CN104848782B - A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method - Google Patents
A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method Download PDFInfo
- Publication number
- CN104848782B CN104848782B CN201510287713.5A CN201510287713A CN104848782B CN 104848782 B CN104848782 B CN 104848782B CN 201510287713 A CN201510287713 A CN 201510287713A CN 104848782 B CN104848782 B CN 104848782B
- Authority
- CN
- China
- Prior art keywords
- group
- photodetector
- interference
- laser beam
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000033001 locomotion Effects 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000005259 measurement Methods 0.000 claims abstract description 123
- 238000005305 interferometry Methods 0.000 claims abstract description 86
- 230000001066 destructive effect Effects 0.000 claims description 16
- 230000002452 interceptive effect Effects 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000013461 design Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 238000004556 laser interferometry Methods 0.000 description 3
- 230000005622 photoelectricity Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method, contrast anti-interference fine motion cascade ladder corner reflector laser interferometer, include lasing light emitter, fine motion ladder corner reflection microscope group, interferometry photodetector group, mobile corner reflector and light splitting microscope group, also include reflection measurement photodetector group, the reflection measurement photodetector group includes z reflection measurement photodetector, the second laser beam group is also formed with reflection laser beam group after the light splitting microscope group as described in the mobile corner reflector directive, each laser beam difference reflection measurement photodetector of directive one of the reflection laser beam group.The laser interferometer of the application, the intensity according to reflection laser beam group determines the interference state of laser interference light beam, so realizes the purpose of environment resistant interference.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of contrast anti-interference fine motion cascade
Ladder corner reflector laser interferometer and scaling method and measuring method.
Background technology
The appearance of laser, is developed rapidly ancient interference technique, and laser has brightness high, good directionality, list
The features such as color and good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The measurement such as linear scale, grating, gauge block, the detection of precision lead screw of accurate length, angle；Detection and localization in precision instrument
The control of system such as precision optical machinery, correction；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..At present, in most of laser interference length-measuring systems, Michelson's interferometer or similar is all employed
Light channel structure, such as, and the single frequency laser interferometer commonly used at present.
Single frequency laser interferometer is the light beam sent from laser, is divided into two-way by spectroscope after beam-expanding collimation, and divide
Congregation is not reflected from stationary mirror and moving reflector produce interference fringe on spectroscope.When moving reflector is moved
When dynamic, the light intensity change of interference fringe is converted to electric impulse signal by photo-electric conversion element and electronic circuit in receiver etc.,
Forward-backward counter is input into after shaped, amplification and calculates overall pulse number N, then calculating formula L=N × λ/2, formula are pressed by electronic computer
Middle λ is optical maser wavelength, calculates the displacement L of moving reflector.
In actual use, inventors herein have recognized that, above-mentioned measurement structure and measuring method are still existed not
Foot：
Also there is affected by environment serious, laser interferometer moveable mirror shifting in current single frequency laser interferometer
When dynamic, the light intensity change of interference fringe is converted to electric impulse signal by photo-electric conversion element and electronic circuit in receiver etc.,
When for most strong constructive interference, the triggering level that signal exceedes counter is recorded, if environment changes, such as empty
Gas turbulent flow, impurity increases in air, lathe mist of oil, influence of cutting swarf during processing to laser beam so that the intensity of laser beam
Reduce, now, even there is most strong constructive interference, it is also possible to which intensity is less than the triggering level of counter without being counted.
So, based on above-mentioned deficiency, need badly at present it is a kind of i.e. can environment resistant interference, swashing for certainty of measurement can be improved again
Optical interferometer.
The content of the invention
Deficiency it is an object of the invention to be directed to current laser interferometer environment resistant interference performance difference, there is provided one kind can
The laser interferometer of environment resistant interference.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer, includes lasing light emitter, fine motion ladder
Corner reflection microscope group, interferometry photodetector group, mobile corner reflector, light splitting microscope group and micromotion platform, the fine motion ladder
Corner reflection microscope group includes m fine motion ladder corner reflector and m-1 fixed corner reflector, m>2, m fine motion ladder angles
Speculum is arranged on the micromotion platform；
The lasing light emitter projects z beam laser beams to the light splitting microscope group, and wherein z is the positive integer more than or equal to 2, institute
State interferometry photodetector group and include z interferometry photodetector, each interferometry photodetector with
One laser beam is corresponding；
Each laser beam is divided into first laser beam group and second laser beam group, the first laser beam after the light splitting microscope group
Fine motion ladder corner reflection microscope group described in group directive, spectroscope described in directive again after being reflected through the fine motion ladder corner reflection microscope group
Group, then the interferometry photodetector group described in directive after the light splitting microscope group, shifting described in the second laser beam group directive
Dynamic corner reflector, light splitting microscope group described in directive again after being reflected through the mobile corner reflector is relative after the light splitting microscope group
That answers interferes with the first laser beam group of interferometry photodetector group described in directive, forms coherence laser beam group, does
Relate to each interfering beam difference each self-corresponding interferometry photodetector of directive of laser beam group；
The fine motion ladder corner reflection microscope group includes two fine motion ladder corner reflectors and a fixed corner reflector, often
Individual fine motion ladder corner reflector has two reflective steps faces at a right angle, and each described reflective steps face includes z into ladder
The plane of reflection of type, when first laser beam group injects the fine motion ladder corner reflection microscope group, is first mapped to one of fine motion ladder
On one reflective steps face of corner reflector, the z beams laser of first laser beam group and the z plane of reflection one in the reflective steps face
One correspondence, is mapped on another reflective steps face of the fine motion ladder corner reflector after being reflected through the reflective steps face, reflected
Corner reflector is fixed described in directive again afterwards, another fine motion ladder corner reflector of directive, warp again after being reflected through fixed corner reflector
After fine motion ladder corner reflector reflection, then light splitting microscope group described in directive；
The contrast anti-interference fine motion cascade ladder corner reflector laser interferometer also includes reflection measurement light electrical resistivity survey
Device group is surveyed, the reflection measurement photodetector group includes z reflection measurement photodetector, and the second laser beam group exists
Be also formed with reflection laser beam group after the light splitting microscope group as described in the mobile corner reflector directive, the reflection laser beam group it is each
Laser beam distinguishes the reflection measurement photodetector of directive one.
