interferometer.
Accompanying drawing illustrates:
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention;
Fig. 2 is the structural representation after fine motion ladder plane mirror moves;
Fig. 3 is the structural representation of magnetic micro-displacement platform,
Mark in figure:
1-lasing light emitter, 2-fine motion ladder plane mirror, 3-plane of motion catoptron, 4-interferometry photodetector group, 5-spectroscope group, 6-reflection measurement photodetector group, 7-first laser beam group, 8-second laser beam group, 9-reflection lasering beam group, 10-magnetic micro-displacement platform, the 21-plane of reflection, 41-interferometry photodetector, 41a-demarcates interferometry photodetector, 51-first spectroscope, 52-second spectroscope, 61-reflection measurement photodetector, 61a-demarcates reflection measurement photodetector, 101-support platform, 102-gearshift, 103-first displacement piece, 104-inclined-plane, 105-second displacement piece, 106-restraint device, 107-magnetic part, 11-disposal system.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1, as shown in the figure, a kind of magnetic micro-displacement platform formula ladder planar reflector laser interference instrument, include lasing light emitter 1, fine motion ladder plane mirror 2, interferometry photodetector group 4, plane of motion catoptron 3, spectroscope group 5 and magnetic micro-displacement platform 10, described fine motion ladder plane mirror is arranged on described magnetic micro-displacement platform 10, described lasing light emitter 1 penetrates z to described spectroscope group 5 and restraints laser beam, wherein z be greater than or equal to 2 positive integer, described interferometry photodetector group 4 includes z interferometry photodetector, each interferometry photodetector 41 is corresponding with beam of laser bundle, the reflecting surface of described fine motion ladder plane mirror 2 includes z the plane of reflection 21, z the described plane of reflection 21 is arranged in notch cuttype, each plane of reflection 21 is corresponding with beam of laser bundle, each laser beam is divided into the first laser beam group 7 and the second laser beam group 8 after described spectroscope group 5, fine motion ladder plane mirror 2 described in described first laser beam group 7 directive, spectroscope group 5 described in directive again after the reflection of described fine motion ladder plane mirror 2, interferometry photodetector group 4 described in directive after described spectroscope group 5 again, plane of motion catoptron 3 described in described second laser beam group 8 directive, spectroscope group 5 described in directive again after described plane of motion catoptron 3 reflects, corresponding interfering with the first laser beam group 7 of interferometry photodetector group 4 described in directive after described spectroscope group 5, form coherence laser beam group, each interfering beam each self-corresponding described interferometry photodetector 41 of directive respectively of coherence laser beam group, described magnetic micro-displacement platform formula ladder planar reflector laser interference instrument also includes reflection measurement photodetector group 6, described reflection measurement photodetector group 6 includes z reflection measurement photodetector 61, described second laser beam group 8 is also formed with reflection lasering beam group 9 after by spectroscope group 5 described in described plane of motion catoptron 3 directive, the described reflection measurement photodetector 61 of directive one of each laser beam difference correspondence of described reflection lasering beam group 9,
Described magnetic micro-displacement platform 10, the gearshift 102 including support platform 101 and be arranged in described support platform 101, described support platform 101 is provided with the first displacement piece 103, described first displacement piece 103 is connected with institute displacement apparatus 102, institute's displacement apparatus 102 drives described first displacement piece 103 to move along described support platform 101, described first displacement piece 103 has an inclined-plane 104 tilted relative to its sense of displacement, the inclined-plane 104 of described first displacement piece 103 slides and is provided with the second displacement piece 105, snug fit between described first displacement piece 103 and the second displacement piece 105, described support platform 101 is also provided with restraint device 106, described restraint device 106 limits described second displacement piece 105 along moving on described first displacement piece 103 sense of displacement, make when the first displacement piece 103 is driven by institute's displacement apparatus 102 and produces displacement, described second displacement piece 105 is driven by described first displacement piece 103 and produces displacement, the sense of displacement of described second displacement piece 105 and the sense of displacement of described first displacement piece 103 perpendicular, the inclined-plane 104 of described first displacement piece 103 is A degree with the angle of its sense of displacement, 0 > A > 45, the magnetic magnetic part 107 of tool is also provided with between described first displacement piece 103 and described support platform 101, described second displacement piece 105 has magnetic, state that described second displacement piece 105 and described magnetic part 107 are that there is a natural attraction between the sexes, described fine motion ladder plane mirror arranges 2 in described second displacement piece 105, move with the second displacement piece 105.
