CN106654839A - Displacement self-sensing helium-neon laser system - Google Patents
Displacement self-sensing helium-neon laser system Download PDFInfo
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- CN106654839A CN106654839A CN201610896761.9A CN201610896761A CN106654839A CN 106654839 A CN106654839 A CN 106654839A CN 201610896761 A CN201610896761 A CN 201610896761A CN 106654839 A CN106654839 A CN 106654839A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a displacement self-sensing helium-neon laser system. The system comprises a movable measuring rod, a micro displacement piezoelectric sensor, a helium-neon laser containing a right-angle prism folded cavity, and a data collecting and processing unit. The helium-neon laser comprises a right-angle reflecting prism, a right-angle prism cavity mirror, a stress birefringence element, a laser gain tube, an anti-reflection window flake and a concave-surface output cavity mirror. The data collecting and processing unit comprises a polarization beam splitter, two photoelectric detectors, a photoelectric conversion and amplification circuit, a signal processing circuit, a high-voltage amplifier and a display device. According to the technical scheme of the invention, the right-angle prism cavity mirror and the concave-surface output cavity mirror are the two cavity mirrors of a resonant cavity and are stationary and fixed, wherein the two cavity mirrors are free from the influence of the movable measuring rod. Therefore, the system stability is high. The right-angle reflecting prism and the right angle prism cavity mirror form a folded cavity, and the micro displacement piezoelectric sensor is additionally arranged. By adopting the system, the characteristics of light waves can be traced and the self-calibration capability is realized. The method of calculating large numbers and measuring small numbers is conducted, so that the measurement resolution of the displacement self-sensing helium-neon laser system is greatly improved.
Description
Technical field
It relates to laser displacement field of sensing technologies, more particularly to a kind of displacement self-sensing He-Ne laser system.
Background technology
Chinese patent " displacement self-sensing He-Ne laser system and its implementation " (ZL99103514.3) is comprehensively utilized
Various laser physics phenomenons such as laser frequency mode split, laser mode competition, laser power tuning, a common He-Ne laser is changed
One kind is caused not utilize interference but with self calibrating function again relatively simple displacement transducer.The method has λ/8
Displacement measurement resolution (for wavelength is the He-Ne laser of 632.8nm, λ/8 are 79nm).The agent structure of this invention is
One of one half common external cavity helium neon laser, two reflecting cavity mirror are connected on a line slideway (measuring staff) as sound
To axially move along laser optical axis.Chinese patent " with the displacement self-sensing HeNe Optical Maser Systems that opal makees hysteroscope "
(application number：200310115540.6) this system is improved, using cat's eye reflector as hysteroscope and and line slideway
It is connected, overcomes because hysteroscope swings the laser cavity mistuning for causing, improve the stability of system, the measurement range of system is improved
To more than ten millimeter (resolution ratio is still 79nm), and instrumentation.According to theory analysis and experimental verification, " opal "
Use be fully able to make the measurement range of system to reach 50mm, but its resolution ratio and precision are still difficult to meet many users
Requirement.Chinese patent " 1152nm wavelength helium neon laser nanos survey chi " (application number：200910076308.3) system is utilized
The characteristic and self-calibrating capabilities of optical wavelength can be traceable to, the system uses infrared light, its wavelength X is 1152nm, counted greatly using meter,
The method for surveying decimal, by the theoretical resolution of system 10nm is brought up to, and theoretical measurement range brings up to 100mm.Because the system
Using wavelength for 1152nm infrared light, a length of 576nm of its half-wave, thus the resolution ratio of the system exist one it is relatively large
Error.
The content of the invention
In view of drawbacks described above of the prior art or deficiency, are made that the present invention.
