CN116086361B - Straightness measuring device for large-stroke guide rail and error obtaining method - Google Patents
Straightness measuring device for large-stroke guide rail and error obtaining method Download PDFInfo
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- CN116086361B CN116086361B CN202310381396.8A CN202310381396A CN116086361B CN 116086361 B CN116086361 B CN 116086361B CN 202310381396 A CN202310381396 A CN 202310381396A CN 116086361 B CN116086361 B CN 116086361B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Abstract
The utility model relates to a guide rail straightness measurement technical field relates to a straightness measurement device and an error acquisition method for a large-stroke guide rail, wherein the device comprises a guide rail and a moving platform arranged on the guide rail in a sliding way, and the device further comprises a plurality of plane reflectors spliced along the axial direction of the guide rail, wherein one side of the moving platform, which faces the plane reflectors, is provided with a straightness measurement mechanism, one side of the moving platform, which faces the plane reflectors, is provided with a first test point and a second test point which are not overlapped, and the straightness measurement mechanism is used for measuring the first distance between the straightness measurement mechanism and the second distance between the straightness measurement mechanism and the first test point and the second test point in a matching way; the straightness measuring mechanism is also used for calculating the deflection angle error of the motion platform according to the first distance and the second distance. The invention has the advantages of low cost, simple installation and high precision.
Description
Technical Field
The application relates to the technical field of guide rail straightness measurement, in particular to a straightness measurement device and an error acquisition method for a large-stroke guide rail.
Background
The existing measuring system for evaluating the straightness of the guide rail can generally measure the straightness (non-real time) through a commercial interferometer, but the straightness error obtained by the method is not enough in real time; or the laser and the plane mirror are used for matching with the real-time straightness of the measuring guide rail. However, some large-stroke motion platforms, such as large-stroke OLED inkjet printers, have a stroke length generally exceeding three meters, and if a long plane mirror is used, the processing is difficult, the cost is high, the installation is easy to deform, and the real-time performance is insufficient if a commercial interferometer is used. In addition, although the traditional straightness measuring device can acquire the real-time straightness error of the moving platform, a gap exists between the real-time straightness error and the actual deflection angle error of the moving platform, and the accuracy is not high enough.
Therefore, a straightness measuring device for a large-stroke guide rail is urgently needed to solve the technical problems that the long plane reflecting mirror is difficult to install, the cost is too high, and the deflection angle error is not accurate enough.
Disclosure of Invention
The utility model provides a straightness measuring device and error acquisition method for long-stroke guide rail can solve the technical problems that the cost of a long-length reflector is high, the installation is difficult and the deflection angle error is not accurate enough.
On the one hand, the application provides a straightness measuring device for a large-stroke guide rail, which comprises a guide rail and a moving platform arranged on the guide rail in a sliding manner, and further comprises a plurality of plane reflectors spliced along the axial direction of the guide rail, wherein a straightness measuring mechanism is arranged on one side of the moving platform, which faces the plane reflectors, and a first test point and a second test point which are not overlapped are arranged on one side of the moving platform, which faces the plane reflectors, and are arranged at intervals along the axial direction of the guide rail, and the straightness measuring mechanism is used for measuring a first distance between the straightness measuring mechanism and the first test point and a second distance between the straightness measuring mechanism and the second test point in a matching manner; the straightness measuring mechanism is also used for calculating the deflection angle error of the motion platform according to the first distance and the second distance.
According to the straightness measuring device for the large-stroke guide rail, the plurality of plane reflectors are arranged and spliced in sequence along the axial direction of the guide rail, so that the traditional large-length reflector is replaced, guide rails with different lengths can be adapted, and the technical problems of high cost and difficult installation of the large-length reflector are solved; and the straightness measuring mechanism is used for measuring the distances from two different test points to the plane reflecting mirror to calculate the deflection angle error of the motion platform, so that the accuracy can be improved.
Optionally, the straightness accuracy measuring device for large-stroke guide rail that this application provided, straightness accuracy measuring mechanism includes first measuring component and second measuring component, first measuring component sets up on the first test point, the second measuring component sets up on the second test point, first measuring component be used for with the plane mirror cooperation is measured first distance, the second measuring component be used for with the plane mirror cooperation is measured the second distance.
By the arrangement mode, the straightness measuring mechanism can continuously output a measuring result and a measuring signal in the whole straightness measuring process, and measurement continuity is maintained.
Optionally, the straightness accuracy measuring device for large stroke guide rail that this application provided, first measuring subassembly with the second measuring subassembly all includes laser instrument, reference mirror, interference mirror and 1/4 wave plate, the laser instrument sets up the motion platform is towards one side of plane speculum, the laser instrument, interference mirror with 1/4 wave plate is in order gradually near the plane speculum is in proper order along the axis of laser instrument, the laser instrument is used for sending out the emission light beam, the interference mirror is used for with the emission light beam is broken down into reflection light beam and transmission light beam, the reference mirror is used for with the reflection light beam reflection of interference mirror back the interference mirror to with pass 1/4 wave plate and through the plane speculum reflection, return the transmission light beam interference of interference mirror forms the interference light, the laser instrument is still used for receiving the interference light.
Optionally, the straightness accuracy measuring device for large-stroke guide rail that this application provided, the axis of plane speculum the measurement optical axis of first measurement subassembly with the measurement optical axis of second measurement subassembly all is in same height.
By the arrangement mode, abbe errors can be reduced, and detection accuracy can be improved.
Optionally, the straightness measuring device for a large-stroke guide rail provided by the application, wherein a micro-motion platform is arranged on the motion platform, and the micro-motion platform adjusts the pose of the motion platform.
Optionally, the straightness measuring device for the large-stroke guide rail further comprises a controller, wherein the controller is electrically connected with the straightness measuring mechanism and the micro-motion platform respectively; the controller is used for acquiring the deflection angle error, and performing motion control on the micro-motion stage according to the deflection angle error so as to adjust the motion deviation of the motion platform.
In practical application, the motion platform performs printing work, the straightness measuring mechanism is responsible for measuring the deflection angle error of the motion platform and transmitting the measured deflection angle error to the controller, the controller processes the measurement information of the straightness measuring mechanism in real time, generates a motion control instruction and sends the motion control instruction to the micro-motion platform, the micro-motion platform compensates the relevant angle and the positioning error according to the relevant instruction and adjusts the pose of the motion platform, and a closed-loop control system can be formed in the mode to realize high-precision positioning motion.
Optionally, the straightness accuracy measuring device for large-stroke guide rail that this application provided, the bottom of plane speculum is provided with adjustment mechanism, adjustment mechanism is used for adjusting plane speculum's height and swing angle.
Optionally, the straightness accuracy measuring device for large-stroke guide rail that this application provided is provided with the air supporting piece towards the bottom of guide rail, and the air supporting piece is used for driving the motion platform.
According to the straightness measuring device for the large-stroke guide rail, the plurality of plane reflectors are arranged and spliced in sequence along the axial direction of the guide rail, so that the traditional large-length reflector is replaced, guide rails with different lengths can be adapted, and the technical problems of high cost and difficult installation of the large-length reflector are solved; and the straightness measuring mechanism is used for measuring the distances from two different test points to the plane reflecting mirror to calculate the deflection angle error of the motion platform, so that the accuracy can be improved.
On the other hand, the application also provides an error acquisition method, which comprises the following steps:
s1, acquiring the first distance and the second distance;
s2, acquiring the distance between the first test point and the second test point;
s3, calculating the deflection angle error of the motion platform according to the first distance, the second distance and the distance between the first test point and the second test point.
Optionally, in the error obtaining method provided in the present application, a calculation formula of step S3 is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
representing a yaw angle error of the motion platform; />
Representing a first distance; />
Representing a second distance; />
Representing a distance between the first test point and the second test point.
The straightness measuring device for the large-stroke guide rail and the error obtaining method provided by the application are used for obtaining the first distance and the second distance; obtaining the distance between a first test point and the second test point; and calculating the deflection angle error of the motion platform according to the first distance, the second distance and the distance between the first test point and the second test point. The deflection angle error of the motion platform can be timely obtained, the pose of the motion platform can be conveniently adjusted in the later period, and high-precision positioning motion is realized.
In summary, the straightness measuring device and the error obtaining method for the large-stroke guide rail are provided with the plurality of plane reflectors, and the plane reflectors are spliced in sequence along the axial direction of the guide rail, so that the device replaces the traditional large-length reflectors, can adapt to guide rails with different lengths, and solves the technical problems of high cost and difficult installation of the large-length reflectors; the straightness measuring mechanism is used for measuring the distances from two different test points to the plane reflecting mirror to calculate the deflection angle error of the motion platform, so that the accuracy can be improved; the method can timely acquire the deflection angle error of the motion platform, is convenient for adjusting the pose of the motion platform in the later period, and realizes high-precision positioning motion.
Drawings
Fig. 1 is a schematic structural diagram of a straightness measuring device for a large-stroke guide rail provided by the application.
Fig. 2 is a schematic structural diagram of a first measurement assembly and a second measurement assembly provided in the present application.
Fig. 3 is a schematic diagram of a moving process of the first measuring assembly and the second measuring assembly provided in the present application.
Description of the reference numerals:
100. a guide rail; 200. a motion platform; 210. an air floatation block; 220. a micro-motion stage; 300. a planar mirror; 400. a straightness measuring mechanism; 401. a first measurement assembly; 402. a second measurement assembly; 410. a laser; 420. a reference mirror; 430. an interference mirror; 440. a 1/4 wave plate; 500. a controller; 600. an adjusting mechanism.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Accordingly, the following detailed description of the embodiments of the present application, provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a block diagram of a straightness measuring device for a large-stroke guide rail in some embodiments of the present application, including a guide rail 100 and a moving platform 200 slidably disposed on the guide rail 100, and further including a plurality of plane mirrors 300 spliced along an axial direction of the guide rail 100, where a straightness measuring mechanism 400 is disposed on a side of the moving platform 200 facing the plane mirrors 300, a first test point and a second test point which are not coincident are disposed on a side of the moving platform 200 facing the plane mirrors 300, and the first test point and the second test point are disposed at intervals along the axial direction of the guide rail 100, and the straightness measuring mechanism 400 is configured to cooperate with the plane mirrors 300 to measure a first distance between the straightness measuring mechanism 400 and a second distance between the two test points; straightness measurement mechanism 400 is also used to calculate yaw angle error of motion platform 200 based on the first distance and the second distance.
Wherein the number and length of the plane mirrors 300 may be set according to the length of the actual guide rail 100. In the embodiment of the present application, three planar mirrors 300 are used together, and the three planar mirrors 300 are sequentially spliced along the length direction of the guide rail 100, so that the total length of the three planar mirrors 300 which are finally spliced is consistent with the length of the guide rail 100.
According to the straightness measuring device for the large-stroke guide rail, the plurality of plane reflectors 300 are arranged, and the plane reflectors 300 are spliced in sequence along the axial direction of the guide rail 100, so that the traditional large-length reflectors are replaced, the guide rail 100 with different lengths can be adapted, and the technical problems of high cost and difficult installation of the large-length reflectors are solved; and the accuracy can be improved by calculating the deflection angle error of the motion platform 200 by measuring the real-time distance between the two different test points and the plane mirror 300 by using the straightness measuring mechanism 400.
In practical applications, if only a single laser 410, i.e. a single measuring component is used to measure the straightness of the guide rail 100, then since there is a gap at the joint of the two plane mirrors 300, there is no reflection target at this time, when the straightness measuring mechanism 400 passes through the joint of the two plane mirrors 300, the measuring light path will be interrupted, and the real-time measuring result will be affected. Thus, the distance between the first test point and the second test point should be greater than the gap between the two planar mirrors 300.
Referring to fig. 3, therefore, in some preferred embodiments, straightness measurement mechanism 400 includes a first measurement assembly 401 and a second measurement assembly 402, first measurement assembly 401 being disposed at a first test point and second measurement assembly 402 being disposed at a second test point, first measurement assembly 401 being configured to measure a first distance in cooperation with planar mirror 300 and second measurement assembly 402 being configured to measure a second distance in cooperation with planar mirror 300. In practical applications, when the straightness measurement is performed at first, the measuring mirrors of the first measuring component 401 and the second measuring component 402 are the first plane mirror 300 at the same time, as the moving platform 200 advances (see the dotted line part of fig. 3), the measuring mirror corresponding to the second measuring component 402 is switched from the first plane mirror 300 to the second plane mirror 300, at this time, the optical signal and the electrical signal corresponding to the second measuring component 402 are interrupted when the measuring mirror is transformed, the measured value is lost when the photoelectric signal is interrupted, at this time, the first measuring component 401 is continuously measuring, at this time, the measured value corresponding to the first measuring component 401, that is, the register corresponding to the second measuring component 402 can be assigned by writing the existing program, at this time, the straightness measurement can be continuously performed; similarly, when the measuring mirror corresponding to the first measuring component 401 is changed from the first plane mirror 300 to the second plane mirror 300, the measuring mirror of the second measuring component 402 is always the second plane mirror 300, and the measured value corresponding to the second measuring component 402, that is, the register stored by the second distance, can be assigned to the register corresponding to the first measuring component 401 by programming. By the arrangement mode, the straightness measuring mechanism 400 can continuously output a measuring result and a measuring signal in the whole straightness measuring process, and measurement continuity is maintained.
In some embodiments, the first measurement assembly 401 and the second measurement assembly 402 each include a laser 410, a reference mirror 420, an interference mirror 430, and a 1/4 wave plate 440, the laser 410 being disposed on a side of the motion stage 200 facing the planar mirror 300, the laser 410, the interference mirror 430, and the 1/4 wave plate 440 being disposed sequentially along an axis of the laser 410 in order of gradually approaching the planar mirror 300, the laser 410 being configured to emit an emission beam, the interference mirror 430 being configured to split the emission beam into a reflection beam and a transmission beam, the reference mirror 420 being configured to reflect the reflection beam of the interference mirror 430 back to the interference mirror 430 to interfere with the transmission beam passing through the 1/4 wave plate 440 and being reflected by the planar mirror 300 back to the interference mirror 430, forming interference light, the laser 410 also being configured to receive the interference light. In practical applications, the first measurement component 401 and the second measurement component 402 are based on single-frequency laser interference length measurement, the laser 410 adopts a single-frequency laser to match with a michelson laser interference light path structure, and the working principle is as shown in fig. 2, and the laser is emitted by the laser 410 and then is incident to the interference mirror 430 to be split into two mutually perpendicular reflected beams and transmitted beams. The reflected light beam is reflected by the reference mirror 420 and returns to the interference mirror 430, the other transmitted light beam is reflected by the measuring mirror 1/4 wave plate 440 and the plane mirror 300 and returns to the interference mirror 430, the two light beams are converged and interfere, when the relative distance between the plane mirror 300 and the interference mirror 430 changes, the light and shade changes of interference fringes are generated, the number of interference fringes is calculated by a computer after signal processing, and therefore the distance from the measuring component to the plane mirror 300 is calculated. In this way, the first distance and the second distance can be calculated.
In a further embodiment, the central axis of the plane mirror 300, the measuring optical axis of the first measuring component 401 and the measuring optical axis of the second measuring component 402 are all at the same height. The central axis of the plane mirror 300 refers to a straight line passing through the geometric center point of the plane mirror 300, and the straight line is parallel to the movement direction of the moving platform 200. By the arrangement mode, abbe errors can be reduced, and detection accuracy can be improved. The measuring optical axis refers to an axis where laser light emitted by the laser 410 of the first measuring component 401 or the second measuring component 402 is located.
In some embodiments, a micro stage 220 is provided on the motion platform 200, and the micro stage 220 adjusts the pose of the motion platform 200. The micro-stage 220 is a prior art, and an existing six-degree-of-freedom micro-stage can be used. By providing the micro stage 220, error compensation and high-precision movement can be achieved.
In a further embodiment, the straightness measuring device for a large-stroke guide rail of the present application further includes a controller 500, where the controller 500 is electrically connected to the straightness measuring mechanism 400 and the micro-stage 220, respectively; the controller 500 is configured to obtain the yaw angle error, and perform motion control on the micro-motion stage 220 according to the yaw angle error to adjust the motion deviation of the motion platform 200. In practical application, the motion platform 200 performs printing work, the straightness measurement mechanism 400 is responsible for measuring the yaw angle error of the motion platform 200, and transmits the measured real-time yaw angle error to the controller 500, the controller 500 processes the measurement information of the straightness measurement mechanism 400 in real time, generates a motion control instruction and sends the motion control instruction to the micro-motion stage 220, the micro-motion stage 220 compensates the relevant angle and positioning error according to the relevant instruction, and adjusts the pose of the motion platform 200, so that a closed-loop control system can be formed, and high-precision positioning motion is realized.
In practical application, the plane mirror 300 is used as a measuring mirror and is a reference for measuring straightness, so that adjusting the plane mirror 300 ensures that a plurality of plane mirrors 300 are positioned on the same straight line, and simultaneously ensures that a plurality of plane mirrors 300 are parallel to the motion direction of the motion platform 200, which is a key for measuring straightness in real time.
