CN102278952A - Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography - Google Patents
Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography Download PDFInfo
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Abstract
The invention discloses a three-dimensional micro-observation apparatus for a smooth reflective surface and the apparatus is based on synthetic aperture in digital holography. The apparatus comprises a light source, light splitting unit, space filters, plano-convex lenses, a planar mirror, a depolarization beam splitter prism, a beam adjuster, a rotating stage and a complementary metal-oxide semiconductor (CMOS) camera. A light path of the apparatus is characterized in that: a laser emitted by the light source is incident to the light splitting unit; after a light splitting processing is carried out by the light splitting unit, illuminating light and reference light are output; two beams of light respectively pass through the space filters and the plano-convex lenses in order so as to be processed by beam expansion and shaping; the illuminating light passes through the planar mirror and outputs parallel light that penetrates the depolarization beam splitter prism and is incident inclinedly to a surface of an observed object on the rotating stage; and then reflected light of the object surface is again incident to the depolarization beam splitter prism; an angle and a position of the reference light are adjusted by the beam adjuster and the reference light is also incident to the depolarization beam splitter prism; and light composition processing is carried out on the incident reference light and an object light by the depolarization beam splitter prism so as to obtain a combined light beam; and an interference hologram formed by the combined light beam is captured by a photosensitive surface of the CMOS camera. During the obtaining process, the rotating stage is rotated and an incident angle of the illuminating light is adjusted many times, so that an object surface hologram that contains different frequency components is obtained; and then fusion is carried out, thereby realizing a three-dimensional micro-observation based on the synthetic aperture in digital holography.
Description
Technical field
The present invention relates to a kind of three-dimensional microscopic observation system, more particularly say, be meant a kind of synthetic aperture digital hologram three-dimensional microscopic observation system at smooth reflecting surface.
Background technology
Digital Holography is to utilize charge-coupled image sensor (Charge Coupled Device, CCD) or metal-oxide semiconductor (MOS) (Complementary Metal-Oxide Semiconductor, CMOS) etc. the photoelectronic imaging sensitive detection parts replace traditional imaging film, materials such as dry plate are as recording medium, digitized recorded hologram, utilizing computer simulation to reproduce reference light again shines hologram, optical diffraction process by the simulation hologram, with numerical approach reconstruct three-dimensional article light field, thereby obtain the amplitude of thing light field and the information of phase place, its advantage comprises: (1) obtains object dimensional information in the noncontact mode, and need not sample is carried out pre-service, very little to the observation sample influence, advantages such as system architecture is simple; (2) record of digital hologram and reproduction process are all finished with digitized forms, therefore can and can carry out quantitative test to object dimensional information with re-constructed in digital form thing light field; (3) in the digital reconstruction process, can use digital image processing techniques easily, the influence of rectification, compensate for optical aberrations and various noise and detector nonlinear effect etc.
Yet, because the restriction of production technology, the resolution of digital hologram reproduction thing light field is subjected to the restriction of electro-optical imaging sensors (CCD, CMOS) performance index, mainly show two aspects: the Pixel Dimensions of (1) electro-optical imaging sensors is big (about 3.5～10 microns), can't write down higher spatial frequency, only can write down thing light with angle between reference less (approximately less than 1 °); (2) less (the about 1cm * 1cm), under same ginseng thing light angle, can't write down higher spatial frequency of the area of electro-optical imaging sensors photosurface.Because above-mentioned factor, particularly in growing apart from situ detection, the resolution of digital hologram has been subjected to serious restriction.At imageing sensor photosensitive area features of smaller, for at the image that keeps obtaining on the basis of certain operating distance high-resolution, generally utilize the method for synthetic aperture to expand the equivalent resolution and the effective aperture of photoelectronic imaging detector in the digital hologram.The cardinal principle of synthetic aperture is to adopt the surface of the illumination light irradiation observed object of different directions to obtain hologram respectively, respectively a plurality of holograms are reproduced respectively again, and then with several reproductions figure stack, thereby merge the thing optical information of more different space frequency components, improve the resolution of digital hologram microscopic observation.
What existing many illumination synthetic aperture methods were primarily aimed at is the diffuse reflection object, and its reflected light distribution scope is wider, even still can carry out obtaining of hologram at same position at many lighting conditions hypograph sensor.Yet if observed object is the smooth surface object, its reflected light has stronger directive property, and under the illumination of multi-direction light, imageing sensor can't effectively obtain the tested surface hologram of observed object.
Summary of the invention
The objective of the invention is to propose a kind of smooth surface three-dimensional microscopic observation device based on the synthetic aperture digital hologram, this device adopts the multi-angle illumination of the method realization of coaxial rotation observed object to it on the one hand; On the other hand, in order to eliminate the thing light shift, in reference path, be provided with aimer; The third aspect is obtained the three-dimensional information of the smooth surface of observed object in the mode of noncontact, in-situ investigation.
The synthetic aperture digital holographic three-dimensional microscopic observation device of a kind of smooth reflecting surface of the present invention includes light source, CMOS camera, spectrophotometric unit, first spatial filter, first plano-convex lens, the 3rd plane mirror, aimer, rotatable stage, second spatial filter, second plano-convex lens, depolarization Amici prism; Wherein, first spatial filter is identical with the structure of second spatial filter; First plano-convex lens is identical with the structure of second plano-convex lens; The light path of described synthetic aperture digital holographic three-dimensional microscopic observation device is connected to: the light source emitting laser is exported illumination light and reference light respectively by spectrophotometric unit;
Illumination light is exported parallel illumination light and is incident on the depolarization Amici prism in turn through behind first spatial filter, first plano-convex lens and the 3rd plane mirror;
Reference light is in turn through behind second spatial filter, second plano-convex lens and the aimer, and output is regulated the back and is incident on the depolarization Amici prism with reference to directional light;
The transmission part that parallel illumination light is incident to the depolarization Amici prism is thrown light on to the observed object that is positioned on the rotatable stage, and the thing light of measured surface reflection is incident on the depolarization Amici prism;
The reflecting part that thing light is incident to the depolarization Amici prism is synthetic light beam with regulating that transmission that the back is incident to the depolarization Amici prism with reference to directional light partly converges, and this light beam forms holographic interference pattern, and carries out receiving record by the photosurface of CMOS camera.
Digital holographic three-dimensional microscopic observation device of the present invention has following advantage:
1. spectrophotometric unit 2 can accurately be controlled the polarization state direction and the beam intensity ratio of illuminating bundle 21 and reference beam 22.
2. use independently aimer 6, but not Amici prism is realized thing light 7a and regulates the angle adjusting of back with reference to directional light 6a that avoided the skew of thing light in adjustment process, feasible light path adjusting fast flexibly becomes possibility.
3. adopt the method for rotation observed object, can be implemented in apace flexibly under the condition of smooth surface of reflected in parallel light 10a irradiation observed object of different incidence angles degree, write down several digital holograms, thus the reproduction thing light field for realizing that high-resolution three-dimensional synthetic aperture imaging provides several to have complementary information.
4. adopt two-way light (regulating the back) on depolarization Amici prism 10, to close optical processing output and merge light 10b, can obtain the three-dimensional information for the treatment of observed objects by the digital hologram recording mode with reference to directional light 6a and thing light 7a.
5. observation device compact conformation of the present invention, easy to operate.
Description of drawings
Fig. 1 is the structured flowchart of three-dimensional microscopic observation device of the present invention.
Figure 1A is the structural drawing of spectrophotometric unit of the present invention.
Figure 1B is the adjustment synoptic diagram of depolarization Amici prism of the present invention to light path.
Fig. 2 is an aimer structural drawing of the present invention.
Fig. 2 A is the exploded view of first anchor clamps in the aimer of the present invention.
Fig. 2 B is another visual angle structural drawing of the present invention's first anchor clamps intermediate cam mirror holder.
Fig. 3 is the structural drawing of the rotatable objective table of the present invention.
Fig. 3 A is the structural drawing of clamping bar folder in the rotatable objective table of the present invention.
Embodiment
The present invention is described in further detail below in conjunction with drawings and Examples.
Referring to shown in Figure 1, the present invention is a kind of synthetic aperture digital holographic three-dimensional microscopic observation device at smooth reflecting surface, and this device mainly includes light source 1, spectrophotometric unit 2, first spatial filter 3, first plano-convex lens 4, the 3rd plane mirror 5, depolarization Amici prism 10, CMOS camera 11, second spatial filter 8, second plano-convex lens 9, aimer 6, rotatable stage 7; Wherein, first spatial filter 3 is identical with the structure of second spatial filter 8; First plano-convex lens 4 is identical with the structure of second plano-convex lens 9.
