CN106403836B - Deformation and slope synchronous measurement device and measurement method based on digital speckle interferometry - Google Patents
Deformation and slope synchronous measurement device and measurement method based on digital speckle interferometry Download PDFInfo
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- CN106403836B CN106403836B CN201611149902.7A CN201611149902A CN106403836B CN 106403836 B CN106403836 B CN 106403836B CN 201611149902 A CN201611149902 A CN 201611149902A CN 106403836 B CN106403836 B CN 106403836B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A10/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE at coastal zones; at river basins
- Y02A10/23—Dune restoration or creation; Cliff stabilisation
Abstract
The invention discloses a deformation and slope synchronous measurement device and a measurement method based on digital speckle interferometry, wherein the emergent light of a laser is divided into a first beam light and a second beam light by a beam splitting prism; the first beam of light is reflected to an imaging target surface of a monochromatic CCD camera through another beam splitting prism to form a reference light path; the second beam of light irradiates the surface of the object to be measured through the reflection of the plane mirror to form a laser speckle field, and the monochromatic CCD camera receives the laser speckle field from the two directions symmetrical to the optical axis at the same time to form two object light paths; and switching the reference light path and the object light path to form a digital speckle interference light path and a shearing digital speckle interference light path for synchronous measurement, extracting speckle interference fringe phases and shearing speckle interference fringe phases, and measuring the surface deformation and slope of the measured object. The invention realizes the synchronous and independent measurement of the deformation of the measured object and the slope information thereof, and does not need repeated loading and later separation; the phase shift technology is adopted, so that the measurement accuracy is improved; and a speckle interference dual-light path with adjustable measurement sensitivity and shared by object light is constructed, so that the whole system has a simple and compact structure.
Description
Technical Field
The invention relates to the technical field of optical measurement, in particular to a digital speckle interferometry method.
Background
The digital speckle interference technology and the shearing digital speckle interference technology are two full-field, non-contact, high-precision and high-sensitivity optical measurement technologies based on the laser speckle interference technology. The former is widely applied to deformation measurement, vibration analysis, morphology test, defect detection and the like of the surface of an object, and the latter can directly measure the slope of the deformation of the object and is mainly applied to the field of industrial nondestructive detection. The synchronous measurement research of the deformation and the slope information of the object is developed by integrating the digital speckle interferometry technology and the shearing digital speckle interferometry technology, so that the method is convenient for solving the problem of nondestructive detection of the internal defects of the object with relatively large deformation and relatively small slope, and provides various choices for realizing the nondestructive detection of different types of defects in engineering structures.
At present, the method for simultaneously measuring the deformation and the slope of an object based on the digital speckle interferometry is mainly divided into three types: the first type is a multi-aperture shearing digital speckle interference technology, which needs to manufacture special multi-aperture templates aiming at different test objects, the optical path system is more complex, and the obtained deformation and slope information thereof are mutually coupled and are not independent; the second type is Michelson shearing digital speckle interference technology, carrier frequency deformation information and slope information obtained by the technology are mutually coupled and are not independent, and a proper frequency window is required to be arranged in a frequency domain to carry out later separation. Although the technology is suitable for dynamic measurement of deformation and slope information thereof, the measurement accuracy is not high; the third category is a combination of digital speckle interferometry and shearing digital speckle interferometry, which, while being capable of independently obtaining deformation and its slope information, is incapable of achieving simultaneous measurement of deformation and its slope information.
In summary, the prior art cannot realize synchronous, independent and high-precision measurement of deformation and slope information thereof, thus seriously impeding development and application of digital speckle interferometry.
Disclosure of Invention
The invention aims to: the invention aims to overcome the defects of the prior art, and provides a deformation and slope synchronous measurement device and a measurement method based on digital speckle interference, which can realize synchronous, independent and high-precision measurement of out-of-plane deformation and slope information of a measured object, so that the measurement device has a simple structure and is convenient and fast to use.