As further preferred version, described spectroscope group 5 includes the first spectroscope 51 and the second spectroscope 52, the z that described lasing light emitter 1 penetrates restraints laser beam and is first mapped to the first spectroscope 51, the first laser beam group 7 is reflected to form through the first spectroscope 51, the second laser beam group 8 is formed through the first spectroscope 51 transmission, fine motion ladder plane mirror 2 described in first laser beam group 7 directive, first spectroscope 51 described in directive again after reflection, and then transmitted through described first spectroscope 51, second spectroscope 52 described in described second laser beam group 8 directive, plane of motion catoptron 3 described in directive after described second spectroscope 52 transmission, the second spectroscope 52 described in directive again after described plane of motion catoptron 3 reflects, the first spectroscope 51 described in directive after described second spectroscope 52 transmission, and interfere with the first laser beam group 7 transmitted from described first spectroscope 51, interferometry photodetector group 4 described in directive after formation coherence laser beam group, also described reflection lasering beam group 9 is reflected to form by described second spectroscope 52 by the described second laser beam group 8 of the second spectroscope 52 described in described plane of motion catoptron 3 directive.
The laser interferometer of the application, because reflection measurement photodetector group 6 can measure the intensity of plane of motion catoptron 3 reflection lasering beam group 9, according to the interference state of the intensity determination laser interference light beam of reflection lasering beam group 9, so realize the object of environment resistant interference;
And, in the present embodiment, fine motion ladder plane mirror 2 is arranged on magnetic micro-displacement platform 10, support platform 101 is arranged gearshift 102 and the first displacement piece 103, gearshift 102 drives the first displacement piece 103 to move, first displacement piece 103 has an inclined-plane 104 tilted relative to its sense of displacement, when gearshift 102 provides certain shift value to drive the first displacement piece 103, due to the existence of restraint device 106, now, second displacement piece 105 will produce certain shift value perpendicular on the first displacement piece 103 sense of displacement, the shift value of the second displacement piece 105 is relevant to the shift value that gearshift 102 provides, also relevant to the inclined degree on the first displacement piece 103 inclined-plane 104, namely, if the inclined-plane of the first displacement piece 103 104 is A degree with the angle of its sense of displacement, when the shift value that gearshift 102 provides is X, the shift value that second displacement piece 105 produces is Y=Xtan (A), the sense of displacement of the second displacement piece 105 and the sense of displacement of the first displacement piece 103 perpendicular, so, when included angle A is less than 45 degree, the shift value that one is less than X value will be obtained, when further reducing included angle A, shift value Y also reduces thereupon, so, make in the scheme of the present embodiment, by changing the mode of precision with stroke, finally obtain the shift value that is less than the second displacement piece 105 of gearshift 102 output displacement value, directly enhance the precision of the present embodiment magnetic micro-displacement platform, also the mobile accuracy of fine motion ladder plane mirror 2 is just directly enhanced, and then improve the measuring accuracy of the application's laser interferometer.
As further preferred version, institute's displacement apparatus 102 is Piezoelectric gearshift.The ceramic material that mechanical energy and electric energy can be changed mutually by piezoelectric ceramics, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, there is good repetitive distortion recovery capability, good stability, precision are high, the X value so making the gearshift 102 of the application can provide enough little, further increases the precision of the application's micro-displacement platform 10, improves the measuring accuracy of the application's laser interferometer.
As further preferred version, described laser interferometer also includes disposal system 11, described disposal system 11 is electrically connected with described interferometry photodetector 4 and reflection measurement photodetector 6, startup and the stopping of described interferometry photodetector 4 and reflection measurement photodetector 6 is controlled by described disposal system 11, and make described interferometry photodetector 4 data and reflection measurement photodetector 6 data be stored in described disposal system 11, described disposal system 11 is also electrically connected with the gearshift 102 of described magnetic micro-displacement platform 10, startup and the stopping of institute's displacement apparatus 102 is controlled by described disposal system 11, described disposal system 11 is also electrically connected with described lasing light emitter 1, startup and the stopping of described lasing light emitter 1 is controlled by described disposal system 11.In this application, by set handling system 11, the data of interferometry photodetector 4 and the data of reflection measurement photodetector 6 are stored, generate nominal data storehouse, compared by the data in real-time data and nominal data storehouse in actual measurement process, and then judge the interference situation of current light path; Disposal system 11 is also electrically connected with the gearshift 102 of magnetic micro-displacement platform 10, according to the output displacement of real-time measurement result command displacement device 102, and then the cooperation control realized fine motion ladder plane mirror 2 position, improve the adaptability of the laser interferometer of the application.
