CN203069274U - Laser interferometer optical path difference positioning system - Google Patents
Laser interferometer optical path difference positioning system Download PDFInfo
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- CN203069274U CN203069274U CN 201320036611 CN201320036611U CN203069274U CN 203069274 U CN203069274 U CN 203069274U CN 201320036611 CN201320036611 CN 201320036611 CN 201320036611 U CN201320036611 U CN 201320036611U CN 203069274 U CN203069274 U CN 203069274U
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Abstract
The utility model discloses a laser interferometer system which is simple and compact in structure and used for accurately positioning optical path difference of two ways of a movable mirror and a static mirror of a Fourier transform spectrometer. With the adoption of the combination of a pyramid retroreflection device and a reflector which are compact in spatial layout, the movable arm optical path of a laser interferometer is folded by four times, and the interference pattern period generated by the interferometer is shortened by three times. By photoelectric conversion of a zero crossing point detection circuit, interval pulse signals of the equal light path difference of less than 100 nm can be generated and are used for triggering a detector of the Fourier transform spectrometer to sample signal interference patterns to be tested. With the laser interferometer system, the working spectral region of the Fourier transform spectrometer can be developed toward a short wave band and to near UV (about 350 nm), and also the advantage of high measurement precision (Connes) of the Fourier transform spectrometer is maintained. As a result, the accomplished UV-visible light Fourier transform spectrometer is widely applied in many fields of chemistry, biology, medicine, material, optics and the like.
Description
Technical field
The utility model is a kind of laser interferometer optical path difference positioning system.
Background technology
Than the color dispersion-type sub-ray spectrometer, Fourier transform spectrometer, has following tangible intrinsic optical characteristics advantage in long wave infrared region: 1 hyperchannel (Multiplex); 2 high light fluxes (Throughput); 3 high spectral measurement precision (Connes); 4 wide measurement wave bands; 5 height/tunable optical spectral resolution; 6 all band resolution unanimities.Therefore, Fourier transform spectrometer, is widely used in the measurement of infrared absorption spectrum, and is called Fourier infrared spectrograph widely.Fourier infrared spectrograph can carry out qualitative and quantitative analysis to sample, have characteristics such as signal to noise ratio (S/N ratio) height, favorable reproducibility and sweep velocity be fast, be widely used in fields such as medication chemistry, Di Kuang, oil, coal, environmental protection, customs, jewel evaluation, criminal investigation evaluation.
If do not consider the measurement of absorption spectra, more the Fourier transform spectrometer, of broad sense mainly is made up of light source, diaphragm, interferometer (beam splitter, index glass, horizontal glass), detector and various catoptron, laser instrument, control circuit board and power supply.Its basic structure and principle are as shown in Figure 1.
The incident light that light source to be measured sends is divided into two bundles by the beam splitter of interferometer (semi-transparent semi-reflecting lens) after collimating, a branch of through transmission arrival index glass, another bundle arrives horizontal glass through reflection; Two-beam returns beam splitter respectively after horizontal glass and index glass reflection.Index glass is done continuous straight reciprocating motion with a constant speed near zero optical path difference, thereby the two-beam after the beam splitter beam splitting forms optical path difference, the generation interference.Interference light arrives detector after beam splitter is joined, detector is finished the photosignal conversion, produces continuous interference pattern electric signal.The analog-to-digital conversion card that the main control computer of Fourier spectrometer is equipped with is sampled to the continuous interference pattern, the digitalized intervention pattern that obtains dispersing.By computing machine discrete interference signal is carried out the fast discrete Fourier transform then and handle, finally obtain the spectrum that light source sends light signal.
If the sampling to the continuous interference pattern can accurately be carried out in aplanatism difference mode at interval, the Fourier spectrum measurement that then realizes has the advantage of spectral measurement precision high (Connes).This normally realizes by the interferometer that adopts 632.8 nano wave length helium-neon lasers to drive in the middle of commercial Fourier infrared spectrograph.Its principle as shown in Figure 2.
The index glass of the auxiliary interferometer of the spectral measurement main interference instrument of Fourier infrared spectrograph and optical path difference location is shared same driving translation stage.Because two interferometers are in the environment of height localization on the space, therefore when two index glass scan simultaneously, can produce almost completely related optical path difference and change.Because the driving laser of auxiliary interferometer has adopted wavelength stability and 632.8 splendid nanometer He-Ne Lasers of accuracy, when scanning, the interference signal of auxiliary interferometer can be written as:
I(x wherein) be that the interference signal light intensity is with the function of index glass displacement x, I
0It is the incident intensity of auxiliary interferometer.This moment, the detector of auxiliary interferometer will accurately produce the sinusoidal wave electric signal that a light path semiperiod is 316.4 nanometers; This signal produces a succession of pulse signal through a zero-crossing detection circuit at all sinusoidal wave zero crossing places; This pulse signal triggers the analog-to-digital conversion card of computing machine simultaneously the interference signal that main interference instrument detector produces is at this moment sampled.This just is equivalent to Fourier infrared spectrograph and accurately at interval interference pattern is sampled with 316.4 nanometer optical path differences, thus can wavelength greater than the near infrared of 632.8 nanometers and more long wavelength's wave band obtain the high infrared spectrum of precision.High spectral accuracy advantage that we can say Fourier transform infrared spectrometer is not that Fourier spectrometer is intrinsic, but drives owing to having introduced the He-Ne Lasers that can realize aplanatism difference sampling that interferometer brings.But this advantage is the practical application of spectrometer has brought a lot of operational convenience.
According to Thomas Enqvist sampling law (be sample frequency be at least signal frequency twice or more than, Fourier transform just can obtain not have the accurate spectrum of aliasing), the optical path difference sampling interval of Fourier spectrometer must be smaller or equal to recording 1/2 of minimal wave length; If it is 400 nanometers that desire is surveyed minimal wave length, then the optical path difference sampling interval is at least 200 nanometers; And because of the passive mirror reflection of light path once, this mechanical motion distance bearing accuracy that just means index glass need reach 100 nanometers.This optical path difference location to index glass has proposed high accuracy requirement obviously, and if want to make Fourier transform spectrometer, can measure the shorter black light wave band of wavelength, it is harsher that this requirement just becomes; This is why Fourier transform spectrometer, is applied to the one of the main reasons that infrared long wavelength measures more.
Although Fourier spectrometer can lose its multichannel advantage near ultraviolet when the visible light S-band is worked in theory, other several the intrinsic advantages of Fourier transform spectrometer, can be inherited.If can keep the high precision advantage of Fourier infrared spectrograph simultaneously, the shortwave Fourier transform spectrometer, of then realizing just will have very attracting using value.Can the factor that determine Fourier transform spectrometer, have above-mentioned advantage when S-band is worked mainly comprise: 1, high precision aplanatism difference interference pattern sampling in the spectral response range 3 of the spectral characteristic 2 of optical device, detector, the long range sweep in the Fourier spectrometer.At factor 1 and 2, all have at present the Device and products of being correlated with is enough to be competent at, not at the row of this paper discussion.At factor 3, people once attempted adopting the method for multiple different principle to attempt to solve, for example even time interval sampling method, the linear variable difference transformer localization method, interferential scanning grating localization method, capacitive position sensor localization method, heterodyne laser interferometer method etc.But these methods have some shortcomings that can not put up with, for example: can't realize aplanatism difference sampling with high precision; Can only realize hi-Fix at minimum distance; Environmental factors such as temperature, pressure are required harsh; The cost too expensive is not suitable for conventional instrumentation etc.
Summary of the invention
In order to overcome the drawback of said method, realize that in the simple low cost mode service band of Fourier transform spectrometer, expands to the short wavelength, the many unique advantage that keeps Fourier spectrometer simultaneously, a kind of laser interferometer optical path difference localization method and the system that the utility model proposes are in order to realize above-mentioned purpose.
The utility model is achieved by the following technical solution: a kind of laser interferometer optical path difference positioning system comprises a laser instrument, a cube splitter, a plane mirror as horizontal glass, a little pyramid retroreflector, a big pyramid retroreflector, a plane mirror, a rectilinear translation platform and a photodiode; Described cube splitter is positioned on the emitting light path of described laser instrument, described plane mirror as horizontal glass is positioned on the described cube splitter reflected light path, described little pyramid retroreflector be positioned on the transmitted light path of described cube splitter and cone angle towards described cube splitter, described big pyramid retroreflector is positioned on the transmitted light path of described little pyramid retroreflector and cone angle described cube splitter dorsad, the linear reciprocation scanning motion of described big pyramid retroreflector is driven by its residing rectilinear translation platform, the retroeflection light path of the vertical described big pyramid retroreflector of the reflecting surface of described plane mirror, described photodiode is positioned on the described cube splitter emitting light path.
The concrete characteristics of native system also have, from entering perpendicular to described big pyramid retroreflector bore face, circular bore has been divided into equal-sized six sector regions by symmetry, the pyramid retroreflector is adjusted in rotation, makes incident light, emergent light all be in a pair of sector region of the symmetry in described six sector regions.