The technical scheme is as follows: the invention provides a deformation and slope synchronous measurement device based on digital speckle interference, which comprises a laser transmitter, a first beam splitter prism, a second beam splitter prism, a monochromatic CCD camera, a plane mirror, a side total reflection right angle triple prism, a lens, a piezoelectric ceramic phase shifter and a computer, wherein the laser transmitter is connected with the first beam splitter prism;
the laser emitted by the laser emitter is divided into reflected light and transmitted light through a first beam splitting prism, and the reflected light and the transmitted light correspond to a reference light path and an object light path respectively, wherein the transmitted light is reflected to the surface of an object to be measured through a plane mirror, two plane mirrors are symmetrically arranged along an optical axis, a side face total reflection right angle triple prism is arranged at the midpoint of a connecting line of the two plane mirrors, a piezoelectric ceramic phase shifter is arranged on the back face of one plane mirror, an optical switch is arranged between the one plane mirror and the side face total reflection right angle triple prism, and the object light scattered by the surface of the object to be measured is reflected by the two plane mirrors and sequentially enters a monochromatic CCD camera imaging target surface through the side face total reflection right angle triple prism, the lens and the second beam splitting prism which are arranged along the optical axis direction; in addition, the reflected light divided by the first beam splitter prism is projected onto the imaging target surface of the monochromatic CCD camera by the optical switch and the second beam splitter prism;
the single-color CCD camera is connected with the computer through the image acquisition card, and the piezoelectric ceramic phase shifter is connected with the computer through a direct-current stabilized power supply.
Further, the distance between the two plane mirrors symmetrically arranged along the optical axis is adjustable, and the measurement sensitivity of the system is adjusted by changing the angle of the light reception of the object.
Furthermore, the computer controls the piezoelectric ceramic phase shifter to drive the plane mirror to translate a small distance to generate phase shift, and the change of the optical path difference leads to the change of the phase, so that the measurement accuracy of the deformation of the object surface and the slope thereof can be improved.
A deformation and slope synchronous measurement method based on digital speckle interferometry comprises the following steps:
(1) Before the measured object is loaded and deformed, two optical switches are turned on, and a single-color CCD camera collects digital speckle interference images as reference images;
(2) After the measured object is loaded and deformed, a monochromatic CCD camera acquires the deformed digital speckle interference image and performs real-time phase comparison with a reference image to obtain a real-time coupling digital speckle interference fringe image;
(3) Opening an optical switch in a reference light path, and closing an optical switch in an object light path, so that the whole system becomes a digital speckle interference system, and full-field measurement of out-of-plane deformation of the surface of a measured object is realized; an optical switch in a branch object light path is turned on, and the optical switch in a reference light path is turned off, so that the whole system becomes a shearing digital speckle interference system, and full-field measurement of the out-of-plane deformation slope of the surface of the measured object is realized;
(4) The method comprises the steps of switching between a digital speckle interference light path and a shearing digital speckle interference light path through an optical switch, and synchronously collecting a plurality of digital speckle interference fringe patterns and shearing digital speckle interference fringe patterns with equal phase shift by utilizing a computer to control a piezoelectric ceramic phase shifter;
(5) The deformation and slope information of the measured object is demodulated by using a phase shift technology to wrap the phase diagram, and the phase unwrapping treatment is carried out on the phase diagram to obtain two phase diagrams which are continuously distributed;
(6) And respectively calculating deformation and slope information of the measured object by using two phase diagrams which are continuously distributed.
Further, the surface deformation and the slope of the measured object are respectively expressed as:
wherein lambda is the wavelength of the laser, theta is the included angle between the received object light and the optical axis, and delta x For the object plane shear quantity of the measured object along the x direction delta w Corresponding to the phase distribution delta of the out-of-plane deformation of the surface of the measured object x Phase distribution corresponding to the out-of-plane deformation slope of the surface of the measured object.
The beneficial effects are that: the arrangement of the speckle interference light path realizes the object light sharing of the digital speckle interference light path and the shearing digital speckle interference light path, and reduces the complexity of a measuring system; the synchronous one-time measurement of the deformation of the object and the slope information thereof can be realized without repeated loading, and the independent measurement of the deformation of the object and the slope information thereof can be realized without later separation treatment; the phase shift technology is adopted, so that the measurement accuracy of the object deformation and the slope information is improved; and by adopting bidirectional observation, the measurement sensitivity is adjustable, so that the whole system structure is simple and compact.
