CN106932173B - The measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision - Google Patents
The measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision Download PDFInfo
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- CN106932173B CN106932173B CN201710222479.7A CN201710222479A CN106932173B CN 106932173 B CN106932173 B CN 106932173B CN 201710222479 A CN201710222479 A CN 201710222479A CN 106932173 B CN106932173 B CN 106932173B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G01M11/088—Testing mechanical properties of optical fibres; Mechanical features associated with the optical testing of optical fibres
Abstract
The invention discloses a kind of measurement methods of high-precision heavy-caliber optical grating five degree of freedom splicing precision, the method comprises the following steps: the measurement of one, grating Three dimensional rotation precision: test beams being incident to the edge joint position of grating to be spliced, the Three dimensional rotation that the zero order light reflected and first-order diffraction light generated according to jointing grating obtains grating to be spliced splices precision: pitching angle thetax, deflection angle thetay, rotation angle, θz；Two, the measurement of grating two-dimensional translation precision: by pitching angle thetax, deflection angle thetayAnd rotation angle, θzIt adjusts to acceptability limit, test beams is incident to the edge joint position of grating to be spliced, the far-field focus energy ratio of the zero order light reflected generated according to jointing grating measures the two-dimensional translation precision of grating.The present invention has many advantages, such as that measurement accuracy is high, the degree of coupling is weak between each freedom degree, splicing efficiency easy to operate, can effectively improving grating and splicing precision, can be used for the space five-freedom splicing precision measure of jointing grating.
Description
Technical field
The invention belongs to splice precision measure field, it is related to a kind of utilize and reflects and diffraction light realization heavy-caliber optical grating splicing
The method of precision measure.
Background technique
As a kind of important dispersion element, diffraction grating is the core devices of Large optical system and scientific instrument,
It is widely used in the fields such as celestial spectrum analysis, inertial confinement fusion.Raising grating bore can effectively improve astronomy and look in the distance
The resolution ratio and signal-to-noise ratio of mirror system can also enhance the peak power and fan-out capability of high-energy short-pulse laser aid.
Under the conditions of current directly manufacture heavy-caliber optical grating is still jejune, heavy caliber is obtained using the method for mechanical splice
Grating is a kind of good economy performance, reliable in quality, high-efficient solution.Therefore, the array realized by grating splicing
Grating is the manufacture ideal technical solution of heavy-caliber optical grating.However, realizing the splicing of heavy-caliber optical grating using mechanical splice method
And adjustment, need to solve the problems, such as the high-acruracy survey of the multiple freedom degrees in its space.
Currently, the groove of monolithic grating, up to thousands of line/mm, Divided errors were required less than 1/10 grating constant, period
Error is less than 1/100 grating constant.Grating splicing requires the relative positional accuracy for having high between each sub-gratings: Space Rotating essence
Degree is not more than 1 μ rad, and translation precision is not more than 10nm, and to realize that space 5DOF adjusts.Therefore, the height in splicing
Coupling between precision measure and each freedom degree is the Major Difficulties of grating stitching measure, especially to muti-piece grating splicing precision
It is bigger to measure difficulty.Conventional method mostly uses amesdial to carry out Mechanical measurement, or uses displacement sensor or parallel light tube
The methods of indirectly measurement splicing precision.The degree of coupling is higher between respectively splicing freedom degree in the above method, cumbersome, and efficiency is lower,
It is unsuitable for the precision measure of heavy caliber jointing grating.Therefore, exploring has high-precision, high efficiency, high reliability and easy to operate
Grating splicing accuracy measurement method be of great significance and practical value.
Summary of the invention
In order to solve high, cumbersome, low precision of the degree of coupling etc. between existing grating splicing each freedom degree of accuracy measurement method
Problem, the present invention provides a kind of measurement methods of high-precision heavy-caliber optical grating five degree of freedom splicing precision.This method, which has, to be surveyed
Accuracy of measurement is high, the degree of coupling is weak between each freedom degree, splicing efficiency easy to operate, can effectively improving grating and splicing precision etc.
