CN109631767B - Distance measuring method - Google Patents
Distance measuring method Download PDFInfo
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- CN109631767B CN109631767B CN201811521298.5A CN201811521298A CN109631767B CN 109631767 B CN109631767 B CN 109631767B CN 201811521298 A CN201811521298 A CN 201811521298A CN 109631767 B CN109631767 B CN 109631767B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a distance measuring device and a distance measuring method, wherein the distance measuring device comprises a laser emitting element, a light path adjusting element, a reference element, an element to be measured and a light intensity detecting element. The laser emitting element comprises a laser which is used as a light source of the high-precision micro-motion distance measuring device; the light path adjusting element comprises a beam-scraping mirror, a beam splitter and a focusing mirror, which are respectively used for expanding, splitting and focusing the light beam; the reference element comprises a plane mirror, a linear guide rail, a ball screw pair and a rotating handle, wherein the plane mirror can move along the direction of the guide rail; the element to be measured comprises a plane mirror and a measuring device, wherein the plane mirror is arranged on the surface of the workpiece to be measured; the light intensity detecting element comprises a photoelectric detector and a light power measuring instrument and is used for detecting and receiving a light beam passing through the focusing mirror, measuring the light power of the light beam and displaying and recording the light power.
Description
Technical Field
The invention relates to the field of distance measurement, in particular to a distance measurement method, and particularly relates to a high-precision micro-motion distance measurement method.
Background
In the manufacturing and testing process of spacecraft parts, parameters such as dimensional errors, form and position errors and the like are generally required to be measured, and the dimensional deformation of key parts when the temperature is changed violently is also required to be measured. With the improvement of the resolution of the satellite, the indexes of the static size and the allowable deformation size of key parts on the active satellite continuously rise, if the ultrahigh precision measurement of the key parts can be realized on the ground, the size error and the size deformation generated in the process of designing, manufacturing and testing the parts can be found in time and adjusted in time, a reference closest to a real value is provided for the assembly and debugging of the whole satellite, and the actual working capacity of the satellite in orbit operation is ensured to the maximum extent.
Because most of spacecraft measured parts have various and complex structures and fine sizes, the current mainstream distance measuring method is a three-coordinate measuring instrument or a laser tracker, the size of the measured dimension is obtained through the instruments, and the deformation is calculated through the difference value of the measured dimension of the instruments under different working conditions. The measurement accuracy of the currently widely used three-coordinate measuring instrument is about 1 μm, a workpiece coordinate system needs to be established by manually picking points each time the three-coordinate measuring instrument performs measurement, a coordinate system conversion error is inevitably introduced when the workpiece deformation is calculated, the measurement accuracy of the dimensional deformation is greatly reduced, and the requirement of increasingly precise dimensional indexes of spacecraft parts can not be met. The resolution of the three-coordinate measuring machine is 0.1 μm, and the ability of accurate measurement is still lacking for the parts of minute size whose deformation amount may be much less than 0.1 μm. Therefore, it is necessary to apply a new high precision micro-motion distance measuring device and distance measuring method.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide a distance measuring method.
The invention provides a distance measuring device, which comprises a laser emitting element, a light path adjusting element, a measuring part and a light intensity detecting element, wherein the laser emitting element is arranged on the measuring part;
the measuring part comprises a reference element and an element to be measured;
and a light path adjusting element, a measuring part and a light intensity detecting element are sequentially arranged on a laser light path emitted by the laser emitting element.
Preferably:
the laser emitting element comprises a laser;
the light path adjusting element comprises a beam expanding lens, a beam splitter and a focusing lens; the beam expanding lens, the beam splitter and the focusing lens are sequentially arranged on a laser light path emitted by the laser;
the reference element comprises a first plane mirror, a linear guide rail, a ball screw pair and a rotating handle; the first plane mirror is arranged on the linear guide rail and can do linear motion along with the ball screw pair; the first plane mirror can be moved to a set position by hand and/or by rotating a handle;
the element to be tested comprises a second plane mirror;
the light intensity detection element comprises a photoelectric detector and an optical power measuring instrument;
after laser is emitted from a laser, the diameter of a light beam is expanded through a beam expander, and then the laser is divided into two beams through a beam splitter, wherein the two beams are respectively marked as a first light beam and a second light beam; the first light beam extends towards the direction of the reference element, is reflected by the first plane mirror and then extends reversely, reaches the focusing mirror through the beam splitter, and is focused and converged on the light intensity detection element through the focusing mirror; the second light beam extends towards the direction of the element to be detected, is reflected by the second plane mirror and then extends reversely, reaches the focusing mirror through the reflection of the beam splitter, and is focused and converged on the light intensity detection element through the focusing mirror.
Preferably:
the optical axes of the laser emitting element, the beam expander in the light path adjusting element and the element to be detected are superposed; the optical axes of the light intensity detection element, the beam splitter in the light path adjusting element, the focusing lens in the light path adjusting element and the reference element are overlapped;
the optical path adjusting element also comprises an adjusting module, and the height and the position of the optical path adjusting element can be adjusted through the adjusting module;
the first connecting line is vertical to the second connecting line, wherein the first connecting line is a connecting line of the laser emitting element and the element to be detected, and the second connecting line is a connecting line of the light intensity detecting element and the reference element.
Preferably:
the laser is a non-frequency stabilization He-Ne laser and can emit laser with the wavelength of 632.8 nm;
the surface type PV value of the first plane mirror and the second plane mirror is better than that of the second plane mirror
The reflectivity is better than 95 percent;
wherein the PV value represents the mirror surface unevenness, i.e. the height difference between the highest point and the lowest point of the surface; λ represents the wavelength of the laser light emitted by the laser.
Preferably:
a first unit scale is marked on the linear guide rail, and the first unit scale is not more than 0.01 mm;
a second unit scale is marked on the rotary handle, and the second unit scale is not more than 3.6 degrees;
the first plane mirror can move on the linear guide rail by rotating the rotating handle, and when the rotating handle rotates for one circle, the first plane mirror moves on the linear guide rail by the distance of the first unit scale;
the positioning accuracy of the linear guide rail and the ball screw pair is not lower than 0.1 mu m, and the movement range is not smaller than 200 mm.
Preferably:
the element to be tested is fixedly connected with the workpiece to be tested through an adhesive and/or a connecting piece;
the photoelectric detector is arranged at the focus of the focusing mirror;
the measuring range of the optical power measuring instrument can be adjusted between mu W, mW and W, the accuracy is one bit after decimal point, and the response time is less than 1 s.
According to the distance measuring method provided by the invention, the distance measuring device comprises the following steps:
the method comprises the following steps: mounting and fixing the element to be tested on the workpiece to be tested;
step two: adjusting to make the central heights of all optical components in the distance measuring device the same, turning on the laser, adjusting the heights through an adjusting module of a light path adjusting element to make the reflection light spot of the light path of the whole device return to the output port position of the laser, and making the emergent light beam and the reflection light beam on the mirror surface of the beam splitter coincide;
step three: adjusting the reference element to ensure that the distance difference between the reference element and the distance between the element to be measured and the beam splitter is less than 0.1 cm;
step four: fixing the reference element position;
step five: applying a test working condition to the workpiece, and reading a change curve of the reading of the optical power measuring instrument in the test process;
step six: and calculating the micro displacement or micro deformation of the workpiece on the measured dimension under the test working condition according to the change curve of the reading of the optical power measuring instrument.
Preferably, in the third step, the distance difference is measured by a graduated scale.
Preferably, the fixing of the position of the reference element in said step four is achieved by:
and rotating the rotating handle to finely adjust the position of the reference element, observing the numerical change of the optical power measuring instrument, and fixing the position of the reference element until the numerical value of the optical power measuring instrument reaches the maximum value.
Preferably, the calculation in step six is implemented by:
after a test working condition is applied to the workpiece, the reading number of the optical power measuring instrument is changed periodically, the period number of a change curve of the reading number is read and recorded as N, the reading number of the optical power measuring instrument at the end of the test is recorded as I ', and then a calculation relation between the micro-motion distance delta L and the reading number I' can be obtained according to a conversion relation between interference light intensity and optical path difference:
wherein λ represents the wavelength of the laser light, I1、I2Respectively representing the light intensity of the first light beam and the second light beam.
Compared with the prior art, the invention has the following beneficial effects:
1. the distance measuring device provided by the invention has the advantages of simple structure and clear light path, and is favorable for reducing the operation difficulty and the maintenance difficulty;
2. the precision of the distance measuring method provided by the invention is as high as 0.01 mu m, the size deformation of the precision parts of the spacecraft can be measured with high precision, the method can be widely applied to the refined parts of the spacecraft, and the current situation that the current high-precision measuring means is deficient can be greatly improved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic view of a distance measuring device according to the present invention;
FIG. 2 is a schematic diagram of the optical path principle of the distance measuring device provided by the present invention;
FIG. 3 is a schematic view of a reference element portion of the distance measuring device provided in the present invention;
fig. 4 is a schematic flow chart of a ranging method provided in the present invention.
The figures show that:
Optical path adjusting element 20
Device under test 40
Light intensity detecting element 50
Focusing mirror 23
Ball screw pair 33
Rotating handle 34
Second plane mirror 41
Optical power measuring instrument 52
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
A distance measuring apparatus according to the present invention comprises a laser emitting element 10, an optical path adjusting element 20, a measuring part, and a light intensity detecting element 50; the measuring portion includes a reference element 30 and a device under test 40; an optical path adjusting element 20, a measuring portion, and a light intensity detecting element 50 are sequentially disposed on an optical path of laser light emitted from the laser emitting element 10.
Preferably, the laser emitting element 10 comprises a laser 11; the optical path adjusting element 20 comprises a beam expander 21, a beam splitter 22 and a focusing mirror 23; the beam expander 21, the beam splitter 22 and the focusing lens 23 are sequentially arranged on a laser light path emitted by the laser 11; the reference element 30 comprises a first plane mirror 31, a linear guide rail 32, a ball screw pair 33 and a rotating handle 34; the first plane mirror 31 is arranged on the linear guide rail 32 and can do linear motion along with the ball screw pair 33; the first plane mirror 31 can be moved by hand and/or by rotating the handle 34 to precisely reach the set position; the element to be tested 40 comprises a second plane mirror 41; the light intensity detecting element 50 comprises a photoelectric detector 51 and an optical power measuring instrument 52; after the laser is emitted from the laser 11, the diameter of the light beam is expanded through the beam expander 21, and then the laser is divided into two beams through the beam splitter 22, wherein the two beams are respectively marked as a first light beam and a second light beam; the first light beam extends towards the reference element 30, is reflected by the first plane mirror 31 and then extends reversely, reaches the focusing mirror 23 through the beam splitter 22, and is focused and converged on the light intensity detection element 50 through the focusing mirror 23; the second light beam extends towards the direction of the element to be detected 40, is reflected by the second plane mirror 41 and then extends in the reverse direction, is reflected by the beam splitter 22 to reach the focusing mirror 23, and is then focused and converged on the light intensity detection element 50 by the focusing mirror 23.
Specifically, the optical axes of the laser emitting element 10, the beam expander 21 in the optical path adjusting element 20, and the element to be tested 40 coincide; the optical axes of the light intensity detecting element 50, the beam splitter 22 in the optical path adjusting element 20, the focusing mirror 23 in the optical path adjusting element 20 and the reference element 30 are overlapped; the optical path adjusting element 20 further comprises an adjusting module, and the height and the position of the optical path adjusting element 20 can be adjusted through the adjusting module; the first connection line is perpendicular to the second connection line, wherein the first connection line is a connection line between the laser emitting device 10 and the device to be measured 40, and the second connection line is a connection line between the light intensity detecting device 50 and the reference device 30. The laser 11 is a non-frequency stabilized He-Ne laser and can emit laser with the wavelength of 632.8 nm; the surface type PV value of the first plane mirror 31 and the second plane mirror 41 is better than that of the second plane mirror
The reflectivity is better than 95 percent; wherein the PV value represents the mirror surface unevenness, i.e. the difference between the highest and lowest values of the surface; λ represents the wavelength of the laser light emitted by the laser 11. A first unit scale is marked on the linear guide rail 32, and the first unit scale is not more than 0.01 mm; the rotary handle 34 is marked with a second unit scale which is not larger than3.6 degrees; the first plane mirror 31 can be moved on the linear guide rail 32 by rotating the rotating handle 34, and when the rotating handle 34 rotates for one circle, the first plane mirror 31 moves on the linear guide rail 32 by a distance of a first unit scale; the positioning accuracy of the linear guide rail 32 and the ball screw pair 33 is not lower than 0.1 mu m, and the movement range is not smaller than 200 mm. The element to be tested 40 is fixedly connected with a workpiece to be tested through an adhesive and/or a connecting piece; the photodetector 51 is arranged at the focal point of the focusing mirror 23; the range of the optical power measuring instrument 52 can be adjusted between mu W, mW and W, the accuracy is one decimal place later, and the response time is less than 1 s.
