CN103196361B - The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology and measuring method - Google Patents
The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology and measuring method Download PDFInfo
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Abstract
The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology and measuring method, relate to the field of optical detection space object three-dimensional appearance.The invention solves that low, the horizontal resolution characteristic of existing similar technique detection efficiency is poor, isolated defects point is easily omitted, reference surface manufactures difficulty and the problem such as precision is low.In interference measuring instrument, reference light passes to optical fiber collimator through single-mode fiber, forms incident reference beam after collimation; Measuring beam forms the incident measuring beam vertical with incident reference beam after multiple reflections, bundle is closed after incident reference beam and incident 3rd polarization splitting prism of incident measuring beam, be divided into four bundle parallel beams through the 4th, the 5th polarization splitting prism successively, four bundle parallel beams to add respectively after different amount of phase shift through wave plate array form four hot spots on area array CCDs.This measuring method is by carrying out to four hot spots the sphere pattern that image procossing obtains tested microballoon.The present invention is applicable to the quick detection of microsphere surface morphology.
Description
Technical field
What the present invention relates to is the technical field of optical detection space object three-dimensional appearance.
Background technology
Tiny spherical surface is as one of the most frequently used components and parts form, and be applied to the numerous areas such as space flight, military affairs, industry, medical treatment, its surperficial surface precision has vital impact to its performance.Traditional detection means, as although atomic force microscope, Laser Scanning Confocal Microscope etc. have very high longitudinal measuring accuracy, when single measurement range is very little, and need to coordinate high-accuracy mechanical scanning motion device could realize overall measuring three-dimensional morphology, affect seriously by mechanical movement error, simultaneously owing to adopting single-point type scanning survey, there is detection efficiency low, horizontal resolution characteristic difference isolated defects point and the problem such as easily to omit.And the relatively large interfere type measuring method of sensing range needs ideal spherical face as with reference to face, there is reference surface precision not high, manufacture the problems such as difficulty.In addition, tradition phase-shifting interferometric method is comparatively responsive to factors such as interference of stray light, ambient vibration, air turbulences, affects the measuring accuracy of interference system.
Summary of the invention
The present invention is to solve in tiny spherical surface measuring surface form, single measurement sensing range too small, easy omission isolated defects point, reference surface manufacture difficulty and precision is not high, interference field contrast is low and conventional Time-domain phase-shifting interference measuring is subject to environmental factor (vibration, air turbulence) and affects serious problem, and then a kind of short relevant instantaneous phase-shifting interference measuring instrument of detecting fast for microsphere surface morphology and measuring method are provided.
The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology of the present invention, it comprises short coherent laser, spatial filter, one λ/2 wave plate, first polarization splitting prism, λ/4 wave plate, microcobjective, microballoon, 2nd λ/2 wave plate, second polarization splitting prism, fiber coupler, single-mode fiber, optical fiber collimator, first plane mirror, 180 ° of steering angle cone prisms, second plane mirror, 3rd polarization splitting prism, 3rd plane mirror, 4th polarization splitting prism, 5th polarization splitting prism, wave plate array, polaroid, area array CCD optical sensor and computing machine,
Described spatial filter, one λ/2 wave plate, first polarization splitting prism, λ/4 wave plate, microcobjective and microballoon are successively set on the optical axis of the laser beam that short coherent laser exports, the laser beam that short coherent laser exports converts parallel beam to and is incident to λ/2 wave plate after spatial filter transmission, light beam through a described λ/2 wave plate transmission is incident to the first polarization splitting prism, light beam after described first polarization splitting prism transmission is incident to λ/4 wave plate, light beam after the wave plate transmission of described λ/4 is incident to microcobjective, the light beam of incidence meeting coalescence is radiated at the surface of microballoon by described microcobjective, the centre of sphere of described microballoon is positioned at the focal position of microcobjective,
Reflected light through microsphere surface reflection returns along original optical path, after microcobjective transmission, convert directional light to and be incident to λ/4 wave plate, the light splitting surface of the first polarization splitting prism is incident to after the wave plate transmission of described λ/4, the 2nd λ/2 wave plate is incident to after the reflection of this light splitting surface, the light splitting surface of the second polarization splitting prism is incident to after described 2nd λ/2 wave plate transmission, the light beam reflected through this light splitting surface is reference beam, this reference beam is incident to fiber coupler, single-mode fiber is incident to after the coupling of this fiber coupler, optical fiber collimator is incident to through the filtered reference beam of this single-mode fiber, after this optical fiber collimator collimation, obtain parallel reference beam be incident to the 3rd polarization splitting prism as the first incident reference beam,