Used as further preferred scheme, the light splitting microscope group includes the first spectroscope and the second spectroscope, described to swash
The z beams laser beam that light source is projected first is mapped to the first spectroscope, first laser beam group is formed through the first dichroic mirror, through first point
Light microscopic transmits to form second laser beam group, fine motion ladder corner reflection microscope group described in first laser beam group directive, after reflection again
First spectroscope described in directive, then again transmitted through first spectroscope, traveling angle described in the second laser beam group directive
Speculum, the second spectroscope described in directive after being reflected through the mobile corner reflector, directive after being transmitted through second spectroscope
First spectroscope, and interfered with the first laser beam group transmitted from first spectroscope, form interference and swash
Interferometry photodetector group described in directive after light beam group, second spectroscopical institute as described in the mobile corner reflector directive
State second laser beam group and the reflection laser beam group is also formed by second dichroic mirror.
The laser interferometer of the application, swashs because reflection measurement photodetector group can measure mobile corner reflector reflection
The intensity of light beam group, the intensity according to reflection laser beam group determines the interference state of laser interference light beam, so realizes environment resistant
The purpose of interference.
As further preferred scheme, in the lasing light emitter, fine motion ladder corner reflection microscope group, interferometry photodetection
Laser beam in device group, light splitting microscope group, reflection measurement photodetector group between any two be arranged in closing space without
Contacted with Outdoor Space.In this application, lasing light emitter, fine motion ladder corner reflection microscope group, interferometry photodetector group,
Laser beam between light splitting microscope group and reflection measurement photodetector group these part any twos is arranged in closing space, is made
Obtain during measuring, the laser beam between above-mentioned these parts can't be effected by environmental factors, Jin Erbao
The certainty of measurement of the application laser interferometer is demonstrate,proved.
Used as further preferred scheme, the laser beam between the light splitting microscope group and the mobile corner reflector is exposed to
Among surrounding air.When actually used, mobile corner reflector is arranged on testee, is moved with testee, so
In the application, by the laser beam between light splitting microscope group and mobile corner reflector among surrounding air, this is so that first
Application laser interferometer simple structure, while also facilitating the arrangement of the application laser interferometer.
Disclosed herein as well is a kind of scaling method for above-mentioned laser interferometer structure,
A kind of scaling method that ladder corner reflector laser interferometer is cascaded for contrast anti-interference fine motion, including it is following
Step：
Step one, position adjustment：Adjust lasing light emitter, fine motion ladder corner reflection microscope group, light splitting microscope group, interferometry photoelectricity
The position of detector group, reflection measurement photodetector group, mobile corner reflector and micromotion platform；
Step 2, adjustment light path：Start the lasing light emitter, further accurate adjustment fine motion ladder corner reflection microscope group, light splitting
The position of microscope group, interferometry photodetector group, reflection measurement photodetector group, mobile corner reflector and micromotion platform,
The light path of laser interferometer is set to reach design requirement；
Step 3, generate and most capable and experienced relate to database：Choose a measured interference light in interferometry photodetector group
Electric explorer chooses a reflection measurement light in reflection measurement photodetector group as interferometry photodetector is demarcated
Electric explorer demarcates reflection survey as reflection measurement photodetector, the demarcation interferometry photodetector is demarcated with described
Amount photodetector is corresponding with the same one laser beam that the lasing light emitter is projected, and is controlled in the environment of air cleaning described micro-
Moving platform is moved, and fixes described when the interfering beam that interferometry photodetector is demarcated described in directive is most strong constructive interference
Micromotion platform, record now demarcates reflection measurement photodetector reading and demarcates interferometry photodetector reading, changes
Air ambient changes the demarcation reflection measurement photodetector reading, while recording several demarcates reflection measurement light electrical resistivity survey
Device reading and corresponding demarcation interferometry photodetector reading are surveyed, obtains most capable and experienced relating to database.
Used as further preferred scheme, repeating said steps three choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device and demarcate interferometry photodetector, obtain that z is most capable and experienced to relate to database.Due to step 3 is repeated, z is obtained most
Capable and experienced to relate to database, the quantity of direct increased database is more favorable for the matching inquiry of data in detection process, also, real
Existing multiwavelength laser source, fine motion ladder corner reflection microscope group and z most it is capable and experienced relate to database between mutual collaboration, improve laser and do
The certainty of measurement of interferometer.
The laser interferometer structure and scaling method of the application, in most strong constructive interference, change measuring environment, record
Demarcation reflection measurement photodetector reading is most capable and experienced with the reading formation of demarcation interferometry photodetector to relate to database, in reality
In the measurement process of border, can not normally be detected most if there is interferometry photodetector group is caused due to environmental factor
During strong constructive interference, can according to demarcate reflection measurement photodetector reading and demarcate interferometry photodetector reading and
The most capable and experienced data related in database are compared, and if there is there is matched data, then the position is most strong constructive interference, so
So that the laser interferometer of the application realizes the ability of environment resistant interference.
As further preferred scheme, also include step 4, generate most weak interference data storehouse：In the ring of air cleaning
The micromotion platform is controlled to move under border, when the interfering beam that interferometry photodetector is demarcated described in directive is most weak cancellation
The micromotion platform is fixed during interference, record now demarcates reflection measurement photodetector reading and demarcates measured interference light electrical resistivity survey
Device reading is surveyed, changing air ambient changes the demarcation reflection measurement photodetector reading, while recording several demarcation
Reflection measurement photodetector reading and corresponding demarcation interferometry photodetector reading, obtain most weak interference data
Storehouse.
