CN102735380B - Multi-function electronic speckle interferometer - Google Patents
Multi-function electronic speckle interferometer Download PDFInfo
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- CN102735380B CN102735380B CN201210170242.6A CN201210170242A CN102735380B CN 102735380 B CN102735380 B CN 102735380B CN 201210170242 A CN201210170242 A CN 201210170242A CN 102735380 B CN102735380 B CN 102735380B
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Abstract
The invention relates to a multi-function electronic speckle interferometer. A light source, a support frame, an interference beam splitter prism and a template to be measured are sequentially arranged on a base from front to back, wherein a light source beam splitter mirror and a light source deflection triangular prism are sequentially arranged on the support frame in the front and back direction; a state switching board is arranged between the light source beam splitter mirror and the light source deflection triangular prism; the state switching board is mounted on the base, and can move leftwards or rightwards along the surface of the base; a flat reflecting mirror fixed on the surface of the base is arranged below the light source beam splitter mirror; the left side of the interference beam splitter prism is provided with an image collection module fixed on the surface of the base, and the right side is provided with a state selecting board; and the state selecting board is mounted on the base, and can move forwards or backwards along the surface of the base. The invention can be widely used in the on-line measurement of stress, strain or displacement field (such as the simultaneous on-line measurement of strain value and displacement field of a tire), enlarges the measurement range, reduces the spatial structure of the measuring instrument, shortens the measurement time, has considerable economic benefits after a large amount of industrial application.
Description
Technical field
The present invention relates to a kind of electronic speckle interferometer.Particularly relate to a kind of multifunction electronic speckle interferometer that can simultaneously obtain the full-field distribution figure of testee Stress and displacement in a cover system.
Background technology
Electronic speckle pattern interferometry technology ESPI is development in recent years optical measuring technique more fast, the miniature deformation that it causes due to external force or self based on testee produces the principle of speckle interference striped, can directly measure the displacement producing of testee under the various load in the external world, thereby carry out the loading analysis of testee, stress deformation etc.It has simple to operate, noncontact, and precision is high, has the advantages such as measurement of full field.Maturation along with this technology, by development, develop into electronic speckle shear interference technology electronic speckle pattern interferometry is technical, ESSPI (Electronic Speckle Shearing Pattern Interferometry) electronic speckle shear interference art not only has the advantage of general speckle interference art, and can directly measure the derivative of object plane the inside displacement, it is strain, thereby the error of having avoided numerical differentiation to bring in stress analysis, ESSPI technology can also regulate measurement sensitivity by adjusting shearing displacement in addition.
Two kinds of technology have own distinctive measurement measured, and ESPI is mainly used in the subtle change of the displacement under stress or vibration, as the amplitude under stress deformation or vibration.And ESSPI is mainly used in measuring the load of external force or the size of stress application.The patent that at present domestic electronic speckle pattern interferometry or electronic cutting speckle are interfered mainly contains following several.
1. can only measure the system of object deformation or amplitude: the system of measurement deformation or the pattern aspect for example electronic speckle pattern interferometry carrier-frequency modulation that utilizes of Shandong Normal University is measured the method (patent No.: 200710112994.6) of object appearance.This patent system produces and interferes carrier fringe in the gap of testee surface and testee reference planes periphery, gathers this interference fringe, and utilize this width carrier fringe figure to demodulate the pattern information of body surface by ccd video camera.The multifunction three-dimensional displacement of Tsing-Hua University and the pattern laser interferometry system (patent No.: 200910088896.2) can realize the measurement of three-dimensional appearance and displacement.This system can realize the high-acruracy survey of three different directions displacement fields, and displacement measurement sensitivity can reach the order of magnitude of wavelength, and has holographic and two kinds of displacement measurement patterns of electronic speckle pattern interferometry, can realize topography measurement simultaneously.Measure amplitude aspect Xi'an Communications University and successively develop three generations's electronic speckle vialog, the first generation is to adopt the method for artificial interpretation bessel fringe progression to estimate object vibration.The second generation adopts the method for phase shift demodulation, can quantitative test object amplitude.Three generations's vialog can be measured the distribution of amplitudes of object under vibration.