The concrete characteristics of native system also have, and above-mentioned little pyramid retroreflector and/or big pyramid retroreflector are for being solid glass pyramid retroreflector, and the normal incidence face of described solid glass pyramid retroreflector adds the plating anti-reflection film.
The concrete characteristics of native system also have, above-mentioned little pyramid retroreflector and the normal incidence face of big pyramid retroreflector and the angle theta between the optical axis vertical plane
1, θ
2Be the 1-2 degree.
The beneficial effects of the utility model are: the implementation method that a kind of simple cheap not only is provided to the expansion of near ultraviolet and visible light S-band for the spectrum working range of Fourier transform spectrometer,, high measurement accuracy (Connes) advantage that has also kept Fourier transform spectrometer, simultaneously, itself compact structure also very are beneficial to miniaturization and the densification of the Fourier spectrometer instrument self of this method of employing.Can be used widely at numerous areas such as chemistry, biology, medicine, material, optics by the ultraviolet-visible light Fourier transform spectrometer, that this method realizes.
Description of drawings
Fig. 1, Fig. 2 are the principle schematic in the utility model background technology.
Fig. 3, Fig. 6 are the structural representation of laser interferometer optical path difference positioning system in the utility model embodiment.
Fig. 4 is that the P of Fig. 3 is to structural representation.
Above in oscillograph, showing among Fig. 5 two comparison of wave shape the sinusoidal wave interference pattern of He-Ne Lasers interferometer and laser interferometer optical path difference positioning system of the present utility model in traditional Fourier spectrometer, nethermost square wave is the optical path difference positioning signal that is produced through zero-crossing detection circuit by the sinusoidal wave interference signal that laser interferometer described in the utility model produces.
Among the figure, 1, laser instrument, 2, cube splitter, 3, plane mirror, 4, little pyramid retroreflector, 5, big pyramid retroreflector, 6, photodiode, 7, attenuator, 8, the rectilinear translation platform.
Embodiment
For clearly demonstrating the technical characterstic of this programme, below by an embodiment, this programme is set forth.
As accompanying drawing, a kind of laser interferometer optical path difference positioning system comprises a laser instrument 1, a cube splitter 2, a plane mirror 3 as horizontal glass, a little pyramid retroreflector 4, a big pyramid retroreflector 5, a plane mirror 3, a rectilinear translation platform 8 and a photodiode 6; Described cube splitter 2 is positioned on the emitting light path of described laser instrument 1, described plane mirror 3 as horizontal glass is positioned on described cube splitter 2 reflected light paths, described little pyramid retroreflector 4 be positioned on the transmitted light path of described cube splitter 2 and cone angle towards described cube splitter 2, described big pyramid retroreflector 5 is positioned on the transmitted light path of described little pyramid retroreflector 4 and cone angle described cube splitter 2 dorsad, the linear reciprocation scanning motion of described big pyramid retroreflector 5 is driven by its residing rectilinear translation platform 8, the retroeflection light path of the vertical described big pyramid retroreflector 5 of the reflecting surface of described plane mirror 3, described photodiode 6 is positioned on described cube splitter 2 emitting light paths.From entering perpendicular to described big pyramid retroreflector 5 bore faces, circular bore has been divided into equal-sized six sector regions by symmetry, the pyramid retroreflector is adjusted in rotation, makes incident light, emergent light all be in a pair of sector region of the symmetry in described six sector regions.Wherein, little pyramid retroreflector and/or big pyramid retroreflector preferably adopt hollow pyramid retroreflector.Adopt hollow pyramid retroreflector more easily to realize structure described in the utility model, because the media that incident, folded light beam are experienced when propagating in hollow pyramid is air, refractive index is approximately 1.But high-precision hollow pyramid retroreflector production and processing difficulty is bigger, so price is comparatively expensive.Structure described in the utility model also can adopt lower-cost solid glass pyramid retroreflector to realize, the laser interferometer cost of formation is reduced greatly.If little pyramid retroreflector and/or big pyramid retroreflector adopt solid glass pyramid retroreflector, can add the plating anti-reflection film at the normal incidence face of solid glass pyramid retroreflector, make normal incidence face and the angle theta 1 between the optical axis vertical plane, the θ 2 of solid glass pyramid retroreflector be the 1-2 degree, 1-2 degree angle causes noise to avoid repeatedly reflecting.
