CN209559128U - Nanometer resolution displacement measuring device based on optical wedge interference - Google Patents
Nanometer resolution displacement measuring device based on optical wedge interference Download PDFInfo
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- CN209559128U CN209559128U CN201822174002.9U CN201822174002U CN209559128U CN 209559128 U CN209559128 U CN 209559128U CN 201822174002 U CN201822174002 U CN 201822174002U CN 209559128 U CN209559128 U CN 209559128U
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Abstract
Nanometer resolution displacement measuring device based on optical wedge interference, including providing the laser in stable monochromatic coherent light source for measuring device, the output laser of laser is with the light splitting surface of 45 degree of angular alignment light-dividing devices, the light-dividing device of output laser warp is divided into the first optical path and the second optical path positioned at light splitting surface two sides, the output laser that first optical path and the second optical path are each perpendicular to, the first optical path are directed at the glass splitter of wedge fringes device；The glass splitter of wedge fringes device connects testee, and object under test is placed on a variation by voltage come on the displacement platform of the variation of command displacement amount, displacement platform connects regulated power supply；The laser of first optical path will form interference fringe in the upper surface of glass splitter by wedge fringes device, and interference image is then sent to optical imaging system by light-dividing device, the second optical path to obtain complete laser interference image；The output end of optical imaging system connects data processing system.
Description
Technical field
The utility model relates to a kind of displacements for nanoscale to carry out real-time, precise measurement device.
Background technique
As science and technology develops to nanoscale, inexpensive, convenient and practical nano-grade displacement measurement and calibrator face
Facing widespread demand, nano measurement technology is also to solve current and following many high-precisions, the prerequisite of high resolution problems simultaneously
One of.The Measuring Instrument of nanoscale lines displacement at present is for example following several: (1) optical grid line displacement sensor, resolution ratio 1nm,
Measurement range is 500mm；(2) laser interferometer, resolution ratio are 0.1 to 10nm, and measurement range is greater than 1m；(3) capacitance sensor,
Resolution ratio is nanoscale, and measurement range is tens to several hundred microns.It can from above-mentioned several measuring instrument measurement ranges and resolution ratio
Know, these three instruments can all meet the requirement of nano-grade displacement measurement, but above-mentioned several measuring instruments all have that structure is complicated
And expensive disadvantage, it is to be unable to satisfy demand when this is for some demands for only seeking a small number of measurements or measure in short term
's.And influence of their structures for external environment is very sensitive, is not suitable for realizing nanometer level under general experimental situation
The measurement and calibration of shifting amount.Therefore the novel wide range nano measurement technology that can overcome above-mentioned limitation becomes to pass
It is important.
Summary of the invention
In order to overcome the deficiencies in the prior art described above, the utility model provides a kind of real-time nano-grade displacement measurement dress
It sets, the real-time high-precision of nano-grade displacement amount is measured.
The nanometer resolution displacement measuring device based on optical wedge interference of the utility model, it is characterised in that: including
The laser 1 in stable monochromatic coherent light source is provided for measuring device, the output laser of laser 1 is with 45 degree of angular alignment light splitting dresses
4 light splitting surface is set, the output laser is divided into the first optical path 41 and positioned at light splitting surface two sides through the light-dividing device 4
Two optical paths 42, the first optical path 41 and the second optical path 42 are each perpendicular to the output laser, and the first optical path 41 is directed at wedge fringes
The glass splitter of device；
The glass splitter of wedge fringes device 2 connects testee 3, and object under test 3 is placed on the change by voltage
On the displacement platform for changing the variation for carrying out command displacement amount, displacement platform connects regulated power supply；
The laser of first optical path 41 will form interference fringe in the upper surface of glass splitter by wedge fringes device, then
Interference image is sent to optical imaging system 5 by light-dividing device 4, the second optical path 42 to obtain complete laser interference figure
Picture；The output end of optical imaging system 5 connects data processing system 6；Data processing system 6 is calculated according to microdisplacement measurement model
By the microdisplacement of side object, the microdisplacement measurement model is specifically:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dk
For the thickness between kth grade interference fringe corresponding position medium upper and lower interface, L is glass splitter length, and Δ l is medium upper surface
Kth grade interference fringe is by the distance of forward movement.
By information (the interference strength I for measuring interference fringe in its interference spectruminter, reflected light light intensity IR1On medium
Surface kth grade interference fringe is by the distance of forward movement), determine that the refractive index n of medium just entirely defines microdisplacement measurement mould
Type can be calculated by the width of interference fringe by geometrical relationship, so that it is determined that micro-displacement amount.
The utility model includes light path part and microdisplacement measurement part, and stable list is provided for measuring device by laser
Chromatic coherent light source, laser will form interference fringe in the upper surface of glass splitter by glass splitter, then leads to interference image
It crosses spectroscope and is sent to optical imaging system to obtain complete laser interference image.It is mentioned by voltage of voltage regulation source for displacement platform
For stable voltage, by the variation of voltage come the variation of command displacement platform displacement amount, when displacement changes, it is tested
Micro-displacement cause the splitter angle of wedge fringes device to change by mechanical structure, to change laser interference pattern
Space periodic length, imaging system and data processing system extract this length information, and tested displacement is calculated.Its
Device is as shown in Figure 1.
Wedge fringes principle is as follows: according to equal thickness interference principle it is found that when using monochromatic collimated beam vertical irradiation glass splitter
When, since two surfaces can generate two beam reflected lights to monochromatic light respectively above and below splitter, this two beams reflected light can be in glass splitter
Upper surface generate interference, and interference strength are as follows:
Wherein IR1And IR2The respectively light intensity of two beam reflected lights, δ are reflected light by the light path between medium back reflection light
Difference, λ are lambda1-wavelength.If IR1=IR2, then (1) formula can simplify are as follows:
Wherein optical path difference δ=2ndk+ λ/2, n are medium refraction index, dkAbove and below kth grade interference fringe corresponding position medium
Thickness between interface.Fixed one end is motionless, and dielectric thickness changes at L if testee generates displacement, on medium
Surface kth grade interference fringe will move forward Δ l.
θ is the tilt angle of glass splitter, by geometrical relationship it is found that having when θ very little:
Therefore, if measuring the information of interference fringe in its interference spectrum, it is micro- to determine that the refractive index n of medium is just entirely defined
Displacement measurement model can calculate d by the width of interference fringek, so that it is determined that micro-displacement amount Δ d.
The beneficial effects of the utility model are: the utility model provides a kind of real-time nano-grade displacement measuring device, come
It realizes and the real-time high-precision of nano-grade displacement amount is measured.This low cost, convenient and practical nano-grade displacement measuring device will
Important role is generated to high precision position shift measurement.
Detailed description of the invention:
Fig. 1 is the apparatus structure schematic diagram of the utility model.
Fig. 2 a is the reflected light path schematic diagram of the glass splitter of the wedge fringes device of the utility model.
Fig. 2 b is the calculating schematic diagram of the micro-displacement amount by side object of the utility model.
Specific embodiment
The technical solution of the utility model is further illustrated with reference to the accompanying drawing.
The nanometer resolution displacement measuring device based on optical wedge interference of the utility model, it is characterised in that: including
The laser 1 in stable monochromatic coherent light source is provided for measuring device, the output laser of laser 1 is with 45 degree of angular alignment light splitting dresses
4 light splitting surface is set, the output laser is divided into the first optical path 41 and positioned at light splitting surface two sides through the light-dividing device 4
Two optical paths 42, the first optical path 41 and the second optical path 42 are each perpendicular to the output laser, and the first optical path 41 is directed at wedge fringes
The glass splitter of device；
The glass splitter of wedge fringes device 2 connects testee 3, and object under test 3 is placed on the change by voltage
On the displacement platform for changing the variation for carrying out command displacement amount, displacement platform connects regulated power supply；
The laser of first optical path 41 will form interference fringe in the upper surface of glass splitter by wedge fringes device, then
Interference image is sent to optical imaging system 5 by light-dividing device 4, the second optical path 42 to obtain complete laser interference figure
Picture；The output end of optical imaging system 5 connects data processing system 6；Data processing system 6 is calculated according to microdisplacement measurement model
By the microdisplacement of side object, the microdisplacement measurement model is specifically:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dkFor
Thickness between kth grade interference fringe corresponding position medium upper and lower interface, L are glass splitter length, and Δ l is medium upper surface
Kth grade interference fringe is by the distance of forward movement.
By information (the interference strength I for measuring interference fringe in its interference spectruminter, reflected light light intensity IR1On medium
Surface kth grade interference fringe is by the distance of forward movement), determine that the refractive index n of medium just entirely defines microdisplacement measurement mould
Type can be calculated by the width of interference fringe by geometrical relationship, so that it is determined that micro-displacement amount.As shown in Figure 2 b.
The utility model proposes a kind of real-time nano-grade displacement measuring device, specific embodiment is as follows: micro-
Displacement measurement system mainly includes two parts i.e. light path part and microdisplacement measurement part, and wherein light path part mainly includes laser
Device, light-dividing device and imaging measurement system, light path part provide stable list double-colored coherent source by laser for measurement part,
Laser forms interference fringe in measurement part by light-dividing device, finally obtains complete laser interference by imaging measurement system
Image.Microdisplacement measurement part includes wedge fringes device, imaging system and data processing system.Tested micro-displacement passes through
Mechanical structure causes the splitter angle of wedge fringes device to change, so that the space periodic for changing laser interference pattern is long
Degree, imaging system and data processing system extract this length information, and tested displacement is calculated.The utility model is one
Kind carries out the device of real-time high-precision measurement for nano-grade displacement amount.This low cost, convenient and practical nano-grade displacement are surveyed
Important role will be generated to high precision position shift measurement by measuring device.
Claims (1)
1. the nanometer resolution displacement measuring device based on optical wedge interference, it is characterised in that: including being provided for measuring device
The laser (1) in stable monochromatic coherent light source, the output laser of laser (1) is with point of 45 degree of angular alignment light-dividing devices (4)
Smooth surface, the output laser are divided into through the light-dividing device (4) positioned at the first optical path (41) of light splitting surface two sides and second
Optical path (42), the first optical path (41) and the second optical path (42) are each perpendicular to the output laser, and the first optical path (41) alignment is split
The glass splitter of sharp interference device；
The glass splitter of wedge fringes device (2) connects testee (3), and object under test (3) is placed on one by voltage
Variation comes on the displacement platform of the variation of command displacement amount, and displacement platform connects regulated power supply；
The laser of first optical path (41) will form interference fringe in the upper surface of glass splitter by wedge fringes device, then will
Interference image is sent to optical imaging system (5) by light-dividing device (4), the second optical path (42) to obtain complete laser and do
Relate to image；The output end of optical imaging system (5) connects data processing system (6)；Data processing system (6) is surveyed according to micro-displacement
It measures model to calculate by the microdisplacement of side object, the microdisplacement measurement model is specifically:
Wherein, IinterFor interference strength, IR1For the light intensity of reflected light, λ is lambda1-wavelength, and n is medium refraction index, dkFor kth
Thickness between grade interference fringe corresponding position medium upper and lower interface, L are glass splitter length, and △ l is medium upper surface kth grade
Interference fringe is by the distance of forward movement；By measuring interference strength Iinter, reflected light light intensity IR1With medium upper surface kth grade
The distance of forward movement is determined the refractive index n of medium so that it is determined that microdisplacement measurement model by interference fringe, can be by dry
The width for relating to striped is calculated by geometrical relationship, so that it is determined that micro-displacement amount.
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| CN201822174002.9U CN209559128U (en) | 2018-12-24 | 2018-12-24 | Nanometer resolution displacement measuring device based on optical wedge interference |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109579708A (en) * | 2018-12-24 | 2019-04-05 | 浙江工业大学 | Nanometer resolution displacement measuring device based on optical wedge interference |
| CN110702257A (en) * | 2019-11-19 | 2020-01-17 | 苏州大学 | Temperature visualization device and temperature visualization method based on equal thickness interference |
-
2018
- 2018-12-24 CN CN201822174002.9U patent/CN209559128U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109579708A (en) * | 2018-12-24 | 2019-04-05 | 浙江工业大学 | Nanometer resolution displacement measuring device based on optical wedge interference |
| CN110702257A (en) * | 2019-11-19 | 2020-01-17 | 苏州大学 | Temperature visualization device and temperature visualization method based on equal thickness interference |
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