CN102278952A - Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography - Google Patents

Abstract

The invention discloses a synthetic aperture digital holographic three-dimensional microscopic observation device with a smooth reflective surface. Reproduce the object stage and CMOS camera; the optical path of the device of the present invention is as follows: the laser light emitted by the light source is incident on the spectroscopic unit, and the illuminating light and reference light are output after the spectroscopic processing by the spectroscopic unit; The convex lens expands and shapes the beam; the illuminating light is reflected by the reflector, and the output parallel light passes through the depolarized beam splitter, obliquely incident on the surface of the observation target on the rotating stage, and the reflected light on the object surface is incident on the depolarized beam splitter again; The angle and position of the reference light are adjusted by the beam adjuster, and it also enters the depolarization beam splitter; the depolarization beam splitter combines the incident reference light and object light to obtain a combined beam, and the interference hologram formed by the combined beam is Captured by the photosensitive surface of a CMOS camera. During acquisition, through the rotation of the rotating stage, the incident angle of the illumination light is adjusted multiple times to obtain object surface holograms containing different frequency components, which are then fused to realize synthetic aperture digital holographic three-dimensional microscopic observation.

Description

A Synthetic Aperture Digital Holographic 3D Microscopic Observation Device with Smooth Reflective Surface

technical field

The invention relates to a three-dimensional microscopic observation system, more particularly, to a synthetic aperture digital holographic three-dimensional microscopic observation system for smooth reflective surfaces.

Background technique

Digital holography technology uses photoelectric imaging detection devices such as charge coupled devices (Charge Coupled Device, CCD) or metal oxide semiconductors (Complementary Metal-Oxide Semiconductor, CMOS) to replace traditional imaging films, dry plates and other materials as recording media. The hologram is recorded, and then the hologram is irradiated by the computer simulation reproduction reference light, and the three-dimensional object light field is digitally reconstructed by simulating the optical diffraction process of the hologram, so as to obtain the amplitude and phase information of the object light field. The advantages include: (1) The three-dimensional information of the object is obtained in a non-contact manner, and there is no need to preprocess the sample, the impact on the observed sample is very small, and the system structure is simple; (2) The recording and reproduction process of the digital hologram is digitalized form, so it can reconstruct the object light field in digital form and quantitatively analyze the three-dimensional information of the object; (3) in the process of digital reconstruction, digital image processing technology can be conveniently used to correct and compensate optical aberrations and various noise and detector non-linear effects.

However, due to the constraints of production technology, the resolution of the light field of digital holographic reconstruction objects is restricted by the performance indicators of photoelectric image sensors (CCD, CMOS), mainly in two aspects: (1) the pixel size of photoelectric image sensors is large ( about 3.5-10 microns), unable to record higher spatial frequencies, and can only record object light with a small angle (less than 1°) with the reference light; (2) The area of the photosensitive surface of the photoelectric image sensor is small (about 1cm ×1cm), under the same angle between the reference light and the object light, higher spatial frequencies cannot be recorded. Due to the above factors, especially in long-distance in situ detection, the resolution of digital holography is severely restricted. In view of the characteristics of the small photosensitive area of the image sensor, in order to obtain a higher resolution image on the basis of maintaining a certain working distance, the method of synthetic aperture is generally used in digital holography to expand the equivalent resolution and equivalent resolution of the photoelectric imaging detector. aperture. The main principle of synthetic aperture is to irradiate the surface of the observation target with different directions of illumination light to obtain holograms, and then reproduce multiple holograms separately, and then superimpose multiple reconstructed images to fuse more different spatial frequency components. The object light information can improve the resolution of digital holographic microscopic observation.

Existing multi-illumination synthetic aperture methods are mainly aimed at diffuse reflective objects, and the reflected light has a wide distribution range, and the image sensor can still acquire holograms at the same position even under multi-illumination conditions. However, if the observation target is an object with a smooth surface, the reflected light has strong directivity. Under the illumination of multi-directional light, the image sensor cannot effectively acquire the hologram of the measured surface of the observation target.

Contents of the invention

The object of the present invention is to propose a smooth surface three-dimensional microscopic observation device based on synthetic aperture digital holography. Offset, a beam adjuster is set in the reference optical path; the third aspect obtains the three-dimensional information of the smooth surface of the observation target in a non-contact and in-situ detection manner.