2 can only measure object is subject to external force to load lower stress or the system of dependent variable: as the contact to earth device (patent No.: 200610109861.9), this device utilizes laser speckle shearing interference method to carry out measurement of full field to tread surface pressure distribution of shape of the speckle-shearing interferometric method measurement tire of Korea Tyre Co., Ltd.This system has been cancelled the reference planes in ESPI system, utilizes shear plane mirror to produce two interference images that mutually stagger, and utilize size reduction mode and and phase shifting method combination solved whole audience tread surface and obtained pressure-plotting.
At present, what in present patent system or document, mention is all to utilize electronic speckle measure displacement field or utilize speckle-shearing interferometry commercial measurement strain field, therefore can not measure deformational displacement field, the system of simultaneously all right monitor strain field.
Summary of the invention
Technical matters to be solved by this invention is, provides a kind of stressed Strain Distribution of testee and displacement or distortion of simultaneously realizing in a system to distribute, and makes the more various and accurate multifunction electronic speckle interferometer of on-line measurement data in industry.
The technical solution adopted in the present invention is: a kind of multifunction electronic speckle interferometer, comprise base, on described base, be disposed with from front to back light source, bracing frame, interfere beam splitter prism and tested model, before and after on described bracing frame successively be provided with light source beam splitter and light source deflection triangular prism, between described light source beam splitter and light source deflection triangular prism, be provided with state switch boards, described state switch boards is arranged on base, and move left and right along susceptor surface, the below of described light source beam splitter is provided with the plane mirror that is fixed on susceptor surface, the left side of described interference beam splitter prism is provided with the image capture module that is fixed on susceptor surface, right side is provided with condition selecting plate, described condition selecting plate is arranged on base, and move forward and backward along susceptor surface.
Described bracing frame includes left side back up pad and the right side back up pad being separately fixed on base, and be connected to front support rod and the back support rod between left side back up pad and right side back up pad, on described front support rod, be provided with light source beam splitter, on described back support rod, be provided with light source deflection triangular prism.
Described state switch boards includes the first light hole that matts distributes, the first baffle plate, the second light hole and second baffle, wherein, the first described light hole and the first baffle plate are positioned at left side, for gating upper strata light path, close lower floor's light path, the second light hole and second baffle are positioned at right side, for gating lower floor light path obstruction upper strata light path, the first light hole and second baffle are positioned at top, the first baffle plate and the second light hole are positioned at below, and, the first described baffle plate is provided with shearing catoptron on the side that is positioned at described this side of light source deflection triangular prism.
The first described light hole and the first baffle plate are for ESSPI system, and the second described light hole and second baffle are for ESPI system.
Described condition selecting plate is to be arranged side by side by phase shift plane mirror and reference planes.
Multifunction electronic speckle interferometer of the present invention.By one-shot measurement, both can obtain testee and be subject to the stress full-field distribution under load, can obtain again distortion or the displacement full-field distribution of measured object under this load.This is for providing a kind of method of novel multi-functional detection in industrial detection or analysis, the space of having simplified instrument, has increased the accuracy of measuring.Two class measurement results can be provided in one-shot measurement, can be widely used in stress in industry, strain, or among the on-line measurement of displacement field, on-line measurement in the time of as the strain value of tire and displacement field, has expanded measurement range, has reduced the space structure of surveying instrument, shortened Measuring Time simultaneously, after widely applying, there is considerable economic benefit in industry.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention;
Fig. 2 is state switch boards structural representation of the present invention, wherein:
Figure (a) is front view, and figure (b) is rear view;
Fig. 3 is the structural representation of multifunction electronic speckle interferometer of the present invention when ESSPI system, wherein:
Figure (a) is front view, and figure (b) is the vertical view of interference system in figure (a);
Fig. 4 is the structural representation of multifunction electronic speckle interferometer of the present invention when ESPI system, wherein:
Figure (a) is front view, and figure (b) is the vertical view of interference system in figure (a).
In figure,
Embodiment
Below in conjunction with embodiment and accompanying drawing, multifunction electronic speckle interferometer of the present invention is described in detail.
In order to realize, in a system, realize the stressed Strain Distribution of testee and displacement or distortion distribution simultaneously, make the on-line measurement data in industry more various and accurate, the present invention on basis, provides a kind of multifunction electronic speckle interferometer based on light source gating model in traditional ESPI and ESSPI light path.The present invention can be switched two kinds of different measuring methods by state switch boards, be electronic cutting speckle interferometer measuration system (ESSPI) and electronic speckle pattern interferometry system (ESPI), can in a cover system, obtain the full-field distribution figure of testee Stress and displacement simultaneously.