Advantage can be used for the measurement of heavy caliber jointing grating space five-freedom splicing precision.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision, includes the following steps:
One, the measurement of grating Three dimensional rotation precision
(1) define perpendicular to quiet grating grid direction be X-axis, be parallel to quiet grating grid direction be Y-axis, quiet grating
Normal direction is Z axis；
(2) test beams are incident to the edge joint position of grating to be spliced, according to jointing grating generate zero order light reflected and
First-order diffraction light obtains the Three dimensional rotation splicing precision of grating to be spliced: pitching angle thetax, deflection angle thetay, rotation angle, θz, described to bow
Elevation angle thetax, deflection angle thetay, rotation angle, θzCalculation formula it is as follows:
In formula:
θxThe angle that grating turns about the X axis；
θyThe angle that grating is rotated around Y-axis；
θzThe angle that grating turns about the Z axis；
δαThe variable quantity of outgoing beam pitch angle α when zero order light reflected is with respect to grating zero deflection；
δβThe variable quantity of outgoing beam or so angle beta when first-order diffraction light is with respect to grating zero deflection；
The angle of α-light beam and X-Z plane；
The angle of β-light beam and Y-Z plane.
Two, the measurement of grating two-dimensional translation precision
(1) by pitching angle thetax, deflection angle thetayAnd rotation angle, θzIt adjusts to acceptability limit；
(2) test beams are incident to the edge joint position of grating to be spliced, according to the zero order light reflected of jointing grating generation
The two-dimensional translation precision of far-field focus energy ratio measurement grating.
Compared with the prior art, the invention has the following beneficial effects:
Between each spatial degrees of freedom of grating measure the degree of coupling it is low, it is easy to operate, can effectively improve grating splicing efficiency and
Splice precision, can be used for the measurement of the five freedom degree splicing precision in space of high-precision joining grating.
Detailed description of the invention
Fig. 1 is that the spatial pose of measuring beam and jointing grating defines schematic diagram in the present invention；
Fig. 2 is the schematic diagram of light path system of the present invention；
Fig. 3 is grating in the present invention along Z-direction translation displacements and focal spot energy ratio corresponding relationship curve；
In figure: 1- light-source system；2- semi-transparent semi-reflecting lens A；3- condenser lens；4- microcobjective；5-CCD imaging sensor；
6- reflecting mirror A；7- semi-transparent semi-reflecting lens B；8- moves grating A；The quiet grating of 9-；10- moves grating B；11- reflecting mirror B；12- reflecting mirror C；
13- light beam.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this
Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered
Within the protection scope of the present invention.
Specific embodiment 1: present embodiments provide for a kind of comprehensive utilization reflected lights and diffraction light to realize heavy caliber light
Grid splice the method for precision measure, and the principle of interference based on light utilizes the zero order light reflected of grating and the interference of first-order diffraction light
Field measures the pitching, deflection and rotation angle of grating respectively, and the two dimension of grating is measured by the far-field focus energy ratio of division
Be translatable precision.Specific step is as follows:
One, the measurement of grating Three dimensional rotation precision
Making incident edge joint position of the measuring beam through jointing grating, the direction in space of outgoing beam can deflect, and two
The diffraction light that grating generates is imaged respectively in ccd image sensor, reads two as space D can calculate the deflection angle of light beam
Spend δ.The deflection angle δ of light beam and the Space Rotating angle, θ of grating have determining theoretical corresponding relationship, according to the correspondence of the two
Relationship can obtain the three-dimensional rotation precision of grating, i.e. pitching angle thetax, deflection angle thetayAnd rotation angle, θz。
The light beam direction in space includes:
Pitch angle α: the angle of light beam and X-Z plane；
Left and right angle beta: the angle of light beam and Y-Z plane.
The deflection angle of the light beam includes:
Pitch angle deviation δα: go out when outgoing beam (that is: zero order light reflected) after grating deflection is with respect to grating zero deflection
The variable quantity of irradiating light beam pitch angle α；
Left and right angular deviation δβ: go out when outgoing beam (that is: first-order diffraction light) after grating deflection is with respect to grating zero deflection
The variable quantity of irradiating light beam or so angle beta.
The pitch angle deviation δαAnd left and right angular deviation δβBy focal spot offset distance in ccd image sensor
It is calculated.
