CN103913127A - Digital holography spherical surface type detection device based on subaperture phase stitching - Google Patents
Digital holography spherical surface type detection device based on subaperture phase stitching Download PDFInfo
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Abstract
The invention discloses a digital holography spherical surface type detection device based on subaperture phase stitching. According to the detection device, subaperture phase stitching measurement is carried out on the surface type of a sphere, the surface type of a hemisphere and the surface type of a spherical crown through a digital holography method; in a light path structure, a spherical surface to be detected is illuminated by spherical light waves, reflected object light is collected, the included angle between reference light and the object light is controlled through a light beam deflector, and off-axis digital holography is achieved. In order to enlarge an observation field of view on the premise that the observation resolution ratio is guaranteed, surface type information of subapertures of the spherical surface to be detected can be measured respectively, phase stitching is carried out on obtained holographic reconstructed images, and then complete surface type information of the spherical surface to be detected is obtained. The layout structure of various optical devices can be compact, flexible and stable by the adoption of an integrated optical platform, and the detection device can be applied to high-precision on-line surface type observation of large-aperture or large-numerical-aperture mechanical assemblies such as spherical optical devices and spherical rotors.
Description
Technical field
The present invention relates to a kind of spherical surface type detection system, more particularly, refer to a kind of digital hologram spherical surface type detection system based on sub-aperture phase splicing.
Background technology
The technology that spherical surface type is measured at present mainly comprises three coordinate machine detection, shear interference technology and Digital Holography etc.Digital Holography is utilized the electro-optical imaging sensors such as CCD, CMOS part recorded hologram in digital form, in reproduction process, utilize computer simulation to reproduce the optical diffraction process reengineering object light of reference light irradiation hologram, thus the amplitude of Obtaining Accurate object under test and phase information.
Detect for Digital Holography being applied to spherical surface type, need to solve some technical matterss: the spatial resolution of (1) digital hologram imaging is subject to imageing sensor (CCD, CMOS) performance index, especially the restriction of picture dot size, for improving the imaging resolution that reproduces picture, the small-bore interferometer of general employing is measured, but now imaging viewing field is subject to bore restriction, and the face type of heavy caliber, large-numerical aperture is lacked to effective measurement means.(2) for improving signal to noise ratio (S/N ratio) and image quality, in recording process, need beam intensity ratio, incident angle and wavefront curvature to object light and reference light accurately to control.(3) for the online face type that realizes measuring object detects, must be in conjunction with the factors such as platform, attitude, motion state that are contained in of measuring object, appropriate design light path, makes its compact conformation, good stability, simultaneously convenient operation and debugging.
Summary of the invention
The present invention, in order to address the above problem, proposes a kind of digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing.This device adopts the method for digital hologram, the surperficial face type of spheroid, hemisphere, spherical crown is carried out to sub-aperture phase splicing and measure; In light channel structure, with parallel light target to be measured and collect the object light of scattering, utilize the angle of beam deflector control reference light and object light, realize off-axis digital holography.In order to increase observation visual field in guaranteeing observation resolution, can measure respectively a certain sub-aperture plane type information of object to be measured, and the holographic reconstructed image obtaining is carried out to phase place splicing, and then obtain complete subject surface face type information to be measured.This device by integrated optical table make the compact layout and structure of multiple optical device, flexibly, stable, the mechanical component such as spherical optics components and parts, spherical spinner that can be used for high-precision heavy caliber, large-numerical aperture carries out online face type observation.
A kind of digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing of the present invention, this device includes LASER Light Source, spectrophotometric unit, catoptron, the first beam collimation unit, the second beam collimation unit, beam deflector, depolarization Amici prism, standard spherical mirror, CMOS camera, five dimension adjustment mounting platforms; The laser that LASER Light Source is 532nm for output center wavelength; Polarization splitting prism carries out light-splitting processing to laser, and the light beam after light splitting after the second half-wave plate, catoptron, beam collimation unit, beam deflector, as parallel reference light, enters to inject depolarization Amici prism in turn; Another light beam forms parallel illumination light and is irradiated on standard spherical mirror behind the second beam collimation unit, realizes the spherical illumination to measuring object; Illumination light is through the reflection of sphere, and the object light that spherome surface phase information is carried in formation enters depolarization Amici prism; Depolarization Amici prism closes light processing to parallel reference light, the object light of incident and obtains combined light beam, and the hologram that this combined light beam forms is caught by the photosurface of CMOS camera.Five dimensions adjust mounting platforms for measuring object is fixed, aligning and wheel measuring.
