GB1104081A - Improvements in or relating to apparatus for measuring lengths - Google Patents

Improvements in or relating to apparatus for measuring lengths

Info

Publication number
GB1104081A
GB1104081A GB2796865A GB2796865A GB1104081A GB 1104081 A GB1104081 A GB 1104081A GB 2796865 A GB2796865 A GB 2796865A GB 2796865 A GB2796865 A GB 2796865A GB 1104081 A GB1104081 A GB 1104081A
Authority
GB
United Kingdom
Prior art keywords
interferometer
cathode
ray tube
scale
pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2796865A
Inventor
Konrad Kuhne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to GB2796865A priority Critical patent/GB1104081A/en
Publication of GB1104081A publication Critical patent/GB1104081A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02041Interferometers characterised by particular imaging or detection techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02029Combination with non-interferometric systems, i.e. for measuring the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

1,104,081. Selective signalling. CARL ZEISS JENA VEB. 1 July, 1965, No. 27968/65. Heading G4H. [Also in Divisions G1, G2 and H1] The invention relates to apparatus for measuring lengths or displacements involving the use of a photo-electric interferometer the output of which controls a cathode-ray tube. The displacement measured is that of a triple-reflector member 10 along a scale 13. As the prism is displaced, a photo-electric microscope 12 travels with it to detect scale divisions 14 and produces pulses which are amplified 15 and transmitted to an analyser 16 for counting. The interferometer (e.g. a Michelson interferometer) comprising light source 1, condenser lens 3, diaphragm 5, collimater 6 and filter 7 together with fixed, reference triple reflector 11 and displaceable, test triple reflector 10, mirror 23, partially reflecting plate 9, and objectives 18 and 24, produces two phase-displaced sets of curved interference fringes respectively moving across slits 19, 20. The intensity changes are detected by photodetectors 25, 26 the outputs of which are used to control the movement of the electron beam in cathode-ray tube 31 by the connection of the detectors to the pairs of deflecting plates 27, 28 and 29, 30 respectively. The beam is caused to follow a rotary motion and sweep out a cone shape. A fixed sector disc 33 which may have its sectors electrically insulated from one another, is mounted inside the tube 31 adjacent the screen 32. Each time the beam sweeps across a sector, a pulse is produced which is amplified (at 34) and fed to the analyser 16, where pulses are combined with those from the detector 12 to obtain measurements to fractions of a scale division. In another embodiment (Fig. 2, not shown) the sector disc (33) is outside the cathode-ray tube light from which having passed through the disc interspaces is detected by a detector (35) outside the C.R.T., to produce pulses indicating the fractions of a scale division as before. Alternatives to a Michelson-type interferometer are possible. Reflectors 10, 11 may be replaced by mirrors or right-angled prisms and the phase shifting member 8 by a suitable compensator.
GB2796865A 1965-07-01 1965-07-01 Improvements in or relating to apparatus for measuring lengths Expired GB1104081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2796865A GB1104081A (en) 1965-07-01 1965-07-01 Improvements in or relating to apparatus for measuring lengths

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2796865A GB1104081A (en) 1965-07-01 1965-07-01 Improvements in or relating to apparatus for measuring lengths

Publications (1)

Publication Number Publication Date
GB1104081A true GB1104081A (en) 1968-02-21

Family

ID=10268159

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2796865A Expired GB1104081A (en) 1965-07-01 1965-07-01 Improvements in or relating to apparatus for measuring lengths

Country Status (1)

Country Link
GB (1) GB1104081A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2261299A (en) * 1991-11-08 1993-05-12 British Tech Group Optical interferometer
CN104697443A (en) * 2015-03-30 2015-06-10 北方民族大学 Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method
CN104848782A (en) * 2015-05-29 2015-08-19 北方民族大学 Contrast type anti-interference micro-cascading ladder angle reflector laser interferometer as well as calibration method and measurement method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2261299A (en) * 1991-11-08 1993-05-12 British Tech Group Optical interferometer
GB2261299B (en) * 1991-11-08 1995-06-21 British Tech Group Measuring instruments
US5546184A (en) * 1991-11-08 1996-08-13 British Technology Group Ltd. Single-frequency bidirectional fringe-counting interferometer
CN1041769C (en) * 1991-11-08 1999-01-20 英国技术集团有限公司 Optical measuring instruments
CN104697443A (en) * 2015-03-30 2015-06-10 北方民族大学 Motion-compensated cascade stepped reflection mirror laser interferometer and measurement method
CN104697443B (en) * 2015-03-30 2017-07-28 北方民族大学 A kind of stepped corner reflector laser interferometer of motion compensation formula cascade and measuring method
CN104848782A (en) * 2015-05-29 2015-08-19 北方民族大学 Contrast type anti-interference micro-cascading ladder angle reflector laser interferometer as well as calibration method and measurement method
CN104848782B (en) * 2015-05-29 2017-06-13 北方民族大学 A kind of contrast anti-interference fine motion cascade ladder corner reflector laser interferometer and scaling method and measuring method

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