Used as further preferred scheme, repeating said steps four choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device and demarcate interferometry photodetector, obtain z most weak interference data storehouse.
As further preferred scheme, also include step 5, generation 1/n wavelength-interferometric databases, n be more than or wait
2 positive integer, controls the micromotion platform to move in the environment of air cleaning, when demarcation measured interference light electrical resistivity survey described in directive
When the interfering beam for surveying device is most strong constructive interference, it is further continued for moving the distance of 1/2mn wavelength, record now demarcates reflection measurement
Photodetector reading and demarcation interferometry photodetector reading, then changing air ambient makes the demarcation reflection measurement
Photodetector reading changes, while recording several demarcation reflection measurement photodetector reading and corresponding demarcation
Interferometry photodetector reading, obtains 1/n wavelength-interferometric databases.
When two beam laser are interfered, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, is all marked to most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics
It is fixed, that is to say, that when actual measurement is carried out using the laser interferometer of the application, can be according to demarcation reflection measurement light electrical resistivity survey
Survey device reading and to demarcate interferometry photodetector reading dry with most capable and experienced database, most weak interference data storehouse, the 1/n wavelength of relating to
The data related in database are compared, and the match condition according to data determines that the position is most strong constructive interference, most weak cancellation
Interference or 1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, and also improve measurement
Precision.
Used as further preferred scheme, repeating said steps five choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device and demarcate interferometry photodetector, obtain z 1/n wavelength-interferometric database.
The invention also discloses a kind of use above-mentioned interference instrument and the measuring method of scaling method,
A kind of measurement side that ladder corner reflector laser interferometer and scaling method are cascaded using contrast anti-interference fine motion
Method：
It is described if the signal reading that the demarcation reflection measurement photodetector is measured is x in actual measuring environment
The signal reading that obtains of interferometry photodetector measurement is demarcated for y, x values and y values are related to database, most weak done most capable and experienced
Relate to and compare in database, 1/n wavelength-interferometric databases, when x values and y values with most it is capable and experienced relate to database in a certain class value phase
Matching, then it is assumed that this position is most strong constructive interference position, a certain class value phase in x values and y values with most weak interference data storehouse
Matching, then it is assumed that this position is most weak destructive interference position, a certain class value in x values and y values and 1/n wavelength-interferometric databases
Match, then it is assumed that this position is 1/n wavelength-interferometrics position.
The measuring method of the application, the interference situation of current interfering beam is determined by x values and y values, and anti-ring is realized with this
The ability of border interference, while also improving certainty of measurement.
As further preferred scheme, the matching threshold △ of y values is set, if most capable and experienced relate to database, most weak interference number
It is y ' according to the corresponding numerical value of measured interference light electric explorer is demarcated in storehouse, 1/n wavelength-interferometric databases, according to x values to most capable and experienced
Relating to database, most weak interference data storehouse, 1/n wavelength-interferometrics database carries out the inquiry of y ', makes if there is y ' | y-y'|<△,
Database where repartitioning y ', if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position,
If y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric numbers
According in storehouse, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
It is x ' that the corresponding numerical value of reflection measurement photodetector is demarcated in storehouse, in actually measurement, is selected closest to actual measured value x's
X ' carries out y ' as matching value according to x ' values to the most capable and experienced database, most weak interference data storehouse, 1/n wavelength-interferometrics database of relating to
Inquired about, made if there is y ' | y-y'|<△, the database where repartitioning y ', if y ' is related in database most capable and experienced,
This position is then thought for most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak phase
Disappear interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
Used as further preferred scheme, the size of the matching threshold △ ensures, when data query is carried out, to work as satisfaction |
y-y'|<During △, y ' is unique value.When matching threshold △ is larger, it is possible that one group of x value and y values match two groups or
Multigroup x ' values and y ' values, make troubles to measurement, so first matching threshold △, makes one group of x value and y values in measurement process most
One group of x ' value and y ' values are matched, is convenient for measuring.
Used as further preferred scheme, the size of the matching threshold △ is set according to the required precision of actual measurement
It is fixed, when high-precision measured value is needed, using less matching threshold, when high-acruracy survey value is not needed, using larger
Matching threshold.
As further preferred scheme, if △=5%.
In the measuring method of the application, by setting matching threshold △, according to setting the need for Surveying Actual Precision
Size with threshold value △, during being convenient for measuring with this, the match selection of data reduces measurement difficulty.
Compared with prior art, beneficial effects of the present invention：
The contrast anti-interference fine motion cascade ladder corner reflector laser interferometer of the application, first by setting light more
Beam, fine motion ladder corner reflection microscope group and corner reflector improve the certainty of measurement of laser interferometer, while being surveyed by setting reflection
Amount photodetector, after laser interferometry environment changes, can enter by mobile corner reflector reflection laser intensity
Row measurement, laser interference state is no longer directly determined by the signal magnitude of interferometry photodetector group, but is surveyed by reflection
Amount photodetector is together decided on interferometry photodetector group, so realizes the antijamming capability of laser interferometer.
The beneficial effect of the application other embodiments：
The laser interferometer of the application, can not only determine the position of most strong constructive interference, but also can determine most weak
The position and 1/n wavelength-interferometrics position of destructive interference, make the application laser interferometer can not only environment resistant disturb, but also
Improve certainty of measurement；Also, the measuring method of the application, scaling method, multi-beam laser source, fine motion ladder corner reflection microscope group
Between cooperate, further improve the certainty of measurement of the application laser interferometer.
Brief description of the drawings：
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention；
Fig. 2 is to move structural representation when corner reflector is moved,
Marked in figure：
1- lasing light emitters, 2- fine motion ladder corner reflection microscope groups, 3- movement corner reflectors, 4- interferometry photodetector groups,
5- light splitting microscope groups, 6- reflection measurement photodetector groups, 7- first laser beam groups, 8- second laser beam groups, 9- reflection laser beams
Group, 10- micromotion platforms, 21- fine motion ladder corner reflectors, 22- fixes corner reflector, 41- interferometry photodetectors, 41a-
Demarcate interferometry photodetector, the spectroscopes of 51- first, the spectroscopes of 52- second, 61- reflection measurement photodetectors, 61a-
Demarcate reflection measurement photodetector.
