CN113133316A - Laser multipath guide rail testing device and method - Google Patents
Laser multipath guide rail testing device and method Download PDFInfo
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- CN113133316A CN113133316A CN201980010601.1A CN201980010601A CN113133316A CN 113133316 A CN113133316 A CN 113133316A CN 201980010601 A CN201980010601 A CN 201980010601A CN 113133316 A CN113133316 A CN 113133316A
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- 238000012360 testing method Methods 0.000 title claims abstract description 17
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- 238000010998 test method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 20
- 238000010586 diagram Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A laser multipath guide rail testing device and method comprises the following steps: the laser interferometer comprises a laser interferometer, a tracker, a moving structure, a corner reflector and a guide rail, wherein the laser interferometer is arranged at one end of the guide rail, the moving device is arranged at the other end of the guide rail, the corner reflector is installed on the moving device, a tracker target is arranged on one side of the guide rail, and a plane mirror is arranged on the other side of the guide rail, wherein the tracker is arranged on the near side of the plane mirror, so that the distance measurement can be conveniently realized, and meanwhile, the distance measurement range can be doubled.
Description
The invention relates to the field of laser measurement, in particular to a laser multipath guide rail testing device and method.
The multi-path laser measuring guide rail is invented by the father Liu brocade doctor (Dr. Kam Lau) of the laser tracker recognized in the world, is patented by API company, and is mainly used for calibrating a reference tool of all brands of single ADM (absolute ranging) laser trackers in the market. The guide rail adopts a complex light path design, and combines the ingenious application of an angle reflector, a target and a plane mirror group, so that the requirement on laboratory space is lower and the influence of Abbe error (Abbe error) is reduced to the maximum extent compared with the traditional single light path laser measurement guide rail calibration mode.
With the continuous advance of the laser tracker technology, the single ADM (absolute ranging) laser tracker technology is developed, and is accepted and recognized by the market due to the characteristics of wide measurement range, no need of preheating, high working efficiency, price advantage and the like. However, as is well known, laser interference is the highest standard for length metrology, and since a single tracker does not integrate an IFM (interferometric laser) laser, it cannot self-calibrate its own ADM laser. Therefore, for the calibration of a single tracker, a Laser interferometer (Laser interferometer) is used in cooperation with the measurement guide rail to complete the calibration.
The traditional method is to use a single-path laser measurement guide rail to complete the calibration of a single ADM laser tracker by matching with a laser interferometer. Wherein, there are two kinds of equipment arrangement modes mainly: a parallel arrangement and a back-to-back arrangement. As shown in FIG. 1, when the parallel placement method is used for calibration, a laser interferometer and a laser tracker are simultaneously placed at the same end of a guide rail, then a laser interferometer target and a laser tracker target are respectively installed on a moving mechanism, and the precision of ADM laser is analyzed and calibrated by taking the laser interferometer as a reference and reading difference between interference laser and ADM laser. As shown in fig. 2, when calibration is performed by the back-to-back placement method, a laser interferometer and a laser tracker are respectively disposed at two ends of a guide rail, targets of two devices are mounted back-to-back on a moving mechanism, and the accuracy of ADM laser is analyzed and calibrated by increasing or decreasing interference laser readings with the laser interferometer as a reference.
Taking the API brand Radian Core/Plus model as an example, it has a measurement radius of over 80 meters. Thus, when using a single path laser to measure the rail to calibrate the tracker, a rail at least 80 meters long is required. Thus, whether a parallel placement method or a back-to-back placement method is used, when a single-light-path laser measurement guide rail is used for calibrating the tracker, a guide rail with a length of at least 80 meters is required; moreover, the longer the length of the guide rail is, the greater the probability of errors which may occur in the guide rail itself is, and the shorter the length of the guide rail is, the more the errors caused by the increase of the length of the guide rail are avoided to the greatest extent.
Simultaneously, when using back-to-back placement method, there is another drawback: when the target is moved to the near end of the tracker for calibration (calibration of the near end of the tracker requires relatively higher accuracy), the actual reference value is the far-end measurement of the etalon (laser interferometer) (the error increases with increasing distance). That is, it is the practice to calibrate the measurement accuracy in the measurement range requiring a smaller error with a reference value having a larger relative error.
