CN110160471B - Error measurement system and method for high-precision linear guide rail - Google Patents
Error measurement system and method for high-precision linear guide rail Download PDFInfo
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- CN110160471B CN110160471B CN201910380843.1A CN201910380843A CN110160471B CN 110160471 B CN110160471 B CN 110160471B CN 201910380843 A CN201910380843 A CN 201910380843A CN 110160471 B CN110160471 B CN 110160471B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The invention belongs to the field of geometric accuracy detection, and particularly discloses an error measurement system and method for a high-accuracy linear guide rail. The system comprises a fixed unit and a mobile unit, wherein: the fixed unit is arranged on a fixed plane of the numerical control machine tool and comprises a helium-neon laser, a first light splitting prism, a second light splitting prism, a polarization light splitting prism, a first 1/4 wave plate and a first four-quadrant detector; the mobile unit is installed on the mobile workbench of digit control machine tool, including corner cube prism. The invention adopts the pyramid prism which is insensitive to the angle to measure the straightness error, can effectively avoid crosstalk and measurement error caused by angle change, and simultaneously, the pyramid prism is arranged on an axis or a paraxial line, and can effectively reduce the influence of Abbe error on the measurement result, thereby improving the precision of the straightness measurement.
Description
Technical Field
The invention belongs to the field of geometric accuracy detection, and particularly relates to an error measurement system and method for a high-accuracy linear guide rail.
Background
In the field of ultra-precision machining, the precision of a linear guide rail of a numerical control machine directly influences the motion precision of the numerical control machine, and the motion precision of the numerical control machine directly determines the machining precision, so that accurate error measurement of the linear guide rail is one of important ways for ensuring the machining precision.
At present, the error measurement of the linear guide rail is mainly carried out by adopting a commercial laser interferometer to carry out single measurement on each error, but the method needs six times of installation measurement, so that the measurement process is complex, the consumed time is long, and the measurement precision is low. And the error measurement is carried out by adopting a grating diffraction method, only three angle error measurements can be carried out, and the measurement stroke is limited due to the limitation of grating diffraction.
Therefore, multiple beams are adopted to carry out multiple-degree-of-freedom measurement, which is the main development direction of error measurement of a linear guide rail, and CN201510067188 discloses a laser heterodyne interference straightness measurement device and method with six-degree-of-freedom detection.
Disclosure of Invention
In view of the above-mentioned drawbacks and/or needs for improvement of the prior art, the present invention provides an error measurement system and method for a high-precision linear guide, in which a pyramid prism is adopted and arranged near a central axis, so that measurement errors can be effectively reduced, and measurement accuracy of the linearity errors can be improved, and thus the error measurement system and method are particularly suitable for error measurement of the linear guide.
In order to achieve the above object, the present invention provides an error measuring system of a high-precision linear guide, the system comprising a fixed unit and a movable unit, wherein:
the fixed unit is arranged on a fixed plane of the numerical control machine tool and comprises a He-Ne laser, a first light splitting prism, a second light splitting prism, a polarization light splitting prism, a first 1/4 wave plate and a first four-quadrant detector; the mobile unit is arranged on a mobile workbench of the numerical control machine tool and comprises a pyramid prism;
laser beams emitted by the helium-neon laser sequentially pass through the first light splitting prism and the second light splitting prism to enter the polarization light splitting prism and are divided into reflected light S light and transmitted light P light, the transmitted light P light enters the first 1/4 wave plate to be modulated, the modulated light beams enter the pyramid prism, the generated emergent light beams enter the semi-transmission semi-reflecting mirror and are divided into reflected light S ' light and transmitted light P ' light, the transmitted light P ' light enters the first four-quadrant detector, and light spot displacement detected by the first four-quadrant detector is utilized in the process that the moving unit performs linear motion along the guide rail, so that the straightness error of the linear guide rail is obtained.
As a further preferable mode, the fixing unit further includes a single-point detector, a second 1/4 wave plate, and a first mirror, the reflected light S is reflected by the first mirror after being modulated by the second 1/4 wave plate, the reflected light beam passes through the polarization beam splitter prism after being modulated by the second 1/4 wave plate, enters the single-point detector as reference light, the reflected light S' enters the pyramid prism, the generated emergent light beam enters the first 1/4 wave plate for modulation, the modulated light beam is reflected by the polarization beam splitter prism and enters the single-point detector as measurement light, and the position degree error of the linear guide is obtained by using interference fringe data of the measurement light and the reference light.
