CN211477573U - Pyramid auto-collimation scanning device for collimator focus detection - Google Patents

Pyramid auto-collimation scanning device for collimator focus detection Download PDF

Info

Publication number
CN211477573U
CN211477573U CN201921533729.XU CN201921533729U CN211477573U CN 211477573 U CN211477573 U CN 211477573U CN 201921533729 U CN201921533729 U CN 201921533729U CN 211477573 U CN211477573 U CN 211477573U
Authority
CN
China
Prior art keywords
light pipe
lens
sleeve
flange
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201921533729.XU
Other languages
Chinese (zh)
Inventor
刘杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANJING INTANE OPTICS ENGINEERING CO LTD
Original Assignee
NANJING INTANE OPTICS ENGINEERING CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NANJING INTANE OPTICS ENGINEERING CO LTD filed Critical NANJING INTANE OPTICS ENGINEERING CO LTD
Priority to CN201921533729.XU priority Critical patent/CN211477573U/en
Application granted granted Critical
Publication of CN211477573U publication Critical patent/CN211477573U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a pyramid auto-collimation scanning device for parallel light pipe focus detection and a using method thereof, and the pyramid auto-collimation scanning device is characterized by comprising a base (1), a left light pipe (2), a right light pipe (5) and a spectroscope (4) which are arranged on the base (1), wherein an upper light pipe (3) is arranged on the spectroscope (4); the method comprises the following specific steps: placing a single-mode fiber at a focal position of an achromatic lens, wherein the achromatic lens is responsible for converting divergent light emitted by the fiber into parallel light; secondly, reflecting part of the collimated light beam into a second left achromatic lens through a 45-degree semi-transparent semi-reflective mirror, and converging the light beam into an optical fiber imaging point by the second left achromatic lens; and step three, placing the CCD at the trifocal surface position of the achromatic lens on the right side of the 45-degree flat glass, coaxially placing the left and right achromatic lenses, and when a point light source enters the optical fiber imaging position, imaging the point light source by the CCD.