The spatial rotational angle of the grating includes:
The pitching angle theta of gratingx: the angle that grating turns about the X axis；
The deflection angle theta of gratingy: the angle that grating is rotated around Y-axis；
The face internal rotation angle θ of gratingz: the angle that grating turns about the Z axis.
The direction in space and grating rotational angle of the light beam when defining used coordinate system be following Descartes
Coordinate system: the direction perpendicular to quiet grating grid is X-axis, and being parallel to quiet grating grid direction is Y-axis, the normal direction of quiet grating
For Z axis.
The calculation method of the beam deflection angle degree is:
Wherein:
δI=α, β--- it is respectively the pitch angle deviation and left and right angular deviation of light beam；
DJ=x, y--- focal spot central cross and vertical misalignment distance in ccd image sensor；
M --- microcobjective amplification factor；
D --- condenser lens focal length.
The theoretical corresponding relationship of the grating rotational angle θ and light beam rotational angle δ specifically refer to:
Two, the measurement of grating two-dimensional translation precision
For the measurement of grating group two-dimensional translation precision, it can use interference field and measure.If the dynamic relatively quiet light of grating
Grid are in Z-direction or X to occurring translation offset, then the far-field focus of zero order light reflected can generate division.Wherein strongest two focal spots energy
Measuring ratio and grating relative translational movement displacement has determining theoretical corresponding relationship.Light can be obtained according to the theoretical corresponding relationship of the two
The two-dimensional translation precision of grid
The grating two-dimensional translation includes:
The front and back translation Δ z of grating: grating is moved in parallel along Z axis；
The left and right translation Δ x of grating: grating is moved in parallel along X-axis；
The theoretical corresponding relationship of the focal spot energy ratio and grating relative translational movement displacement is looked into according to curve shown in Fig. 3
It takes.
Specific embodiment 2: present embodiments provide for a kind of comprehensive utilization reflected lights and diffraction light to realize heavy caliber light
Grid splice the method for precision measure, and this method is that quiet grating, two sides are three pieces of gratings spellings composed by grating with middle position
Heavy-caliber optical grating group made of connecing is object.As depicted in figs. 1 and 2, specific measuring process is as follows:
Measuring process one: the pitching angle theta of the dynamic relatively quiet grating 9 of grating B10xAnd deflection angle thetayMeasurement.
Light path system is adjusted, measurement beamlet A1, the B1 for issuing light-source system 1 is incident after semi-transparent semi-reflecting lens A2 transmission
It is anti-through reflecting mirror C12 by moving the zero order light reflected that grating B10 and quiet grating 9 are emitted to quiet grating 9 and dynamic grating B10 edge joint position
Rear backtracking is penetrated to dynamic grating B10 and quiet grating 9, is returned again to semi-transparent semi-reflecting lens A2, after semi-transparent semi-reflecting lens A2 reflection by
Condenser lens 3 focuses and amplifies through microcobjective 4, is finally imaged in ccd image sensor 5.By dynamic grating B10 and quiet grating
The zero order light reflected of 9 outgoing forms two focal spots in ccd image sensor 5 respectively, measures the lateral distance D of two focal spotsxAnd
Fore-and-aft distance Dy, according to formula (1) calculate light beam pitch angle deviation δαWith left and right angular deviation δβ, further according to formula (2)
Grating pitching angle theta is calculatedx, grating deflection angle theta is calculated according to formula (3)y。
Measuring process two；The face internal rotation angle degree θ of the dynamic relatively quiet grating 9 of grating B10zMeasurement.
Light path system is adjusted, measurement beamlet A1, the B1 for issuing light-source system 1 is incident after semi-transparent semi-reflecting lens A2 transmission
To the edge joint position of quiet grating 9 and dynamic grating B10, the first-order diffraction light being emitted by quiet grating 9 and dynamic grating B10 is through reflecting mirror C12
Backtracking is then return to semi-transparent semi-reflecting lens A2, reflects through semi-transparent semi-reflecting lens A2 to dynamic grating B10 and quiet grating 9 after reflection
It is focused by condenser lens 3, then amplified through microcobjective 4 afterwards, is finally imaged in ccd image sensor 5.By dynamic grating B10 and
The first-order diffraction light that quiet grating 9 is emitted forms two focal spots in ccd image sensor 5 respectively, two focal spots of measurement it is longitudinal away from
From Dy, the left and right angular deviation δ of light beam can be obtained further according to formula (1)β, the face internal rotation angle degree of grating is calculated by formula (4)
θz。
Measuring process three: the measurement of the two-dimensional translation precision of the dynamic relatively quiet grating 9 of grating B10.
