CN109631767A - Range unit and distance measuring method - Google Patents
Range unit and distance measuring method Download PDFInfo
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- CN109631767A CN109631767A CN201811521298.5A CN201811521298A CN109631767A CN 109631767 A CN109631767 A CN 109631767A CN 201811521298 A CN201811521298 A CN 201811521298A CN 109631767 A CN109631767 A CN 109631767A
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- laser
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- plane mirror
- range unit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of range unit and distance measuring methods, wherein the range unit includes laser emitting elements, optical path adjusting element, reference element, element under test and light intensity detection element.Laser emitting elements include laser, the light source as high-precision fine motion range unit；Optical path adjusting element includes one and includes Shu Jing, a beam splitter and a focus lamp, is respectively used to the expansion, beam splitting and focusing of light beam；Reference element, including a plane mirror, linear guide, ball screw assembly, and rotating handles, plane mirror can be moved along guide rail direction；Element under test, including a plane mirror, are mounted on measured workpiece surface；Light intensity detection element, including photodetector and measuring light power instrument, for detecting and receive the light beam by focus lamp, measuring the optical power of this light beam and showing record, the resolution ratio of range unit and distance measuring method provided by the invention substantially improves the status of current high-acruracy survey means scarcity up to 0.01 μm.
Description
Technical field
The present invention relates to ranging fields, and in particular, to a kind of range unit and distance measuring method, more particularly to it is a kind of high-precision
Spend fine motion range unit and distance measuring method.
Background technique
In spacecraft components manufacture and test process, it usually needs measure size the parameters such as error, Form and position error, also
Need to measure size distortion of the key part in high temperature variation.It is crucial on active service star with the raising of satellite resolution ratio
The static size of components constantly rises with allowing to deform size index, if the superhigh precision of key part can be realized on ground
Measurement can find Element Design, manufacture in time, test the scale error generated in the process and size distortion and adjust in time,
The benchmark closest to true value is provided for whole star assembling and setting, must utmostly guarantee the real work energy that satellite is run in track
Power.
Since most of spacecraft is tested component structural multiplicity complexity, scaled fine, the distance measuring method of current main-stream is
Three-coordinates measuring machine or laser tracker obtain the size of tested dimension by these instruments, through instrument under different operating conditions
The difference for measuring size calculates deformation.The measurement accuracy of now widely used three-coordinates measuring machine is about 1 μm, three-dimensional coordinates measurement
Instrument is both needed to manual sampling site and establishes workpiece coordinate system when measuring work every time, inevitably introduce when calculating workpiece deformation
Coordinate system transformed error greatly reduces the measurement accuracy to size distortion, and it is increasingly accurate to have been unable to meet spacecraft part
Size index request.The resolution ratio of three-coordinates measuring machine is 0.1 μm, and 0.1 μm of microsize may be much smaller than for deflection
Part still lacks the ability of precise measurement.Therefore, it is necessary to application a kind of new high-precision fine motion range unit and ranging side
Method.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of range unit and distance measuring methods.
A kind of range unit provided according to the present invention, including laser emitting elements, optical path adjusting element, measurement part with
And light intensity detection element；
The measurement portion point includes reference element and element under test；
The laser emitting elements transmitting laser optical path on be disposed with optical path adjusting element, measurement part and
Light intensity detection element.
Preferably:
The laser emitting elements include laser；
The optical path adjusting element includes Shu Jing, beam splitter and focus lamp；It is described to include Shu Jing, beam splitter and focusing
Mirror is successively set on the laser optical path of the laser transmitting；
The reference element includes the first plane mirror, linear guide, ball screw assembly, and rotating handles；Described first is flat
Face mirror is arranged in linear guide and can move in a straight line with ball screw assembly,；First plane mirror can be moved by hand-held
Position dynamic and/or that setting is moved to reach by rotating handles；
The element under test includes the second plane mirror；
The light intensity detection element includes photodetector and measuring light power instrument；
Laser extends the diameter of light beam by including beam mirror, is divided into two bundles after through beam splitter from after laser transmitting, respectively
It is denoted as the first light beam and the second light beam；First light beam extends to reference element direction, and anti-after the reflection of the first plane mirror
To extension, focus lamp is reached through beam splitter, subsequent line focus mirror focusing converges at light intensity detection element；Second light beam to
Element under test direction extends, and oppositely extending after the reflection of the second plane mirror, reflects through beam splitter and reaches focus lamp, through poly- after
Burnt mirror focusing converges at light intensity detection element.