The invention has the advantages that:
(1) adopt measuring method, there is noncontact, non-destructive, and without pre-service, very little to the damage of sphere.
(2) adopt Digital Holography, reduce exposure frequency, can effectively overcome the impact of the factor such as temperature, vibration on measurement result, the face type information of Dynamic Acquisition spherome surface.
(3) adopt the method for phase place splicing to look like to splice measurement to reproducing the phase place obtaining, in guaranteeing Measurement Resolution, effectively expand imaging viewing field, the face type that can be used for the sphere of heavy caliber, large-numerical aperture detects.
Accompanying drawing explanation
Fig. 1 is the light path transmission structure block diagram of digital hologram spherical surface type pick-up unit of the present invention.
Fig. 2 is the light path transmission structure figure of spectrophotometric unit of the present invention.
Fig. 3 is beam deflector structural drawing of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
As shown in Figure 1, a kind of digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing of the present invention, comprises LASER Light Source 1, spectrophotometric unit 2, catoptron 3, the first beam collimation unit 4, beam deflector 5, the second beam collimation unit 6, depolarization Amici prism 7, standard spherical mirror 8, five dimension adjustment mounting platforms 9, CMOS camera 10.Wherein, the first beam collimation unit 4 and the second beam collimation unit 6 have identical structure.
LASER Light Source 1 is for providing the laser 1a of 532nm, it is optical information, laser 1a is incident to spectrophotometric unit 2, and this LASER Light Source 1 provides the single longitudinal mode laser that centre wavelength is 532nm, and can choose the model that can select Cobolt company of Sweden to produce is the laser instrument of Samba TM532nm.
Spectrophotometric unit 2 as shown in Figure 2, comprises half-wave plate A2-2, polarization splitting prism 2-3, half-wave plate B2-4, adjustable attenuator 2-1.
Spectrophotometric unit 2, for the laser 1a that to receive from the centre wavelength of LASER Light Source 1 outgoing be 532nm, be divided into spatial light 2a and 2b output, and capable of regulating changes the beam intensity ratio (being generally 1:5～5:1) of two-way light.
Laser 1a incides and on polarization splitting prism 2-3, is divided into two bundle polarization directions orthogonal reflected light and transmitted light through adjustable attenuator 2-1, A half-wave plate 2-2; Wherein reflected light enters reference path after half-wave plate B2-4; Another road transmitted light enters object light light path.In the present invention, adjust half-wave plate A2-2 by rotation, can change the beam intensity ratio (being generally 1:5～5:1) between spatial light 2a and 2b, and then change the beam intensity ratio (being generally 1:5～5:1) of parallel reference light 5a and object light 8b, realize the adjusting of holographic fringes contrast.Half-wave plate B2-4 is adjusted in rotation, can guarantee that spatial light 2a is consistent with the polarization direction of 2b.
In the present invention, adjustable attenuator 2-1 can choose the circular adjustable attenuator of GCO-0701M type of photoelectricity company of Beijing Daheng; Half-wave plate A2-2 and half-wave plate B2-4 can choose the GCL-060411 type quartz zero level half-wave plate of photoelectricity company of Beijing Daheng; Polarization splitting prism 2-3 can choose the GCC-402102 type polarization splitting prism of photoelectricity company of Beijing Daheng.
Catoptron 3 is for the light beam of transferring, and spatial light 2a exports catoptron 3 to, obtains reflected light 3a, exports the first beam collimation unit 4 to, and catoptron 3 can be chosen the GCC-102104 type catoptron of photoelectricity company of Beijing Daheng.
The first beam collimation unit 4 is identical with the second beam collimation unit 6 structures, take the first beam collimation unit 4 as example, describes below.
The first beam collimation unit 4 comprises spatial filter and plano-convex lens; Spatial filter, for the reflected light 3a receiving is expanded after processing, exposes on plano-convex lens, forms directional light 4a and export beam deflector to after plano-convex lens.The first beam collimation unit 4, for the spatial light 2a after reflection is expanded, and is collimated as parallel light emergence.
In the second beam collimation unit 6, spatial filter, for the transmitted light 2b receiving is expanded after processing, exposes on plano-convex lens, forms directional light 6a and export depolarization Amici prism 7 to after plano-convex lens.The second beam collimation unit 6, for the spatial light 2b after reflection is expanded, and is collimated as parallel light emergence.