Thus, in some preferred embodiments, the bottom of the planar mirror 300 is provided with an adjustment mechanism 600, the adjustment mechanism 600 being used to adjust the height and the swing angle of the planar mirror 300. In practical application, the bottom of each plane mirror 300 is further provided with a bracket, the adjusting mechanism 600 is disposed at the top of the bracket, and the adjusting mechanism 600 is further provided with a clamp for fixing the plane mirror 300. Wherein, adjustment mechanism 600 is prior art, can adopt current accurate adjustment base, can realize the micron level of multi freedom and adjust. By the arrangement mode, the height and the swinging angle of the plane reflecting mirror 300 can be conveniently and accurately adjusted, so that the moving directions of the plane reflecting mirrors 300 and the moving platform 200 are kept parallel, and the adjusting precision is improved. Where the axis perpendicular to the ground is taken as the z-axis, then the swing angle represents the angle of swing about the z-axis.
In some embodiments, the motion platform 200 is provided with an air bearing block 210 toward the bottom of the guide rail 100, and the air bearing block 210 is used to drive the motion platform 200. Wherein the air bearing block 210 is a prior art. The air floatation block 210 can be matched with the guide rail 100 to be responsible for moving the motion platform 200, so that the motion precision of the motion platform 200 is improved.
On the other hand, the application also provides an error acquisition method, which comprises the following steps:
s1, acquiring a first distance and a second distance;
s2, acquiring the distance between the first test point and the second test point;
s3, calculating the deflection angle error of the motion platform 200 according to the first distance, the second distance and the distance between the first test point and the second test point.
The straightness measuring device for the large-stroke guide rail and the error obtaining method provided by the application are used for obtaining the first distance and the second distance; obtaining the distance between the first test point and the second test point; and calculating the deflection angle error of the motion platform 200 according to the first distance, the second distance and the distances between the first test point and the second test point. The deflection angle error of the motion platform 200 can be timely obtained, the pose of the motion platform 200 can be conveniently adjusted in the later period, and high-precision positioning motion is realized.
In step S1, the first distance or the second distance may be calculated by the following formula:
wherein, the liquid crystal display device comprises a liquid crystal display device,
representing the distance from the measuring element to the plane mirror 300, and when the measuring element is the first measuring element 401, it is the first distance; when measuringThe measuring component is a second measuring component 402, which is a second distance; />
Representing the number of interference fringes;
representing the refractive index of the current measuring environment and directly obtaining the refractive index; />
Representing the wavelength of the laser 410 in the current measurement environment, can be obtained directly.
When the relative distance between the plane mirror 300 and the interference mirror 430 changes, a light-dark change of the interference fringes occurs, and the photo detection unit in the straightness measurement mechanism 400 detects the interference fringe information, so that a linear relationship between displacement and the interference fringe information is established, and the number of interference fringes is calculated by a computer after signal processing.
In step S2, the distance between the first test point and the second test point may be obtained by an existing manner, such as a distance meter or direct measurement.
The calculation formula of step S3 is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
representing yaw angle error of motion platform 200; />
Representing a first distance; />
Representing a second distance; />
Representing the distance between the first test point and the second test point.
In this way, the yaw angle error of the motion platform 200 can be acquired in real time.
As can be seen from the above, the straightness measuring device and the error obtaining method for the large-stroke guide rail of the present application, the device is provided with the plurality of plane mirrors 300, and the plurality of plane mirrors 300 are spliced in turn along the axial direction of the guide rail 100, so that the conventional large-length mirror is replaced, the guide rail 100 with different lengths can be adapted, and the technical problems of high cost and difficult installation of the large-length mirror are solved; and the straightness measuring mechanism 400 is used for measuring the distances from two different test points to the plane mirror 300 to calculate the deflection angle error of the motion platform 200, so that the accuracy can be improved; the method comprises the steps of obtaining a first distance and a second distance; obtaining the distance between the first test point and the second test point; and calculating the deflection angle error of the motion platform 200 according to the first distance, the second distance and the distances between the first test point and the second test point. The deflection angle error of the motion platform 200 can be timely obtained, the pose of the motion platform 200 can be conveniently adjusted in the later period, and high-precision positioning motion is realized.
