CN109141223B - PSD-based laser interferometer light path efficient and accurate calibration method - Google Patents
PSD-based laser interferometer light path efficient and accurate calibration method Download PDFInfo
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- CN109141223B CN109141223B CN201811112040.XA CN201811112040A CN109141223B CN 109141223 B CN109141223 B CN 109141223B CN 201811112040 A CN201811112040 A CN 201811112040A CN 109141223 B CN109141223 B CN 109141223B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
Abstract
The invention discloses a high-efficiency accurate calibration method for a light path of a laser interferometer based on PSD (phase-sensitive detector), which comprises the steps of establishing a system light path, roughly adjusting the light path of the laser interferometer, obtaining coordinate values of all calibration points according to a PSD two-dimensional photosensitive position sensor, calculating the offset of measurement light relative to reference reflection light, and accurately adjusting the light path of the laser interferometer according to the offset. The invention realizes automatic calibration of the laser interferometer light path through the coordinates measured in the PSD two-dimensional photosensitive position sensor, obtains the offset of the calibration light beam by utilizing the PSD two-dimensional photosensitive position sensor, thereby indirectly obtaining the offset of the measured light, realizing automatic adjustment of the light path, realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a PSD-based high-efficiency accurate calibration method for a laser interferometer light path.
Background
The multi-axis numerical control machine tool is widely applied to the processing of parts in the fields of aerospace, automobile manufacturing and the like, and often needs to have very high geometric accuracy which is mainly divided into two aspects: (1) initial geometric accuracy of the multi-axis numerical control machine tool; (2) in the use process of the multi-axis numerical control machine tool, the geometric accuracy of the multi-axis numerical control machine tool is reduced, and the current machine tool has the geometric accuracy.
In order to stabilize the geometric accuracy of the machine tool at a high level, it is necessary to periodically detect the geometric accuracy of the machine tool and compensate for the generated geometric error. The geometric error of the machine tool can be effectively obtained by utilizing a geometric error identification method and a detection instrument, and then the geometric error is pertinently compensated by an error compensation means. The detection instrument is most widely applied to laser interferometers, and comprises a measurement light source, a reference pyramid reflector, a moving pyramid reflector, a beam splitting interference mirror, a tripod and the like.
According to the research of error identification methods, a 9-line method, a 12-line method, a 15-line method and the like are provided at home and abroad mainly according to the characteristics of laser interferometers, the error identification methods are all that a plurality of line segments are established in space according to the geometric precision characteristics of a machine tool, the main shaft of the machine tool is driven to perform linear motion along the measuring line segments, and the geometric errors exposed by the main shaft of the machine tool in the detection process are detected. When the geometric accuracy of the machine tool is prepared in the early stage, the movable pyramid reflecting mirror is usually required to be fixed on a main shaft of the machine tool and move along with the main shaft of the machine tool. In addition, the reference pyramid reflector is connected and fixed with the interference beam splitter. The reference optical path length is stable and unchanged, the measuring optical path length changes along with the movement of the movable pyramid reflecting mirror, and the relative phase of the interference measuring light also changes, so that the actual moving distance of the machine tool spindle is obtained.
The problems existing in the current measuring method are mainly shown in that: (1) the spatial measurement line segments established according to the machine tool geometric error identification method have various directions, for example, the measurement line segment of a single translational axis is along the X, Y, Z direction of a machine tool coordinate system, and the measurement line segments of XZ, XY and XYZ multi-axis linkage form a certain inclination angle with each coordinate axis, and according to the measurement principle of the laser interferometer, the measurement light returned by the moving pyramid reflecting mirror and the reference reflected light of the reference pyramid reflecting mirror must be ensured to form interference at the receiving head of the laser interferometer, so that the light path needs to be calibrated by adjusting the position of the laser interferometer, and the measurement light can be ensured to return to the receiving head; (2) at present, the light path calibration mode is only that an engineer utilizes a tripod to finely adjust the position of the laser interferometer, the engineering experience is excessively relied on, and the efficiency and the accuracy of the adjustment process are low.