By the grating pitching angle theta of the relatively quiet grating 9 of dynamic grating B10x, deflection angle thetayAnd rotation angle, θzIt adjusts to qualification
Range can carry out two-dimensional translation precision measure to eliminate influence of the grating rotating to two-dimensional translation precision.Light path system is adjusted,
Measurement beamlet A1, the B1 for issuing light-source system 1 is incident to quiet grating 9 and dynamic grating B10 after semi-transparent semi-reflecting lens A2 transmission
Edge joint position, the zero order light reflected being emitted by quiet grating 9 and dynamic grating B10 after reflecting mirror C12 reflection backtracking to dynamic light
Grid B10 and quiet grating 9, are then return to semi-transparent semi-reflecting lens A2, are focused after semi-transparent semi-reflecting lens A2 reflection by condenser lens 3, then
Amplify through microcobjective 4, is finally imaged in ccd image sensor 5.Due to the influence of grating relative translational movement, through moving grating B10
The two beam zero order light reflecteds generated with quiet grating 9 interfere, and interference hot spot divides in far field.Choose wherein strongest two
A focal spot simultaneously calculates its energy ratio, and the homologous thread of focal spot energy ratio and translation displacement as shown in Figure 3 can check in light
The translation precision of grid.
Specific embodiment 3: present embodiment is unlike specific embodiment two, switch test optical path: in optical path
Increase semi-transparent semi-reflecting lens B7 and reflecting mirror A6 and reflecting mirror B11 disposed in parallel in system, the position of other optical devices is protected
It holds constant.Specific testing procedure is as follows:
Measuring process one: the pitching angle theta of the dynamic relatively quiet grating 9 of grating A8xAnd deflection angle thetayMeasurement.
Measurement beamlet A1, B1 that light-source system 1 issues is after semi-transparent semi-reflecting lens A2 transmission, then successively through semi-transparent semi-reflecting lens
B7 and reflecting mirror A6 reflection after, translate, the beamlet after translation be A2, B2, beamlet A2, B2 be incident to dynamic grating A8 and
Quiet 9 edge joint position of grating, by moving zero order light reflected that grating A8 and quiet grating 9 are emitted, backtracking is simultaneously after reflecting mirror B11 reflection
It is again incident on dynamic grating A8 and quiet grating 9, then is successively reflected through reflecting mirror A6, semi-transparent semi-reflecting lens B7 and semi-transparent semi-reflecting lens A2,
Amplify after being focused by condenser lens 3 through microcobjective 4, is finally imaged in ccd image sensor 5.By dynamic grating A8 and quiet light
Grid 9 be emitted zero order light reflected two focal spots are formed in CCD, according to formula (1) calculate light beam pitch angle deviation δα
With left and right angular deviation δβ, grating pitching angle theta is calculated further according to formula (2)x, the deflection angle of grating is calculated according to formula (3)
θy。
Measuring process two: the rotation angle θ of the dynamic relatively quiet grating 9 of grating A8zMeasurement.
Make light-source system 1 issue measurement beamlet A1, B1 through semi-transparent semi-reflecting lens A2 transmission after again through be arranged in parallel partly
Translation is beamlet A2, B2 after saturating semi-reflective mirror B7 and reflecting mirror A6 reflection, and beamlet A2, B2 are incident to dynamic grating A8 and quiet grating
9 edge joint positions, by the first-order diffraction light of grating outgoing back to dynamic grating A8 and quiet grating 9 after reflecting mirror B11 reflection, then successively
It reflects, amplifies after being focused by condenser lens 3 through microcobjective 4, most through reflecting mirror A6, semi-transparent semi-reflecting lens B7 and semi-transparent semi-reflecting lens A2
It is imaged in ccd image sensor 5 afterwards.It will be passed respectively in ccd image by moving the first-order diffraction light that grating A8 and quiet grating 9 are emitted
Two focal spots are formed in sensor 5, measure two focal spot fore-and-aft distance Dy, the left and right angular deviation of light beam can be obtained further according to formula (1)
δβ, the face internal rotation angle degree θ of grating is calculated by formula (4)z。
Measuring process three: the measurement of the two-dimensional translation precision of the dynamic relatively quiet grating 9 of grating A8.