As a further preferred, the fixed unit further includes a second reflecting mirror and a third reflecting mirror, the moving unit further includes a third dichroic prism, a fourth reflecting mirror, a second four-quadrant detector, a fourth dichroic prism, a fifth reflecting mirror and a third four-quadrant detector, the laser beam emitted from the he-ne laser enters the first dichroic prism, is divided into a refracted beam N and a transmitted beam M, the refracted beam N is reflected by the second reflecting mirror, passes through the third dichroic prism and enters the fourth reflecting mirror, the generated reflected beam enters the second four-quadrant detector, the transmitted beam M enters the second dichroic prism, the generated refracted beam is reflected by the third reflecting mirror, passes through the fourth dichroic prism and enters the fifth reflecting mirror, the generated reflected beam enters the third four-quadrant detector, and during the linear motion along the guide rail by the moving unit, and the light spot displacement detected by the second four-quadrant detector and the third four-quadrant detector obtains the yaw angle error and the pitch angle error of the linear guide rail.
Preferably, the fixed unit further includes a fourth four-quadrant detector, a fifth four-quadrant detector, a sixth reflector and a seventh reflector, the refracted light generated by the laser beam at the third beam splitter prism passes through the sixth reflector and then enters the fourth four-quadrant detector, the refracted light generated by the laser beam at the fourth beam splitter prism passes through the seventh reflector and then enters the fifth four-quadrant detector, and the roll angle error of the linear guide rail is obtained by using the displacement of the light spots detected by the fourth four-quadrant detector and the fifth four-quadrant detector during the linear movement of the moving unit along the guide rail.
Preferably, the laser beam emitted by the he-ne laser is single-frequency high-power circularly polarized light.
As a further preference, the third and fourth light splitting prisms are arranged symmetrically with respect to the corner cube prism.
It is further preferable that a distance from the sixth mirror to the third prism is equal to a distance from the seventh mirror to the fourth prism, and reflected light beams generated by the sixth mirror and the seventh mirror are parallel to each other.
According to another aspect of the present invention, there is provided a method of error measurement using the above measurement system, the method comprising the steps of:
(a) building an error measuring system of the high-precision linear guide rail in a numerical control machine tool and aligning and debugging a light path, wherein the fixed unit is installed on a fixed workbench or a fixed tripod, and the moving unit is installed on a moving workbench;
(b) starting the numerical control machine tool to enable the movable workbench to do linear motion along the linear guide rail, and collecting position data of a group of light spots at intervals of a preset distance by using a four-quadrant detector;
(c) and obtaining error information of each section of the linear guide rail according to the displacement of the light spot in the preset distance of each section.
As a further preference, in the step (c), the error information of the linear guide rail includes one or more of a straightness error, a position error, a yaw angle error, a pitch angle error and a roll angle error.
As a further preferred, the calculation formula of the straightness error is:
wherein Δ X is a linear error of the linear guide in the X-axis direction, XQD1The displacement of the light spot detected by the first four-quadrant detector in the X direction within a preset distance is detected, delta Y is the linearity error of the linear guide rail in the Y direction, and Y is the displacement of the light spot detected by the first four-quadrant detector in the Y directionQD1The displacement of the light spot detected by the first four-quadrant detector in the Y direction within a preset distance is detected;
preferably, the calculation formula of the position degree error is as follows:
wherein L is the position measured value of the linear guide rail, N is the number of interference fringes, and lambda is the wavelength of the laser beam emitted by the helium-neon laser,
is the phase variation of the interference fringe;
preferably, the calculation formula of the yaw angle error is as follows:
wherein α is the yaw angle error of the linear guide rail, YQD2The displacement of the light spot detected by the second four-quadrant detector in the Y direction within a preset distance is detectedQD3D is the displacement of the light spot detected by the third four-quadrant detector in the Y direction within a preset distance, and d is the displacement of the light spot detected by the second four-quadrant detector and the third four-quadrant detectorThe distance of the device;
preferably, the pitch angle error is calculated by the formula:
wherein β is the pitch angle error of the linear guide rail, XQD2The displacement of the light spot detected by the second four-quadrant detector within a preset distance in the X direction is detectedQD3The displacement of the light spot detected by the third four-quadrant detector in the X direction within a preset distance is detected;
preferably, the roll angle error is calculated by the formula:
wherein γ is a rolling angle error of the linear guide, YQD4The displacement of the light spot detected by the fourth four-quadrant detector in the Y direction within a preset distance is detectedQD5And h is the distance between the light beams entering the fourth four-quadrant detector and the fifth four-quadrant detector.
