TWM458266U - Angle positioning and measuring system for machine tool - Google Patents
Angle positioning and measuring system for machine tool Download PDFInfo
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- TWM458266U TWM458266U TW101223810U TW101223810U TWM458266U TW M458266 U TWM458266 U TW M458266U TW 101223810 U TW101223810 U TW 101223810U TW 101223810 U TW101223810 U TW 101223810U TW M458266 U TWM458266 U TW M458266U
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Description
本創作係關於一種工具機旋轉軸之量測定位技術,具體而言係一種結構簡單之工具機角度定位量測系統,藉以能大幅降低量測成本,且能有效提高量測的精準度。This creation is about a measuring device for measuring the rotation axis of a machine tool. Specifically, it is a simple machine tool angle positioning measurement system, which can greatly reduce the measurement cost and can effectively improve the accuracy of measurement.
按,近年來因為微細化加工發展及精密度要求提高,對於工具機之旋轉軸角度定位精度的要求也日益提高,而由於該旋轉軸的角度量測直接影響到其定位精度,因此工具機旋轉軸角度定位之量測技術是否足以應付其精度要求,也就變的很重要。而目前常用的檢測角度定位的儀器有兩種,其中之一為自動視準儀、而另一種為雷射干涉儀。In recent years, due to the development of micro-machining and the improvement of precision requirements, the requirements for the angular positioning accuracy of the rotating shaft of the machine tool are also increasing. However, since the angular measurement of the rotating shaft directly affects the positioning accuracy, the machine tool rotates. It is important that the measurement technique of the shaft angular positioning is sufficient to meet its accuracy requirements. At present, there are two commonly used instruments for detecting angular positioning, one of which is an automatic collimator and the other is a laser interferometer.
以自動視準儀之檢測而言,自動視準儀主要測量微小角度,進而測量角度定位,利用測量光源經平面反射鏡後所產生極小的角度原理工作,配合多面稜鏡及可量測旋轉軸之角度定位誤差。但自動視準儀雖然較為簡單,且成本低,但其量測精度無法完全滿足現行微細加工之需求。In terms of the detection of the automatic collimator, the automatic collimator mainly measures the small angle, and then measures the angular position, and works with the extremely small angle principle generated by the measuring light source through the plane mirror, and cooperates with the multi-faceted cymbal and the measurable rotating shaft. Angle positioning error. However, although the automatic collimator is relatively simple and low in cost, its measurement accuracy cannot fully meet the needs of current micromachining.
另就雷射干涉儀之檢測而言,雷射干涉儀為目前業界在進行機台性能檢測時,最可信賴之量測設備,透過角度鏡組及其光路反射之波長不同,可由雷射干涉儀之處理器測得小角度之變化。但雷射干涉儀本身及其搭配的相關鏡組非常昂 貴,且在量測過程需時時注意光源是否有被遮蔽,當光源被遮蔽時雷射干涉儀訊號就必須再進行重新設定。In terms of the detection of the laser interferometer, the laser interferometer is the most reliable measuring device in the industry when testing the performance of the machine. The angle of the angle mirror group and its optical path reflection can be different by laser interference. The processor of the instrument measures small angle changes. However, the laser interferometer itself and its associated mirror set are very expensive. Expensive, and pay attention to whether the light source is shielded when the measurement process takes time. When the light source is shielded, the laser interferometer signal must be reset.
換言之,發展較低成本、且簡易便利之量測技術,同時兼具精度的要求,係目前業界的重要課題,而有必要做進一步開發之必要,以滿足實際使用的需求。In other words, the development of lower cost, simple and convenient measurement technology, and the need for precision, is an important issue in the industry, and it is necessary to further develop to meet the needs of actual use.
