TWI472712B - Vertical and parallelism detection system and its detection method - Google Patents

Vertical and parallelism detection system and its detection method Download PDF

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TWI472712B
TWI472712B TW101146152A TW101146152A TWI472712B TW I472712 B TWI472712 B TW I472712B TW 101146152 A TW101146152 A TW 101146152A TW 101146152 A TW101146152 A TW 101146152A TW I472712 B TWI472712 B TW I472712B
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TW201423034A (en
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Univ Nat Formosa
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垂直度與平行度檢測系統及其檢測方法Verticality and parallelism detection system and detection method thereof

本發明係關於一種移動軸之垂直度與平行度之量測技術領域。The present invention relates to the field of measurement of the perpendicularity and parallelism of a moving shaft.

按,近年來因為微細化加工發展及精密度要求提高,對於機台設備移動軸之垂直度與平行度的要求日益提高,因此在機台設備製造與組裝校正,通常對其各移動軸進行垂直度與平行度的檢測。現今對於機台設備的檢測技術已朝向多自由度檢測發展,多自由度誤差檢測系統,將可提供設備機台在製造與組裝校正方面有莫大的助益。而目前常用的檢測垂直度與檢測平行度的儀器有兩種,其中之一為方規搭配千分錶、而另一種為雷射干涉儀。In recent years, due to the development of micro-machining and the improvement of precision requirements, the requirements for the verticality and parallelism of the moving axes of the machine equipment are increasing. Therefore, the manufacturing and assembly correction of the machine equipment is usually vertical for each moving axis. Degree and parallelism detection. Nowadays, the detection technology for machine equipment has been developed towards multi-degree of freedom detection. The multi-degree of freedom error detection system will greatly improve the manufacturing and assembly correction of the equipment machine. At present, there are two commonly used instruments for detecting the verticality and the parallelism of detection, one of which is a square gauge with a dial gauge and the other is a laser interferometer.

以方規搭配千分錶之檢測而言,其是以方規的垂直基準面和平行基準面做為檢測依據,檢測平台與機台的垂直度與平行度,但方規尺寸大小受限於加工精度,在愈大面積範圍的方規愈難加工、加工精度不易控制並且價格相當昂貴,因此在目前檢測長行程機台是相當不容易,並且相當缺乏相關技術與裝置。In the detection of the dial gauge with the dial gauge, it is based on the vertical reference plane and the parallel reference plane of the gauge, and the verticality and parallelism of the platform and the machine are detected, but the size of the gauge is limited by Machining accuracy, the more difficult it is to process in the larger area, the processing accuracy is not easy to control and the price is quite expensive. Therefore, it is quite difficult to detect long-stroke machines at present, and there is considerable lack of related technologies and devices.

另就雷射干涉儀之檢測而言,雷射干涉儀為目前業界在進行機台性能檢測時,最可信賴之量測設備,其可量測位 移、直線度、角度誤差、垂直度和平行度,但是每一次設定與架設過程上,只能量測單一種誤差元素,大部分都是用於檢測位移、直線度和角度誤差,而在檢測機台垂直度和平行度時,由於光學元件設定與光路對準不易耗時,所以造成檢測結果重現性精度不佳,並且其搭配的相關鏡組非常昂貴,且在量測過程需時時注意光源是否有被遮蔽,當光源被遮蔽時雷射干涉儀訊號就必須再進行重新設定,因此目前在業界上目前並無人使用垂直度鏡組來檢測機台垂直度和平行度誤。In terms of the detection of laser interferometers, the laser interferometer is the most reliable measuring device in the industry when performing machine performance testing. Shift, straightness, angular error, perpendicularity and parallelism, but each time the setting and erection process can only measure a single error element, most of which is used to detect displacement, straightness and angular error, while detecting When the verticality and parallelism of the machine are not easy to take time due to the optical component setting and optical path alignment, the reproducibility of the detection result is not accurate, and the associated lens set is very expensive, and it takes time in the measurement process. Pay attention to whether the light source is shielded. When the light source is shielded, the laser interferometer signal must be reset. Therefore, no vertical lens group is currently used in the industry to detect the verticality and parallelism of the machine.

換言之,如能發展出一套使用低成本、高效率及高重現性的垂直度與平行度檢測裝置,將可提升現代工業的檢測品質與效率,而對後續校正及加工的精度與良率有莫大助益。In other words, if a vertical and parallelity detection device using low cost, high efficiency and high reproducibility can be developed, the detection quality and efficiency of modern industry can be improved, and the accuracy and yield of subsequent correction and processing can be improved. There is great help.

有鑑於此,本案發明人乃針對前述垂直度與水平度檢測的需求深入探討,並利用多年相關產業與研發的經驗積極尋求解決之道,經不斷努力的研究與試作,終於成功的開發出一種垂直度與平行度檢測系統及其檢測方法,藉以克服現有者無法以低成本、高效率及高準確性進行檢測所衍生的不便與困擾。In view of this, the inventor of this case has in-depth discussion on the needs of the above-mentioned verticality and levelness detection, and has actively sought solutions through years of experience in related industries and R&D. After continuous efforts in research and trials, he finally succeeded in developing a kind of solution. The verticality and parallelism detection system and its detection method overcome the inconvenience and trouble that the existing one cannot detect with low cost, high efficiency and high accuracy.

本發明之目的即在於提供一種垂直度與平行度檢測系統及其檢測方法,藉以能具有低成本及快速架構之效,且能大 幅提高檢測的高重現性與準確性,同時提高其檢測作業效率。The object of the present invention is to provide a verticality and parallelism detection system and a detection method thereof, thereby having the advantages of low cost and rapid architecture, and can be large The frame improves the reproducibility and accuracy of the test while improving the efficiency of the test.