Light beam through the light splitting surface transmission of the second polarization splitting prism is measuring beam, this measuring beam is incident to the first plane mirror, and 180 ° of steering angle cone prisms are incident to after described first plane mirror reflection, change 180 ° of measuring beams turned to through described 180 ° of steering angle cone prisms and be incident to the second plane mirror, the measuring beam after described second plane mirror reflection is incident to the 3rd polarization splitting prism as the second incident measuring beam;
The optical axis of described first incident reference beam and the optical axis of the second incident measuring beam perpendicular, 3rd polarization splitting prism forms a branch of light beam after the first incident reference beam of incidence and the second incident measuring beam being merged, this light beams is incident to the 3rd plane mirror, the light beam parallel with the light splitting surface of the 4th polarization splitting prism is formed after the 3rd plane mirror reflection, and being incident to described 4th polarization splitting prism, the two bundle parallel light emergences that the light beam of incidence is divided into light intensity identical by described 4th polarization splitting prism are to the 5th polarization splitting prism; Described 5th polarization splitting prism is by two of incidence bundle directional light light splitting respectively, form the parallel beam that four bundle light intensity are equal, the parallel beam that described four bundle light intensity are equal is incident to wave plate array simultaneously, four light beams of described wave plate array to incidence add different amount of phase shift, coherent light is produced after the light beam of described wave plate array transmission is incident to polaroid analyzing, described coherent light is incident to the photosurface of area array CCD optical sensor after polaroid transmission, and area array CCD optical sensor is formed four width interference fringe patterns simultaneously; The electric image signal output terminal of area array CCD optical sensor connects the picture signal collection terminal of computing machine.
Adopt and above-mentionedly realize microsphere surface morphology method for fast measuring with short relevant instantaneous phase-shifting interference measuring instrument and be,
Step one, short coherent laser Emission Lasers bundle, this laser beam converts parallel beam to and is incident to λ/2 wave plate after spatial filter transmission, light beam through a described λ/2 wave plate transmission is incident to the first polarization splitting prism, light beam after described first polarization splitting prism transmission is incident to λ/4 wave plate, light beam after the wave plate transmission of described λ/4 is incident to microcobjective, and the light beam of incidence meeting coalescence is radiated at the surface of microballoon by described microcobjective;
Step 2, area array CCD optical sensor send to computing machine by gathering the four width interference fringe patterns obtained, described computing machine carries out image procossing to this four width interference fringe pattern, obtain the positioning relation between this four width interference fringe pattern, thus calculate the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then solving optical path difference between the two, the final microsphere surface that obtains is by the pattern of laser beam irradiates region.
The short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology in the present invention can also comprise the axial turntable of negative-pressure adsorption and two-dimensional quadrature turntable, the axial turntable of negative-pressure adsorption is for adsorbing tested microballoon, the axial turntable of negative-pressure adsorption is fixed on the turntable of two-dimensional quadrature turntable, and the turning table control signal input part of the axial turntable of negative-pressure adsorption connects the absorption turning table control signal output part of computing machine; The control signal output terminal of two-dimensional quadrature turntable connects the horizontal turning table control signal output part of computing machine.
Adopt above-mentioned short relevant instantaneous phase-shifting interference measuring instrument to realize microsphere surface morphology method for fast measuring to be,
Step 1, control two-dimensional quadrature turntable rotate, and make the rotating shaft of the axial turntable of negative-pressure adsorption vertical with the optical axis measuring light;
Step 2, the microballoon of measurement to be adsorbed on the suction nozzle of the axial turntable of negative-pressure adsorption, to make the centre of sphere of microballoon be positioned at the focal position of microcobjective;
Step 3, open short coherent laser, measure microsphere surface by the single measurement pattern of laser beam irradiates region;
Step 4, computing machine control the axial turntable of negative-pressure adsorption and drive microballoon according to rotating clockwise angle a, repeat step 3, obtain corresponding single measurement pattern; And then control negative-pressure adsorption axial turntable drive microballoon according to rotating clockwise angle a, repeat step 3, until microballoon rotates a circle;
Step 5, computing machine control two-dimensional quadrature turntable and drive the axial turntable of negative-pressure adsorption to move, and make microballoon along the rotating shaft displacement b of the axial turntable of negative-pressure adsorption, then repeat step 3 and 4; And then control two-dimensional quadrature turntable drives the axial turntable of negative-pressure adsorption to move, and makes microballoon along former direction displacement b, repeats step 3 and 4, until microballoon shifts out laser beam irradiates region;
Step 6, by microballoon with the plane perpendicular to the axial turntable rotating shaft of negative-pressure adsorption for minute surface, carry out mirror image switch, then return to step 2;
Step 7, by obtain all one-sided measurement pattern carry out merging treatment, obtain the overall picture on the surface of whole microballoon.
