CN106247946B - A kind of four-degree-of-freedom laser measurement system - Google Patents
A kind of four-degree-of-freedom laser measurement system Download PDFInfo
- Publication number
- CN106247946B CN106247946B CN201610548502.7A CN201610548502A CN106247946B CN 106247946 B CN106247946 B CN 106247946B CN 201610548502 A CN201610548502 A CN 201610548502A CN 106247946 B CN106247946 B CN 106247946B
- Authority
- CN
- China
- Prior art keywords
- light
- displacement
- laser
- amici prism
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The present invention relates to a kind of improved four-degree-of-freedom laser measurement systems.Including plane mirror, light reflector, 90 ° of speculums, Amici prism, laser, two facula position detection devices and lens.Wherein plane mirror and light reflector constitute target mirror system, remaining device constitutes emitting-receiving system.Laser sends out laser and is divided into orthogonal two-beam line by Amici prism, and light beam is beaten on an angle hot spot position detection device；Another light beam is beaten on another displacement facula position detection device；Realize while measuring the angular metric of the displacement and two degree of freedom of two degree of freedom of object.An Amici prism is used only in the present invention so that increases for displacement measurement and the light ray energy of angle measurement, promotes the signal-to-noise ratio of light receiving element, reduce the influence of random error；Displacement measurement light and angle measurement light are mutually isolated, are independent of each other, and eliminate existing measuring system angle measurement systematic error caused by displacement measurement.
Description
Technical field
The invention belongs to field of optical measuring technologies, and in particular to a kind of four-degree-of-freedom laser measurement system.
Background technology
Currently, the mechanical equipment that is relied on of industrial production often has multiple freedom of motion, with increasing for degree of freedom,
Its error term also increases therewith.For example, for 3 common shaft vertical machining centers, geometric error is as high as 21 to respectively
The position error of 3 direction of motion, straightness error, pitching, beat, windup-degree error, and each direction of motion and another
The error of perpendicularity between outer two direction of motion.The single-degree-of-freedom that compares displacement measurement system, four-degree-of-freedom measuring system can
The error of four degree of freedom is measured simultaneously, greatly reduces measurement difficulty and cost.
Currently, existing four-degree-of-freedom measuring system, all uses laser measurement, such as：A kind of laser multi freedom measurement system
System and method and a kind of device measuring guide rail four-degree-of-freedom kinematic error using diffraction light-free；All be by light splitting and
It turns back and penetrates principle so that the laser beam after being divided finally has two beams to be beaten respectively in two target mirror mirrors for being fixed on testee
On piece, target mirror eyeglass include the eyeglass for angle measurement and the eyeglass for displacement measurement.When measured object is subjected to displacement and angle
When degree changes, translation or the angle change of target mirror emergent ray can be caused, translation or angle change are detected by light receiving element
Amount goes out displacement and the angles shifts amount of measured object to inverse.
Existing four-degree-of-freedom laser measurement system, to realize that its principle needs repeatedly to be divided light, but it is final
Light for measurement only has two beams, other light are discarded, and causes the significant wastage of luminous energy.Eventually lead to light receiving element
Output signal-noise ratio declines so that the influence of random error aggravates.In addition, the light for displacement measurement can be by being used for angle
The eyeglass measured is spent, causes angle measurement that can generate certain influence to displacement measurement so that measuring system is one more
Additional systematic error.The comprehensive decline for causing existing measuring system precision.
Invention content
In order to further increase the measurement accuracy of four-degree-of-freedom laser measurement system, improved by structure, the present invention provides
A kind of four-degree-of-freedom laser measurement system.
A kind of four-degree-of-freedom laser measurement system includes plane mirror 1,2,90 ° of speculums 3 of light reflector, light splitting rib
Mirror 4, laser 5, displacement facula position detection device 6, lens 7 and angle hot spot position detection device 8；
The plane mirror 1 and light reflector 2 constitute target mirror system, remaining device constitutes emitting-receiving system；
Along the direction of the emergent light of the laser 5, it is arranged in order equipped with Amici prism 4 and light reflector 2；
The side of the Amici prism 4 is equipped with lens 7 and angle hot spot position detection device 8 successively；And lens 7 and angle
Facula position detects the light path of the composition of device 8 perpendicular to the direction of 5 emergent light of laser；
The other side of the Amici prism 4 is equipped with 90 ° of speculums 3 and plane mirror 1 successively, wherein 90 ° of speculums 3 are tight
The light path that adjacent 4,90 ° of speculums 3 of Amici prism and plane mirror 1 are constituted is parallel to the direction of the emergent light of laser 5；
The light reflector 2 is set to the side of plane mirror 1, and light reflector 2 corresponds to 4 He of Amici prism respectively
Displacement facula position detects device 6, and displacement facula position detection device 6 is located at the side of laser 5；
When work, laser 5 sends out laser and is divided into orthogonal two-beam line, a branch of priority warp by Amici prism 4
90 ° of speculums 3,1,90 ° of speculum 3 of plane mirror, Amici prism 4, the reflection of lens 7 or refraction are crossed, is beaten in an angular light
Spot position detection device 8；If beat and pitching variation occur for target mirror system, can cause to beat in angle hot spot position detection device 8
On facula position change, carry out the indirect beat and pitch angle for measuring target mirror system by measuring facula position and changing；It is another
Shu Guang is reflected or is reflected by light reflector 2, is beaten on another displacement facula position detection device 6, if target mirror system is sent out
It is raw to change up and down with left and right displacement, the facula position beaten on displacement facula position detection device 6 can be caused to change, pass through measurement
Facula position changes the displacement for measure target mirror system indirectly；Realize while measuring the displacement and two of two degree of freedom of object
The angular metric of a degree of freedom.