As further preferred version, the laser beam in described lasing light emitter 1, fine motion ladder plane mirror 2, interferometry photodetector group 4, spectroscope group 5, reflection measurement photodetector group 6 between any two is arranged in enclosure space and does not contact with Outdoor Space.In this application, laser beam between any two of lasing light emitter 1, fine motion ladder plane mirror 2, interferometry photodetector group 4, spectroscope group 5 and these parts of reflection measurement photodetector group 6 is arranged in enclosure space, make carrying out in the process measured, laser beam between these parts above-mentioned can't be subject to the impact of environmental factor, and then ensure that the measuring accuracy of the application's laser interferometer.
As further preferred version, the laser beam between described spectroscope group 5 and described plane of motion catoptron 3 is exposed among surrounding air.When reality uses, plane of motion catoptron 3 is arranged on testee, move with testee, so in this application, laser beam between spectroscope group 5 and plane of motion catoptron 3 is exposed among surrounding air, first be make the application's laser interferometer structure simple, also facilitate the layout of the application's laser interferometer simultaneously.
As further preferred version, described second displacement piece 105 is integral type structure with described fine motion ladder plane mirror 2, in this application, second displacement piece 105 and fine motion ladder plane mirror 2 are set to integral structure, that is in the scheme of the application, the one side of the second displacement piece 105 is set to the shape of fine motion ladder plane mirror 2 reflecting surface, and polishing or plated film, making this face form reflecting surface participates in the light path reflection of laser interferometer, so, directly eliminate traditional these parts of fine motion ladder plane mirror 2, also the matching relationship between the second displacement piece 105 and fine motion ladder plane mirror 2 is just eliminated, directly eliminate the existence of mismatch error between the second displacement piece 105 and fine motion ladder plane mirror 2, so, not only facilitate the light path adjustment work of the application's laser interferometer, but also simplify the structure of the application's laser interferometer, reduce manufacturing cost and later stage maintenance cost, particularly also reduce the error amount of the application's laser interferometer inside configuration, further improve the measuring accuracy of the application's laser interferometer.
Embodiment 2: as diagram, a kind of scaling method for magnetic micro-displacement platform formula ladder planar reflector laser interference instrument, comprises the steps:
Step one, position adjustment: the position of adjusting lasing light emitter 1, fine motion ladder plane mirror 2, spectroscope group 5, interferometry photodetector group 4, reflection measurement photodetector group 6, plane of motion catoptron 3 and magnetic micro-displacement platform 10;
Step 2, adjustment light path: start described lasing light emitter 1, the position of further accurate adjustment fine motion ladder plane mirror 2, spectroscope group 5, interferometry photodetector group 4, reflection measurement photodetector group 6, plane of motion catoptron 3 and magnetic micro-displacement platform 10, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: choose an interferometry photodetector 41 in interferometry photodetector group 4 as demarcation interferometry photodetector 41a, choose a reflection measurement photodetector 61 in reflection measurement photodetector group 6 as demarcation reflection measurement photodetector 61a, described demarcation interferometry photodetector 41a is corresponding with same a branch of laser beam that described demarcation reflection measurement photodetector 61a and described lasing light emitter 1 penetrate, described magnetic micro-displacement platform 10 is controlled under the environment of air cleaning, second displacement piece 105 is moved, when the interfering beam demarcating interferometry photodetector 41a described in directive stops described magnetic micro-displacement platform 10 for during the strongest constructive interference, second displacement piece 105 is fixed, record is now demarcated reflection measurement photodetector 61a reading and is demarcated interferometry photodetector 41a reading, changing air ambient makes described demarcation reflection measurement photodetector 61a reading change, record the demarcation interferometry photodetector 41a reading that several demarcate reflection measurement photodetector 61a reading and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
As further preferred version, repeating said steps three, chooses different demarcation reflection measurement photodetector 61a at every turn and demarcates interferometry photodetector 41a, obtains z and the most capable and experiencedly relates to database.