The difficulties restrict the application of the laser interferometer in the aspect of detecting the geometric accuracy of the machine tool, so that the design of the high-efficiency accurate calibration method of the laser interferometer light path is matched with an electric fine tuning platform and a PSD (position sensitive detector) photosensitive position sensor for use, and the method can assist the early calibration of the laser interferometer light path in the process of detecting the geometric accuracy of the translational axis of the machine tool and has important application prospect.
Disclosure of Invention
The invention aims to provide a high-efficiency accurate calibration method for a laser interferometer light path based on PSD (phase-sensitive detector).
The invention is mainly realized by the following technical scheme: a PSD-based laser interferometer light path efficient and accurate calibration method mainly comprises the following steps:
step S101: establishing a system light path, dividing emitted light emitted by a laser interferometer emission head into reflected light and transmitted light through an interference spectroscope, forming reference reflected light by the reflected light through a reference pyramid reflector, returning the reference reflected light to the interference spectroscope, and returning the reference reflected light to a laser interferometer receiving head; the transmitted light forms moving reflected light through the moving pyramid reflecting mirror, the moving reflected light returns to the reflecting mirror and is divided into calibration light and measuring light, the calibration light is projected on the PSD two-dimensional photosensitive position sensor to obtain two-dimensional coordinates, and the direction of the emitted light is the Y axis; the measuring light passes through the interference spectroscope and returns to the receiving head of the laser interferometer;
step S102: selecting a plurality of measuring points in the measuring line segment as calibration points, moving the main shaft of the machine tool to a first calibration point, adjusting the position of the laser interferometer by adopting a visual guidance method, projecting the calibration light on the PSD two-dimensional photosensitive position sensor to obtain the coordinate value of a calibration light spot, and then adjusting the position of the laser interferometer according to the coordinate value to project the calibration light spot on the axis of the two-dimensional coordinate;
step S103: the machine tool main shaft moves along the measuring line segment, and coordinate values of all calibration points are obtained through a PSD two-dimensional photosensitive position sensor, and the offset of the measuring light relative to the reference reflected light is calculated; if the offset is larger than the threshold value, the laser interferometer linearly moves along the X axis or the Z axis to calibrate the light path; otherwise, the laser interferometer is finely adjusted through rotating around the X axis or the Z axis to calibrate the light path.
The movable pyramid reflector is arranged on a machine tool main shaft, and the machine tool main shaft moves along a measuring line segment of the error identification method, so that the movable pyramid reflector is perpendicular to the measuring line segment, and the movable reflected light is parallel to the measuring line segment. The PSD two-dimensional photosensitive position sensor is fixed on a base of the electric fine adjustment platform and cannot be displaced.
The first calibration point is selected, the optical path of the optical path is shortest at the moment, and an engineer can easily control the electric fine-tuning platform to adjust the projection of the calibration light on the PSD through visual guidance. At the moment, the PSD obtains the coordinate value of the calibration light spot, the coordinate value is transmitted to the computer through the data acquisition card, and the computer controls the electric fine tuning platform to adjust the position of the laser interferometer, so that the calibration light spot is projected to the center of the PSD, and the rough calibration of the light path is completed.
In order to better implement the present invention, further, an equation of the standard optical offset and the measurement optical offset is established in step S101; when the movable pyramid reflector moves up and down along the Z axis in the ZY plane or rotates around the X axis in a pitching way, the measured light offset is equal to y, wherein y is the y coordinate value of the calibration light spot on the PSD two-dimensional photosensitive position sensor; when the movable pyramid emission mirror moves left and right along the X axis or rotates around the Z axis in a deflection mode in the XY plane, the measured light offset is equal to X, wherein X is the X coordinate value of the calibration light spot on the PSD two-dimensional photosensitive position sensor.
As shown in fig. 3-7, when the calibration light is projected at the center of the PSD, it is ensured that the measurement light returns to the center of the receiving head of the interferometer; the equation for establishing the calibration light coordinate value and the measurement light offset is as follows:
1) when the moving cube-corner mirror moves up and down along the z-axis or rotates in pitch around the x-axis in the ZY-plane:
the current measurement light offset b = y, where y is the y coordinate value of the calibration light spot on the PSD.
2) When the moving pyramid-shaped radioactive mirror moves left and right along the x axis or rotates around the deflection of the z axis in the XY plane:
the current measurement light offset d = x, where x is the x-coordinate value of the calibration light spot on the PSD.