緣是,本創作人乃針對前述現有工具機之旋轉軸角度量測時所面臨的問題深入探討,並藉由創作人多年從事相關產業的開發經驗,並積極尋求解決之道,經不斷努力之研究與發展,終於成功的創作出一種工具機角度定位量測系統,藉以克服現有者因無法兼具簡易、低成本及高精度所造成的不便與困擾。The reason is that this creator has in-depth discussion on the problems faced by the above-mentioned existing tool machine's rotation axis angle measurement, and has been working hard to find solutions through years of experience in the development of related industries, and has been working hard. Research and development have finally succeeded in creating a tool-machine angle-positioning measurement system to overcome the inconvenience and trouble caused by the inability to combine simplicity, low cost and high precision.
本創作之目的即在於提供一種工具機角度定位量測系統,藉以能使系統更為簡化,使操作更為簡便,並有效降低量測成本。The purpose of this creation is to provide a machine tool angle positioning measurement system, which can make the system more simplified, make the operation easier, and effectively reduce the measurement cost.
本創作之次一目的係在於提供一種工具機角度定位量測系統,其能快速完成工具機旋轉軸之角度定位量測,進而有效提高量測的精準度。The second purpose of this creation is to provide a tool machine angular positioning measurement system, which can quickly complete the angular positioning measurement of the rotating axis of the machine tool, thereby effectively improving the accuracy of the measurement.
可達成上述創作目的之工具機角度定位量測系統,包括有:一光檢裝置(PSD),該光檢裝置係架設於工具機外,而光 檢裝置具有一雷射模組(laser module)、一分光模組(splitter module)及一感測模組(Sensor module),該雷射模組係利用一夾具設有一可產生準直雷射光束之雷射頭,又分光模組係設於雷射模組一側,該分光模組係利用一夾具設有一與雷射光束同軸之分光鏡,且感測模組係設於分光鏡之雷射折射方向的光路折射方向上,而感測模組利用一夾具設有一供接收雷射光束之光感測器,再者該感測模組光感測器前方利用一夾具設有一供聚焦用之球透鏡;一準直反射裝置(reflection device),該準直反射裝置係設於一工具機位移平台之待測旋轉軸上,而準直反射裝置係利用一夾具設置一供反射雷射光束之平面鏡。The machine tool angle positioning measurement system capable of achieving the above-mentioned creation purpose comprises: a light inspection device (PSD), the light inspection device is erected outside the machine tool, and the light is The inspection device has a laser module, a splitter module and a sensor module. The laser module is provided with a collimator to generate a collimated laser beam. The laser head and the beam splitting module are disposed on one side of the laser module. The beam splitting module is provided with a beam splitter coaxial with the laser beam, and the sensing module is disposed in the beam of the beam splitter. The illuminating direction of the optical path of the refracting direction is used, and the sensing module uses a fixture to provide a light sensor for receiving the laser beam, and the sensing module is provided with a fixture for focusing in front of the photo sensor. a ball lens; a collimation reflecting device disposed on a rotating shaft of a machine tool displacement platform to be tested, and the collimating reflecting device is configured to provide a reflecting laser beam by using a jig Plane mirror.
藉此,透過前述技術手段的具體實現,由於本創作之工具機角度定位量測系統,可光檢裝置與準直反射裝置的特殊設計,且配合電腦與程式,即可測得工具機旋轉軸之角度定位誤差,且量測系統成本較傳統量測角度定位之設備為大幅減少,同時操作上更為簡便,並能有效提高其角度定位量測的精度,大幅增加其附加價值及提升其實用性。Therefore, through the specific implementation of the foregoing technical means, the tool machine angular positioning measurement system, the special design of the optical inspection device and the collimating reflection device, and the computer and the program can be used to measure the rotating axis of the machine tool. The angular positioning error, and the cost of the measuring system is greatly reduced compared with the traditional measuring angle positioning device, and the operation is more simple, and the accuracy of the angular positioning measurement can be effectively improved, the added value is greatly increased and the utility is improved. Sex.