可達成上述發明目的之垂直度與平行度檢測系統及其檢測方法,包括有:該系統包含一光源單元、至少一垂直反射菱鏡裝置、一第一位置感測器、一第二位置感測器及一第三位置感測器,其中該等垂直反射菱鏡裝置係設於光源單元之光源路徑上,而該第一位置感測器係設於一做為基準之第一移動軸的第一移動件上,又該第二位置感測器與第三位置感測器分別設於一做為待測之第二移動軸與第三移動軸的第二移動件、第三移動件上,且該第一位置感測器、第二位置感測器及第三位置感測器可分別接收對應垂直反射菱鏡裝置所產生之光源;而該檢測系統之檢測方法至少包含有;一直線度誤差檢測,將第一位置感測器架設於第一移動軸之第一移動件上,使待測移動件上的位置感測器接收到訊號,該第一移動軸之第一移動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第一移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第一移動軸檢測;一垂直度檢測,將垂直反射菱鏡裝置架設於第二移動軸方向,使光源單元之準直光通過垂直反射菱鏡裝置,以接收入射光產生九十度垂直之檢測光源,該第二移動軸之第二移 動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第二移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第二移動軸檢測;一平行度檢測,將垂直反射菱鏡裝置架設於第三移動軸方向,使光源單元之準直光通過垂直反射菱鏡裝置,以接收入射光產生九十度垂直之檢測光源,第三移動軸之第三移動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第三移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第三移動軸檢測;最後,進行計算角度誤差之步驟,在完成待測軸之檢測後,將前述第一移動軸、第二移動軸及第三移動軸之資料利用最小平方法求得其傾斜角;藉此,可求得第一移動軸、第二移動軸及第三移動軸的垂直度或平行度。A perpendicularity and parallelism detecting system and a detecting method thereof, which can achieve the above object, comprising: a light source unit, at least one vertical reflecting mirror device, a first position sensor, and a second position sensing And a third position sensor, wherein the vertical reflection mirror device is disposed on the light source path of the light source unit, and the first position sensor is disposed on the first movement axis as a reference a second position sensor and a third position sensor are respectively disposed on the second moving member and the third moving member as the second moving axis and the third moving axis to be tested. And the first position sensor, the second position sensor and the third position sensor respectively receive the light source generated by the corresponding vertical reflection mirror device; and the detection method of the detection system includes at least; the linearity error Detecting, the first position sensor is erected on the first moving member of the first moving shaft, so that the position sensor on the moving member to be tested receives the signal, and the first moving member of the first moving shaft is close to the vertical Reflective mirror device end as The starting position is dragged along the direction of the first moving axis, and a data point is recorded every interval, until the other end completes the first moving axis detection; and a verticality detection, the vertical reflecting mirror device is erected on the second moving axis Direction, the collimated light of the light source unit is passed through the vertical reflection prism device to receive the incident light to generate a detection light source of ninety degrees vertical, and the second movement axis is moved second The moving member is moved to the initial position near the vertical reflection mirror device, and is dragged along the second moving axis direction, and a data point is recorded every interval, until the other end completes the second moving axis detection; a parallelism detection, The vertical reflection prism device is erected in the direction of the third moving axis, so that the collimated light of the light source unit passes through the vertical reflection prism device to receive the incident light to generate a detection light source of ninety degrees vertical, and the third moving member of the third movement axis Taking the end of the vertical reflection mirror device as the initial position, dragging along the third movement axis direction, recording a data point every interval, until the other end completes the third movement axis detection; finally, calculating the angle error Step, after the detection of the axis to be tested is completed, the data of the first moving axis, the second moving axis, and the third moving axis are obtained by using a minimum flat method; thereby, the first moving axis can be obtained. The perpendicularity or parallelism of the second moving axis and the third moving axis.

藉此,透過本創作前述技術手段的具體實現,讓本發明的垂直度與平行度檢測系統可透過將第一位置感測器架設於第一移動軸上,進行第一移動軸檢測,然後利用光路設計使垂直反射菱鏡裝置打出一道垂直第一移動軸之光路,再將位置感測器架設於待測軸上,並檢測、計算第一移動軸與第二移動軸之角度誤差,而可獲得垂直度,且當另一垂直反射菱鏡裝置上射出另一道平行前述第一移動軸之光路,並將第 二位置感測器及第三位置感測器分別設在該第二移動軸及第三移動軸,檢測該兩待測軸間的角度誤差可獲得平行度,且使本發明具有架構簡單,且低成本之目的,且更具有高效率及高重現性的功效,從而提升其檢測品質及準確性,以提高後續加工的精密度。Therefore, through the specific implementation of the foregoing technical means, the verticality and parallelism detecting system of the present invention can perform the first moving axis detection by arranging the first position sensor on the first moving axis, and then utilize The optical path design causes the vertical reflection prism device to drive a light path perpendicular to the first moving axis, and then positions the position sensor on the axis to be measured, and detects and calculates an angular error between the first moving axis and the second moving axis, but Obtaining the perpendicularity, and when another vertical reflection mirror device emits another optical path parallel to the first moving axis, and The second position sensor and the third position sensor are respectively disposed on the second moving axis and the third moving axis, and detecting an angular error between the two axes to be measured obtains parallelism, and the invention has a simple structure, and The purpose of low cost, and more efficient and highly reproducible, thereby improving the quality and accuracy of the inspection to improve the precision of subsequent processing.

請參閱圖1、17,本發明所提供之垂直度與平行度檢測系統及其檢測方法,主要包括有:一光源單元1、至少一垂直反射菱鏡裝置2、若干的位置感測器,其中該等垂直反射菱鏡裝置2係設於光源單元1之光源路徑上,而該第一位置感測器32係設於一做為基準之第一移動軸31的第一移動件33上,又該第二位置感測器42及第三位置感測器52係分別設於一做為待測之第二移動軸41、第三移動軸51的第二移動件43、第三移動件53上;請參考圖2,該光源單元1供發出準直光,該光源單元可選用雷射干涉儀。進一步的,該光源單元1進而包含有訊號強度接收器11。進一步說明該訊號強度接收器11特性,訊號強度接收器11具有檢視當入射光束與反射光束為同軸時,該訊號強度接收器11可獲得最大強度訊號之特性。Referring to FIG. 1 and FIG. 17, the verticality and parallelism detecting system and the detecting method thereof provided by the present invention mainly include: a light source unit 1, at least one vertical reflecting mirror device 2, and a plurality of position sensors, wherein The vertical reflection mirror device 2 is disposed on the light source path of the light source unit 1, and the first position sensor 32 is disposed on the first moving member 33 of the first moving shaft 31 as a reference, and The second position sensor 42 and the third position sensor 52 are respectively disposed on the second moving member 43 and the third moving member 53 as the second moving shaft 41 to be tested, the third moving shaft 51. Referring to FIG. 2, the light source unit 1 is configured to emit collimated light, and the light source unit may be a laser interferometer. Further, the light source unit 1 further includes a signal intensity receiver 11. Further, the signal intensity receiver 11 has characteristics. The signal intensity receiver 11 has the characteristic that the signal intensity receiver 11 can obtain the maximum intensity signal when the incident beam is coaxial with the reflected beam.