As shown in Figure 1, multifunction electronic speckle interferometer of the present invention, comprise base 13, on described base 13, be disposed with from front to back light source 1, bracing frame 12, interfere beam splitter prism 8 and tested model 11, before and after on described bracing frame 12 successively be provided with light source beam splitter 2 and light source deflection triangular prism 7, between described light source beam splitter 2 and light source deflection triangular prism 7, be provided with state switch boards 4, described state switch boards 4 is arranged on base 13, and move left and right along base 13 surfaces, the below of described light source beam splitter 2 is provided with the plane mirror 3 that is fixed on base 13 surfaces, the left side of described interference beam splitter prism 8 is provided with the image capture module 6 that is fixed on base 13 surfaces, right side is provided with internal state switch boards 14, described internal state switch boards 14 is arranged on base 13, and move forward and backward along base 13 surfaces.
Described bracing frame 12 includes left side back up pad 121 and the right side back up pad 122 being separately fixed on base 13, and be connected to front support rod 123 and the back support rod 124 between left side back up pad 121 and right side back up pad 122, on described front support rod 123, be provided with light source beam splitter 2, on described back support rod 124, be provided with light source deflection triangular prism 7.
As shown in Figure 2, described state switch boards 4 includes the first light hole 41 that matts distributes, the first baffle plate 42, the second light hole 43 and second baffle 44, wherein, the first described light hole 41 and the first baffle plate 42 are positioned at left side, for gating upper strata light path, close lower floor's light path, the second light hole 43 and second baffle 44 are positioned at right side, for gating lower floor light path obstruction upper strata light path, the first light hole 41 and second baffle 44 are positioned at top, the first baffle plate 42 and the second light hole 43 are positioned at below, and, the first described baffle plate 42 is provided with on the side that is positioned at described light source deflection triangular prism 7 these sides shears catoptron 5.By the effect of state switch boards 4, the two-way that can produce respectively ESSPI system and ESPI system is incident light source independently, wherein, the first described light hole 41 and the first baffle plate 42 are for ESSPI system, and the second described light hole 43 and second baffle 44 are for ESPI system.
Described internal state switch boards 14 is to be arranged side by side by phase shift plane mirror 9 and reference planes 10.
Multifunction electronic speckle interferometer of the present invention is a kind of light source module with the alternative output of two-way incident.This module is by light source 1, light source beam splitter 2, and plane mirror 3 and state switch boards 4 form.Its principle is as follows: first, light source 1 can be divided into two-beam through a minute light source beam splitter 2, and wherein export at upper strata along continuous straight runs on a road, and another light beam is exported at lower floor's along continuous straight runs through plane mirror 3, and two-way light does not interfere with each other.This has just formed the light source of two-way incident.4 of state switch boards for which light of gating enter to inject among optical system below.
When needs monitor strain amount or stress, state switch boards 4 can be adjusted to the state of upper strata light path gating, as shown in Fig. 3 (a).From Fig. 3 (a) front elevation, state switch boards 4 is the light path gating on upper strata, and the deflecting action by light source deflection triangular prism enters interference system 15, and interference system 15 as shown in Figure 3 (b).And the light path of lower floor is closed by force.In interference system 15 inside, by phase shift plane mirror 9 and reference planes 10, formed internal state switch boards 14 as shown in Figure 3, this internal state switch boards 14 can realize and moving forward and backward, in order to form ESSPI system, need to move this internal state switch boards 14, phase shift plane mirror 9 be moved to the dead ahead of interfering beam splitter prism 8.And there is a plane mirror 5 the positive lower left of state switch boards 4 for adjusting the shearing displacement of shear interference system 15.Concrete index path is as accompanying drawing 3(a) as shown in, Fig. 3 (b) is the vertical view of interference system in Fig. 3 (a), the incident light source coming from upper strata deflection is through the scattering of tested model, reflex to and interfere beam splitter prism 8, under the effect of interfering beam splitter prism 8, be divided into two-beam, two-beam converges generation speckle-shearing interferometry through phase shift plane mirror 9 and after shearing the reflection of catoptron 5 again on the practising physiognomy of image capture module 6.In order to adjust shearing displacement, the deflection angle of the shearing catoptron 5 of state switch boards 4 lower lefts can be carried out to small adjustment.The light path that setting as shown in Figure 3 can complete ESSPI system forms, and can carry out the measurement of full field of ess-strain value by this system.