請參閱圖1,本創作所提供之工具機角度定位量測系統,主要包括有:一光檢裝置1及一準直反射裝置5所組成,其中光檢裝置1係架設於工具機外一腳架【圖中未示】上,而 準直反射裝置5係設於工具機位移平台6之旋轉軸65上,供進行該旋轉軸65之角度定位量測;而所述之光檢裝置1具有一可架設於前述工具機外腳架之載台11,如圖2所示,該載台11上具有一雷射模組2、一分光模組3及一感測模組4,該雷射模組2係利用一夾具22於載台11上設有一雷射頭21,雷射頭21可產生準直線狀之雷射光束,而該夾具22具有調整X、Y、θ之功能,可供調整雷射頭21之雷射光束射出的角度及方向,又分光模組3係設於載台11上之雷射模組2一側,該分光模組3係利用一夾具32於載台11上設有一與雷射頭21雷射光束同軸之分光鏡31,且感測模組4係設於載台11上分光鏡31之雷射折射方向的光路折射方向(如圖4、圖5所示),而感測模組4係於載台11上設有一可與雷射頭21雷射光束平行位移之移動座41,又感測模組4於移動座41上利用一夾具43設有一光感測器42,該光感測器42可供接收來自分光鏡31折射之雷射光束,再者該感測模組4於移動座41之光感測器42前方利用一夾具45設有一球透鏡44,使雷射光束可經球透鏡44聚焦於光感測器42上,且當作動感測模組4之移動座41時,可微調由分光鏡31折射之雷射光束至光感測器42的可量測範圍;再者,所述之準直反射裝置5係如圖3所示,該準直反 射裝置5係利用一轉接夾具51設於待測工具機之旋轉軸65上,且轉接夾具51上設有一旋轉平台52,並於旋轉平台52上利用一夾具53設置一平面鏡54,該平面鏡54可供雷射模組2雷射頭21所產生之準直線狀雷射光束進行反射,且平面鏡54可利用夾具53具有調整θ之功能,調整反射雷射光束的角度、方向;藉此,透過光檢裝置1與準直反射裝置5的設置,而配合電腦與程式的應用,能量測該待測工具機旋轉軸65的角度定位誤差,而組構成一低成本、且量測效率佳之工具機角度定位量測系統者。Referring to FIG. 1 , the tool machine angular positioning measurement system provided by the present invention mainly comprises: a light detecting device 1 and a collimating reflecting device 5, wherein the optical detecting device 1 is mounted on the outside of the machine tool. Rack [not shown], and The collimating reflection device 5 is disposed on the rotating shaft 65 of the machine tool displacement platform 6 for performing the angular positioning measurement of the rotating shaft 65. The optical inspection device 1 has an outer frame that can be mounted on the tool machine. As shown in FIG. 2, the stage 11 has a laser module 2, a beam splitting module 3 and a sensing module 4, and the laser module 2 is carried by a clamp 22 The stage 11 is provided with a laser head 21, the laser head 21 can generate a collimated laser beam, and the clamp 22 has the function of adjusting X, Y and θ for adjusting the laser beam of the laser head 21 to be emitted. The angle and direction of the beam splitting module 3 are disposed on the side of the laser module 2 on the stage 11. The beam splitting module 3 is provided with a laser beam 11 and a laser head 21 on the stage 11. The beam is coaxial with the beam splitter 31, and the sensing module 4 is disposed on the stage 11 on the stage 11 in the direction of the laser refracting direction of the laser refraction direction (as shown in FIGS. 4 and 5), and the sensing module 4 is The movable base 41 is disposed on the loading platform 11 and is parallel to the laser beam of the laser head 21, and the sensing module 4 is provided with a light sensor 42 on the moving base 41 by using a clamp 43. The sensor 42 is configured to receive a laser beam refracted from the beam splitter 31. Further, the sensing module 4 is provided with a ball lens 44 in front of the light sensor 42 of the moving base 41 by using a clamp 45, so that the laser beam can pass through When the ball lens 44 is focused on the light sensor 42 and acts as the moving base 41 of the motion sensing module 4, the laser beam refracted by the beam splitter 31 can be finely adjusted to the measurable range of the light sensor 42; The collimating reflection device 5 is as shown in FIG. 3, and the collimation is reversed. The rotating device 5 is disposed on the rotating shaft 65 of the machine tool to be tested by using an adapter jig 51, and the rotating jig 51 is provided with a rotating platform 52, and a flat mirror 54 is disposed on the rotating platform 52 by using a clamp 53. The plane mirror 54 can reflect the quasi-linear laser beam generated by the laser head 2 of the laser module 2, and the plane mirror 54 can adjust the angle θ of the reflected laser beam by using the clamp 53 to adjust the angle and direction of the reflected laser beam; Through the arrangement of the optical inspection device 1 and the collimating reflection device 5, and with the application of the computer and the program, the energy is measured for the angular positioning error of the rotating shaft 65 of the tool to be tested, and the group constitutes a low cost and measurement efficiency. Jiazhi tool machine angle positioning measurement system.