如圖3~7所示,該垂直反射菱鏡裝置2具有兩同一水平、且呈垂直狀設置之反射鏡21,又垂直反射菱鏡裝置2於該等 反射鏡21下方分設有一同水平之五面鏡22,再者該垂直反射菱鏡裝置2之反射鏡21與五面鏡22係設於一傾斜平台23上,該傾斜平台23可供一Z軸移動平台24進行調整。進一步說明各元件之特性;首先,該垂直反射菱鏡裝置2在接收光源單元之光源後,經內部鏡組之折、返射產生垂直方向準直光。又,該反射鏡21當光源單元1射出入射光束時,當入射光垂直與反射鏡21時,入射光束會與反射光束呈現同軸,藉由訊號強度接收器11獲得最大強度訊號。該五面鏡22特性是可將入射光束與出射光束的夾角呈九十度,確保入射光束與出射光束的垂直。As shown in FIGS. 3-7, the vertical reflection mirror device 2 has two mirrors 21 arranged at the same level and vertically, and the vertical reflection mirror device 2 is disposed thereon. A mirror pentagon 22 is disposed below the mirror 21, and the mirror 21 and the pentagon 22 of the vertical mirror device 2 are disposed on a tilting platform 23, and the tilting platform 23 is provided for a Z. The axis moving platform 24 is adjusted. Further, the characteristics of each component are further described. First, after receiving the light source of the light source unit, the vertical reflection mirror device 2 generates vertical collimated light by folding and returning the internal mirror group. Moreover, when the light source unit 1 emits the incident light beam, when the incident light is perpendicular to the mirror 21, the incident light beam is coaxial with the reflected light beam, and the maximum intensity signal is obtained by the signal intensity receiver 11. The five-sided mirror 22 is characterized by an angle of ninety degrees between the incident beam and the exiting beam, ensuring that the incident beam is perpendicular to the exiting beam.

或如圖8所示,可使用1/4八面菱鏡25取代反射鏡21及五面鏡22,且該傾斜平台23可供XY軸移動平台26進行調整,藉由光源單元1發出光源到1/4八面菱鏡25之反射鏡A面251,確保光源與1/4八面菱鏡25垂直(如圖8所示),藉此,該1/4八面菱鏡25接收入射光產生九十度垂直光源供第二位置感測器42或第三位置感測器52接收訊號(如圖9所示),同樣的該1/4八面菱鏡25設置於於一傾斜平台23上,該傾斜平台23可供一XY軸移動平台26進行調整。同樣的,當光源單元1射出入射光束時,當入射光垂直於反射鏡A面251時,入射光束會與反射光束呈現同軸,藉由訊號強度接收器11獲得最大強度訊號。Or as shown in FIG. 8, the mirror 21 and the five-sided mirror 22 can be replaced by a 1/4 octahedron 25, and the tilting platform 23 can be adjusted by the XY axis moving platform 26, and the light source unit 1 emits a light source to The mirror A surface 251 of the 1/4 octahedron 25 ensures that the light source is perpendicular to the 1/4 octahedron 25 (as shown in FIG. 8), whereby the 1/4 octahedron 25 receives the incident light. A ninety degree vertical light source is generated for the second position sensor 42 or the third position sensor 52 to receive a signal (as shown in FIG. 9), and the same 1/4 octahedron 25 is disposed on a tilting platform 23 The tilting platform 23 is adjustable for an XY axis moving platform 26. Similarly, when the light source unit 1 emits the incident light beam, when the incident light is perpendicular to the mirror A surface 251, the incident light beam is coaxial with the reflected light beam, and the maximum intensity signal is obtained by the signal intensity receiver 11.

請參考圖10~11,另該第一位置感測器32、第二位置感測器42與第三位置感測器52係選自可供接收光源之四象限光電感測器,用以接收光源單元1經垂直反射菱鏡裝置2所射出之光源;進一步說明該感測單元結構,感測單元主要有一感測器其底緣連接有一支柱,且透過一感測器固定座連結於一磁性座上,藉此,感測單元可接合於第一移動軸31或第一移動件33、第二移動件43、第三移動件53上;Referring to FIGS. 10-11, the first position sensor 32, the second position sensor 42 and the third position sensor 52 are selected from four quadrant photodetectors for receiving light sources for receiving. The light source unit 1 is vertically reflected by the light source emitted by the prism device 2; further, the sensing unit structure is further described. The sensing unit mainly has a sensor whose bottom edge is connected with a pillar and is connected to a magnetic pole through a sensor holder. a seat, whereby the sensing unit can be coupled to the first moving shaft 31 or the first moving member 33, the second moving member 43, and the third moving member 53;

藉此,組構成一架構簡單、且效率高之垂直度與平行度檢測系統者。Thereby, the group constitutes a simple and efficient verticality and parallelism detection system.

至於本發明裝置之量測方法,該檢測方法至少包含有一直線度誤差檢測(如圖11~圖14)、一垂直度誤差檢測(如圖11~圖16及圖18)、一平行度誤差檢測(如圖11~圖17及圖19),以至少求得該等待測軸的垂直度,又或進一步可求待該等待測軸的水平度。As for the measuring method of the device of the present invention, the detecting method includes at least one straightness error detecting (as shown in FIG. 11 to FIG. 14), a verticality error detecting (as shown in FIGS. 11 to 16 and FIG. 18), and a parallelism error detecting. (As shown in FIG. 11 to FIG. 17 and FIG. 19), at least the verticality of the waiting axis is obtained, or the level of the waiting axis is further determined.

請參考圖11~圖14為本發明直線度誤差檢測步驟:Please refer to FIG. 11 to FIG. 14 for the straightness error detecting step of the present invention:

步驟1:如圖11所示,將第一位置感測器32設置於第一移動件33上。Step 1: As shown in FIG. 11, the first position sensor 32 is disposed on the first moving member 33.

步驟2:如圖12所示,沿第一移動軸31方向設置一光源單元1提供準直光,供第一位置感測器32接收。Step 2: As shown in FIG. 12, a light source unit 1 is disposed along the direction of the first moving axis 31 to provide collimated light for reception by the first position sensor 32.

步驟3:將第一位置感測器32移動到靠近光源單元1的一端做為初始位置。Step 3: The first position sensor 32 is moved to an end close to the light source unit 1 as an initial position.

步驟4:調整光源單元1使準直光入射於第一位置感測器32正中間。Step 4: Adjusting the light source unit 1 causes the collimated light to be incident in the middle of the first position sensor 32.