Description

Pyramid auto-collimation scanning device for collimator focus detection
Technical Field
The invention belongs to the field of optical system adjustment detection, and particularly relates to a pyramid auto-collimation scanning device for collimator focus detection and a using method thereof.
Background
The existing methods for fixing the focal plane position of the collimator are many.
Some collimator tubes with longer focal length need to emit parallel light to determine the focal plane position of the collimator tube to be detected, so that the focus detection precision is improved. The long-focus collimator is inconvenient to store and maintain and has high environmental requirements in use.
The optimal focal plane of the light tube to be measured is calibrated by utilizing a grating or an interferometer, the focusing is accurate, and the means is complex.
And (3) utilizing a pyramid auto-collimation scanning detection device, using a collimator to be detected to detect the collimator self, and repeatedly iterating to find the optimal focal plane position. The coke detection device is simple in use method, light, flexible and easy to store and maintain.
The focus detection method is independent of the precision of the pyramid moving guide rail and only dependent on the calibration precision of the focal plane positions of the three lenses, and the focus detection method can be repeatedly used after being regularly calibrated and stored properly.
Disclosure of Invention
Aiming at the problems in the prior art, the invention adopts the following technical scheme in order to reduce the error between the focus detection position and the focus position of the interferometer:
a pyramid auto-collimation scanning device for collimator focus detection is characterized in that: the light splitting device comprises a base 1, a left light pipe 2, a right light pipe 5 and a light splitting mirror 4, wherein the left light pipe 2, the right light pipe 5 and the light splitting mirror 4 are arranged on the base 1, and an upper light pipe 3 is arranged on the light splitting mirror 4.
The left light pipe 2 consists of a left light pipe lens sleeve 21, a left light pipe lens pressing flange 22, an achromatic lens second lens frame 23, a left light pipe lens pressing flange 24, left light pipe lenses 25 and 26, a left light pipe lens sleeve 27, a left light pipe lens tightening flange 28 and a left light pipe lens mounting seat 29; an achromatic lens second lens frame 23 and left light pipe lenses 25 and 26 are installed in the left light pipe lens sleeve 21, one end of the left light pipe lens sleeve 21 is connected with the left light pipe lens sleeve 27 and fixed through a left light pipe lens tightening flange 28, the other end of the left light pipe lens sleeve 21 is fixed through a left light pipe lens pressing flange 22, the left light pipe lenses 25 and 26 are fixed through a left light pipe lens pressing flange 24, and the left light pipe 2 is fixed on the base 1 through a left light pipe lens mounting seat 29.
The upper light pipe 3 consists of an upper light pipe fixing seat 31, an upper light pipe lens sleeve 32, an upper light pipe lens flange 33, an achromatic lens first lens frame 34, an upper light pipe lens flange 35, upper light pipe lenses 36 and 37, an optical fiber 38, an upper light pipe lens sleeve 39 and an upper light pipe lens tightening flange 30; an achromatic lens first frame 34 and upper light pipe lenses 36 and 37 are installed in the upper light pipe lens sleeve 32, one end of the upper light pipe lens sleeve 32 is connected with the upper light pipe lens sleeve 39 and fixed through the upper light pipe lens and a tight flange 30, the other end of the upper light pipe lens sleeve 32 is fixed through an upper light pipe lens flange 33, the upper light pipe lenses 36 and 37 are fixed through an upper light pipe lens flange 35, one end of the upper light pipe lens sleeve 39 is provided with an optical fiber 38, and the upper light pipe 3 is fixed on the base 1 through an upper light pipe lens fixing seat 31.
The right light pipe 5 consists of a right light pipe lens sleeve 51, a right light pipe lens pressing flange 52, an achromatic lens three-lens frame 53, a right light pipe lens pressing flange 54, right light pipe lenses 55 and 56, a right light pipe lens sleeve 57, a right light pipe lens tightening flange 58, a right light pipe lens mounting seat 59 and a CCD 50; an achromatic lens three-lens frame 53 and right light pipe lenses 55 and 56 are installed in the right light pipe lens sleeve 51, one end of the right light pipe lens sleeve 51 is connected with the right light pipe lens sleeve 57 and fixed through a right light pipe lens and tight flange 58, the other end of the right light pipe lens sleeve 51 is fixed through a right light pipe lens pressing flange 52, the right light pipe lenses 55 and 56 are fixed through a right light pipe lens pressing flange 54, one end of the right light pipe lens sleeve 57 is provided with a CCD 50, and the right light pipe 5 is fixed on the base 1 through a right light pipe lens mounting seat 59.
The spectroscope 4 consists of adjusting bases 41 and 44, an adjusting mirror frame 42 and a beam splitting sheet 43; the beam splitting sheet 43 is disposed on the adjusting lens frame 42, two sides of the adjusting lens frame 42 are respectively fixed with adjusting bases 41 and 44, and the adjusting bases 41 and 44 are fixed on the base 1.
Meanwhile, the invention also discloses a pyramid auto-collimation scanning method for the collimator tube focus detection, which is characterized by comprising the following specific steps:
placing a single-mode fiber at a focal position of an achromatic lens, wherein the achromatic lens is responsible for converting divergent light emitted by the fiber into parallel light;
secondly, reflecting part of the collimated light beam into a second left achromatic lens through a 45-degree semi-transparent semi-reflective mirror, and converging the light beam into an optical fiber imaging point by the second left achromatic lens;