Preferably:
The optical axis coincidence for including beam mirror and element under test in the laser emitting elements, optical path adjusting element；The light
The optical axis weight of detecting element, the beam splitter in optical path adjusting element, the focus lamp in optical path adjusting element and reference element by force
It closes；
The optical path adjusting element further includes adjustment module, and the height of optical path adjusting element and position can be by adjusting mould
Block is adjusted；
First line is vertical with the second line, wherein first line is the company of laser emitting elements and element under test
Line, the second line are the line of light intensity detection element and reference element.
Preferably:
The laser be non-frequency stabilization type He-Ne laser, can launch wavelength be 632.8nm laser；
The face type PV value of first plane mirror and the second plane mirror is superior toReflectivity is superior to 95%；
Wherein PV value indicates mirror surface irregularity degree, the i.e. difference in height of the highest point and the lowest point on surface；λ indicates laser institute
Issue the wavelength of laser.
Preferably:
The first unit scales are carved in the linear guide, first unit scales are not more than 0.01mm；
The second unit scales are carved on the rotating handles, second unit scales are not more than 3.6 °；
It can be realized movement of first plane mirror in linear guide by rotating rotating handles, when rotating handles rotate one
Zhou Shi, the distance of the first plane mirror mobile first unit scales in linear guide；
The linear guide and the positioning accuracy of ball screw assembly, are not less than 0.1 μm, and motion range is not less than 200mm.
Preferably:
The element under test is fixedly linked by adhesive and/or connector with measured workpiece；
The focal point of focus lamp is arranged in the photodetector；
The range of the measuring light power instrument can be adjusted between μ W, mW and W, and precision is one decimal place, response
Time is less than 1s.
A kind of distance measuring method provided according to the present invention is included the following steps: using above-mentioned range unit
Step 1: element under test is fixed on measured workpiece；
Step 2: adjustment keeps the centre-height of all optical components in range unit identical, opens laser, passes through
The adjustment module of optical path adjusting element adjusts height, and the reflection light point of whole device optical path is made to return the delivery outlet position of laser
It sets, and outgoing beam, the reflected beams are overlapped on beam splitter mirror surface；
Step 3: adjustment reference element makes reference element and element under test be respectively less than 0.1cm to the range difference of beam splitter；
Step 4: fixed reference position of components；
Step 5: applying operating condition of test to workpiece, reads the change curve of measuring light power instrument registration during the test；
Step 6: the workpiece under operating condition of test is calculated in tested dimension according to the change curve of measuring light power instrument registration
Micro-displacement or micro-strain.
Preferably, in the step 3, range difference is measured by graduated scale.
Preferably, it is achieved by the steps of the fixation of reference element position in the step 4:
It rotates rotating handles and finely tunes reference element position, observation measuring light power instrument registration variation, until measuring light power
When instrument indicating value reaches maximum, fixed reference position of components.
Preferably, the calculating being achieved by the steps of in step 6:
Measuring light power instrument registration is in cyclically-varying after applying operating condition of test to workpiece, reads the change curve of the registration
Periodicity be denoted as N, measuring light power instrument registration when off-test is denoted as I ', then according to the transformation of interference light intensity and optical path difference
Relationship can obtain the calculated relationship of fine motion distance, delta L Yu registration I ':
Wherein, λ indicates the wavelength of laser, I1、I2Respectively indicate the light intensity of the first light beam, the second light beam.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, range unit structure provided by the invention is simple, optical path is clear, advantageously reduces operation difficulty and maintenance difficulties；
2, the precision of distance measuring method provided by the invention is up to 0.01 μm, can carry out to spacecraft precision component size distortion
High-acruracy survey can be widely applied on spacecraft fining part, will substantially improve current high-acruracy survey means scarcity
Status.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the schematic diagram of range unit provided by the invention；
Fig. 2 is the light path principle schematic diagram of range unit provided by the invention；
Fig. 3 is the schematic diagram of reference element part in range unit provided by the invention；
Fig. 4 is the flow diagram of distance measuring method provided by the invention.