透過上述結構的設計,本創作之工具機角度定位量測系統於實際操作時,則係如圖1、圖4及圖5所示,首先,將準直反射裝置5設於作為基準面之待量測的工具機旋轉軸65上,並使用千分錶校正工具旋轉軸65及準直反射裝置5的中心位置(圖中未示),使其偏心量降低至可量測範圍內;接著,將光檢裝置1利用載台11架設於工具機外之腳架上,並調整腳架高度使光檢裝置1上升高至可量測範圍,開啟光檢裝置1之雷射模組2雷射頭21產生作為量測用的準直化雷射光束,並透過調整工具機位移平台6與雷射頭21之夾具22,使雷射光束射出至準直反射裝置5的平面鏡54上,使其反射至光檢裝置1感測模組4之電壓數值為一定 值,校正雷射光束與工具機位移平台6之軸向為平行;之後,藉由調整準直反射裝置5之平面鏡54夾具53,使雷射模組2反射之雷射光束為平行(如圖5所示),並透過調整感測模組4之移動座41,使準直反射裝置5平面鏡54反射之雷射光束經由分光模組3分光鏡31折射至球透鏡44,並射入光感測器42,使雷射光束達到量測範圍內;最後,旋轉待測之工具機旋轉軸65至一定角度,再由準直反射裝置5反向旋轉與工具機旋轉軸65之相同角度,由光檢裝置1之光感測器42抓取雷射光束之位移電壓值,經過訊號放大器放大抓取的電壓值,再藉由類比/數位轉換卡傳至電腦中,再透過電腦程式抓取類比/數位轉換卡的值,加以應用在量測範圍之中,加以分析其角度定位誤差。Through the design of the above structure, the tool positioning angle measuring system of the present invention is shown in FIG. 1 , FIG. 4 and FIG. 5 in actual operation. First, the collimating reflection device 5 is set as a reference surface. Measuring the machine tool rotating shaft 65, and using the dial gauge correction tool rotating shaft 65 and the center position of the collimating reflection device 5 (not shown), the eccentric amount is reduced to the measurable range; then, The optical inspection device 1 is mounted on the stand outside the machine tool by using the stage 11, and the height of the stand is adjusted to raise the optical inspection device 1 to the measurable range, and the laser module 2 laser of the optical inspection device 1 is turned on. The head 21 generates a collimated laser beam for measurement, and transmits the laser beam to the plane mirror 54 of the collimating reflection device 5 by adjusting the power tool displacement platform 6 and the jig 22 of the laser head 21 to make the laser beam The voltage value of the sensing module 4 reflected to the optical inspection device 1 is constant The corrected laser beam is parallel to the axial direction of the machine tool displacement platform 6; after that, by adjusting the plane mirror 54 clamp 53 of the collimating reflection device 5, the laser beam reflected by the laser module 2 is parallel (as shown in the figure). 5), and by adjusting the moving base 41 of the sensing module 4, the laser beam reflected by the plane mirror 54 of the collimating reflection device 5 is refracted to the ball lens 44 via the beam splitting mirror 3, and is incident on the light sensor. The detector 42 causes the laser beam to reach the measurement range; finally, rotates the rotating shaft 65 of the machine tool to be tested to a certain angle, and then the opposite direction of the rotating shaft 65 of the machine tool is reversely rotated by the collimating reflection device 5, The light sensor 42 of the optical inspection device 1 captures the displacement voltage value of the laser beam, amplifies the captured voltage value through the signal amplifier, and transmits it to the computer through the analog/digital conversion card, and then captures the analogy through the computer program. The value of the /digit conversion card is applied to the measurement range to analyze its angular positioning error.