A synthetic aperture digital holographic three-dimensional microscopic observation device with a smooth reflective surface of the present invention includes a light source, a CMOS camera, a spectroscopic unit, a first spatial filter, a first plano-convex lens, a third plane mirror, a beam adjuster, A rotating stage, a second spatial filter, a second plano-convex lens, and a depolarizing beamsplitter; wherein, the first spatial filter has the same structure as the second spatial filter; the first plano-convex lens has the same structure as the second plano-convex lens The optical path connection of the synthetic aperture digital holographic three-dimensional microscopic observation device is: the laser light emitted by the light source outputs the illumination light and the reference light respectively through the light splitting unit;

After the illumination light passes through the first spatial filter, the first plano-convex lens and the third plane reflector in sequence, the output parallel illumination light is incident on the depolarization beam splitter;

After the reference light passes through the second spatial filter, the second plano-convex lens and the beam adjuster in sequence, the output-adjusted reference parallel light is incident on the depolarization beam splitter;

The parallel illumination light is incident on the transmission part of the depolarization beam splitter to illuminate the observation target placed on the rotating stage, and the object light reflected by the measured surface is incident on the depolarization beam splitter;

The reflected part of the object light incident on the depolarizing beamsplitter prism and the transmitted part of the adjusted reference parallel light incident on the depolarizing beam splitting prism merge into a composite beam, which forms a holographic interferogram and is received and recorded by the photosensitive surface of the CMOS camera.

The digital holographic three-dimensional microscopic observation device of the present invention has the following advantages:

① The beam splitting unit 2 can precisely control the polarization direction and light intensity ratio of the illumination beam 21 and the reference beam 22 .

② Using an independent beam adjuster 6 instead of a beam splitter prism to realize the adjustment of the angle between the object light 7a and the adjusted reference parallel light 6a, avoiding the deviation of the object light during the adjustment process, making flexible and fast optical path adjustment a possible.

③Using the method of rotating the observation target, it can flexibly and quickly record multiple digital holograms under the condition that the parallel reflected light 10a of different incident angles irradiates the smooth surface of the observation target, so as to achieve high-resolution three-dimensional synthetic aperture imaging Multiple reproduced object light fields with complementary information are provided.

④Using two paths of light (reference parallel light 6a and object light 7a after adjustment) is combined on the depolarizing beamsplitter prism 10 to output the combined light 10b, and the three-dimensional information of the object to be observed can be obtained through digital holographic recording.

⑤ The observation device of the present invention is compact in structure and easy to operate.

Description of drawings

Fig. 1 is a structural block diagram of the three-dimensional microscopic observation device of the present invention.

Fig. 1A is a structural diagram of the light splitting unit of the present invention.

Fig. 1B is a schematic diagram of the adjustment of the optical path by the depolarization beam splitter prism of the present invention.

Fig. 2 is a structural diagram of the beam adjuster of the present invention.

Fig. 2A is an exploded view of the first clamp in the beam adjuster of the present invention.

Fig. 2B is another structural view of the triangle frame in the first fixture of the present invention.

Fig. 3 is a structural diagram of the rotatable stage of the present invention.

Fig. 3A is a structural view of the clamp rod clamp in the rotatable stage of the present invention.

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

Referring to Fig. 1, the present invention is a synthetic aperture digital holographic three-dimensional microscopic observation device for smooth reflective surfaces. The device mainly includes a light source 1, a spectroscopic unit 2, a first spatial filter 3, and a first plano-convex lens 4 , the third plane reflector 5, depolarizing beam splitter prism 10, CMOS camera 11, the second spatial filter 8, the second plano-convex lens 9, beam adjuster 6, rotating stage 7; wherein, the first spatial filter 3 The same structure as the second spatial filter 8; the same structure as the first plano-convex lens 4 and the second plano-convex lens 9.

(1) Light source 1

In the present invention, the light source 1 is used to provide laser light 1a of 532nm, i.e. light information, and the light source provides a single longitudinal mode laser with a center wavelength of 532nm. The MSL-532nm semiconductor pump of China Changchun New Industry Optoelectronics Technology Co., Ltd. can be selected. All solid-state lasers.