It is shown in figure:
Laser emitting elements 10
Optical path adjusting element 20
Reference element 30
Element under test 40
Light intensity detection element 50
Laser 11
Include beam mirror 21
Beam splitter 22
Focus lamp 23
First plane mirror 31
Linear guide 32
Ball screw assembly, 33
Rotating handles 34
Second plane mirror 41
Photodetector 51
Measuring light power instrument 52
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection scope.
A kind of range unit provided according to the present invention, including laser emitting elements 10, optical path adjusting element 20, measurement portion
Point and light intensity detection element 50；The measurement portion point includes reference element 30 and element under test 40；In the Laser emission member
Optical path adjusting element 20, measurement part and light intensity detection element 50 are disposed on the laser optical path that part 10 emits.
Preferably, the laser emitting elements 10 include laser 11；The optical path adjusting element 20 include beam mirror 21,
Beam splitter 22 and focus lamp 23；Beam mirror 21, beam splitter 22 and the focus lamp 23 of including is successively set on the laser 11
On the laser optical path of transmitting；The reference element 30 includes the first plane mirror 31, linear guide 32, ball screw assembly, 33 and rotation
Handle hand 34；First plane mirror 31 is arranged in linear guide 32 and can do straight line fortune with ball screw assembly, 33
It is dynamic；First plane mirror 31 can be by holding movement and/or passing through the mobile position that accurately arrival is set of rotating handles 34；It is described
Element under test 40 includes the second plane mirror 41；The light intensity detection element 50 includes photodetector 51 and measuring light power instrument
52；Laser extends the diameter of light beam by including beam mirror 21, is divided into two bundles after through beam splitter 22 from after the transmitting of laser 11, point
It is not denoted as the first light beam and the second light beam；First light beam extends to 30 direction of reference element, and anti-through the first plane mirror 31
It penetrates rear oppositely extending, reaches focus lamp 23 through beam splitter 22, the focusing of subsequent line focus mirror 23 converges at light intensity detection element 50；
Second light beam extends to 40 direction of element under test, and oppositely extending after the reflection of the second plane mirror 41, anti-through beam splitter 22
It is mapped to up to focus lamp 23, the subsequent focusing of line focus mirror 23 converges at light intensity detection element 50.
Specifically, the laser emitting elements 10, include beam mirror 21 and element under test 40 in optical path adjusting element 20
Optical axis coincidence；The focusing in beam splitter 22, optical path adjusting element 20 in the light intensity detection element 50, optical path adjusting element 20
The optical axis coincidence of mirror 23 and reference element 30；The optical path adjusting element 20 further includes adjustment module, optical path adjusting element 20
Height and position can be adjusted by adjustment module；First line is vertical with the second line, wherein first line
For the line of laser emitting elements 10 and element under test 40, the second line is the company of light intensity detection element 50 and reference element 30
Line.The laser 11 be non-frequency stabilization type He-Ne laser, can launch wavelength be 632.8nm laser；First plane
The face type PV value of mirror 31 and the second plane mirror 41 is superior toReflectivity is superior to 95%；Wherein PV value indicates mirror surface out-of-flatness
Degree, the i.e. difference of the peak and minimum on surface；The wavelength of λ expression the issued laser of laser 11.In the linear guide 32
The first unit scales are carved with, first unit scales are not more than 0.01mm；The second unit quarter is carved on the rotating handles 34
Degree, second unit scales are not more than 3.6 °；It can be realized the first plane mirror 31 by rotation rotating handles 34 to lead in straight line
Movement on rail 32, when rotating handles 34 rotate one week, the first plane mirror 31 mobile first unit in linear guide 32 is carved
The distance of degree；The linear guide 32 and the positioning accuracy of ball screw assembly, 33 are not less than 0.1 μm, and motion range is not less than
200mm.The element under test 40 is fixedly linked by adhesive and/or connector with measured workpiece；The photodetector 51
The focal point of focus lamp 23 is set；The range of the measuring light power instrument 52 can be adjusted between μ W, mW and W, and precision is
One decimal place, response time are less than 1s.