步驟5:如圖13所示,將第一位置感測器32沿著第一移動軸31方向移動至中間點。Step 5: As shown in FIG. 13, the first position sensor 32 is moved in the direction of the first moving axis 31 to the intermediate point.

步驟6:當第一位置感測器32感測之準直光偏移出感測範圍,則調整光源單元1之準直光入射至第一位置感測器32中心後再移動第一位置感測器32至第一移動軸31初始位置。Step 6: When the collimated light sensed by the first position sensor 32 is offset from the sensing range, the collimated light of the light source unit 1 is adjusted to be incident on the center of the first position sensor 32, and then the first position sense is moved. The detector 32 is moved to the initial position of the first moving shaft 31.

步驟7:重複步驟5、6,直到準直光皆於第一位置感測器32之感測範圍內。Step 7: Repeat steps 5 and 6 until the collimated light is within the sensing range of the first position sensor 32.

步驟8:如圖14所示,將第一位置感測器32沿著第一移動軸31方向移動至最遠端。Step 8: As shown in FIG. 14, the first position sensor 32 is moved to the farthest end in the direction of the first moving axis 31.

步驟9:重複步驟6、8,直到移動範圍準直光之光點皆於感測範圍內。Step 9: Repeat steps 6, 8 until the spot of collimated light in the moving range is within the sensing range.

步驟10:當第一位置感測器32均接收的到光源單元1之準直光,然後靜置5~10分鐘(消除架設誤差)後進行檢測動作。Step 10: When the first position sensor 32 receives the collimated light to the light source unit 1, and then stands for 5 to 10 minutes (eliminating the erection error), the detection operation is performed.

步驟11:在靜置的這段時間,將預檢測之路徑間隔標記號及設定軟體參數。Step 11: During the period of standing, the pre-detected path is separated by the mark number and the setting software parameter.

步驟12:將第一位置感測器32移動到初始位置後,紀錄此位置。Step 12: After moving the first position sensor 32 to the initial position, the position is recorded.

步驟13:將第一位置感測器32移動一固定間格後,紀錄此位置。Step 13: After the first position sensor 32 is moved by a fixed compartment, the position is recorded.

步驟14:重複步驟13,直到第一移動軸31最遠端。Step 14: Step 13 is repeated until the first moving axis 31 is the farthest end.

步驟15:儲存檔案後,將檔案路徑設置到儲存路徑後點選繪製圖形即完成檢測動作。Step 15: After saving the file, set the file path to the storage path and click to draw the graph to complete the detection.

請參考11~圖16為本發明垂直度誤差檢測步驟:完成直線度誤差檢測步驟1~15後,接著進行步驟16即可進行垂直度檢測流程。Please refer to 11 to FIG. 16 for the verticality error detecting step of the present invention. After the straightness error detecting steps 1 to 15 are completed, the step 16 is performed to perform the verticality detecting process.

步驟16:如圖15所示,將垂直反射菱鏡裝置2設置於第一移動軸31之路徑上。Step 16: As shown in FIG. 15, the vertical reflection mirror device 2 is disposed on the path of the first moving shaft 31.

步驟17:如圖16所示,將第二位置感測器42設置於第二移動件43上。Step 17: As shown in FIG. 16, the second position sensor 42 is disposed on the second moving member 43.

步驟18:調整垂直反射菱鏡裝置2的Z軸移動平台24使光源單元1之準直光入射至反射鏡21範圍。Step 18: Adjusting the Z-axis moving stage 24 of the vertical reflection mirror device 2 causes the collimated light of the light source unit 1 to be incident on the scope of the mirror 21.

步驟19:將光源單元1與處理器(電腦)架設完畢後,並開啟直線度量測介面。Step 19: After the light source unit 1 and the processor (computer) are erected, the line measurement interface is turned on.

步驟20:利用光源單元1的準直光作為垂直度架設時的基準。Step 20: The collimated light of the light source unit 1 is used as a reference when the verticality is erected.

步驟21:調整垂直反射菱鏡裝置2的傾斜平台23,使光源單元1之光路與反射鏡21垂直。Step 21: Adjust the tilting platform 23 of the vertical reflection mirror device 2 so that the light path of the light source unit 1 is perpendicular to the mirror 21.

步驟22:接著將調整垂直反射菱鏡裝置2的Z軸移動平 台24使光源單元1所發出的準直光落入垂直反射菱鏡裝置2量測範圍。Step 22: Then adjust the Z axis of the vertical reflection mirror device 2 to move flat The stage 24 causes the collimated light emitted from the light source unit 1 to fall into the measurement range of the vertical reflection mirror device 2.

步驟23:如圖16所示,此時垂直反射菱鏡裝置2接收入射光產生九十度垂直光源使第二移動件43上之第二位置感測器42接收訊號。Step 23: As shown in FIG. 16, the vertical reflection mirror device 2 receives the incident light to generate a ninety degree vertical light source to cause the second position sensor 42 on the second moving member 43 to receive the signal.

步驟24:將第二位置感測器42沿著第二移動軸41方向移動,檢查準直光之光點是否均於第二位置感測器42檢測範圍內,如超出範圍請至步驟25否則請跳至步驟26。Step 24: The second position sensor 42 is moved along the direction of the second moving axis 41, and it is checked whether the spot of the collimated light is within the detection range of the second position sensor 42. If the range is out of range, please go to step 25 otherwise. Please skip to step 26.

步驟25:微調垂直反射菱鏡裝置2之傾角平台沿著第二移動軸41的節距角度,直到準直光的光點均落入第二位置感測器42之檢測範圍內。Step 25: Fine-tune the pitch angle of the tilting platform of the vertical reflection mirror device 2 along the second moving axis 41 until the spot of the collimated light falls within the detection range of the second position sensor 42.

步驟26:當第二位置感測器42均接收的到光源單元1之準直光,然後靜置5~10分鐘後進行檢測動作。Step 26: When the second position sensor 42 receives the collimated light to the light source unit 1, and then stands for 5 to 10 minutes, the detection operation is performed.

步驟27:在靜置的這段時間,將預檢測之路徑間隔標記號及設定軟體參數。Step 27: During the period of standing, the pre-detected path is separated by a mark number and a set software parameter.

步驟28:將第二位置感測器42移動到第二移動軸41初始位置後,紀錄此位置。Step 28: After moving the second position sensor 42 to the initial position of the second moving shaft 41, the position is recorded.

步驟29:將第二位置感測器42移動一固定間格後,紀錄此位置。Step 29: After the second position sensor 42 is moved by a fixed compartment, the position is recorded.