In order to better implement the present invention, further, the method further includes step S104: and controlling the main shaft of the machine tool to move from a starting point to an end point along the measuring line segment, and finishing the calibration of the light path if the measuring light is always projected at the center of the receiving head of the laser interferometer and forms interference with the reference reflected light. And finishing the fine calibration of the laser interferometer light path, thereby ensuring that the calibration light spot is in the central range of the PSD.
In order to better implement the present invention, further, in step S102, the movable pyramid reflecting mirror is installed on the spindle of the machine tool, and the movable pyramid reflecting mirror is adjusted to be perpendicular to the measurement line segment according to the error identification method of the geometric accuracy of the machine tool; and uniformly selecting 10 measuring points on the measuring line segment as calibration points. 10 measuring points are selected from a measuring line segment of the machine tool geometric error identification method as calibration points and are uniformly distributed on the measuring line segment. The machine tool geometric error identification method comprises a 22-line method, a 14-line method, a 12-line method, a 9-line method and the like, and all the methods comprise parallel lines, face diagonals and body diagonals. The calibration points are required to be uniformly distributed on the measuring line segment, so that the reasonability of selecting the calibration points is ensured, and the success rate of light path calibration can be effectively ensured. The machine tool geometric error identification method is the prior art and is not an improvement point of the invention, so the details are not repeated.
For better implementation of the present invention, further, the threshold is 10 mm.
In order to better realize the invention, the laser interferometer further comprises a movable pyramid reflecting mirror, an electric fine adjustment platform, and a laser interferometer transmitting head, a laser interferometer receiving head, an interference spectroscope, a reference pyramid reflecting mirror and a spectroscope which are respectively arranged on the electric fine adjustment platform; the laser interferometer transmitting head and the laser interferometer receiving head are longitudinally arranged on one side close to the interference spectroscope side by side, a spectroscope is fixedly arranged on one side of the interference spectroscope, and a reference pyramid reflecting mirror is arranged at the top of the interference spectroscope; a PSD two-dimensional photosensitive position sensor is fixedly arranged below the spectroscope; the movable pyramid reflector is arranged on a main shaft of the machine tool. The electric fine-tuning platform comprises 2 precise electric control translation platforms and 2 precise electric control angle position platforms, and can realize linear motion along x and z axes and rotary motion around the x and z axes, wherein the linear precision is 5um, and the rotary precision is 8'. The electric fine tuning platform is an improvement point of the prior art and is not an improvement point of the invention, and therefore, the details are not repeated.
A laser interferometer is arranged on the electric fine adjustment platform and is used as a measurement light source; an interference spectroscope, a reference pyramid reflector and a spectroscope are connected together through bolts, and a PSD two-dimensional photosensitive position sensor is arranged below the spectroscope; fixing an interference spectroscope, a reference pyramid reflector and a spectroscope on a laser interferometer together, and fixing a PSD two-dimensional photosensitive position sensor on a base of an electric fine adjustment platform; and mounting the movable pyramid reflector on the main shaft of the machine tool. The reference reflected light can always return to the center of the receiving head, and the electric fine tuning platform can control the laser interferometer, the interference spectroscope, the reference pyramid reflector and the spectroscope to adjust the positions together; the PSD is fixed on a base of the electric fine tuning platform, and the position of the PSD is fixed; the movable pyramid reflector is fixed on the main shaft of the machine tool and is vertical to the measuring line segment; when the reflected light of the movable pyramid reflector returns through the spectroscope and the measuring light is positioned at the center of the receiving head of the interferometer, the calibration light is just projected at the center of the PSD.
And moving the main shaft of the machine tool to a first calibration point, controlling the electric fine tuning platform to adjust the position of the laser interferometer by adopting a visual guidance mode, so that the calibration light is projected on the PSD two-dimensional photosensitive position sensor, and automatically adjusting the position of the laser interferometer by the electric fine tuning platform through the coordinate value of the PSD, thereby realizing the coarse calibration of the light path of the laser interferometer.
The interference spectroscope is formed by splicing two 45-degree right-angle triple prisms,
in order to better realize the invention, further, the linear precision of the electric fine adjustment platform is 5mm, and the rotation precision is 8'; the power range of the laser interferometer is mw level, the wavelength range is 633nm, and the spot size is 6 mm.