The present invention for single sensing range, increases the area coverage of single measurement with the spherical tank on tested microballoon face.Directly obtained before detecting light beam by single-mode fiber before reference beam, be present in reference beam and measuring beam by vibrating the instant fluctuation caused simultaneously, thus be eliminated in interferometry process.Simultaneously, two Amici prism is adopted to realize instantaneous phase shift in conjunction with wave plate array, quick acquisition multi-frame interferometry image, solve reference surface precision not enough, interference field contrast is low, affects serious problem by the factor such as air turbulence, ambient vibration, improves the antijamming capability of system, realize detecting without leak source of microballoon face, have detection efficiency high, without leak source, measuring accuracy is high, automaticity is high advantage.50nm is better than to target spherical surface type accuracy of detection RMS value.Single measurement can only measure the spherical crown region of the corresponding certain cone angle of spherome surface, and coordinate two-dimensional rotary scanning, surveyed and once turned an angle, it is entirely surperficial that such measured zone can cover spheroid, more in addition image mosaic, reaches the object of Range Extension.
The present invention is applicable to the measurement of the pattern of the microspheres of pair radius between 400 microns to 5 millimeters.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention, Fig. 2 is the A direction view within the scope of dotted line, Fig. 3 is the structural representation of the wave plate array described in embodiment four, and Fig. 4 measures the principle schematic of whole microsphere surface morphology for the measuring method described in embodiment nine.
Embodiment
Embodiment one: composition graphs 1 illustrates present embodiment, the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in present embodiment, it comprises short coherent laser 1, spatial filter 2, one λ/2 wave plate 3, first polarization splitting prism 4, λ/4 wave plate 5, microcobjective 6, microballoon 7, 2nd λ/2 wave plate 10, second polarization splitting prism 11, fiber coupler 12, single-mode fiber 13, optical fiber collimator 14, first plane mirror 15, 180 ° of steering angle cone prisms 16, second plane mirror 17, 3rd polarization splitting prism 18, 3rd plane mirror 19, 4th polarization splitting prism 20, 5th polarization splitting prism 21, wave plate array 22, polaroid 23, area array CCD optical sensor 24 and computing machine 25,
Described spatial filter 2, one λ/2 wave plate 3, first polarization spectroscope 4, λ/4 wave plate 5, microcobjective 6 and microballoon 7 are successively set on the optical axis of the laser beam that short coherent laser 1 exports, the laser beam that short coherent laser 1 exports converts parallel beam to and is incident to λ/2 wave plate 3 after spatial filter 2 transmission, light beam through described λ/2 wave plate 3 transmission is incident to the first polarization splitting prism 4, light beam after described first polarization splitting prism 4 transmission is incident to λ/4 wave plate 5, light beam after wave plate 5 transmission of described λ/4 is incident to microcobjective 6, the light beam of incidence meeting coalescence is radiated at the surface of microballoon 7 by described microcobjective 6, the centre of sphere of described microballoon 7 is positioned at the focal position of microcobjective 6,
Reflected light through microballoon 7 surface reflection returns along original optical path, after microcobjective 6 transmission, convert directional light to and be incident to λ/4 wave plate 5, the light splitting surface of the first polarization splitting prism 4 is incident to after wave plate 5 transmission of described λ/4, the 2nd λ/2 wave plate 10 is incident to after the reflection of this light splitting surface, the light splitting surface of the second polarization splitting prism 11 is incident to after described 2nd λ/2 wave plate 10 transmission, the light beam reflected through this light splitting surface is reference beam, this reference beam is incident to fiber coupler 12, single-mode fiber 13 is incident to after the coupling of this fiber coupler 12, optical fiber collimator 14 is incident to through the filtered reference beam of this single-mode fiber 13, after this optical fiber collimator 14 collimation, obtain parallel reference beam be incident to the 3rd polarization splitting prism 18 as the first incident reference beam,
Light beam through the light splitting surface transmission of the second polarization splitting prism 11 is measuring beam, this measuring beam is incident to the first plane mirror 15, and 180 ° of steering angle cone prisms 16 are incident to after described first plane mirror 15 reflects, change 180 ° of measuring beams turned to through described 180 ° of steering angle cone prisms 16 and be incident to the second plane mirror 17, the measuring beam after described second plane mirror 17 reflects is incident to the 3rd polarization splitting prism 18 as the second incident measuring beam;
The optical axis of described first incident reference beam and the optical axis of the second incident measuring beam perpendicular, 3rd polarization splitting prism 18 forms a branch of light beam after first incident reference beam of incidence and the second incident measuring beam being merged, this light beams is incident to the 3rd plane mirror 19, the light beam parallel with the light splitting surface of the 4th polarization splitting prism 20 is formed after the 3rd plane mirror 19 reflects, and be incident to described 4th polarization splitting prism 20, the two bundle parallel light emergences that the light beam of incidence is divided into light intensity identical by described 4th polarization splitting prism 20 are to the 5th polarization splitting prism 21, described 5th polarization splitting prism 21 is by two of incidence bundle directional light light splitting respectively, form the parallel beam that four bundle light intensity are equal, the parallel beam that described four bundle light intensity are equal is incident to wave plate array 22 simultaneously, four light beams of described wave plate array 22 to incidence add 0 respectively, pi/2, π, the amount of phase shift of 3 pi/2s, four light beams through the transmission of described wave plate array 22 are incident to polaroid 23 simultaneously, coherent light is produced after the analyzing of described polaroid 23, described coherent light is incident to the photosurface of area array CCD optical sensor 24, area array CCD optical sensor 24 is formed four width interference fringe patterns simultaneously, the electric image signal output terminal of area array CCD optical sensor 24 connects the picture signal collection terminal of computing machine 25.