Specific embodiment
With reference to test example and specific embodiment, the present invention is described in further detail.But this should not be understood
For the scope of above-mentioned theme of the invention is only limitted to following embodiment, all technologies realized based on present invention belong to this
The scope of invention.
Embodiment 1, as illustrated, a kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer, including
There are lasing light emitter 1, fine motion ladder corner reflection microscope group 2, interferometry photodetector group 4, mobile corner reflector 3, the and of light splitting microscope group 5
Micromotion platform 10, the fine motion ladder corner reflection microscope group 2 includes two fine motion ladder corner reflectors 21 and a fixed angles are anti-
Mirror 22 is penetrated, two fine motion ladder corner reflectors 21 are arranged on the micromotion platform 10；
The lasing light emitter 1 projects z beam laser beams to the light splitting microscope group 5, and wherein z is the positive integer more than or equal to 2,
The interferometry photodetector group 4 includes z interferometry photodetector, each interferometry photodetector
41 is corresponding with one laser beam；
Each laser beam is divided into first laser beam group 7 and second laser beam group 8 after the light splitting microscope group 5, and described first swashs
Fine motion ladder corner reflection microscope group 2 described in the directive of light beam group 7, directive institute again after being reflected through the fine motion ladder corner reflection microscope group 2
State light splitting microscope group 5, then interferometry photodetector group 4 described in directive, the second laser beam group after the light splitting microscope group 5
Mobile corner reflector 3 described in 8 directives, light splitting microscope group 5 described in directive again after being reflected through the mobile corner reflector 3, through described
It is corresponding after light splitting microscope group 5 to be interfered with the first laser beam group 7 of interferometry photodetector group 4 described in directive, shape
Into coherence laser beam group, each interfering beam difference each self-corresponding interferometry photodetection of directive of coherence laser beam group
Device 41；
The fine motion ladder corner reflection microscope group 2 includes two fine motion ladder corner reflectors 21 and a fixed corner reflector
22, each fine motion ladder corner reflector 21 has two reflective steps faces at a right angle, and each described reflective steps face includes z
Into the stepped plane of reflection, when first laser beam group 7 injects the fine motion ladder corner reflection microscope group 2, one of them is first mapped to
On one reflective steps face of fine motion ladder corner reflector 21, the z beams laser of first laser beam group is individual with the z in the reflective steps face
The plane of reflection is corresponded, and another reflective steps face of the fine motion ladder corner reflector is mapped to after being reflected through the reflective steps face
On, fix corner reflector 22 described in directive again after reflection, another fine motion rank of directive again after being reflected through fixed corner reflector 22
Terraced corner reflector 21, after being reflected through the fine motion ladder corner reflector 21, then light splitting microscope group 5 described in directive；
The contrast anti-interference fine motion cascade ladder corner reflector laser interferometer also includes reflection measurement light electrical resistivity survey
Device group 6 is surveyed, the reflection measurement photodetector group 6 includes z reflection measurement photodetector 61, the second laser beam
Group 8 is also formed with reflection laser beam group 9, the reflection laser after the light splitting microscope group 5 as described in the directive of mobile corner reflector 3
Each laser beam difference reflection measurement photodetector 61 of directive one of beam group 9.
Used as further preferred scheme, the light splitting microscope group 5 includes the first spectroscope 51 and the second spectroscope 52, institute
The z beams laser beam for stating the injection of lasing light emitter 1 is first mapped to the first spectroscope 51, and first laser beam group is reflected to form through the first spectroscope 51
7, second laser beam group 8 is formed through the transmission of the first spectroscope 51, fine motion ladder corner reflection microscope group described in the directive of first laser beam group 7
2, the first spectroscope 51 described in directive again after reflection, then again transmitted through first spectroscope 51, the second laser
Mobile corner reflector 3, the second spectroscope 52 described in directive after being reflected through the mobile corner reflector 3, through institute described in the directive of beam group 8
State the second spectroscope 52 transmit after the first spectroscope 51 described in directive, and with first transmitted from first spectroscope 51
Laser beam group 7 is interfered, and interferometry photodetector group 4 described in directive after coherence laser beam group is formed, by the movement
The second laser beam group 8 of the second spectroscope 52 described in the directive of corner reflector 3 is also reflected to form by second spectroscope 52
The reflection laser beam group 9.
The laser interferometer of the application, reflects because reflection measurement photodetector group 6 can measure mobile corner reflector 3
The intensity of laser beam group 9, the intensity according to reflection laser beam group 9 determines the interference state of laser interference light beam, so realizes anti-
The purpose of environmental disturbances.
As further preferred scheme, in the lasing light emitter 1, fine motion ladder corner reflection microscope group 2, measured interference light electrical resistivity survey
The laser beam in device group 4, light splitting microscope group 5, reflection measurement photodetector group 6 between any two is surveyed to be arranged in closing space
Without being contacted with Outdoor Space.In this application, lasing light emitter 1, fine motion ladder corner reflection microscope group 2, measured interference light electrical resistivity survey
The laser beam surveyed between device group 4, light splitting microscope group 5 and reflection measurement photodetector group 6 these part any twos is arranged on envelope
Close in space so that during measuring, the laser beam between above-mentioned these parts can't be subject to environmental factor
Influence, and then ensure that the certainty of measurement of the application laser interferometer.
As further preferred scheme, the laser beam exposure between the light splitting microscope group 5 and the mobile corner reflector 3
Among surrounding air.When actually used, mobile corner reflector 3 is arranged on testee, is moved with testee, so
In this application, the laser beam between light splitting microscope group 5 and mobile corner reflector 3 is made first among surrounding air
The application laser interferometer simple structure is obtained, while also facilitating the arrangement of the application laser interferometer.
Embodiment 2, as illustrated, a kind of cascade ladder corner reflector laser interferometer for contrast anti-interference fine motion
Scaling method, comprises the steps：
Step one, position adjustment：Adjust lasing light emitter 1, fine motion ladder corner reflection microscope group 2, light splitting microscope group 5, interferometry
The position of photodetector group 4, reflection measurement photodetector group 6, mobile corner reflector 3 and micromotion platform 10；
Step 2, adjustment light path：Start the lasing light emitter 1, it is further accurate to adjust fine motion ladder corner reflection microscope group 2, divide
Light microscope group 5, interferometry photodetector group 4, reflection measurement photodetector group 6, mobile corner reflector 3 and micromotion platform
Position, makes the light path of laser interferometer reach design requirement；
Step 3, generate and most capable and experienced relate to database：Choose a measured interference light in interferometry photodetector group 4
Electric explorer 41 chooses a reflection in reflection measurement photodetector group 6 as interferometry photodetector 41a is demarcated
Measurement photodetector 61 as demarcate reflection measurement photodetector 61a, the demarcation interferometry photodetector 41a with
The demarcation reflection measurement photodetector 61a is corresponding with the same one laser beam that the lasing light emitter 1 is projected, in air cleaning
In the environment of control the micromotion platform 10 to move, when the interfering beam that interferometry photodetector 41a is demarcated described in directive
The micromotion platform 10 is fixed during for most strong constructive interference, record now demarcates reflection measurement photodetector 61a readings and mark
Determine interferometry photodetector 41a readings, changing air ambient becomes the demarcation reflection measurement photodetector 61a readings
Change, while recording several demarcates reflection measurement photodetector 61a readings and corresponding demarcation interferometry photodetection
Device 41a readings, obtain most capable and experienced relating to database.
Used as further preferred scheme, repeating said steps three choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device 61a and demarcate interferometry photodetector 41a, obtain that z is most capable and experienced to relate to database.
The laser interferometer structure and scaling method of the application, in most strong constructive interference, change measuring environment, record
Demarcate reflection measurement photodetector reading 61a and demarcate interferometry photodetector 41a readings and form most strong interference data
Storehouse, in actual measurement process, if there is causing the interferometry photodetector group 4 can not be normal due to environmental factor
When detecting most strong constructive interference, according to demarcation reflection measurement photodetector 61a readings and interferometry photoelectricity can be demarcated
Detector 41a readings relate to the data in database and compare with most capable and experienced, and if there is there is matched data, then the position is for most
Strong constructive interference, so that the laser interferometer of the application realizes the ability of environment resistant interference.
As further preferred scheme, also include step 4, generate most weak interference data storehouse：In the ring of air cleaning
The micromotion platform 10 is controlled to move under border, when the interfering beam that interferometry photodetector 41a is demarcated described in directive is most
The micromotion platform 10 is fixed during weak destructive interference, record now demarcates reflection measurement photodetector 61a readings and demarcates dry
Measurement photodetector 41a readings are related to, changing air ambient changes the demarcation reflection measurement photodetector 61a readings,
Several are recorded simultaneously demarcates reflection measurement photodetector 61a readings and corresponding demarcation interferometry photodetector
41a readings, obtain most weak interference data storehouse.
Used as further preferred scheme, repeating said steps four choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device 61a and demarcate interferometry photodetector 41a, obtain z most weak interference data storehouse.
As further preferred scheme, also include step 5, generation 1/n wavelength-interferometric databases, n be more than or wait
2 positive integer, controls the micromotion platform 10 to move in the environment of air cleaning, when demarcation interferometry photoelectricity described in directive
When the interfering beam of detector 41a is most strong constructive interference, it is further continued for moving the distance of 1/2mn wavelength, record is now demarcated anti-
Penetrate measurement photodetector reading 61a and demarcate interferometry photodetector 41a readings, then change air ambient makes described
The change of reflection measurement photodetector 61a readings is demarcated, while recording several demarcation reflection measurement photodetector 61a
Reading and corresponding demarcation interferometry photodetector 41a readings, obtain 1/n wavelength-interferometric databases.
When two beam laser are interfered, the optical path difference between adjacent most strong constructive interference and most weak destructive interference is half
Individual wavelength, in the scaling method of the application, is all marked to most strong constructive interference, most weak destructive interference, 1/n wavelength-interferometrics
It is fixed, that is to say, that when actual measurement is carried out using the laser interferometer of the application, can be according to demarcation reflection measurement light electrical resistivity survey
Survey device 61a readings and demarcate interferometry photodetector 41a readings and relate to database, most weak interference data storehouse, 1/n with most capable and experienced
Data in wavelength-interferometric database are compared, and the match condition according to data determines that the position is most strong constructive interference, most
Weak destructive interference or 1/n wavelength-interferometrics.So that the laser interferometer of the application can not only environment resistant interference, but also improve
Certainty of measurement.
Used as further preferred scheme, repeating said steps five choose different demarcation reflection measurement light electrical resistivity surveys every time
Survey device 61a and demarcate interferometry photodetector 41a, obtain z 1/n wavelength-interferometric database.
Embodiment 3, as illustrated, it is a kind of using contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and
The measuring method of scaling method：
In actual measuring environment, if the signal reading that the demarcation reflection measurement photodetector 61a is measured is x,
The signal reading that the demarcation interferometry photodetector 41a measurements are obtained is y, by x values and y values in most strong interference data
Compare in storehouse, most weak interference data storehouse, 1/n wavelength-interferometric databases, when x values and y values relate to database with most capable and experienced
A certain class value matches, then it is assumed that this position is most strong constructive interference position, when in x values and y values and most weak interference data storehouse
A certain class value matches, then it is assumed that this position is most weak destructive interference position, when in x values and y values and 1/n wavelength-interferometric databases
A certain class value match, then it is assumed that this position be 1/n wavelength-interferometrics position.