In order to better implement the present invention, further, the size of the PSD two-dimensional photosensitive position sensor is 20 × 20mm, the spectral range is 320-.
The invention aims to overcome the defects of the prior art and provides a high-efficiency accurate calibration method for the light path of a laser interferometer, which is used in combination with an electric fine adjustment platform and a PSD (phase-sensitive detector), so that the common laser interferometer has the function of automatically adjusting the position, the light path calibration of the laser interferometer in the early stage of the geometric accuracy detection of the translation axis of a machine tool is facilitated, the automation of the light path calibration process is realized, and the time and the cost for the geometric accuracy detection of the translation axis of the machine tool are greatly reduced.
The invention relates to a PSD-based laser interferometer light path efficient and accurate calibration method which is used for assisting a common laser interferometer to finish light path calibration in the early stage of the geometric accuracy detection of a translation axis of a multi-axis numerical control machine. The calibration method comprises the following steps: (1) selecting typical measuring points from each measuring line segment as calibration points according to an error identification method of the geometric accuracy of the machine tool; (2) moving a main shaft of the machine tool to a first calibration point, and controlling an electric fine-tuning platform to adjust the position of the laser interferometer in a visual guidance mode to enable calibration light to be projected on a PSD two-dimensional photosensitive position sensor so as to realize rough calibration of a light path of the laser interferometer; (3) establishing an offset equation of the calibration light offset and the measurement light, moving a machine tool spindle to obtain a PSD coordinate value corresponding to each calibration point, and calculating the offset of the measurement light; (4) when the measured light offset is less than or equal to 10mm, controlling the electric fine tuning platform to rotate around an X axis or rotate around a Z axis; when the offset is larger than 10mm, controlling the electric micro-leveling platform to move linearly along an X axis or along a Z axis to finish the precise calibration of the light path; (5) and verifying the light path calibration effect and ensuring that the interference measurement light always returns to the center of the receiving head of the interferometer. The calibration method can be used in cooperation with a common laser interferometer, a PSD and an electric fine adjustment platform, is high in automation degree, flexible in adjustment and high in precision, can assist the common laser interferometer to finish spot position calibration in the early stage of single-axis positioning precision detection and multi-translational-axis linkage track positioning precision detection, and improves detection efficiency.
The invention analyzes the laser interferometer light path offset of ZY and XY planes, and takes the laser interferometer light path calibration in the early stage of the implementation process of the machine tool geometric error identification method as an example to explain the application of the invention. The skilled person can select the machine tool geometric error identification method and the electric fine-tuning platform by himself without exceeding the scope of the present invention, as long as the control accuracy of the electric fine-tuning platform is ensured.
The invention has the beneficial effects that:
(1) the invention realizes automatic calibration of the laser interferometer light path through the coordinates measured in the PSD two-dimensional photosensitive position sensor, and the invention obtains the offset of the calibration light beam by utilizing the PSD two-dimensional photosensitive position sensor, thereby indirectly obtaining the offset of the measured light and realizing automatic adjustment of the light path, thereby realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability;
(2) establishing an equation of the standard light offset and the measurement light offset in the step S101; when the movable pyramid reflector moves up and down along the Z axis in the ZY plane or rotates around the X axis in a pitching way, the measured light offset is equal to y, wherein y is the y coordinate value of the calibration light spot on the PSD two-dimensional photosensitive position sensor; when the movable pyramid emission mirror moves left and right along the X axis or rotates around the Z axis in a deflection mode in the XY plane, the measured light offset is equal to X, wherein X is the X coordinate value of the calibration light spot on the PSD two-dimensional photosensitive position sensor. The invention can effectively and quickly measure the offset of the measuring light by establishing the standard light offset and the measuring light offset equation, and can realize automatic light path adjustment, thereby realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability.
(3) In the step S102, the movable pyramid reflector is arranged on a main shaft of the machine tool, and the movable pyramid reflector is adjusted to be vertical to the measuring line segment according to an error identification method of geometric accuracy of the machine tool; and uniformly selecting 10 measuring points on the measuring line segment as calibration points. The calibration points are required to be uniformly distributed on the measuring line segment, so that the success rate of light path calibration can be effectively ensured by ensuring the reasonability of the selection of the calibration points, and the method has better practicability.