GCO-01M type spatial filter and GCL-010147 type plano-convex lens that beam collimation unit can be produced by photoelectricity company of Beijing Daheng combine.
Beam deflector 5 is for changing the incident angle of reference light, and then the angle of adjustment reference light and object light.As shown in Figure 3, beam deflector 5 comprises one dimension displacement platform 5-1, two-dimentional adjustable eyeglass racks 5-2 and catoptron 5-3, GCM-150101M type rack-and-pinion transfer table, GCM-0858 type reflector mount and the GCC-102104 type catoptron that can select respectively photoelectricity company of Beijing Daheng to produce.Wherein, regulate one dimension displacement platform 5-1 by adjusting knob 5-6, realize the axial movement of catoptron 5-3x, by regulating knob 5-4, the 5-5 of two-dimentional adjustable eyeglass racks 5-2, the two-dimensional attitude of realizing catoptron 5-3 regulates.Directional light 4a exports parallel reference light 5a to depolarization Amici prism 7 by beam deflector 5, by adjusting knob 5-4,5-5,5-6, realizes the multi-angle incident of parallel reference light to CMOS camera 10.
Depolarization Amici prism 7, by parallel reference light 5a and the synthetic light beam of object light 8b, obtains light beam 7b, exports CMOS camera 10 to, the 47571 type depolarization Amici prisms that depolarization Amici prism 7 can select Edmund Optical Co., Ltd to produce.And depolarization Amici prism 7 receives directional light 6a, obtain parallel illumination light 7a, export sphere standard mirror 8 to.
Sphere standard mirror 8 is for adjusting the wavefront curvature of illumination light, and directional light 6a, through sphere standard mirror 8, obtains spherical illumination light 8a, the DLB-50.8-100PM type cemented doublet that can select ray machine Co., Ltd. of Japanese Sigma to produce.
After sphere standard mirror 8, generating spherical illumination light 8a irradiates the target to be measured on five dimensions adjustment mounting platforms 9, after target reflection to be measured, form the object light 9a that comprises spherical surface type information, again, after standard spherical mirror, obtain object light 8b, object light 8b enters depolarization Amici prism 7.
Five dimensions are adjusted mounting platform 9 for placing target being observed and realizing its aligning and wheel measuring, comprise three translation stages and 2-d rotating platform.The three-dimensional that realizes target being observed by D translation platform and 2-d rotating platform moves, the rotation measuring of two-dimensional attitude adjustment and sphere.Indicate and regulate the target centre of sphere to be measured to overlap with spherical illumination light wave convergent point by hologram, in measuring process, along direction of measurement rotation sphere, realize the measurement of each sub-aperture plane type.PTS101M type precision displacement table and the TG102 type precision corner displacement platform that can select Beijing North light century Instrument Ltd. to produce combine.
The photosurface of CMOS camera 10 is caught light beam 7b, in CMOS camera 10, form and interfere hologram, CMOS camera 10 records digital hologram for catching, can choose the CMOS camera of Canadian Lumenera company, its model is LU125M-WOIR, and resolution is 1280 × 1024 pixels, the highest frame frequency 15fps, 2/3 inch of photosurface size, data-interface is USB2.0.
The light channel structure of the digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing of the present invention is: LASER Light Source 1 emitting laser 1a is incident in spectrophotometric unit 2, output region light 2a and 2b after the light-splitting processing of spectrophotometric unit 2;
Described spatial light 2a exports parallel reference light 5a in turn and enters to inject depolarization Amici prism 7 after catoptron 3, beam collimation unit 4, the first beam deflector 5;
Described space 2b forms parallel illumination light 6a behind the second beam collimation unit 6, after sphere standard mirror 8, generating spherical illumination light 8a irradiates the target to be measured on five dimensions adjustment mounting platforms 9, after target reflection to be measured, form the object light 8b that comprises spherical surface type information, again after standard spherical mirror, enter depolarization Amici prism 7;
The parallel reference light 5a of described depolarization Amici prism 7 to incident and object light 8b close light processing and obtain combined light beam 7b, and this combined light beam 7b is caught by the photosurface of CMOS camera 10, interfere hologram thereby form in CMOS camera 10.
In the present invention, the spatial light 2a being separated by spectrophotometric unit 2 enters to inject depolarization Amici prism 7 after catoptron 3, the first beam collimation unit 4, beam deflector 5, and this part can be called reference path.