(1) light source 1
In the present invention, light source 1 is used to provide the laser 1a of 532nm, be optical information, it is the single longitudinal mode laser of 532nm that this light source provides centre wavelength, can choose the semiconductor pumped all solid state laser of MSL-532nm of Chinese Changchun Xin Chenye Photoelectric Technology Co., Ltd..
(2) spectrophotometric unit 2
Shown in Figure 1A, spectrophotometric unit 2 includes A half-wave plate 201, polarization splitting prism 202, B half-wave plate 203, continuous adjustable attenuator 204; Wherein, A half-wave plate 201 is identical with the structure of B half-wave plate 203.It is the laser 1a of 532nm that spectrophotometric unit 2 is used to receive from the centre wavelength of light source 1 outgoing on the one hand, on the other hand the laser 1a that receives is divided into illumination light 21 and the reference light 22 that the direction of propagation is vertical, the polarization direction is identical.B half-wave plate 203 is positioned between polarization splitting prism 202 and the continuous adjustable attenuator 204.Wherein, A half-wave plate 201 is used for the laser 1a of light emitted is carried out the adjustment of polarization direction, and the beam intensity ratio (1: 5～5: 1) of illumination light 21 and reference light 22 is tentatively regulated; And B half-wave plate 203 is used for and will carries out the adjustment of polarization direction through polarization splitting prism 202 laser light reflected, thereby guarantees that illumination light 21 is identical with the polarization direction of reference light 22; Can further regulate the beam intensity ratio of illumination light 21 and reference light 22 by regulating continuous adjustable attenuator 204 simultaneously, and then control parallel reference light 10a and by the beam intensity ratio of the thing light 11a with surface topography information of object plane to be measured reflection.A half-wave plate 201 and B half-wave plate 203 are used to change the polarization direction of incident ray polarized light, can choose the quartzy zero level half-wave plate of the GCL-060411 model of Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd.'s production.
In the present invention, polarization splitting prism 202 has and a branch of incident light is divided into the two bundle directions of propagation are vertical, the light of polarization direction quadrature.Can choose the polarization splitting prism of the GCC-401102 model of Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd.'s production.
In the present invention, continuously adjustable attenuator 204 can be according to the rotation of disk and the linear outgoing spatial light luminous power that changes can be the circular adjustable attenuator/spectroscope of GCO-0704M that Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. produces.
(3) first spatial filters 3
In the present invention, spatial filter 3 can carry out spatial filtering to the laser beam of a branch of incident, obtains uniform outgoing hot spot, chooses the GCM-01M type spatial filter that Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. produces.
In the present invention, spatial filter 8 can carry out spatial filtering to the laser beam of a branch of incident, obtains uniform outgoing hot spot, chooses the GCM-01M type spatial filter that Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. produces.
(4) first plano-convex lenss 4
In the present invention, plano-convex lens 4 is used for the approximate pointolite emergent light expansion bundle of spatial filter 3 is the directional light of certain size.The GCL-010115 type K9 plano-convex lens of selecting for use Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. to produce.
In the present invention, plano-convex lens 9 is used for the approximate pointolite emergent light expansion bundle of spatial filter 4 is the directional light of certain size.The GCL-010115 type K9 plano-convex lens of selecting for use Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. to produce.
Plano-convex lens 4 and plano-convex lens 9 are installed in respectively on the GCM-2701381M model lens/mirror support of Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd.'s production.
(5) the 3rd plane mirrors 5
In the present invention, catoptron 5 is used to adjust the illumination direction and the position of illumination light, can choose the GCC-102102 model catoptron that Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. produces, be installed in the GCM-082305M model two dimension adjustment rack that Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. produces.
(6) the depolarization Amici prism 10
In the present invention, depolarization Amici prism 10 has the synthetic a branch of light of incident light that the two bundle directions of propagation are vertical.Choose the NT49-004 model depolarization Amici prism that Singapore Edmund Optics Singapore Pte Ltd. company produces.
Shown in Figure 1B, after seeing through depolarization Amici prism 10, illumination directional light 5a converts reflected in parallel light 10a to, this reflected in parallel light 10a is radiated on the smooth surface of the observed object 72 that is placed on the rotatable stage 7, reflect to form thing light 7a at described smooth surface, thing light 7a is reflected the back by depolarization Amici prism 10 and carries out part with the adjusting back with reference to directional light 6a and converge output merging light 10b, this merges light 10b can be become hologram (being the three-dimensional information of the smooth surface of observed object 72) by 11 receptions of CMOS camera.In the present invention, adopt the depolarization Amici prism 10 and the smooth surface of observed object 72 to form the direct reflection relation, utilize and regulate the back, make that merging light 10b can interfere at the reception photosurface of CMOS camera 11, forms hologram with reference to directional light 6a and thing light 7a merging.
(7) the CMOS camera 11
In the present invention, CMOS camera 7 can choose that Canadian Lumenera company produces, model is that LU125M-WOIR, resolution are that 1280 * 1024 pixels, frame frequency are that to be of a size of 2/3 inch, signaling interface be USB2.0 for 15fps, photosurface.
(8) aimer 6
Referring to shown in Figure 2, aimer 6 includes rack-and-pinion translation stage, first anchor clamps 63, second anchor clamps 64, first support bar 65, elevating lever 66, second support bar 67, first plane mirror 68 and second plane mirror 69; Wherein, first anchor clamps 63 are identical with the structure of second anchor clamps 64; First plane mirror 68 is identical with the structure of second plane mirror 69.First anchor clamps 63 are installed on first support bar 65, and second anchor clamps 64 are installed on second support bar 67.
Shown in Fig. 2 A, first anchor clamps 63 include triangle mirror holder 631, U-shaped frame 632, turntable 633 and holding frame 634;
Shown in Fig. 2 B, the side plate of triangle mirror holder 631 1 sides is provided with A pin-and-hole (not shown among Fig. 2 A), and the side plate of triangle mirror holder 631 opposite sides is provided with B pin-and-hole 631b, and the base plate of triangle mirror holder 631 is provided with check lock lever 631c; A lug 632a on the U-shaped frame 632 is installed in the A pin-and-hole, B lug 632b on the U-shaped frame 632 is installed in the B pin-and-hole 631b, check lock lever 631c inserts in the rectangular opening 632c of U-shaped frame 632, and holds out against by screw; Triangle mirror holder 631 is installed with two lug realization activities on the U-shaped frame 632 by two pin-and-holes on the side plate of both sides, in order to adjust the relative position between first plane mirror 68 and second plane mirror 69, holds out against check lock lever 631c realization by screw.Promptly first plane mirror 68 on first anchor clamps 63 upwards lifts looks up angle, the downward depression angle of second plane mirror 69 on second anchor clamps 64, this all is can be radiated on second plane mirror 69 back with reference to directional light 9a and to form and regulate the back with reference to directional light 6a in order to guarantee to be radiated on first plane mirror, 68 minute surfaces.
One cant board of U-shaped frame 632 is provided with A lug 632a, and the opposite side riser of U-shaped frame 632 is provided with B lug 632b, and the bottom of U-shaped frame 632 is provided with a round platform (not shown among Fig. 2 A); A lug 632a is installed in the A pin-and-hole of triangle mirror holder 631, and B lug 632b is installed in the interior 631b of B pin-and-hole of triangle mirror holder 631, and round platform is installed in the circular hole 633a of turntable 633;
The rack-and-pinion translation stage comprises X axis pedestal 61 and Y-axis to pedestal 62, and Y-axis is vertically mounted on the X axis pedestal 61 to pedestal 62, and Y-axis is equipped with an end of first support bar 65 on pedestal 62;
The aimer 6 of the present invention design is used to adjust angle and the position with reference to directional light 9a, thus after the regulating and controlling with reference to the angle of directional light 6a and thing light 7a.When reference directional light 9a shines first plane mirror 68, expose to after reflection on second plane mirror 69 with reference to directional light 9a, the reflection back forms and regulates the back with reference to directional light 6a outgoing again; Can make the shooting angle that after the adjusting of second plane mirror, 69 reflections, reaches the best by rotation, the pitching of regulating two catoptrons with reference to directional light 6a.In the present invention, by changing the relative height between first anchor clamps 63 and second anchor clamps 64, under the prerequisite that does not change with reference to directional light 9a direction, the height of coarse adjustment respectively, fine tuning outgoing beam; Then by adjusting the illumination lateral attitude that the rack-and-pinion translation stage adjusts irradiating light beam.
In the present invention, the rack-and-pinion translation stage in the aimer 6 (including X axis pedestal 61, Y-axis to pedestal 62) can be selected the GCM-150101M type rack-and-pinion translation stage of Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. for use.
In the present invention, the adjustable mirror mechanism in the GCO-11 light beam lifter that can select Daheng Xinshijiyuan Science ﹠ Technology Co., Ltd. for use of first plane mirror 68 in the aimer 6 and second plane mirror 69.
(9) rotatable stage 7
Referring to shown in Figure 3, rotatable stage 7 includes three-dimensional regulation mirror holder 71, the 4th support bar 73, a bar cramp 74, the 3rd support bar 75, magnetic bases 76.
Shown in Fig. 3 A, bar cramp 74 is provided with X axis through hole 741 and Y-axis to through hole 742; X axis through hole 741 is used for the 4th support bar 73 and passes, and after the 4th support bar 73 passes, by screw the 4th support bar 73 is locked in the X axis through hole 741; An end that passes the 4th support bar 73 of X axis through hole 741 is installed on the three-dimensional regulation mirror holder 71; Y-axis is used for the 3rd support bar 75 to through hole 742 passes, and after the 3rd support bar 75 passes, makes the 3rd support bar 75 be locked at Y-axis in through hole 742 by screw; Passing Y-axis is installed on the magnetic bases 76 to an end of the 3rd support bar 75 of through hole 742.
In the present invention, rotatable stage 7 is in order to the angle of the surface reflection of adjustment observed object 72, simultaneously by rotation, can be so that under the isogonal situation of reverberation light, obtain the thing light of observed object surface different angles illumination, realize many illuminations synthetic aperture holographic recording of smooth reflecting surface.
In the present invention, the three-dimensional perspective in the rotatable stage 7 is regulated the PM301 type three-dimensional perspective adjusting mirror holder that mirror holder 71 can be selected north, Beijing light century Instr Ltd. for use.
The light path at the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface of the present invention design is connected to: the 532nm laser 1a of light source 1 outgoing exports illumination light 21 and reference light 22 respectively by spectrophotometric unit 2;
After reference light 22 passed through spatial filter 8, plano-convex lens 9 and aimer 6 in turn, output was regulated the back with reference to directional light 6a, and this adjusting back is incident to depolarization Amici prism 10 with reference to directional light 6a;
The transmission part 10a that parallel illumination light 5a is incident to depolarization Amici prism 10 throws light on to the observed object body that is positioned on the rotatable stage 7, and the thing light 11a of measured surface reflection is incident to depolarization Amici prism 10;
The reflecting part that thing light 11a is incident to depolarization Amici prism 10 is synthetic light beam 10b with regulating that transmission that the back is incident to depolarization Amici prism 10 with reference to directional light 6a partly converges, this light beam forms holographic interference pattern, and carries out receiving record by the photosurface of CMOS camera 7.
Among the present invention, the space parallel light of being told by minute optical coupling unit 2 21 is in turn behind first spatial filter 3, first plano-convex lens 4, catoptron 5, the directional light 5a that forms is incident to depolarization Amici prism 10, after transmission part 10a is radiated at the observed object surface that is positioned on the rotatable stage 7, reflect to form thing light 11a with object plane information, be incident to depolarization Amici prism 10, this road light path can be called thing light light path.
Among the present invention, the space parallel light of being told by minute optical coupling unit 2 22 is behind spatial filter 8, plano-convex lens 9, beam adjuster 10, and the directional light 10a of formation is incident to depolarization Amici prism 10, and this road light path can be called reference path.
Be radiated at the incident angle for the treatment of observed objects by adjusting the angle of rotatable stage in the described thing light light path, can changing, thereby make CMOS camera 11 several digital holograms of record.Synthetic, the reconstruct of several digital hologram utilization numerical approachs by CMOS camera 11 is gathered afterwards, thus the thing spectral range that expansion is obtained increases the effective aperture of system, thus obtain high resolving power, low noise object dimensional space image.
In the thing light light path of this law exposed installation meter, illumination light adopts the contactless mode to the observed objects for the treatment of that is positioned over rotatable stage 7, and by the rotation object under test, the multi-angle original position is obtained the three-dimensional information of object, and does not have the lens aberration influence.
Claims (8)
1. the synthetic aperture digital holographic three-dimensional microscopic observation device of a smooth reflecting surface, include light source (1), CMOS camera (11), it is characterized in that: also include spectrophotometric unit (2), first spatial filter (3), first plano-convex lens (4), the 3rd plane mirror (5), aimer (6), rotatable stage (7), second spatial filter (8), second plano-convex lens (9), depolarization Amici prism (10); Wherein, first spatial filter (3) is identical with the structure of second spatial filter (8); First plano-convex lens (4) is identical with the structure of second plano-convex lens (9);
The light path of described synthetic aperture digital holographic three-dimensional microscopic observation device is connected to: light source (1) emitting laser (1a) is exported illumination light (21) and reference light (22) respectively by spectrophotometric unit (2);
Illumination light (21) is exported parallel illumination light (5a) and is incident on the depolarization Amici prism (10) in turn through behind first spatial filter (3), first plano-convex lens (4) and the 3rd plane mirror (5);
Reference light (22) is in turn through behind second spatial filter (8), second plano-convex lens (9) and the aimer (6), and output is regulated the back and is incident on the depolarization Amici prism (10) with reference to directional light (6a);
The transmission part (10a) that parallel illumination light (5a) is incident to depolarization Amici prism (10) is thrown light on to the observed object that is positioned on the rotatable stage (7), and the thing light (11a) of measured surface reflection is incident on the depolarization Amici prism (10);
The reflecting part that thing light (11a) is incident to depolarization Amici prism (10) is synthetic light beam (10b) with regulating that transmission that the back is incident to depolarization Amici prism (10) with reference to directional light (6a) partly converges, this light beam forms holographic interference pattern, and carries out receiving record by the photosurface of CMOS camera (11).
2. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: spectrophotometric unit (2) includes A half-wave plate (201), polarization splitting prism (202), B half-wave plate (203), adjustable attenuator (204) continuously; Wherein, A half-wave plate (201) is identical with the structure of B half-wave plate (203); Spectrophotometric unit (2) is used for receiving from light source (1) emitting laser (1a) on the one hand, on the other hand the laser (1a) that receives is divided into illumination light that the direction of propagation is vertical, the polarization direction is identical (21) and reference light (22); B half-wave plate (203) is positioned between polarization splitting prism (202) and the continuous adjustable attenuator (204); Wherein, A half-wave plate (201) is used for the laser (1a) of light emitted is carried out the adjustment of polarization direction, and the beam intensity ratio of illumination light (21) and reference light (22) is tentatively regulated; And B half-wave plate (203) is used for and will carries out the adjustment of polarization direction through polarization splitting prism (202) laser light reflected, thereby guarantees that illumination light (21) is identical with the polarization direction of reference light (22); Further regulate the beam intensity ratio of illumination light (21) and reference light (22) by regulating continuous adjustable attenuator (204) simultaneously, and then control parallel reference light (10a) and the beam intensity ratio of the thing light (11a) that reflects by object plane to be measured with surface topography information.
3. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: aimer (6) includes rack-and-pinion translation stage, first anchor clamps (63), second anchor clamps (64), first support bar (65), elevating lever (66), second support bar (67), first plane mirror (68) and second plane mirror (69); Wherein, first anchor clamps (63) are identical with the structure of second anchor clamps (64); First plane mirror (68) is identical with the structure of second plane mirror (69); First anchor clamps (63) are installed on first support bar (65), and second anchor clamps (64) are installed on second support bar (67);
First support bar (65), elevating lever (66) and second support bar (67) are cylindrical structure, and first support bar (65) is installed on the end of elevating lever (66), and second support bar (67) is installed on the other end of elevating lever (66); The other end of first support bar (65) is installed in the Y-axis of rack-and-pinion translation stage on pedestal (62) after passing the A through hole (634a) of holding frame (634) of first anchor clamps (63);
First anchor clamps (63) include triangle mirror holder (631), U-shaped frame (632), turntable (633) and holding frame (634); First plane mirror (68) is installed in the disk (631a) of triangle mirror holder (631);
The side plate of triangle mirror holder (631) one sides is provided with the A pin-and-hole, and the side plate of triangle mirror holder (631) opposite side is provided with B pin-and-hole (631b), and the base plate of triangle mirror holder (631) is provided with check lock lever (631c); One cant board of U-shaped frame (632) is provided with A lug (632a), and the opposite side riser of U-shaped frame (632) is provided with B lug (632b), and the bottom of U-shaped frame (632) is provided with a round platform, and round platform is installed in the circular hole (633a) of turntable (633); U-shaped frame (632) is installed in the A pin-and-hole goes up A lug (632a), U-shaped frame (632) is installed in the B pin-and-hole (631b) goes up B lug (632b), check lock lever (631c) inserts in the rectangular opening (632c) of U-shaped frame (632);
Holding frame (634) is provided with A through hole (634a), B through hole (634b) and stopper slot (634c); The end that A through hole (634a) is used for first support bar (65) passes, and by screw first anchor clamps (63) is clamped and installed on first support bar (65); Turntable (633) is installed in the B through hole (634b), and A limiting plate (633b) and B limiting plate (633c) on the turntable (633) place in the stopper slot (634c).
4. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: light source (1) is used to provide the laser (1a) of 532nm.
5. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: first spatial filter (3) is chosen GCM-01M type spatial filter with second spatial filter (8).
6. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: first plano-convex lens (4) is chosen GCL-010115 type K9 plano-convex lens with second plano-convex lens (9).
7. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: depolarization Amici prism (10) is chosen NT49-004 model depolarization Amici prism.
8. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 2, it is characterized in that: A half-wave plate (201) and B half-wave plate (203) are chosen the quartzy zero level half-wave plate of GCL-060411 model; Polarization splitting prism (202) is chosen the polarization splitting prism of GCC-401102 model; Adjustable attenuator (204) is chosen the circular adjustable attenuator/spectroscope of GCO-0704M continuously.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589417A (en) * | 2012-03-13 | 2012-07-18 | 北京航空航天大学 | All-fiber pre-amplification digital holography three-dimensional microscopic observation device |
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| CN102589417A (en) * | 2012-03-13 | 2012-07-18 | 北京航空航天大学 | All-fiber pre-amplification digital holography three-dimensional microscopic observation device |
| CN103224131A (en) * | 2013-04-27 | 2013-07-31 | 国家电网公司 | Automatic calibration device for transverse shift during steel plate transportation process |
| CN103224131B (en) * | 2013-04-27 | 2016-07-06 | 国家电网公司 | Lateral shift self-checking device in a kind of steel plate transport process |
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| CN103335592B (en) * | 2013-06-21 | 2016-01-27 | 南京师范大学 | Two Lloyd's mirror digital holographic micro-measuring method |
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| CN108713127B (en) * | 2016-05-26 | 2021-06-29 | Ckd株式会社 | Three-dimensional measuring device |
| CN108713127A (en) * | 2016-05-26 | 2018-10-26 | Ckd株式会社 | Three-dimensional measuring apparatus |
| CN106791464A (en) * | 2016-12-02 | 2017-05-31 | 中国科学院光电技术研究所 | Digital coaxial holographic microscopic control system |
| CN109540093A (en) * | 2018-12-26 | 2019-03-29 | 江阴市中兴光电实业有限公司 | A kind of high-speed rail monitoring spherical prism regulating device |
| CN109540093B (en) * | 2018-12-26 | 2024-03-29 | 江阴市中兴光电实业有限公司 | Spherical prism adjusting device for monitoring high-speed rail |
| CN111538130A (en) * | 2020-05-09 | 2020-08-14 | 白城师范学院 | Adjusting mechanism and adjusting method of quantum optical module |
| CN111538130B (en) * | 2020-05-09 | 2022-02-25 | 白城师范学院 | Adjusting mechanism and adjusting method of quantum optical module |
| CN116299933A (en) * | 2023-05-18 | 2023-06-23 | 北京盛镭科技有限公司 | Optical adjustment frame, adjustment method, optical assembly and optical system |
| CN116299933B (en) * | 2023-05-18 | 2023-07-21 | 北京盛镭科技有限公司 | Optical adjustment frame, adjustment method, optical assembly and optical system |
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