(4) The laser interferometer comprises a movable pyramid reflecting mirror, an electric fine adjustment platform, and a laser interferometer transmitting head, a laser interferometer receiving head, an interference spectroscope, a reference pyramid reflecting mirror and a spectroscope which are respectively arranged on the electric fine adjustment platform. The invention realizes mechanical automatic adjustment of the light path of the laser interferometer by controlling the electric fine adjustment platform, avoids uncertainty depending on experience, improves the calibration efficiency and precision and has better practicability.
Drawings
FIG. 1 is a schematic diagram of a laser interferometer of the present invention;
FIG. 2 is a schematic optical path diagram of the ZY plane of the optical path calibration process of the present invention;
FIG. 3 is a schematic diagram of the optical path of the ZY plane moving cube-corner reflector linear offset during the optical path calibration process of the present invention;
FIG. 4 is a schematic diagram of the optical path of the angular offset of the ZY plane moving cube-corner mirror during the optical path calibration process of the present invention;
FIG. 5 is a schematic optical path diagram of an XY plane of the optical path calibration process of the present invention;
FIG. 6 is a schematic diagram of the light path of straight line offset of the XY plane moving cube-corner reflector in the light path calibration process according to the present invention;
FIG. 7 is a schematic diagram of the light path of the XY plane moving cube-corner mirror angular offset during the light path calibration process of the present invention;
FIG. 8 is a flow chart of the present invention.
Wherein: 1-a laser interferometer emitter; 2-an interference spectroscope; 3-a reference cube-corner mirror; 4-a spectroscope; 5-moving the pyramid reflector; 6-PSD two-dimensional photosensitive position sensor; 7-laser interferometer receiving head, A-emitted light, B-reference reflected light, C-movement reflected light, D-calibration light and E-measurement light.
Detailed Description
Example 1:
a PSD-based laser interferometer light path efficient and accurate calibration method mainly comprises the following steps:
step S101: establishing a system optical path, as shown in fig. 1, dividing emitted light a emitted by a laser interferometer emitting head 1 into reflected light and transmitted light through an interference spectroscope 2, forming reference reflected light B by the reflected light through a reference pyramid reflecting mirror 3, returning the reference reflected light B to the interference spectroscope 2, and returning the reference reflected light B to a laser interferometer receiving head 7; the transmitted light forms moving reflected light C through the moving pyramid reflecting mirror 5 and returns to the reflecting mirror, and the moving reflected light C is divided into calibration light D and measuring light E, the calibration light D is projected on the PSD two-dimensional photosensitive position sensor 6 to obtain a two-dimensional coordinate, and the direction of the emitted light A is the Y axis; the measuring light E returns to the laser interferometer receiving head 7 through the interference spectroscope 2;
step S102: selecting a plurality of measuring points in the measuring line segment as calibration points, moving the main shaft of the machine tool to a first calibration point, adjusting the position of the laser interferometer by adopting a visual guidance method, projecting the calibration light D on the PSD two-dimensional photosensitive position sensor 6 to obtain the coordinate value of a calibration light D spot, and then adjusting the position of the laser interferometer according to the coordinate value to project the calibration light D spot on the axis of the two-dimensional coordinate;
step S103: the machine tool main shaft moves along the measuring line segment, and coordinate values of all calibration points are obtained through a PSD two-dimensional photosensitive position sensor 6, and the offset of measuring light E relative to reference reflected light B is calculated; if the offset is larger than the threshold value, the laser interferometer linearly moves along the X axis or the Z axis to calibrate the optical D path; otherwise, the laser interferometer is finely adjusted through rotating around the X axis or the Z axis to obtain a calibration light D path.
The invention realizes automatic calibration of the laser interferometer light path through the coordinates measured in the PSD two-dimensional photosensitive position sensor 6, obtains the offset of the calibration light beam D by utilizing the PSD two-dimensional photosensitive position sensor 6, thereby indirectly obtaining the offset of the measurement light E, realizing automatic adjustment of the light path, realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability.