Drawings
FIG. 1 is a schematic diagram of a measuring device according to the present invention;
FIG. 2a is a speckle interference fringe pattern corresponding to out-of-plane deformations in an embodiment;
FIG. 2b is a shearing speckle interference fringe pattern corresponding to the slope in the embodiment;
FIG. 2c is a continuous phase distribution diagram corresponding to out-of-plane deformation in an embodiment;
FIG. 2d is a continuous phase distribution diagram of the corresponding slope in the embodiment.
Detailed Description
The technical scheme of the present invention is described in detail below, but the scope of the present invention is not limited to the embodiments.
Examples: the deformation and slope synchronous measurement device based on digital speckle interferometry comprises a laser transmitter 1, a first beam splitter prism 2, a first optical switch 3, a monochromatic CCD camera 4, a second beam splitter prism 5, an imaging lens 6, a side total reflection right angle prism 7, a second optical switch 8, a first plane mirror 9, a second plane mirror 10, a third plane mirror 11, a fourth plane mirror 12 and an object 13 to be measured, as shown in figure 1.
The laser transmitter 1 emits laser light in a horizontal direction, and is divided into reflected light and transmitted light by the first beam splitter prism 2 located at the left side of the laser transmitter 1, thereby forming a reference light path and an object light path.
The object light path is that the split transmitted light is reflected to the surface of the object 13 to be measured through the third plane mirror 11 and the fourth plane mirror 12, wherein the third plane mirror 11 is arranged at the left side of the beam splitting prism, the fourth plane mirror 12 is positioned above the third plane mirror 11, and the two plane mirrors are parallel to each other. The transmitted light is emitted in the direction of parallel optical axis through the first beam splitting prism 2, and the incident angles with the two plane mirrors are 45 degrees, so that the reflected transmitted light can vertically irradiate on the surface of the object 13 to be measured in the direction of optical axis. The first plane mirror 9 and the second plane mirror 10 are symmetrically arranged along the optical axis, a side total reflection right angle prism 7 is arranged at the midpoint of the connecting line of the two plane mirrors, and the object 13 to be measured, the side total reflection right angle prism 7, the imaging lens 6, the second beam splitter prism 5 and the monochromatic CCD camera 4 are sequentially arranged along the optical axis direction. After the transmitted light irradiates the measured object 13, the object light scattered by the surface of the measured object 13 is reflected by the first plane mirror 9 and the second plane mirror 10, received by the side total reflection right angle prism 7 and imaged on the imaging target surface of the monochromatic CCD camera 4 through the imaging lens 6. One of the first plane mirror 9 and the second plane mirror 10 is provided with a piezoelectric ceramic phase shifter at the back, and a second optical switch 8 is arranged between one plane mirror and the side total reflection right angle prism 7.
The reference light path is the reflected light split by the first beam splitter prism 2, and is emitted along the direction of the vertical optical axis, passes through the first optical switch 3, just passes through the second beam splitter prism 5 arranged between the imaging lens 6 and the monochromatic CCD camera 4, and is projected onto the imaging target surface of the monochromatic CCD camera 4 to be used as the reference light.
Tilting either one of the first plane mirror 9 and the second plane mirror 10 so that two object lights observed from two symmetrical directions form two dislocated images on the imaging target surface of the monochrome CCD camera 4; the monochromatic CCD camera 4 is connected with a computer through an image acquisition card, and the piezoelectric ceramic phase shifter is connected with the computer through a direct-current stabilized power supply; the first optical switch 3 in the reference light path is opened, and the second optical switch 8 in the object light path is closed, so that the whole system becomes a digital speckle interference system, and full-field measurement of the out-of-plane deformation of the surface of the measured object 13 is realized; the second optical switch 8 in the object light path is opened, and the first optical switch 3 in the reference light path is closed, so that the whole system becomes a shearing digital speckle interference system, and full-field measurement of the deformation slope of the surface of the measured object 13 is realized.