According to the distance measuring method provided by the invention, the distance measuring device comprises the following steps:
the method comprises the following steps: mounting and fixing the element to be tested 40 on the workpiece to be tested;
step two: adjusting to make the central heights of all optical components in the distance measuring device the same, turning on the laser 11, adjusting the heights through an adjusting module of the light path adjusting element 20, so that the reflected light spot of the light path of the whole device returns to the output port position of the laser 11, and the emergent light beam and the reflected light beam on the mirror surface of the beam splitter 22 coincide;
step three: adjusting the reference element 30 to ensure that the distance difference between the reference element 30 and the distance between the element to be measured 40 and the beam splitter 22 is less than 0.1 cm;
step four: fixing the reference element 30 position;
step five: applying a test working condition to the workpiece, and reading a change curve of the reading of the optical power measuring instrument 52 in the test process;
step six: and calculating the micro displacement or micro deformation of the workpiece on the measured dimension under the test working condition according to the change curve of the reading of the optical power measuring instrument 52.
More specifically, in the third step, the distance difference is measured by the scale.
The fixing of the position of the reference element 30 in the fourth step is achieved by:
the rotary knob 34 is turned to finely adjust the position of the reference element 30, and the change of the indication of the optical power meter 52 is observed until the indication of the optical power meter 52 reaches the maximum value, and the position of the reference element 30 is fixed.
The calculation in the step six is realized by the following steps:
after a test working condition is applied to the workpiece, the reading number of the optical power measuring instrument is changed periodically, the period number of a change curve of the reading number is read and recorded as N, the reading number of the optical power measuring instrument at the end of the test is recorded as I ', and then a calculation relation between the micro-motion distance delta L and the reading number I' can be obtained according to a conversion relation between interference light intensity and optical path difference:
wherein λ represents the wavelength of the laser light, I1、I2Respectively representing the light intensity of the first and second light beams described above.
Further, the principle of the method for fixing the position of the reference element of the step four is as follows: the light intensity of a reflected light beam of the reference element is recorded as A, the light intensity of a reflected light beam of the element to be detected is recorded as B, the wavelength is lambda, the light intensity distribution of isocline interference formed when two parallel lights vertically enter is recorded as I, the optical path difference of the two parallel lights is recorded as delta L, if the phase jump generated on the reflecting surface in the transmission process of a certain interference light beam is regarded as 'half-wave loss', the length of lambda/2 is recorded in the optical path of the interference light beam, and the conversion relation between the interference light intensity I and the optical path difference L is as follows:
as shown in fig. 1 to 4, the height and position of the optical path adjusting element 20 can be adjusted by the adjusting module so that the centers of the lenses are at the same height. The reference element 30 is mounted on the horizontal workbench through screws, the position can be moved as required during work preparation, the inner side of the linear guide rail 32 is positioned through a leaning block, the outer side of the linear guide rail is pressed tightly through a fastening screw to determine the position, and the linear guide rail is kept fixed in the work process. The plane mirror 31 is mounted on the ball screw pair 33 through 4M 6 socket head cap screws, a handle is mounted on the side surface of the ball screw pair 33, and the plane mirror 31 can move linearly along the guide rail by rotating the handle. The linear guide rail 32 is marked with a scale with the resolution of 0.01mm, the plane mirror 31 on the handle 34 on the side of the ball screw pair 33 moves for 0.01mm when the handle rotates for a circle, the circle has 100 grids, the scale corresponding to each grid is 0.0001mm, and the position of the plane mirror 31 on the linear guide rail 32 can be obtained by adding the two scales and estimating and reading one bit. The positioning precision of the linear guide rail 32 is not more than 0.1 μm, and the movement range is not less than 200 mm.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (3)
1. A distance measuring method using a distance measuring device is characterized by comprising the following steps:
the method comprises the following steps: mounting and fixing a to-be-tested element (40) on a to-be-tested workpiece;
step two: adjusting to enable the central heights of all optical components in the distance measuring device to be the same, opening the laser (11), adjusting the heights through an adjusting module of a light path adjusting element (20), enabling the reflection light spot of the light path of the whole device to be returned to the output port position of the laser (11), and enabling the emergent light beam and the reflection light beam on the mirror surface of the beam splitter (22) to be coincident;
