CN109798883A - A kind of high-precision two-dimensional translation stage measuring for verticality method and device - Google Patents

A kind of high-precision two-dimensional translation stage measuring for verticality method and device Download PDF

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Publication number
CN109798883A
CN109798883A CN201711137788.0A CN201711137788A CN109798883A CN 109798883 A CN109798883 A CN 109798883A CN 201711137788 A CN201711137788 A CN 201711137788A CN 109798883 A CN109798883 A CN 109798883A
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China
Prior art keywords
measuring
verticality
proximity sensor
noncontacting proximity
measurement
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CN201711137788.0A
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Inventor
曹艳波
高慧斌
乔彦峰
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Chang Guang Huada Gene Sequencing Equipment (changchun) Co Ltd
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Chang Guang Huada Gene Sequencing Equipment (changchun) Co Ltd
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Priority to CN201711137788.0A priority Critical patent/CN109798883A/en
Publication of CN109798883A publication Critical patent/CN109798883A/en
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Abstract

The invention discloses a kind of high-precision two-dimensional translation stage measuring for verticality method and device, detection method includes the following steps: will to have that there are two the measurement objects of orthogonal first measuring surface and the second measuring surface to be fixedly mounted on the slide unit of two-dimension translational platform;Slide unit is moved along X-axis guide rail, acquires the moving distance x of the first measuring surfaceiWith the vertical jitter amount Δ y of the second measuring surfacei;Slide unit is moved along Y-axis guide rail, acquires the moving distance y of the second measuring surfaceiWith the horizontal jerk value Δ x of the first measuring surfacei;Processing system goes out the verticality θ of two-dimension translational platform according to least square method the Fitting Calculations.Since there are two the measurement objects of orthogonal first measuring surface and the second measuring surface to carry out non-contact measurement by installation tool for two-dimension translational platform, go out the verticality of two-dimension translational platform by the moving distance of two measuring surface and jerk value the Fitting Calculation again, to which the measurement accuracy of this detection method is high, detection efficiency also significant increase.

Description

A kind of high-precision two-dimensional translation stage measuring for verticality method and device
Technical field
The present invention relates to the measurements of verticality, and in particular to a kind of high-precision two-dimensional translation stage measuring for verticality method and dress It sets.
Background technique
Due to the development of accurate displacement measuring instrument, the requirement to the precision of measurement is higher and higher, traditional measurement accuracy It can no longer meet actual demand.Super hot investment casting at present and detection field to index requests such as the precision of moving sweep increasingly Height, especially for the application of planar movement.The motion platform measuring for verticality method of two dimension stacked structure at present It is traditional signing method, i.e., granite standard square chi is fixedly mounted in movement slide unit face, is fixedly connected in translation stage installation base surface Amesdial magnetic stand selects a direction of motion as reference axis, adjusts the depth of parallelism of the square chi plane of reference and the direction of motion, make The whole bounce registration for obtaining amesdial is minimum, then measures whole process bounce in another direction of motion amesdial, measurement is oblique twice The error of perpendicularity of two-dimentional stacked structure translation stage can be obtained plus the constant error of standard square chi for rate angular error.This side Method is practical at present, but since error source fixes (micrometer and standard square chi constant error), measurement accuracy is limited. It is required that the method needs of more high verticality error measure precision improve on traditional measurement framework, connect using optical interference is non- Measurement accuracy can be improved in touching measurement.
Summary of the invention
The application provides a kind of contactless method and device for capableing of high-acruracy survey two-dimension translational platform verticality.