In the embodiments provided in this application, it should be understood that the disclosed systems and methods may be implemented in other ways. The system embodiments described above are merely illustrative, e.g., the division of the elements is merely a logical functional division, and there may be additional divisions in actual implementation, and e.g., multiple elements or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, system or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The foregoing is merely an embodiment of the present application, and is not intended to limit the scope of the present application, so that various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (8)
1. The utility model provides a straightness accuracy measuring device for long-stroke guide rail, includes guide rail (100) and slides and set up moving platform (200) on guide rail (100), its characterized in that still includes a plurality of along moving platform (200) of guide rail (100) axial concatenation plane mirror (300), moving platform (200) towards one side of plane mirror (300) is provided with straightness accuracy measuring mechanism (400), moving platform (200) towards one side of plane mirror (300) is provided with first test point and the second test point of misalignment, first test point and the second test point are along guide rail (100) axial interval sets up, straightness accuracy measuring mechanism (400) are used for with plane mirror (300) cooperation measurement straightness accuracy measuring mechanism (400) are in first distance and at the second distance of second test point of first test point; the straightness measurement mechanism (400) is further used for calculating a deflection angle error of the motion platform (200) according to the first distance and the second distance;
the straightness measurement mechanism (400) comprises a first measurement component (401) and a second measurement component (402), the first measurement component (401) is arranged on the first test point, the second measurement component (402) is arranged on the second test point, the first measurement component (401) is used for measuring the first distance in a matched mode with the plane mirror (300), and the second measurement component (402) is used for measuring the second distance in a matched mode with the plane mirror (300);
the first measuring component (401) and the second measuring component (402) each comprise a laser (410), a reference mirror (420), an interference mirror (430) and a 1/4 wave plate (440), wherein the laser (410) is arranged at one side of the motion platform (200) towards the plane mirror (300), the laser (410), the interference mirror (430) and the 1/4 wave plate (440) are sequentially arranged along the axis of the laser (410) in the order of gradually approaching the plane mirror (300), the laser (410) is used for emitting an emission beam, the interference mirror (430) is used for decomposing the emission beam into a reflection beam and a transmission beam, the reference mirror (420) is used for reflecting the reflection beam of the interference mirror (430) back to the interference mirror (430) so as to interfere with the transmission beam passing through the 1/4 wave plate (440) and being reflected by the plane mirror (300) and returning to the mirror (430) to form interference beam, and the interference mirror (410) is used for receiving the interference beam;
the distance between the first test point and the second test point is larger than the gap distance between two adjacent plane reflectors (300);
the second measuring component is further used for obtaining a first distance according to the measured second distance when the photoelectric signal of the first measuring component is interrupted;
the first measuring component is further used for obtaining a second distance according to the measured first distance when the photoelectric signal of the second measuring component is interrupted.
2. The straightness measurement device for a large-stroke guide rail according to claim 1, wherein the central axis of the plane mirror (300), the measurement optical axis of the first measurement assembly (401) and the measurement optical axis of the second measurement assembly (402) are all at the same height.
3. The straightness measurement apparatus for a large-stroke guide rail according to claim 1, wherein a micro-stage (220) is provided on the moving platform (200), and the micro-stage (220) adjusts the pose of the moving platform (200).
4. The straightness measurement apparatus for a large-stroke guide rail according to claim 3, further comprising a controller (500), the controller (500) being electrically connected to the straightness measurement mechanism (400) and the micro-stage (220), respectively; the controller (500) is configured to obtain the yaw angle error, and perform motion control on the micro-motion stage (220) according to the yaw angle error, so as to adjust a motion deviation of the motion platform (200).
5. The straightness measurement apparatus for a large-stroke guide rail according to claim 1, wherein an adjusting mechanism (600) is provided at the bottom of the plane mirror (300), and the adjusting mechanism (600) is used for adjusting the height and swing angle of the plane mirror (300).
6. The straightness measurement apparatus for a large-stroke guide rail according to claim 1, wherein an air bearing block (210) is provided at the bottom of the moving platform (200), and the air bearing block (210) is used for driving the moving platform (200).
7. An error acquisition method for the straightness measurement apparatus for a large-stroke guide rail according to any one of claims 1 to 6, comprising the steps of:
s1, acquiring the first distance and the second distance;
s2, acquiring the distance between the first test point and the second test point;
s3, calculating a deflection angle error of the motion platform (200) according to the first distance, the second distance and the distance between the first test point and the second test point;
the specific steps in the step S1 comprise:
when the photoelectric signal of the first measuring component is lost, the second measuring component obtains a first distance according to the measured second distance;
when the photoelectric signal of the second measuring component is lost, the first measuring component obtains a second distance according to the measured first distance;
the first distance and the second distance are calculated by the following formula:
wherein, the liquid crystal display device comprises a liquid crystal display device,
for measuring the distance of the component from the plane mirror, < >>
For the number of interference fringes>
For the refractive index of the current measuring environment, +.>
Is the wavelength of the laser in the current measurement environment.
8. The error acquisition method according to claim 7, wherein the calculation formula of step S3 is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
-representing a yaw angle error of the motion platform (200); />
Representing a first distance; />
Representing a second distance; />
Representing a distance between the first test point and the second test point.
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