In the present invention, the spatial light 2b being separated by spectrophotometric unit 2 forms spherical illumination light wave after the second beam collimation unit, depolarization Amici prism 7, sphere standard mirror 8, and again pass through sphere standard mirror 8 after being tested surface reflection, be incident to depolarization Amici prism 7, this part can be called object light light path.
The digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing of the present invention design, can be applicable to ball, the hemisphere of heavy caliber, large-numerical aperture, the surperficial face type of spherical crown is measured, and can carry out in real time dynamically observation to the target on production line.This device (1) is with noncontact, non-destruction, obtain target surface face type information without pretreated mode, very little on the impact of active somatic cell; (2) exposure frequency is few, can effectively overcome the impact of vibration, temperature; (3) use phase place splicing to obtain unified type information, visual field is large, imaging resolution is high.
Claims (1)
1. the digital hologram spherical surface type pick-up unit based on sub-aperture phase splicing, comprises LASER Light Source, spectrophotometric unit, catoptron, the first beam collimation unit, beam deflector, the second beam collimation unit, depolarization Amici prism, standard spherical mirror, five dimension adjustment mounting platforms, CMOS camera;
LASER Light Source provides laser 1a, and laser 1a is incident to spectrophotometric unit; Spectrophotometric unit comprises half-wave plate A, polarization splitting prism, half-wave plate B, adjustable attenuator; Laser 1a incides on polarization splitting prism through adjustable attenuator, A half-wave plate, be divided into two bundle polarization directions orthogonal reflected light and transmitted light, be respectively spatial light 2a and spatial light 2b, spatial light 2a is after half-wave plate B, export catoptron to, spatial light 2b exports the second collimation unit to; Spatial light 2a exports catoptron to, obtains reflected light 3a, exports the first beam collimation unit to;
The first beam collimation unit is identical with the second beam collimation cellular construction, and the first beam collimation unit comprises spatial filter and plano-convex lens; Spatial filter receives reflected light 3a, expands after processing, exposes on plano-convex lens, forms directional light 4a and export beam deflector to after plano-convex lens; In the second beam collimation unit, spatial filter receives transmitted light 2b, expands after processing, exposes on plano-convex lens, forms directional light 6a and export depolarization Amici prism to after plano-convex lens;
Beam deflector comprises one dimension displacement platform, two-dimentional adjustable eyeglass racks and catoptron, two dimension adjustable eyeglass racks connects one dimension displacement platform, catoptron connects two-dimentional adjustable eyeglass racks, realize catoptron two-dimensional attitude by one dimension displacement platform, two-dimentional adjustable eyeglass racks and regulate, directional light 4a exports parallel reference light 5a to depolarization Amici prism by beam deflector;
Depolarization Amici prism, by parallel reference light 5a and the synthetic light beam of object light 8b, obtains light beam 7b, export CMOS camera to, and depolarization Amici prism receives directional light 6a, obtains parallel illumination light 7a, exports sphere standard mirror to;
Directional light 6a is through sphere standard mirror, obtain spherical illumination light 8a, the target to be measured that spherical illumination light 8a adjusts on mounting platform five dimensions is irradiated, after target reflection to be measured, form the object light 9a that comprises spherical surface type information, again after standard spherical mirror, obtain object light 8b, object light 8b enters depolarization Amici prism;
Five dimensions are adjusted mounting platforms and are comprised D translation platform and 2-d rotating platform, and the three-dimensional that realizes target being observed by D translation platform and 2-d rotating platform moves, the rotation measuring of two-dimensional attitude adjustment and sphere;
The photosurface of CMOS camera is caught light beam 7b, forms and interferes hologram.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105371782A (en) * | 2015-12-02 | 2016-03-02 | 上海大学 | Rotary-type spherical interference splicing measuring device and regulation method thereof |
| CN105486246A (en) * | 2015-11-04 | 2016-04-13 | 上海大学 | Spherical surface interference splicing measuring device and adjusting method thereof |
