CN108662984A - A kind of precise displacement sensor and its measurement method based on corner cube mirror group - Google Patents
A kind of precise displacement sensor and its measurement method based on corner cube mirror group Download PDFInfo
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- CN108662984A CN108662984A CN201810782152.XA CN201810782152A CN108662984A CN 108662984 A CN108662984 A CN 108662984A CN 201810782152 A CN201810782152 A CN 201810782152A CN 108662984 A CN108662984 A CN 108662984A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The present invention relates to a kind of precise displacement sensor and its measurement method based on corner cube mirror group, the precise displacement sensor includes lasing light emitter, and for launching laser beam, and the laser beam is incident to the speculum one of the first speculum group；Speculum two, the laser beam for receiving the reflection of speculum one, and the laser beam of reception is made to reflex to speculum three or photodetector；Speculum three is used to receive the laser beam of the reflection of speculum two, and the laser beam of reception is made to reflex to speculum four；Photodetector for receiving the laser beam for reflecting through speculum two and no longer being received by speculum three, and measures its incoming position；Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector calculate the change in displacement value of testee.The sensor structure is simple, high certainty of measurement, convenient for batch production.
Description
Technical field
The present invention relates to field of measuring technique, and in particular to a kind of precise displacement sensor based on corner cube mirror group and
Its measurement method.
Background technology
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
Angle wave optical device is realized with high-precision PSD (Position Sensitive Device, position sensitive (sensitivity) detector)
's.Amplify by optical triangulation, horizontal thin tail sheep t is amplified to T on photodetector (PSD), can be by the essence of linear measure longimetry
Degree greatly promotes.To which optical sensor becomes the widely applied tool of current field of measuring technique, but these instruments are big
It is mostly complicated, it is of high cost.
Invention content
It is an object of the invention to propose a kind of precise displacement sensor based on corner cube mirror group and apply the displacement
The method that sensor carries out displacement measurement.
To achieve the goals above, the present invention provides following technical scheme：
A kind of precise displacement sensor based on corner cube mirror group, including：
First speculum group, including speculum one and speculum two, the speculum one form angle with speculum two and are
The speculum group at right angle；
Lasing light emitter, for launching laser beam, and the laser beam is incident to the speculum one of the first speculum group；
The speculum two, the laser beam for receiving the reflection of speculum one, and the laser beam of reception is made to reflect；
Photodetector for receiving the laser beam reflected through speculum two, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
Further include shell in further embodiment, lasing light emitter, photodetector are fixedly installed in shell, composition
One reading head.By the setting of shell, the position that lasing light emitter, photodetector can be kept mutual is fixed, can also
Ensure that the two keeps synchronous shift.
In further embodiment, the reading head is at least three, and the position between at least three reading head
Relationship meets：In measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
On the other hand, the present invention also provides the measurement method of the above-mentioned precise displacement sensor based on corner cube mirror group,
Include the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, photodetector so that the laser beam of lasing light emitter transmitting enters
It is incident upon the speculum one of the first speculum group, is incident to speculum two after the speculum one reflection, speculum two receives instead
The laser beam of the reflection of mirror one is penetrated, and the laser beam of reception is made to reflect, is incident to photodetector；
Transmitting laser beam is visited after the laser beam reflects between speculum one and speculum two by photodetector
Measure its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Meanwhile the present invention also proposes another precise displacement sensor based on corner cube mirror group, including：
At least two first speculum groups, each first speculum group include speculum one and speculum two, the reflection
Mirror one and speculum two form the speculum group that angle is right angle, described at least two first speculum groups along moving direction successively
Distribution；
At least one second speculum group, each second speculum group include speculum three and speculum four, the reflection
Mirror three and speculum four form the speculum group that angle is right angle, at least one second speculum group along moving direction successively
Distribution；
The speculum three is parallel with speculum two, and the speculum four is parallel with speculum one；
Lasing light emitter, for launching laser beam, and the laser beam is incident to the speculum one of first speculum group；
The speculum two, the laser beam for receiving the reflection of speculum one, and the laser beam of reception is made to reflect；
The speculum three, the laser beam for receiving the reflection of speculum two, and the laser beam of reception is made to reflex to reflection
Mirror four；
The speculum four, the laser beam for receiving the reflection of speculum three, and it is next so that the laser beam of reception is reflexed to
The speculum one of a first speculum group；
The speculum one, the laser that laser beam or the speculum four for receiving the lasing light emitter transmitting reflect
Beam, and the laser beam of reception is made to reflex to speculum two；
Photodetector for receiving the laser beam for reflecting through speculum two and no longer being received by speculum three, and measures
Its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
In further embodiment, the laser beam of lasing light emitter transmitting is incident to speculum one in 45 degree of angles.It is incident to reflection
The incident ray of mirror one and the light ray parallel being emitted from two face of speculum make whole to be conducive to the arrangement of each component in system
Body structure minimizes as far as possible, is also convenient for the displacement calculation in testee.