At the end of the 19 th century, Abbe doctor (Dr. Emst Abbe) concluded the design principles for length meters, Abbe's principle (Abbe principle): the measurement can only be made with accurate results if the measured axis coincides with the reference axis or is on its extension. The error caused by violating Abbe's law is called Abbe's error (Abbe error).
When the tracker is calibrated by using a single-light-path laser measurement guide rail (parallel arrangement method), the tracker and the interferometer are positioned at the same end of the guide rail, but two different targets are respectively used. Therefore, an operator can only adjust the two laser beams to be parallel as much as possible by virtue of own experience, so that the requirement on the operation level of the operator is high, and even if the operator is higher, the two laser beams which are parallel as seen by naked eyes are difficult to be close to be parallel in practice, so that the operator is inevitably influenced by large Abbe error. Moreover, the operator has different operating states each time, and the error deviation value caused by the operator is different, so that the repeatability is poor.
Although the back-to-back placement method is less affected by abbe errors than the parallel placement method due to the advantages of the target installation method, the interference laser and the ADM laser are closer to be in the same straight line. However, after all, two different targets are used by the two devices, and are still inevitably affected by abbe errors after being adjusted by manual installation.
In both the parallel placement method and the back-to-back placement method, when the single-path laser measurement guide rail is used for calibrating the tracker, the distance between the reference light (interference laser) and the ADM laser is far, so that the two laser beams are actually in different air environments and can be influenced by different environmental factors.
When the single-light-path laser measurement guide rail is used for calibrating the tracker, targets of the interferometer and the tracker are respectively fixed on the left side and the right side (parallel arrangement method) or the front side and the back side (back-to-back arrangement method) of the moving mechanism, so that the precision of the moving mechanism needs to be reasonably guaranteed, and the two targets can be guaranteed to be located at the same measurement position as much as possible, so that the measurement precision is guaranteed.
The invention aims to realize a laser multipath guide rail testing device and method, which can double the calibration distance, reduce the requirement on laboratory space, reduce errors to the maximum extent and reduce the influence caused by uneven environment.
A laser multipath guide rail testing device comprises: the device comprises a laser interferometer, a tracker, a moving structure, a corner reflector and a guide rail, wherein the laser interferometer is arranged at one end of the guide rail, a moving device is arranged at the other end of the guide rail, the corner reflector is installed on the moving device, a tracker target is arranged on one side of the guide rail, a plane mirror is arranged on the other side of the guide rail, and the tracker is arranged on the near side of the plane mirror.
Further, the distance of the moving structure from the tracker is set to 40 meters.
Furthermore, the moving structure is arranged on the guide rail and used for adjusting the distance of the guide rail in real time.
Furthermore, the plane mirror and the guide rail are horizontally arranged at an angle of 45 degrees and used for transmitting and receiving laser of a tracker ADM.
Furthermore, the laser interferometer and the corner reflector are positioned on the same horizontal line and used for calibrating the ADM laser.
Further, the tracker is an ADM laser tracker.
A laser multipath guide rail test method is characterized by comprising the following steps:
s1: calibrating ADM laser by interference laser emitted by a laser interferometer;
s2: the tracker emits ADM laser, and the plane mirror reflects the ADM laser to the corner reflector at 90 degrees;
s3: the angle reflector reflects ADM laser to a tracker target;
s4: the target of the tracker reflects ADM laser, and the ADM laser returns to the tracker according to the original path;
s5: and the tracker receives the returned ADM laser and acquires ADM laser distance reading.
Further, the step S2 includes:
the interference laser and the ADM laser generate common light, namely the interference laser calibrates the ADM laser;
and the calibrated ADM laser reflects the ADM laser to the tracker target through the corner reflector. .
The invention has the beneficial effects that:
1. by using the multi-path laser measuring guide rail, the measuring and calibrating work of 80 meters can be completed only by 40 meters, and the requirement of completing the calibrating work on the laboratory space environment is greatly reduced;
2. the tracker is calibrated by using a multi-path laser measuring guide rail, the interference laser and the ADM laser use the same corner reflector to form common light, so that two beams of laser are close to coincide or are parallel to each other to the maximum extent, the Abbe error (infinitely tending to 0) is reduced to the maximum extent, and the condition influenced by the Abbe error is greatly improved;
3. when the multi-path laser is used for measuring the guide rail, the interference laser and the ADM laser share one corner reflector to generate common light, and under the condition, the two beams of laser are actually in the same air environment, so that the influence caused by environmental non-uniformity is relatively small;
4. the compound light path laser measurement guide rail is used, the same corner reflector is used for the interferometer and the tracker, and Abbe errors are reduced to the maximum extent, so that the two beams of laser can be determined to be at the same position without the requirement on high-precision performance of a moving mechanism, and the measurement precision is guaranteed.
FIG. 1 is a schematic diagram of a parallel arrangement method of a single-light path laser guide rail testing device;
FIG. 2 is a schematic diagram of a single-light path laser guide testing device arranged back-to-back;
FIG. 3 is a laser multipath guide rail testing arrangement;
fig. 4 is a diagram of a laser multi-path guide rail testing device.
The technical solutions of the present invention are further described in detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following.
Specific embodiment as shown in fig. 3, a laser multipath guide rail testing device includes: the device comprises a laser interferometer, a tracker, a moving structure, a corner reflector and a guide rail, wherein the laser interferometer is arranged at one end of the guide rail, a moving device is arranged at the other end of the guide rail, the corner reflector is installed on the moving device, a tracker target is arranged on one side of the guide rail, a plane mirror is arranged on the other side of the guide rail, and the tracker is arranged on the near side of the plane mirror.
The distance between the moving structure and the tracker is set to be 40 meters, the moving structure is arranged on the guide rail and used for adjusting the distance of the guide rail in real time, a triangular mirror is arranged in the corner reflector and used for reflecting light, the plane mirror and the guide rail are horizontally arranged to form an angle of 45 degrees and used for emitting and receiving laser of the tracker ADM, and the laser interferometer and the corner reflector are located on the same horizontal line and used for calibrating the ADM laser.
As shown in fig. 3 and 4, the laser interferometer is arranged at one end of the guide rail, and the tracker to be measured is arranged at the same end of the guide rail near the 90 ° position of the laser interferometer. The light emitted by the tracker is reflected by 90 degrees through the plane mirror, and is incident into the same corner reflector (common light) with the interference laser, the ADM laser is incident into the tracker target which is positioned at the same end of the tracker but at the other side of the guide rail through the reflection of the corner reflector, and the ADM laser is returned to the tracker again through the tracker target to obtain the reading. Thus, the length of the ADM laser can be measured and calibrated in double length by using the guide rails with the same length.
The moving mechanism moves the corner mirror one unit distance to the left or right, the laser interferometer reading as a reference changes by one unit distance, but the measured tracker ADM reading changes by two unit distances. Therefore, the guide rail with the same length can be used for measuring and calibrating the double length of the ADM laser, and the Abbe error is reduced to the maximum extent.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
- The utility model provides a compound way guide rail testing arrangement of laser which characterized in that includes: the device comprises a laser interferometer, a tracker, a moving structure, a corner reflector and a guide rail, wherein the laser interferometer is arranged at one end of the guide rail, a moving device is arranged at the other end of the guide rail, the corner reflector is installed on the moving device, a tracker target is arranged on one side of the guide rail, a plane mirror is arranged on the other side of the guide rail, and the tracker is arranged on the near side of the plane mirror.
- The laser rerouting guide rail testing apparatus of claim 1 in which the distance between said moving structure and the tracker is set to 40 meters.
- The laser multipath guide rail testing device of claim 1, wherein the moving structure is arranged on the guide rail and used for adjusting the distance of the guide rail in real time.
- The device for testing the laser multipath guide rail according to claim 1, wherein a triangular mirror is arranged in the corner reflector for reflecting light and ensuring that the reflected light is parallel to the incident light.
- The device of claim 1, wherein the plane mirror is at an angle of 45 degrees with respect to the horizontal plane of the guide rail, and is used for reflecting the laser of a tracker ADM.
- The device for testing the laser multipath guideway of claim 1, wherein the laser interferometer and the corner reflector are located on the same horizontal line for calibrating the ADM laser.
- The apparatus of claim 1, wherein the tracker is an ADM laser tracker.