By the grating pitching angle theta of the relatively quiet grating 9 of dynamic grating B10x, deflection angle thetayAnd rotation angle, θzIt adjusts to qualification
Range can carry out two-dimensional translation precision measure to eliminate influence of the grating rotating to two-dimensional translation precision.
Make light-source system 1 issue measurement beamlet A1, B1 through semi-transparent semi-reflecting lens A2 transmission after again through be arranged in parallel partly
Translation is beamlet A2, B2 after saturating semi-reflective mirror B7 and reflecting mirror A6 reflection, and beamlet A2, B2 are incident to dynamic grating A8 and quiet grating
9 edge joint positions, moved zero order light reflected that grating A8 and quiet grating 9 are emitted after reflecting mirror B11 reflection back to dynamic grating A8 and
Quiet grating 9, then successively reflected through reflecting mirror A6, semi-transparent semi-reflecting lens B7 and semi-transparent semi-reflecting lens A2, through aobvious after being focused by condenser lens 3
Speck mirror 4 amplifies, and is finally imaged in ccd image sensor 5.Moved the two beam zero order reflections that grating A8 and quiet grating 9 generate
Light chooses wherein strongest two focal spot and calculates its energy ratio, by Fig. 3 because focal spot division occurs for the influence of grating relative translational movement
Shown in the homologous thread of focal spot energy ratio and translation displacement can check in the practical translation precision of grating.
Claims (2)
1. a kind of measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision, it is characterised in that the method step is such as
Under:
One, the measurement of grating Three dimensional rotation precision
(1) define perpendicular to quiet grating grid direction be X-axis, be parallel to quiet grating grid direction be Y-axis, the normal of quiet grating
Direction is Z axis；
(2) test beams are incident to the edge joint position of grating to be spliced, the zero order light reflected and level-one generated according to jointing grating
Diffraction light obtains the Three dimensional rotation splicing precision of grating to be spliced: pitching angle thetax, deflection angle thetay, rotation angle, θz, the pitch angle
θx, deflection angle thetay, rotation angle, θzCalculation formula it is as follows:
In formula:
θxThe angle that grating turns about the X axis；
θyThe angle that grating is rotated around Y-axis；
θzThe angle that grating turns about the Z axis；
δαThe variable quantity of outgoing beam pitch angle α when zero order light reflected is with respect to grating zero deflection；
δβThe variable quantity of outgoing beam or so angle beta when first-order diffraction light is with respect to grating zero deflection；
The angle of α-light beam and X-Z plane；
The angle of β-light beam and Y-Z plane；
Two, the measurement of grating two-dimensional translation precision
(1) by pitching angle thetax, deflection angle thetayAnd rotation angle, θzIt adjusts to acceptability limit；
(2) test beams are incident to the edge joint position of grating to be spliced, according to the far field for the zero order light reflected that jointing grating generates
Focal spot energy ratio utilizes the two-dimensional translation precision of focal spot energy ratio and the homologous thread measurement grating of translation displacement.
2. the measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision according to claim 1, feature exist
In the δαAnd δβCalculation formula it is as follows:
In formula:
DJ=x, yFocal spot central cross and vertical misalignment distance in ccd image sensor；
M- microcobjective amplification factor；
D- condenser lens focal length.
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| CN110907137B (en) * | 2019-11-28 | 2021-06-18 | 中国科学院国家天文台南京天文光学技术研究所 | Detection structure based on blazed grating splicing technology and splicing error adjusting method thereof |
| CN112229513B (en) * | 2020-09-29 | 2021-12-17 | 中国科学院长春光学精密机械与物理研究所 | Three-grating splicing system |
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