| CN106292238A (en) * | 2015-05-20 | 2017-01-04 | 华中科技大学 | A kind of reflective off-axis digital holography micro-measurement apparatus |
| CN106643550A (en) * | 2016-11-30 | 2017-05-10 | 西安中科光电精密工程有限公司 | Three-dimensional topographic measurement device based on digital holographic scanning and measurement method thereof |
| CN106949849A (en) * | 2017-03-17 | 2017-07-14 | 衢州学院 | Bearing ball deviation from spherical form method for quick based on laser interference Holographic test method |
| CN107957249A (en) * | 2016-10-14 | 2018-04-24 | 王喆 | A kind of method and apparatus for measuring workpiece surface appearance |
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| CN111194419A (en) * | 2017-09-21 | 2020-05-22 | 高新技术学习公司 | Additional imaging module for off-axis recording of polarization encoded waves |
| CN112525099A (en) * | 2020-11-16 | 2021-03-19 | 南京理工大学 | Device and method for absolute inspection of large-aperture plane interferometer by using rotation translation method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101514892A (en) * | 2009-04-03 | 2009-08-26 | 北京航空航天大学 | In-situ three-dimensional microscopic observation device with long working distance based on digital holography |
| CN102278951A (en) * | 2010-09-14 | 2011-12-14 | 北京航空航天大学 | Digital holography-based three-dimensional micro-observation apparatus for cell dynamic of living organism |
| CN102278952A (en) * | 2010-09-14 | 2011-12-14 | 北京航空航天大学 | Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography |
| JP2013145199A (en) * | 2012-01-16 | 2013-07-25 | Nikon Corp | Optical interference observation device |
-
2014
- 2014-04-16 CN CN201410152708.9A patent/CN103913127A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101514892A (en) * | 2009-04-03 | 2009-08-26 | 北京航空航天大学 | In-situ three-dimensional microscopic observation device with long working distance based on digital holography |
| CN102278951A (en) * | 2010-09-14 | 2011-12-14 | 北京航空航天大学 | Digital holography-based three-dimensional micro-observation apparatus for cell dynamic of living organism |
| CN102278952A (en) * | 2010-09-14 | 2011-12-14 | 北京航空航天大学 | Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography |
| JP2013145199A (en) * | 2012-01-16 | 2013-07-25 | Nikon Corp | Optical interference observation device |
Non-Patent Citations (3)
| Title |
|---|
| 张鑫等: "基于相位拼接的数字全息大视场成像方法研究", 《现代电子技术》, vol. 36, no. 21, 1 November 2013 (2013-11-01), pages 96 - 99 * |
| 徐洪艳等: "利用环形子孔径哈特曼_夏克斜率数据复原全孔径波前相位算法研究", 《光学学报》, vol. 31, no. 1, 31 January 2011 (2011-01-31) * |
| 王璠璟等: "光学元件表面的数字全息检测", 《强激光与粒子束》, vol. 24, no. 1, 31 January 2012 (2012-01-31), pages 79 - 83 * |
Cited By (15)
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|---|---|---|---|---|
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| CN106292238B (en) * | 2015-05-20 | 2019-03-05 | 华中科技大学 | A kind of reflective off-axis digital holography micro-measurement apparatus |
| CN105486246A (en) * | 2015-11-04 | 2016-04-13 | 上海大学 | Spherical surface interference splicing measuring device and adjusting method thereof |
| CN105371782A (en) * | 2015-12-02 | 2016-03-02 | 上海大学 | Rotary-type spherical interference splicing measuring device and regulation method thereof |
| CN107957249A (en) * | 2016-10-14 | 2018-04-24 | 王喆 | A kind of method and apparatus for measuring workpiece surface appearance |
| CN106643550A (en) * | 2016-11-30 | 2017-05-10 | 西安中科光电精密工程有限公司 | Three-dimensional topographic measurement device based on digital holographic scanning and measurement method thereof |
| CN106643550B (en) * | 2016-11-30 | 2022-06-14 | 西安中科光电精密工程有限公司 | Three-dimensional shape measuring device and method based on digital holographic scanning |
| CN106949849A (en) * | 2017-03-17 | 2017-07-14 | 衢州学院 | Bearing ball deviation from spherical form method for quick based on laser interference Holographic test method |
| CN111194419A (en) * | 2017-09-21 | 2020-05-22 | 高新技术学习公司 | Additional imaging module for off-axis recording of polarization encoded waves |
| CN108562241A (en) * | 2018-03-08 | 2018-09-21 | 复旦大学 | The apparatus and method of digital hologram flexible measuring based on fiber optic bundle |
| CN110595380A (en) * | 2019-08-21 | 2019-12-20 | 南京理工大学 | Method for splicing sub-apertures on surface of microsphere |
| CN112525099A (en) * | 2020-11-16 | 2021-03-19 | 南京理工大学 | Device and method for absolute inspection of large-aperture plane interferometer by using rotation translation method |
| CN112525099B (en) * | 2020-11-16 | 2022-09-06 | 南京理工大学 | Device and method for absolute inspection of large-caliber planar interferometer by using rotation translation method |
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Application publication date: 20140709 |