The technical solution further limited is as follows：
The light reflector 2 is prism of corner cube or cat's -eye reflector.
The displacement facula position detection device 6 and angle hot spot position detection device 8 are PSD position sensitive devices or four-quadrant
Limit photelectric receiver or CCD photelectric receivers.
The advantageous effects of the present invention embody in the following areas：
1. the present invention only used an Amici prism, utilizes total reflection mirror to replace light splitting eyeglass as far as possible, reduce light
The light splitting of line so that increase for displacement measurement and the light ray energy of angle measurement, promote the signal-to-noise ratio of light receiving element, reduce
The influence of random error.
2. the displacement measurement light and angle measurement light of the present invention are mutually isolated, it is independent of each other, eliminates existing measurement
System perspective measures the systematic error caused by displacement measurement.
Description of the drawings
Fig. 1 is present system structure chart；
Fig. 2 is the first exploded view of present system principle；
Fig. 3 is the second exploded view of present system principle；
Serial number in upper figure：Plane mirror 1, light reflector 2,90 ° of speculums 3, Amici prism 4, laser 5, displacements
Facula position detects device 6, lens 7, angle hot spot position detection device 8.
Specific implementation mode
Below in conjunction with the accompanying drawings, the present invention is further described by embodiment.
Referring to Fig. 1, a kind of four-degree-of-freedom laser measurement system includes 2,90 ° of plane mirror 1, light reflector speculums
3, Amici prism 4, laser 5, displacement facula position detection device 6, lens 7 and angle hot spot position detection device 8；Light is anti-
Emitter 2 is prism of corner cube；It is PSD position sensitive devices that displacement facula position, which detects device 6 and angle hot spot position detection device 8,.
Plane mirror 1 and light reflector 2 constitute target mirror system, remaining device constitutes emitting-receiving system.
Along the direction of the emergent light of the laser 5, it is arranged in order equipped with Amici prism 4 and light reflector 2；
The side of the Amici prism 4 is equipped with lens 7 and angle hot spot position detection device 8 successively；And lens 7 and angle
Facula position detects the light path of the composition of device 8 perpendicular to the direction of 5 emergent light of laser；
The other side of the Amici prism 4 is equipped with 90 ° of speculums 3 and plane mirror 1 successively, wherein 90 ° of speculums 3 are tight
The light path that adjacent 4,90 ° of speculums 3 of Amici prism and plane mirror 1 are constituted is parallel to the direction of the emergent light of laser 5；
The light reflector 2 is set to the side of plane mirror 1, and light reflector 2 corresponds to 4 He of Amici prism respectively
Displacement facula position detects device 6, and displacement facula position detection device 6 is located at the side of laser 5.
The operation principle of four-degree-of-freedom laser measurement system is described in detail below：
The first step
The A as shown in Fig. 2, laser 5 emits beam is divided into the orthogonal light B and C of two beams by Amici prism 4,
Wherein light B changes 90 ° in the direction of propagation after 90 ° of speculums 3 reflect, and beats and is surveyed for follow-up angle on plane mirror 1
Amount.Light C is moved on, and being reflected into displacement facula position by light reflection device 2 detects device 6, is used for displacement measurement.Displacement
Measuring principle is as follows with traditional four-degree-of-freedom laser measurement system：When light reflection device 2 prolongs X-direction or Y-direction is subjected to displacement
When, it beats and detects the variation that the hot spot on device 6 can be generated accordingly in displacement facula position, it is logical that displacement facula position detects device 6
It crosses and facula position variation is converted into electric signal to obtain the displacement of light reflection device 2.