Example 2:
in this embodiment, optimization is performed on the basis of embodiment 1, and as shown in fig. 2 to 4, an equation of the standard light offset and the measurement light E offset is established in step S101; when the movable pyramid reflector 5 moves up and down along the Z axis or rotates around the X axis in a pitching manner in the ZY plane, the offset of the measuring light E is equal to y, wherein y is a y coordinate value of a calibration light D spot on the PSD two-dimensional photosensitive position sensor 6; as shown in fig. 5-7, when the moving cube-corner mirror is moved left and right along the X-axis in the XY plane or is rotated with a yaw around the Z-axis, the amount of displacement of the measuring light E is equal to X, where X is the X-coordinate value of the calibration light D spot on the PSD two-dimensional photosensitive position sensor 6.
The invention obtains the offset of the calibration light D spot in the PSD relative to the zero point of the PSD coordinate system, namely the current coordinate value (x, y) through a data acquisition card. The data acquisition card and the data post-processing are the prior art and are not the improvement point of the invention, so the description is not repeated.
The interference spectroscope 2 is formed by splicing two 45-degree right-angle triangular prisms, the offset y of a calibration light D spot is the same as the offset b of a measuring light E beam, and an equation relation is established according to the change condition of the position of the movable pyramid reflector 5;
as shown in fig. 2, the moving cube-corner mirror 5 moves in the ZY-plane, when the moving cube-corner mirror 5 moves up and down the z-axis by a distance a-a' in the ZY-plane or tilts by an angle α around the x-axis as shown in fig. 4, the current measuring light E-beam offset b = y, where y is the current y-coordinate value of the PSD two-dimensional photosensitive position sensor 66.
As shown in fig. 5, the moving cube-corner mirror 5 moves in the XY plane, when the moving cube-corner mirror moves left and right in the XY plane by a distance c-c' along the x axis or swings around the z axis by a rotation angle β as shown in fig. 6, the current measuring light E beam offset d = x, where x is the current x coordinate value of the PSD two-dimensional photosensitive position sensor 66.
The invention can effectively and quickly measure the offset of the measuring light E through establishing the standard light offset and the measuring light E offset equation, and can realize automatic light path adjustment, thereby realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability.
Other parts of this embodiment are the same as embodiment 1, and thus are not described again.
Example 3:
in this embodiment, optimization is performed on the basis of embodiment 2, as shown in fig. 8, the threshold is 10mm, and the method further includes step S104: and controlling the main shaft of the machine tool to move from a starting point to an end point along the measuring line segment, and finishing the optical path calibration if the measuring light E is projected at the center of the laser interferometer receiving head 7 all the time and forms interference with the reference reflected light B. The machine tool spindle moves along the measuring line segment of the error identification method, and the moving pyramid reflector 5 is ensured to be perpendicular to the measuring line segment, so that the moving reflected light C is parallel to the measuring line segment.
The invention realizes automatic calibration of the laser interferometer light path through the coordinates measured in the PSD two-dimensional photosensitive position sensor 6, obtains the offset of the calibration light beam D by utilizing the PSD two-dimensional photosensitive position sensor 6, thereby indirectly obtaining the offset of the measurement light E, realizing automatic adjustment of the light path, realizing high-precision light path calibration, improving the calibration efficiency and precision and having better practicability.
The other parts of this embodiment are the same as those of embodiment 2, and thus are not described again.
Example 4:
in this embodiment, optimization is performed on the basis of any one of embodiments 1 to 3, and as shown in fig. 1, the laser interferometer includes a moving cube-corner reflector 5, an electric fine-tuning platform, and a laser interferometer transmission head 1, a laser interferometer reception head 7, an interference spectroscope 2, a reference cube-corner reflector 3, and a spectroscope 4 which are respectively arranged on the electric fine-tuning platform; the laser interferometer transmitting head 1 and the laser interferometer receiving head 7 are longitudinally arranged side by side at one side close to the interference spectroscope 2, a spectroscope 4 is fixedly arranged at one side of the interference spectroscope 2, and a reference pyramid reflecting mirror 3 is arranged at the top of the interference spectroscope 2; a PSD two-dimensional photosensitive position sensor 6 is fixedly arranged below the spectroscope 4; the movable pyramid reflector 5 is arranged on a main shaft of the machine tool.