Embodiment two: present embodiment is to the further restriction of the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in embodiment one, in present embodiment, the wavelength of the laser beam that described short coherent laser 1 is launched is 523nm, coherent length is 1mm, output power is for being greater than 0 and being less than 300mw, continuously adjustabe.
Embodiment three: present embodiment is to the further restriction of the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in embodiment one or two, microcobjective 6 described in present embodiment is the numerical aperture 0.4 of 20 times of enlarging objectives, these object lens.
Embodiment four: composition graphs 3 illustrates present embodiment, present embodiment is to the further restriction of the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in embodiment one, two or three, wave plate array 22 described in present embodiment is the wave plate array of 2 × 2, by clock-wise order be 0 respectively, the polarization wave plate of pi/2, π, 3 pi/2 phase differences.
Embodiment five: composition graphs 1 illustrates present embodiment, present embodiment is to the further restriction of the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in embodiment one, two, three or four, and to be resolution be area array CCD optical sensor 24 described in present embodiment that 2048 × 2048, mutually unit are 7 microns.
Such as: the model that German AVT company can be selected to produce is the CCD optical sensor of F421B.
Embodiment six: present embodiment is to the further restriction of the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology described in embodiment one, the axial turntable 8 of negative-pressure adsorption and two-dimensional quadrature turntable 9 is also comprised in present embodiment, the axial turntable 8 of negative-pressure adsorption is for adsorbing tested microballoon 7, the axial turntable 8 of negative-pressure adsorption is fixed on the turntable of two-dimensional quadrature turntable 9, and the turning table control signal input part of the axial turntable 8 of negative-pressure adsorption connects the absorption turning table control signal output part of computing machine; The control signal output terminal of two-dimensional quadrature turntable 9 connects the horizontal turning table control signal output part of computing machine.
Embodiment seven: composition graphs 1 illustrates present embodiment, present embodiment adopts to realize microsphere surface morphology method for fast measuring with short relevant instantaneous phase-shifting interference measuring instrument described in embodiment one to five any one embodiment,
Step one, short coherent laser 1 Emission Lasers bundle, this laser beam converts parallel beam to and is incident to λ/2 wave plate 3 after spatial filter 2 transmission, light beam through described λ/2 wave plate 3 transmission is incident to the first polarization splitting prism 4, light beam after described first polarization splitting prism 4 transmission is incident to λ/4 wave plate 5, light beam after wave plate 5 transmission of described λ/4 is incident to microcobjective 6, and the light beam of incidence meeting coalescence is radiated at the surface of microballoon 7 by described microcobjective 6;
Step 2, area array CCD optical sensor 24 send to computing machine 25 by gathering the four width interference fringe patterns obtained, described computing machine 25 carries out image procossing to this four width interference fringe pattern, obtain the positioning relation between this four width interference fringe pattern, thus calculate the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then solving optical path difference between the two, final microballoon 7 surface that obtains is by the pattern of laser beam irradiates region.