In further embodiment, described at least two first speculum groups head and the tail connect, and strip zigzag is integrally formed
Structure.
Further include shell in further embodiment, lasing light emitter, the second speculum group, photodetector are fixedly installed
In in shell, a reading head is formed.By the setting of shell, lasing light emitter, the second speculum group, photodetector can be kept
Mutual position is fixed, and can also ensure that three keeps synchronous shift.
In further embodiment, the reading head is at least five, and the position between at least five reading head
Relationship meets：In measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
On the other hand, present invention simultaneously provides a kind of measurements of the above-mentioned precise displacement sensor based on corner cube mirror group
Method includes the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, the second speculum group, photodetector so that lasing light emitter
The laser beam of transmitting is incident to a speculum one of the first speculum group, and speculum is incident to after the speculum one reflection
Two, speculum two receives the laser beam of the reflection of speculum one, and the laser beam of reception is made to reflex to the anti-of the second speculum group
Mirror three is penetrated, incident laser beam is reflexed to speculum four by speculum three, and speculum four receives the laser beam that speculum three reflects,
And the laser beam of reception is made to reflex to next first speculum group, and laser beam is in the first speculum group and the second speculum group
Speculum between photodetector is finally incident to after multiple reflections；
Emit laser beam, laser beam multiple reflections between the first speculum group and the speculum of the second speculum group
Afterwards, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Compared with prior art, using a kind of precise displacement sensor based on corner cube mirror group provided by the invention and
Its measurement method, advantage are：Realize that accurate displacement measures by corner cube mirror group disposed in parallel, the sensor knot
Structure is simple, high certainty of measurement, convenient for batch production.In addition, it is based on corner cube mirror group, by the increase of speculum group group number,
Multiple reflections may be implemented, realize more times of amplifications, further expand amplification factor, then further increase measurement accuracy, and set
Standby overall structure is small.By the setting of at least two reading heads, the continuous measurement of displacement sensor ensure that.Meanwhile it being provided with
Correcting device is made the incident angle error caused by testee displacement variable for the laser beam that lasing light emitter projects and is repaiied
Just, measurement accuracy is improved again.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of structure of the precise displacement sensor based on corner cube mirror group provided in the embodiment of the present invention 1
Schematic diagram.
Fig. 2 is a kind of structure of the precise displacement sensor based on corner cube mirror group provided in the embodiment of the present invention 2
Schematic diagram.
Fig. 3 is a kind of structure of the precise displacement sensor based on corner cube mirror group provided in the embodiment of the present invention 2
Schematic diagram.
Description of symbols in figure
Laser 1, laser beam 2, the first speculum group 3, speculum 1, speculum 2 32, the second speculum group 4, instead
Penetrate mirror 3 41, speculum 4 42, photodetector 5, shell 6.
Specific implementation mode
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, the detailed description of the embodiment of the present invention to providing in the accompanying drawings is not intended to limit claimed invention below
Range, but it is merely representative of the selected embodiment of the present invention.Based on the embodiment of the present invention, those skilled in the art are not doing
The every other embodiment obtained under the premise of going out creative work, shall fall within the protection scope of the present invention.
Embodiment 1
Referring to Fig. 1, the present embodiment schematically discloses a kind of precise displacement sensor based on corner cube mirror group,
Including laser 1, the first speculum group 3, the first speculum group 3 includes speculum 1 and speculum 2 32, photodetector
5, shell 6.Wherein the angle of speculum 1 and speculum 2 32 is right angle.
In precise displacement sensor of the utility model based on corner cube mirror group：
Laser 1 launches laser beam 2, and laser beam 2 is incident to the speculum 1 of first group of first speculum group 3, institute
It states speculum 1 and incident laser beam 2 is reflexed into speculum 2 32, speculum 2 32 receives swashing for the reflection of speculum 1
Light beam 2, and laser beam 2 is reflected, photodetector 5 receives the laser beam 2 that speculum 2 32 reflects, and measures it and enter
Penetrate position；Processing system, the incoming position variable quantity of the laser beam 2 for being received according to photodetector 5 calculate tested
The displacement variable of object.
