CN105043265A - Novel multi-light-source multi-wavelength laser interference absolute range finder - Google Patents
Novel multi-light-source multi-wavelength laser interference absolute range finder Download PDFInfo
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- CN105043265A CN105043265A CN201510261523.6A CN201510261523A CN105043265A CN 105043265 A CN105043265 A CN 105043265A CN 201510261523 A CN201510261523 A CN 201510261523A CN 105043265 A CN105043265 A CN 105043265A
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Abstract
The invention discloses a novel multi-light-source multi-wavelength laser interference absolute range finder. The range finder comprises a laser source, a fixed planar mirror, a spectroscope, an interference measuring photoelectric detector and a movable reflector. The laser source comprises at least two laser source units. Each laser source unit emits a laser beam respectively. The wavelengths of the laser beams emitted by the laser source units are different. Multiple independent laser source units are adopted to form the laser source. The laser source thus has a simple structure and a low design difficulty level. The manufacturing, using and maintaining cost of the laser source is further lowered. Meanwhile, a photoelectric detection device is adopted to acquire the roughly measured distance of the movable reflector. The measuring efficiency is improved.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly the novel multiple light courcess multiwavelength laser of one interferes absolute distance meter.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.In most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure.
The subject matter that laser interference range finding exists is that optical path must be in interference state in measuring process, and measuring principle belongs to increment type Relative ranging.Cannot continue when optical interference circuit breaks light to measure.For a change this drawback of laser interferometer, develops laser absolute distance meter, and this quasi-instrument adopts multiwavelength laser Shu Jinhang interferometry usually, utilizes decimal coincidence theory to realize Models of Absolute Distance Measurement Based.Difference maximum between multi-wavelength Models of Absolute Distance Measurement Based and traditional two-frequency laser interferometer is, simultaneously the phase change of tested distance is determined by multiple wavelength, therefore create one by the absolute phase differential of their synthetic wavelength, whole measuring process is exactly be equivalent to be completed by this larger measurement wavelength.
And present laser interferes absolute distance meter main direction of studying to be how to select suitable sources to form composite wave long-chain, high-precision phase measurement, this does not have substantial help for the practical application of solution laser interference range finder.Its reason is: for ensureing that in multi-wavelength measuring process, beam of laser comprises the laser of two even multiple wavelength simultaneously, need to adopt somewhat complex design to realize multiline lasing light emitter to lasing light emitter, so make current laser interference absolute distance meter, because lasing light emitter design difficulty is large, and cause it to there is complex structure, manufacture and working service high in cost of production problem, be not easy to promote and use.
So, need a kind of structure at present badly simple, manufacture and laser interference absolute distance meter that working service cost is low.
Summary of the invention
The lasing light emitter design difficulty that the object of the invention is to exist for current laser interference absolute distance meter is large, and cause it to there is complex structure, manufacture and working service high in cost of production problem, be not easy to the deficiency promoted and use, there is provided a kind of structure simple, manufacture and laser interference absolute distance meter that working service cost is low.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of novel multiple light courcess multiwavelength laser interferes absolute distance meter, comprise lasing light emitter, fixed pan catoptron, spectroscope, interferometry photodetector, mobile mirror, described lasing light emitter comprises at least two laser source units, each described laser source unit penetrates beam of laser bundle separately, and described in each, the wavelength of laser source unit outgoing laser beam is each unequal.
The multiple light courcess multiwavelength laser of the application interferes absolute distance meter, with regard to one of them laser source unit independent, the laser beam first directive spectroscope of its injection, punishing at spectroscope is two bundle laser beam, wherein beam of laser beam is to fixed pan catoptron, directive spectroscope again after the reflection of fixed pan catoptron, another bundle laser beam directive mobile mirror after spectroscope transmission, directive spectroscope again after mobile mirror reflection, and spectroscope place and another restraint laser beam interfere form coherence laser beam after directive interferometry photodetector, so, the interference state of each laser source unit respective optical path is detected at interferometry photodetector place, i.e. interferometric phase, adopt the initial distance of other light paths to mobile mirror to measure simultaneously, the interferometric phase detected by interferometry photodetector and the initial distance of mobile mirror carry out calculating mobile mirror absolute distance.Owing to have employed said structure, namely adopt multiple independently laser source unit to form lasing light emitter, make the structure of lasing light emitter simple, design difficulty is low, reduces it and manufactures and working service cost.
As the preferred version of the application, described novel multiple light courcess multiwavelength laser interference absolute distance meter also includes the PSD group (Position-Sensitive Detector for measuring described mobile mirror initial position, follow-up abbreviation PSD group), described lasing light emitter also includes the initial position corresponding with described PSD group and measures laser source unit, described mobile mirror also includes and measures the corresponding initial position reflecting surface of laser source unit with described PSD group and initial position.In the absolute position stadimeter structure of the application, by arranging PSD group, initial position measures laser source unit and initial position reflecting surface, in measuring process, initial position is measured laser source unit and to be given off laser beam directive initial position reflecting surface, directive PSD group after initial position reflective surface, the initial distance of mobile mirror is directly measured with this, and the absolute distance detector of traditional structure, need the measurement being realized distance initial value by Other Instruments, measure efficiency lower, so further improve measurement efficiency.
As the further preferred version of the application, described PSD group is at least two groups, and it is identical with the quantity of described PSD group with the quantity of initial position reflecting surface that described initial position measures laser source unit.Initial position measures one_to_one corresponding between laser source unit, the quantity of initial position reflecting surface, described PSD group, is namely measured initial position by many group PSD groups, initial position measurement laser source unit, initial position reflecting surface, improves the precision measured.
As the further preferred version of the application, described mobile mirror is prism-frustum-shaped.Mobile mirror is set to prism-frustum-shaped, a wherein bottom surface of terrace with edge is as the reflecting surface matched with spectroscope, one of them or several side are as initial position reflecting surface, make Stability Analysis of Structures between the reflecting surface that matches with spectroscope and initial position reflecting surface unified, facilitate adjustment and the use of the application's stadimeter.
As the further preferred version of the application, described PSD group is one-dimensional PSD group.
As another preferred version of the application, described PSD group is Two-dimensional PSD group.Adopt Two-dimensional PSD group not only can realize the measurement function of a PSD group, the rotation angle of mobile mirror around incoming laser beam can also be detected.
compared with prior art, beneficial effect of the present invention:
Adopt multiple independently laser source unit to form lasing light emitter, make the structure of lasing light emitter simple, design difficulty is low, reduces it and manufactures and working service cost.
The beneficial effect of other optimal ways of the application:
The novel multiple light courcess multiwavelength laser of the application interferes absolute distance meter, directly can measure the initial distance of mobile mirror, further improve measurement efficiency.
accompanying drawing illustrates:
Fig. 1 is the light path schematic diagram of stadimeter structure of the present invention;
Fig. 2 is that in Fig. 1, mobile mirror moves the light path schematic diagram after certain displacement;
Fig. 3 is the structural representation of mobile mirror,
Mark in figure:
1-lasing light emitter, 2-fixed pan catoptron, 3-spectroscope, 4-interferometry photodetector, 5-mobile mirror, 6-laser source unit, 7-PSD group, 8-initial position measures laser source unit, 9-initial position reflecting surface.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment
As shown in the figure, a kind of novel multiple light courcess multiwavelength laser interferes absolute distance meter, comprise lasing light emitter 1, fixed pan catoptron 2, spectroscope 3, interferometry photodetector 4, mobile mirror 5, described lasing light emitter 1 comprises at least two laser source units 6, each described laser source unit 6 is injection beam of laser bundle separately, and described in each, the wavelength of laser source unit 6 outgoing laser beam is each unequal.
The multiple light courcess multiwavelength laser of the application interferes absolute distance meter, with regard to one of them laser source unit independent, the laser beam first directive spectroscope 3 of its injection, punishing at spectroscope 3 is two bundle laser beam, wherein beam of laser beam is to fixed pan catoptron 2, directive spectroscope 3 again after fixed pan catoptron 2 reflects, another bundle laser beam directive mobile mirror 5 after spectroscope 3 transmission, directive spectroscope 3 again after mobile mirror 5 reflects, and spectroscope 3 place and another restraint laser beam interfere form coherence laser beam after directive interferometry photodetector 4, so, the interference state of each laser source unit 6 respective optical path is detected at interferometry photodetector 4 place, i.e. interferometric phase, adopt the initial distance of other light paths to mobile mirror 5 to measure simultaneously, the initial distance of the interferometric phase detected by interferometry photodetector 4 and mobile mirror 5 carries out calculating mobile mirror 5 absolute distance.Owing to have employed said structure, namely adopt multiple independently laser source unit 6 to form lasing light emitter 1, make the structure of lasing light emitter 1 simple, design difficulty is low, reduces it and manufactures and working service cost, improve and measure efficiency.
As the preferred version of the present embodiment, described novel multiple light courcess multiwavelength laser interference absolute distance meter also includes the PSD group 7(Position-Sensitive Detector for measuring described mobile mirror 5 initial position, follow-up abbreviation PSD group), described lasing light emitter 1 also includes the initial position corresponding with described PSD group 7 and measures laser source unit 8, described mobile mirror 5 also includes and measures the corresponding initial position reflecting surface 9 of laser source unit 8 with described PSD group 7 and initial position.In the absolute position stadimeter structure of the present embodiment, by arranging PSD group 7, initial position measures laser source unit 8 and initial position reflecting surface 9, in measuring process, initial position is measured laser source unit 8 and to be given off laser beam directive initial position reflecting surface 9, directive PSD group 7 after initial position reflecting surface 9 reflects, the initial distance of mobile mirror 5 is directly measured with this, and the absolute distance detector of traditional structure, it is the measurement needing to be realized by Other Instruments distance initial value, measure efficiency lower, so the stadimeter of the present embodiment further improves measurement efficiency.