步驟30:重複步驟29,直到第二移動軸41之最遠端。Step 30: Step 29 is repeated until the farthest end of the second moving shaft 41.

步驟31:儲存檔案後,將檔案路徑設置到儲存路徑後點 選繪製圖形即完成第二移動軸41檢測動作。Step 31: After saving the file, set the file path to the storage path. Selecting the drawing graphic completes the second moving axis 41 detecting action.

當完成步驟31後,檢測完第一移動軸31及第二移動軸41,利用最小平方法分別求得第一軸斜率A及第二軸斜率B,而垂直度的計算公式為:θ垂直度=第二軸斜率θB -第一軸斜率θA After the step 31 is completed, the first moving axis 31 and the second moving axis 41 are detected, and the first axis slope A and the second axis slope B are respectively obtained by the least square method, and the verticality is calculated as: θ perpendicularity = second axis slope θ B - first axis slope θ A

請參考圖12~圖17為本發明平行度誤差檢測步驟Please refer to FIG. 12 to FIG. 17 for the parallelism error detecting step of the present invention.

步驟1:如圖11~圖15沿著第一移動軸31與第二移動軸41方向設置一道光源單元1。Step 1: As shown in FIGS. 11 to 15 , a light source unit 1 is disposed along the direction of the first moving shaft 31 and the second moving shaft 41 .

步驟2:如圖16所示,將第二位置感測器42設置於第二移動件43上,作為平行度檢測之基準。Step 2: As shown in FIG. 16, the second position sensor 42 is disposed on the second moving member 43 as a reference for parallelism detection.

步驟3:將垂直反射菱鏡裝置2設置於第一移動件33上。Step 3: The vertical reflection prism device 2 is disposed on the first moving member 33.

步驟4:調整垂直反射菱鏡裝置2的Z軸移動平台24使光源單元1之準直光入射於反射鏡21範圍。Step 4: Adjust the Z-axis moving platform 24 of the vertical reflection mirror device 2 so that the collimated light of the light source unit 1 is incident on the mirror 21 range.

步驟5:將光源單元1與處理器(電腦)架設完畢後,並開啟直線度量測介面。Step 5: After the light source unit 1 and the processor (computer) are erected, the line measurement interface is turned on.

步驟6:利用光源單元1之準直光作為平行度架設時的基準。Step 6: The collimated light of the light source unit 1 is used as a reference when the parallelism is erected.

步驟7:利用垂直反射菱鏡裝置2的傾斜平台23調整垂直反射菱鏡裝置2,確保光源單元1所發出的準直光與反射鏡21垂直。Step 7: The vertical reflection mirror device 2 is adjusted by the tilting platform 23 of the vertical reflection mirror device 2 to ensure that the collimated light emitted by the light source unit 1 is perpendicular to the mirror 21.

步驟8:接著將調整垂直反射菱鏡裝置2的Z軸移動平 台24使光源單元1所發出的準直光落入垂直反射菱鏡裝置2量測範圍。Step 8: Then adjust the Z axis of the vertical reflection mirror device 2 to move flat The stage 24 causes the collimated light emitted from the light source unit 1 to fall into the measurement range of the vertical reflection mirror device 2.

步驟9:如圖16所示,該垂直反射菱鏡裝置2接收入射光產生九十度垂直光源使第二移動件43上之感測器接收訊號。Step 9: As shown in FIG. 16, the vertical reflection mirror device 2 receives the incident light to generate a ninety degree vertical light source to cause the sensor on the second moving member 43 to receive the signal.

步驟10:將第二位置感測器42沿著第二移動軸41方向移動,檢查準直光的光點是否均於第二位置感測器42檢測範圍內,如超出範圍請至步驟11否則請跳至步驟12。Step 10: Move the second position sensor 42 along the direction of the second movement axis 41, and check whether the spot of the collimated light is within the detection range of the second position sensor 42. If the range is out of range, please go to step 11 otherwise. Please skip to step 12.

步驟11:微調垂直反射菱鏡裝置2之傾角平台沿著第二移動軸41的節距角度,直到準直光的光點均落入第二位置感測器42之檢測範圍內。Step 11: Fine-tune the pitch angle of the tilting platform of the vertical reflection mirror device 2 along the second moving axis 41 until the spot of the collimated light falls within the detection range of the second position sensor 42.

步驟12:當第二位置感測器42均接收的到光源單元1之準直光,然後靜置5~10分鐘後進行檢測動作。Step 12: When the second position sensor 42 receives the collimated light to the light source unit 1, and then stands for 5 to 10 minutes, the detection operation is performed.

步驟13:在靜置的這段時間,將預檢測之路徑間隔標記號及設定軟體參數。Step 13: During the period of standing, the pre-detected path is separated by the mark number and the setting software parameter.

步驟14:將第二位置感測器42移動到第二移動軸41初始位置後,紀錄此位置。Step 14: After moving the second position sensor 42 to the initial position of the second moving shaft 41, the position is recorded.

步驟15:將第二位置感測器42移動一固定間格後,紀錄此位置。Step 15: After moving the second position sensor 42 to a fixed compartment, the position is recorded.

步驟16:重複步驟15,直到第二移動軸41之最遠端。Step 16: Repeat step 15 until the farthest end of the second moving shaft 41.

步驟17:儲存檔案後,將檔案路徑設置到儲存路徑後點 選繪製圖形即完成第二移動軸41檢測動作。Step 17: After saving the file, set the file path to the storage path. Selecting the drawing graphic completes the second moving axis 41 detecting action.

步驟18:如圖17所示,將第三位置感測器52設置於第三移動件53上。Step 18: As shown in FIG. 17, the third position sensor 52 is disposed on the third moving member 53.

步驟19:而該垂直反射菱鏡裝置2繼續設置於第一移動軸31路徑,並且對齊第三移動軸51的位置。Step 19: The vertical reflection mirror device 2 continues to be disposed in the path of the first moving axis 31 and aligns the position of the third moving shaft 51.

步驟20:調整垂直反射菱鏡裝置2的Z軸移動平台24使光源單元1之準直光入射於反射鏡21範圍。Step 20: Adjust the Z-axis moving platform 24 of the vertical reflection mirror device 2 so that the collimated light of the light source unit 1 is incident on the mirror 21 range.

步驟21:將光源單元1與處理器架設完畢後,再次啟動進行直線度量測。Step 21: After the light source unit 1 and the processor are set up, the line measurement is started again.