經由上述的說明可知,利用本創作所提供之工具機角度定位量測系統,且配合電腦與程式,即可測得工具機旋轉軸65之角度定位誤差,且量測系統成本較傳統量測角度定位之設備為大幅減少,同時操作上更為簡便,並能有效提高其角度定位量測的精度,從而提高產品之附加價值,並增進其經濟效益。According to the above description, the angle positioning error of the machine tool rotation axis 65 can be measured by using the machine tool angle positioning measurement system provided by the present invention, and the measurement system cost is compared with the traditional measurement angle. The positioning equipment is greatly reduced, and the operation is simpler, and the accuracy of the angle positioning measurement can be effectively improved, thereby increasing the added value of the product and improving its economic efficiency.
上列詳細說明係針對本創作之一可行實施例之具體說明,惟該實施例並非用以限制本創作之專利範圍,凡未脫離本創作技藝精神所為之等效實施或變更,均應包含於本案之 專利範圍中。The detailed description above is a detailed description of one of the possible embodiments of the present invention, and the embodiment is not intended to limit the scope of the patents, and the equivalent implementations or modifications that are not included in the spirit of the present invention should be included in The case In the scope of patents.
綜上所述,本案不但在空間型態上確屬創新,並能較習用物品增進上述多項功效,應已充分符合新穎性及進步性之法定新型專利要件,爰依法提出申請,懇請 貴局核准本件新型專利申請案,以勵創作,至感德便。To sum up, this case is not only innovative in terms of space type, but also can enhance the above-mentioned multiple functions compared with customary articles. It should fully comply with the statutory new patent requirements of novelty and progressiveness, and apply in accordance with the law. This new type of patent application, to encourage creation, to the sense of virtue.
1‧‧‧光檢裝置1‧‧‧Light inspection device
11‧‧‧載台11‧‧‧ stage
2‧‧‧雷射模組2‧‧‧Laser module
21‧‧‧雷射頭21‧‧‧Ray head
22‧‧‧夾具22‧‧‧Clamp
3‧‧‧分光模組3‧‧‧Distribution Module
31‧‧‧分光鏡31‧‧‧beam splitter
32‧‧‧夾具32‧‧‧Clamp
4‧‧‧感測模組4‧‧‧Sensing module
41‧‧‧移動座41‧‧‧Mobile seat
42‧‧‧光感測器42‧‧‧Light sensor
43‧‧‧夾具43‧‧‧ fixture
44‧‧‧球透鏡44‧‧‧Ball lens
45‧‧‧夾具45‧‧‧Clamp
5‧‧‧準直反射裝置5‧‧‧ Collimation reflector
51‧‧‧轉接夾具51‧‧‧Transfer fixture
52‧‧‧旋轉平台52‧‧‧Rotating platform
53‧‧‧夾具53‧‧‧Clamp
54‧‧‧平面鏡54‧‧‧Flat mirror
6‧‧‧位移平台6‧‧‧ Displacement platform
65‧‧‧旋轉軸65‧‧‧Rotary axis
圖1為本創作工具機角度定位量測系統之立體示意圖。FIG. 1 is a perspective view of the angle positioning measurement system of the creation tool machine.