and step three, placing the CCD at the trifocal surface position of the achromatic lens on the right side of the 45-degree flat glass, coaxially placing the left and right achromatic lenses, and when a point light source enters the optical fiber imaging position, imaging the point light source by the CCD.
The pyramid auto-collimation scanning method for the collimator focus detection is further characterized in that:
the pyramid translates from the caliber of the light pipe to be detected from top to bottom; when the optical fiber imaging point is placed at the focal plane position of the light pipe to be detected, the light pipe to be detected emits parallel light beams; because the pyramid return beam and the pyramid incident beam are in the same direction, the CCD imaging light spot position is translated along the diameter direction of the light pipe to be detected along the pyramid position and is not moved.
If the CCD imaging light spot position runs, the angle of the cube-corner returning light beam is changed, at the moment, the optical fiber imaging point is not placed on the focal plane of the light pipe to be detected, and the diverging light beam is emitted by the light pipe to be detected. Therefore, the position of the focus detection device needs to be adjusted until the pyramid is translated, and the imaging light spot of the CCD of the focus detection device is not moved.
Has the advantages that: when the method is used during delivery of the collimator with the internal focal length of 4m and the caliber of 400mm, the error between the focus detection position and the focus position of the interferometer is better than 0.02 mm.
Drawings
Fig. 1 is a perspective view of a pyramidal auto-collimation scanning device for detecting focus of a parallel light pipe according to an embodiment of the invention.
Fig. 2 is a structural diagram of a pyramid auto-collimation scanning device for detecting the focus of a parallel light pipe according to an embodiment of the invention.
Fig. 3 is a diagram of the left light pipe component of the pyramidal auto-collimation scanning device according to the embodiment of the present invention.
Fig. 4 is a diagram of an upper light pipe component of a pyramid auto-collimation scanning device according to an embodiment of the invention.
Fig. 5 is a diagram of a right light pipe component of a pyramidal auto-collimation scanning device according to an embodiment of the invention.
Fig. 6 is a diagram of a beam splitter component of a pyramidal auto-collimation scanning device according to an embodiment of the present invention.
Fig. 7 is a diagram of the core components of the pyramidal auto-collimation scanning device for the focus detection of the parallel light pipe according to the embodiment of the invention.
Fig. 8 is a schematic diagram of a pyramid auto-collimation scanning method for collimator focus detection according to an embodiment of the present invention.
Fig. 9 is a graph of deviation of coordinates of the centroid of a light spot according to an embodiment of the present invention.
Fig. 10 is a schematic diagram of the calibration of the apparatus according to the embodiment of the present invention.
FIG. 11 is a schematic diagram of a first arm calibration according to an embodiment of the present invention.
Fig. 12 is a schematic diagram of the calibration of the second arm according to the embodiment of the present invention.
Fig. 13 is a third arm calibration schematic of an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
All the core components of the device comprise 3 achromatic lenses with the caliber of 80mm and the focal length of 560mm, a piece of semi-transparent semi-reflecting plate glass, a pyramid, a CCD camera and a single-mode fiber. As shown in fig. 1 to 6, the pyramidal auto-collimation scanning device for collimator focus detection and its core components of the present embodiment are structured.
The pyramid auto-collimation scanning device for parallel light pipe focus detection in the embodiment comprises a base 1, a left light pipe 2, a right light pipe 5 and a spectroscope 4 which are arranged on the base 1, wherein an upper light pipe 3 is arranged on the spectroscope 4.
The left light pipe 2 consists of a left light pipe lens sleeve 21, a left light pipe lens pressing flange 22, an achromatic lens second lens frame 23, a left light pipe lens pressing flange 24, left light pipe lenses 25 and 26, a left light pipe lens sleeve 27, a left light pipe lens tightening flange 28 and a left light pipe lens mounting seat 29; an achromatic lens second lens frame 23 and left light pipe lenses 25 and 26 are installed in the left light pipe lens sleeve 21, one end of the left light pipe lens sleeve 21 is connected with the left light pipe lens sleeve 27 and fixed through a left light pipe lens tightening flange 28, the other end of the left light pipe lens sleeve 21 is fixed through a left light pipe lens pressing flange 22, the left light pipe lenses 25 and 26 are fixed through a left light pipe lens pressing flange 24, and the left light pipe 2 is fixed on the base 1 through a left light pipe lens mounting seat 29.
The upper light pipe 3 consists of an upper light pipe fixing seat 31, an upper light pipe lens sleeve 32, an upper light pipe lens flange 33, an achromatic lens first lens frame 34, an upper light pipe lens flange 35, upper light pipe lenses 36 and 37, an optical fiber 38, an upper light pipe lens sleeve 39 and an upper light pipe lens tightening flange 30; an achromatic lens first frame 34 and upper light pipe lenses 36 and 37 are installed in the upper light pipe lens sleeve 32, one end of the upper light pipe lens sleeve 32 is connected with the upper light pipe lens sleeve 39 and fixed through the upper light pipe lens and a tight flange 30, the other end of the upper light pipe lens sleeve 32 is fixed through an upper light pipe lens flange 33, the upper light pipe lenses 36 and 37 are fixed through an upper light pipe lens flange 35, one end of the upper light pipe lens sleeve 39 is provided with an optical fiber 38, and the upper light pipe 3 is fixed on the base 1 through an upper light pipe lens fixing seat 31.
The right light pipe 5 consists of a right light pipe lens sleeve 51, a right light pipe lens pressing flange 52, an achromatic lens three-lens frame 53, a right light pipe lens pressing flange 54, right light pipe lenses 55 and 56, a right light pipe lens sleeve 57, a right light pipe lens tightening flange 58, a right light pipe lens mounting seat 59 and a CCD 50; an achromatic lens three-lens frame 53 and right light pipe lenses 55 and 56 are installed in the right light pipe lens sleeve 51, one end of the right light pipe lens sleeve 51 is connected with the right light pipe lens sleeve 57 and fixed through a right light pipe lens and tight flange 58, the other end of the right light pipe lens sleeve 51 is fixed through a right light pipe lens pressing flange 52, the right light pipe lenses 55 and 56 are fixed through a right light pipe lens pressing flange 54, one end of the right light pipe lens sleeve 57 is provided with a CCD 50, and the right light pipe 5 is fixed on the base 1 through a right light pipe lens mounting seat 59.
The spectroscope 4 consists of adjusting bases 41 and 44, an adjusting mirror frame 42 and a beam splitting sheet 43; the beam splitting sheet 43 is disposed on the adjusting lens frame 42, two sides of the adjusting lens frame 42 are respectively fixed with adjusting bases 41 and 44, and the adjusting bases 41 and 44 are fixed on the base 1.
Fig. 7 is a diagram of the core components of the pyramidal auto-collimation scanning device for the focus detection of the parallel light pipe according to the embodiment of the invention.
The pyramid auto-collimation scanning method for the collimator focus detection of the embodiment specifically comprises the following steps:
placing a single-mode fiber at a focal position of an achromatic lens, wherein the achromatic lens is responsible for converting divergent light emitted by the fiber into parallel light;
secondly, reflecting part of the collimated light beam into a second left achromatic lens through a 45-degree semi-transparent semi-reflective mirror, and converging the light beam into an optical fiber imaging point by the second left achromatic lens;
and step three, placing the CCD at the trifocal surface position of the achromatic lens on the right side of the 45-degree flat glass, coaxially placing the left and right achromatic lenses, and when a point light source enters the optical fiber imaging position, imaging the point light source by the CCD.
Fig. 8 is a schematic diagram of a pyramid auto-collimation scanning method for collimator focus detection according to an embodiment of the present invention.
The pyramid translates from the caliber of the light pipe to be detected from top to bottom; when the optical fiber imaging point is placed at the focal plane position of the light pipe to be detected, the light pipe to be detected emits parallel light beams; because the pyramid return beam and the pyramid incident beam are in the same direction, the CCD imaging light spot position is translated along the diameter direction of the light pipe to be detected along the pyramid position and is not moved.
If the CCD imaging light spot position runs, the angle of the cube-corner returning light beam is changed, at the moment, the optical fiber imaging point is not placed on the focal plane of the light pipe to be detected, and the diverging light beam is emitted by the light pipe to be detected. Therefore, the position of the focus detection device needs to be adjusted until the pyramid is translated, and the imaging light spot of the CCD of the focus detection device is not moved.
The pyramid auto-collimation scanning method for the collimator focus detection further comprises the following steps:
step 3.1, calibrating the position of an optical fiber imaging point by using a laser interferometer, and making a focus position reference record by using a fixed mechanical part;
and 3.2, placing the focus detection device at the theoretical focal plane position of the light pipe to be detected, scanning along the diameter direction of the light pipe to be detected by using a pyramid, recording the centroid coordinate of the CCD imaging light spot, and recording the maximum deviation value of the centroid coordinate of the light spot.
And 3.3, adjusting the position of the focus detection device, recording the position, and repeating the step 3.2 every time the position of the focus detection device is adjusted to obtain a light spot centroid coordinate deviation range.
Step 3.4, fitting the data in the step 3.3 to obtain a curve, wherein the lowest point of the curve is the focal plane position of the light pipe to be detected as shown in fig. 9;
and 3.5, resetting the focus detection device to a position corresponding to the lowest point of the curve, wherein the optical fiber imaging point is the focus of the light pipe to be detected, installing the mechanical reference in the step 3.1, and detaching the focus detection device.
Fig. 10 is a schematic diagram of the calibration of the apparatus according to the embodiment of the present invention. Device calibration:
1) calibrating a first arm: the optical power meter is used for measuring the light power of the optical fiber, and the optical power meter is used for measuring the light power of the optical fiber. Fig. 11 is a schematic diagram illustrating the calibration of the first arm according to the embodiment of the present invention.
2) Calibrating a second arm: the calibrated light is emitted by the first arm, the CCD of the second arm receives the light, and the laser spot radius is calculated according to GB/T13739-. The CCD front and back are adjusted to minimize the radius. Fig. 12 is a schematic diagram illustrating the calibration of the second arm according to the embodiment of the present invention.
3) Calibrating a third arm: the first arm optical fiber is polished, and the laser spot radius on the CCD is calculated according to GB/T13739 and 2011. The mirror is adjusted to minimize the radius. Fig. 13 is a schematic diagram of the calibration of the third arm according to the embodiment of the present invention.
The above embodiments are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical solution according to the technical idea of the present invention falls within the protection scope of the present invention. The technology not related to the invention can be realized by the prior art.