And a laser is arranged on the electric fine adjustment platform to be used as a measuring light E source. The electric fine-tuning platform comprises 2 precise electric control translation platforms and 2 precise electric control angle position platforms, and can realize linear motion along x and z axes and rotary motion around the x and z axes. The electric fine tuning platform is an improvement point of the prior art and is not an improvement point of the invention, and therefore, the details are not repeated.
The interference spectroscope 2, the reference pyramid reflector 3 and the spectroscope 4 are connected together through bolts; the interference spectroscope 2 and the spectroscope 4 are respectively cube-shaped beam splitters and are formed by splicing two 45-degree right-angle triple prisms; the pyramid reflector is a tetrahedron made up of three orthogonal isosceles right triangles (reflecting surfaces) and one equilateral triangle (refracting surface). The PSD is a two-dimensional PSD, the photosensitive surface is an important component of the PSD, the calibration light D beam is projected on the PSD to form a light spot, and the current x coordinate and the current y coordinate are measured and used as displacement information of the calibration light D beam. The common positions of the laser, the interference spectroscope 2, the reference pyramid reflecting mirror 3 and the spectroscope 4 are controlled by the electric fine-tuning platform, namely the relative positions among the laser, the interference spectroscope 2, the reference pyramid reflecting mirror 3 and the spectroscope 4 are unchanged.
And (3) a coarse calibration stage: moving a main shaft of a machine tool to a first calibration point, manually controlling an electric fine-tuning platform to adjust the position of a laser interferometer by adopting a visual guidance mode, easily controlling the electric fine-tuning platform to adjust and project calibration light D on a PSD two-dimensional photosensitive position sensor 6 by an engineer, acquiring coordinate values of a calibration light D spot by the PSD two-dimensional photosensitive position sensor 6, transmitting the coordinate values to a computer by a data acquisition card, controlling the electric fine-tuning platform by the computer to adjust the position of the laser interferometer, projecting the calibration light D spot at the center of a PSD, and ensuring that measurement light E can return to the center of a receiving head.
The invention realizes mechanical automatic adjustment of the light path of the laser interferometer by controlling the electric fine adjustment platform, avoids uncertainty depending on experience, improves the calibration efficiency and precision and has better practicability.
Other parts of this embodiment are the same as any of embodiments 1 to 3, and thus are not described again.
Example 5:
in the embodiment, optimization is performed on the basis of embodiment 4, and the linear precision and the rotation precision of the electric fine adjustment platform are respectively 5mm and 8'; the power range of the laser interferometer is mw level, the wavelength range is 633nm, and the spot size is 6 mm. The size of the PSD two-dimensional photosensitive position sensor 6 is 20X20mm, the spectral range is 320-1100nm, and the linear error range is +/-0.3%.
The other parts of this embodiment are the same as those of embodiment 4, and thus are not described again.
Example 6:
in this embodiment, optimization is performed on the basis of embodiment 1, in step S102, the movable pyramid reflecting mirror 5 is mounted on the spindle of the machine tool, and the movable pyramid reflecting mirror 5 is adjusted to be perpendicular to the measurement line segment according to the error identification method of the geometric accuracy of the machine tool; and uniformly selecting 10 measuring points on the measuring line segment as calibration points. The calibration points are required to be uniformly distributed on the measuring line segment, so that the success rate of light path calibration can be effectively ensured by ensuring the reasonability of the selection of the calibration points, and the method has better practicability.
Other parts of this embodiment are the same as those of embodiment 1, and thus are not described again.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are included in the scope of the present invention.
