CN104634283B - Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection - Google Patents
Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection Download PDFInfo
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Abstract
The invention discloses a laser heterodyne interference linearity measuring device and a laser heterodyne interference linearity measuring method with six-degree-of-freedom detection. The laser heterodyne interference linearity measuring device comprises a laser heterodyne interference linearity and position detection part and an error detection and compensation part; a four-degree-of-freedom error detection light path consisting of three ordinary beam splitters, a polarizing beam splitter, a plane reflecting mirror, a convex lens, a position sensitive detector and two four-quadrant detectors is additionally arranged in a light path structure of the laser heterodyne interference linearity and position detection part. By utilizing a method for integrating the laser heterodyne interferometry and a laser spot detection method, the simultaneous six-degree-of-freedom detection of a deflection angle, a pitch angle, a rolling angle, horizontal linearity, vertical linearity and linearity position of a measured object can be realized, the error compensation is carried out for the vertical linearity and the vertical linearity position, the influence of rotation error of the measured object on a measurement result in the linearity measuring process can be eliminated, and the measurement precision of the laser heterodyne interference linearity and the position of the laser heterodyne interference linearity can be improved.
Description
Technical field
The present invention relates to a kind of laser heterodyne interference linearity measurer and method, have six certainly more particularly, to a kind of
By the laser heterodyne interference linearity measurer and method of degree detection.
Background technology
In the manufacture of modern precision machinery and instrument, linearity is used as characterizing the main of workbench or guide rail elements shape
One of geometric element, has consequence and effect in mechanical precision detection.At present verticality measuring method is a lot, according to
Whether laser class measurement method and non-laser class measurement method can be divided into as measurement carrier using laser, the former is compared to the latter's energy
Enough reach higher certainty of measurement and measure convenient, therefore the always main object of Chinese scholars and business research.Swashing
In light class measurement method, heterodyne straightness interferometer because with the performance such as good anti-interference, high s/n ratio, high accuracy,
Obtain comparing in straight line degree measurement field and be widely applied.Heterodyne straightness interferometer is mainly by two-frequency laser, wet
The Lars composition such as prism and V-type reflecting mirror, normally only realizes the inspection of this one degree of freedom parameter of measurand straightness error
Survey.Patent of invention (200910100065.2 and 200910100068.6) is using non-polarization Beamsplitter, wollaston prism, V-type
The light channel structure of reflecting mirror and polarization spectroscope, realizes the straightness error to measurand and its degree of freedom ginseng of position two
Several detections.
During actual straight line degree measurement, the measurement mirror of heterodyne straightness interferometer is arranged on the shifting of measurand
On moving platform, there are the error parameter of six-freedom degree, including three linear dimensions (vertical lines in the platform in motor process
The position of degree error, horizontal linear degree error and straightness error) and three rotational parameters (beat angle error, pitching angle errors
With rolling angle error), wherein three rotation errors can have a strong impact on the measurement result of straightness error and its position, cause measurement
Precision is reduced.Therefore, current laser heterodyne interference linearity measurer and method presence does not eliminate these rotation errors
The technical problem of impact is brought on straight line degree measurement result, while also and unrealized measurand six-freedom degree error parameter
Measure simultaneously.
The content of the invention
It is an object of the invention to provide a kind of laser heterodyne interference linearity measurer with six degree of freedom detection
And method.Using laser heterodyne interference and the principle of detecting a laser beam, multiple degree of freedom motion of measurand had both been realized
Detect while parameter, the error compensation to linearity and its position detection is realized again, solve laser heterodyne interference straight line
The technical problem that rotation error affects on measurement result in degree measurement, improves the certainty of measurement of linearity and its position detection,
Measure while realizing the six-freedom degree error parameter of measurand simultaneously.
The technical solution adopted for the present invention to solve the technical problems is：
First, a kind of laser heterodyne interference linearity measurer with six degree of freedom detection：
Including laser heterodyne interference linearity and its position detection part and error detection and compensation part, heterodyne
Linearity is interfered to include two-frequency laser, non-polarization Beamsplitter, Wo La with beat signal output with its position detection part
This prism, reflecting prism, the first polarization spectroscope, the first analyzer, the second analyzer, the first photodetector and the second light
Electric explorer；Error detection and compensation part includes the first common spectroscope, the second common spectroscope, plane mirror, convex lens
Mirror, Position-Sensitive Detector, the 3rd common spectroscope, the second polarization spectroscope, the first 4 quadrant detector and the second four-quadrant
Detector；Plane mirror and reflecting prism composition measurement mirror are arranged on the mobile platform of measurand by measurement mirror support
On；
The beat signal of two-frequency laser beat signal outfan output is used as reference signal, two-frequency laser output beam
Incide on non-polarization Beamsplitter Jing after the first common spectroscope transmission, be divided into Jing after the transmission and reflection of non-polarization Beamsplitter and disappearing
Polarization spectroscope transmitted light beam and non-polarization Beamsplitter the reflected beams, non-polarization Beamsplitter the reflected beams incide the first polarization point
Respectively Jing transmissions and reflection are divided into frequency for f to light microscopic1Transmitted light beam and frequency be f2The reflected beams, non-polarization Beamsplitter
Transmitted light beam incides light splitting on wollaston prism, is divided into frequency for f1It is f with frequency2Light beam；Wollaston prism light splitting
Doppler frequency shift caused by measurand motion, two after reflection superposition are superimposed with after the reflected prismatic reflection of two light beams afterwards
The frequency of light beams is changed into respectively f1±Δf1And f2±Δf2, two beam the reflected beams incidences return to wollaston prism synthesis one
Beam light outgoing；
The synthesis emergent light of wollaston prism incides the first polarization spectroscope after the 3rd common spectroscope transmission,
It is divided into transmitted light beam and the reflected beams Jing after the transmission and reflection of the first polarization spectroscope：Synthesis emergent light incides the first polarization
Spectroscope output frequency is f1±Δf1Transmitted light beam to incide the first polarization spectroscope with non-polarization Beamsplitter the reflected beams defeated
Go out frequency for f2The reflected beams synthesize a branch of analyzer of directive first, the analyzers of Jing first incide the first photodetector and connect
Receive, produce first via measurement signal；Synthesis emergent light incides the first polarization spectroscope output frequency for f2±Δf2Reflected light
Beam incides the first polarization spectroscope output frequency for f with non-polarization Beamsplitter the reflected beams1Transmitted light beam synthesize a beam
To the second analyzer, the analyzers of Jing second incide the reception of the second photodetector, produce the second tunnel measurement signal；
The outer also reflection of the common spectroscopes of two-frequency laser output beam Jing first transmission has the reflected beams all the way, the reflected light
Beam incides plane mirror Jing after the second common dichroic mirror, and again successively Jing second is general for the light beam after plane mirror reflection
Hot spot is formed after the transmission of reduction of fractions to a common denominator light microscopic, convex lens focus, Position-Sensitive Detector reception is projected；
The outer also reflection of the common spectroscopes of synthesis emergent light Jing the 3rd transmission of wollaston prism has the reflected beams all the way, should
The reflected beams incide the second polarization spectroscope and are divided into transmitted light beam and the reflected beams Jing after transmission and reflection, and transmitted light beam is incident
To the second 4 quadrant detector, the reflected beams incide the first 4 quadrant detector.
Described reflecting prism is included respectively positioned at two corner cube prisms of upper and lower position, after wollaston prism light splitting
Two light beams difference directive upper and lower position two corner cube prisms, the second described polarization spectroscope will come from reflection rib
The light beam of corner cube prism reflexes to the first 4 quadrant detector on mirror, and the light beam for coming from corner cube prism under reflecting prism is transmitted
To the second 4 quadrant detector.
Described measurement apparatus include data acquisition module and computer, two-frequency laser, the first photodetector
Jing data acquisition modules equal with the second photodetector are connected with computer, and the first photodetector and the second photodetector are defeated
The two-way measurement signal for going out Jing data acquisition modules together with the reference signal of two-frequency laser are transferred to computer disposal.
Described plane mirror is fixed on the surface of reflecting prism.
Described two-frequency laser output beam is orhtogonal linear polarizaiton light.
2nd, a kind of laser heterodyne interference verticality measuring method with six degree of freedom detection：
1) using the measurement apparatus, the measurement mirror of plane mirror and reflecting prism composition is installed by measurement mirror support
Mobile platform on, be selected to output orthogonal line polarized light and with the two-frequency laser of beat signal outfan, its is defeated
The line polarized light frequency for going out is respectively f1And f2, the light beam that two-frequency laser is exported experiences laser heterodyne interference light path and error
Detection and compensation light path；
1.1) laser heterodyne interference light path：
The beat signal of two-frequency laser beat signal outfan output is used as reference signal, two-frequency laser output beam
Incide on non-polarization Beamsplitter Jing after the first common spectroscope transmission, be divided into Jing after the transmission and reflection of non-polarization Beamsplitter and disappearing
Polarization spectroscope transmitted light beam and non-polarization Beamsplitter the reflected beams, non-polarization Beamsplitter the reflected beams incide the first polarization point
Respectively Jing transmissions and reflection are divided into frequency for f to light microscopic1Transmitted light beam and frequency be f2The reflected beams, non-polarization Beamsplitter
Transmitted light beam incides light splitting on wollaston prism, is divided into frequency for f1It is f with frequency2Light beam；Wollaston prism light splitting
Doppler frequency shift caused by measurand motion, two after reflection superposition are superimposed with after the reflected prismatic reflection of two light beams afterwards
The frequency of light beams is changed into respectively f1±Δf1And f2±Δf2, two beam the reflected beams incidences return to wollaston prism synthesis one
Beam light outgoing；The synthesis emergent light of wollaston prism incides the first polarization spectro after the 3rd common spectroscope transmission
Mirror, Jing after the transmission and reflection of the first polarization spectroscope transmitted light beam and the reflected beams are divided into：Synthesis emergent light incides first
Polarization spectroscope output frequency is f1±Δf1Transmitted light beam and non-polarization Beamsplitter the reflected beams incide the first polarization spectro
Mirror output frequency is f2The reflected beams synthesize a branch of analyzer of directive first, the analyzers of Jing first incide the first photodetection
Device is received, and produces first via measurement signal；Synthesis emergent light incides the first polarization spectroscope output frequency for f2±Δf2It is anti-
Irradiating light beam incides the first polarization spectroscope output frequency for f with non-polarization Beamsplitter the reflected beams1Transmitted light beam synthesis one
To the second analyzer, the analyzers of Jing second incide the reception of the second photodetector, produce the second tunnel measurement signal for beam；
1.2) error detection and compensation light path：
1.2.1) the outer also reflection of the common spectroscopes of two-frequency laser output beam Jing first transmission has the reflected beams all the way, should
The reflected beams are incided on the second common spectroscope, and Jing after its reflection plane mirror secondary reflection again, plane mirror are incided
Light beam after reflection forms hot spot Jing after the second common spectroscope transmission, convex lens focus successively, projects position sensing detection
Device；
1.2.2) the outer also reflection of the common spectroscopes of synthesis emergent light Jing the 3rd transmission of wollaston prism has and reflects all the way
Light beam, the reflected beams are incided in the second polarization spectroscope, and the second polarization spectroscope will come from the upper right angle of reflecting prism
The light beam of prism reflexes to the first 4 quadrant detector and forms hot spot, and will come from the light beam of the lower corner cube prism of reflecting prism
It is transmitted to the second 4 quadrant detector and forms hot spot；
2) mobile platform is moved to one end of measurand as measurement initial position, and measures dependent constant, including
The distance between the rectangular edge intersection point and mobile platform of the upper and lower corner cube prism of reflecting prism H, measurement mirror support and reflecting prism
Up and down the rectangular edge intersection point of corner cube prism apart from the distance between B and measurement mirror support and wollaston prism s0；
Before measurement, adjusting position sensing detector and two 4 quadrant detectors and, laser facula is incided respectively
From center；In measurement, the mobile platform of measurand from initial position to another end motion, the detectable signal of each detector
Each degree of freedom parameter of measurand is obtained Jing after processing；
3) laser heterodyne interference light path obtains measurand in motor process according to geometrical relationship using below equation
Vertical line degree error and its straightness error position：
Vertical line degree error：
Straightness error position：
Wherein, θ for wollaston prism splitting angle half, L1For first via displacement measurement, L2Survey for the second tunnel displacement
Value；
4) error detection and compensation light path is respectively adopted deflection angle and angle of pitch detection method, roll angle and horizontal linear degree
Detection method measures four degree of freedom of the deflection angle, the angle of pitch, roll angle and the horizontal linear degree that obtain measurand simultaneously, and
The vertical line degree measured laser heterodyne interference light path using error compensating method and its error of position are compensated, so as to
The six degree of freedom detection of measurand is completed, the measurement to difference interference linearity is realized.
Described first via displacement measurement L1With the second tunnel displacement measurement L2In the following manner is respectively adopted to be calculated：
3.1) reference signal for being exported by two-frequency laser and the first via measurement signal of the first photodetector output are adopted
First via displacement measurement L is calculated with below equation1：
Wherein, Δ f1It is f for frequency1Light beam due to measurand motion caused by Doppler frequency shift, λ1It is f for frequency1
Light beam wavelength, f1For the frequency of the transmitted light beam of the first polarization spectroscope output, t is the time；
3.2) reference signal for being exported by two-frequency laser and the second tunnel measurement signal of the second photodetector output are adopted
The second tunnel displacement measurement L is calculated with below equation2：
Wherein, Δ f2It is f for frequency2Light beam due to measurand motion caused by Doppler frequency shift, λ2It is f for frequency2
Light beam wavelength, f2For the frequency of the reflected beams of the first polarization spectroscope output.
The step 4) in deflection angle and angle of pitch detection method specifically include：Before measurement starts, adjusting position is sensitive
The position of detector, makes the hot spot on Position-Sensitive Detector at its center；In measurement process, according to Position-Sensitive Detector
The facula position side-play amount of detection, beat angle error and the pitching being calculated using below equation in measurand motor process
Angle error：
Beat angle error：
Pitching angle error：
Wherein, Δ xPSDFor the facula position side-play amount in Position-Sensitive Detector horizontal direction, Δ yPSDFor position sensing
Facula position side-play amount in detector vertical direction, f is the focal length of convex lenss.
The step 4) in roll angle and horizontal linear degree detection method specifically include：Before measurement starts, two are adjusted
The position of 4 quadrant detector, makes the hot spot on two 4 quadrant detectors be located at respective center respectively；In measurement process, root
Close with the mapping of each degree of freedom in measurand motor process according to the facula position side-play amount of two 4 quadrant detector detections
System, the rolling angle error and horizontal linear degree error being calculated using below equation in measurand motor process：
Rolling angle error：
Horizontal linear degree error：
Wherein, Δ xQD1For the facula position side-play amount in the first 4 quadrant detector horizontal direction, Δ xQD2For the two or four
Facula position side-play amount in quadrant detector horizontal direction, B is to measure mirror support to hand over the rectangular edge of upper and lower corner cube prism
The distance of point, L is the length of corner cube prism hypotenuse, and H is between the rectangular edge intersection point of upper and lower corner cube prism and mobile platform
Distance, n for corner cube prism material refractive index, s0The mobile platform for starting front measurand for measurement is measured in initial position
The distance between mirror support and wollaston prism, α is beat angle error, and γ is rolling angle error, and s is straightness error position
Put, θ is the half of wollaston prism splitting angle.
The step 4) in error compensating method specifically include：In measurement process, the rotation error of measurand can be right
The measurement result of vertical line degree error and its position produces impact, is calculated to laser heterodyne interferometry using below equation
The compensation of the vertical line degree error and its position that measure：
Vertical line degree error after compensation：Δ h '=Δ h- (s0+s-B)β
Straightness error position after compensation：
Wherein, B is the distance for measuring mirror support and the rectangular edge intersection point of upper and lower corner cube prism, and L is corner cube prism hypotenuse
Length, H is the distance between rectangular edge intersection point and mobile platform of upper and lower corner cube prism, n for corner cube prism material folding
Penetrate rate, s0The mobile platform for starting front measurand for measurement is measured between mirror support and wollaston prism in initial position
Distance, α be beat angle error, β be pitching angle error, Δ h be vertical line degree error, s be straightness error position.
Above-mentioned calculating can be believed by the two-way measurement signal of two photodetector output with the reference of two-frequency laser output
Number obtain vertical line degree error and its position of measurand Jing after data acquisition and computer disposal together, position sensing is visited
Survey device and the output of two 4 quadrant detectors laser spot position signal obtain after data acquisition and computer disposal by
Beat angle error, pitching angle error, rolling angle error and the horizontal linear degree error of object are surveyed, and according to error compensating method Jing
Be eliminated the vertical line degree error of measurand rotation error impact and its exact value of position are crossed after computer disposal.
The invention has the advantages that：
(1) measuring method can realize detection while the six-freedom degree error parameter of measurand, be accurate work
The performance detection for making platform or guide rail is provided greatly conveniently with calibration；
(2) measuring method eliminates laser heterodyne interference linearity and its position measurement process with error compensating method
The impact of middle measurand rotation error, is effectively improved certainty of measurement, perfect laser heterodyne interference linearity and its position
The measuring method put；
(3) light channel structure is simple, easy to use.
The present invention is mainly suitable for the manufacture of ultraprecise machining, Micro-Opto-Electro-Mechanical Systems, IC chip and accurate instrument
The linearity of precision stage and precise guide rail involved by the technical fields such as device, displacement and other multifreedom motion parameters
While detect.
Description of the drawings
Fig. 1 is the index path of the laser heterodyne interference straight line degree measurement with six degree of freedom detection.
Fig. 2 is the schematic diagram of laser heterodyne interference linearity and its position measurement.
Fig. 3 is the schematic diagram (by taking the angle of pitch as an example) of deflection angle and pitch angle measurement.
Fig. 4 is the schematic diagram of roll angle and the measurement of horizontal linear degree.
Fig. 5 be measurand rotation error to vertical line degree error and its impact schematic diagram of position measurement (with pitching
As a example by angle).
In figure：1st, two-frequency laser, the 2, first common spectroscope, 3, Position-Sensitive Detector, 4, convex lenss, 5, second is general
Reduction of fractions to a common denominator light microscopic, 6, non-polarization Beamsplitter, the 7, first polarization spectroscope, 8, wollaston prism, 9, reflecting prism, 10, plane it is anti-
Penetrate mirror, 11, measurand mobile platform, 12, measurement mirror support, the 13, the 3rd common spectroscope, the 14, second polarization spectroscope,
15th, the first 4 quadrant detector, the 16, second 4 quadrant detector, the 17, first analyzer, the 18, first photodetector, 19,
Two analyzers, the 20, second photodetector.
Specific embodiment
With reference to the accompanying drawings and examples the invention will be further described.
The light channel structure of the device of the present invention is as shown in figure 1, including laser heterodyne interference linearity and its position detection part
Divide and error detection and compensation part, specific implementation process is as follows：
Two-frequency laser 1 adopts the He-Ne frequency stabilized carbon dioxide lasers of a transverse zeeman effect, and output frequency is respectively f1And f2's
Orhtogonal linear polarizaiton light beam, two-beam is divided into Jing after the first common spectroscope 2, and the wherein common spectroscope 5 of the reflected beams Jing second is anti-
Incide after penetrating on the plane mirror 10 at the top of reflecting prism 9 being made up of upper and lower corner cube prism, plane mirror
10 and reflecting prism 9 composition measurement mirror, by measure mirror support 12 be fixed on the mobile platform 11 of measurand, the light beam
The second common spectroscope 5 is returned to after being reflected by plane mirror 10 and is transmitted, after convex lenss 4 are converged position sensing is projected
On detector 3；And the light beam of the common transmissions of spectroscope 2 of Jing first incides non-polarization Beamsplitter 6 and is divided into two beams, reflected light
Beam is incided in the first polarization spectroscope 7, and transmitted light beam then incides wollaston prism 8；Due to wollaston prism 8
Birefringence is acted on, and the light beam is divided into two beam frequencies after outgoing and is respectively f1And f2And angled line polarized light, enter respectively
In being mapped to the upper corner cube prism of reflecting prism 9 and lower corner cube prism, outgoing and converge to again Jing after two corner cube prism internal reflections
On another point of wollaston prism 8, two beam frequencies now are due to being superimposed the caused Doppler's frequency of measurand motion
Shifting is changed into f1±Δf1、f2±Δf2, they form a branch of orhtogonal linear polarizaiton light after the another side outgoing of wollaston prism 8,
It is divided into two parts after the 3rd common spectroscope 13, the reflected beams therein are incided and are divided into frequency after the second polarization spectroscope 14
Rate is respectively f1±Δf1And f2±Δf2Two bunch polarized light, the former from reflecting prism 9 upper corner cube prism, its projection
To on the first 4 quadrant detector 15, from the lower corner cube prism of reflecting prism 9, it projects the second 4 quadrant detector to the latter
On 16；And the light beam through the transmission of the 3rd common spectroscope 13 is then incided on the first polarization spectroscope 7, and it is again broken down into two beams
The line polarized light of different frequency, its medium frequency is f1±Δf1Light beam transmission after with Jing non-polarization Beamsplitters 6 and first polarization point
The frequency of the reflection of light microscopic 7 is f2Light beam combine, the first analyzer of directive 17 forms beat signal after the first analyzer 17
And received by the first photodetector 18, first via measurement signal is produced, and frequency is f2±Δf2Light beam reflection after disappear with Jing
Polarization spectroscope 6 reflects and the frequency of the transmission of the first polarization spectroscope 7 is f1Light beam combine, the second analyzer of directive 19, Jing
Cross after the second analyzer 19 and form beat signal and received by the second photodetector 20, produce the second tunnel measurement signal.
The first common spectroscope 2 of the present invention is placed between two-frequency laser 1 and non-polarization Beamsplitter 6；3rd is common
Spectroscope 13 is placed between the polarization spectroscope 7 of wollaston prism 8 and first.
In addition, the frequency that the afterbody of two-frequency laser 1 is carried is f1-f2Beat signal then as two-way measurement signal share
Reference signal, this three roads signal constitutes the signal source of laser heterodyne interference linearity and its position measurement part；And position
Put the laser spot position information on sensing detector 3 and two 4 quadrant detectors 15 and 16 then to constitute error-detecting and mend
Repay the signal source of part.The signal of two above part is admitted to data acquisition module and computer and carries out relevant treatment and show
Show, obtain beat angle error in measurand motor process, pitching angle error, rolling angle error, horizontal linear degree error and
The six degree of freedom parameters such as vertical line degree error and its position after error compensation.
Two-frequency laser 1 in being embodied as adopts the 5517A dual vertical mode stable frequency He-Ne laser of Agilent companies of the U.S.
Device, the difference on the frequency of the orhtogonal linear polarizaiton light of its output is f1-f2=1.7MHz, central wavelength lambda=632.99137nm.Heterodyne
Interference signal process adopts the igh-speed wire-rod production line plate of the fpga chip EP2C20Q240 of altera corp of the U.S..Position sensing is visited
PDP90A Position-Sensitive Detector of the device 3 using Thorlab companies of the U.S. is surveyed, its detection resolution is 0.675 μm, position sensing
Detector signal process adopts the TQD001 signal processing modules of Thorlabs companies.4 quadrant detector 15 and 16 is adopted with color
The Spotonusb-qq of row Duma companies, its resolution is 0.75 μm, precision is ± 1 μm, and 4 quadrant detector signal processing is adopted
With the Manifold Box signal processing modules of Duma companies, computer using Hewlett-Packard Pro4500 desktop computers.
In FIG, in light path stain and vertical short-term represents the linear polarization of two orthogonal different frequencies of polarization direction
Light, and stain of the top with triangle and the vertical short-term with triangle represent the orhtogonal linear polarizaiton containing Doppler shift information
Light.
With reference to Fig. 2, Fig. 3, Fig. 4 and Fig. 5, the specific embodiment and its original of laser heterodyne interference straight line degree measurement of the present invention
Reason process is as follows：
(1) before measurement starts, reflecting prism 9 of the top equipped with plane mirror 10 is arranged on by measurement mirror support 12
On the mobile platform 11 of measurand, the platform is moved to one end of measurand as measurement initial position, and measures phase
Close constant, including reflecting prism the distance between the rectangular edge intersection point of corner cube prism and mobile platform 11 H, measurement mirror about 9
Support 12 and reflecting prism about 9 the rectangular edge intersection point of corner cube prism apart from B, measurement mirror support 12 and wollaston prism
The distance between 8 s0；Adjusting position sensing detector 3 and two 4 quadrant detectors 15 and 16, enable laser facula incident
To the center of each detector；
(2) after measurement starts, the mobile platform 11 of measurand is from initial position with certain step-wise displacement to the other end
Motion, each detector detects related signal and Jing data acquisitions, and measurand each is obtained after feeding computer disposal
Degree of freedom parameter；
(3) for the detection of vertical line degree and its position, as shown in Fig. 2 reflecting prism 9 is moved to from initial position working as
Front position, translational speed v is 1mm/s, and step-wise displacement is 5mm, and the splitting angle of wollaston prism 8 is 1.5 °, is imitated by Doppler
The measuring beam f that should cause1And f2Frequency become turn to：
In formula：λ1、λ2The respectively optical maser wavelength of two frequencies, θ for wollaston prism splitting angle half；
The frequency of first via measurement signal and the second tunnel measurement signal is respectively f1-f2±Δf1And f1-f2±Δf2, both
Respectively (frequency is f with reference signal1-f2) ask and can obtain after difference frequency Δ f1With Δ f2, then the corresponding first via and the second tunnel displacement survey
Value is respectively：
The difference of two-way shift value is：
Δ L=L1-L2
Geometrical relationship according to Fig. 2, can obtain vertical line degree error and its position in measurand motor process
Put respectively：
Vertical line degree error：
Straightness error position：
When reflecting prism 9 is moved upwards relative to measurement base directrix, i.e., solid line position is moved to by the dotted line position in Fig. 2
Put, Δ h is negative for just；
(4) for deflection angle and the angle of pitch are detected, as shown in figure 3, both measuring principles are identical, enter by taking the angle of pitch as an example
Row explanation.At current location there is pitching angle error β in measurand, then the light beam after the reflection of plane mirror 10 will be produced
The angle of pitch change of raw 2 β, it incides and is focused onto after convex lenss 4 on Position-Sensitive Detector 3, in detector vertical direction
The facula position side-play amount of upper generation is Δ yPSD, the angle of pitch in measurand motor process can be obtained according to geometrical relationship
Error is：
Pitching angle error：
The beat angle error that can be obtained in the same manner in measurand motor process is：
Beat angle error：
In formula：ΔxPSDFor the facula position side-play amount in Position-Sensitive Detector horizontal direction, Δ yPSDFor position sensing
Facula position side-play amount in detector vertical direction, f is the focal length of convex lenss；
(5) for the detection of roll angle and horizontal linearity, as shown in figure 4, Jing after the 3rd common spectroscope 13 reflects
Light beam is incided in the second polarization spectroscope 14, and the second polarization spectroscope 14 will come from the light of corner cube prism on reflecting prism 9
Beam reflexes to the first 4 quadrant detector 15, and the light beam for coming from 9 times corner cube prisms of reflecting prism is transmitted to into the second four-quadrant
Limit detector 16；According in the facula position variable quantity of two 4 quadrant detectors detection and measurand motor process each from
By the mapping relations spent, using laser trace following method and optics geometric method obtain rolling angle error in measurand motor process and
Horizontal linear degree error is respectively：
Rolling angle error：
Horizontal linear degree error：
In formula：ΔxQD1For the facula position side-play amount in the horizontal direction of the first 4 quadrant detector 15, Δ xQD2For second
Facula position side-play amount in the horizontal direction of 4 quadrant detector 16, B is the right angle for measuring mirror support 12 and upper and lower corner cube prism
The distance of seamed edge intersection point, L is the length of corner cube prism hypotenuse, and H is the rectangular edge intersection point and mobile platform of upper and lower corner cube prism
The distance between 11, n for corner cube prism material refractive index, s0To measure the mobile platform 11 for starting front measurand initial
The distance between mirror support 12 and wollaston prism 8 are measured during position；
Calculate when processing, dependent constant and angle measurement are updated to into rolling angle error and horizontal linear degree error
Both measured values are obtained in formula；
(6) in measurement process, the rotation error of measurand can be to vertical line degree error and its measurement result of position
Impact is produced, as shown in figure 5, illustrate by taking the angle of pitch as an example, when mobile platform 11 moves to current location from initial position
When, measurand there occurs pitching angle error β, obtain surveying laser heterodyne interferometry using laser trace following method and optics geometric method
Vertical line degree error delta h for obtaining and its compensation expression formula of position s are respectively：
Vertical line degree error compensation expresses formula：Δ h '=Δ h- (s0+s-B)β
Straightness error position compensation expression formula：
After measurement terminates, dependent constant and angle measurement are substituted into into two formulas above, the measured value in step (3) is entered
Row compensation, after computer disposal, vertical line degree error and its position that the measurand that has been eliminated rotation error affects
The exact value put.The certainty of measurement of embodiment result is：Vertical line degree measurement result is 41.85 μm before compensation, is hung down after compensation
Straight straight line degree measurement result is 9.85 μm, and the standard deviation of the position measurements of straightness error is 3.67 μm before compensation, is mended
The standard deviation for repaying the position measurements of rear straightness error is 0.33 μm.
As can be seen here, it is accurate work present invention achieves detecting while the six-freedom degree error parameter of measurand
The performance detection for making platform or guide rail is provided greatly conveniently with calibration；And the rotation error of measurand is eliminated to vertical straight
The impact of dimension error and its position measurements, improves certainty of measurement；And light channel structure is simple, easy to use, has
The significant technique effect of protrusion.
Above-mentioned specific embodiment is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, any modifications and changes made to the present invention both fall within the protection model of the present invention
Enclose.
Claims (10)
1. it is a kind of with six degree of freedom detection laser heterodyne interference linearity measurer, with beat signal output double frequency
Laser instrument (1), non-polarization Beamsplitter (6), wollaston prism (8), reflecting prism (9), the first polarization spectroscope (7), first
Common spectroscope (2), the first analyzer (17), the second analyzer (19), plane mirror (10), the first photodetector
(18), the second photodetector (20), the beat signal of two-frequency laser (1) beat signal outfan output is used as with reference to letter
Number, two-frequency laser (1) output beam is incided on non-polarization Beamsplitter (6) Jing after the first common spectroscope (2) transmission, and Jing disappears
It is divided into non-polarization Beamsplitter transmitted light beam and non-polarization Beamsplitter the reflected beams after the transmission and reflection of polarization spectroscope (6), its
It is characterised by：
Including laser heterodyne interference linearity and its position detection part and error detection and compensation part, laser heterodyne interference
Linearity and its position detection part include the two-frequency laser (1) with beat signal output, non-polarization Beamsplitter (6), wet
Lars prism (8), reflecting prism (9), the first polarization spectroscope (7), the first analyzer (17), the second analyzer (19), the
One photodetector (18) and the second photodetector (20)；Error detection and compensation part include the first common spectroscope (2),
Second common spectroscope (5), plane mirror (10), convex lenss (4), Position-Sensitive Detector (3), the 3rd common spectroscope
(13), the second polarization spectroscope (14), the first 4 quadrant detector (15) and the second 4 quadrant detector (16)；Plane mirror
(10) and reflecting prism (9) composition measurement mirror by measurement mirror support (12) on the mobile platform (11) of measurand；
Non-polarization Beamsplitter the reflected beams incide the first polarization spectroscope (7), and respectively Jing transmissions and reflection are divided into frequency for f1's
Transmitted light beam and frequency are f2The reflected beams, the transmitted light beam of non-polarization Beamsplitter (6) incided on wollaston prism (8)
Light splitting, is divided into frequency for f1It is f with frequency2Light beam；The reflected prism of two light beams (9) after wollaston prism (8) light splitting
Doppler frequency shift caused by measurand motion is superimposed with after reflection, the frequency of the two light beams after reflection superposition is changed into respectively f1
±Δf1And f2±Δf2, two beam the reflected beams incidences return to wollaston prism (8) synthesis light beam outgoing；
The synthesis emergent light of wollaston prism (8) incides the first polarization spectro after the 3rd common spectroscope (13) transmission
Mirror (7), Jing after the transmission and reflection of the first polarization spectroscope (7) transmitted light beam and the reflected beams are divided into：Synthesis emergent light is incident
It is f to the first polarization spectroscope (7) output frequency1±Δf1Transmitted light beam and non-polarization Beamsplitter the reflected beams incide the
One polarization spectroscope (7) output frequency is f2The reflected beams synthesize a branch of analyzer of directive first (17), the analyzers of Jing first
(17) the first photodetector (18) reception is incided, first via measurement signal is produced；Synthesis emergent light incides the first polarization
Spectroscope (7) output frequency is f2±Δf2The reflected beams and non-polarization Beamsplitter the reflected beams incide the first polarization spectro
Mirror (7) output frequency is f1Transmitted light beam synthesize a branch of analyzer of directive second (19), the analyzers of Jing second (19) is incided
Second photodetector (20) is received, and produces the second tunnel measurement signal；
The outer also reflection of the common spectroscopes (2) of two-frequency laser (1) output beam Jing first transmission has the reflected beams all the way, the reflection
Light beam incides plane mirror (10), the light beam after plane mirror (10) reflection Jing after the second common spectroscope (5) reflection
Jing after the second common spectroscope (5) transmission, convex lenss (4) are focused on hot spot is formed successively again, project Position-Sensitive Detector (3)
Receive；
The outer also reflection of the common spectroscopes (13) of synthesis emergent light Jing the 3rd transmission of wollaston prism (8) has reflected light all the way
Beam, the reflected beams incide the second polarization spectroscope (14) and are divided into transmitted light beam and the reflected beams Jing transmission and after reflecting, thoroughly
Irradiating light beam incides the second 4 quadrant detector (16), and the reflected beams incide the first 4 quadrant detector (15).
2. it is according to claim 1 it is a kind of with six degree of freedom detection laser heterodyne interference linearity measurer, its
It is characterised by：Described reflecting prism (9) includes two corner cube prisms for being located at upper and lower position respectively, wollaston prism (8)
Two corner cube prisms of the two light beams difference directive upper and lower position after light splitting, described the second polarization spectroscope (14) is in the future
The first 4 quadrant detector (15) is reflexed to from the light beam of the corner cube prism on reflecting prism (9), reflecting prism (9) will be come from
The light beam of lower corner cube prism is transmitted to the second 4 quadrant detector (16).
3. it is according to claim 1 it is a kind of with six degree of freedom detection laser heterodyne interference linearity measurer, its
It is characterised by：Described measurement apparatus include data acquisition module and computer, two-frequency laser (1), the first smooth electrical resistivity survey
Survey device (18) and the equal Jing data acquisition modules of the second photodetector (20) be connected with computer, the first photodetector (18) and
The two-way measurement signal of the second photodetector (20) output Jing data acquisition modules together with the reference signal of two-frequency laser (1)
Block is transferred to computer disposal.
4. it is according to claim 1 it is a kind of with six degree of freedom detection laser heterodyne interference linearity measurer, its
It is characterised by：Described plane mirror (10) is fixed on the surface of reflecting prism (9).
5. it is according to claim 1 it is a kind of with six degree of freedom detection laser heterodyne interference linearity measurer, its
It is characterised by：Described two-frequency laser (1) output beam is orhtogonal linear polarizaiton light.
6. a kind of laser heterodyne interference straight line with six degree of freedom detection of the arbitrary described device of Claims 1 to 5 is applied to
Degree measuring method, it is characterised in that：
1) using the measurement apparatus, the measurement mirror of plane mirror (10) and reflecting prism (9) composition is by measuring mirror support
(12) on the mobile platform (11) being arranged on, it is selected to output orthogonal line polarized light and with the double frequency of beat signal outfan
Laser instrument (1), the line polarized light frequency of its output is respectively f1And f2, the light beam that two-frequency laser (1) is exported experiences to be had outside laser
Difference optical interference circuit and error detection and compensation light path；
1.1) laser heterodyne interference light path：
The beat signal of two-frequency laser (1) beat signal outfan output is used as reference signal, two-frequency laser (1) output light
Beam is incided on non-polarization Beamsplitter (6) Jing after the first common spectroscope (2) transmission, the transmission of Jing non-polarization Beamsplitters (6) and
It is divided into non-polarization Beamsplitter transmitted light beam and non-polarization Beamsplitter the reflected beams after reflection, non-polarization Beamsplitter the reflected beams are incident
To the first polarization spectroscope (7), respectively Jing transmissions and reflection are divided into frequency for f1Transmitted light beam and frequency be f2The reflected beams,
The transmitted light beam of non-polarization Beamsplitter (6) incides light splitting on wollaston prism (8), is divided into frequency for f1It is f with frequency2's
Light beam；Being superimposed with measurand motion after the reflected prism of two light beams (9) reflection after wollaston prism (8) light splitting causes
Doppler frequency shift, the frequency of two light beams after reflection superposition is changed into respectively f1±Δf1And f2±Δf2, two beam the reflected beams
Incidence returns to wollaston prism (8) synthesis light beam outgoing；The synthesis emergent light of wollaston prism (8) is common through the 3rd
The first polarization spectroscope (7) is incided after spectroscope (13) transmission, is divided into Jing after the transmission and reflection of the first polarization spectroscope (7)
Transmitted light beam and the reflected beams：Synthesis emergent light incides the first polarization spectroscope (7) output frequency for f1±Δf1Transmitted light
Beam incides the first polarization spectroscope (7) output frequency for f with non-polarization Beamsplitter the reflected beams2The reflected beams synthesis it is a branch of
The analyzer of directive first (17), the analyzers of Jing first (17) incides the first photodetector (18) reception, produces the first drive test
Amount signal；Synthesis emergent light incides the first polarization spectroscope (7) output frequency for f2±Δf2The reflected beams and depolarization point
Light microscopic the reflected beams incide the first polarization spectroscope (7) output frequency for f1Transmitted light beam synthesis the analyzing of a branch of directive second
Device (19), the analyzers of Jing second (19) incides the second photodetector (20) reception, produces the second tunnel measurement signal；
1.2) error detection and compensation light path：
1.2.1) the outer also reflection of the common spectroscopes (2) of two-frequency laser (1) output beam Jing first transmission has the reflected beams all the way,
The reflected beams are incided on the second common spectroscope (5), and Jing after its reflection plane mirror (10) secondary reflection again is incided, and are put down
Light beam after face reflecting mirror (10) reflection forms hot spot Jing after the second common spectroscope (5) transmission, convex lenss (4) are focused on successively,
Project Position-Sensitive Detector (3)；
1.2.2) the outer also reflection of the common spectroscopes (13) of synthesis emergent light Jing the 3rd transmission of wollaston prism (8) has anti-all the way
Irradiating light beam, the reflected beams are incided in the second polarization spectroscope (14), and the second polarization spectroscope (14) will come from reflection rib
The light beam of the upper corner cube prism of mirror (9) reflexes to the first 4 quadrant detector (15) and forms hot spot, and will come from reflecting prism
(9) light beam of lower corner cube prism is transmitted to the second 4 quadrant detector (16) and forms hot spot；
2) mobile platform (11) is moved to one end of measurand as measurement initial position, and measures dependent constant, including
Reflecting prism (9) the distance between rectangular edge intersection point and mobile platform (11) of corner cube prism H, measurement mirror support (12) up and down
With the rectangular edge intersection point of the upper and lower corner cube prism of reflecting prism (9) apart from B and measurement mirror support (12) and Wollaston rib
The distance between mirror (8) s0；
Before measurement, adjusting position sensing detector (3) and two 4 quadrant detectors (15) and (16) enable laser facula to enter
It is mapped to respective center；In measurement, the mobile platform (11) of measurand from initial position to another end motion, each detector
Detectable signal each degree of freedom parameter of measurand is obtained Jing after processing；
3) to obtain measurand using below equation according to geometrical relationship vertical in motor process for laser heterodyne interference light path
Straightness error and its straightness error position：
Vertical line degree error：
Straightness error position：
Wherein, θ for wollaston prism splitting angle half, L1For first via displacement measurement, L2For the second road displacement measurement
Value；
4) error detection and compensation light path is respectively adopted deflection angle and the detection of angle of pitch detection method, roll angle and horizontal linear degree
Method measures four degree of freedom of the deflection angle, the angle of pitch, roll angle and the horizontal linear degree that obtain measurand simultaneously, and adopts
The vertical line degree and its error of position that error compensating method is measured laser heterodyne interference light path is compensated, so as to complete
The six degree of freedom detection of measurand, realizes the measurement to difference interference linearity.