Claims (1)

1. A pyramid auto-collimation scanning device for collimator focus detection is characterized in that: the light-splitting device comprises a base (1), a left light pipe (2), a right light pipe (5) and a light-splitting mirror (4) which are arranged on the base (1), wherein an upper light pipe (3) is arranged on the light-splitting mirror (4); the left light pipe (2) consists of a left light pipe lens sleeve (21), a left light pipe lens pressing flange (22), an achromatic lens second lens frame (23), a left light pipe lens pressing flange (24), left light pipe lenses (25, 26), a left light pipe lens sleeve (27), a left light pipe lens tightening flange (28) and a left light pipe lens mounting seat (29); an achromatic lens two-lens frame (23) and left light tube lenses (25 and 26) are installed in the left light tube lens sleeve (21), one end of the left light tube lens sleeve (21) is connected with the left light tube lens sleeve (27) and fixed through a left light tube lens and a tight flange (28), the other end of the left light tube lens sleeve (21) is fixed through a left light tube lens pressing flange (22), the left light tube lenses (25 and 26) are fixed through a left light tube lens pressing flange (24), and the left light tube (2) is fixed on the base (1) through a left light tube lens mounting seat (29);
the upper light pipe (3) consists of an upper light pipe lens fixing seat (31), an upper light pipe lens sleeve (32), an upper light pipe lens flange (33), an achromatic lens first lens frame (34), an upper light pipe lens flange (35), upper light pipe lenses (36 and 37), an optical fiber (38), an upper light pipe lens sleeve (39) and an upper light pipe lens tightening flange (30); an achromatic lens first mirror frame (34) and upper light pipe lenses (36 and 37) are installed in the upper light pipe lens sleeve (32), one end of the upper light pipe lens sleeve (32) is connected with the upper light pipe lens sleeve (39) and fixed through an upper light pipe lens and a tight flange (30), the other end of the upper light pipe lens sleeve (32) is fixed through an upper light pipe lens flange (33), the upper light pipe lenses (36 and 37) are fixed through an upper light pipe lens flange (35), one end of the upper light pipe lens sleeve (39) is provided with an optical fiber (38), and the upper light pipe (3) is fixed on the base (1) through an upper light pipe lens fixing seat (31);
the right light pipe (5) consists of a right light pipe lens sleeve (51), a right light pipe lens pressing flange (52), an achromatic lens three-lens frame (53), a right light pipe lens pressing flange (54), right light pipe lenses (55 and 56), a right light pipe lens sleeve (57), a right light pipe lens fastening flange (58), a right light pipe lens mounting seat (59) and a CCD (50); an achromatic lens three-lens frame (53) and right light tube lenses (55 and 56) are installed in the right light tube lens sleeve (51), one end of the right light tube lens sleeve (51) is connected with the right light tube lens sleeve (57) and fixed through a right light tube lens and a tight flange (58), the other end of the right light tube lens sleeve (51) is fixed through a right light tube lens pressing flange (52), the right light tube lenses (55 and 56) are fixed through a right light tube lens pressing flange (54), one end of the right light tube lens sleeve (57) is provided with a CCD (50), and the right light tube (5) is fixed on the base (1) through a right light tube lens mounting seat (59);
the spectroscope (4) consists of adjusting bases (41, 44), an adjusting mirror frame (42) and a beam splitting sheet (43); the beam splitting sheet (43) is arranged on the adjusting mirror frame (42), adjusting bases (41, 44) are respectively fixed on two sides of the adjusting mirror frame (42), and the adjusting bases (41, 44) are fixed on the base (1).
CN201921533729.XU 2019-09-16 2019-09-16 Pyramid auto-collimation scanning device for collimator focus detection Withdrawn - After Issue CN211477573U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921533729.XU CN211477573U (en) 2019-09-16 2019-09-16 Pyramid auto-collimation scanning device for collimator focus detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921533729.XU CN211477573U (en) 2019-09-16 2019-09-16 Pyramid auto-collimation scanning device for collimator focus detection