Claims (8)
1. A PSD-based laser interferometer light path efficient and accurate calibration method is characterized by mainly comprising the following steps:
step S101: establishing a system light path, dividing emitted light (A) emitted by a laser interferometer emission head (1) into reflected light and transmitted light through an interference spectroscope (2), forming reference reflected light (B) by the reflected light through a reference pyramid reflector (3) and returning to the interference spectroscope (2) and then returning to a laser interferometer receiving head (7); the transmitted light forms moving reflected light (C) through the moving pyramid reflector (5) and returns to the reflector to be divided into calibration light (D) and measuring light (E), the calibration light (D) is projected on a PSD two-dimensional photosensitive position sensor (6) to obtain a two-dimensional coordinate, and the direction of the emitted light (A) is a Y axis; the measuring light (E) returns to a receiving head (7) of the laser interferometer through the interference spectroscope (2);
step S102: selecting a plurality of measuring points in a measuring line segment as calibration points, moving a machine tool main shaft to a first calibration point, adjusting the position of a laser interferometer by adopting a visual guidance method, projecting calibration light (D) on a PSD two-dimensional photosensitive position sensor (6) to obtain a coordinate value of a calibration light (D) spot, and then adjusting the position of the laser interferometer according to the coordinate value to project the calibration light (D) spot on the axis of a two-dimensional coordinate;
step S103: the machine tool main shaft moves along the measuring line segment, and coordinate values of all calibration points are obtained through a PSD two-dimensional photosensitive position sensor (6) and the offset of the measuring light (E) relative to the reference reflected light (B) is calculated; if the offset is larger than the threshold value, the laser interferometer moves linearly along the X axis or the Z axis to calibrate the light (D) path; otherwise, the laser interferometer is used for finely adjusting the calibration light path by rotating around the X axis or the Z axis.
2. The method for high-efficiency and accurate calibration of the optical path of the PSD-based laser interferometer according to claim 1, wherein an equation of the standard optical offset and the measurement optical (E) offset is established in the step S101; when the movable pyramid reflector (5) moves up and down along the Z axis in the ZY plane or rotates around the X axis in a pitching way, the offset of the measuring light (E) is equal to y, wherein y is a y coordinate value of a calibration light (D) spot on the PSD two-dimensional photosensitive position sensor (6); when the movable pyramid emission mirror moves left and right along the X axis or rotates around the Z axis in a deflection way in the XY plane, the offset of the measuring light (E) is equal to X, wherein X is the X coordinate value of the calibration light (D) spot on the PSD two-dimensional photosensitive position sensor (6).
3. The method for high-efficiency accurate calibration of the optical path of the PSD-based laser interferometer according to claim 2, further comprising the step S104: and controlling the main shaft of the machine tool to move from a starting point to an end point along the measuring line segment, and finishing the optical path calibration if the measuring light (E) is always projected at the center of the receiving head (7) of the laser interferometer and forms interference with the reference reflected light (B).
4. The method for high-efficiency and accurate calibration of the optical path of the PSD-based laser interferometer according to claim 1, characterized in that in step S102, the moving cube-corner reflector (5) is mounted on the spindle of the machine tool, and the moving cube-corner reflector (5) is adjusted to be perpendicular to the measuring line segment according to the error identification method of the geometric accuracy of the machine tool; and uniformly selecting 10 measuring points on the measuring line segment as calibration points.
5. The method for high-efficiency accurate calibration of the optical path of the PSD-based laser interferometer according to any of the claims 1-4, wherein the threshold value is 10 mm.
6. The method for high-efficiency accurate calibration of the optical path of the PSD-based laser interferometer according to claim 1, wherein the laser interferometer comprises a moving cube-corner reflecting mirror (5), an electric fine tuning platform, and a laser interferometer transmitting head (1), a laser interferometer receiving head (7), an interference beam splitter (2), a reference cube-corner reflecting mirror (3) and a beam splitter (4) which are respectively arranged on the electric fine tuning platform; the laser interferometer transmitting head (1) and the laser interferometer receiving head (7) are longitudinally arranged side by side at one side close to the interference spectroscope (2), a spectroscope (4) is fixedly arranged at one side of the interference spectroscope (2), and a reference pyramid reflecting mirror (3) is arranged at the top of the interference spectroscope (2); a PSD two-dimensional photosensitive position sensor (6) is fixedly arranged below the spectroscope (4); the movable pyramid reflector (5) is arranged on a main shaft of the machine tool.
7. The method for high-efficiency and accurate calibration of the PSD-based laser interferometer optical path as claimed in claim 6, wherein the linear precision of the electric fine tuning platform is 5mm, and the rotational precision is 8'; the power range of the laser interferometer is mw level, the wavelength range is 633nm, and the spot size is 6 mm.
8. The method as claimed in claim 6, wherein the PSD two-dimensional photosensitive position sensor (6) has a size of 20X20mm, a spectral range of 320 and 1100nm, and a linearity error range of + -0.3%.
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