7. according to claim 6 device it is a kind of with six degree of freedom detection laser heterodyne interference straight line degree measurement side
Method, it is characterised in that：
Described first via displacement measurement L1With the second tunnel displacement measurement L2In the following manner is respectively adopted to be calculated：
3.1) reference signal for being exported by two-frequency laser (1) and the first via measurement signal of the first photodetector (18) output
First via displacement measurement L is calculated using below equation1：
Wherein, Δ f1It is f for frequency1Light beam due to measurand motion caused by Doppler frequency shift, λ1It is f for frequency1Light
Shu Bochang, f1For the frequency of the transmitted light beam of the first polarization spectroscope (7) output, t is the time；
3.2) reference signal for being exported by two-frequency laser (1) and the second tunnel measurement signal of the second photodetector (20) output
Second tunnel displacement measurement L is calculated using below equation2：
Wherein, Δ f2It is f for frequency2Light beam due to measurand motion caused by Doppler frequency shift, λ2It is f for frequency2Light
Shu Bochang, f2For the frequency of the reflected beams of the first polarization spectroscope (7) output.
8. according to claim 6 device it is a kind of with six degree of freedom detection laser heterodyne interference straight line degree measurement side
Method, it is characterised in that：The step 4) in deflection angle and angle of pitch detection method specifically include：Before measurement starts, position is adjusted
The position of sensing detector (3) is put, makes the hot spot on Position-Sensitive Detector (3) at its center；In measurement process, according to position
The facula position side-play amount of sensing detector (3) detection is put, is calculated in measurand motor process using below equation
Beat angle error and pitching angle error：
Beat angle error：
Pitching angle error：
Wherein, Δ xPSDFor the facula position side-play amount in Position-Sensitive Detector horizontal direction, Δ yPSDFor position sensing detection
Facula position side-play amount in device vertical direction, f is the focal length of convex lenss.
9. according to claim 6 device it is a kind of with six degree of freedom detection laser heterodyne interference straight line degree measurement side
Method, it is characterised in that：The step 4) in roll angle and horizontal linear degree detection method specifically include：Before measurement starts, adjust
Two 4 quadrant detectors (15) of section and the position of (16), make hot spot on two 4 quadrant detectors respectively in respective
The heart；It is each with measurand motor process according to the facula position side-play amount of two 4 quadrant detector detections in measurement process
The mapping relations of individual degree of freedom, the rolling angle error and level being calculated using below equation in measurand motor process is straight
Dimension error：
Rolling angle error：
Horizontal linear degree error：
Wherein, Δ xQD1For the facula position side-play amount in the first 4 quadrant detector (15) horizontal direction, Δ xQD2For the two or four
Facula position side-play amount in quadrant detector (16) horizontal direction, B is straight with upper and lower corner cube prism for measurement mirror support (12)
The distance of angle seamed edge intersection point, L is the length of corner cube prism hypotenuse, and H is that the rectangular edge intersection point of upper and lower corner cube prism is flat with mobile
The distance between platform, n for corner cube prism material refractive index, s0To measure the mobile platform for starting front measurand in initial bit
The distance between mirror support and wollaston prism are measured when putting, α is beat angle error, and γ is rolling angle error, and s is linearity
The position of error, θ is the half of wollaston prism splitting angle.
10. according to claim 6 device it is a kind of with six degree of freedom detection laser heterodyne interference straight line degree measurement side
Method, it is characterised in that：The step 4) in error compensating method specifically include：In measurement process, measurand is rotated can shadow
The measurement result of vertical line degree error and its position is rung, is calculated what laser heterodyne interferometry was measured using below equation
Vertical line degree error and its compensation of position：
Vertical line degree error after compensation：Δ h '=Δ h- (s0+s-B)β
Straightness error position after compensation：
Wherein, B is the distance of measurement mirror support (12) and the rectangular edge intersection point of upper and lower corner cube prism, and L is corner cube prism hypotenuse
Length, H is the distance between rectangular edge intersection point and mobile platform of upper and lower corner cube prism, n for corner cube prism material folding
Penetrate rate, s0The mobile platform for starting front measurand for measurement is measured between mirror support and wollaston prism in initial position
Distance, α be beat angle error, β be pitching angle error, Δ h be vertical line degree error, s for straightness error position.
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