- A laser multipath guide rail test method is characterized by comprising the following steps:s1: calibrating ADM laser by interference laser emitted by a laser interferometer;s2: the tracker emits ADM laser, and the plane mirror reflects the ADM laser to the corner reflector at 90 degrees;s3: the angle reflector reflects ADM laser to a tracker target;s4: the target of the tracker reflects ADM laser, and the ADM laser returns to the tracker according to the original path;s5: and the tracker receives the returned ADM laser and acquires ADM laser distance reading.
- The laser multipath guiding rail testing method of claim 8, wherein the step S2 includes:the interference laser and the ADM laser generate common light, namely the interference laser calibrates the ADM laser;and the calibrated ADM laser reflects the ADM laser to the tracker target through the corner reflector.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2019/114566 WO2021081860A1 (en) | 2019-10-31 | 2019-10-31 | Device and method for laser compound path guide rail testing |
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| CN113133316A true CN113133316A (en) | 2021-07-16 |
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| CN201980010601.1A Pending CN113133316A (en) | 2019-10-31 | 2019-10-31 | Laser multipath guide rail testing device and method |
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| WO (1) | WO2021081860A1 (en) |
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| CN113624135A (en) * | 2021-08-25 | 2021-11-09 | 工业和信息化部电子第五研究所 | Pose measuring system |
| CN114370817B (en) * | 2022-01-12 | 2023-08-15 | 中国测试技术研究院机械研究所 | Device and method for calibrating club instrument |
| CN114858063B (en) * | 2022-06-15 | 2024-02-13 | 合肥工业大学 | Ball center distance measuring device with self-initializing function and using method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252634A (en) * | 2011-06-16 | 2011-11-23 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
| CN102278957A (en) * | 2011-07-05 | 2011-12-14 | 上海市安装工程有限公司 | Positioning and measuring tool and method for guide rail of high-accuracy and long-distance machine tool |
| CN102519397A (en) * | 2011-12-06 | 2012-06-27 | 中国科学院光电技术研究所 | Method for measuring curvature radius of optical spherical surface |
| CN103182604A (en) * | 2013-03-12 | 2013-07-03 | 镭射谷科技(深圳)有限公司 | Laser hybrid welding method and system |
| CN105157574A (en) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | Length measurement precision calibrating method and device for laser tracker |
| CN207456381U (en) * | 2017-09-14 | 2018-06-05 | 东莞中子科学中心 | Improve the device of laser tracker measurement accuracy |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10312596A (en) * | 1997-05-09 | 1998-11-24 | Sony Corp | Disc recorder/reproducer |
| CN205102782U (en) * | 2015-04-30 | 2016-03-23 | 长春理工大学 | Laser tracking appearance length measuring precision calibration device |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN205898063U (en) * | 2016-08-03 | 2017-01-18 | 上海市计量测试技术研究院 | Gesture adjustable laser guide device and error test equipment |
| CN108287338A (en) * | 2017-12-19 | 2018-07-17 | 天津市计量监督检测科学研究院 | Laser range finder verification system based on error cancellation principle and its calibration method |
-
2019
- 2019-10-31 CN CN201980010601.1A patent/CN113133316A/en active Pending
- 2019-10-31 WO PCT/CN2019/114566 patent/WO2021081860A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252634A (en) * | 2011-06-16 | 2011-11-23 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
| CN102278957A (en) * | 2011-07-05 | 2011-12-14 | 上海市安装工程有限公司 | Positioning and measuring tool and method for guide rail of high-accuracy and long-distance machine tool |
| CN102519397A (en) * | 2011-12-06 | 2012-06-27 | 中国科学院光电技术研究所 | Method for measuring curvature radius of optical spherical surface |
| CN103182604A (en) * | 2013-03-12 | 2013-07-03 | 镭射谷科技(深圳)有限公司 | Laser hybrid welding method and system |
| CN105157574A (en) * | 2015-04-30 | 2015-12-16 | 长春理工大学 | Length measurement precision calibrating method and device for laser tracker |
| CN207456381U (en) * | 2017-09-14 | 2018-06-05 | 东莞中子科学中心 | Improve the device of laser tracker measurement accuracy |
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