The laser interferometer structure of the application and scaling method, when the strongest constructive interference, change measurement environment, record is demarcated reflection measurement photodetector reading 61a and is demarcated interferometry photodetector 41a reading and forms the most capable and experienced database that relates to, in actual measurement process, if exist when to cause interferometry photodetector group 4 the strongest constructive interference normally can not be detected due to environmental factor, can compare with the most capable and experienced data related in database according to demarcation reflection measurement photodetector 61a reading and demarcation interferometry photodetector 41a reading, if have matched data, then this position is the strongest constructive interference, the laser interferometer of the application is so made to realize the ability of environment resistant interference.
As further preferred version, also include step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform 10, second displacement piece 105 is moved, when the interfering beam demarcating interferometry photodetector 41a described in directive stops described magnetic micro-displacement platform 10 for during the most weak destructive interference, second displacement piece 105 is fixed, record is now demarcated reflection measurement photodetector 61a reading and is demarcated interferometry photodetector 41a reading, changing air ambient makes described demarcation reflection measurement photodetector 61a reading change, record the demarcation interferometry photodetector 41a reading that several demarcate reflection measurement photodetector 61a reading and correspondence simultaneously, obtain the most weak interference data storehouse.
As further preferred version, repeating said steps four, chooses different demarcation reflection measurement photodetector 61a at every turn and demarcates interferometry photodetector 41a, obtain z interference data storehouse the most weak.
As further preferred version, also include step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer, described magnetic micro-displacement platform 10 is controlled under the environment of air cleaning, second displacement piece 105 is moved, when the interfering beam demarcating interferometry photodetector 41a described in directive is for the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record is now demarcated reflection measurement photodetector reading 61a and is demarcated interferometry photodetector 41a reading, then changing air ambient makes described demarcation reflection measurement photodetector 61a reading change, record the demarcation interferometry photodetector 41a reading demarcating reflection measurement photodetector 61a reading and correspondence described in several simultaneously, obtain 1/n wavelength-interferometric database.
When two bundle laser interfere, optical path difference between the strongest adjacent constructive interference and the most weak destructive interference is half wavelength, in the scaling method of the application, to the strongest constructive interference, the most weak destructive interference, 1/n wavelength-interferometric is all demarcated, that is, when adopting the laser interferometer of the application to carry out actual measurement, according to demarcation reflection measurement photodetector 61a reading and interferometry photodetector 41a reading and the most capable and experienced database that relates to can be demarcated, the most weak interference data storehouse, data in 1/n wavelength-interferometric database are compared, determine that this position is the strongest constructive interference according to the match condition of data, the most weak destructive interference or 1/n wavelength-interferometric.The laser interferometer of the application environment resistant can not only be disturbed, but also improve measuring accuracy.
As further preferred version, repeating said steps five, chooses different demarcation reflection measurement photodetector 61a at every turn and demarcates interferometry photodetector 41a, obtain z 1/n wavelength-interferometric database.
Implement 3: as diagram, a kind of measuring method adopting magnetic micro-displacement platform formula ladder planar reflector laser interference instrument and scaling method:
In actual measurement environment, if the signal reading that described demarcation reflection measurement photodetector 61a measures is x, the signal reading that described demarcation interferometry photodetector 41a measurement obtains is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
The measuring method of the application, determines the interference situation of current interfering beam by x value and y value, realize the ability of environment resistant interference, also improve measuring accuracy simultaneously with this.
As further preferred version, the matching threshold Δ of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to measured interference light electric explorer in 1/n wavelength-interferometric database is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to reflection measurement photodetector 61a in 1/n wavelength-interferometric database is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
As further preferred version, the size of described matching threshold Δ ensures when carrying out data query, when meeting | during y-y'|< Δ, y ' is unique value.When matching threshold Δ is larger, may occur that one group of x value and y value match two groups or organize x ' value and y ' value more, make troubles to measurement, so first matching threshold Δ, make one group of x value and y value coupling one group of x ' value and y ' value at most in measuring process, be convenient for measuring.
As further preferred version, the size of described matching threshold Δ sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopts less matching threshold, when not needing high-acruracy survey value, adopts larger matching threshold.
As further preferred version, if Δ=5%.
In the measuring method of the application, by arranging matching threshold Δ, needing according to Surveying Actual Precision the size that matching threshold Δ is set, being convenient for measuring in process with this, the match selection of data, reduce and measure difficulty.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (10)
1. a magnetic micro-displacement platform formula ladder planar reflector laser interference instrument, include lasing light emitter, fine motion ladder plane mirror, interferometry photodetector group, plane of motion catoptron, spectroscope group and magnetic micro-displacement platform, described fine motion ladder plane mirror is arranged on described magnetic micro-displacement platform, described lasing light emitter restraints laser beam to described spectroscope group injection z, wherein z be greater than or equal to 2 positive integer, described interferometry photodetector group includes z interferometry photodetector, each interferometry photodetector is corresponding with beam of laser bundle, the reflecting surface of described fine motion ladder plane mirror includes z the plane of reflection, z the described plane of reflection is that notch cuttype is arranged, each plane of reflection is corresponding with beam of laser bundle, each laser beam is divided into the first laser beam group and the second laser beam group after described spectroscope group, fine motion ladder plane mirror described in described first laser beam group directive, spectroscope group described in directive again after the reflection of described fine motion ladder plane mirror, interferometry photodetector group described in directive after described spectroscope group again, plane of motion catoptron described in described second laser beam group directive, spectroscope group described in directive again after the reflection of described plane of motion catoptron, corresponding interfering with the first laser beam group of interferometry photodetector group described in directive after described spectroscope group, form coherence laser beam group, each interfering beam each self-corresponding described interferometry photodetector of directive respectively of coherence laser beam group, it is characterized in that, described magnetic micro-displacement platform formula ladder planar reflector laser interference instrument also includes reflection measurement photodetector group, described reflection measurement photodetector group includes z reflection measurement photodetector, described second laser beam group is also formed with reflection lasering beam group after by spectroscope group described in described plane of motion catoptron directive, the described reflection measurement photodetector of directive one of each laser beam difference correspondence of described reflection lasering beam group,
Described magnetic micro-displacement platform, include support platform and be arranged on the gearshift in described support platform, described support platform is provided with the first displacement piece, described first displacement piece is connected with institute displacement apparatus, institute's displacement apparatus drives described first displacement piece to move along described support platform, described first displacement piece has an inclined-plane tilted relative to its sense of displacement, the inclined-plane of described first displacement piece slides and is provided with the second displacement piece, snug fit between described first displacement piece and the second displacement piece, described support platform is also provided with restraint device, described second displacement piece of described restraint device restriction is along moving on described first displacement piece sense of displacement, make when the first displacement piece is driven by institute's displacement apparatus and produces displacement, described second displacement piece is driven by described first displacement piece and produces displacement, the sense of displacement of described second displacement piece and the sense of displacement of described first displacement piece perpendicular, the inclined-plane of described first displacement piece and the angle of its sense of displacement are A degree, 0 > A > 45, the magnetic magnetic part of tool is also provided with between described first displacement piece and described support platform, described second displacement piece has magnetic, state that described second displacement piece and described magnetic part are that there is a natural attraction between the sexes, described fine motion ladder plane mirror is arranged in described second displacement piece, with the second displacement piece motion.
2. magnetic micro-displacement platform formula ladder planar reflector laser interference instrument as claimed in claim 1, it is characterized in that, described spectroscope group includes the first spectroscope and the second spectroscope, the z of described lasing light emitter injection restraints laser beam and is first mapped to the first spectroscope, the first laser beam group is formed through the first dichroic mirror, the second laser beam group is formed through the first spectroscope transmission, fine motion ladder plane mirror described in first laser beam group directive, first spectroscope described in directive again after reflection, and then transmitted through described first spectroscope, second spectroscope described in described second laser beam group directive, plane of motion catoptron described in directive after described second spectroscope transmission, the second spectroscope described in directive again after the reflection of described plane of motion catoptron, the first spectroscope described in directive after described second spectroscope transmission, and interfere with the first laser beam group of interferometry photodetector group described in directive, interferometry photodetector group described in directive after formation coherence laser beam group, also described reflection lasering beam group is formed by described second dichroic mirror by second spectroscopical described second laser beam group described in described plane of motion catoptron directive.