步驟22:利用光源單元1的準直光作為平行度架設時的基準。Step 22: The collimated light of the light source unit 1 is used as a reference when the parallelism is erected.

步驟23:調整垂直反射菱鏡裝置2的傾斜平台23,使光源單元1之光路與反射鏡21垂直。Step 23: Adjust the tilting platform 23 of the vertical reflection mirror device 2 so that the light path of the light source unit 1 is perpendicular to the mirror 21.

步驟24:接著將調整垂直反射菱鏡裝置2的Z軸移動平台24使光源單元1所發出的準直光落入垂直反射菱鏡裝置2量測範圍。Step 24: The Z-axis moving platform 24 of the vertical reflection mirror device 2 is then adjusted to cause the collimated light emitted by the light source unit 1 to fall into the measurement range of the vertical reflection mirror device 2.

步驟25:如圖17所示,此時五面鏡22接收入射光產生九十度垂直光源使第三移動軸51之第三位置感測器52接收訊號。Step 25: As shown in FIG. 17, at this time, the five-sided mirror 22 receives the incident light to generate a ninety-degree vertical light source, so that the third position sensor 52 of the third moving shaft 51 receives the signal.

步驟26:將第三感測器沿著第三移動軸51方向移動,移動至檢測範圍,檢查光點是否均於感測器檢測範圍內,如 超出範圍請至步驟28否則請跳至步驟29。Step 26: Move the third sensor along the third moving axis 51 direction, move to the detection range, and check whether the light spot is within the detection range of the sensor, such as If it is out of range, please go to step 28 otherwise skip to step 29.

步驟27:微調該垂直反射菱鏡裝置2之傾角平台,使其沿著第三移動軸51的節距角度,使光點能夠落入檢測範圍內。Step 27: Fine-tune the tilting platform of the vertical reflecting mirror device 2 so as to be along the pitch angle of the third moving shaft 51 so that the light spot can fall within the detection range.

步驟28:當第二位置感測器42均接收的到光源單元1之準直光,接著靜置5~10分鐘後進行檢測動作。Step 28: When the second position sensor 42 receives the collimated light to the light source unit 1, and then stands for 5 to 10 minutes, the detection operation is performed.

步驟29:在靜置的這段時間,將預檢測之路徑間隔標記號及設定軟體參數。Step 29: During the period of standing, the pre-detected path is separated by a mark number and a set software parameter.

步驟30:將感測器移動到第三移動軸51初始位置後,紀錄此位置。Step 30: After moving the sensor to the initial position of the third moving shaft 51, the position is recorded.

步驟31:將感測器移動一固定間格後,紀錄此位置。Step 31: After moving the sensor to a fixed cell, record this position.

步驟32:重複步驟31,直到第三移動軸51之最遠端。Step 32: Step 31 is repeated until the farthest end of the third moving axis 51.

步驟33:儲存檔案後,將檔案路徑設置到儲存路徑後點選繪製圖形即完成第三移動軸51之檢測動作。Step 33: After the file is saved, setting the file path to the storage path and clicking the drawing graphic completes the detection action of the third moving axis 51.

當完成步驟33後,檢測完第二軸及第三軸,利用最小平方法分別求得第二軸斜率B及第三軸斜率C,而平行度的計算公式為: θ平行度=第三軸斜率θC -第二軸斜率θB After the step 33 is completed, the second axis and the third axis are detected, and the second axis slope B and the third axis slope C are respectively obtained by the least square method, and the parallelism is calculated as: θ parallelism=third axis Slope θ C - second axis slope θ B

如圖18~19所示,透過將第一位置感測器32架設於第一移動軸31上,進行第一移動軸31檢測,然後利用光路設計使垂直反射菱鏡裝置2打出一道垂直第一移動軸31之光 路,再將第二位置感測器42架設於第二移動軸41上,並檢測、計算第一移動軸31與第二移動軸41之角度誤差,而可獲得垂直度。且當另一垂直反射菱鏡裝置2上射出另一道平行前述第二移動軸41之光路,並將第三位置感測器52設在該第三移動軸51,檢測該第二移動軸41及第三移動軸51間的角度誤差可獲得平行度,且使本發明具有架構簡單,且低成本之目的,且更具有高效率及高重現性的功效,從而提升其檢測品質及準確性,以提高後續加工的精密度。As shown in FIGS. 18-19, the first position sensor 32 is mounted on the first moving shaft 31 to perform the first moving axis 31 detection, and then the optical path design is used to make the vertical reflecting mirror device 2 vertically vertical. Moving the light of the shaft 31 The second position sensor 42 is erected on the second moving shaft 41, and the angular error of the first moving shaft 31 and the second moving shaft 41 is detected and calculated, and the perpendicularity can be obtained. And when another vertical reflection mirror device 2 emits another optical path parallel to the second movement axis 41, and the third position sensor 52 is disposed on the third movement axis 51, the second movement axis 41 is detected. The angular error between the third moving axes 51 can obtain parallelism, and the invention has the advantages of simple structure, low cost, and high efficiency and high reproducibility, thereby improving the detection quality and accuracy. To improve the precision of subsequent processing.

本發明所提供之垂直度與平行度檢測系統及其檢測方法,與其他習用技術相互比較時,更具有下列之優點:The perpendicularity and parallelism detecting system and the detecting method thereof provided by the invention have the following advantages when compared with other conventional technologies:

1.具有低成本及快速架構之效,且能大幅提高檢測的高重現性與準確性,同時提高其檢測作業效率。1. It has the effect of low cost and fast architecture, and can greatly improve the high reproducibility and accuracy of detection, and improve the efficiency of its testing.

上列詳細說明係針對本發明之一可行實施例之具體說明,惟該實施例並非用以限制本發明之專利範圍,凡未脫離本發明技藝精神所為之等效實施或變更,均應包含於本案之專利範圍中。The detailed description of the preferred embodiments of the present invention is intended to be limited to the scope of the invention, and is not intended to limit the scope of the invention. The patent scope of this case.

綜上所述,本案不但在空間型態上確屬創新,並能較習用物品增進上述多項功效,應已充分符合新穎性及進步性之法定發明專利要件,爰依法提出申請,懇請 貴局核准本件發明專利申請案,以勵發明,至感德便。In summary, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple functions compared with the customary items. It should fully meet the statutory invention patent requirements of novelty and progressiveness, and apply for it according to law. This invention patent application, in order to invent invention, to the sense of virtue.

1‧‧‧光源單元1‧‧‧Light source unit

11‧‧‧訊號強度接收器11‧‧‧Signal intensity receiver

2‧‧‧垂直反射菱鏡裝置2‧‧‧Vertical reflection mirror device

21‧‧‧反射鏡21‧‧‧Mirror

22‧‧‧五面鏡22‧‧‧5 mirror

23‧‧‧傾斜平台23‧‧‧ tilting platform

24‧‧‧Z軸移動平台24‧‧‧Z-axis mobile platform

25‧‧‧1/4八面菱鏡25‧‧‧1/4 octahedron

251‧‧‧反射鏡A面251‧‧‧Mirror A side

26‧‧‧XY軸移動平台26‧‧‧XY axis mobile platform

31‧‧‧第一移動軸31‧‧‧First moving axis

32‧‧‧第一位置感測器32‧‧‧First position sensor

33‧‧‧第一移動件33‧‧‧First moving parts

41‧‧‧第二移動軸41‧‧‧Second moving axis

42‧‧‧第二位置感測器42‧‧‧Second position sensor

43‧‧‧第二移動件43‧‧‧Second moving parts

51‧‧‧第三移動軸51‧‧‧ Third moving axis

52‧‧‧第三位置感測器52‧‧‧ Third position sensor

53‧‧‧第三移動件53‧‧‧ Third moving parts

圖1為本發明之垂直度與平行度檢測系統於檢測垂直度之架構示意圖。FIG. 1 is a schematic diagram of the verticality and parallelism detection system of the present invention in detecting the verticality.

圖2為本發明之光源單元示意圖。2 is a schematic view of a light source unit of the present invention.

圖3為本發明之垂直反射菱鏡裝置的立體示意圖。3 is a perspective view of the vertical reflection prism device of the present invention.

圖4為圖3的立體分解圖。Fig. 4 is an exploded perspective view of Fig. 3;

圖5為圖3的使用示意圖。Figure 5 is a schematic view of the use of Figure 3.

圖6及圖7為圖3的使用示意側視圖。6 and 7 are schematic side views of the use of Fig. 3.

圖8及圖9為該垂直反射菱鏡裝置以1/4八面菱鏡25反射光源的示意圖。8 and 9 are schematic views of the vertical reflection prism device reflecting the light source with a 1/4 octahedron mirror 25.

圖10為本發明之位置感測器立體分解圖。Figure 10 is an exploded perspective view of the position sensor of the present invention.

圖11為本發明位置感測器安裝在移動軸時之立體示意圖。Figure 11 is a perspective view of the position sensor of the present invention mounted on a moving shaft.

圖12為本發明於直線度誤差檢測之立體示意圖,該第一位置感測器靠近光源單元作為初始位置。12 is a perspective view of the straightness error detection of the present invention, the first position sensor being close to the light source unit as an initial position.

圖13為本發明於直線度誤差檢測之立體示意圖,該第一位置感測器移動到第一移動軸中間處。Figure 13 is a perspective view of the straightness error detection of the present invention, the first position sensor moving to the middle of the first movement axis.

圖14為本發明於直線度誤差檢測之立體示意圖,該第一位置感測器移動到第一移動軸之最遠端。Figure 14 is a perspective view of the straightness error detection of the present invention, the first position sensor moving to the farthest end of the first moving axis.

圖15為本發明於垂直度誤差檢測之立體示意圖,將垂直反射菱鏡裝置設置於第一移動軸之路徑上。Figure 15 is a perspective view of the verticality error detection of the present invention, with the vertical reflection prism device disposed on the path of the first movement axis.

圖16為本發明於垂直度誤差檢測之立體示意圖,將第二 位置感測器裝於第二移動軸,並進行垂直度誤差檢測。Figure 16 is a perspective view of the verticality error detection of the present invention, which will be the second The position sensor is mounted on the second moving axis and performs verticality error detection.

圖17為本發明於平行度誤差檢測之立體示意圖,將第三位置感測器裝於第三移動軸,並進行平行度誤差檢測。Figure 17 is a perspective view of the parallelity error detection of the present invention, the third position sensor is mounted on the third moving axis, and parallelism error detection is performed.

圖18為本發明於垂直度誤差檢測完成後,產生誤差之示意圖。Figure 18 is a schematic diagram showing the error generated after the detection of the perpendicularity error is completed in the present invention.

圖19為本發明於平行度誤差完成後,產生誤差之示意圖。Figure 19 is a schematic diagram showing the error generated after the parallelism error is completed in the present invention.

1‧‧‧光源單元1‧‧‧Light source unit

2‧‧‧垂直反射菱鏡裝置2‧‧‧Vertical reflection mirror device

21‧‧‧反射鏡21‧‧‧Mirror

22‧‧‧五面鏡22‧‧‧5 mirror

23‧‧‧傾斜平台23‧‧‧ tilting platform

24‧‧‧Z軸移動平台24‧‧‧Z-axis mobile platform

31‧‧‧第一移動軸31‧‧‧First moving axis

32‧‧‧第一位置感測器32‧‧‧First position sensor

33‧‧‧第一移動件33‧‧‧First moving parts

41‧‧‧第二移動軸41‧‧‧Second moving axis

42‧‧‧第二位置感測器42‧‧‧Second position sensor

43‧‧‧第二移動件43‧‧‧Second moving parts

51‧‧‧第三移動軸51‧‧‧ Third moving axis

52‧‧‧第三位置感測器52‧‧‧ Third position sensor

53‧‧‧第三移動件53‧‧‧ Third moving parts

Claims (4)

一種垂直度與平行度檢測系統,該系統包含一光源單元、至少一垂直反射菱鏡裝置、一第一位置感測器、一第二位置感測器及一第三位置感測器,其中該光源單元更包含有訊號強度接收器,又該光源單元可選用雷射干涉儀,其中該等垂直反射菱鏡裝置係設於光源單元之光源路徑上,而該第一位置感測器係設於一做為基準之第一移動軸的第一移動件上,又該第二位置感測器及第三位置感測器係設於一做為待測之第二移動軸及第三移動軸的移動件上,且第一位置感測器與該第二位置感測器及第三位置感測器可分別接收對應垂直反射菱鏡裝置所產生之光源;該第一位置感測器架設於第一移動軸上,進行第一移動軸檢測,然後利用光路設計使垂直反射菱鏡裝置打出一道垂直第一移動軸之光路,再將位置感測器架設於待測軸上,並檢測、計算第一移動軸與第二移動軸之角度誤差,而可獲得垂直度,且當另一垂直反射菱鏡裝置上射出另一道平行前述第一移動軸之光路,並將第二位置感測器及第三位置感測器分別設在該第二移動軸及第三移動軸,檢測該兩待測軸間的角度誤差可獲得平行度,藉此,組構成一架構簡單、且效率高之垂直度與平行度檢 測系統者。 A verticality and parallelism detecting system, the system comprising a light source unit, at least one vertical reflecting mirror device, a first position sensor, a second position sensor and a third position sensor, wherein the The light source unit further includes a signal intensity receiver, and the light source unit can be selected from a laser interferometer, wherein the vertical reflection mirror device is disposed on the light source path of the light source unit, and the first position sensor is disposed on the light source unit The second position sensor and the third position sensor are disposed on the first moving member of the first moving axis as the reference, and the second position sensor and the third position sensor are disposed as the second moving axis and the third moving axis to be tested. The first position sensor and the second position sensor and the third position sensor respectively receive the light source generated by the corresponding vertical reflection mirror device; the first position sensor is mounted on the first position sensor On a moving axis, the first moving axis detection is performed, and then the optical path design is used to make the vertical reflecting prism device play a light path perpendicular to the first moving axis, and then the position sensor is mounted on the axis to be tested, and the detection and calculation are performed. a moving axis and the first Moving the angle error of the shaft to obtain the perpendicularity, and when another vertical reflection mirror device emits another optical path parallel to the first moving axis, and the second position sensor and the third position sensor respectively The second moving axis and the third moving axis are arranged to detect the angular error between the two axes to be measured to obtain parallelism, thereby forming a simple and efficient verticality and parallelism check. Test system. 如申請專利範圍第1 項所述之垂直度與平行度檢測系統,其中該垂直反射菱鏡裝置具有兩同一水平、且呈垂直狀設置之反射鏡,又垂直反射菱鏡裝置於該等反射鏡下方分設有一同水平之五面鏡,再者該垂直反射菱鏡裝置之反射鏡與五面鏡係設於一傾斜平台上供調整X軸及Y軸之角度,且傾斜平台受一Z軸移動平台進行調整Z軸高度。The verticality and parallelism detecting system according to claim 1 , wherein the vertical reflecting mirror device has two mirrors of the same horizontal and vertical arrangement, and a vertical reflecting mirror device is disposed on the mirrors. There is a five-sided mirror with the same level below, and the mirror and the five-mirror of the vertical reflection mirror device are arranged on an inclined platform for adjusting the angles of the X-axis and the Y-axis, and the inclined platform is subjected to a Z-axis. The mobile platform adjusts the Z-axis height. 如申請專利範圍第1 項所述之垂直度與平行度檢測系統,其中該垂直反射菱鏡裝置具有垂直折射的1/4八面菱鏡,再者該垂直反射菱鏡裝置之1/4八面菱鏡係設於一傾斜平台上供調整X軸及Y軸之角度,且傾斜平台受一XY軸移動平台進行X、Y軸方向位移。The verticality and parallelism detecting system according to claim 1 , wherein the vertical reflecting mirror device has a 1/4 octahedron mirror with vertical refraction, and 1/4 of the vertical reflecting mirror device The face mirror is arranged on an inclined platform for adjusting the angles of the X axis and the Y axis, and the inclined platform is displaced by the X and Y axes by an XY axis moving platform. 一種應用如申請專利範圍第1 項所述之垂直度與平行度檢測系統之檢測方法,其包含有:一第一移動軸檢測,該第一位置感測器係設置於第一移動軸之第一移動件上,此第一移動軸作為基準,令光源單元之光源路徑與該第一移動軸平行,該第一移動件以靠近光源單元端做為初始位置,沿第一移動軸方向拖曳,每間隔一段距離即紀錄一資料點,直到另一端即完 成該第一移動軸之檢測;一直線度誤差檢測,將第一位置感測器架設於第一移動軸之第一移動件上,使待測移動件上的位置感測器接收到訊號,該第一移動軸之第一移動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第一移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第一移動軸檢測;一垂直度檢測,將垂直反射菱鏡裝置架設於第二移動軸方向,使光源單元之準直光通過垂直反射菱鏡裝置,以接收入射光產生九十度垂直之檢測光源,該第二移動軸之第二移動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第二移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第二移動軸檢測;一平行度檢測,第三移動軸之第三移動件以靠近垂直反射菱鏡裝置端做為初始位置,沿第三移動軸方向拖曳,每間隔一段距離即記錄一資料點,直到另一端即完成該第二移動軸檢測;最後,進行計算角度誤差之步驟,在完成待測軸之檢測後,將前述第一移動軸與待測軸之資料利用最小平方法求得其傾斜角;藉此,可求得第一移動軸、第二移動軸及第三移動軸的 垂直度或平行度。A method for detecting a verticality and parallelism detecting system according to claim 1 , comprising: a first moving axis detecting, wherein the first position sensor is disposed on the first moving axis a moving member, the first moving axis is used as a reference, and the light source path of the light source unit is parallel to the first moving axis, and the first moving member is dragged along the first moving axis direction as an initial position near the light source unit end. Recording a data point every interval, until the other end completes the detection of the first moving axis; the linearity error detection, the first position sensor is erected on the first moving member of the first moving axis, so that The position sensor on the moving member receives the signal, and the first moving member of the first moving shaft is moved to the initial position near the vertical reflection mirror device, and is dragged along the first moving axis direction, and is recorded at intervals of a distance. a data point until the other end completes the first moving axis detection; a verticality detection, the vertical reflecting prism device is erected in the second moving axis direction, so that the collimated light of the light source unit passes through the vertical a direct reflection mirror device for receiving incident light to generate a detection light source of ninety degrees perpendicular, wherein the second moving member of the second movement axis is positioned as an initial position near the vertical reflection mirror device and dragged along the second movement axis direction. Each time interval is recorded, a data point is recorded until the other end completes the second moving axis detection; and a parallelity detection, the third moving member of the third moving axis is taken as an initial position near the vertical reflecting mirror device, along the edge The third moving axis direction is dragged, and a data point is recorded every interval, until the other end completes the second moving axis detection; finally, the step of calculating the angular error is performed, and after the detection of the axis to be tested is completed, the foregoing The data of the moving axis and the axis to be measured is obtained by the least square method to obtain the tilt angle thereof; thereby, the perpendicularity or parallelism of the first moving axis, the second moving axis, and the third moving axis can be obtained.
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