Publications (1)

Publication Number Publication Date
CN211477573U true CN211477573U (en) 2020-09-11

Family

ID=72362646

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921533729.XU Withdrawn - After Issue CN211477573U (en) 2019-09-16 2019-09-16 Pyramid auto-collimation scanning device for collimator focus detection

Country Status (1)

Country Link
CN (1) CN211477573U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487516A (en) * 2019-09-16 2019-11-22 南京英田光学工程股份有限公司 Pyramid auto-collimation scanning means for parallel light tube focusing test

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110487516A (en) * 2019-09-16 2019-11-22 南京英田光学工程股份有限公司 Pyramid auto-collimation scanning means for parallel light tube focusing test
CN110487516B (en) * 2019-09-16 2024-05-10 南京英田光学工程股份有限公司 Pyramid auto-collimation scanning device for focusing of collimator

Similar Documents

Publication Publication Date Title
CN107843213B (en) Confocal auto-collimation center deviation and curvature radius measuring method and device
CN101210806B (en) measuring method of angle deviation along azimuth axis direction and pitching angle deviation of laser emission axis and mechanical base level normal based on secondary light source
CN100462674C (en) Precision determination method for angle between optical axis and mechanical axis of optical system
CN110888240B (en) Rapid adjusting method of Offner type spectral imaging optical system
CN104864822B (en) Normal tracking mode non-spherical measuring method and system based on laser interference
CN102564343B (en) Detection device for surface-shape errors of solar trench type curved surface reflector
CN1979091A (en) Optical measuring system
CN104913732B (en) The normal tracking mode non-spherical measuring method and system interfered based on recombination laser
CN101571383A (en) Detecting device for measuring difference of relative radius of curvature between sub-lenses of sphere surface spliced telescope
CN106767545A (en) A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method
CN112526489B (en) Optical axis calibration system and method of laser range finder and laser parameter measurement method
CN1963432A (en) Hartman wave front sensor to realize alignment function by light splitter and testing method thereof
CN116086361B (en) Straightness measuring device for large-stroke guide rail and error obtaining method
CN100383606C (en) Method and device for accurately determining optical system focus plane by interferometer
CN207439442U (en) A kind of laser pick-off emission element commissioning device
CN107817095B (en) High-precision homodromous double-optical-axis and multi-optical-axis parallelism adjusting method
CN102506835B (en) Telescope and laser coaxial measuring system
CN113376857B (en) High-precision optical path debugging device and method
CN114279687B (en) Measuring device and measuring method for relative deflection of primary mirror and secondary mirror
CN211477573U (en) Pyramid auto-collimation scanning device for collimator focus detection
CN111238408A (en) Device and method for rapidly measuring parallelism of parallel flat plate
CN114253003A (en) Tube shell laser alignment debugging device and method
CN109253867B (en) Optical system focal length measuring system and method
CN106767471B (en) Optical interval measuring system and method in aspheric surface detection light path
CN110109262B (en) Coaxiality debugging system and method for light source switching multiplexing unit

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned

Granted publication date: 20200911

Effective date of abandoning: 20240510

AV01 Patent right actively abandoned

Granted publication date: 20200911

Effective date of abandoning: 20240510