The measuring method of the application, the interference situation of current interfering beam is determined by x values and y values, and anti-ring is realized with this
The ability of border interference, while also improving certainty of measurement.
As further preferred scheme, the matching threshold △ of y values is set, if most capable and experienced relate to database, most weak interference number
It is y ' according to the corresponding numerical value of measured interference light electric explorer is demarcated in storehouse, 1/n wavelength-interferometric databases, according to x values to most capable and experienced
Relating to database, most weak interference data storehouse, 1/n wavelength-interferometrics database carries out the inquiry of y ', makes if there is y ' | y-y'|<△,
Database where repartitioning y ', if y ' is related in database most capable and experienced, then it is assumed that this position is most strong constructive interference position,
If y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric numbers
According in storehouse, then it is assumed that this position is 1/n wavelength-interferometrics position.
As further preferred scheme, if most capable and experienced relate to database, most weak interference data storehouse, 1/n wavelength-interferometric data
It is x ' that the corresponding numerical value of reflection measurement photodetector 61a is demarcated in storehouse, in actually measurement, is selected closest to actual measured value
The x ' of x is carried out as matching value according to x ' values to the most capable and experienced database, most weak interference data storehouse, 1/n wavelength-interferometrics database of relating to
Y ' is inquired about, and is made if there is y ' | y-y'|<△, the database where repartitioning y ', if y ' relates to database most capable and experienced
It is interior, then it is assumed that this position is most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak
Destructive interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
Used as further preferred scheme, the size of the matching threshold △ ensures, when data query is carried out, to work as satisfaction |
y-y'|<During △, y ' is unique value.When matching threshold △ is larger, it is possible that one group of x value and y values match two groups or
Multigroup x ' values and y ' values, make troubles to measurement, so first matching threshold △, makes one group of x value and y values in measurement process most
One group of x ' value and y ' values are matched, is convenient for measuring.
Used as further preferred scheme, the size of the matching threshold △ is set according to the required precision of actual measurement
It is fixed, when high-precision measured value is needed, using less matching threshold, when high-acruracy survey value is not needed, using larger
Matching threshold.
As further preferred scheme, if △=5%.
In the measuring method of the application, by setting matching threshold △, according to setting the need for Surveying Actual Precision
Size with threshold value △, during being convenient for measuring with this, the match selection of data reduces measurement difficulty.
Above example is only used to illustrate the present invention and not limit technical scheme described in the invention, although this explanation
With reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation to book
Mode, therefore any the present invention is modified or equivalent；And all do not depart from the technical side of the spirit and scope of invention
Case and its improvement, it all should cover in the middle of scope of the presently claimed invention.
Claims (10)
1. a kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer, includes lasing light emitter, fine motion ladder angle
Speculum group, interferometry photodetector group, mobile corner reflector, light splitting microscope group and micromotion platform, the fine motion ladder angle
Speculum group includes m fine motion ladder corner reflector and m-1 fixed corner reflector, m>2, m fine motion ladder angles are anti-
Mirror is penetrated to be arranged on the micromotion platform；
The lasing light emitter projects z beam laser beams to the light splitting microscope group, and wherein z is the positive integer more than or equal to 2, described dry
Relate to measurement photodetector group include z interferometry photodetector, each interferometry photodetector with it is a branch of
Laser beam is corresponding, and each laser beam is divided into first laser beam group and second laser beam group, described first after the light splitting microscope group
Fine motion ladder corner reflection microscope group described in laser beam group directive, after being reflected through the fine motion ladder corner reflection microscope group again described in directive
Light splitting microscope group, then the interferometry photodetector group described in directive after the light splitting microscope group, the second laser beam group directive
The mobile corner reflector, light splitting microscope group described in directive again after being reflected through the mobile corner reflector, through the light splitting microscope group
It is corresponding afterwards to be interfered with the first laser beam group of interferometry photodetector group described in directive, form coherence laser beam
Group, each interfering beam difference each self-corresponding interferometry photodetector of directive of coherence laser beam group；
Characterized in that, the contrast anti-interference fine motion cascade ladder corner reflector laser interferometer also includes reflection measurement
Photodetector group, the reflection measurement photodetector group includes z reflection measurement photodetector, the second laser
Beam group is also formed with reflection laser beam group, the reflection laser beam after the light splitting microscope group as described in the mobile corner reflector directive
Each laser beam difference reflection measurement photodetector of directive one of group.
2. contrast anti-interference fine motion as claimed in claim 1 cascades ladder corner reflector laser interferometer, it is characterised in that
The light splitting microscope group includes the first spectroscope and the second spectroscope, and the z beam laser beams that the lasing light emitter is projected first are mapped to first
Spectroscope, first laser beam group is formed through the first dichroic mirror, transmits to form second laser beam group, first through the first spectroscope
Fine motion ladder corner reflection microscope group described in laser beam group directive, the first spectroscope described in directive again, then transmits again after reflection
First spectroscope is crossed, mobile corner reflector described in the second laser beam group directive reflects through the mobile corner reflector
Second spectroscope described in directive afterwards, the first spectroscope described in directive after being transmitted through second spectroscope, and with from described the
The first laser beam group that one spectroscope is transmitted is interfered, and forms measured interference light electrical resistivity survey described in directive after coherence laser beam group
Device group is surveyed, second spectroscopical second laser beam group is also by second light splitting as described in the mobile corner reflector directive
Mirror reflects to form the reflection laser beam group.