A kind of distance measuring method provided according to the present invention is included the following steps: using above-mentioned range unit
Step 1: element under test 40 is fixed on measured workpiece；
Step 2: adjustment keeps the centre-height of all optical components in range unit identical, opens laser 11, leads to
The adjustment module for crossing optical path adjusting element 20 adjusts height, and the reflection light point of whole device optical path is made to return the output of laser 11
Mouth position, and outgoing beam, the reflected beams are overlapped on 22 mirror surface of beam splitter；
Step 3: adjustment reference element 30 keeps reference element 30 and element under test 40 small to the range difference of beam splitter 22
In 0.1cm；
Step 4: 30 position of fixed reference element；
Step 5: applying operating condition of test to workpiece, and it is bent to read the variation of 52 registration of measuring light power instrument during the test
Line；
Step 6: the workpiece under operating condition of test is calculated in tested dimension according to the change curve of 52 registration of measuring light power instrument
On micro-displacement or micro-strain.
More specifically, measuring range difference by graduated scale in the step 3.
It is achieved by the steps of the fixation of 30 position of reference element in the step 4:
It rotates rotating handles 34 and finely tunes 30 position of reference element, observation 52 registration of measuring light power instrument variation, until light function
When 52 indicating value of rate measuring instrument reaches maximum, 30 position of fixed reference element.
The calculating being achieved by the steps of in step 6:
Measuring light power instrument registration is in cyclically-varying after applying operating condition of test to workpiece, reads the change curve of the registration
Periodicity be denoted as N, measuring light power instrument registration when off-test is denoted as I ', then according to the transformation of interference light intensity and optical path difference
Relationship can obtain the calculated relationship of fine motion distance, delta L Yu registration I ':
Wherein, λ indicates the wavelength of laser, I1、I2Respectively indicate the light intensity of the first light beam described previously, the second light beam.
Further, the principle of the fixed reference position of components method of the step 4 is as follows: reference element the reflected beams
Light intensity be denoted as A, the light intensity of element under test the reflected beams is denoted as B, wavelength λ, what when two beam directional light vertical incidence was formed etc.
The light distribution of interference of inclining is denoted as I, and the optical path difference of two beam directional lights is denoted as Δ L, if by a certain beam interferometer light communication process
The SPA sudden phase anomalies generated on the reflecting surface are regarded as " half-wave loss ", and are included in the light path of the Shu Guang with the length of λ/2, interference light
The transformation relation of strong I and optical path difference L is such as following formula:
As shown in Figures 1 to 4, the height of optical path adjusting element 20 and position can be adjusted by adjustment module, be made
The center for obtaining each lens is in sustained height.Reference element 30 is mounted on horizontal table by screw, when Job readiness
Can shift position as needed, by positioning by block, outside holds out against to determine position by holding screw the inside of linear guide 32,
It is kept fixed during the work time.Plane mirror 31 is mounted on ball screw assembly, 33 by 4 M6 soket head cap screws, ball-screw
Secondary 33 side mounting knobs, rotating handles can make plane mirror 31 for linear motion along guide rail.Linear guide 32 is carved with resolution ratio
Plane mirror 31 thereon mobile 0.01mm when the handle 34 of the scale of 0.01mm, 33 side of ball screw assembly, rotates a circle, one week
Share 100 lattice, the corresponding scale of every lattice is 0.0001mm, and position of the plane mirror 31 in linear guide 32 can be by above-mentioned two scale
Phase adduction is estimated reading one and is obtained.The positioning accuracy of linear guide 32 is no more than 0.1 μm, and motion range is not less than 200mm.
