CN1052734A - Laser parallel degree and verticality measuring instrument and measuring method thereof - Google Patents
Laser parallel degree and verticality measuring instrument and measuring method thereof Download PDFInfo
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- CN1052734A CN1052734A CN 89109319 CN89109319A CN1052734A CN 1052734 A CN1052734 A CN 1052734A CN 89109319 CN89109319 CN 89109319 CN 89109319 A CN89109319 A CN 89109319A CN 1052734 A CN1052734 A CN 1052734A
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Abstract
The invention belongs to laser plane degree and verticality measuring instrument and measuring method thereof, adopt three rotary axis systems, the system of two or three pentagonal prism compositions realizes the measurement of the depth of parallelism and verticality, simple in structure, use flexibly highly versatile, cost is lower, automatic data acquisition and processing, speed is fast, the measuring accuracy height.
Description
The invention belongs to the depth of parallelism, verticality measurement device and measuring method thereof.
Up to now, laser is applied to the large-scale workpiece depth of parallelism, two-frequency laser interferometer is used in squareness measurement more, yet two-frequency laser interferometer involves great expense, be difficult to popularize, only be applicable to scientific research department, general factory and enterprise is inapplicable, and another is exactly that the telescope collimator system produced of Britain Tyler Corporations is aided with special part again, but precision is not high and cost is also very high.
The object of the present invention is to provide a kind ofly be suitable for factory, have versatility, large-scale workpiece laser parallel degree and verticality measuring instrument and measuring method thereof that price is cheap again.
The present invention-laser parallel degree and verticality measuring instrument, it is characterized in that being provided with laser aligner [1] successively along laser optical path, 45 ° of catoptrons [2], first rotary axis system [3] and second rotary axis system [5] coaxial with first rotary axis system, first pentagonal prism [4] is housed on above-mentioned first rotary axis system [3], 45 ° of faces of this pentagonal prism are coated with the semi-transflective reflective layer, second pentagonal prism [6] is housed on above-mentioned second rotary axis system [5], on the direction vertical, be provided with the 3rd rotary axis system [10] with above-mentioned first rotary axis system [3] revolving shaft, the 3rd pentagonal prism [9] is housed thereon, photelectric receiver [7] is housed on tested plane, [8], and have computer processing system and above-mentioned photelectric receiver to join [11].
First pentagonal prism [4] and second pentagonal prism [6], available same pentagonal prism [6] are installed on first rotary axis system [3] as required or second rotary axis system [5] is gone up and realized.
The measuring method of the present invention-laser parallel degree and verticality measuring instrument is: the stable collimated laser beam of laser aligner [1] outgoing, after 45 ° of catoptrons [2] reflection, transfer to the axial line of first rotary axis system [3] and overlap, laser beam is through first pentagonal prism [4], 90 ° of outgoing are changeed in part light reflection back, when first rotary axis system [3] turns round, it is the first measurement basal plane that emergent light is strafed out a plane, can carry out point-to-point measurement to tested surface A, laser beam through first pentagonal prism [4] transmission, incide on second pentagonal prism [6] of second rotary axis system [5], rotation with second rotary axis system, it is the second measurement basal plane that laser scans out second plane, can carry out point-to-point measurement to tested surface B; Place the photelectric receiver [7] on the measured point, if [11] receiving optical signals during with pentagonal prism survey depth of parallelism, can be placed on this pentagonal prism earlier on first rotary axis system [3]; And rotate thereupon, scan out a laser plane and measure basal plane as first, this pentagonal prism is placed on second rotary axis system [5] then, keep first rotary axis system motionless, second rotary axis system [5] is rotated, thereby obtain second and measure basal plane, first and second rotary axis system will be adjusted to coaxial in advance, like this, first measures just parallel plane each other of basal plane and the second measurement basal plane, to measuring the discrepancy in elevation of basal plane corresponding point, go out A by COMPUTER CALCULATION, the depth of parallelism of B two tested surfaces by two each measured points of tested surface.
When measuring vertical is spent, first pentagonal prism [4] laser light reflected bundle on first rotary axis system [3], project on the 3rd pentagonal prism [9] of the 3rd rotary axis system [10], and make laser beam coaxial with the 3rd rotary axis system [10], keep first rotary axis system [3] motionless, the 3rd pentagonal prism [9] rotates with the 3rd rotary axis system [10], laser beam scans out the plane perpendicular to the 1st measurement basal plane, can carry out point-to-point measurement to each point on the tested vertical plane, place photelectric receiver [8] and [11] receiving optical signals on the measured point, provide the measured point corresponding to two high variable quantities of measuring respective point on the basal plane, send into Computer Processing at last, and provide the verticality between the tested surface automatically.