3. a kind of contrast anti-interference fine motion cascade ladder corner reflector laser required for power described in 1 or 2 any one is done
The scaling method of interferometer, it is characterised in that comprise the steps：
Step one, position adjustment：Adjust lasing light emitter, fine motion ladder corner reflection microscope group, light splitting microscope group, interferometry photodetection
The position of device group, reflection measurement photodetector group, mobile corner reflector and micromotion platform；
Step 2, adjustment light path：Start the lasing light emitter, further accurate adjustment fine motion ladder corner reflection microscope group, light splitting microscope group,
The position of interferometry photodetector group, reflection measurement photodetector group, mobile corner reflector and micromotion platform, makes laser
The light path of interferometer reaches design requirement；
Step 3, generate and most capable and experienced relate to database：Choose a measured interference light electrical resistivity survey in interferometry photodetector group
Device is surveyed as interferometry photodetector is demarcated, a reflection measurement light electrical resistivity survey in reflection measurement photodetector group is chosen
Device is surveyed as demarcation reflection measurement photodetector, the demarcation interferometry photodetector and the demarcation reflection measurement light
Electric explorer is corresponding with the same one laser beam that the lasing light emitter is projected, and controls the fine motion to put down in the environment of air cleaning
Platform is moved, and the fine motion is fixed when the interfering beam that interferometry photodetector is demarcated described in directive is most strong constructive interference
Platform, record now demarcates reflection measurement photodetector reading and demarcates interferometry photodetector reading, changes air
Environment changes the demarcation reflection measurement photodetector reading, while recording several demarcates reflection measurement photodetector
Reading and corresponding demarcation interferometry photodetector reading, obtain most capable and experienced relating to database.
4. scaling method as claimed in claim 3, it is characterised in that also include step 4, generate most weak interference data storehouse：
The micromotion platform is controlled to move in the environment of air cleaning, when the interference that interferometry photodetector is demarcated described in directive
Light beam fixes the micromotion platform when being most weak destructive interference, record now demarcates reflection measurement photodetector reading and demarcation
Interferometry photodetector reading, changing air ambient changes the demarcation reflection measurement photodetector reading, while
Record several and demarcate reflection measurement photodetector reading and corresponding demarcation interferometry photodetector reading, obtain
Most weak interference data storehouse.
5. scaling method as claimed in claim 4, it is characterised in that also include step 5, generation 1/n wavelength-interferometric data
Storehouse, n be more than or wait 2 positive integer, control the micromotion platform to move in the environment of air cleaning, when being demarcated described in directive
When the interfering beam of interferometry photodetector is most strong constructive interference, it is further continued for moving the distance of 1/2mn wavelength, records this
When demarcate reflection measurement photodetector reading and demarcate interferometry photodetector reading, then change air ambient make institute
The reading change of demarcation reflection measurement photodetector is stated, while recording several demarcation reflection measurement photodetector readings
And corresponding demarcation interferometry photodetector reading, obtain 1/n wavelength-interferometric databases.
6. the measuring method of the scaling method described in a kind of use claim 5, it is characterised in that in actual measuring environment,
If the signal reading that the demarcation reflection measurement photodetector is measured is x, the demarcation interferometry photodetector is surveyed
The signal reading for measuring is y, and x values and y values are related into database, most weak interference data storehouse, 1/n wavelength-interferometric data most capable and experienced
Compare in storehouse, when x values and y values with most it is capable and experienced relate to database in a certain class value match, then it is assumed that this position is most strong
Constructive interference position, when x values and y values match with a certain class value in most weak interference data storehouse, then it is assumed that this position is most weak
Destructive interference position, when x values and y values match with a certain class value in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/
N wavelength-interferometrics position.
7. measuring method as claimed in claim 6, it is characterised in that the matching threshold Δ of setting y values, if most strong interference data
It is y ', root that the corresponding numerical value of measured interference light electric explorer is demarcated in storehouse, most weak interference data storehouse, 1/n wavelength-interferometric databases
The inquiry of y ' is carried out to the most capable and experienced database, most weak interference data storehouse, 1/n wavelength-interferometrics database of relating to according to x values, if there is y '
Make | y-y'| ＜ Δs, the database where repartitioning y ', if y ' is related in database most capable and experienced, then it is assumed that this position is most strong
Constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this position is most weak destructive interference position, if y ' exists
In 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics position.
8. measuring method as claimed in claim 7, it is characterised in that set and most capable and experienced relate to database, most weak interference data storehouse, 1/
It is x ' that the corresponding numerical value of reflection measurement photodetector is demarcated in n wavelength-interferometric databases, in actually measurement, is selected closest
The x ' of actual measured value x relates to database, most weak interference data storehouse, 1/n wavelength-interferometrics according to x ' values as matching value to most capable and experienced
Database carries out y ' and is inquired about, and makes if there is y ' | y-y'| ＜ Δs, the database where repartitioning y ', if y ' is most strong
In interference data storehouse, then it is assumed that this position is most strong constructive interference position, if y ' is in most weak interference data storehouse, then it is assumed that this
Position is most weak destructive interference position, if y ' is in 1/n wavelength-interferometric databases, then it is assumed that this position is 1/n wavelength-interferometrics
Position.
9. measuring method as claimed in claim 7 or 8, it is characterised in that the size of the matching threshold Δ ensures carrying out
During data query, when satisfaction | during y-y'| ＜ Δs, y ' is unique value.