In the description of the present application, it is to be understood that term " on ", "front", "rear", "left", "right", " is erected at "lower"
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is orientation based on the figure or position
Relationship is set, description the application is merely for convenience of and simplifies description, rather than the device or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow
Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase
Mutually combination.
Claims (10)
1. a kind of range unit, which is characterized in that including laser emitting elements (10), optical path adjusting element (20), measurement part
And light intensity detection element (50)；
The measurement portion point includes reference element (30) and element under test (40)；
Optical path adjusting element (20), measurement part are disposed on the laser optical path of the laser emitting elements (10) transmitting
And light intensity detection element (50).
2. range unit according to claim 1, it is characterised in that:
The laser emitting elements (10) include laser (11)；
The optical path adjusting element (20) includes Shu Jing (21), beam splitter (22) and focus lamp (23)；It is described to include Shu Jing
(21), beam splitter (22) and focus lamp (23) are successively set on the laser optical path of the laser (11) transmitting；
The reference element (30) includes the first plane mirror (31), linear guide (32), ball screw assembly, (33) and rotation handle
Hand (34)；First plane mirror (31) is arranged on linear guide (32) and can do straight line with ball screw assembly, (33)
Movement；First plane mirror (31) can move to reach the position of setting by hand-held movement and/or by rotating handles (34)；
The element under test (40) includes the second plane mirror (41)；
The light intensity detection element (50) includes photodetector (51) and measuring light power instrument (52)；
After laser emits from laser (11), the diameter of light beam is extended by including Shu Jing (21), is divided into after through beam splitter (22)
Two beams are denoted as the first light beam and the second light beam respectively；First light beam extends to reference element (30) direction, and flat through first
It is oppositely extending after face mirror (31) reflection, focus lamp (23) are reached through beam splitter (22), subsequent line focus mirror (23) focuses convergence
In light intensity detection element (50)；Second light beam extends to element under test (40) direction, and reflects through the second plane mirror (41)
It is oppositely extending afterwards, it is reflected through beam splitter (22) and reaches focus lamp (23), subsequent line focus mirror (23) focuses and converges at light intensity detection
Element (50).
3. range unit according to claim 2, it is characterised in that:
The optical axis for including Shu Jing (21) and element under test (40) in the laser emitting elements (10), optical path adjusting element (20)
It is overlapped；In beam splitter (22), optical path adjusting element (20) in the light intensity detection element (50), optical path adjusting element (20)
The optical axis coincidence of focus lamp (23) and reference element (30)；
The optical path adjusting element (20) further includes adjustment module, and the height of optical path adjusting element (20) and position can pass through tune
Section module is adjusted；
First line is vertical with the second line, wherein first line is laser emitting elements (10) and element under test (40)
Line, the second line are the line of light intensity detection element (50) and reference element (30).
4. range unit according to claim 3, it is characterised in that:
The laser (11) be non-frequency stabilization type He-Ne laser, can launch wavelength be 632.8nm laser；
The face type PV value of first plane mirror (31) and the second plane mirror (41) is superior toReflectivity is superior to 95%；
Wherein PV value indicates mirror surface irregularity degree, the i.e. difference in height of the highest point and the lowest point on surface；λ indicates laser (11) institute
Issue the wavelength of laser.
5. range unit according to any one of claim 2 to 4, it is characterised in that:
The first unit scales are carved on the linear guide (32), first unit scales are not more than 0.01mm；
The second unit scales are carved on the rotating handles (34), second unit scales are not more than 3.6 °；
It can be realized movement of the first plane mirror (31) on linear guide (32) by rotating rotating handles (34), when rotation handle
When hand (34) rotates one week, the distance of the first plane mirror (31) mobile first unit scales on linear guide (32)；
The positioning accuracy of the linear guide (32) and ball screw assembly, (33) is not less than 0.1 μm, and motion range is not less than
200mm。
6. range unit according to any one of claim 2 to 4, it is characterised in that:
The element under test (40) is fixedly linked by adhesive and/or connector with measured workpiece；
Focal point of photodetector (51) setting in focus lamp (23)；
The range of the measuring light power instrument (52) can be adjusted between μ W, mW and W, and precision is one decimal place, response
Time is less than 1s.