Embodiment eight: present embodiment is further illustrating embodiment seven, realize microsphere surface morphology method for fast measuring with short relevant instantaneous phase-shifting interference measuring instrument described in present embodiment, the detailed process of step 2 is:
Computing machine 25 carries out image procossing to this four width interference fringe pattern, and the process obtaining the positioning relation between this four width interference fringe image is:
Steps A, for every width interference fringe pattern, first interference region and background separation to be opened, obtain four interference region images, then carry out image filtering, Denoising disposal, obtain the interference region image after four width process;
Step B, position fixing process, extract the centre of form coordinate of the interference region of the interference region image after every width process, what the pixel of described four centre of form coordinates was corresponding is same measurement point, the like determine the pixel of respective coordinates in the interference region image of each measurement point after four width process to obtain the positioning relation between four width interference fringe images;
The process of the initial phase difference calculated between measurement light corresponding to each pixel in interference field and reference light according to above-mentioned positioning relation is:
The initial phase difference between measurement light corresponding to each pixel in interference region and reference light is calculated according to the positioning relation between four width interference fringe images, detailed process is: obtain pixel corresponding in its interference region image after four width process respectively for same measurement point, be then brought in four step phase-shifting method computing formula by the gray-scale value of described four pixels
In formula, (x, y) represents the coordinate of the pixel that described measurement point is corresponding, I
1, I
2, I
3and I
4represent the gray-scale value of four pixels respectively;
Calculate and obtain initial phase difference corresponding to described measurement point;
Said method is all adopted to obtain the initial phase difference of corresponding correspondence for each measurement point;
According to the initial phase difference of above-mentioned acquisition, the process solving optical path difference is between the two:
The initial phase difference corresponding according to each measurement point obtains corresponding optical path difference:
In formula, λ represents the wavelength penetrating laser beam of short coherent laser 1;
Final acquisition microballoon 7 surface by the process of the pattern of laser beam irradiates region is:
Will according to formula:
Obtain the distance that all measurement points depart from ideal spherical face, namely the relative coordinate of each measurement point is obtained, draw according to the relative coordinate of all measurement points and obtain microballoon 7 surface by the pattern of laser beam irradiates region, described ideal spherical face is with the centre of sphere of microballoon 7 for the centre of sphere, the sphere being radius with the radius of microballoon 7.
Embodiment nine: present embodiment adopts the short relevant instantaneous phase-shifting interference measuring instrument described in embodiment six to realize microsphere surface morphology method for fast measuring,
Step 1, control two-dimensional quadrature turntable 9 rotate, and make the rotating shaft of the axial turntable 8 of negative-pressure adsorption vertical with the optical axis measuring light;
Step 2, the microballoon 7 of measurement to be adsorbed on the suction nozzle of the axial turntable 8 of negative-pressure adsorption, to make the centre of sphere of microballoon 7 be positioned at the focal position of microcobjective 6;
Step 3, open short coherent laser 1, measure microballoon 7 surface by the single measurement pattern of laser beam irradiates region;
Step 4, computing machine 25 control the axial turntable 8 of negative-pressure adsorption and drive microballoon according to rotating clockwise angle a, repeat step 3, obtain corresponding single measurement pattern; And then the axial turntable 8 of control negative-pressure adsorption drives microballoon according to rotating clockwise angle a, repeats step 3, until microballoon rotates a circle;
Step 5, computing machine 25 control two-dimensional quadrature turntable 9 and drive the axial turntable 8 of negative-pressure adsorption to move, and make microballoon 7 along the rotating shaft displacement b of the axial turntable 8 of negative-pressure adsorption, then repeat step 3 and 4; And then control two-dimensional quadrature turntable 9 drives the axial turntable 8 of negative-pressure adsorption to move, and makes microballoon 7 along former direction displacement b, repeats step 3 and 4, until microballoon 7 shifts out laser beam irradiates region;
Step 6, by microballoon with the plane perpendicular to axial turntable 8 rotating shaft of negative-pressure adsorption for minute surface, carry out mirror image switch, then return to step 2;
Step 7, by obtain all one-sided measurement pattern carry out merging treatment, obtain the overall picture on the surface of whole microballoon 7.
In present embodiment, step 3 adopts the measuring method described in embodiment seven to realize one-sided measurement pattern.
Rotational angle a described in step 4 is decided by the size of laser beam irradiates region according to microballoon 7 surface, air line distance d between 2 that the edges of regions of adjacent twice single measurement is intersected be more than or equal to microsphere radius both can, optimum distance equals microsphere radius.
Displacement b described in step 5 is associated with rotational angle a, displacement b be less than or equal to air line distance d both can, optimum distance equals air line distance d.
Measuring method described in present embodiment is the measuring method of the overall sphere pattern of the tiny spherical surface adopting the short relevant instantaneous phase-shifting interference measuring instrument described in embodiment six to realize.
The present invention is used to interfere survey instrument to achieve tiny spherical surface pattern high precision, high-level efficiency, detect without leak source.