圖2為本創作工具機角度定位量測系統中之量測模組的外觀示意圖。FIG. 2 is a schematic diagram of the appearance of the measurement module in the angle positioning measurement system of the authoring tool machine.
圖3為本創作工具機角度定位量測系統中高精度旋轉平台模組的立體示意圖。FIG. 3 is a schematic perspective view of a high-precision rotating platform module in the angle positioning measurement system of the authoring tool machine.
圖4為本創作工具機角度定位量測系統於實際運用時調整前之量測光路圖。Fig. 4 is a diagram of the measuring light path before the adjustment of the angle positioning measurement system of the authoring tool machine in actual use.
圖5為本創作工具機角度定位量測系統於實際運用時調整後之量測光路圖。FIG. 5 is a measurement optical path diagram of the angle positioning measurement system of the authoring tool machine adjusted in actual use.
1‧‧‧光檢裝置1‧‧‧Light inspection device
11‧‧‧載台11‧‧‧ stage
2‧‧‧雷射模組2‧‧‧Laser module
3‧‧‧分光模組3‧‧‧Distribution Module
4‧‧‧感測模組4‧‧‧Sensing module
5‧‧‧準直反射裝置5‧‧‧ Collimation reflector
51‧‧‧轉接夾具51‧‧‧Transfer fixture
52‧‧‧旋轉平台52‧‧‧Rotating platform
53‧‧‧夾具53‧‧‧Clamp
54‧‧‧平面鏡54‧‧‧Flat mirror
6‧‧‧位移平台6‧‧‧ Displacement platform
65‧‧‧旋轉軸65‧‧‧Rotary axis
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW101223810U TWM458266U (en) | 2012-12-07 | 2012-12-07 | Angle positioning and measuring system for machine tool |
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Cited By (6)
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TWI569917B (en) * | 2014-11-10 | 2017-02-11 | 國立虎尾科技大學 | The angle error correction device |
TWI569916B (en) * | 2014-11-10 | 2017-02-11 | 國立虎尾科技大學 | An auxiliary angle measurement system of rotating shaft |
TWI583928B (en) * | 2014-03-05 | 2017-05-21 | 陳永富 | Multi-function laser detecting device and method thereof |
TWI630975B (en) * | 2017-03-31 | 2018-08-01 | 南臺學校財團法人南臺科技大學 | Active error compensation platform |
TWI712773B (en) * | 2019-01-09 | 2020-12-11 | 國立嘉義大學 | Laser interferometer positioning system |
CN115255991A (en) * | 2022-08-19 | 2022-11-01 | 成都中科卓尔智能科技集团有限公司 | Off-axis parabolic mirror fine control tool for large-view-field detection of photoetching mask |
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2012
- 2012-12-07 TW TW101223810U patent/TWM458266U/en not_active IP Right Cessation
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI583928B (en) * | 2014-03-05 | 2017-05-21 | 陳永富 | Multi-function laser detecting device and method thereof |
TWI569917B (en) * | 2014-11-10 | 2017-02-11 | 國立虎尾科技大學 | The angle error correction device |
TWI569916B (en) * | 2014-11-10 | 2017-02-11 | 國立虎尾科技大學 | An auxiliary angle measurement system of rotating shaft |
TWI630975B (en) * | 2017-03-31 | 2018-08-01 | 南臺學校財團法人南臺科技大學 | Active error compensation platform |
TWI712773B (en) * | 2019-01-09 | 2020-12-11 | 國立嘉義大學 | Laser interferometer positioning system |
CN115255991A (en) * | 2022-08-19 | 2022-11-01 | 成都中科卓尔智能科技集团有限公司 | Off-axis parabolic mirror fine control tool for large-view-field detection of photoetching mask |
CN115255991B (en) * | 2022-08-19 | 2024-02-27 | 成都中科卓尔智能科技集团有限公司 | Off-axis parabolic mirror precise control tool for large-view-field detection of lithography mask |
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