According in a first aspect, provide a kind of high-precision two-dimensional translation stage measuring for verticality method in a kind of embodiment, including Following steps:
By tool, there are two the measurement objects of orthogonal first measuring surface and the second measuring surface to be fixedly mounted on two-dimension translational On the slide unit of platform, and the first measuring surface normal direction for measuring object is parallel with the X-axis guide rail of two-dimension translational platform;
Slide unit is moved along X-axis guide rail, and processing system passes through first noncontacting proximity sensor opposite with the first measuring surface Acquire the moving distance x of the first measuring surfacei, and pass through the second noncontacting proximity sensor acquisition second opposite with the second measuring surface The vertical jitter amount Δ y of measuring surfacei
Slide unit is moved along Y-axis guide rail, and processing system passes through second noncontacting proximity sensor opposite with the second measuring surface Acquire the moving distance y of the second measuring surfacei, and pass through the first noncontacting proximity sensor acquisition first opposite with the first measuring surface The horizontal jerk value Δ x of measuring surfacei
Processing system is fitted to obtain the misalignment angle θ of X-axis guide rail relative measurement object motion profile by least square methodxWith The misalignment angle θ of Y-axis guide rail relative measurement object motion profiley, and calculate the verticality θ of two-dimension translational platforms0xy, Middle θ0For the verticality of the first measuring surface and the second measuring surface.
Further, the first measuring surface normal direction is adjusted to and the X-axis on two-dimension translational platform by measurement object by autocollimator Guide rail is parallel.
Further, the first measuring surface and the second measuring surface are plane mirror, the first noncontacting proximity sensor and Two noncontacting proximity sensors are plane mirror double frequency displacement interference instrument.
In other embodiments, the first measuring surface and the second measuring surface on be coated with conductive film, the first non-contact sensor Device and the second noncontacting proximity sensor are capacitance sensor or voltage sensor.
According to second aspect, a kind of high-precision two-dimensional translation stage testing apparatus for verticality is provided in a kind of embodiment, comprising:
Object is measured, there are two orthogonal first measuring surface and the second measuring surface, measurement objects to be fixedly mounted on two for tool On the slide unit for tieing up translation stage, the first measuring surface normal direction is parallel with the X-axis guide rail of two-dimension translational platform;
First noncontacting proximity sensor, first measuring surface installation of the induction end towards measurement object;
Second noncontacting proximity sensor, second measuring surface installation of the induction end towards measurement object;
Processing system is connect, for passing through with the first noncontacting proximity sensor and the second noncontacting proximity sensor signal First noncontacting proximity sensor acquires the moving distance x of the first measuring surfaceiWith horizontal jerk value Δ xi, and it is non-contact by second Formula sensor acquires the moving distance y of the second measuring surfaceiWith vertical jitter amount Δ yi, and calculate the verticality of two-dimension translational platform.
Further, the first measuring surface and the second measuring surface are plane mirror, the first noncontacting proximity sensor and Two noncontacting proximity sensors are plane mirror double frequency displacement interference instrument.
Further, high-precision two-dimensional translation stage testing apparatus for verticality further includes laser generator, beam splitter and reflection Mirror;Laser generator is connect with processing system signal, and processing system controls laser generator and emits laser;Beam splitter is mounted on sharp In the optical path of the laser of optical generator transmitting, and laser transmission and reflection are divided into two-beam, the laser irradiation of transmission to first On noncontacting proximity sensor, in the laser irradiation to reflecting mirror of reflection;The laser reflection that reflecting mirror reflects beam splitter is to second On noncontacting proximity sensor.
Further, high-precision two-dimensional translation stage testing apparatus for verticality further includes autocollimator, and autocollimator is used for will First measuring surface of measurement object is adjusted to parallel with the X-axis guide rail of two-dimension translational platform.
Further, the verticality of the first measuring surface and the second measuring surface that measure object is less than θ0μrad。
Further, measure object the first measuring surface and the second measuring surface and installation ground verticality be less than θ1μrad。
According to the high-precision two-dimensional translation stage measuring for verticality method and device of above-described embodiment, since two-dimension translational platform is logical Crossing installation tool, there are two the measurement objects of orthogonal first measuring surface and the second measuring surface to carry out non-contact measurement, then passes through The moving distance and horizontal jerk value the Fitting Calculation of two measuring surface go out the verticality of two-dimension translational platform, thus this detection method Measurement accuracy is high, detection efficiency also significant increase.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of high-precision two-dimensional translation stage testing apparatus for verticality in embodiment;
Fig. 2 is the structural schematic diagram that autocollimator adjusts the depth of parallelism in a kind of embodiment;
Fig. 3 is the flow chart of high-precision two-dimensional translation stage measuring for verticality method in another embodiment;
Fig. 4 is the slope fit figure of the first measuring surface and the second measuring surface in another embodiment.