Further include shell 6, lasing light emitter 1, photodetector 5 are fixedly installed on shell as a kind of preferably embodiment
Internal 6, form a reading head.By the setting of shell, the position that lasing light emitter, photodetector can be kept mutual is solid
It is fixed, it can also ensure that the two keeps synchronous shift.
When measurement, it can be fixed on testee using by reading head according to practical situations, the first speculum group
Fixed, when testee is subjected to displacement, relative motion occurs for reading head and the first speculum group, and photodetector 5 can be with
Measurement obtains the shift value of testee；The first speculum group is fixed on testee alternatively, can also use, reading head
It remains stationary as, testee, which is subjected to displacement, drives the movement of the first speculum group, and with reading head opposite position occurs for the first speculum group
It moves, photodetector 5 can measure the shift value of testee；The first speculum group of selection or reading head are measured to be fixed on
On testee, measurement convenience is improved.
In further embodiment, the reading head is at least three, and the position between at least three reading head
Relationship meets：In measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
Based on the above-mentioned precise displacement sensor based on corner cube mirror group, measurement method includes the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, photodetector so that the laser beam of lasing light emitter transmitting enters
It is incident upon the speculum one of the first speculum group, is incident to speculum two after the speculum one reflection, speculum two receives instead
The laser beam of the reflection of mirror one is penetrated, and the laser beam of reception is made to reflect, is incident to photodetector；
Transmitting laser beam is visited after the laser beam reflects between speculum one and speculum two by photodetector
Measure its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Embodiment 2
Fig. 2, Fig. 3 are please referred to, the present embodiment schematically discloses a kind of accurate displacement biography based on corner cube mirror group
Sensor, including laser 1, the first speculum group 3, the first speculum group 3 include speculum 1 and speculum 2 32, and second is anti-
Microscope group 4 is penetrated, the second speculum group 4 includes speculum 3 41 and speculum 4 42, photodetector 5, shell 6.Wherein speculum
1 and the angle of speculum 2 32 be right angle, the angle of speculum 3 41 and speculum 4 42 is right angle.Speculum 3 41 with
2 32 pairs of speculum is parallel, and speculum 4 42 is parallel with speculum 1.
In precise displacement sensor of the utility model based on corner cube mirror group：
Laser 1 launches laser beam 2, and laser beam 2 is incident to the speculum 1 of first group of first speculum group 3, institute
It states speculum 1 and incident laser beam 2 is reflexed into speculum 2 32, speculum 2 32 receives swashing for the reflection of speculum 1
Light beam 2, and laser beam 2 is made to reflex to corresponding speculum 3 41 in the second speculum group 4, the speculum 3 41 receives anti-
The laser beam of the reflection of mirror 2 32 is penetrated, and laser beam 2 is made to reflex to speculum 4 42, the speculum 4 42 is so that through speculum three
The laser beam 2 of 41 reflections reflexes to corresponding first speculum group 1 in next group of the first speculum group 3, and repeatedly cycle is anti-
It penetrates, is reflected through speculum 2 32 until photodetector 5 is received, and the laser beam 2 not received by the second speculum group 4, and
Measure its incoming position；The incoming position of processing system, the laser beam 2 for being received according to photodetector 5 changes gauge
Calculate the displacement variable of testee.
As a kind of preferably embodiment, the laser beam of lasing light emitter transmitting is incident to the first speculum in 45 degree of angles.Enter
The light ray parallel for being incident upon the incident ray of speculum one and being emitted from speculum two, to be conducive to the cloth of each component in system
It sets, overall structure is made to minimize as far as possible, be also convenient for the displacement calculation in testee.
As a kind of preferably embodiment, at least three or more the first speculum group head and the tail connect, and length is integrally formed
Laciniation.
Further include shell 6, lasing light emitter 1, the second speculum group 4, photodetector 5 as a kind of preferably embodiment
It is fixedly installed in shell 6.By the setting of shell, lasing light emitter, the second speculum group, photodetector can be kept mutual
Between position fix, can also ensure three keep synchronous shift.
When measurement, it can be fixed on testee using by reading head according to practical situations, the first speculum group
Fixed, when testee is subjected to displacement, relative motion occurs for reading head and the first speculum group, and photodetector 5 can be with
Measurement obtains the shift value of testee；The first speculum group is fixed on testee alternatively, can also use, reading head
It remains stationary as, testee, which is subjected to displacement, drives the movement of the first speculum group, and with reading head opposite position occurs for the first speculum group
It moves, photodetector 5 can measure the shift value of testee；The first speculum group of selection or reading head are measured to be fixed on
On testee, measurement convenience is improved.
As a kind of preferably embodiment, the reading head is at least seven, and between at least seven reading head
Position relationship meet：In measurement process, at least one reading head can read laser beam on photodetector
Incoming position variable quantity.It ensure that the continuous measurement of displacement sensor.
Specifically, the number of reading head is related with the number of the first speculum group of optical reflection is participated in measurement process,
The number of reading head is at least twice of the first speculum group number that optical reflection is participated in measurement process, for absolute guarantor
Incoming position variable quantity of the laser beam on photodetector, the number of reading head can be read by hindering at least one reading head
Twice that the first speculum group number of optical reflection is participated at least in measurement process adds 1 again, can make adjacent two in this way
The measurement range of a reading head has certain overlapping, i.e., can have two in the critical point of the speculum one (or two) of the first speculum group
A reading head measurement obtains change in location value, ensures the reliability continuously measured.
Such as in structure shown in Fig. 2,6 reading heads are at least needed, but it is any in measurement process in order to ensure
Moment all at least one reading heads can read incoming position variable quantity of the laser beam on photodetector, be preferably provided with
7 or more reading heads.
Based on the above-mentioned precise displacement sensor based on corner cube mirror group, measurement method includes the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, the second speculum group, photodetector so that lasing light emitter
The laser beam of transmitting is incident to the speculum one of first the first speculum group, and speculum is incident to after the speculum one reflection
Two, speculum two receives the laser beam of the reflection of speculum one, and the laser beam of reception is made to reflex to the anti-of the second speculum group
Mirror three is penetrated, incident laser beam is reflexed to speculum four by speculum three, and speculum four receives the laser beam that speculum three reflects,
And the laser beam of reception is made to reflex to next first speculum group, and laser beam is in the first speculum group and the second speculum group
Speculum between photodetector is finally incident to after multiple reflections；
Emit laser beam, laser beam multiple reflections between the first speculum group and the speculum of the second speculum group
Afterwards, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
The laser 1 of the present invention, the first speculum group 3, the first speculum group 3 include speculum 1 and speculum two
32, the second speculum group 4, the second speculum group 4 include speculum 3 41, speculum 4 42, photodetector 5, shell 6,
Component is universal standard part or the component that those skilled in the art know, structure and principle, which are all this technology personnel, can lead to
It crosses technical manual to learn or by routine experiment method know, problems solved by the invention is that existing displacement sensor structure is multiple
Miscellaneous, the problems such as measurement accuracy is low, the present invention is combined with each other by above-mentioned component, and it is real to pass through corner cube mirror group disposed in parallel
Existing accurate displacement measures, and the sensor structure is simple, high certainty of measurement, convenient for batch production.
The above description is merely a specific embodiment, and scope of protection of the present invention is not limited thereto, any ripe
It knows those skilled in the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, should all cover
Within protection scope of the present invention.
Claims (10)
1. a kind of precise displacement sensor based on corner cube mirror group, which is characterized in that including：
First speculum group, including speculum one and speculum two, it is right angle that the speculum one forms angle with speculum two
Speculum group；
Lasing light emitter, for launching laser beam, and the laser beam is incident to the speculum one of the first speculum group；
The speculum two, the laser beam for receiving the reflection of speculum one, and the laser beam of reception is made to reflect；
Photodetector for receiving the laser beam reflected through speculum two, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
2. the precise displacement sensor according to claim 1 based on corner cube mirror group, which is characterized in that further include shell
Body, lasing light emitter, photodetector are fixedly installed in shell, form a reading head.
3. the precise displacement sensor according to claim 2 based on corner cube mirror group, which is characterized in that the reading
Head is at least three, and the position relationship between at least three reading head meets：In measurement process, at least one reading
Several can read incoming position variable quantity of the laser beam on photodetector.
4. the measurement method of any precise displacement sensors based on corner cube mirror group of claim 1-3, feature
It is, includes the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, photodetector so that the laser beam of lasing light emitter transmitting is incident to
The speculum one of first speculum group is incident to speculum two after the speculum one reflection, and speculum two receives speculum
The laser beam of one reflection, and the laser beam of reception is made to reflect, it is incident to photodetector；
Transmitting laser beam is detected after the laser beam reflects between speculum one and speculum two by photodetector
Its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until measured object
Body stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates the displacement of testee
Value.
5. a kind of precise displacement sensor based on corner cube mirror group, which is characterized in that including：
At least two first speculum groups, each first speculum group include speculum one and speculum two, the speculum one
The speculum group that angle is right angle is formed with speculum two, described at least two first speculum groups are divided successively along moving direction
Cloth；
At least one second speculum group, each second speculum group include speculum three and speculum four, the speculum three
The speculum group that angle is right angle is formed with speculum four, at least one second speculum group is divided successively along moving direction
Cloth；
The speculum three is parallel with speculum two, and the speculum four is parallel with speculum one；
Lasing light emitter, for launching laser beam, and the laser beam is incident to the speculum one of first speculum group；
The speculum two, the laser beam for receiving the reflection of speculum one, and the laser beam of reception is made to reflect；
The speculum three, the laser beam for receiving the reflection of speculum two, and the laser beam of reception is made to reflex to speculum four；
The speculum four, the laser beam for receiving the reflection of speculum three, and the laser beam of reception is made to reflex to next the
The speculum one of one speculum group；
The speculum one, the laser beam that laser beam or the speculum four for receiving the lasing light emitter transmitting reflect, and
The laser beam of reception is set to reflex to speculum two；
Photodetector for receiving the laser beam for reflecting through speculum two and no longer being received by speculum three, and measures it and enters
Penetrate position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
6. the precise displacement sensor according to claim 5 based on corner cube mirror group, which is characterized in that lasing light emitter is sent out
The laser beam penetrated is incident to speculum one in 45 degree of angles.
7. the precise displacement sensor according to claim 5 based on corner cube mirror group, which is characterized in that it is described at least
Two the first speculum group head and the tail connect, and strip laciniation is integrally formed.
8. the precise displacement sensor according to claim 5 based on corner cube mirror group, which is characterized in that further include shell
Body, lasing light emitter, the second speculum group, photodetector are fixedly installed in shell, form a reading head.
9. the precise displacement sensor according to claim 8 based on corner cube mirror group, which is characterized in that the reading
Head is at least five, and the position relationship between at least five reading head meets：In measurement process, at least one reading
Several can read incoming position variable quantity of the laser beam on photodetector.
10. the measurement method of any precise displacement sensors based on corner cube mirror group of claim 5-9, feature
It is, includes the following steps：
Testee is fixed in the first speculum group or reading head；
The position relationship of adjustment lasing light emitter, the first speculum group, the second speculum group, photodetector so that lasing light emitter emits
Laser beam be incident to a speculum one of the first speculum group, be incident to speculum two after the speculum one reflection, instead
It penetrates mirror two and receives the laser beam of the reflection of speculum one, and the laser beam of reception is made to reflex to the speculum of the second speculum group
Three, incident laser beam is reflexed to speculum four by speculum three, and speculum four receives the laser beam that speculum three reflects, and makes
The laser beam of reception reflexes to next first speculum group, and laser beam is in the anti-of the first speculum group and the second speculum group
It penetrates between mirror and is finally incident to photodetector after multiple reflections；
Emit laser beam, the laser beam between the first speculum group and the speculum of the second speculum group after multiple reflections,
Its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until measured object
Body stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates the displacement of testee
Value.
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| CN109945788A (en) * | 2019-04-02 | 2019-06-28 | 北方民族大学 | New Displacement Transducer based on corner cube mirror |
| CN110146054A (en) * | 2019-05-28 | 2019-08-20 | 中国科学院半导体研究所 | A kind of device and method of long-range accurate measurement tunnel surface horizontal displacement |
| CN110146056A (en) * | 2019-05-28 | 2019-08-20 | 中国科学院半导体研究所 | A kind of device and method of long-range accurate measurement ground vertical displacement |
| CN110579284A (en) * | 2019-10-25 | 2019-12-17 | 北方民族大学 | Interferometric laser wavelength measuring device and using method thereof |
| CN111238377A (en) * | 2020-03-13 | 2020-06-05 | 北方民族大学 | Novel grating sensor and use method thereof |
| CN114441369A (en) * | 2020-10-31 | 2022-05-06 | 中国石油化工股份有限公司 | Device and method for quantitatively detecting acidity of material surface |
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