As the further preferred version of embodiment, described PSD group 7 is at least two groups, and it is identical with the quantity of described PSD group 7 with the quantity of initial position reflecting surface 9 that described initial position measures laser source unit 8.Initial position measures one_to_one corresponding between laser source unit 8, the quantity of initial position reflecting surface 9, described PSD group 7, namely measured by many group PSD groups 7, initial position measurement laser source unit 8, initial position reflecting surface 9 pairs of initial positions, improve the precision measured.
As the further preferred version of the present embodiment, described mobile mirror 5 is in prism-frustum-shaped.Mobile mirror 5 is set to prism-frustum-shaped, a wherein bottom surface of terrace with edge is as the reflecting surface matched with spectroscope 3, one of them or several side of terrace with edge are as initial position reflecting surface 9, make Stability Analysis of Structures between the reflecting surface that matches with spectroscope 3 and initial position reflecting surface 9 unified, facilitate adjustment and the use of the application's stadimeter.
As the further preferred version of the present embodiment, described PSD group 7 is one-dimensional PSD group.
As another preferred version of the present embodiment, described PSD group 7 is Two-dimensional PSD group.Adopt Two-dimensional PSD group not only can realize the measurement function of a PSD group, the rotation angle of mobile mirror around incoming laser beam can also be detected.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (6)
1. a novel multiple light courcess multiwavelength laser interferes absolute distance meter, comprise lasing light emitter, fixed pan catoptron, spectroscope, interferometry photodetector, mobile mirror, it is characterized in that, described lasing light emitter comprises at least two laser source units, each described laser source unit penetrates beam of laser bundle separately, and described in each, the wavelength of laser source unit outgoing laser beam is each unequal.
2. novel multiple light courcess multiwavelength laser according to claim 1 interferes absolute distance meter, it is characterized in that, also include the PSD group for measuring described mobile mirror initial position, described lasing light emitter also includes the initial position corresponding with described PSD group and measures laser source unit, described mobile mirror also includes and measures the corresponding initial position reflecting surface of laser source unit with described PSD group and initial position.
3. novel multiple light courcess multiwavelength laser according to claim 2 interferes absolute distance meter, and it is characterized in that, described PSD group is at least two groups, and it is identical with the quantity of described PSD group with the quantity of initial position reflecting surface that described initial position measures laser source unit.
4. novel multiple light courcess multiwavelength laser according to claim 2 interferes absolute distance meter, and it is characterized in that, mobile mirror is prism-frustum-shaped.
5. the novel multiple light courcess multiwavelength laser according to claim 2-4 any one interferes absolute distance meter, and it is characterized in that, described PSD group is one-dimensional PSD group.
6. the novel multiple light courcess multiwavelength laser according to claim 2-4 any one interferes absolute distance meter, and it is characterized in that, described PSD group is Two-dimensional PSD group.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105974428A (en) * | 2016-07-29 | 2016-09-28 | 北方民族大学 | Laser ranging system |
| CN106093956A (en) * | 2016-07-01 | 2016-11-09 | 北方民族大学 | A kind of LDMS |
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| EP0623802B1 (en) * | 1993-05-03 | 1998-05-20 | Dr. Johannes Heidenhain GmbH | Procedure for absolute measurements with a laser-interferometer |
| CN1281974A (en) * | 2000-08-25 | 2001-01-31 | 清华大学 | Virtual synthesis wave long-chain absolute distance interferometry and its equipment for implementing one |
| US20130070256A1 (en) * | 2011-09-20 | 2013-03-21 | Canon Kabushiki Kaisha | Measuring apparatus |
| CN204807041U (en) * | 2015-05-21 | 2015-11-25 | 北方民族大学 | Novel absolute distancer of many light sources multi -wavelength laser Interferometer |
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2015
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Patent Citations (4)
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| EP0623802B1 (en) * | 1993-05-03 | 1998-05-20 | Dr. Johannes Heidenhain GmbH | Procedure for absolute measurements with a laser-interferometer |
| CN1281974A (en) * | 2000-08-25 | 2001-01-31 | 清华大学 | Virtual synthesis wave long-chain absolute distance interferometry and its equipment for implementing one |
| US20130070256A1 (en) * | 2011-09-20 | 2013-03-21 | Canon Kabushiki Kaisha | Measuring apparatus |
| CN204807041U (en) * | 2015-05-21 | 2015-11-25 | 北方民族大学 | Novel absolute distancer of many light sources multi -wavelength laser Interferometer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106093956A (en) * | 2016-07-01 | 2016-11-09 | 北方民族大学 | A kind of LDMS |
| CN106093956B (en) * | 2016-07-01 | 2019-04-30 | 北方民族大学 | A kind of laser ranging system |
| CN105974428A (en) * | 2016-07-29 | 2016-09-28 | 北方民族大学 | Laser ranging system |
| CN105974428B (en) * | 2016-07-29 | 2019-04-30 | 北方民族大学 | A kind of laser ranging system |
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