The utility model has utilized the catoptrical characteristics of pyramid retroreflector: namely arbitrarily incident beam is not as long as its incidence point overlaps with the retroreflector bore center of circle, and folded light beam all can be with certain displacement by the retroeflection of pyramid retroreflector, and outgoing beam and incident beam keeping parallelism; Incidence point, initial point and eye point are on same the diameter, and the relative center of circle with eye point of incidence point symmetry.During work, heavy caliber pyramid retroreflector is done the linear reciprocation scanning motion along the incident light parallel direction, with produced optical path difference by the folded light beam of horizontal glass vertical reflection and form and interfere, interference light signal can and be finished opto-electronic conversion by a photodiode detection, and resulting interference sine wave signal can be expressed as:
Wherein
Be that the interference signal light intensity is with the index glass displacement
Function,
Be the incident intensity of auxiliary interferometer,
It is the driving laser wavelength.
Above then in oscillograph, showing among Fig. 5 two comparison of wave shape the sinusoidal wave interference pattern of He-Ne Lasers interferometer and laser interferometer optical path difference positioning system of the present utility model in traditional Fourier spectrometer.On output waveform, can find out significantly that the cycle of the sinusoidal interference signal of the He-Ne Lasers interferometer generation of adopting light path folding is 1/4th of traditional He-Ne Lasers interferometer, so the optical path difference position pulse resolution of its generation improves four times accordingly.This electric signal enters with the same zero-crossing detection circuit of Fourier infrared spectrograph, can produce optical path difference position pulse signal; The bottom is the square-wave signal that light path folding He-Ne Lasers interferometer output signal produces behind zero-crossing detection circuit, and the optical path difference bearing accuracy of this interferometer just can reach 79.1 nanometers so.According to Thomas Enqvist sampling law, the minimal wave length that the Fourier spectrometer that has adopted the utility model to describe the optical path difference localization method can be measured in theory can reach 158.2 nanometers.If the words of 488 nanometers that the wavelength that the driving laser selection is sent by Argon ion laser is shorter, then the interferometer system bearing accuracy according to the utility model principle of work can also further be promoted to 61 nanometers, and the shortest wavelength of surveying of corresponding Fourier spectrometer can be down to 122 nanometers.
The three dimensions symmetrical structure of the pyramid retroreflector that the structure realization of the laser interferometer optical path difference positioning system that the utility model proposes takes full advantage of, so its final implementation structure is very compact, helps to realize the instrument miniaturization of Fourier spectrometer.The pyramid retroreflector has three orthogonal reflectings surface, the seam of any two faces can be imaged on the 3rd face in three faces, therefore, from entering perpendicular to described big pyramid retroreflector bore face, circular bore has been divided into equal-sized six sector regions by symmetry, the pyramid retroreflector is adjusted in rotation, make incident light, emergent light all be in a pair of sector region of the symmetry in described six sector regions, the seam crossing that can avoid incident, reflected light to beat at two faces like this loses light and influences the folded light beam quality.
Adopt hollow pyramid retroreflector more easily to realize structure described in the utility model, because the media that incident, folded light beam are experienced when propagating in hollow pyramid is air, refractive index is approximately 1.But high-precision hollow pyramid retroreflector production and processing difficulty is bigger, so price is comparatively expensive.Structure described in the utility model also can adopt lower-cost solid glass pyramid retroreflector to realize, the laser interferometer cost of formation is reduced greatly.But the normal incidence face of glass pyramid retroreflector can bring extra reflection, has not only lost energy, and can bring parasitic interaction noise, very is unfavorable for high-precision optical path difference location.When reality is implemented, can add the anti-reflection film that plates corresponding optical maser wavelength at the normal incidence face of glass pyramid retroreflector on the one hand, reduce light loss; On the other hand, can adjust the dimensional orientation of two glass pyramid retroreflector, make its normal incidence face and optical axis vertical plane keep the angle of less (about 1-2 degree gets final product)
With
, as shown in Figure 5.Adopted after such enforcement arranges, the folded light beam that produces at two glass pyramid retroreflector normal incidence faces will be reflected with the more wide-angle that doubles angle and depart from optical axis, thereby the parasitic interaction noise of having avoided vertical reflection to bring.For the light intensity of balance two-way interference signal, can in reflected light path, increase suitable light intensity attenuation sheet, interfere sinusoidal wave striped with the output that obtains maximum contrast.The fixedly components and parts of whole laser interferometer system are shown in frame of broken lines among Fig. 3, Fig. 6, and the structure relative compact is conducive to the miniaturization of system.
The utility model can pass through or adopt existing techniques in realizing without the technical characterictic of describing; do not repeat them here; certainly; above-mentioned explanation is not to be to restriction of the present utility model; the utility model also is not limited in above-mentioned giving an example; the variation that those skilled in the art make in essential scope of the present utility model, remodeling, interpolation or replacement also should belong to protection domain of the present utility model.
Claims (5)
1. laser interferometer optical path difference positioning system, it is characterized in that, comprise a laser instrument, a cube splitter, a plane mirror as horizontal glass, a little pyramid retroreflector, a big pyramid retroreflector, a plane mirror, a rectilinear translation platform and a photodiode; Described cube splitter is positioned on the emitting light path of described laser instrument, described plane mirror as horizontal glass is positioned on the described cube splitter reflected light path, described little pyramid retroreflector be positioned on the transmitted light path of described cube splitter and cone angle towards described cube splitter, described big pyramid retroreflector is positioned on the transmitted light path of described little pyramid retroreflector and cone angle described cube splitter dorsad, the linear reciprocation scanning motion of described big pyramid retroreflector is driven by its residing rectilinear translation platform, the retroeflection light path of the vertical described big pyramid retroreflector of the reflecting surface of described plane mirror, described photodiode is positioned on the described cube splitter emitting light path.
2. laser interferometer optical path difference positioning system according to claim 1, it is characterized in that, from entering perpendicular to described big pyramid retroreflector bore face, circular bore has been divided into equal-sized six sector regions by symmetry, the pyramid retroreflector is adjusted in rotation, makes incident light, emergent light all be in a pair of sector region of the symmetry in described six sector regions.
3. laser interferometer optical path difference positioning system according to claim 1 and 2 is characterized in that, described little pyramid retroreflector and/or big pyramid retroreflector are solid glass pyramid retroreflector, described solid glass pyramid retroreflector the normal incidence face add the plating anti-reflection film.
4. laser interferometer optical path difference positioning system according to claim 3 is characterized in that, described little pyramid retroreflector and the normal incidence face of big pyramid retroreflector and the angle theta between the optical axis vertical plane
1, θ
2Be the 1-2 degree.
5. laser interferometer optical path difference positioning system according to claim 1 and 2 is characterized in that, described big pyramid retroreflector and little pyramid retroreflector are hollow pyramid retroreflector.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076090A (en) * | 2013-01-22 | 2013-05-01 | 李剑平 | Laser interferometer optical path difference location method and system |
| CN105444785A (en) * | 2015-12-25 | 2016-03-30 | 中国科学院光电研究院 | Optical distance compensation device and method of scanning plane laser |
| CN106841086A (en) * | 2016-11-22 | 2017-06-13 | 北京空间机电研究所 | A kind of method for improving Atmospheric Survey Fourier spectrometer signal to noise ratio |
| CN111256615A (en) * | 2020-03-18 | 2020-06-09 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
| CN111693133A (en) * | 2020-06-24 | 2020-09-22 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Optical path difference testing device and method for optical fiber hydrophone and computer equipment |
| CN116662789A (en) * | 2023-07-31 | 2023-08-29 | 杭州泽天春来科技有限公司 | Signal processing method and system of Fourier infrared spectrometer and readable storage medium |
-
2013
- 2013-01-22 CN CN 201320036611 patent/CN203069274U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076090A (en) * | 2013-01-22 | 2013-05-01 | 李剑平 | Laser interferometer optical path difference location method and system |
| CN105444785A (en) * | 2015-12-25 | 2016-03-30 | 中国科学院光电研究院 | Optical distance compensation device and method of scanning plane laser |
| CN106841086A (en) * | 2016-11-22 | 2017-06-13 | 北京空间机电研究所 | A kind of method for improving Atmospheric Survey Fourier spectrometer signal to noise ratio |
| CN111256615A (en) * | 2020-03-18 | 2020-06-09 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
| CN111256615B (en) * | 2020-03-18 | 2021-06-04 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
| CN111693133A (en) * | 2020-06-24 | 2020-09-22 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Optical path difference testing device and method for optical fiber hydrophone and computer equipment |
| CN116662789A (en) * | 2023-07-31 | 2023-08-29 | 杭州泽天春来科技有限公司 | Signal processing method and system of Fourier infrared spectrometer and readable storage medium |
| CN116662789B (en) * | 2023-07-31 | 2023-10-27 | 杭州泽天春来科技有限公司 | Signal processing method and system of Fourier infrared spectrometer and readable storage medium |
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