And in the time need to measuring displacement field, state switch boards 4 can be adjusted to the state of lower floor's light path gating, as shown in Figure 4 (a), Fig. 4 (b) is the vertical view of interference system in Fig. 4 (a).From Fig. 4 (a), light path is due among the effect of state switch boards 4 enters to inject interference system 16 from lower floor, and interference system 16 as shown in Figure 4 (b).In order to form ESPI system, need to internal state switch boards 14 translation reference planes backward 10 dead aheads at beam splitter prism will be formed by phase shift plane mirror 9 and reference planes 10.As accompanying drawing 4(b) as shown in figure, the light beam that enters to shine from front is through interfering the effect of beam splitter prism 8 to be beamed into two-way light, two-way light is reflected into by photometry through tested model 11 respectively, the reference light that is reflected into through reference planes 10, two-way light through interfering beam splitter prism 8 to converge, forms speckle interference again in the image planes of image capture module 6 of interfering beam splitter prism 8 positions.By this system, can carry out the measurement of the physical quantitys such as displacement field.
Multifunction electronic speckle interferometer of the present invention, can select in the present embodiment like this, and it is 532nm that light source 1 can be selected wavelength, the green laser that power is 60mw.When need to measure the stress of object or Strain Distribution, can mobile status switch boards 4 to low order end.Tested model is fixed to the position of tested model 11 in accompanying drawing 1, boundary condition can select lower end to fix or four limits are fixed.Phase shift plane mirror 9 is aimed at and interfered beam splitter prism 8, and phase shift plane mirror 9 can connect piezoelectric ceramics micro-displacement apparatus for generation of phase shift algorithm below.The shearing catoptron 5 in state switch boards 4 lower left corners is fixed on state switch boards 4 plates by 4 screws, by adjusting the shearing displacement in the adjustable cutting system of degree of tightness of 4 screws.Adjust suitable shearing displacement, utilization is by high resolving power ccd video camera at a high speed, as MTV-23F1, with high precision image capture card, image capture module 6 as OK-M10B forms, gathers a sub-picture, waits for that tested model 11 is subject to gather an other sub-picture after stress deformation again, utilize size reduction mode to obtain the bar graph of speckle-shearing interferometry, then by Phase Shifting System, can calculate the stress distribution of the tested model whole audience.And in the time need to measuring the displacement field of measured object, need mobile status switch boards 4 to high order end, and equally tested model is fixed to the position of tested model 11 in accompanying drawing 1, select suitable boundary condition.With reference to plane 10, aim at the accurate beam splitter prism 8 of interfering, reference planes 10 connect piezoelectric ceramics mechanism below, now first gather a sub-picture, after waiting for tested model distortion, gather again an other sub-picture, utilize the bar graph of size reduction mode electron gain speckle interference, then by Phase Shifting System, can calculate the Displacements Distribution of the tested model whole audience.In measurement, can change flexibly the position of state switch boards 4, thus on-line measurement when completing a plurality of physical quantity.
Claims (2)
1. a multifunction electronic speckle interferometer, comprise base (13), it is characterized in that, on described base (13), be disposed with from front to back light source (1), bracing frame (12), interfere beam splitter prism (8) and tested model (11), before and after described bracing frame (12) is upper successively be provided with light source beam splitter (2) and light source deflection triangular prism (7), between described light source beam splitter (2) and light source deflection triangular prism (7), be provided with state switch boards (4), described state switch boards (4) is arranged on base (13), and move left and right along base (13) surface, the below of described light source beam splitter (2) is provided with the plane mirror (3) that is fixed on base (13) surface, the left side of described interference beam splitter prism (8) is provided with the image capture module (6) that is fixed on base (13) surface, right side is provided with condition selecting plate (14), described condition selecting plate (14) is arranged on base (13), and move forward and backward along base (13) surface, described state switch boards (4) includes the first light hole (41) that matts distributes, the first baffle plate (42), the second light hole (44) and second baffle (43), wherein, described the first light hole (41) and the first baffle plate (42) are positioned at left side, for gating upper strata light path, close lower floor's light path, the second light hole (44) and second baffle (43) are positioned at right side, for gating lower floor light path obstruction upper strata light path, the first light hole (41) and second baffle (43) are positioned at top, the first baffle plate (42) and the second light hole (44) are positioned at below, and, described the first baffle plate (42) is provided with on the side that is positioned at described this side of light source deflection triangular prism (7) shears catoptron (5).