step three: adjusting the reference element (30) to ensure that the distance difference between the reference element (30) and the element to be measured (40) to the beam splitter (22) is less than 0.1 cm;
step four: fixing the position of the reference element (30);
step five: applying a test working condition to the workpiece, and reading a change curve of the reading of the optical power measuring instrument (52) in the test process;
step six: calculating the micro displacement or micro deformation of the workpiece on the measured dimension under the test condition according to the change curve of the indication number of the optical power measuring instrument (52);
the calculation in the step six is realized as follows:
after a test working condition is applied to the workpiece, the reading number of the optical power measuring instrument is changed periodically, the period number of a change curve of the reading number is read and recorded as N, the reading number of the optical power measuring instrument at the end of the test is recorded as I ', and then a calculation relation between the micro-motion distance delta L and the reading number I' can be obtained according to a conversion relation between interference light intensity and optical path difference:
wherein λ represents the wavelength of the laser light, I1、I2Respectively representing the light intensity of the first light beam and the second light beam;
the distance measuring device comprises a laser emitting element (10), a light path adjusting element (20), a measuring part and a light intensity detecting element (50);
the measuring part comprises a reference element (30) and an element to be measured (40);
a light path adjusting element (20), a measuring part and a light intensity detecting element (50) are sequentially arranged on a laser light path emitted by the laser emitting element (10);
the laser emitting element (10) comprises a laser (11);
the optical path adjusting element (20) comprises a beam expander (21), a beam splitter (22) and a focusing mirror (23); the beam expander (21), the beam splitter (22) and the focusing lens (23) are sequentially arranged on a laser light path emitted by the laser (11);
the reference element (30) comprises a first plane mirror (31), a linear guide rail (32), a ball screw pair (33) and a rotating handle (34); the first plane mirror (31) is arranged on the linear guide rail (32) and can do linear motion along with the ball screw pair (33); the first plane mirror (31) can be moved to a set position by hand-held movement and/or by rotating a handle (34);
the element to be tested (40) comprises a second plane mirror (41);
the light intensity detection element (50) comprises a photoelectric detector (51) and an optical power measuring instrument (52);
after laser is emitted from a laser (11), the diameter of a light beam is expanded through a beam expander (21), and then the laser is divided into two beams through a beam splitter (22), wherein the two beams are respectively marked as a first light beam and a second light beam; the first light beam extends towards the reference element (30), is reflected by the first plane mirror (31) and then extends reversely, reaches the focusing mirror (23) through the beam splitter (22), and is focused and converged on the light intensity detection element (50) through the focusing mirror (23); the second light beam extends towards the direction of the element to be detected (40), is reflected by the second plane mirror (41) and then extends reversely, is reflected by the beam splitter (22) to reach the focusing mirror (23), and is focused and converged on the light intensity detection element (50) by the focusing mirror (23).
2. The distance measuring method according to claim 1, wherein in step three, the distance difference is measured by a scale.
3. A ranging method according to claim 1, characterized in that the fixing of the position of the reference element (30) in said step four is achieved by:
the position of the reference element (30) is finely adjusted by rotating the rotary handle (34), the reading change of the optical power measuring instrument (52) is observed, and the position of the reference element (30) is fixed when the reading of the optical power measuring instrument (52) reaches the maximum value.
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| CN110174662A (en) * | 2019-05-31 | 2019-08-27 | 山东省科学院海洋仪器仪表研究所 | A kind of three beam splitting laser emitter of high-precision for laser radar |
| CN112284261B (en) * | 2020-10-10 | 2023-06-23 | 中国电子科技集团公司第十一研究所 | Optical axis offset detection system of laser infrared device |
| CN114978301B (en) * | 2022-03-28 | 2023-09-12 | 昂纳科技(深圳)集团股份有限公司 | Optical test system, calibration method thereof and calibration piece |
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| JPS6443703A (en) * | 1987-08-11 | 1989-02-16 | Topcon Corp | Method and device for measuring distance |
| FR2655416A1 (en) * | 1989-12-04 | 1991-06-07 | Vareille Aime | OPTICAL DISTANCE MEASURING DEVICE. |
| CN1026353C (en) * | 1991-11-22 | 1994-10-26 | 中国科学院上海光学精密机械研究所 | Active laser displacement sensor |
| CN2391169Y (en) * | 1999-07-23 | 2000-08-09 | 中国科学院上海光学精密机械研究所 | Micro-displacement semi-conductor laser interferometering instrument |
| CN1431478A (en) * | 2003-02-14 | 2003-07-23 | 中国科学院上海光学精密机械研究所 | Micro displacement real time interferometry apparatus |
| CN100538260C (en) * | 2007-02-07 | 2009-09-09 | 中国科学院上海光学精密机械研究所 | Micro-displacement high accuracy real-time interferometry instrument |
| CN102706282B (en) * | 2012-06-25 | 2014-08-20 | 无锡迈福光学科技有限公司 | Laser interference range finder |
| CN107121092A (en) * | 2017-05-24 | 2017-09-01 | 西安交通大学 | A kind of system and method for laser interference detection bearing ball face type error |
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