10. measuring method as claimed in claim 9, it is characterised in that the size of the matching threshold Δ is according to actual measurement
Required precision set, when high-precision measured value is needed, using less matching threshold, when need not survey in high precision
During value, using larger matching threshold.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510287713.5A CN104848782B (en) | 2015-05-29 | 2015-05-29 | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510287713.5A CN104848782B (en) | 2015-05-29 | 2015-05-29 | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104848782A CN104848782A (en) | 2015-08-19 |
| CN104848782B true CN104848782B (en) | 2017-06-13 |
Family
ID=53848612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510287713.5A Active CN104848782B (en) | 2015-05-29 | 2015-05-29 | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104848782B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654092B (en) * | 2022-04-18 | 2023-03-14 | 北京理工大学 | Method and device for efficient processing and precise measurement of laser microstructure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1104081A (en) * | 1965-07-01 | 1968-02-21 | Zeiss Jena Veb Carl | Improvements in or relating to apparatus for measuring lengths |
| US4309109A (en) * | 1972-05-25 | 1982-01-05 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed interferometric remote gauge |
| CN102072769A (en) * | 2010-11-05 | 2011-05-25 | 清华大学 | Novel Fourier infrared spectrograph and analysis method |
| CN103376055A (en) * | 2012-04-20 | 2013-10-30 | 上海微电子装备有限公司 | High-resolution linear interferometer |
| CN104316158A (en) * | 2014-10-21 | 2015-01-28 | 四川大学 | Heterodyne interferometer vibration measurer based on laser doppler effect |
| CN204757922U (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Comparison type anti -interference fine motion cascading ladder corner reflection mirror laser interferometer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6428503A (en) * | 1987-07-23 | 1989-01-31 | Yokogawa Electric Corp | Length measuring device |
| JPH11142243A (en) * | 1997-11-13 | 1999-05-28 | Yokogawa Electric Corp | Interferometer and fourier transform-type spectral apparatus using the same |
-
2015
- 2015-05-29 CN CN201510287713.5A patent/CN104848782B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1104081A (en) * | 1965-07-01 | 1968-02-21 | Zeiss Jena Veb Carl | Improvements in or relating to apparatus for measuring lengths |
| US4309109A (en) * | 1972-05-25 | 1982-01-05 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed interferometric remote gauge |
| CN102072769A (en) * | 2010-11-05 | 2011-05-25 | 清华大学 | Novel Fourier infrared spectrograph and analysis method |
| CN103376055A (en) * | 2012-04-20 | 2013-10-30 | 上海微电子装备有限公司 | High-resolution linear interferometer |
| CN104316158A (en) * | 2014-10-21 | 2015-01-28 | 四川大学 | Heterodyne interferometer vibration measurer based on laser doppler effect |
| CN204757922U (en) * | 2015-05-29 | 2015-11-11 | 北方民族大学 | Comparison type anti -interference fine motion cascading ladder corner reflection mirror laser interferometer |
Non-Patent Citations (1)
| Title |
|---|
| 《红外光谱仪多级微反射镜模拟分析及制作研究》;郑莹 等;《光学学报》;20111210(第12期);第1222005-1至1222005-5页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104848782A (en) | 2015-08-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105043242B (en) | A kind of contrast anti-interference ladder planar reflector laser interference instrument and scaling method and measuring method | |
| CN104964641B (en) | A kind of magnetic micro-displacement platform formula cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN104697443B (en) | A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method | |
| CN104880147B (en) | The scaling method and measuring method of a kind of magnetic micro-displacement platform formula corner reflector laser interferometer | |
| CN104848782B (en) | A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN204757922U (en) | Comparison type anti -interference fine motion cascading ladder corner reflection mirror laser interferometer | |
| CN105004263B (en) | A kind of contrast anti-interference fine motion planar reflector laser interference instrument and scaling method and measuring method | |
| CN105180801B (en) | A kind of contrast anti-interference stepped corner reflector laser interferometer and scaling method and measuring method | |
| CN105157559B (en) | A kind of contrast anti-interference cascade ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN105371755A (en) | Wavelength correction type multi-beam step plane reflecting mirror laser interferometer and wavelength correction method | |
| CN104930968B (en) | A kind of magnetic micro-displacement platform formula ladder planar reflector laser interference instrument and scaling method and measuring method | |
| CN204988173U (en) | Anti -interference fine motion ladder planar mirror laser interferometer of comparison type | |
| CN204740001U (en) | Anti -interference fine motion ladder corner reflection mirror laser interferometer of comparison type | |
| CN204740000U (en) | Anti -interference ladder planar mirror laser interferometer of comparison type | |
| CN204807041U (en) | Novel absolute distancer of many light sources multi -wavelength laser Interferometer | |
| CN105091739B (en) | A kind of contrast anti-interference fine motion ladder corner reflector laser interferometer and scaling method and measuring method | |
| CN204757921U (en) | Anti -interference notch cuttype corner reflection mirror laser interferometer of comparison type | |
| CN204705316U (en) | A kind of magnetic micro-displacement platform formula planar reflector laser interference instrument | |
| CN105043241B (en) | A kind of contrast anti-interference corner reflector laser interferometer and scaling method and measuring method | |
| CN204854622U (en) | Anti -interference ladder corner reflection mirror laser interferometer that cascades of comparison type | |
| CN105136020B (en) | A kind of contrast anti-interference fine motion ladder planar reflector laser interference instrument and scaling method and measuring method | |
| CN105043265A (en) | Novel multi-light-source multi-wavelength laser interference absolute range finder | |
| CN204757920U (en) | Anti -interference fine motion planar mirror laser interferometer of comparison type | |
| CN104964642B (en) | The scaling method and measuring method of a kind of magnetic micro-displacement platform formula ladder corner reflector laser interferometer | |
| CN204988174U (en) | Anti -interference fine motion corner reflection mirror laser interferometer of comparison type |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201214 Address after: Room 804-806, 8th floor, Binyang building, Binyang Avenue, Shouchun Town, Shouxian County, Huainan City, Anhui Province Patentee after: Huainan Yiyong Electronic Technology Co.,Ltd. Address before: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Hongyue Information Technology Co.,Ltd. Effective date of registration: 20201214 Address after: 1607, building 49, No.3, Queshan Yunfeng Road, Gaofeng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Hongyue Information Technology Co.,Ltd. Address before: 750021 No. 204, Wenchang North Street, Xixia District, the Ningxia Hui Autonomous Region, Yinchuan Patentee before: BEIFANG MINZU University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231211 Address after: 528000, Room 102, Building 23, No. 88 Haitian Road, Hecheng Street, Gaoming District, Foshan City, Guangdong Province Patentee after: Xinqihang Semiconductor Co.,Ltd. Address before: Room 804-806, 8th floor, Binyang building, Binyang Avenue, Shouchun Town, Shouxian County, Huainan City, Anhui Province Patentee before: Huainan Yiyong Electronic Technology Co.,Ltd. |