2. multifunction electronic speckle interferometer according to claim 1, it is characterized in that, described bracing frame (12) includes left side back up pad (121) and the right side back up pad (122) being separately fixed on base (13), and be connected to front support rod (123) and the back support rod (124) between left side back up pad (121) and right side back up pad (122), on described front support rod (123), be provided with light source beam splitter (2), on described back support rod (124), be provided with light source deflection triangular prism (7).
3. multifunction electronic speckle interferometer according to claim 1, is characterized in that, described the first light hole (41) and the first baffle plate (42) are for ESSPI system, and described the second light hole (44) and second baffle (43) are for ESPI system.
4. multifunction electronic speckle interferometer according to claim 1, is characterized in that, described condition selecting plate (14) is to be arranged side by side by phase shift plane mirror (9) and reference planes (10).
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| CN201210170242.6A CN102735380B (en) | 2012-05-28 | 2012-05-28 | Multi-function electronic speckle interferometer |
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| CN102735380A CN102735380A (en) | 2012-10-17 |
| CN102735380B true CN102735380B (en) | 2014-03-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2726045C1 (en) * | 2019-12-24 | 2020-07-08 | Федеральное государственное унитарное предприятие "ВСЕРОССИЙСКИЙ НАУЧНО-ИССЛЕДОВАТЕЛЬСКИЙ ИНСТИТУТ ОПТИКО-ФИЗИЧЕСКИХ ИЗМЕРЕНИЙ" (ФГУП "ВНИИОФИ") | Shear speckle interferometer (versions) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103278272A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Soldered joint stress concentration testing device and stress concentration testing method based on laser speckle technology |
| CN103278268A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Stress testing device and stress concentration testing method based on speckle interference principle |
| CN103983341B (en) * | 2014-05-20 | 2017-09-22 | 厦门大学 | A kind of high-precision laser speckle microvibration measuring system and measuring method |
| CN107036534B (en) * | 2016-02-03 | 2020-09-08 | 北京振兴计量测试研究所 | Method and system for measuring displacement of vibration target based on laser speckle |
| CN106403836B (en) * | 2016-12-14 | 2023-07-25 | 盐城工学院 | Deformation and slope synchronous measurement device and measurement method based on digital speckle interferometry |
| CN108645349B (en) * | 2018-04-19 | 2020-07-24 | 吴思进 | Method and device for measuring transient deformation |
| CN111536883B (en) * | 2020-06-10 | 2021-07-23 | 中北大学 | Micro-displacement sensor based on combined type grating |
| CN113187990B (en) * | 2021-03-26 | 2023-04-14 | 北京工业大学 | Three-dimensional digital speckle interference synchronous measurement device and method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10304317A1 (en) * | 2003-02-04 | 2004-08-12 | Vössing, Frank | Speckle shear interferometry device for measurement of strain or deformation of objects, including in-plane and out-of-plane measurements uses a commercial digital camera with a screen and special shear objective |
| CN1213279C (en) * | 2003-04-21 | 2005-08-03 | 中国船舶重工集团公司第七一一研究所 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
| CN100375885C (en) * | 2006-04-28 | 2008-03-19 | 上海大学 | High-resolution real-time non-destructive detection system and method |
| CN101608904B (en) * | 2009-07-21 | 2011-09-14 | 清华大学 | Multifunction three-dimensional displacement and topography laser interferometry system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2726045C1 (en) * | 2019-12-24 | 2020-07-08 | Федеральное государственное унитарное предприятие "ВСЕРОССИЙСКИЙ НАУЧНО-ИССЛЕДОВАТЕЛЬСКИЙ ИНСТИТУТ ОПТИКО-ФИЗИЧЕСКИХ ИЗМЕРЕНИЙ" (ФГУП "ВНИИОФИ") | Shear speckle interferometer (versions) |
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