7. a kind of distance measuring method utilizes range unit described in any one of any one of claims 1 to 66, which is characterized in that including as follows
Step:
Step 1: element under test (40) is fixed on measured workpiece；
Step 2: adjustment keeps the centre-height of all optical components in range unit identical, opens laser (11), passes through
The adjustment module of optical path adjusting element (20) adjusts height, and the reflection light point of whole device optical path is made to return the defeated of laser (11)
Outlet port, and outgoing beam, the reflected beams are overlapped on beam splitter (22) mirror surface；
Step 3: adjustment reference element (30) makes reference element (30) and element under test (40) arrive the range difference of beam splitter (22)
Respectively less than 0.1cm；
Step 4: fixed reference element (30) position；
Step 5: applying operating condition of test to workpiece, reads the change curve of measuring light power instrument (52) registration during the test；
Step 6: the workpiece under operating condition of test is calculated in tested dimension according to the change curve of measuring light power instrument (52) registration
Micro-displacement or micro-strain.
8. distance measuring method according to claim 7, which is characterized in that in the step 3, measure distance by graduated scale
Difference.
9. distance measuring method according to claim 7, which is characterized in that be achieved by the steps of benchmark in the step 4
The fixation of element (30) position:
It rotates rotating handles (34) and finely tunes reference element (30) position, observation measuring light power instrument (52) registration variation, until light
When power measurement instruments (52) indicating value reaches maximum, fixed reference element (30) position.
10. distance measuring method according to claim 7, which is characterized in that the calculating being achieved by the steps of in step 6:
Measuring light power instrument registration is in cyclically-varying after applying operating condition of test to workpiece, reads the week of the change curve of the registration
Issue is denoted as N, and measuring light power instrument registration when off-test is denoted as I ', then according to the transformation relation of interference light intensity and optical path difference
It can obtain the calculated relationship of fine motion distance, delta L Yu registration I ':
Wherein, λ indicates the wavelength of laser, I1、I2Respectively indicate the light intensity of the first light beam, the second light beam.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110174662A (en) * | 2019-05-31 | 2019-08-27 | 山东省科学院海洋仪器仪表研究所 | A kind of three beam splitting laser emitter of high-precision for laser radar |
| CN112284261A (en) * | 2020-10-10 | 2021-01-29 | 中国电子科技集团公司第十一研究所 | Laser infrared device optical axis offset detecting system |
| CN114978301A (en) * | 2022-03-28 | 2022-08-30 | 昂纳信息技术（深圳）有限公司 | Optical test system, calibration method thereof and calibration piece |
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| CN1431478A (en) * | 2003-02-14 | 2003-07-23 | 中国科学院上海光学精密机械研究所 | Micro-displacement real-time interferometer |
| CN101033939A (en) * | 2007-02-07 | 2007-09-12 | 中国科学院上海光学精密机械研究所 | Micro-displacement high-precision real-time interferometer |
| CN102706282A (en) * | 2012-06-25 | 2012-10-03 | 无锡迈福光学科技有限公司 | Laser interference range finder |
| CN107121092A (en) * | 2017-05-24 | 2017-09-01 | 西安交通大学 | A kind of system and method for laser interference detection bearing ball face type error |
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| CN112284261A (en) * | 2020-10-10 | 2021-01-29 | 中国电子科技集团公司第十一研究所 | Laser infrared device optical axis offset detecting system |
| CN114978301A (en) * | 2022-03-28 | 2022-08-30 | 昂纳信息技术（深圳）有限公司 | Optical test system, calibration method thereof and calibration piece |
| CN114978301B (en) * | 2022-03-28 | 2023-09-12 | 昂纳科技(深圳)集团股份有限公司 | Optical test system, calibration method thereof and calibration piece |
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