Specific embodiment
Below by specific embodiment combination attached drawing, invention is further described in detail.
Embodiment one:
A kind of high-precision two-dimensional translation stage testing apparatus for verticality is provided in the present embodiment, this detection device is non-connects Touch optical interference detection.
As shown in Figure 1, the detection device of the present embodiment mainly includes measurement object 1, the first noncontacting proximity sensor 2, second Noncontacting proximity sensor 3, processing system 4, laser generator 5, beam splitter 6, reflecting mirror 7 and autocollimator 8.
Two-dimension translational platform 9 includes slide unit (not shown), X-axis guide rail 91 and Y-axis guide rail 92, and slide unit is slidably installed In X-axis guide rail 91, X-axis guide rail 91 is slidably mounted in Y-axis guide rail 92, i.e., X-axis guide rail 91 is upper strata guide rail, and Y-axis is led Rail 92 is lower floor guide rail, this detection device is used to detect the verticality of X axis rail 91 and Y-axis guide rail 92.
Measurement object 1 is block structure, and there are two orthogonal first measuring surface a and the second measuring surface b for side tool, and First measuring surface a and the second measuring surface b is plane mirror, the two flatness with higher and verticality, and the two is hung down Straight degree is less than θ0μ rad, the lower surface of measurement object 1 are the mounting surface vertical with the first measuring surface a and the second measuring surface b, mounting surface It can will measure being mounted on the slide unit of two-dimension translational platform 9 for 1 level of object.As shown in Fig. 2, measurement object 1 will by autocollimator 8 First measuring surface a be adjusted to it is parallel with X axis rail 91, then by measurement object 1 be fixed on slide unit.
First noncontacting proximity sensor 2 and the second noncontacting proximity sensor 3 are plane mirror double frequency displacement interference instrument, and first The measurement end of noncontacting proximity sensor 2 is arranged towards the first measuring surface a, and the measurement end of the second noncontacting proximity sensor 3 is towards Two measuring surface b setting, the first noncontacting proximity sensor 2 be used to detect the first measuring surface a moving distance and horizontal jerk value, the Two noncontacting proximity sensors 3 are used to detect the moving distance and vertical jitter amount of the second measuring surface b.
Laser generator 5 is laser emitting source, for emitting the laser for being used for measurement, the Laser emission of laser generator 5 First measuring surface a setting of the end face to measurement object 1.
Beam splitter 6 is mounted in the optical path of the laser of the transmitting of laser generator 5, and beam splitter 6 emits laser generator 5 Laser transmission and reflection are divided into the orthogonal light of two beams, and the beam of laser of transmission exposes on the first noncontacting proximity sensor 2.
Reflecting mirror 7 is mounted in the optical path of the laser of the reflection of beam splitter 6, and the laser that reflecting mirror 7 reflects beam splitter 6 is again It reflexes on the second noncontacting proximity sensor 3.
Processing system 4 is computer, including acquisition unit and processing unit, and processing system 4 is believed with laser generator 5 respectively Number connection, for control laser generator 5 emit laser detection.Processing system 4 is non-contact with first respectively by two optical fiber Formula sensor 2 is connected with 3 signal of the second noncontacting proximity sensor, non-is connect for obtaining the first noncontacting proximity sensor 2 and second The interference signal of touch sensor 3, and calculate the verticality of two-dimension translational platform 9.