Principle of work:
The linearly polarized laser bundle of short-phase dry length laser instrument 1 outgoing forms linear polarization directional light after spatial filter 2 filtering expands, and adjusts behind polarization direction be transmitted through polarization splitting prism 4 through λ/2 wave plate 3, converges to tested microballoon 7 surface through object lens 6.Single measurement can only measure the spherical crown region of the corresponding certain cone angle of spherome surface, coordinate two-dimensional rotary scanning, wherein negative-pressure adsorption turntable 8 is vertical with the direction of two-dimensional quadrature turntable 9, has surveyed and has once turned an angle, it is entirely surperficial that such measured zone covers spheroid, scans the full surface of microballoon.The convergence center of light beam overlaps with the centre of sphere of microballoon, beam orthogonal measured surface is incident, therefore will return along original optical path, but because twice through λ/4 wave plate 5, polarization direction have rotated 90 °, the light splitting surface of polarization splitting prism 4 reflects completely, incides polarization splitting prism 11 through λ/2 wave plate 10, its light splitting surface is divided into two bundles, a branch ofly directly transmit Amici prism 11, as measuring beam, a branch ofly reflect Amici prism 11, as with reference to light beam.Measure light to reflect through plane mirror 15, steering angle cone prism 16, turns to through 180 °, then is reflected into through plane reflection prism 17 and is mapped to polarization spectroscope 18, is transmitted through its light splitting surface.Reference light is coupled through fiber coupler 12, enters single-mode fiber 13.Because the fibre core of single-mode fiber is very thin, self just has good filter action, utilize the bending loses characteristic of optical fiber simultaneously, lucky elimination space wavefront distortion, the parallel beam of approximate ideal is collimated into through optical fiber collimator 14, reflect at the light splitting surface place of polarization splitting prism 18, close with measuring beam and restraint, but the polarization direction of two-beam is perpendicular.
Close the incident Amici prism 20 after plane mirror 19 reflects of the light beam after bundle.Because the incident direction of light beam is parallel with the light splitting surface of Amici prism 20, light beam is divided into two identical bundle parallel light emergences of light intensity.The spacing of parallel beam is determined by the incidence point position on Amici prism 20.In like manner, two bundle directional lights of outgoing are through Amici prism 21 light splitting, form the parallel beam that four bundle light intensity are equal, through wave plate array 22, different amount of phase shift is added to four bundle light, again through polaroid 23 analyzing, produce coherent light, area array CCD 24 is formed four width interference fringe patterns simultaneously, obtained by CCD24 single acquisition, and obtain the positioning relation between four width interference fringe images by the method for image procossing, thus calculate the initial phase difference between measuring beam and reference beam that in interference field, each pixel is corresponding, and then solve optical path difference between the two, realize Shape measure.
Single measurement can only measure the spherical crown region of the corresponding certain cone angle of spherome surface, and coordinate two-dimensional rotary scanning, surveyed and once turned an angle, it is entirely surperficial that such measured zone can cover spheroid, more in addition image mosaic, reaches the object of Range Extension.Rotating λ/2 wave plate 10 is regulate the reflected light of polarization splitting prism 11 and the light intensity ratio of transmitted light.The light splitting surface of Amici prism 20 is vertical with the light splitting surface of Amici prism 21.180 ° of steering angle cone prisms 16 are as delayer, the optical path difference that compensating measure light beam is delayed relative to reference beam, the light splitting surface simultaneously arriving polarization splitting prism 18 before making measuring beam and before reference beam carries out conjunction and restraints, and guarantees on CCD24, form clear interference field.Owing to directly being obtained before detecting light beam by single-mode fiber before reference beam, be present in reference wave and measuring beam by vibrating the instant fluctuation caused simultaneously, thus be eliminated in interferometry process.Meanwhile, adopt two Amici prism to realize instantaneous phase shift in conjunction with wave plate array, obtain multi-frame interferometry image fast, significantly reduce the Phase-shifting Errors that the factor such as air turbulence, vibration is introduced, improve the antijamming capability of measuring system.
Claims (9)
1. for short relevant instantaneous phase-shifting interference measuring instrument that microsphere surface morphology detects fast, it is characterized in that: it comprises short coherent laser (1), spatial filter (2), one λ/2 wave plate (3), first polarization splitting prism (4), λ/4 wave plate (5), microcobjective (6), microballoon (7), 2nd λ/2 wave plate (10), second polarization splitting prism (11), fiber coupler (12), single-mode fiber (13), optical fiber collimator (14), first plane mirror (15), 180 ° of steering angle cone prisms (16), second plane mirror (17), 3rd polarization splitting prism (18), 3rd plane mirror (19), 4th polarization splitting prism (20), 5th polarization splitting prism (21), wave plate array (22), polaroid (23), area array CCD optical sensor (24) and computing machine (25),