In order to improve measuring accuracy, the light beam corner of the pentagonal prism that is adopted should be decides angle (=90 °), in advance the manufacture deviation of 90 ° of light beam corners is measured, and can be proofreaied and correct in deal with data with its corner departure as systematic error during measurement.Adopt first, second pentagonal prism [4], [6] during the measurement plane depth of parallelism, one road light beam is used for measurement of paralleism data acquisition, another road light beam can be used for monitoring the drift of laser beam itself and the influence of atmospheric disturbance, and the direction drift of laser beams equal error own is in this proofreaies and correct, make reference detector be in maximum measuring distance position, to obtain best correction data.
In this device, axle rock and optical axis and axis of rotation disalignment error can integrate, before formal measurement, measure by the receiver of native system, proofreaied and correct as the instrument system error.This needs only the exit end that photelectric receiver is placed pentagonal prism, makes receiver rotate a week with rotating shaft, measures the high variable quantity of emergent light in the rotation process, and this high variable quantity is the function of corner, proofreaies and correct when actual measurement according to this.
Introduce an embodiment below in conjunction with accompanying drawing, the laser beam by the He-Ne laser instrument penetrates through laser aligner [1], obtains collimated laser beam, through the catoptron [2] of 45 ° of placements, laser beam is reflexed to first rotary axis system [3] again.This rotary axis system can turn round 360 ° and have locking and little rotating mechanism.Above-mentioned catoptron [2] is adjustable, can be adjusted to make laser beam and rotary axis system coaxial.Be positioned at first pentagonal prism [4] on first rotary axis system [3] for being easy to loading and unloading type.The installation of the pentagonal prism that three sleeves are fastened has versatility.
According to the size and the form of measured workpiece, settle the mutual alignment relation of three sleeves system.Before the measurement, make second rotary axis system [5] coaxial, make the 3rd rotary axis system [10] vertical with first rotary axis system [3] with first rotary axis system [3] by adjustment.When measuring the A face, pentagonal prism is installed on first rotary axis system [3], rotate first rotary axis system [3], laser beam scans out the measurement basal plane, the moving photoconductor receiver comes the detection scanning light beam on the A tested surface, thereby scanning light beam basal plane and tested surface are compared, and each point is with respect to the high variable quantity of measuring corresponding point on the basal plane on the acquisition tested surface.When surveying the depth of parallelism, pentagonal prism [4] is pulled down from first rotary axis system [3], be installed on second rotary axis system [5], rotate second rotary axis system [5], the moving photoconductor receiver is measured tested surface B on tested surface B.Two groups of measurement data are directly sent into Computer Processing, promptly obtain two and measure face measurement of paralleism value.
When measuring vertical is spent, then be to keep pentagonal prism [4] still to be positioned on first rotary axis system [3], and adjusting the 3rd rotary axis system makes by the light beam of the 3rd rotary axis system [10] outgoing parallel with first rotary axis system [3], keep first rotary axis system motionless then, turn round the 3rd rotary axis system [10], light beam by outgoing after 90 ° of pentagonal prism [9] turnovers just carries out scanning survey to tested surface C, and its measuring method is the same, data is sent into Computer Processing just can obtain the squareness measurement value.
First, second and third rotary axis system is a separate type, respectively by stable fine-tuning stent support, can make up according to measuring needs.
The characteristics of this instrument are to measure the workpiece that place the optional position, can measure the plane of any irregular shape, when only needing to survey the depth of parallelism, then can save the 3rd rotary axis system [10] need not, when only needing to survey verticality, then can save second rotary axis system [5] need not, when only needing to survey the flatness of a face, then just only need first rotary axis system [3].
The characteristics of this instrument are: simple in structure, use flexibly, and highly versatile, the automation collection deal with data, speed is fast, the measuring accuracy height.
Figure of description and brief description thereof:
Accompanying drawing 1 is the light path synoptic diagram of laser parallel degree and verticality measuring instrument.
1. laser aligner; 2.45 ° catoptron; 3. first rotary axis system; 4. first pentagonal prism; 5. second rotary axis system; 6. second pentagonal prism; 7.8. photelectric receiver; 9. the three or five dumpling prism; 10. the 3rd rotary axis system; 11. photelectric receiver.