Second step
As shown in figure 3, light B forms light E after the reflection of plane mirror 1, light E is after 90 ° of speculums 3 reflect
Direction changes 90 ° and beats on Amici prism 4, is divided into two beams orthogonal light F and G, and light F is discarded, and light G passes through
Lens 7 are beaten is used for angle measurement on angle hot spot position detection device 8, and angle measurement principle is as follows similar to autocollimator：When
When around X or Y-axis angle change occurs for plane mirror 1, it can cause the angle of light E that twice of variation occurs, light G is caused to exist
The incidence angle of lens 7 changes, and angle hot spot position detection device 8 is located on the focal plane of lens 7, when the incidence of light G
After angle change, the facula position beaten on angle hot spot position detection device 8 may also change accordingly, angle hot spot position detection
Device 8 by facula position variation by being converted into electric signal come the angle variable quantity of inverse plane mirror 1.
Lens 7 why are added, be in order to eliminate the influence of 1 displacement of plane mirror, it is as follows：The plane of measurement angle is anti-
It is integrated to penetrate mirror 1 and measure the light reflection device 2 of displacement, so plane mirror 1 is inevitably subjected to displacement variation, leads to light
E and G are translated, if being not added with lens 7, the translation of light G can equally cause the light on angle hot spot position detection device 8
The variation of spot position, has an impact angle measurement.In addition after lens 7, according to the basic principle of lens：Directional light passes through lens
It can converge on focal plane a bit.It is found that being parallel before and after light G translations, all beaten on focal plane after the refraction of lens 7
A bit, so, as long as angle hot spot position detection device 8 is placed on the focal plane of lens 7, so that it may eliminate displacement and be surveyed to angle
The influence of amount.
Claims (3)
1. a kind of four-degree-of-freedom laser measurement system, it is characterised in that：Including plane mirror（1）, light reflector（2）、90°
Speculum（3）, Amici prism（4）, laser（5）, displacement facula position detect device（6）, lens（7）With angle facula position
Detect device（8）；
The plane mirror（1）And light reflector（2）Target mirror system is constituted, remaining device constitutes emitting-receiving system；
Along the laser（5）Emergent light direction, be arranged in order equipped with Amici prism（4）And light reflector（2）；
The Amici prism（4）Side successively be equipped with lens（7）With angle hot spot position detection device（8）；And lens（7）With
Angle hot spot position detection device（8）The light path of composition is perpendicular to laser（5）The direction of emergent light；
The Amici prism（4）The other side successively be equipped with 90 ° of speculums（3）And plane mirror（1）, wherein 90 ° of speculums
（3）Close to Amici prism（4）, 90 ° of speculums（3）And plane mirror（1）The light path of composition is parallel to laser（5）Go out
Penetrate the direction of light；
The light reflector（2）Set on plane mirror（1）Side, light reflector（2）Amici prism is corresponded to respectively
（4）Device is detected with displacement facula position（6）, displacement facula position detection device（6）Positioned at laser（5）Side；
When work, laser（5）It sends out laser and passes through Amici prism（4）It is divided into orthogonal two-beam line, a branch of priority warp
Cross 90 ° of speculums（3）, plane mirror（1）, 90 ° of speculums（3）, Amici prism（4）, lens（7）Reflection or refraction, beat
Angle hot spot position detection device（8）；If beat and pitching variation occur for target mirror system, it can cause to beat and be examined in angle facula position
Survey device（8）On facula position change, carry out indirect beat and the pitching for measuring target mirror system by measuring facula position and changing
Angle；Another light beam passes through light reflector（2）Refraction or reflection, beat and detect device in displacement facula position（6）On, if target mirror
System occurs to change with left and right displacement up and down, can cause to beat and detect device in displacement facula position（6）On facula position change,
It is changed come the indirect displacement for measuring target mirror system by measuring facula position；Realize while measuring the position of two degree of freedom of object
The angular metric of shifting amount and two degree of freedom.
2. a kind of four-degree-of-freedom laser measurement system according to claim 1, it is characterised in that：The light reflector
（2）For prism of corner cube or cat's -eye reflector.