Described spatial filter (2), one λ/2 wave plate (3), first polarization splitting prism (4), λ/4 wave plate (5), microcobjective (6) and microballoon (7) are successively set on the optical axis of the laser beam that short coherent laser (1) exports, the laser beam that short coherent laser (1) exports converts parallel beam to and is incident to λ/2 wave plate (3) after spatial filter (2) transmission, light beam through described λ/2 wave plate (3) transmission is incident to the first polarization splitting prism (4), light beam after the transmission of described first polarization splitting prism (4) is incident to λ/4 wave plate (5), light beam after wave plate (5) transmission of described λ/4 is incident to microcobjective (6), the light beam of incidence meeting coalescence is radiated at the surface of microballoon (7) by described microcobjective (6), the centre of sphere of described microballoon (7) is positioned at the focal position of microcobjective (6),
Reflected light through microballoon (7) surface reflection returns along original optical path, after microcobjective (6) transmission, convert directional light to and be incident to λ/4 wave plate (5), the light splitting surface of the first polarization splitting prism (4) is incident to after wave plate (5) transmission of described λ/4, the 2nd λ/2 wave plate (10) is incident to after the reflection of this light splitting surface, the light splitting surface of the second polarization splitting prism (11) is incident to after described 2nd λ/2 wave plate (10) transmission, the light beam reflected through this light splitting surface is reference beam, this reference beam is incident to fiber coupler (12), single-mode fiber (13) is incident to after this fiber coupler (12) coupling, optical fiber collimator (14) is incident to through this single-mode fiber (13) filtered reference beam, after this optical fiber collimator (14) collimation, obtain parallel reference beam be incident to the 3rd polarization splitting prism (18) as the first incident reference beam,
Light beam through the light splitting surface transmission of the second polarization splitting prism (11) is measuring beam, this measuring beam is incident to the first plane mirror (15), and 180 ° of steering angle cone prisms (16) are incident to after described first plane mirror (15) reflection, change 180 ° of measuring beams turned to through described 180 ° of steering angle cone prisms (16) and be incident to the second plane mirror (17), the measuring beam after described second plane mirror (17) reflection is incident to the 3rd polarization splitting prism (18) as the second incident measuring beam;
The optical axis of described first incident reference beam and the optical axis of the second incident measuring beam perpendicular, 3rd polarization splitting prism (18) forms a branch of light beam after the first incident reference beam of incidence and the second incident measuring beam being merged, this light beams is incident to the 3rd plane mirror (19), the light beam parallel with the light splitting surface of the 4th polarization splitting prism (20) is formed after the 3rd plane mirror (19) reflection, and be incident to described 4th polarization splitting prism (20), the two bundle parallel light emergences that the light beam of incidence is divided into light intensity identical by described 4th polarization splitting prism (20) are to the 5th polarization splitting prism (21), described 5th polarization splitting prism (21) is by two of incidence bundle directional light light splitting respectively, form the parallel beam that four bundle light intensity are equal, the parallel beam that described four bundle light intensity are equal is incident to wave plate array (22) simultaneously, four light beams of described wave plate array (22) to incidence add 0 respectively, pi/2, π, the amount of phase shift of 3 pi/2s, four light beams through the transmission of described wave plate array (22) are incident to polaroid (23) simultaneously, coherent light is produced after described polaroid (23) analyzing, described coherent light is incident to the photosurface of area array CCD optical sensor (24), area array CCD optical sensor (24) is formed four width interference fringe patterns simultaneously, the electric image signal output terminal of area array CCD optical sensor (24) connects the picture signal collection terminal of computing machine (25).
2. the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology according to claim 1, it is characterized in that: the wavelength of the laser beam that described short coherent laser (1) is launched is 523nm, coherent length is 1mm, output power is for being greater than 0 and being less than 300mw, continuously adjustabe.
3. the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology according to claim 1, is characterized in that: described microcobjective (6) is the numerical aperture 0.4 of 20 times of enlarging objectives, these object lens.
4. the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology according to claim 1, it is characterized in that: described wave plate array (22) is the wave plate array of 2 × 2, by clock-wise order be 0 respectively, the polarization wave plate of pi/2, π, 3 pi/2 phase differences.
5. the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology according to claim 1, is characterized in that: to be resolution be described area array CCD optical sensor (24) that 2048 × 2048, mutually unit are 7 microns.
6. the short relevant instantaneous phase-shifting interference measuring instrument detected fast for microsphere surface morphology according to claim 1 to 5 any one claim, it is characterized in that: further comprising the axial turntable (8) of negative-pressure adsorption and two-dimensional quadrature turntable (9), the axial turntable (8) of negative-pressure adsorption is for adsorbing tested microballoon (7), the axial turntable (8) of negative-pressure adsorption is fixed on the turntable of two-dimensional quadrature turntable (9), and the turning table control signal input part of the axial turntable (8) of negative-pressure adsorption connects the absorption turning table control signal output part of computing machine; The control signal output terminal of two-dimensional quadrature turntable (9) connects the horizontal turning table control signal output part of computing machine.
7. adopt short relevant instantaneous phase-shifting interference measuring instrument according to claim 1 to realize microsphere surface morphology method for fast measuring, it is characterized in that: described measuring method comprises the steps:
Step one, short coherent laser (1) Emission Lasers bundle, this laser beam converts parallel beam to and is incident to λ/2 wave plate (3) after spatial filter (2) transmission, light beam through described λ/2 wave plate (3) transmission is incident to the first polarization splitting prism (4), light beam after the transmission of described first polarization splitting prism (4) is incident to λ/4 wave plate (5), light beam after wave plate (5) transmission of described λ/4 is incident to microcobjective (6), the light beam of incidence meeting coalescence is radiated at the surface of microballoon (7) by described microcobjective (6),
Step 2, area array CCD optical sensor (24) send to computing machine (25) by gathering the four width interference fringe patterns obtained, described computing machine (25) carries out image procossing to this four width interference fringe pattern, obtain the positioning relation between this four width interference fringe pattern, thus calculate the initial phase difference between measurement light and reference light that in interference field, each pixel is corresponding, and then solve optical path difference between the two, finally obtain microballoon (7) surface by the pattern of laser beam irradiates region.
8. adopt short relevant instantaneous phase-shifting interference measuring instrument to realize microsphere surface morphology method for fast measuring according to claim 7, it is characterized in that: the detailed process of step 2 is:
Computing machine (25) carries out image procossing to this four width interference fringe pattern, and the process obtaining the positioning relation between this four width interference fringe image is:
Steps A, for every width interference fringe pattern, first interference region and background separation to be opened, obtain four interference region images, then carry out image filtering, Denoising disposal, obtain the interference region image after four width process;
Step B, position fixing process, extract the centre of form coordinate of the interference region of the interference region image after every width process, what the pixel of described four centre of form coordinates was corresponding is same measurement point, the like determine the pixel of respective coordinates in the interference region image of each measurement point after four width process to obtain the positioning relation between four width interference fringe images;
The process of the initial phase difference calculated between measurement light corresponding to each pixel in interference field and reference light according to above-mentioned positioning relation is:
The initial phase difference between measurement light corresponding to each pixel in interference region and reference light is calculated according to the positioning relation between four width interference fringe images, detailed process is: obtain pixel corresponding in its interference region image after four width process respectively for same measurement point, be then brought in four step phase-shifting method computing formula by the gray-scale value of described four pixels
In formula, (x, y) represents the coordinate of the pixel that described measurement point is corresponding, I
1, I
2, I
3and I
4represent the gray-scale value of four pixels respectively;
Calculate and obtain initial phase difference corresponding to described measurement point;
Said method is all adopted to obtain corresponding initial phase difference for each measurement point;
According to the initial phase difference of above-mentioned acquisition, the process solving optical path difference is between the two:
The initial phase difference corresponding according to each measurement point obtains corresponding optical path difference:
In formula, λ represents the wavelength penetrating laser beam that short coherent laser (1) is sent out;
Final acquisition microballoon (7) surface by the process of the pattern of laser beam irradiates region is:
Will according to formula:
Obtain the distance that all measurement points depart from ideal spherical face, namely the relative coordinate of each measurement point is obtained, draw according to the relative coordinate of all measurement points and obtain microballoon (7) surface by the pattern of laser beam irradiates region, described ideal spherical face is with the centre of sphere of microballoon (7) for the centre of sphere, is the sphere of radius with the radius of microballoon (7).
9. adopt short relevant instantaneous phase-shifting interference measuring instrument according to claim 6 to realize microsphere surface morphology method for fast measuring, it is characterized in that: described measuring method is:
Step 1, control two-dimensional quadrature turntable (9) are rotated, and make the rotating shaft of the axial turntable (8) of negative-pressure adsorption vertical with the optical axis measuring light;
Step 2, the microballoon (7) measured to be adsorbed on the suction nozzle of the axial turntable (8) of negative-pressure adsorption, to make the centre of sphere of microballoon (7) be positioned at the focal position of microcobjective (6);
Step 3, open short coherent laser (1), measure microballoon (7) surface by the single measurement pattern of laser beam irradiates region;
Step 4, computing machine (25) control the axial turntable (8) of negative-pressure adsorption and drive microballoon according to rotating clockwise angle a, repeat step 3, obtain corresponding single measurement pattern; And then control negative-pressure adsorption axial turntable (8) drive microballoon according to rotating clockwise angle a, repeat step 3, until microballoon rotates a circle;
Step 5, computing machine (25) control two-dimensional quadrature turntable (9) and drive the axial turntable (8) of negative-pressure adsorption mobile, make microballoon (7) along the rotating shaft displacement b of the axial turntable (8) of negative-pressure adsorption, then repeat step 3 and 4; And then it is mobile to control the axial turntable (8) of two-dimensional quadrature turntable (9) drive negative-pressure adsorption, make microballoon (7) along former direction displacement b, repeat step 3 and 4, until microballoon (7) shifts out laser beam irradiates region;
Step 6, by microballoon with the plane perpendicular to axial turntable (8) rotating shaft of negative-pressure adsorption for minute surface, carry out mirror image switch, then return to step 2;
Step 7, by obtain all one-sided measurement pattern carry out merging treatment, obtain the overall picture on the surface of whole microballoon (7).
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