Claims (4)
1, a kind of laser parallel degree and verticality measuring instrument, it is characterized in that being provided with successively laser aligner [1] along the laser road, 45 ° of catoptrons [2], first rotary axis system [3] and second rotary axis system [5] coaxial with first rotary axis system, first pentagonal prism [4] is housed on above-mentioned first rotary axis system [3], 45 ° of faces of these five jiaos of cold prisms are coated with the semi-transflective reflective layer, second pentagonal prism [6] is housed on above-mentioned second rotary axis system [5], on the direction vertical, be provided with the 3rd rotary axis system [10] with above-mentioned first rotary axis system [3] revolving shaft, the 3rd pentagonal prism [9] is housed thereon, photelectric receiver [7] is housed on tested plane, [8], and have computer system and above-mentioned photelectric receiver to join [11].
2, according to said a kind of laser parallel degree of claim 1 and verticality measuring instrument, it is characterized in that wherein first pentagonal prism [4] and second pentagonal prism [6], only use a pentagonal prism [6], be installed on as required that first rotary axis system [3] is gone up or second rotary axis system [5] on.
3, the measuring method of a kind of laser parallel degree and verticality measuring instrument, the stable collimated laser beam that it is characterized in that laser aligner [1] outgoing, after 45 ° of catoptrons [2] reflection, transfer to the axial line of first rotary axis system [3] and overlap, laser beam is through first pentagonal prism [4], 90 ° of outgoing are changeed in part light reflection back, when first rotary axis system [3] turns round, it is the first measurement basal plane that emergent light is strafed out a plane, tested surface A is carried out point-to-point measurement, laser beam through first pentagonal prism [4] transmission, incide on second pentagonal prism [6] of second time axle system [5], with the rotation of second rotary axis system, it is the second measurement basal plane that laser scans out second plane, tested surface B is carried out point-to-point measurement, place the photelectric receiver [7] on the measured point, [11] receiving optical signals is by the discrepancy in elevation of two each measured points of tested surface to measurement basal plane corresponding point, go out A by COMPUTER CALCULATION, the depth of parallelism of B two tested surfaces;
When measuring vertical is spent, first pentagonal prism [4] laser light reflected bundle on first rotary axis system [3], project on the 3rd pentagonal prism [9] of the 3rd rotary axis system [10], and make laser beam coaxial with the 3rd rotary axis system [10], keep first rotary axis system [3] motionless, the 3rd pentagonal prism [9] rotates with the 3rd rotary axis system [10], laser beam scans out the plane perpendicular to the first measurement basal plane, each point on the tested vertical plane is carried out point-to-point measurement, place the photelectric receiver [8] on the measured point, [11] receiving optical signals provides the measured point corresponding to two high variable quantities of measuring respective point on the basal planes, sends into Computer Processing and provides verticality between the tested surface.
4, according to the measuring method of said laser parallel degree of claim 3 and verticality measuring instrument, it is characterized in that, if when surveying the depth of parallelism with a pentagonal prism [6], pentagonal prism is placed on earlier on first rotary axis system [3], and rotate thereupon, scan out a laser plane and measure basal plane as first, this pentagonal prism is placed on second rotary axis system [5] then, keep first rotary axis system motionless, second rotary axis system [5] is rotated, thereby obtain second and measure basal plane, first and second rotary axis system give be adjusted to earlier coaxial.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89109319 CN1019525B (en) | 1989-12-21 | 1989-12-21 | Depth of parallelism and verticality laser measuring instrument and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 89109319 CN1019525B (en) | 1989-12-21 | 1989-12-21 | Depth of parallelism and verticality laser measuring instrument and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1052734A true CN1052734A (en) | 1991-07-03 |
| CN1019525B CN1019525B (en) | 1992-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 89109319 Expired CN1019525B (en) | 1989-12-21 | 1989-12-21 | Depth of parallelism and verticality laser measuring instrument and method |
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| CN (1) | CN1019525B (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308656C (en) * | 2005-08-12 | 2007-04-04 | 中国科学院上海光学精密机械研究所 | Apparatus for measuring parallelity of laser beam |
| CN100451540C (en) * | 2006-01-12 | 2009-01-14 | 中国科学院长春光学精密机械与物理研究所 | Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology |
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN101261119B (en) * | 2008-05-06 | 2012-01-04 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Light beam parallelism and collimating fault checking method |
| CN103398676A (en) * | 2013-08-13 | 2013-11-20 | 中航虹波风电设备有限公司 | Detection method for parallelism and coaxiality of flanges at two ends of pylon |
| TWI472712B (en) * | 2012-12-07 | 2015-02-11 | Univ Nat Formosa | Vertical and parallelism detection system and its detection method |
| CN105783790A (en) * | 2016-05-09 | 2016-07-20 | 常州机电职业技术学院 | Tool and method for measuring verticality among guide rails |
| CN105987674A (en) * | 2016-06-28 | 2016-10-05 | 天津大学 | Method and device for Z-axis perpendicularity error measurement based on image measurement |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal Double balance staff for laser machining is demarcated, debugged and speculum Method of Adjustment |
| CN106979760A (en) * | 2017-05-24 | 2017-07-25 | 中建二局第二建筑工程有限公司 | A kind of device measured for wall body vertical degree |
| CN107014319A (en) * | 2017-04-05 | 2017-08-04 | 中国计量大学 | A kind of spatial vertical degree detection method of worm-gear speed reducer drive axle seat axially bored line |
| CN107036558A (en) * | 2017-04-05 | 2017-08-11 | 杭州嘉诚机械有限公司 | The spatial vertical degree detection means of worm-gear speed reducer drive axle seat axially bored line |
| CN107345794A (en) * | 2016-04-18 | 2017-11-14 | 斯塔图斯专业机械测量技术有限公司 | For the rotary laser for the perpendicularity for detecting two machine parts |
| CN110186397A (en) * | 2019-04-12 | 2019-08-30 | 华中科技大学 | A kind of guide rail parallelism measuring device and method |
| CN115236868A (en) * | 2022-09-22 | 2022-10-25 | 长春理工大学 | High-resolution optical axis adjusting device and high-resolution optical axis adjusting method |
-
1989
- 1989-12-21 CN CN 89109319 patent/CN1019525B/en not_active Expired
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308656C (en) * | 2005-08-12 | 2007-04-04 | 中国科学院上海光学精密机械研究所 | Apparatus for measuring parallelity of laser beam |
| CN100451540C (en) * | 2006-01-12 | 2009-01-14 | 中国科学院长春光学精密机械与物理研究所 | Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology |
| CN101261119B (en) * | 2008-05-06 | 2012-01-04 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Light beam parallelism and collimating fault checking method |
| CN102183221A (en) * | 2011-03-25 | 2011-09-14 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| CN102183221B (en) * | 2011-03-25 | 2012-06-27 | 天津大学 | Measurement method for verticality of optical axis of microscope system |
| TWI472712B (en) * | 2012-12-07 | 2015-02-11 | Univ Nat Formosa | Vertical and parallelism detection system and its detection method |
| CN103398676A (en) * | 2013-08-13 | 2013-11-20 | 中航虹波风电设备有限公司 | Detection method for parallelism and coaxiality of flanges at two ends of pylon |
| CN107345794A (en) * | 2016-04-18 | 2017-11-14 | 斯塔图斯专业机械测量技术有限公司 | For the rotary laser for the perpendicularity for detecting two machine parts |
| CN105783790A (en) * | 2016-05-09 | 2016-07-20 | 常州机电职业技术学院 | Tool and method for measuring verticality among guide rails |
| CN105987674A (en) * | 2016-06-28 | 2016-10-05 | 天津大学 | Method and device for Z-axis perpendicularity error measurement based on image measurement |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal Double balance staff for laser machining is demarcated, debugged and speculum Method of Adjustment |
| CN106735961B (en) * | 2016-12-30 | 2019-04-02 | 中国科学院西安光学精密机械研究所 | The calibration of Orthogonal Double balance staff, debugging and reflecting mirror Method of Adjustment for laser processing |
| CN107036558B (en) * | 2017-04-05 | 2019-02-12 | 杭州嘉诚机械有限公司 | The spatial vertical degree detection device of worm-gear speed reducer drive axle seat axially bored line |
| CN107036558A (en) * | 2017-04-05 | 2017-08-11 | 杭州嘉诚机械有限公司 | The spatial vertical degree detection means of worm-gear speed reducer drive axle seat axially bored line |
| CN107014319B (en) * | 2017-04-05 | 2019-02-12 | 中国计量大学 | A kind of spatial vertical degree detection method of worm-gear speed reducer drive axle seat axially bored line |
| CN107014319A (en) * | 2017-04-05 | 2017-08-04 | 中国计量大学 | A kind of spatial vertical degree detection method of worm-gear speed reducer drive axle seat axially bored line |
| CN106979760A (en) * | 2017-05-24 | 2017-07-25 | 中建二局第二建筑工程有限公司 | A kind of device measured for wall body vertical degree |
| CN110186397A (en) * | 2019-04-12 | 2019-08-30 | 华中科技大学 | A kind of guide rail parallelism measuring device and method |
| CN115236868A (en) * | 2022-09-22 | 2022-10-25 | 长春理工大学 | High-resolution optical axis adjusting device and high-resolution optical axis adjusting method |
| CN115236868B (en) * | 2022-09-22 | 2022-11-29 | 长春理工大学 | High-resolution optical axis adjusting device and high-resolution optical axis adjusting method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1019525B (en) | 1992-12-16 |
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