3., for a scaling method for the magnetic micro-displacement platform formula ladder planar reflector laser interference instrument described in claim 1 or 2 any one, it is characterized in that, comprise the steps:
Step one, position adjustment: the position of adjusting lasing light emitter, fine motion ladder plane mirror, spectroscope group, interferometry photodetector group, reflection measurement photodetector group, plane of motion catoptron and magnetic micro-displacement platform;
Step 2, adjustment light path: start described lasing light emitter, the position of further accurate adjustment fine motion ladder plane mirror, spectroscope group, interferometry photodetector group, reflection measurement photodetector group, plane of motion catoptron and magnetic micro-displacement platform, makes the light path of laser interferometer reach designing requirement;
Step 3, generate and the most capable and experiencedly relate to database: choose an interferometry photodetector in interferometry photodetector group as demarcation interferometry photodetector, choose a reflection measurement photodetector in reflection measurement photodetector group as demarcation reflection measurement photodetector, described demarcation interferometry photodetector is corresponding with same a branch of laser beam that described lasing light emitter penetrates with described demarcation reflection measurement photodetector, described magnetic micro-displacement platform is controlled under the environment of air cleaning, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the strongest constructive interference, second displacement piece is fixed, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading that several demarcate reflection measurement photodetector reading and correspondence simultaneously, obtain the most capable and experiencedly relating to database.
4. scaling method as claimed in claim 3, it is characterized in that, also include step 4, generate the most weak interference data storehouse: under the environment of air cleaning, control described magnetic micro-displacement platform, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive stops described magnetic micro-displacement platform for during the most weak destructive interference, second displacement piece is fixed, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading that several demarcate reflection measurement photodetector reading and correspondence simultaneously, obtain the most weak interference data storehouse.
5. scaling method as claimed in claim 4, it is characterized in that, also include step 5, generate 1/n wavelength-interferometric database, n be greater than or etc. 2 positive integer, described magnetic micro-displacement platform is controlled under the environment of air cleaning, second displacement piece is moved, when the interfering beam demarcating interferometry photodetector described in directive is for the strongest constructive interference, continue the distance of mobile 1/2n wavelength again, record is now demarcated reflection measurement photodetector reading and is demarcated interferometry photodetector reading, then changing air ambient makes described demarcation reflection measurement photodetector reading change, record the demarcation interferometry photodetector reading demarcating reflection measurement photodetector reading and correspondence described in several simultaneously, obtain 1/n wavelength-interferometric database.
6. the measuring method adopting the magnetic micro-displacement platform formula ladder planar reflector laser interference instrument described in claim 1 or 2 any one and adopt scaling method according to claim 5, it is characterized in that, in actual measurement environment, if the signal reading that described demarcation reflection measurement photodetector measures is x, the signal reading that the measurement of described demarcation interferometry photodetector obtains is y, by x value and y value at the most capable and experienced database that relates to, the most weak interference data storehouse, compare in 1/n wavelength-interferometric database, when x value and y value match with the most capable and experienced a certain class value related in database, then think that this position is the strongest constructive interference position, when x value and y value match with a certain class value in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, when a certain class value in x value and y value and 1/n wavelength-interferometric database matches, then think that this position is 1/n wavelength-interferometric position.
7. measuring method as claimed in claim 6, it is characterized in that, the matching threshold Δ of setting y value, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to measured interference light electric explorer in 1/n wavelength-interferometric database is y ', according to x value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out the inquiry of y ', if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
8. measuring method as claimed in claim 7, it is characterized in that, database is related to if the most capable and experienced, the most weak interference data storehouse, demarcating numerical value corresponding to reflection measurement photodetector in 1/n wavelength-interferometric database is x ', in actual measurement, select closest to the x ' of actual measured value x as matching value, according to x ' value to the most capable and experienced database that relates to, the most weak interference data storehouse, 1/n wavelength-interferometric database carries out y ' to be inquired about, if there is y ' to make | y-y'|< Δ, distinguish the database at y ' place again, if y ' relates in database the most capable and experienced, then think that this position is the strongest constructive interference position, if y ' is in the most weak interference data storehouse, then think that this position is the most weak destructive interference position, if y ' is in 1/n wavelength-interferometric database, then think that this position is 1/n wavelength-interferometric position.
9. measuring method as claimed in claim 7 or 8, it is characterized in that, the size of described matching threshold Δ ensures when carrying out data query, when meeting | during y-y'|< Δ, y ' is unique value.
10. measuring method as claimed in claim 9, it is characterized in that, the size of described matching threshold Δ sets according to the accuracy requirement of actual measurement, when the high-precision measured value of needs, adopting less matching threshold, when not needing high-acruracy survey value, adopting larger matching threshold.
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