The testing principle of this detection device are as follows: laser generator 5 emits laser, laser irradiation to beam splitter 6, beam splitter 6 The first noncontacting proximity sensor 2 is transmitted through by the 50% of laser, and laser is divided into three beams inside the first noncontacting proximity sensor 2 Light, light beam be internal reflection reference light, two beams be expose to the first measuring surface a reflection measurement light, a branch of reference light and Two beam reflected lights are interfered in the output end of the first noncontacting proximity sensor 2, and interference data is reached processing system 4, place Reason system 4 according to interference data collect the first measuring surface a moving distance and horizontal jerk value;Beam splitter 6 is by laser 50% reflexes to reflecting mirror 7, and reflecting mirror 7 is again by laser reflection to the second noncontacting proximity sensor 3, the second noncontacting proximity sensor Laser is divided into three-beam by 3 same inside, and light beam is the reference light of internal reflection, and two beams are anti-to expose to the second measuring surface b The measurement light penetrated, a branch of reference light and two beam reflected lights are interfered in the output end of the second noncontacting proximity sensor 3, and will be done It relates to data and reaches processing system 4, processing system 4 collects the moving distance and vertical jump of the second measuring surface b according to interference data Momentum;After processing system 4 collects moving distance and the jerk value of the first measuring surface a and the second measuring surface b, pass through least square Method is quasi- to calculate 9 verticality of two-dimension translational platform.
In the present embodiment, the first noncontacting proximity sensor 2 and the second noncontacting proximity sensor 3 are that the displacement of plane mirror double frequency is dry Interferometer, and be implemented in combination with contactless optical interference with laser generator 5, beam splitter 6 and reflecting mirror 7 and detect.In other realities It applies in example, conductive film, the first noncontacting proximity sensor 2 can also be plated on the first measuring surface a and the second measuring surface b of measurement object 1 It is capacitance sensor or voltage sensor with the second noncontacting proximity sensor 3, non-contacting detection equally can be achieved.
High-precision two-dimensional translation stage testing apparatus for verticality provided in this embodiment, since two-dimension translational platform passes through installation tool There are two the measurement objects of orthogonal first measuring surface and the second measuring surface to carry out non-contact optical interferometry, then passes through The moving distance and jerk value the Fitting Calculation of two measuring surface go out the verticality of two-dimension translational platform, thus the measurement of this detection device Precision is high, detection efficiency also significant increase.
Embodiment two:
A kind of high-precision two-dimensional translation stage measuring for verticality method is present embodiments provided, this detection method is based on above-mentioned reality The detection device applied in example one is realized.
As shown in figure 3, the high-precision two-dimensional translation stage measuring for verticality method of the present embodiment includes the following steps:
S001: installation measurement object;
Tool is fixedly mounted on two dimension there are two the measurement object 1 of orthogonal first measuring surface a and the second measuring surface b to put down In moving stage 9, and the first measuring surface a normal direction for measuring object 1 is adjusted to by the X-axis guide rail with two-dimension translational platform 9 by autocollimator 8 91 is parallel, then measurement object 1 is fixedly mounted on the slide unit of two-dimension translational platform 9 by screw or shackle member.
In order to guarantee the precision of detection, measurement object 1 measures the first measuring surface a and second of object 1 as measurement object of reference Measuring surface b verticality and the verticality on they and installation ground become measurement result deciding factor, therefore need to will measure the of object 1 The verticality of one measuring surface a and the second measuring surface b are machined to be less than θ0μ rad measures the measurement of the first measuring surface a and second of object 1 The verticality on face b and installation ground is less than θ1μrad.Measure object 1 the first measuring surface a and the second measuring surface b verticality and Installation accuracy is the precision of μ rad magnitude, ensure that measurement result is the precision of μ rad magnitude.
S002: it is moved along X-axis guide rail;
Slide unit is moved to the positive limit from cathode limit along X-axis guide rail 91, and X-axis guide rail 91 is stationary at this time, i.e. slide unit band Dynamic measurement object 1 is moved along X-direction.
Measure object 1 in the process of moving, the first noncontacting proximity sensor 2 is constantly by laser irradiation to the first measuring surface a On, the reference light of measurement light and 2 internal reflection of the first noncontacting proximity sensor that the first measuring surface a is reflected back occurs in output end Interference, and interference information is sent to processing system 4, processing system 4 is according to the interference information meter of the first noncontacting proximity sensor 2 Calculate the moving distance x of the first measuring surface ai, i.e., processing system 4 with the first noncontacting proximity sensor 2 acquisition first by measuring The moving distance x of face ai.Meanwhile second noncontacting proximity sensor 3 constantly by laser irradiation to the second measuring surface b, the second measurement The reference light of measurement light and 3 internal reflection of the second noncontacting proximity sensor that face b is reflected back is interfered in output end, and will be done It relates to information and is sent to processing system 4, processing system 4 calculates the second survey according to the interference information of the second noncontacting proximity sensor 3 The vertical jitter amount Δ y of amount face bi, i.e., processing system 4 is acquired by the second noncontacting proximity sensor 3 measures the vertical of the movement of object 1 Jerk value Δ yi
S003: it is moved along Y-axis guide rail;
It after measurement object 1 is moved along X-axis guide rail 91, is continued to move to along Y-axis guide rail 92, measures object 1 at this time and led with respect to X-axis Rail 91 is stationary.
Similarly, processing system 4 acquires the moving distance y of the second measuring surface b by the second noncontacting proximity sensor 3i, And the horizontal jerk value Δ x of the first measuring surface a is acquired by the first noncontacting proximity sensor 2i, that is, acquire measurement object 1 and transport Dynamic horizontal jerk value Δ xi
S004: verticality is calculated.
The calculating of verticality is completed by processing system 4.Processing system 4 obtains the moving distance x of the first measuring surface aiWith The vertical jitter amount Δ y of two measuring surface bi, it is fitted to obtain 91 relative measurement object of X-axis guide rail, 1 motion profile according to least square method Misalignment angle θx, the moving distance y of second measuring surface b of the acquisition of processing system 4iWith the horizontal jerk value Δ of the first measuring surface a xi, it is fitted to obtain the misalignment angle θ of 92 relative measurement object of Y-axis guide rail, 1 motion profile according to least square methody
As shown in figure 4, point m1 is the vertical jitter amount Δ y for measuring the second measuring surface bi, straight line m2 is the second measuring surface b's Vertical jitter amount Δ yiLeast square fitting straight line, point n1 be the first measuring surface a horizontal jerk value Δ xi, straight line n2 is the The horizontal jerk value Δ x of one measuring surface aiLeast square fitting straight line.
Processing system 4 is further according to calculating formula: θs0xy(μ rad) calculates the verticality of two-dimension translational platform.
High-precision two-dimensional translation stage measuring for verticality method provided in this embodiment, due to plane mirror two-frequency laser interferometer It can be obtained by ambient compensation system nano-precision (nm), therefore squareness measurement Precision Theory can achieve μ rad amount Automatic measurement may be implemented in grade, processing system 4.
In other embodiments, the first measuring surface a and the second measuring surface b on be coated with conductive film, processing system 4 can lead to Moving distance and the horizontal jerk value of capacitance sensor or voltage sensor acquisition the first measuring surface a and the second measuring surface b are crossed, together Verticality of the sample by contactless acquisition measurement two-dimension translational platform, precision with higher.
Use above specific case is illustrated the present invention, is merely used to help understand the present invention, not to limit The system present invention.For those skilled in the art, according to the thought of the present invention, can also make several simple It deduces, deform or replaces.

Claims (10)

1. a kind of high-precision two-dimensional translation stage measuring for verticality method, which comprises the steps of:
By tool, there are two the measurement objects of orthogonal first measuring surface and the second measuring surface to be fixedly mounted on two-dimension translational platform On slide unit, and the first measuring surface normal direction of the measurement object is parallel with the X-axis guide rail of two-dimension translational platform;
Slide unit is moved along X-axis guide rail, and processing system passes through first noncontacting proximity sensor opposite with first measuring surface Acquire the moving distance x of first measuring surfacei, and pass through second noncontacting proximity sensor opposite with second measuring surface Acquire the vertical jitter amount Δ y of second measuring surfacei
Slide unit is moved along Y-axis guide rail, and processing system passes through second noncontacting proximity sensor opposite with second measuring surface Acquire the moving distance y of second measuring surfacei, and pass through first noncontacting proximity sensor opposite with first measuring surface Acquire the horizontal jerk value Δ x of first measuring surfacei
Processing system is fitted to obtain the misalignment angle θ of X-axis guide rail relative measurement object motion profile by least square methodxIt is led with Y-axis The misalignment angle θ of rail relative measurement object motion profiley, and calculate the verticality θ of two-dimension translational platforms0xy, wherein θ0 For the verticality of the first measuring surface and the second measuring surface.
2. high-precision two-dimensional translation stage measuring for verticality method as described in claim 1, which is characterized in that the measurement object is logical Cross autocollimator the first measuring surface normal direction is adjusted to it is parallel with the X-axis guide rail of two-dimension translational platform.
3. high-precision two-dimensional translation stage measuring for verticality method as claimed in claim 1 or 2, which is characterized in that described first Measuring surface and the second measuring surface are plane mirror, and first noncontacting proximity sensor and the second noncontacting proximity sensor are equal For plane mirror double frequency displacement interference instrument.
4. high-precision two-dimensional translation stage measuring for verticality method as claimed in claim 1 or 2, which is characterized in that described first Measuring surface and the second measuring surface on be coated with conductive film, first noncontacting proximity sensor and the second noncontacting proximity sensor are equal For capacitance sensor or voltage sensor.
5. a kind of high-precision two-dimensional translation stage testing apparatus for verticality characterized by comprising
Object is measured, there are two orthogonal first measuring surface and the second measuring surface, the measurement objects to be fixedly mounted on two for tool On the slide unit for tieing up translation stage, the first measuring surface normal direction is parallel with the X-axis guide rail of two-dimension translational platform;
First noncontacting proximity sensor, first measuring surface installation of the induction end towards the measurement object;
Second noncontacting proximity sensor, second measuring surface installation of the induction end towards the measurement object;
Processing system is connect, for passing through with first noncontacting proximity sensor and the second noncontacting proximity sensor signal First noncontacting proximity sensor acquires the moving distance x of the first measuring surfaceiWith horizontal jerk value Δ xi, and pass through described the Two noncontacting proximity sensors acquire the moving distance y of the second measuring surfaceiWith vertical jitter amount Δ yi, and calculate two-dimension translational platform Verticality.
6. high-precision two-dimensional translation stage testing apparatus for verticality as claimed in claim 5, which is characterized in that first measurement Face and the second measuring surface are plane mirror, and first noncontacting proximity sensor and the second noncontacting proximity sensor are flat Face mirror double frequency displacement interference instrument.
7. high-precision two-dimensional translation stage testing apparatus for verticality as claimed in claim 6, which is characterized in that further include laser hair Raw device, beam splitter and reflecting mirror;The laser generator is connect with processing system signal, and the processing system controls the laser Generator emits laser;The beam splitter is mounted in the optical path of the laser of the laser generator transmitting, and laser is transmitted It is divided into two-beam with reflection, in the laser irradiation to first noncontacting proximity sensor of transmission, the laser irradiation of reflection to institute It states on reflecting mirror;On the laser reflection that the reflecting mirror reflects beam splitter to second noncontacting proximity sensor.
8. high-precision two-dimensional translation stage testing apparatus for verticality as claimed in claim 5, which is characterized in that further include auto-collimation Instrument, the first measuring surface that the autocollimator is used to measure object are adjusted to parallel with the X-axis guide rail of two-dimension translational platform.
9. high-precision two-dimensional translation stage testing apparatus for verticality as claimed in claim 5, which is characterized in that the measurement object The verticality of first measuring surface and the second measuring surface is less than θ0μrad。
10. high-precision two-dimensional translation stage testing apparatus for verticality as claimed in claim 5, which is characterized in that the measurement object The first measuring surface and the second measuring surface and installation ground verticality be less than θ1μrad。
CN201711137788.0A 2017-11-16 2017-11-16 A kind of high-precision two-dimensional translation stage measuring for verticality method and device Pending CN109798883A (en)

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