3. a kind of four-degree-of-freedom laser measurement system according to claim 1, it is characterised in that：The displacement facula position
Detect device（6）With angle hot spot position detection device（8）It is PSD position sensitive devices or four-quadrant photelectric receiver or CCD light
Electric receiver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610548502.7A CN106247946B (en) | 2016-07-13 | 2016-07-13 | A kind of four-degree-of-freedom laser measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610548502.7A CN106247946B (en) | 2016-07-13 | 2016-07-13 | A kind of four-degree-of-freedom laser measurement system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106247946A CN106247946A (en) | 2016-12-21 |
| CN106247946B true CN106247946B (en) | 2018-10-02 |
Family
ID=57613933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610548502.7A Active CN106247946B (en) | 2016-07-13 | 2016-07-13 | A kind of four-degree-of-freedom laser measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106247946B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548488B (en) * | 2018-05-02 | 2019-06-21 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN109186470A (en) * | 2018-11-06 | 2019-01-11 | 南京林业大学 | A kind of mounting distance can automatic adjusument laser displacement sensor |
| CN110864631B (en) * | 2019-11-19 | 2021-10-08 | 北京东软医疗设备有限公司 | Detection device and detection method |
| CN111384655B (en) * | 2020-03-25 | 2023-03-14 | 龙天洋 | Self-feedback high-stability laser pulse compressor |
| CN111856428A (en) * | 2020-07-01 | 2020-10-30 | 南京理工大学 | 360-degree all-around low-cost three-dimensional imaging sensor |
| CN112902838B (en) * | 2021-01-19 | 2023-09-05 | 上海集成电路装备材料产业创新中心有限公司 | Zero sensor and detection system |
| CN114440766B (en) * | 2022-01-12 | 2023-12-26 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom motion errors of rotating shaft |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545761A (en) * | 2009-05-06 | 2009-09-30 | 湖北工业大学 | Optical measuring system with multiple degrees of freedom |
| DE102010042749A1 (en) * | 2009-12-11 | 2011-06-16 | Carl Zeiss Smt Gmbh | Precision clamping tool for processing optical element of optical system in microlithography, has cutting plates supported on disk such that plates are individually adjustable in position in two or four degrees of freedom |
| CN103983214A (en) * | 2014-05-30 | 2014-08-13 | 湖北工业大学 | Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light |
| CN104266583A (en) * | 2014-10-14 | 2015-01-07 | 合肥工业大学 | Multi-degree-of-freedom measuring system |
| CN104634283A (en) * | 2015-02-06 | 2015-05-20 | 浙江理工大学 | Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
-
2016
- 2016-07-13 CN CN201610548502.7A patent/CN106247946B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545761A (en) * | 2009-05-06 | 2009-09-30 | 湖北工业大学 | Optical measuring system with multiple degrees of freedom |
| DE102010042749A1 (en) * | 2009-12-11 | 2011-06-16 | Carl Zeiss Smt Gmbh | Precision clamping tool for processing optical element of optical system in microlithography, has cutting plates supported on disk such that plates are individually adjustable in position in two or four degrees of freedom |
| CN103983214A (en) * | 2014-05-30 | 2014-08-13 | 湖北工业大学 | Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light |
| CN104266583A (en) * | 2014-10-14 | 2015-01-07 | 合肥工业大学 | Multi-degree-of-freedom measuring system |
| CN104634283A (en) * | 2015-02-06 | 2015-05-20 | 浙江理工大学 | Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106247946A (en) | 2016-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106247946B (en) | A kind of four-degree-of-freedom laser measurement system | |
| CN103983214B (en) | A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error | |
| CN105737765A (en) | Four-freedom degree optical measuring head based on semiconductor laser assembly | |
| US10663589B2 (en) | Laser interferometer system for measuring six degrees of freedom with respect to a linear axis | |
| US4947202A (en) | Distance measuring apparatus of a camera | |
| CN100416221C (en) | Laser calibration apparatus | |
| US20140063491A1 (en) | Boresight error monitor for laser radar integrated optical assembly | |
| CN104613900A (en) | Full optical path drift compensation high-precision roll angle measuring method and device | |
| CN106932173B (en) | The measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision | |
| CN101545761A (en) | Optical measuring system with multiple degrees of freedom | |
| CN102519368A (en) | Normal displacement and angle sensing optical measuring head and measuring method thereof | |
| KR20130108121A (en) | Position-measuring device and system having such a position-measuring device | |
| JP6320267B2 (en) | Optical position measuring device | |
| CN106767395A (en) | One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method | |
| CN107462210A (en) | The rolling angle measurement device of line slideway | |
| JP6063166B2 (en) | Mechanism for measuring the distance by interferometer method | |
| CN104142123B (en) | It is applied to the Three Degree Of Freedom laser measurement system of plant equipment geometric error measurement | |
| CN109387161A (en) | A kind of auto-collimation system | |
| CN108344381A (en) | A kind of non-contact 3-D surface shape measurement method | |
| JP2012242389A (en) | Position measuring instrument | |
| CN104154882B (en) | Dual-beam device for detecting parallelism and method based on differential confocal measurement | |
| CN202393356U (en) | Normal displacement and angle sensing optical measuring head | |
| CN110763135A (en) | High-precision laser interferometer | |
| CN109544637B (en) | Double-target fixed verification device | |
| CN105758333A (en) | Long-trace optical surface profile detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |