TWI569916B - An auxiliary angle measurement system of rotating shaft - Google Patents

Description

Rotary axis angle assisted positioning measurement system

Measuring system, especially a rotating shaft angle assisted positioning measuring system

In recent years, due to the development of micro-machining processing and the improvement of precision requirements, the requirements for the angular positioning accuracy of the rotating shaft of the rotating shaft in the machine are also increasing, and since the angular measurement of the rotating shaft directly affects the positioning accuracy, the rotating shaft angle It is important that the positioning measurement technique is sufficient to meet its accuracy requirements. At present, there are two commonly used instruments for detecting angular positioning, one of which is an automatic collimator and the other is a laser interferometer.

In terms of the detection of the automatic collimator, the automatic collimator mainly measures the micro angle, and then measures the angular position, and uses the principle that the measuring light source generates a small angle after the plane mirror, and cooperates with the multi-mirror and the measurable rotating shaft. Angle positioning error. The automatic collimator operation is complicated and costly, and its measurement accuracy cannot fully meet the requirements of current micromachining.

In addition to the Agilent model E5290C's rotary axis measurement system, the laser interferometer is used with the detection of a rotating platform. The laser interferometer is the most reliable measuring device in the industry when testing the performance of the rotating shaft. The angle mirror group and its optical path reflect different wavelengths, and the small angle can be measured by the processor of the laser interferometer. However, the laser interferometer itself and its associated mirror set are very expensive, and it is necessary to pay attention to whether the light source is shielded during the measurement process. When the light source is shielded, the laser interferometer signal must be reset.

For the wireless detection of Renishow RX10 and the updated XR20, the eccentricity error must be adjusted to ±0.02mm. This eccentricity error is very time-consuming and costly.

In other words, the development of lower cost, simple and convenient measurement technology, and the need for precision, is an important issue in the industry, and it is necessary to further develop to meet the needs of actual use. The reason is that this creator is in-depth discussion on the problems faced by the above-mentioned existing rotating shaft angle measurement, and through the creators' years of experience in the development of related industries, and actively seeking solutions, through continuous efforts and research Development, and finally succeeded in creating a rotary axis angle positioning measurement system, in order to overcome the inconvenience and trouble caused by the inability to combine the simplicity, low cost and high precision.

In order to overcome the inconvenience and trouble caused by the fact that the existing ones cannot be combined with the simplicity, the low cost and the high precision, the present invention provides a rotating shaft angle assisted positioning measuring system for measuring a device to be tested parallel and perpendicular to the ground, which comprises a first angle measuring module applied to the device to be tested perpendicular to the ground and a second angle measuring module applied to the device to be tested parallel to the ground, and the first angle measuring module and The second angle measuring module measures an angle error generated when the device under test performs a working rotation, and the device under test performs an angle of the working rotation angle according to the angle error. Correction, wherein: the first angle measuring module is an optical angle measuring module, comprising a laser emitting module and a laser reflecting module, the laser emitting module emitting a corrected laser, and The calibration laser is reflected by the laser reflection module, and the angle error is calculated according to an incident angle deviation generated by the laser reflection module being reflected back to the laser emission module; and the second The angle measuring module directly measures the angular error generated by the working rotation performed by the device under test.

The second angle measuring module comprises a horizontal measuring module and a signal processing module, wherein the working rotation of the device to be tested changes the position of the horizontal measuring module, and the horizontal measuring module is different according to different The angle indicated by the position outputs a horizontal measurement module angle signal to the signal processing module; and the signal processing module calculates the angle error according to the angle indicated by the level angle signal and the working angle signal.

The rotating shaft angle auxiliary positioning and measuring system comprises a fixed platform and a rotating platform, wherein: the fixed platform is fixedly coupled with the device to be tested, and the fixed device is configured to receive the working angle signal and then perform the working rotation. Rotating synchronously with the device to be tested; the rotating platform is rotatably coupled to the fixed platform, and the rotating platform receives the working signal angle to perform the measuring rotation; and the mechanical precision of the rotating platform is higher than the mechanical precision of the device to be tested, The first angle measuring module is configured to calculate the angle error according to the working rotation and the measuring rotation.

The laser emitting module is disposed separately from the device to be tested, and includes a laser module, a beam splitting module and a laser angle measuring module; the laser reflecting module is adjustably disposed on the rotating platform The laser reflecting mirror is disposed at a position of the extended light path of the calibration laser passing through the beam splitting module; the laser module Transmitting the calibration laser, the calibration laser penetrating the beam splitting module to the mirror of the laser reflection module, and the mirror reflects the corrected laser beam back to the laser emitting module, and the correction is reflected The laser is refracted to the laser angle measuring module through the beam splitting module; and the corrected laser reflected by the laser reflecting module generates an incident angle deviation, and the laser angle measuring module calculates the incident angle deviation And the angle error.

The laser angle measuring module comprises a spherical lens, a displacement module and a light sensing module, and the corrected laser light refracted by the beam splitting module passes through the spherical lens, and the spherical lens corrects the lens The laser is focused on the light sensing module, and the laser angle measuring module measures the angle error; and the light sensing module is disposed on the displacement module to enable the light sensing module The light sensing module enters the preferred corrected laser measurement position by adjusting the position of the displacement module.

Further, the rotating shaft angle assisted positioning measuring system comprises a dial gauge, and the dial gauge corrects the center position of the fixed platform disposed on the device to be tested, so that the eccentricity between the fixed platform and the device to be tested is reduced to Measureable range.

The first angle measuring module and the second angle measuring module output a correction signal according to the calculated angle error, and the correction signal is input to a control module, and the control module controls according to the correction signal The device under test rotates to correct the angular error.

Further, the rotating shaft angle auxiliary positioning and measuring system comprises a tripod adapter and a tripod, the laser emitting module is disposed on the tripod adapter, and the tripod is combined with the tripod adapter. The height of the tripod is adjusted to raise the laser emission module to a measurable range. From the above description, the present invention has the following advantages:

1. Simplify and operate the system to improve the efficiency of the rotation axis accuracy correction.

2. The simple measurement method reduces the labor cost and improves the practicality required for the accuracy correction.

3. The invention has the function of measuring the parallel and perpendicular to the ground axis, and the shaft parallel to the ground is not required to be centered.

10‧‧‧Fixed platform

20‧‧‧Rotating platform

30‧‧‧First angle measurement module

31‧‧‧Laser module

311‧‧‧Ray head fixture

312‧‧ ‧Laser head

32‧‧‧Distribution Module

33‧‧‧Laser angle measurement module

331‧‧‧displacement module

332‧‧‧Spherical lens

333‧‧‧Light sensing module

34‧‧‧Laser reflector

341‧‧‧reflector fixture

342‧‧‧Mirror

35‧‧‧Foot rack

37‧‧‧Laser launch module

40‧‧‧Second angle measurement module

50‧‧‧Device under test

60‧‧‧Control Module

1 is a perspective view of a preferred embodiment of the present invention.

2 is a partially enlarged perspective view of a preferred embodiment of the present invention.

Figure 3 is a partial plan view of a preferred embodiment of the present invention.

4 is a block diagram of a system function of a preferred embodiment of the present invention.

Figure 5 is a schematic view of the operation of the preferred embodiment of the present invention.

Figure 6 is a schematic view of the operation of the preferred embodiment of the present invention.

Please refer to FIG. 1 , which is a rotating shaft angle assisted positioning and measuring system, which comprises a fixed platform 10 , a rotating platform 20 , a first angle measuring module 30 and a control module 60 . The rotation of the fixed platform 10 and the rotating platform 20 generates an angular difference due to the difference in precision, thereby determining the rotation angle accuracy of the working rotation of the device under test 50, and the device to be tested at this time 50 is perpendicular to the ground. Further, the angle error is used to perform an angle correction.

The fixed platform 10 is fixedly disposed on a device to be tested 50, and the mounting direction thereof is a joint surface of the free end of the fixed platform 10 facing the device under test 50, so that the fixed platform 10 can rotate synchronously when the device under test 50 rotates. The device under test 50 can have a rotating mechanism, such as a rotating shaft of a machine tool or a rotating shaft in another mechanical module, wherein the device under test 50 receives the working angle signal and performs the rotation angle according to the working angle signal. The work rotates, and the work rotates for the rotation mechanism to rotate at different angles according to the work content requirements.

The rotating platform 20 is rotatably disposed on the fixed platform 10 and is movably disposed on a top surface opposite to the joint surface of the fixed platform 10. The rotating platform 20 can perform a measurement rotation according to the rotation angle indicated by the working angle signal after receiving the working angle signal, and the working rotation and the measuring rotation are opposite in time or speed.

Referring to FIG. 2 to FIG. 4, in the embodiment of the present invention, the rotation angles of the working angle signals received by the device under test 50 and the rotating platform 20 are the same, and the working rotation and the rotation of the device under test 50 are the same. This measurement rotation of the platform 20 performs a reverse rotation of the same angle. The difference in mechanical precision between the device under test 50 and the rotating platform 20 causes the angular difference between the operational rotation and the measurement rotation. The mechanical precision of the rotating platform 20 is higher than the mechanical precision of the device under test 50, so that the device under test 50 can perform an angle correction using the angular error between the rotating platform 20 and the device under test 50, and the angular error is The first angle measuring module 30 is measured.

The working angle signal is output by the control module 60. The control module 60 controls a driving device. The driving device rotates the rotating platform 20 and the device under test 50 according to the working angle signal, so that the rotating platform 20 can The rotating mechanism of the device under test 50 rotates, and the driving device can be a stepping motor, a servo motor or a motor that can be linearly controlled. The setting of the working rotation angle of the rotating mechanism of the device under test 50 may be The controller of the measuring device 50 is provided by the controller 50 or may also be provided by the control module 60. The angle correction module outputs a correction signal to the control module 60 after the first angle measurement module 30 measures the difference in the angle, and the control module 60 controls the rotation of the device under test 50 according to the correction signal to correct This angle error.

The first angle measuring module 30 is separately disposed outside the rotating platform 20, and the first angle measuring module 30 measures the angle difference, wherein the angle measuring means of the first angle measuring module 30 is transparent A correcting laser measures the angular error, and the angle error is calculated by the angle difference generated by the corrected laser after the reflection, and the first angle measuring module 30 outputs the correction signal to the control module according to the angle error. 60. The control module 60 controls the rotation of the device under test 50 according to the correction signal to correct the angle error.

The first angle measuring module 30 is an optical angle measuring module, and includes a laser emitting module 37 and a laser reflecting module 34. The laser emitting module 37 is separated from the device 50 to be tested. The laser reflector module 34 is disposed on the rotating platform 20, wherein the distance between the laser emitting module 37 and the device under test 50 is maintained within a range in which the optical angle measuring module can be normally used. Inside.

The laser emitting module 37 emits a calibration laser, and the calibration laser is received by the lightning emission transmitting module 37 to reflect the corrected laser beam back to the laser emitting module 37. The first angle measuring module 30 calculates the angular deviation by calculating the deviation of the incident angle generated by the corrected laser reflected back to the laser emitting module 37.

The laser emitting module 37 includes a laser module 31, a beam splitting module 32, a laser angle measuring module 33, and a tripod switching platform 35. The laser mode is The group 31, the beam splitter module 32, and the laser angle measuring module 33 are disposed on the same plane of the tripod adapter 35, so that the laser emitting module 37 is separated from the device to be tested 50. The beam splitting module 32 is a device having a light refraction function. Further, the laser module 31 and the laser angle measuring module 33 are respectively disposed on the out/in light path of the corrected laser. The tripod adapter 35 can be coupled to a tripod, such that the tripod adapter 35 can be adjusted in height by the height of the tripod, so that the first angle measuring module 30 is located at a preferred measuring position, for example The height of the first angle measuring module 30 is raised to measure the angular error between the rotating platform 20 and the device under test 50.

The laser module 31 includes a laser head clamp 311 and a laser head 311. The laser head clamp 311 clamps the laser head 312. The laser head clamp 311 can adjust the laser head 312 to emit the laser head 312. The direction and angle of the laser are corrected such that the direction and angle at which the corrected laser is emitted corresponds to the reflecting means 34.

The laser reflecting device 34 is adjustably disposed at a free end of the rotating platform 20 relative to the fixed platform 10, and the laser reflecting device 34 is disposed at a position such that the laser reflecting device 34 is located at the calibration laser through the beam splitting An extended light path of the module 32, wherein the laser reflecting device 34 includes a reflecting device fixture 341 and a mirror 342, the reflecting mirror 342 can directly reflect the correcting laser, and the reflecting device fixture 341 fixes the mirror 342, and the reflecting mirror 341 can adjust the angle of the reflecting mirror 342 to reflect the corrected laser, so that the reflected laser that is reflected can enter the corrected laser measuring position of the laser measuring module 33.

After the laser beam is emitted from the laser module 31, the calibration laser beam passes through the beam splitting module 32 to the laser reflecting device 34. The laser reflecting device 34 reflects the corrected laser beam and is reflected. The corrected laser is refracted by the beam splitting module 32 to the laser angle measuring module 33. The laser angle measuring module 33 measures the incident angle of the corrected laser that is refracted, and calculates the angle. error. The laser angle measuring module 33 includes a lens 332, a displacement module 331 and a light sensing module 333. The corrected laser light refracted by the beam splitting module 32 passes through the lens 332. The calibration laser is focused on the light sensing module 333, and the laser angle measuring module 33 measures the angular error. The light sensing module 333 is disposed on the displacement module 331, so that the light sensing module 333 can adjust the position of the displacement module 331 to cause the light sensing module 333 to enter the preferred calibration laser. Measuring position. Preferably, the corrected laser measurement position is determined by the light sensing module 333 after the voltage value generated by the calibration laser is greater than a threshold value, and the corrected laser measurement position is confirmed as being better. Preferably, the corrected laser should be parallel to the axial direction of the rotating platform 20 when the laser measuring position is corrected.

Referring to FIGS. 5 and 6, the angular error caused by the rotation of the rotating platform 20 causes the corrected laser reflected by the laser reflecting device 34 to generate an incident angle deviation in the laser angle measuring module 33. Different incident angle deviations may generate different angular deviation voltages in the light sensing module 333. The laser angle measuring module 33 calculates the incident angle deviation by calculating the value of the angular deviation voltage, and further transmits the operation. The angle error is calculated by the incident angle deviation.

Please refer to FIG. 1 . Further, the rotating shaft angle assisted positioning measuring system of the present invention includes a second angle measuring module 40 , and the second angle measuring module 40 can be parallel to the ground in the device 50 to be tested. The measurement of the angular error is performed. The second angle measuring module 40 is disposed on the rotating platform 20 , and the second angle measuring module 40 is disposed on the rotating platform 20 The working rotation performed by the device under test 50 after receiving the working angle signal can be directly measured, and the difference between the angle of the working rotation and the angle indicated by the working angle signal is the difference. error. Wherein, when the device under test 50 is parallel to the ground, the rotating platform 20 does not perform the measurement rotation.

When the device under test 50 performs the working rotation, the second angle measuring module 40 disposed on the rotating platform 20 can directly measure the angle of the working rotation. The angle sensing mode of the angle measuring module 40 can be resistive, magnetic, grating, etc., and is not limited herein.

In the embodiment of the present invention, the second angle measuring module 40 includes a horizontal measuring module and a signal processing module. The signal processing module receives the horizontal measurement module angle signal and the working angle signal, and calculates the angle error from the horizontal measurement module angle signal and the working angle signal. In the embodiment of the present invention, the level measuring module may be solid, liquid or gas, etc., and is not limited herein. The sensing method of the horizontal measurement module may be a resistive type, a magnetic induction type, a grating type, an electronic type (for example, a magnetic induction), a level or a resistance type bubble level, and the like, which is not limited herein.

Further, when the device under test 50 is parallel to the ground, the setting of the fixed platform 10 does not need to correspond to the center of the device under test 50.

The signal processing module outputs the correction signal to the control module 60 according to the angle error. The control module 60 controls the rotation of the device under test 50 according to the correction signal to correct the angle error.

The rotating shaft angle assisted positioning measuring system of the present invention has the following measuring steps when the device under test 50 is perpendicular to the ground:

Step 1: The fixed platform 10 is disposed on the device under test 50, and the rotating platform 20 is disposed on the fixed platform 10; Step 2: correcting the center position of the device under test 50 and the fixed platform 10 by using a dial gauge The eccentricity is reduced to the measurable range; Step 3: erecting the tripod adapter 35 on the tripod outside the device under test 50 and adjusting the height of the tripod to raise the tripod adapter 35 to The measurable range is such that the corrected laser emitted by the laser emission module 37 can be the height received by the laser reflection module 34; Step 4: the tripod adapter 35 is turned on. The laser module 31 is configured to generate the corrected laser for measurement, and the light sensing module 333 is adjusted to the better by adjusting the rotating platform 20 and the laser head fixture 311. Laser measurement position.

Step 5: adjusting the laser and the axis of the rotating platform 20 in parallel by adjusting the laser reflecting device 34; Step 6: adjusting the laser by reflecting the rotating platform 20 to reflect the laser reflecting device 34 Refractive to the spherical lens 332 via the beam splitting module 32 and incident on the light sensing module 333, so that the corrected laser reaches a better corrected laser measurement position; Step 7: rotate the device under test 50 The work is rotated and the measurement rotation is performed by the rotating platform 20.

Step 8: The working rotation rotates at the same angle and opposite direction to the measuring rotation, and the laser angle measuring module 33 calculates the angular deviation voltage. The value of the incident angle is calculated, and the angular error is further calculated by calculating the incident angle deviation.

The rotating shaft angle assisted positioning measuring system of the present invention has the following measuring steps when the device under test 50 is parallel to the ground: Step 1: setting the fixed platform 10 on the device to be tested 50; Step 2: at the fixed platform 10 Setting the second angle measuring module 40; step 3: performing the working rotation on the device to be tested 50 parallel to the ground, and measuring the angle error by the second angle measuring module

From the above description, the present invention has the following advantages:

1. Improve the efficiency of the rotation axis accuracy correction with a simplified and easy to operate system.

2. The simple measurement method reduces the labor cost and improves the practicality required for the accuracy correction.

3. The invention has the function of measuring the parallel and perpendicular to the ground axis, and the shaft parallel to the ground is not required to be centered.

10‧‧‧Fixed platform

20‧‧‧Rotating platform

30‧‧‧First angle measurement module

31‧‧‧Laser module

32‧‧‧Distribution Module

33‧‧‧Laser angle measurement module

34‧‧‧Laser reflector

341‧‧‧reflector fixture

342‧‧‧Mirror

35‧‧‧Transition station

40‧‧‧Second angle measurement module

50‧‧‧Device under test

Claims (7)

A rotating shaft angle assisted positioning measuring system, which measures a parallel and perpendicular to the ground, and includes a first angle measuring module applied to the device to be tested perpendicular to the ground and applied to the test a second angle measuring module when the device is parallel to the ground, and a control module is provided. The control module outputs a working angle signal, and the device under test performs a working rotation according to the working angle signal, and the first angle The measuring module and the second angle measuring module measure an angular error generated when the device under test performs a working rotation, wherein: the first angle measuring module is an optical angle measuring module, which comprises a laser emission module and a laser reflection module, the laser emission module emits a calibration laser, and the laser is reflected by the laser reflection module, and the laser is reflected by the laser according to the calibration laser The angle error is calculated by the angle of incidence of the module after being reflected back to the laser emitting module, and the first angle measuring module outputs a correction signal to the control module according to the angle error, and the control module is based on the control module. The school The signal is controlled to rotate the device to be tested to correct the angular error; and the second angle measuring module directly measures the angular error generated by the working rotation of the device to be tested, and the second angle measuring module is based on The angle error outputs a correction signal to the control module, and the control module controls the rotation of the device under test according to the correction signal to correct the angle error. The rotating shaft angle assisted positioning measuring system according to claim 1, wherein the second angle measuring module comprises a horizontal measuring module and a signal processing module, and the working rotation of the device to be tested is changed. The position of the level measurement module, the level measurement module outputs a horizontal measurement module angle signal to the signal processing module according to the angle indicated by the different positions; and the signal processing module is based on the level angle Signal and the angle indicated by the working angle signal The angle error is calculated. The rotary shaft angle auxiliary positioning and measuring system according to claim 1, comprising a fixed platform and a rotating platform, wherein: the fixed platform is fixedly coupled with the device to be tested, so that the device to be tested receives the work. When the working signal is rotated after the angle signal, the fixed platform rotates synchronously with the device to be tested; the rotating platform is rotatably coupled with the fixed platform, and the rotating platform receives the working signal angle to perform the measuring rotation; and the rotating platform The mechanical precision is higher than the mechanical precision of the device to be tested, so that the first angle measuring module calculates the angular error according to the working rotation and the measuring rotation. The rotating shaft angle assisted positioning measuring system according to claim 3, wherein the laser emitting module is separately disposed from the device to be tested, and comprises a laser module, a beam splitting module and a laser angle a measuring module; the laser reflecting module is adjustably disposed on the rotating platform, and includes a mirror, the laser reflecting module is disposed at an extended light path of the correcting laser through the beam splitting module; The laser module emits the calibration laser, and the calibration laser penetrates the beam splitting module to the mirror of the laser reflection module, and the mirror reflects the corrected laser beam back to the laser emitting module. The corrected laser beam reflected by the beam splitting module is refracted to the laser angle measuring module; and the corrected laser reflected by the laser reflecting module generates an incident angle deviation, and the laser angle measuring module The incident angle deviation and the angular error are calculated. According to the rotating shaft angle auxiliary positioning and measuring system of claim 4, the laser angle measuring module comprises a spherical lens, a displacement module and a light sensing module, and is refracted by the beam splitting module. The calibration laser passes through the spherical lens, and the spherical lens focuses the corrected laser on The light sensing module is configured to measure the angular error by the laser angle measuring module; and the light sensing module is disposed on the displacement module, so that the light sensing module transmits the displacement mode The position of the group causes the light sensing module to enter the preferred corrected laser measurement position. The rotary shaft angle auxiliary positioning and measuring system according to item 5 of the patent application scope includes a dial gauge, wherein the dial gauge corrects the fixed platform to be disposed at a center position of the device to be tested, so that the fixed platform and the device to be tested The amount of eccentricity between them is reduced to the measurable range. The rotary shaft angle auxiliary positioning and measuring system according to any one of claims 1 to 6, comprising a tripod adapter and a tripod, the laser emitting module being disposed on the tripod The docking station is combined with the tripod adapter, and the height of the tripod is adjusted to raise the laser emitting module to a measurable range.