The measuring method adopting the measuring device specifically comprises the following steps:
step one: before the measured object 13 is loaded and deformed, the first plane mirror 9 and the second plane mirror 10 are finely adjusted, the monochromatic CCD camera 4 is adjusted, and all optical switches are turned on, so that the images of the measured object 13 in the monochromatic CCD camera 4 are clearly overlapped, the size is moderate, and the acquisition window is fully occupied;
step two: tilting one surface of the first plane mirror 9 and the second plane mirror 10 to enable two clear images of the measured object 13 to be misplaced, opening the laser transmitter 1 at the moment, irradiating a light beam on the measured object 13, recording an included angle between an optical axis and the symmetrical double-observation directions of the first plane mirror 9 and the second plane mirror 10 as theta, and acquiring a digital speckle interference image before deformation by the monochromatic CCD camera 4 as a reference image;
step three: loading the measured object 13 to enable the measured object 13 to generate out-of-plane deformation, collecting a deformed digital speckle interference image, and carrying out real-time phase comparison on the digital speckle interference image and the reference image in the second step to obtain a deformed digital speckle interference fringe image coupled with the slope of the deformed digital speckle interference image; opening the first optical switch 3 of the reference light path and closing the second optical switch 8 of the object light path to obtain a digital speckle interference fringe pattern corresponding to the out-of-plane deformation, and otherwise, obtaining a shearing digital speckle interference fringe pattern corresponding to the slope;
step four: the piezoelectric ceramic phase shifter drives the first plane mirror 9 or the second plane mirror 10 to generate micro translation, so as to realize time phase shift, and a plurality of digital speckle interference fringe patterns with equal phase shift and shearing digital speckle interference fringe patterns are recorded in sequence in cooperation with the switching operation of an optical switch of a reference light path and an object light path;
step five: selecting a proper phase shift algorithm to accurately extract two phase maps corresponding to the deformation and slope information of the measured object 13, and performing phase unwrapping treatment on the two phase maps to further obtain two continuous distribution phase maps;
step six: according to the x, y, z directions shown in fig. 1, the phase change caused by the deformation of the surface of the object 13 to be measured and the deformation slope can be expressed as:
wherein w represents the out-of-plane deformation of the surface of the object 13, lambda is the wavelength of the laser light used, theta represents the angle between the received object light and the normal line of the surface of the object 13, and delta x Representing the amount of object plane shear of the object 13 being measured in the x-direction.
According to equations (1) and (2), the surface deformation of the object under test 13 and its slope can be finally expressed as:
according to (3) and (4), combining two continuous distribution phase diagrams to obtain the out-of-plane deformation and slope components, w and
similarly, if the two object light paths are rotated 90 ° around the optical axis, that is, the first plane mirror 9, the second plane mirror 10 and the side total reflection rectangular prism 7 are rotated 90 ° around the optical axis, the out-of-plane deformation of the measured object 13 and the other slope component thereof, that is, w and w, can be obtained according to the above steps
In the embodiment, the surface of the object with fixed support at the periphery and concentrated load at the center is taken as the measured surface, the laser with the wavelength of 632.8nm is used, the object light receiving angle is 10 degrees, the object surface shearing quantity is 6mm, and the deformation of the measured object 13 after being loaded and the slope information w and the slope information thereof are measuredThe measurement results are shown in fig. 2 a-2 d, which show that the method of the invention can realize synchronous measurement of the out-of-plane deformation of the measured object 13 and the slope information thereof.
Claims (5)
1. Deformation and slope synchronous measurement device based on digital speckle interferometry, characterized in that: the device comprises a laser transmitter, a first beam splitter prism, a second beam splitter prism, a monochromatic CCD camera, a plane mirror, a side total reflection right angle prism, a lens, a piezoelectric ceramic phase shifter and a computer;
the laser emitted by the laser emitter is divided into reflected light and transmitted light through a first beam splitting prism, and the reflected light and the transmitted light correspond to a reference light path and an object light path respectively, wherein the transmitted light is reflected to the surface of an object to be measured through a plane mirror, two plane mirrors are symmetrically arranged along an optical axis, a side face total reflection right angle triple prism is arranged at the midpoint of a connecting line of the two plane mirrors, a piezoelectric ceramic phase shifter is arranged on the back face of one plane mirror, an optical switch is arranged between the one plane mirror and the side face total reflection right angle triple prism, and the object light scattered by the surface of the object to be measured is reflected by the two plane mirrors and sequentially enters a monochromatic CCD camera imaging target surface through the side face total reflection right angle triple prism, the lens and the second beam splitting prism which are arranged along the optical axis direction; in addition, the reflected light divided by the first beam splitter prism is projected onto the imaging target surface of the monochromatic CCD camera by the optical switch and the second beam splitter prism;
the single-color CCD camera is connected with the computer through the image acquisition card, and the piezoelectric ceramic phase shifter is connected with the computer through a direct-current stabilized power supply.
2. The digital speckle interferometry-based deformation and slope synchronization measurement apparatus of claim 1, wherein: the distance between the two plane mirrors symmetrically arranged along the optical axis is adjustable.
3. The digital speckle interferometry-based deformation and slope synchronization measurement apparatus of claim 1, wherein: the computer controls the piezoelectric ceramic phase shifter to drive the plane mirror to translate to generate phase shift.
4. A method of measuring a synchronous deformation and slope measuring device based on word speckle interferometry according to claim 1, characterized by: the method comprises the following steps:
(1) Before the measured object is loaded and deformed, two optical switches are turned on, and a single-color CCD camera collects digital speckle interference images as reference images;
(2) After the measured object is loaded and deformed, a monochromatic CCD camera acquires the deformed digital speckle interference image and performs real-time phase comparison with a reference image to obtain a real-time coupling digital speckle interference fringe image;
(3) Opening an optical switch in a reference light path, and closing an optical switch in an object light path, so that the whole system becomes a digital speckle interference system, and full-field measurement of out-of-plane deformation of the surface of a measured object is realized; an optical switch in a branch object light path is turned on, and the optical switch in a reference light path is turned off, so that the whole system becomes a shearing digital speckle interference system, and full-field measurement of the out-of-plane deformation slope of the surface of the measured object is realized;
(4) The method comprises the steps of switching between a digital speckle interference light path and a shearing digital speckle interference light path through an optical switch, and synchronously collecting a plurality of digital speckle interference fringe patterns and shearing digital speckle interference fringe patterns with equal phase shift by utilizing a computer to control a piezoelectric ceramic phase shifter;
(5) The deformation and slope information of the measured object is demodulated by using a phase shift technology to wrap the phase diagram, and the phase unwrapping treatment is carried out on the phase diagram to obtain two phase diagrams which are continuously distributed;
(6) And respectively calculating deformation and slope information of the measured object by using two phase diagrams which are continuously distributed.
5. A method according to claim 4, characterized by the fact that the deformation and slope synchronization measuring device based on word speckle interferometry according to claim 1: the surface deformation and the slope of the measured object are respectively expressed as follows:
wherein lambda is the wavelength of the laser, theta is the included angle between the received object light and the optical axis, and delta x For the object plane shear quantity of the measured object along the x direction delta w Corresponding to the phase distribution delta of the out-of-plane deformation of the surface of the measured object x Phase distribution corresponding to the out-of-plane deformation slope of the surface of the measured object.
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| CN108106556B (en) * | 2018-02-02 | 2020-01-21 | 上海交通大学 | Method and device for measuring out-of-plane deformation of curved surface object based on digital speckle interference |
| CN108303035A (en) * | 2018-04-09 | 2018-07-20 | 广州迅智机械科技有限公司 | A kind of spatial phase shift interferometer |
| CN108955553B (en) * | 2018-07-26 | 2023-06-06 | 苏州科技大学 | Multi-point strain measurement device and method based on laser digital speckle interference positioning |
| CN110657755B (en) * | 2019-09-30 | 2021-06-29 | 上海交通大学 | Speckle interference deformation measurement system calibration method and loading device |
| CN111024001B (en) * | 2019-12-13 | 2022-01-07 | 北京信息科技大学 | Roll angle measuring method and device |
| CN110987677B (en) * | 2019-12-25 | 2021-08-10 | 上海交通大学 | Method and device for improving micro-deformation loading precision |
| CN111336942A (en) * | 2020-04-12 | 2020-06-26 | 北京工业大学 | Shooting method for three-dimensional strain deformation measurement |
| CN111751383B (en) * | 2020-07-17 | 2023-03-21 | 盐城工学院 | Defect depth detection method integrating speckle interference and shearing speckle interference |
| CN111964601B (en) * | 2020-07-31 | 2022-02-22 | 盐城工学院 | Speckle interference multi-parameter measuring system and method based on Taffy optical path |
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