CN103983214A - Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light - Google Patents
Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light Download PDFInfo
- Publication number
- CN103983214A CN103983214A CN201410236638.5A CN201410236638A CN103983214A CN 103983214 A CN103983214 A CN 103983214A CN 201410236638 A CN201410236638 A CN 201410236638A CN 103983214 A CN103983214 A CN 103983214A
- Authority
- CN
- China
- Prior art keywords
- light
- video camera
- diffraction light
- semi
- plane mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses a device for measuring four-freedom-degree kinematic errors of a guide rail through non-diffraction light. The device comprises a laser device, a beam expansion collimating mirror, an axicon, a beam splitter prism, a reflecting mirror, a beam splitter, a rectangular prism and video cameras. A kinematic unit composed of the beam splitter and the rectangular prism is fixed to a working platform. Non-diffraction light beams reflected by the beam splitter are received by the first video camera, the non-diffraction light beams transmitted by the beam splitter and reference non-diffraction light beams are received by the second video camera, and by analyzing the change of the positions of center light of non-diffraction light in the two video cameras is analyzed, then the kinematic errors of the perpendicular straightness, the deflection angle, the pitch angle and the roll angle of the guide rail are recognized and measured. The device is simple in structure, large in measurement range, high in accuracy and stability, and good in overall performance, has the multi-freedom-degree measurement function and is a device for measuring multi-freedom-degree errors.
Description
?
Technical field
The invention belongs to the kinematic accuracy field of measuring technique of line slideway, relate to a kind of guide rail multifreedom motion error measuring means, especially relate to a kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error.
Background technology
Along with scientific and technical development, large Range Ultraprecise worktable occupied very consequence in sophisticated industry production and field of scientific study in modern age, and the kinematic accuracy of line slideway directly affects processing and the measuring accuracy of part.
When moving along line slideway, worktable exists along six-freedom degree errors such as the positioning error of guide rail direction, two-dimentional straightness error (horizontal linear degree error, straight vertical dimension error) perpendicular to guide rail direction, two dimension angular error (angle of pitch error, deflection angle error), roll angle errors.
At present the measuring method of line slideway kinematic error is mainly contained to laser interferance method and light intensity gravity model appoach etc.Laser interferometry utilizes the various combination of various optical elements on worktable, by to swashing reflection of light and refraction etc., form the optical path difference relevant to working table movement error, the phase difference calculating then optical path difference being caused, obtains the kinematic error of worktable.The laser facula signal that light intensity gravity model appoach mainly adopts the four-quadrant that is fixed on worktable or ccd detector to pick up collimation, and the variation of further calculating angle and side-play amount by the variation of light intensity centre of gravity place.For laser interferance method and light intensity gravity model appoach, its measuring accuracy and stability depend on the stability of laser instrument itself.And be subject to many factors for the laser beam performance of measuring, and laser beam drift and patterns of change that as laser heat, distortion is caused, air turbulence will change direction of beam propagation etc., all will affect Measurement sensibility and precision.Therefore, existing measurement aspect needs the laser instrument of high price, complexity conventionally.
Summary of the invention
The object of this invention is to provide a kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error, utilization is without the high stability of diffraction, in conjunction with semi-transparent semi-reflecting lens, right-angle prism and video camera, realize straight vertical dimension, deflection angle, the angle of pitch and the separated of roll angle error and the identification of linear motion guide rail, by the processing of the diffraction light-free Moire fringe to camera acquisition, measure four-degree-of-freedom kinematic error.
The technical solution adopted in the present invention is: a kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error, is characterized in that: comprise laser instrument, collimator and extender mirror, the first plane mirror, axial cone mirror, the first Amici prism, the second plane mirror, the second Amici prism, mobile unit, semi-transparent semi-reflecting lens, the 3rd plane mirror, the first video camera, right-angle prism, the 3rd Amici prism, the second video camera, optical attenuator, the 4th plane mirror, worktable and computing machine;
Described mobile unit is comprised of described semi-transparent semi-reflecting lens and right-angle prism, described semi-transparent semi-reflecting lens is arranged on the described positive upper front end of right-angle prism, described mobile unit is fixedly mounted on described worktable, and described worktable moves on tested line slideway;
The laser that described laser instrument produces passes described collimator and extender mirror, after the axial cone mirror described in the first described plane mirror reflection, parallel injecting, forms the diffraction light-free of zeroth order Bezier shape, diffraction light-free is divided into two bundle diffraction light-frees of reflected light and transmitted light after the first described Amici prism, reflected light is as measuring light, and transmitted light is as with reference to light;
Described reference light incides in the 3rd described Amici prism after described optical attenuator, the 4th plane mirror;
Described measurement light incides on the semi-transparent semi-reflecting lens in described mobile unit after the second described catoptron, the second Amici prism; The light that a part is reflected by described semi-transparent semi-reflecting lens is received by the first described video camera after the second described Amici prism, the 3rd plane mirror, another part, forms Moire fringe after interfering incide in the second described video camera with the light through optical attenuator, the 4th plane mirror of the first Amici prism transmission by described through the light of described semi-transparent semi-reflecting lens transmission after described right-angle prism and the 3rd Amici prism;
In the first described video camera, receive a branch of diffraction light-free spot, receive the Moire fringe that two bundle diffraction light-frees are interfered in the second video camera, the first described video camera, the second video camera are connected with described computing machine respectively.
As preferably, what described laser instrument adopted is He-Ne laser instrument.
As preferably, the first described video camera and the second video camera are area array CCD or CMOS.
The present invention has the following advantages and high-lighting effect: using Beams as measuring beam, have that measurement range is large, anti-interference, the feature of high stability; Utilize the amplification characteristic of Moire fringe can realize high-precision measurement; According to the position of spot center point in two video cameras, be easy to identification and separated four-degree-of-freedom kinematic error data; Apparatus structure is simple, be easy to realize, and cost is low.
Accompanying drawing explanation
Fig. 1: be the structural representation of the embodiment of the present invention.
Fig. 2: for diffraction light-free center and four-degree-of-freedom in two CCD of the embodiment of the present invention are related to schematic diagram.
Embodiment
For the ease of those of ordinary skills, understand and enforcement the present invention, below in conjunction with drawings and Examples, the present invention is described in further detail, should be appreciated that exemplifying embodiment described herein, only for description and interpretation the present invention, is not intended to limit the present invention.
Ask for an interview Fig. 1, the technical solution adopted in the present invention is: a kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error, is characterized in that: comprise He-Ne laser instrument 1, collimator and extender mirror 2, the first plane mirror 3, axial cone mirror 4, the first Amici prism 5, the second plane mirror 6, the second Amici prism 7, mobile unit 8, semi-transparent semi-reflecting lens 9, the 3rd plane mirror 10, the first video camera 11, right-angle prism 12, the 3rd Amici prism 13, the second video camera 14, optical attenuator 15, the 4th plane mirror 16, worktable 17 and computing machine 18; Mobile unit 8 is comprised of semi-transparent semi-reflecting lens 9 and right-angle prism 12, and semi-transparent semi-reflecting lens 9 is arranged on the positive upper front end of right-angle prism 12, and mobile unit 8 is fixedly mounted on worktable 17, and worktable 17 moves on tested line slideway; The laser that He-Ne laser instrument 1 produces is through collimator and extender mirror 2, through the first plane mirror 3 reflections, the parallel diffraction light-free that forms zeroth order Bezier shape after injecting axial cone mirror 4, diffraction light-free is divided into two bundle diffraction light-frees of reflected light and transmitted light after the first Amici prism 5, reflected light is as measuring light, and transmitted light is as with reference to light; Reference light incides in the 3rd Amici prism 13 after optical attenuator 15, the 4th plane mirror 16; Measure light incides on the semi-transparent semi-reflecting lens 9 in mobile unit 8 after the second catoptron 6, the second Amici prism 7; The light that a part is reflected by semi-transparent semi-reflecting lens 9 is received by the first video camera 11 after the second Amici prism 7, the 3rd plane mirror 10, another part, forms Moire fringe after interfering incide in the second video camera 14 with the light through optical attenuator 15, the 4th plane mirror 16 by the first Amici prism 5 transmissions through the light of semi-transparent semi-reflecting lens 9 transmissions after right-angle prism 12 and the 3rd Amici prism 13; In the first video camera 11, receive a branch of diffraction light-free spot, receive the Moire fringe that two bundle diffraction light-frees are interfered in the second video camera 14, the first video camera 11, the second video camera 14 are connected with computing machine 18 respectively.
First video camera 11 of the present embodiment and the second video camera 14 can be area array CCD or CMOS.Do not limit in the present embodiment.
The present embodiment is that semi-transparent semi-reflecting lens 9 is fixed on therewith motion on worktable 17 with the mobile unit 8 that right-angle prism 12 forms in work.Before measurement starts, in tested guide rail original position, obtain the center of diffraction light-free in two video cameras, and as the comparison other of follow-up measurement.During measurement, worktable 17 moves on line slideway, and in the first video camera 11, in the center of diffraction light-free spot and the second video camera 14, the center of two bundle diffraction light-frees produces different variations with the difference of kinematic error, as shown in Figure 2; When tested guide rail has straight vertical dimension error and roll angle error, in the first video camera 11, the center of diffraction light-free spot does not change, but when sports platform has the angle of pitch and deflection angle error, center position changes greatly; And the center of two bundle diffraction light-frees in the second video camera 14, one of them light beam by the 4th plane mirror 16, the 3rd Amici prism 13 incidents is reference beam, its center remains constant, and another straight vertical dimension with guide rail, the angle of pitch, deflection angle and roll angle four-degree-of-freedom kinematic error change; By the image that two video cameras are obtained, carry out image processing, by Moire fringe number, accurately calculated the position of central point; In conjunction with the center of diffraction light-free in two video cameras, identify and measure guide rail straight vertical dimension, the angle of pitch, deflection angle and roll angle four-degree-of-freedom kinematic error.
Although this instructions has more been used the terms such as He-Ne laser instrument 1, collimator and extender mirror 2, the first plane mirror 3, axial cone mirror 4, the first Amici prism 5, the second plane mirror 6, the second Amici prism 7, mobile unit 8, semi-transparent semi-reflecting lens 9, the 3rd plane mirror 10, the first video camera 11, right-angle prism 12, the 3rd Amici prism 13, the second video camera 14, optical attenuator 15, the 4th plane mirror 16, worktable 17 and computing machine 18, do not get rid of the possibility of using other terms.Use these terms to be only used to describe more easily essence of the present invention, they are construed to any additional restriction is all contrary with spirit of the present invention.
Should be understood that, the part that this instructions does not elaborate all belongs to prior art.
Should be understood that; the above-mentioned description for preferred embodiment is comparatively detailed; can not therefore think the restriction to scope of patent protection of the present invention; those of ordinary skill in the art is under enlightenment of the present invention; do not departing from the scope situation that the claims in the present invention protect; can also make and replacing or distortion, within all falling into protection scope of the present invention, the scope of asking for protection of the present invention should be as the criterion with claims.
Claims (3)
1. a device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error, it is characterized in that: comprise laser instrument (1), collimator and extender mirror (2), the first plane mirror (3), axial cone mirror (4), the first Amici prism (5), the second plane mirror (6), the second Amici prism (7), mobile unit (8), semi-transparent semi-reflecting lens (9), the 3rd plane mirror (10), the first video camera (11), right-angle prism (12), the 3rd Amici prism (13), the second video camera (14), optical attenuator (15), the 4th plane mirror (16), worktable (17) and computing machine (18),
Described mobile unit (8) is comprised of described semi-transparent semi-reflecting lens (9) and right-angle prism (12), described semi-transparent semi-reflecting lens (9) is arranged on the positive upper front end of described right-angle prism (12), it is upper that described mobile unit (8) is fixedly mounted on described worktable (17), and described worktable (17) moves on tested line slideway;
The laser that described laser instrument (1) produces passes described collimator and extender mirror (2), after the axial cone mirror (4) described in described the first plane mirror (3) reflection, parallel injecting, forms the diffraction light-free of zeroth order Bezier shape, diffraction light-free is divided into two bundle diffraction light-frees of reflected light and transmitted light after described the first Amici prism (5), reflected light is as measuring light, and transmitted light is as with reference to light;
Described reference light incides in the 3rd described Amici prism (13) after described optical attenuator (15), the 4th plane mirror (16);
Described measurement light incides on the semi-transparent semi-reflecting lens (9) in described mobile unit (8) after described the second catoptron (6), the second Amici prism (7); The light that a part is reflected by described semi-transparent semi-reflecting lens (9) is received by described the first video camera (11) after described the second Amici prism (7), the 3rd plane mirror (10), another part, forms after interfering in second video camera (14) of Moire fringe described in inciding with the light through optical attenuator (15), the 4th plane mirror (16) of the first Amici prism (5) transmission by described through the light of described semi-transparent semi-reflecting lens (9) transmission after described right-angle prism (12) and the 3rd Amici prism (13);
In described the first video camera (11), receive a branch of diffraction light-free spot, in the second video camera (14), receive the Moire fringe that two bundle diffraction light-frees are interfered, described the first video camera (11), the second video camera (14) are connected with described computing machine (18) respectively.
2. the device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error according to claim 1, is characterized in that: what described laser instrument (1) adopted is He-Ne laser instrument.
3. the device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error according to claim 1, is characterized in that: described the first video camera (11) and the second video camera (14) are area array CCD or CMOS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236638.5A CN103983214B (en) | 2014-05-30 | 2014-05-30 | A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236638.5A CN103983214B (en) | 2014-05-30 | 2014-05-30 | A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103983214A true CN103983214A (en) | 2014-08-13 |
| CN103983214B CN103983214B (en) | 2016-06-08 |
Family
ID=51275280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410236638.5A Expired - Fee Related CN103983214B (en) | 2014-05-30 | 2014-05-30 | A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103983214B (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105222992A (en) * | 2015-09-17 | 2016-01-06 | 西安科技大学 | A kind of Laser Beam Quality Factor measuring method |
| WO2016033766A1 (en) * | 2014-09-03 | 2016-03-10 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom errors in way that double-frequency lasers are coupled by single optical fiber |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN106247946A (en) * | 2016-07-13 | 2016-12-21 | 合肥工业大学 | A kind of four-degree-of-freedom laser measurement system |
| CN107228638A (en) * | 2017-06-07 | 2017-10-03 | 郑州轻工业学院 | The method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated |
| CN107702644A (en) * | 2017-09-25 | 2018-02-16 | 中国科学院光电研究院 | A kind of multi-degree of freedom measurement device based on double PSD |
| CN110136556A (en) * | 2019-06-18 | 2019-08-16 | 齐齐哈尔大学 | Changeful type pries through infinite demonstrator |
| CN110160471A (en) * | 2019-05-08 | 2019-08-23 | 华中科技大学 | A kind of error measuring system and method for high-precision linear guide |
| CN110282550A (en) * | 2019-07-01 | 2019-09-27 | 上海海事大学 | A kind of bridge crane pivot angle and rope length detection device based on optical diffraction |
| CN110631483A (en) * | 2019-09-29 | 2019-12-31 | 华中科技大学 | Orthogonal grating three-degree-of-freedom magnetic levitation measurement sensor, detector and detection method thereof |
| CN111220094A (en) * | 2019-10-18 | 2020-06-02 | 中国船舶重工集团公司第七一九研究所 | Three-dimensional attitude measurement method based on photoelectric autocollimator |
| CN111678434A (en) * | 2020-06-16 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Device and method for simultaneously detecting six-degree-of-freedom errors of machine tool linear shaft operation |
| CN113701944A (en) * | 2021-09-08 | 2021-11-26 | 王轶君 | Universal rotary inertial motion measurement system based on diffraction beam splitting reverse interference |
| CN115682892A (en) * | 2022-11-02 | 2023-02-03 | 四川大学 | Guide rail motion error synchronous measuring device based on position triggering |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5900938A (en) * | 1996-11-08 | 1999-05-04 | The Research Foundation Of State University Of New York | Laser measurement system for rapid calibration of machine tools |
| JP2010101622A (en) * | 2008-10-21 | 2010-05-06 | Tohoku Univ | Angle sensor |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| CN203241031U (en) * | 2012-12-07 | 2013-10-16 | 浙江师范大学 | Device measuring deflection angles and pitch angles of linear guide rail |
| CN203929036U (en) * | 2014-05-30 | 2014-11-05 | 湖北工业大学 | A kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error |
-
2014
- 2014-05-30 CN CN201410236638.5A patent/CN103983214B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5900938A (en) * | 1996-11-08 | 1999-05-04 | The Research Foundation Of State University Of New York | Laser measurement system for rapid calibration of machine tools |
| JP2010101622A (en) * | 2008-10-21 | 2010-05-06 | Tohoku Univ | Angle sensor |
| CN203241031U (en) * | 2012-12-07 | 2013-10-16 | 浙江师范大学 | Device measuring deflection angles and pitch angles of linear guide rail |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| CN203929036U (en) * | 2014-05-30 | 2014-11-05 | 湖北工业大学 | A kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error |
Non-Patent Citations (1)
| Title |
|---|
| 曹睿等: "多自由度误差同时测量中的滚转角测量方法", 《光学学报》 * |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016033766A1 (en) * | 2014-09-03 | 2016-03-10 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom errors in way that double-frequency lasers are coupled by single optical fiber |
| CN105222992A (en) * | 2015-09-17 | 2016-01-06 | 西安科技大学 | A kind of Laser Beam Quality Factor measuring method |
| CN105222992B (en) * | 2015-09-17 | 2018-07-31 | 西安科技大学 | A kind of Laser Beam Quality Factor measurement method |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN106247946A (en) * | 2016-07-13 | 2016-12-21 | 合肥工业大学 | A kind of four-degree-of-freedom laser measurement system |
| CN106247946B (en) * | 2016-07-13 | 2018-10-02 | 合肥工业大学 | A kind of four-degree-of-freedom laser measurement system |
| CN107228638A (en) * | 2017-06-07 | 2017-10-03 | 郑州轻工业学院 | The method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated |
| CN107228638B (en) * | 2017-06-07 | 2019-05-24 | 郑州轻工业学院 | The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously |
| CN107702644A (en) * | 2017-09-25 | 2018-02-16 | 中国科学院光电研究院 | A kind of multi-degree of freedom measurement device based on double PSD |
| CN107702644B (en) * | 2017-09-25 | 2020-03-03 | 中国科学院光电研究院 | Multi-degree-of-freedom measuring device based on double PSDs |
| CN110160471A (en) * | 2019-05-08 | 2019-08-23 | 华中科技大学 | A kind of error measuring system and method for high-precision linear guide |
| CN110160471B (en) * | 2019-05-08 | 2020-08-28 | 华中科技大学 | Error measurement system and method for high-precision linear guide rail |
| CN110136556A (en) * | 2019-06-18 | 2019-08-16 | 齐齐哈尔大学 | Changeful type pries through infinite demonstrator |
| CN110136556B (en) * | 2019-06-18 | 2024-01-23 | 齐齐哈尔大学 | Multi-function peeping infinite demonstrating instrument |
| CN110282550A (en) * | 2019-07-01 | 2019-09-27 | 上海海事大学 | A kind of bridge crane pivot angle and rope length detection device based on optical diffraction |
| CN110282550B (en) * | 2019-07-01 | 2020-05-29 | 上海海事大学 | Bridge crane swing angle and rope length detection device based on light diffraction |
| CN110631483A (en) * | 2019-09-29 | 2019-12-31 | 华中科技大学 | Orthogonal grating three-degree-of-freedom magnetic levitation measurement sensor, detector and detection method thereof |
| CN111220094A (en) * | 2019-10-18 | 2020-06-02 | 中国船舶重工集团公司第七一九研究所 | Three-dimensional attitude measurement method based on photoelectric autocollimator |
| CN111678434A (en) * | 2020-06-16 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Device and method for simultaneously detecting six-degree-of-freedom errors of machine tool linear shaft operation |
| CN113701944A (en) * | 2021-09-08 | 2021-11-26 | 王轶君 | Universal rotary inertial motion measurement system based on diffraction beam splitting reverse interference |
| CN115682892A (en) * | 2022-11-02 | 2023-02-03 | 四川大学 | Guide rail motion error synchronous measuring device based on position triggering |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103983214B (en) | 2016-06-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103983214A (en) | Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light | |
| CN102313642B (en) | High-precision focus detection device for long-focus lens | |
| CN107228638B (en) | The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously | |
| CN105424322A (en) | Self-calibration optical axis parallelism detector and detection method | |
| CN102679894B (en) | Method for measuring central thickness of reflecting type differential confocal lens | |
| CN203929036U (en) | A kind of device that utilizes diffraction light-free to measure guide rail four-degree-of-freedom kinematic error | |
| CN104913732B (en) | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser | |
| CN104515470B (en) | Holoscan exposes two-dimentional work bench displacement and deflection angle measurement light channel structure | |
| CN104315985B (en) | Interferometric method for measuring central thickness of lens | |
| CN110455226B (en) | Calibration system and method for laser collimation transceiving integrated straightness measurement | |
| CN202734770U (en) | Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle | |
| CN101846506A (en) | Roll angle measurement method based on common path parallel beams | |
| CN102679895A (en) | Method for measuring center thickness of reflective confocal lens | |
| CN105066903A (en) | Laser three-dimensional measurement system and measurement method thereof | |
| CN103528526B (en) | Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device | |
| CN103994876A (en) | Optical axis bounce amount test system | |
| CN103471524A (en) | Vertex curvature radius measurement method for confocal paraboloid | |
| CN103615972A (en) | Optical interferometer used for detecting inner surface of hollow cylinder | |
| CN103822580A (en) | Multi-point real-time measurement system and method of deformation and attitude of overlong frame | |
| CN104634275A (en) | Non-spherical real-time interference measurement device based on Newton ring and non-spherical real-time interference measurement method based on Newton ring | |
| CN103267478A (en) | High-precision position detection device and method | |
| CN105203036A (en) | Device and method for measuring thickness of center of lens according to non-contact method | |
| CN105758333A (en) | Long-trace optical surface profile detector | |
| CN104374548B (en) | Interferometric method for measuring refractive index of lens | |
| CN203337093U (en) | High-precision position-detecting device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 |