(2) Spectroscopic unit 2

1A, the light splitting unit 2 includes an A half-wave plate 201, a polarizing beam splitter 202, a B half-wave plate 203, and a continuously adjustable attenuator 204; wherein, the structure of the A half-wave plate 201 and the B half-wave plate 203 same. On the one hand, the light splitting unit 2 is used to receive the laser light 1a with a center wavelength of 532nm emitted from the light source 1, and on the other hand, divide the received laser light 1a into an illumination light 21 and a reference light 22 whose propagation direction is vertical and the polarization direction is the same. The B half-wave plate 203 is placed between the polarization splitter prism 202 and the continuously adjustable attenuator 204 . Among them, the A half-wave plate 201 is used to adjust the polarization direction of the laser light 1a emitted by the light source, and initially adjust the light intensity ratio (1:5-5:1) of the illumination light 21 and the reference light 22; and the B half-wave plate The sheet 203 is used to adjust the polarization direction of the laser light reflected by the polarization beam splitter 202, so as to ensure that the polarization directions of the illumination light 21 and the reference light 22 are the same; at the same time, the illumination light 21 and the reference light 22 can be further adjusted by adjusting the continuously adjustable attenuator 204. The light intensity ratio of the light 22 further controls the light intensity ratio of the parallel reference light 10a and the object light 11a having surface topography information reflected by the object surface to be measured. The A half-wave plate 201 and the B half-wave plate 203 are used to change the polarization direction of the incident ray polarized light, and the GCL-060411 quartz zero-order half-wave plate produced by Daheng New Era Technology Co., Ltd. can be selected.

In the present invention, the polarization splitter prism 202 is capable of splitting a beam of incident light into two beams of light whose propagation directions are perpendicular and whose polarization directions are orthogonal. You can choose the GCC-401102 polarization beam splitter prism produced by Daheng New Era Technology Co., Ltd.

In the present invention, the continuously adjustable attenuator 204 can linearly change the output spatial optical power according to the rotation of the disc, and it can be the GCO-0704M circular adjustable attenuator/beam splitter produced by Daheng New Era Technology Co., Ltd.

(3) The first spatial filter 3

In the present invention, the spatial filter 3 can perform spatial filtering on an incident laser beam to obtain a uniform outgoing spot, and the GCM-01M spatial filter produced by Daheng New Era Technology Co., Ltd. is selected.

In the present invention, the spatial filter 8 can perform spatial filtering on an incident laser beam to obtain a uniform outgoing spot, and the GCM-01M spatial filter produced by Daheng New Era Technology Co., Ltd. is selected.

(4) The first plano-convex lens 4

In the present invention, the plano-convex lens 4 is used to expand the output beam of the approximate point light source of the spatial filter 3 into parallel light of a certain size. The GCL-010115 K9 plano-convex lens produced by Daheng New Era Technology Co., Ltd. was selected.

In the present invention, the plano-convex lens 9 is used to expand the output beam of the approximate point light source of the spatial filter 4 into parallel light of a certain size. The GCL-010115 K9 plano-convex lens produced by Daheng New Era Technology Co., Ltd. was selected.

The plano-convex lens 4 and the plano-convex lens 9 are respectively installed on the GCM-2701381M model lens/reflector bracket produced by Daheng New Era Technology Co., Ltd.

(5) The third flat mirror 5

In the present invention, the reflector 5 is used to adjust the illumination direction and position of the illumination light. The GCC-102102 type reflector produced by Daheng New Era Technology Co., Ltd. can be selected and installed on the GCM-102102 produced by Daheng New Era Technology Co., Ltd. 082305M Model 2D Adjustment Mount.

(6) Depolarizing beamsplitter prism 10

In the present invention, the depolarizing beam-splitting prism 10 has the function of combining two beams of incident light whose propagation directions are perpendicular to one beam. Select the NT49-004 depolarizing beamsplitter prism produced by Edmund Optics Singapore Pte Ltd., Singapore.

Referring to Fig. 1B, the illuminating parallel light 5a is converted into parallel reflected light 10a after passing through the depolarizing beam splitter prism 10, and the parallel reflected light 10a is irradiated on the smooth surface of the observation target 72 placed on the rotating stage 7, Reflection occurs on the smooth surface to form the object light 7a, which is reflected by the depolarizing beamsplitter prism 10 and partially merged with the adjusted reference parallel light 6a to output the combined light 10b, which can be received by the CMOS camera 11, It becomes a hologram (that is, three-dimensional information of the smooth surface of the observation target 72). In the present invention, the depolarization beam splitter 10 is used to form a specular reflection relationship with the smooth surface of the observation target 72, and the adjusted reference parallel light 6a is combined with the object light 7a, so that the combined light 10b can be generated on the receiving photosensitive surface of the CMOS camera 11 interfere, forming a hologram.

(7) CMOS camera 11

In the present invention, the CMOS camera 7 can be produced by Canada Lumenera Company, the model is LU125M-WOIR, the resolution is 1280×1024 pixels, the frame rate is 15fps, the size of the photosensitive surface is 2/3 inches, and the signal interface is USB2.0.

(8) Beam adjuster 6

2, the beam adjuster 6 includes a rack and pinion translation platform, a first clamp 63, a second clamp 64, a first support rod 65, a lifting rod 66, a second support rod 67, and a first plane mirror 68. and the second plane mirror 69; wherein, the structure of the first fixture 63 is the same as that of the second fixture 64; the structure of the first plane mirror 68 is the same as that of the second plane mirror 69. The first clamp 63 is installed on the first support bar 65 , and the second clamp 64 is installed on the second support bar 67 .

The first support rod 65, the lift rod 66 and the second support rod 67 are cylindrical structures, the first support rod 65 is installed on one end of the lift rod 66, and the second support rod 67 is installed on the other end of the lift rod 66. The height between the first plane reflector 68 and the second plane reflector 69 is adjusted by the length installed in the lifting pole 66 (the respective lengths of the first support pole 65 and the second support pole 67 ). The other end of the first support rod 65 passes through the A through hole 634a of the clamping frame 634 of the first clamp 63 and is installed on the Y-axis base 62 of the rack and pinion translation table.

Referring to FIG. 2A , the first fixture 63 includes a triangle frame 631 , a U-shaped frame 632 , a turntable 633 and a clamping frame 634 ;

The first plane reflector 68 is installed in the disk 631a of the triangle mirror frame 631;

Referring to Fig. 2B, the side plate on one side of the triangle frame 631 is provided with an A pin hole (not shown in Fig. 2A), and the side plate on the other side of the triangle frame 631 is provided with a B pin hole 631b. The bottom plate of the frame 631 is provided with a locking lever 631c; the A lug 632a on the U-shaped frame 632 is installed in the A pin hole, and the B lug 632b on the U-shaped frame 632 is installed in the B pin hole 631b, and the locking lever 631c is inserted into In the rectangular hole 632c of the U-shaped frame 632, and tighten by screws; The relative position between the plane reflector 68 and the second plane reflector 69 is realized by tightening the locking rod 631c with screws. That is, the upward viewing angle of the first plane reflector 68 on the first fixture 63 and the downward viewing angle of the second plane reflector 69 on the second fixture 64 are all to ensure that the first plane reflector 68 is illuminated The reference parallel light 9a on the mirror 68 can be irradiated on the second plane mirror 69 to form the adjusted reference parallel light 6a.

One side vertical plate of U-shaped frame 632 is provided with A lug 632a, and the other side vertical plate of U-shaped frame 632 is provided with B lug 632b, and the bottom of U-shaped frame 632 is provided with a round platform (not shown in Fig. 2A Out); A lug 632a is installed in the A pin hole of the triangle frame 631, B lug 632b is installed in the B pin hole 631b of the triangle frame 631, and the round table is installed in the circular hole 633a of the turntable 633;

The clamping frame 634 is provided with an A through hole 634a, a B through hole 634b and a limiting groove 634c; the A through hole 634a is used for one end of the first support rod 65 to pass through, and the first clamp 63 is clamped and installed on the clamping frame 634 by a screw. On the first support bar 65; Turntable 633 is installed in B through hole 634b, and A limit plate 633b and B limit plate 633c on the turntable 633 are placed in limit groove 634c; A limit plate 633b and B limit plate The cooperation of 633c and the screw can realize the adjustment of the first plane reflector 68 in the axial direction of the round platform (located at the bottom of the U-shaped frame 632).

The rack and pinion translation table includes an X-axis base 61 and a Y-axis base 62, the Y-axis base 62 is vertically installed on the X-axis base 61, and a first support rod is installed on the Y-axis base 62 65 at one end;

The beam adjuster 6 designed in the present invention is used to adjust the angle and position of the reference parallel light 9a, so as to control the angle between the adjusted reference parallel light 6a and the object light 7a. When the reference parallel light 9a is irradiated onto the first plane reflector 68, the reference parallel light 9a is reflected and irradiated onto the second plane reflector 69, and after reflection, the adjusted reference parallel light 6a is emitted; by adjusting the two reflectors The rotation and pitching of the second plane reflector 69 can make the adjusted reference parallel light 6a reach the best exit angle. In the present invention, by changing the relative height between the first fixture 63 and the second fixture 64, without changing the direction of the reference parallel light 9a, the height of the outgoing beam is adjusted roughly and finely; then by adjusting the gear The rack translation stage adjusts the illumination lateral position of the outgoing beam.

In the present invention, the rack and pinion translation stage (including the X-axis base 61 and the Y-axis base 62) in the beam adjuster 6 can be selected from the GCM-150101M rack and pinion of Daheng New Era Technology Co., Ltd. translation stage.

In the present invention, the first plane mirror 68 and the second plane mirror 69 in the beam adjuster 6 can be the adjustable mirror mechanism in the GCO-11 beam lifter of Daheng New Era Technology Co., Ltd.

(9) Rotating stage 7

Referring to FIG. 3 , the rotating stage 7 includes a three-dimensional adjustment frame 71 , a fourth support rod 73 , a rod clamp 74 , a third support rod 75 , and a magnetic base 76 .

Referring to FIG. 3A , the rod clamp 74 is provided with an X-axis through hole 741 and a Y-axis through hole 742; the X-axis through hole 741 is used for the fourth support rod 73 to pass through. When the fourth support rod 73 passes through Afterwards, the fourth support rod 73 is locked in the X-axis through hole 741 by screws; one end of the fourth support rod 73 passing through the X-axis through hole 741 is installed on the three-dimensional adjustment mirror frame 71; The hole 742 is used for the third support rod 75 to pass through. When the third support rod 75 passes through, the third support rod 75 is locked in the Y-axis through hole 742 by a screw; the third through the Y-axis through hole 742 One end of the three support rods 75 is installed on the magnetic base 76 .

The observation target 72 is installed on the stage of the three-dimensional adjustment frame 71 .

In the present invention, the rotating stage 7 is used to adjust the angle of the reflected light on the surface of the observation target 72. At the same time, by rotating, the object light illuminated at different angles on the surface of the observation target can be obtained under the condition that the angle of the reflected object light remains unchanged. , enabling multi-illumination synthetic aperture holographic recording on smooth reflective surfaces.

In the present invention, the three-dimensional angle adjustment mirror frame 71 in the rotating stage 7 can be selected from the PM301 three-dimensional angle adjustment mirror frame of Beijing Beiguang Century Instrument Co., Ltd.

The magnetic base 76 is placed on the iron platform. After the position adjustment is completed, the position can be fixed by the magnetic switch; the pole clamp 74 is installed on the second support pole 75, which can be adjusted in height and locked by tightening the screw. The support rod 73 is installed on the support rod clamp 74, is perpendicular to the third support rod 75, and is also locked by tightening the screw.