The invention provides a kind of displacement self-sensing He-Ne laser system, including movable measuring staff, micrometric displacement piezoelectric sensing
Device, the He-Ne laser containing right-angle prism refrative cavity and data acquisition process unit；
The movable measuring staff, its one end is contacted with object under test；
The micrometric displacement piezoelectric transducer, its one end is connected with the other end of the movable measuring staff；
The He-Ne laser includes：
Right-angle prism refrative cavity, it is used for repeatedly turning back and exporting single-frequency laser, the right-angle prism refrative cavity for light
Including the right-angle reflecting prism being connected with the other end of the micrometric displacement piezoelectric transducer and with the right-angle reflecting prism
The right-angle prism hysteroscope being placed in parallel, the right-angle reflecting prism is in microbit described in micrometric displacement piezoelectric transducer effect lower edge
The optical axis direction for moving piezoelectric transducer does the reflecting surface of nanoscale movement, the right-angle reflecting prism and the right-angle prism hysteroscope
It is coated with highly reflecting films；
Stress birefringence element, it is located at the light emission side of the right-angle prism refrative cavity, and the right-angle prism is folded
The single-frequency laser of chamber output becomes the crossed polarized light with two frequencies, and it is double that the right-angle prism refrative cavity is located at the stress
One end of refracting element；
Laser gain pipe, it with optical axis and is installed on the another of the stress birefringence element with the stress birefringence element
One end；
Anti-reflection window, it is installed on one end of the laser gain pipe, and position along the optical axis direction of the laser gain pipe
Between the stress birefringence element and the laser gain pipe；
Concave surface exports hysteroscope, and it is installed on the another of the laser gain pipe along the optical axis direction of the laser gain pipe
End, and export the crossed polarized light of described two frequencies；
The data acquisition process unit includes：
Polarization spectroscope, it is located at the light emission side that the concave surface exports hysteroscope, and separates defeated from concave surface output hysteroscope
Go out two crossed polarized lights of beam altogether；
Two photodetectors, receive the different crossed polarized light of two separate beam frequencies of the polarization spectroscope；
Opto-electronic conversion and amplifying circuit, two input is connected respectively with the signal output part of two photodetectors；
Signal processing circuit, its input is connected with the signal output part of the opto-electronic conversion and amplifying circuit, completes letter
Number processing function and output control signal；
High-voltage amplifier, it is connected with the signal processing circuit, receives the control letter of the signal processing circuit output
Number driving the micrometric displacement piezoelectric transducer；
Display device, it is connected with the signal processing circuit.
Preferably, the right-angle reflecting prism includes N number of continuous first reflecting surface, two neighboring first reflecting surface
It is mutually perpendicular to, N number of first reflecting surface constitutes N/2 the first groove, N >=2 and N are even number；
The right-angle prism hysteroscope includes M continuous second reflecting surface and is connected with the second reflecting surface described in m-th
The 3rd reflecting surface, two neighboring second reflecting surface is mutually perpendicular to, M second reflecting surface constitute M/2 it is second recessed
Groove, is in 135 ° between the second reflecting surface and the 3rd reflecting surface described in m-th, and M >=2, M is even number and N/2-M/2=1；
First reflecting surface, second reflecting surface are identical with the size of the 3rd reflecting surface, the right angle reflection
Second groove of the first groove of prism and the right-angle prism hysteroscope is staggeredly corresponding；
Angle between the normal of incident ray and first the first reflecting surface is 45 °, incident ray Jing first first
Reflective surface is to second the first reflecting surface, second the first reflective surface of Jing to second the second reflecting surface, Jing second
Individual second reflective surface to the 3rd the first reflecting surface, according to this rule are carried out, Jing N-1 the second reflective surface to N
Individual first reflective surface, then impinge perpendicularly on Jing after the reflective surface of n-th first on the 3rd reflecting surface, the described 3rd
Reflecting surface turns back light along former road, and right-angle prism refrative cavity described in Jing exports the single-frequency laser.
Preferably, the optical axis of the stress birefringence element is in level；The top of the right-angle prism hysteroscope is less than described
The horizontal plane that the optical axis of stress birefringence element is located.
Preferably, the reflecting surface of the right-angle reflecting prism and the right-angle prism hysteroscope is coated with reflectivity and exceedes
99.99% highly reflecting films.
Preferably, N=10, the right-angle reflecting prism includes 10 continuous first reflectings surface, two neighboring described the
One reflecting surface is mutually perpendicular to, and 10 first reflectings surface constitute 5 the first grooves,
M=8, the right-angle prism hysteroscope include 8 continuous second reflectings surface and with the 8th the second reflecting surface phase
3rd reflecting surface of connection, 8 second reflectings surface constitute 4 the second grooves.
Compared with prior art, the present invention has the advantages that：Right-angle prism hysteroscope is helium with concave surface output hysteroscope
Two hysteroscopes of the resonator of neon laser, the static fixation of the two hysteroscopes, do not affected by movable measuring staff, greatly improve and be
The stability of system；The refrative cavity that resonator is constituted using right-angle reflecting prism and right-angle prism hysteroscope, while increase by one can be with
Object under test changes the micro-displacement sensor piezoelectric transducer of chamber length jointly, and the system is using folding cavity configuration in large-scale position
During shift measurement, step-by-step counting is adopted to the displacement of integer λ/2N, that is, count big number, the displacement less than λ/2N is adopted
Micro-displacement sensor piezoelectric ceramics is measured, that is, survey decimal, and so as to the resolution ratio that reaches higher precision and Geng Gao, (wherein N is straight
The number of continuous first reflecting surface of corner reflection prism, two neighboring first reflecting surface is mutually perpendicular to).
Description of the drawings
By reading the detailed description made to non-limiting example made with reference to the following drawings, the application other
Feature, objects and advantages will become more apparent upon：
Fig. 1 is the structural representation of the displacement self-sensing He-Ne laser system of the offer of the present invention；
The structural representation of the refrative cavity of the displacement self-sensing He-Ne laser system that Fig. 2 is provided for the present invention；
Index path in the displacement self-sensing He-Ne laser systems fold chamber that Fig. 3 is provided for the present invention；
The structural representation of the refrative cavity of the displacement self-sensing He-Ne laser system that Fig. 4 is provided for one embodiment of the invention
Figure；
The structure of right-angle reflecting prism in the displacement self-sensing He-Ne laser system that Fig. 5 is provided for one embodiment of the invention
Schematic diagram；
The structure of right-angle prism hysteroscope in the displacement self-sensing He-Ne laser system that Fig. 6 is provided for one embodiment of the invention
Schematic diagram；
Index path in the displacement self-sensing He-Ne laser systems fold chamber that Fig. 7 is provided for one embodiment of the invention.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that, in order to
It is easy to description, the part related to invention is illustrate only in accompanying drawing.
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Below with reference to the accompanying drawings and in conjunction with the embodiments describing the application in detail.
As shown in Figure 1 to Figure 3, the invention provides a kind of displacement self-sensing He-Ne laser system, including movable measuring staff
1st, micrometric displacement piezoelectric transducer 15, the He-Ne laser 30 containing right-angle prism refrative cavity and data acquisition process unit 20.Contain
The He-Ne laser 30 of right-angle prism refrative cavity include right-angle reflecting prism 2, right-angle prism hysteroscope 3, stress birefringence element 4,
Anti-reflection window 5, laser gain pipe 6 and concave surface output hysteroscope 7, right-angle prism hysteroscope 3, concave surface output hysteroscope 7 is He-Ne laser
Two hysteroscopes of 30 resonator, He-Ne laser 30 is one and half external cavity helium neon lasers；Data acquisition process unit 20 includes
8, two photodetectors of polarization spectroscope (the first photodetector 9, the second photodetector 10), opto-electronic conversion and amplification electricity
Road 11, signal processing circuit 12, high-voltage amplifier 13 and display device 14.
Right-angle reflecting prism 2 and right-angle prism hysteroscope 3 are placed in parallel form right angle prism refrative cavity, right-angle reflecting prism and
The reflecting surface of right-angle prism hysteroscope is coated with highly reflecting films, efficient anti-to carry out to the light into right-angle prism refrative cavity
Penetrate.
One end of movable measuring staff 1 contacts with object under test, and the other end is connected with one end of micrometric displacement piezoelectric transducer 15；
The other end connection right-angle reflecting prism 2 of micrometric displacement piezoelectric transducer 15；
Right-angle prism refrative cavity is used for repeatedly turning back for light, and right-angle reflecting prism 2 is connected with the other end of movable measuring staff 1
Connect, right-angle reflecting prism 2 is received in the optical axis direction that micrometric displacement piezoelectric transducer 15 acts on lower edge micrometric displacement piezoelectric transducer 15
Meter level is moved, and right-angle prism hysteroscope 3 is static fixation relative to system；
Stress birefringence element 4, it is located at the light emission side of right-angle prism refrative cavity, and right-angle prism refrative cavity is exported
Single-frequency laser becomes the crossed polarized light with two frequencies, and right-angle prism refrative cavity is located at one end of stress birefringence element；
Laser gain pipe 6, it with optical axis and is installed on the other end of stress birefringence element 4 with stress birefringence element；
Anti-reflection window 5, it is installed on one end of laser gain pipe 6 along the optical axis direction of laser gain pipe, and positioned at stress
Between birefringence element and laser gain pipe；
Concave surface exports hysteroscope 7, and it is installed on the other end of laser gain pipe 6 along the optical axis direction of laser gain pipe, its face
Reflectance coating, outer surface plating anti-reflection film, the crossed polarized light of its two frequency of output, concave surface are plated to the inner surface of the laser gain pipe
Output hysteroscope 7 is static fixation relative to system；
Polarization spectroscope 8, it is located at the light emission side that concave surface exports hysteroscope 7, and separates beam common from the concave surface output output of hysteroscope 7
Two crossed polarized lights；
Two photodetectors, i.e. the first photodetector 9 and the second photodetector 10, receive polarization spectroscope and separate
The different crossed polarized light of two beam frequencies；
Opto-electronic conversion and amplification electricity 11, two input is connected respectively with the signal output part of two photodetectors；
Signal processing circuit 12, its input is connected with the signal output part of opto-electronic conversion and amplifying circuit 11, completes letter
Number processing function and output control signal；
High-voltage amplifier 13, it is connected with signal processing circuit 12, receives the control signal of the output of signal processing circuit 12
To drive micrometric displacement piezoelectric transducer 15；
Display device 14, it is connected with signal processing circuit 12.
Wherein, stress birefringence element 4, anti-reflection window 5, laser gain pipe 6 and concave surface output cavity in He-Ne laser 30
The common optical axis of mirror 7, He-Ne laser produces laser by vibration, and laser is become cross-polarization by birefringence element 4 by single-frequency laser
Double-frequency laser, concave surface output hysteroscope 7 output produce crossed polarized light.Right-angle prism hysteroscope 3 and concave surface output hysteroscope 7 are sharp
Two hysteroscopes of optical cavity, the static fixation of two hysteroscope, do not affected by the movement of movable measuring staff 1, so as to solve system
Stability problem.
Data acquisition process unit 20 receives the crossed polarized light of input, and by polarization spectroscope 8 two-beam is divided into,
Received respectively, then be input to opto-electronic conversion and amplifying circuit 11 to carry out light by the first photodetector 9, the second photodetector 10
Electricity conversion and signal amplify, and the electric signal of generation is input to signal processing circuit 12 carries out signal transacting and output control signal,
Control signal Jing high-voltage amplifier 13 drives micrometric displacement piezoelectric transducer 15, and signal processing circuit 12 is by the data input handled well
To display device 14, finally result is shown by display device 14.
Further, right-angle reflecting prism includes N number of continuous first reflecting surface 20, the two neighboring phase of first reflecting surface 20
Mutually vertical, N number of first reflecting surface 20 constitutes N/2 the first groove 21, N >=2 and N is even number, by up in right-angle reflecting prism 2
Under reflecting surface be followed successively by first the first reflecting surface, second the first reflecting surface, the 3rd the first reflecting surface ... n-th
One reflecting surface；
Right-angle prism hysteroscope includes M continuous second reflecting surface 30 and the be connected with the reflecting surface of m-th second the 3rd
Reflecting surface 31, two neighboring second reflecting surface 30 is mutually perpendicular to, and M the second reflecting surface 30 constitutes M/2 the second groove 32, M
It is in 135 ° between individual second reflecting surface and the 3rd reflecting surface 32, M >=2, M is even number and N/2-M/2=1, in right-angle prism hysteroscope 3
Reflecting surface from top to bottom is followed successively by first the second reflecting surface, second the second reflecting surface, the 3rd the second reflecting surface ...
The reflecting surface of m-th second, the 3rd reflecting surface；
The size of the first reflecting surface, the second reflecting surface and the 3rd reflecting surface is identical, the first groove 21 of right-angle reflecting prism 2
It is staggeredly corresponding with the second groove 32 of right-angle prism hysteroscope 3；
As shown in figure 3, the angle between the normal of incident ray and first the first reflecting surface is 45 °, each is first anti-
The direction for penetrating the light received on face and each second reflecting surface is in 45 ° with respective normal, and the 3rd reflecting surface is plane
Speculum, the 3rd reflecting surface, into 135 °, is a vertical reflecting surface, to ensure that light is impinged perpendicularly on the reflecting surface of m-th second
On 3rd reflecting surface.First the first reflective surface of incident ray Jing is to second the first reflecting surface, and Jing second first is anti-
The face of penetrating reflexes to second the second reflecting surface, second the second reflective surface of Jing to the 3rd the first reflecting surface, according to this rule
Carry out, Jing N-1 the second reflective surface hangs down to the reflective surface of n-th first, then Jing after the reflective surface of n-th first
Directly incide on the 3rd reflecting surface, the 3rd reflecting surface turns back light along former road, right-angle prism refrative cavity described in Jing
Export the single-frequency laser.
Further, the optical axis of stress birefringence element is in level；The top of right-angle prism hysteroscope is double less than the stress
The horizontal plane that the optical axis of refracting element is located.So guarantee that the laser that capillary is projected can reach first the first reflecting surface,
And the light of first the first reflecting surface outgoing of Jing can enter stress birefringence element.
Further, in order to ensure to carry out efficient reflection, right angle to the incident ray into right-angle prism refrative cavity
The reflecting surface of reflecting prism and right-angle prism hysteroscope is coated with highly reflecting films of the reflectivity more than 99.99%.
The present invention is based on Principles of Laser：Laserresonator change of cavity length λ/2, correspond to laser frequency and change between a longitudinal mode
Every Δ.Its general principle is：In standing-wave laser, the frequency change of laser and chamber length change satisfaction：
Wherein, v is laser frequency, and L is that chamber is long.By frequency splitting and mode competition, make any one in intensity tuning curve
Individual longitudinal mode spacing Δ is divided into 4 equal portions (correspond to 4 kinds of different polarization states) in equal size, thus be capable of achieving λ/8 resolution ratio sentence to
Displacement measurement.
Laser frequency changes a longitudinal mode spacing, and corresponding displacement is then：
Wherein, c is the light velocity, and v is laser frequency, and L is that chamber is long." frequency often changes a longitudinal mode spacing (cycle), and chamber length changes
Become λ/2 ", this point is the permanent basic principle set up, be also subdivision.In a system of the invention movable measuring staff 1 connects right angle
Reflecting prism 2 often moves λ, laserresonator chamber length will change N λ (N is the number of continuous first reflecting surface, two neighboring the
One reflecting surface is mutually perpendicular to), using the self aligning characteristic of system, pulse is adopted to the resonator long displacement amount of integer λ/2
Count (correspond to the right-angle reflecting prism displacement of λ/2N), (deficiency is correspond to less than the resonator long displacement amount of λ/2
The right-angle reflecting prism displacement of λ/2N) by the way of micrometric displacement piezoelectric transducer (PZT) subdivision measuring, so as to obtain more
High resolution ratio.
Wherein, birefringence element 4 is inserted in laser instrument, due to birefringence effect, the laser frequency of He-Ne laser is made
Divide, single-frequency laser becomes double-frequency laser, the mutually perpendicular linearly polarized light in two polarization directions of laser instrument output, i.e. o light
(parallel polarized light (∥ light)) and e light (orthogonal polarized light (⊥ light)), by the angle for changing birefringence element, can adjust two
Frequency difference between beam crossed polarized light.The crossed polarized light of output incides respectively the first photoelectricity Jing after the light splitting of polarization spectroscope 8
On detector 9, the second photodetector 10, processed by opto-electronic conversion and amplifying circuit 11, signal processing circuit 12 afterwards, finally
Show on a display device 14.
During measurement, promote movable measuring staff 1 to move when testee is moved, movable measuring staff 1 promote right-angle reflecting prism 2 with
Movement, the chamber length of laser instrument changes therewith, the polarization state of laser instrument output light by the polarization state of periodically-varied, i.e., four successively
Periodically occur：Only all to export → only have orthogonal polarized light defeated for parallel polarization light output → parallel polarized light and orthogonal polarized light
Go out → without light output.Laser beam is detected by the first photodetector 9 and the second photodetector 10, have accordingly four states according to
Secondary appearance：Only the first photodetector 9 is illuminated → and the first photodetector 9 and the second photodetector 10 be while be illuminated
→ only the second photodetector 10 is illuminated → and the first photodetector 9 and the second photodetector 10 be all not illuminated.Such as
This iterative cycles.
Change per next state means that laser cavity length changes the displacement of λ/8, because right-angle reflecting prism often moves λ's
Displacement, (N is the number of above-mentioned continuous first reflecting surface for referring to, two neighboring first is anti-for the displacement of laser cavity length change N λ
The face of penetrating is mutually perpendicular to), so every time the change of polarization state means that right-angle reflecting prism changes the displacement of λ/8N, four polarizations
The sequencing that state occurs may determine that the direction of displacement.According to Principles of Laser " change one longitudinal mode of correspondence of the long half-wavelength in chamber
Interval ", then after 4 different polarization states of experience, the knots modification of laser chamber length is λ/2, because right-angle reflecting prism often moves λ
Displacement, laser cavity length changes the displacement of N λ, therefore experiences after 4 different polarization states, the variable of right-angle reflecting prism 2 be λ/
2N.When displacement stops change, judge that whether current right-angle reflecting prism shift value is the integral multiple of λ/2N, if not then basis
Voltage on direction of displacement plus-minus PZT, slight to promote right-angle reflecting prism 2, change chamber is long, until making right-angle reflecting prism displacement
Measure the integral multiple for λ/2N.The variable of recording voltage, by calculating linear compensation, just can obtain the accurate position less than λ/2N
Shifting amount, so as to the anti-displacement for releasing target to be measured.
As a kind of optional embodiment, as shown in Figures 4 to 7, preferred N=10, M=8 in the example.Right angle reflects
Prism 2 ' includes 10 continuous first reflectings surface, and two neighboring first reflecting surface is mutually perpendicular to, and 10 the first reflectings surface constitute 5
Individual first groove；Right-angle prism hysteroscope 3 ' be connected including 8 continuous second reflectings surface and with the 8th the second reflecting surface
Three reflectings surface, 8 the second reflectings surface constitute 4 the second grooves.5 the first grooves ensure that 10 in right-angle reflecting prism 2
One reflecting surface is as shown in figure 3,4 same the second grooves ensure that 8 the second reflectings surface such as Fig. 4 institutes in right-angle prism hysteroscope 3
The structure shown.The size of the first reflecting surface, the second reflecting surface and the 3rd reflecting surface is identical, the first groove of right-angle reflecting prism 2
With the second groove of right-angle prism hysteroscope 3 staggeredly correspondence, the 3rd reflecting surface is plane mirror, and the 3rd reflecting surface vertically sets
Put, the 3rd reflecting surface and the 8th the second reflecting surface are into 135 °.The reflecting surface of right-angle reflecting prism and right-angle prism hysteroscope is plated
Have more than 99.99% highly reflecting films.
In the embodiment, define 10 the first reflectings surface in Fig. 3 in right-angle reflecting prism 2 ' from top to bottom and be followed successively by the
One prismatic reflection face 201, the second prismatic reflection face 202, prism reflecting surface 203, the 4th prismatic reflection face 204, the 5th rib
Mirror reflecting surface 205, the 6th prismatic reflection face 206, the 7th prismatic reflection face 207, the 8th prismatic reflection face 208, the 9th prism are anti-
Penetrate face 209, the tenth prismatic reflection face 210；Define 8 the second reflectings surface in Fig. 4 in right-angle prism hysteroscope 3 ' from top to bottom according to
It is secondary be the first hysteroscope reflecting surface 301, the second hysteroscope reflecting surface 302, the 3rd hysteroscope reflecting surface 303, the 4th hysteroscope reflecting surface 304,
5th hysteroscope reflecting surface 305, the 6th hysteroscope reflecting surface 306, the 7th hysteroscope reflecting surface 307, the 8th hysteroscope reflecting surface 308, definition
The 3rd reflecting surface being connected with the 8th hysteroscope reflecting surface 308 is the 9th hysteroscope reflecting surface 309, the 9th hysteroscope reflecting surface 309 and the
Into 135 ° between eight hysteroscope reflectings surface 308, the 9th hysteroscope reflecting surface 309 is perpendicular.
Wherein, the angle between the normal in incident ray and the first prismatic reflection face 201 is 45 °, as shown in figure 5, specifically
Radiation direction be：Incident ray is mapped on the first prismatic reflection face 201 from capillary, and the second prismatic reflections of Jing face 202 is reflected
To on the first hysteroscope reflecting surface 301, it is re-reflected on the second hysteroscope reflecting surface 302, then reflexes to prism reflecting surface 203
On, reflection successively is gone down, and until light is reflexed on the 9th hysteroscope reflecting surface 309 by the tenth prismatic reflection face 210, completes light
Incidence；According to the structure of the right-angle prism refrative cavity shown in Fig. 2-Fig. 5, light is vertically mapped to the 9th hysteroscope reflecting surface 309
After upper, the reflection light of the 9th hysteroscope reflecting surface 309, laser light incident light path overlaps with reflected light path, and afterwards light is returned according to former road
Return, then capillary is returned to through the multiple reflections of refrative cavity, eventually arrive at concave surface output hysteroscope 7 and form laser generation.Right-angled edge
Mirror refrative cavity realizes turning back for light.
The advance route of light is clear that from Fig. 5, it will be seen that light is from laser gain pipe in through 18
Secondary reflection eventually arrives at the reflecting surface 309 of hysteroscope the 9th, according to backtracking after being reflected by the reflecting surface 309 of hysteroscope the 9th, enters back into
In laser gain pipe, laser generation is formed, so as to produce laser.Due to being to fold cavity configuration, with incident ray after turning back
It is parallel to have ten light, therefore, right-angle reflecting prism 2 ' often moves the displacement of λ, and laser cavity length will change the displacement of 10 λ,
Therefore after 4 different polarization states of experience, the knots modification of right-angle reflecting prism 2 is λ/20.When displacement stops change, judge current straight
Whether corner reflection prism shift value is the integral multiple of λ/20, if not then slightly being pushed away according to the voltage on direction of displacement plus-minus PZT
Dynamic right-angle reflecting prism 2, change chamber is long, until the integral multiple for making right-angle reflecting prism displacement be λ/20.Recording voltage changes
Variable, by calculating linear compensation, just can obtain the precise displacement amount less than λ/20, so as to the anti-displacement for releasing target to be measured
Amount.Movable measuring staff 1 drives right-angle reflecting prism 2 to move, the crossed polarized light of output after polarization spectroscope light splitting, by two
Photodetector receives respectively, and carries out counting big number by its subsequent conditioning circuit, surveys decimal and process, and obtains displacement measurement and defeated
Go out.The system adopts pulse using cavity configuration is folded during large-scale displacement measurement to the displacement of integer λ/20
Count, that is, count big number, the displacement less than λ/20 is measured using micro-displacement sensor piezoelectric ceramics, that is, decimal is surveyed, so as to reach
To the resolution ratio of higher precision and Geng Gao, for wavelength X is for the He-Ne laser of 632.8nm, its systemic resolution is reachable
To 1nm.So as to become a high-resolution displacement sensing instrument, have broad application prospects.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.People in the art
Member should be appreciated that invention scope involved in the application, however it is not limited to the technology of the particular combination of above-mentioned technical characteristic
Scheme, while also should cover in the case of without departing from the inventive concept, is carried out by above-mentioned technical characteristic or its equivalent feature
Other technical schemes for being combined and being formed.Such as features described above has similar work(with (but not limited to) disclosed herein
The technical scheme that the technical characteristic of energy is replaced mutually and formed.
Claims (5)
1. displacement self-sensing He-Ne laser system, it is characterised in that including movable measuring staff, micrometric displacement piezoelectric transducer, containing straight
The He-Ne laser and data acquisition process unit of angle prism refrative cavity；
The movable measuring staff, its one end is contacted with object under test；
The micrometric displacement piezoelectric transducer, its one end is connected with the other end of the movable measuring staff；
The He-Ne laser includes：
Right-angle prism refrative cavity, it is used for repeatedly turning back and exporting single-frequency laser for light, and the right-angle prism refrative cavity includes
The right-angle reflecting prism that is connected with the other end of the micrometric displacement piezoelectric transducer and parallel with the right-angle reflecting prism
The right-angle prism hysteroscope of placement, the right-angle reflecting prism is in micrometric displacement pressure described in micrometric displacement piezoelectric transducer effect lower edge
The optical axis direction of electric transducer does the reflecting surface of nanoscale movement, the right-angle reflecting prism and the right-angle prism hysteroscope and plates
There are highly reflecting films；
Stress birefringence element, it is located at the light emission side of the right-angle prism refrative cavity, and the right-angle prism refrative cavity is defeated
The single-frequency laser for going out becomes the crossed polarized light with two frequencies, and the right-angle prism refrative cavity is located at the stress birfringence
One end of element；
Laser gain pipe, it with optical axis and is installed on the another of the stress birefringence element with the stress birefringence element
End；
Anti-reflection window, it is installed on one end of the laser gain pipe along the optical axis direction of the laser gain pipe, and positioned at institute
State between stress birefringence element and the laser gain pipe；
Concave surface exports hysteroscope, and it is installed on the other end of the laser gain pipe along the optical axis direction of the laser gain pipe, and
Export the crossed polarized light of described two frequencies；
The data acquisition process unit includes：
Polarization spectroscope, it is located at the light emission side that the concave surface exports hysteroscope, and separates from the output of concave surface output hysteroscope altogether
Two crossed polarized lights of beam；
Two photodetectors, receive the different crossed polarized light of two separate beam frequencies of the polarization spectroscope；
Opto-electronic conversion and amplifying circuit, two input is connected respectively with the signal output part of two photodetectors；
Signal processing circuit, its input is connected with the signal output part of the opto-electronic conversion and amplifying circuit, completes at signal
Reason function and output control signal；
High-voltage amplifier, it is connected with the signal processing circuit, receive the control signal of signal processing circuit output with
Drive the micrometric displacement piezoelectric transducer；
Display device, it is connected with the signal processing circuit.
2. the displacement self-sensing He-Ne laser system according to claims 1, it is characterised in that
The right-angle reflecting prism includes N number of continuous first reflecting surface, and two neighboring first reflecting surface is mutually perpendicular to, N
Individual first reflecting surface constitutes N/2 the first groove, and N >=2 and N are even number；
The right-angle prism hysteroscope includes M continuous second reflectings surface and be connected with the second reflecting surface described in m-th the
Three reflectings surface, two neighboring second reflecting surface is mutually perpendicular to, and M second reflecting surface constitutes M/2 the second groove, the
M is in 135 ° between second reflecting surface and the 3rd reflecting surface, and M >=2, M is even number and N/2-M/2=1；
First reflecting surface, second reflecting surface are identical with the size of the 3rd reflecting surface, the right-angle reflecting prism
The first groove and the right-angle prism hysteroscope the second groove staggeredly correspondence；
Angle between the normal of incident ray and first the first reflecting surface is 45 °, first first reflection of incident ray Jing
Face reflexes to second the first reflecting surface, second the first reflective surface of Jing to second the second reflecting surface, Jing second
Two reflective surfaces to the 3rd the first reflecting surface, according to this rule are carried out, Jing N-1 the second reflective surfaces to n-th the
One reflective surface, then impinge perpendicularly on Jing after the reflective surface of n-th first on the 3rd reflecting surface, the 3rd reflection
Face turns back light along former road, and right-angle prism refrative cavity described in Jing exports the single-frequency laser.
3. displacement self-sensing He-Ne laser system according to claim 1 and 2, it is characterised in that the stress is two-fold
The optical axis for penetrating element is in level；The top of the right-angle prism hysteroscope is less than the water that the optical axis of the stress birefringence element is located
Plane.
4. displacement self-sensing He-Ne laser system according to claim 1, it is characterised in that the right-angle reflecting prism
Highly reflecting films of the reflectivity more than 99.99% are coated with the reflecting surface of the right-angle prism hysteroscope.
5. the displacement self-sensing He-Ne laser system according to claim 1,2 or 4 any one, it is characterised in that
N=10, the right-angle reflecting prism includes 10 continuous first reflectings surface, and two neighboring first reflecting surface is mutual
Vertically, 10 first reflectings surface constitute 5 the first grooves,
M=8, the right-angle prism hysteroscope includes 8 continuous second reflectings surface and is connected with the 8th second reflecting surface
The 3rd reflecting surface, 8 second reflectings surface constitute 4 the second grooves.
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| CN201610896761.9A CN106654839A (en) | 2016-10-13 | 2016-10-13 | Displacement self-sensing helium-neon laser system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610896761.9A CN106654839A (en) | 2016-10-13 | 2016-10-13 | Displacement self-sensing helium-neon laser system |
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