The optical path connection of the synthetic aperture digital holographic three-dimensional microscopic observation device designed for smooth reflective surfaces in the present invention is as follows: the 532nm laser light 1a emitted by the light source 1 passes through the light splitting unit 2, and outputs the illumination light 21 and the reference light 22 respectively;

After the illuminating light 21 passes through the spatial filter 3, the plano-convex lens 4 and the reflecting mirror 5 in sequence, the parallel illuminating light 5a is output, and the illuminating light 5a is incident on the depolarizing beam-splitting prism 10;

After the reference light 22 passes through the spatial filter 8, the plano-convex lens 9 and the beam adjuster 6 in sequence, the adjusted reference parallel light 6a is output, and the adjusted reference parallel light 6a is incident on the depolarization beam splitter prism 10;

The parallel illuminating light 5a is incident on the transmissive part 10a of the depolarizing beam-splitting prism 10 to illuminate the observation object placed on the rotating stage 7, and the object light 11a reflected by the measured surface is incident on the depolarizing beam-splitting prism 10;

The reflected part of the object light 11a incident on the depolarizing beam-splitting prism 10 and the transmitted part of the adjusted reference parallel light 6a incident on the depolarizing beam-splitting prism 10 are merged into a composite beam 10b, which forms a holographic interferogram and is detected by the photosensitive sensor of the CMOS camera 7. Face to receive records.

In the present invention, after the spatially parallel light 21 separated by the light splitting coupling unit 2 passes through the first spatial filter 3, the first plano-convex lens 4, and the reflector 5 in sequence, the formed parallel light 5a enters the depolarizing beam splitting prism 10, After the transmission part 10a is irradiated on the surface of the observation object placed on the rotating stage 7, it is reflected to form object light 11a with object plane information, and then enters the depolarizing beam splitter prism 10. This optical path can be called the object light optical path.

In the present invention, after the spatially parallel light 22 separated by the light splitting coupling unit 2 passes through the spatial filter 8, the plano-convex lens 9, and the beam adjuster 10, the formed parallel light 10a enters the depolarizing beam splitting prism 10, and the light path of this path can be called as the reference light path.

By adjusting the angle of the rotating stage in the optical path of the object light, the incident angle irradiated on the object to be observed can be changed, so that the CMOS camera 11 can record multiple digital holograms. Afterwards, multiple digital holograms collected by the CMOS camera 11 are digitally synthesized and reconstructed to expand the obtained object light spectrum range and increase the equivalent aperture of the system, thereby obtaining high-resolution, low-noise three-dimensional objects. Stereo.

In the object light path designed by Faming, the illumination light adopts a non-contact working mode for the object to be observed placed on the rotating stage 7. By rotating the object to be measured, the three-dimensional information of the object can be obtained in situ from multiple angles, and there is no lens phase difference. Influence.

Claims (8)

1. the synthetic aperture digital holographic three-dimensional microscopic observation device of a smooth reflecting surface, include light source (1), CMOS camera (11), it is characterized in that: also include spectrophotometric unit (2), first spatial filter (3), first plano-convex lens (4), the 3rd plane mirror (5), aimer (6), rotatable stage (7), second spatial filter (8), second plano-convex lens (9), depolarization Amici prism (10); Wherein, first spatial filter (3) is identical with the structure of second spatial filter (8); First plano-convex lens (4) is identical with the structure of second plano-convex lens (9);

The light path of described synthetic aperture digital holographic three-dimensional microscopic observation device is connected to: light source (1) emitting laser (1a) is exported illumination light (21) and reference light (22) respectively by spectrophotometric unit (2);

Illumination light (21) is exported parallel illumination light (5a) and is incident on the depolarization Amici prism (10) in turn through behind first spatial filter (3), first plano-convex lens (4) and the 3rd plane mirror (5);

Reference light (22) is in turn through behind second spatial filter (8), second plano-convex lens (9) and the aimer (6), and output is regulated the back and is incident on the depolarization Amici prism (10) with reference to directional light (6a);

The transmission part (10a) that parallel illumination light (5a) is incident to depolarization Amici prism (10) is thrown light on to the observed object that is positioned on the rotatable stage (7), and the thing light (11a) of measured surface reflection is incident on the depolarization Amici prism (10);

The reflecting part that thing light (11a) is incident to depolarization Amici prism (10) is synthetic light beam (10b) with regulating that transmission that the back is incident to depolarization Amici prism (10) with reference to directional light (6a) partly converges, this light beam forms holographic interference pattern, and carries out receiving record by the photosurface of CMOS camera (11).

2. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: spectrophotometric unit (2) includes A half-wave plate (201), polarization splitting prism (202), B half-wave plate (203), adjustable attenuator (204) continuously; Wherein, A half-wave plate (201) is identical with the structure of B half-wave plate (203); Spectrophotometric unit (2) is used for receiving from light source (1) emitting laser (1a) on the one hand, on the other hand the laser (1a) that receives is divided into illumination light that the direction of propagation is vertical, the polarization direction is identical (21) and reference light (22); B half-wave plate (203) is positioned between polarization splitting prism (202) and the continuous adjustable attenuator (204); Wherein, A half-wave plate (201) is used for the laser (1a) of light emitted is carried out the adjustment of polarization direction, and the beam intensity ratio of illumination light (21) and reference light (22) is tentatively regulated; And B half-wave plate (203) is used for and will carries out the adjustment of polarization direction through polarization splitting prism (202) laser light reflected, thereby guarantees that illumination light (21) is identical with the polarization direction of reference light (22); Further regulate the beam intensity ratio of illumination light (21) and reference light (22) by regulating continuous adjustable attenuator (204) simultaneously, and then control parallel reference light (10a) and the beam intensity ratio of the thing light (11a) that reflects by object plane to be measured with surface topography information.

3. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: aimer (6) includes rack-and-pinion translation stage, first anchor clamps (63), second anchor clamps (64), first support bar (65), elevating lever (66), second support bar (67), first plane mirror (68) and second plane mirror (69); Wherein, first anchor clamps (63) are identical with the structure of second anchor clamps (64); First plane mirror (68) is identical with the structure of second plane mirror (69); First anchor clamps (63) are installed on first support bar (65), and second anchor clamps (64) are installed on second support bar (67);

First support bar (65), elevating lever (66) and second support bar (67) are cylindrical structure, and first support bar (65) is installed on the end of elevating lever (66), and second support bar (67) is installed on the other end of elevating lever (66); The other end of first support bar (65) is installed in the Y-axis of rack-and-pinion translation stage on pedestal (62) after passing the A through hole (634a) of holding frame (634) of first anchor clamps (63);

First anchor clamps (63) include triangle mirror holder (631), U-shaped frame (632), turntable (633) and holding frame (634); First plane mirror (68) is installed in the disk (631a) of triangle mirror holder (631);

The side plate of triangle mirror holder (631) one sides is provided with the A pin-and-hole, and the side plate of triangle mirror holder (631) opposite side is provided with B pin-and-hole (631b), and the base plate of triangle mirror holder (631) is provided with check lock lever (631c); One cant board of U-shaped frame (632) is provided with A lug (632a), and the opposite side riser of U-shaped frame (632) is provided with B lug (632b), and the bottom of U-shaped frame (632) is provided with a round platform, and round platform is installed in the circular hole (633a) of turntable (633); U-shaped frame (632) is installed in the A pin-and-hole goes up A lug (632a), U-shaped frame (632) is installed in the B pin-and-hole (631b) goes up B lug (632b), check lock lever (631c) inserts in the rectangular opening (632c) of U-shaped frame (632);

Holding frame (634) is provided with A through hole (634a), B through hole (634b) and stopper slot (634c); The end that A through hole (634a) is used for first support bar (65) passes, and by screw first anchor clamps (63) is clamped and installed on first support bar (65); Turntable (633) is installed in the B through hole (634b), and A limiting plate (633b) and B limiting plate (633c) on the turntable (633) place in the stopper slot (634c).

4. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: light source (1) is used to provide the laser (1a) of 532nm.

5. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: first spatial filter (3) is chosen GCM-01M type spatial filter with second spatial filter (8).

6. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1 is characterized in that: first plano-convex lens (4) is chosen GCL-010115 type K9 plano-convex lens with second plano-convex lens (9).

7. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 1, it is characterized in that: depolarization Amici prism (10) is chosen NT49-004 model depolarization Amici prism.

8. the synthetic aperture digital holographic three-dimensional microscopic observation device of smooth reflecting surface according to claim 2, it is characterized in that: A half-wave plate (201) and B half-wave plate (203) are chosen the quartzy zero level half-wave plate of GCL-060411 model; Polarization splitting prism (202) is chosen the polarization splitting prism of GCC-401102 model; Adjustable attenuator (204) is chosen the circular adjustable attenuator/spectroscope of GCO-0704M continuously.

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