Generally, compared with the prior art, the above technical solution conceived by the present invention mainly has the following technical advantages:
1. the invention adopts the pyramid prism which is insensitive to the angle to measure the straightness error, can effectively avoid crosstalk and measurement error caused by angle change, and can effectively reduce the influence of Abbe error on the measurement result by installing the pyramid prism on an axis or a paraxial line, thereby improving the accuracy of the straightness measurement;
2. meanwhile, the position error is measured by adopting a laser interference method, and compared with measurement methods such as difference frequency or grating ruler and the like, the method has the advantages of larger measurement range and higher measurement precision;
3. in addition, when the error measurement system provided by the invention is used for measuring the pitch angle error and the yaw angle error, the decoupling separation of the pitch angle error and the yaw angle error can be realized by using the symmetrical structural arrangement and according to the light path principle, and the interference of various error crosstalk on the measurement result is effectively avoided, so that the measurement precision is improved;
4. particularly, the error measurement system of the high-precision linear guide rail provided by the invention can realize six-degree-of-freedom synchronous measurement of the linear guide rail, has the advantages of simple and compact structure and high measurement efficiency, can effectively reduce the interference on the measurement result caused by the processing error or the installation error of a device, and realizes decoupling separation among various errors, so that the measurement result is more accurate and the precision is higher.
Drawings
Fig. 1 is a schematic structural diagram of an error measurement system of a high-precision linear guide rail provided by a preferred embodiment of the invention;
FIG. 2 is a schematic diagram of a system for measuring straightness error in a preferred embodiment of the present invention;
FIG. 3 is a schematic diagram of a system for measuring position error in accordance with a preferred embodiment of the present invention;
fig. 4 is a system diagram of a mobile unit in an error measurement system for measuring yaw and pitch errors in a preferred embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein:
1-a first beam splitter prism, 2-a second mirror, 3-a second beam splitter prism, 4-a third mirror, 5-a polarization beam splitter prism, 6-a single point detector, 7-a second 1/4 wave plate, 8-a first mirror, 9-a first 1/4 wave plate, 10-a first four-quadrant detector, 11-a semi-transmission semi-reflective mirror, 12-a fourth four-quadrant detector, 13-a fifth four-quadrant detector, 14-a pyramid prism, 15-a third beam splitter prism, 16-a sixth mirror, 17-a second four-quadrant detector, 18-a fourth mirror, 19-a fourth beam splitter prism, 20-a seventh mirror, 21-a fifth mirror, 22-a third four-quadrant detector.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1 to 2, an embodiment of the present invention provides an error measurement system for a high-precision linear guide rail, the system including a fixed unit and a mobile unit, wherein:
the fixed unit is arranged on a fixed plane of the numerical control machine tool and comprises a He-Ne laser 21, a second beam splitter prism 3, a polarization beam splitter prism 5, a first 1/4 wave plate 9 and a first four-quadrant detector 10;
the mobile unit is arranged on a mobile workbench of the numerical control machine tool and comprises a pyramid prism 14;
laser beams emitted by the He-Ne laser sequentially pass through the first beam splitter prism 1 and the second beam splitter prism 3 to enter the polarization beam splitter prism 5 and are divided into reflected light S light and transmitted light P light, the transmitted light P light enters the first 1/4 wave plate 9 to be modulated, the modulated light beams enter the pyramid prism 14, the generated emergent light beams enter the semi-transmission semi-reflection mirror 11 and are divided into reflected light S ' light and transmitted light P ' light, the transmitted light P ' light enters the first four-quadrant detector 10, and in the process of linear motion of the moving unit along the guide rail, light spots detected by the first four-quadrant detector 10 are displaced, and the straightness error of the linear guide rail is obtained.
Further, as shown in fig. 3, the fixing unit further includes a single-point detector 6, a second 1/4 wave plate 7 and a first reflecting mirror 8, the reflected light S is modulated by the second 1/4 wave plate 7 and then reflected by the first reflecting mirror 8, the reflected light beam is modulated by the second 1/4 wave plate 7 and then passes through the polarization beam splitter prism 5, and enters the single-point detector 6 as reference light, the reflected light S' enters the pyramid prism 14, the generated emergent light beam enters the first 1/4 wave plate 9 for modulation, the modulated light beam is reflected by the polarization beam splitter prism 5 and enters the single-point detector 6 as measurement light, and the position degree error of the linear guide is obtained by using the interference fringe data of the measurement light and the reference light.
Further, as shown in FIG. 4, the fixed unit further includes a second reflecting mirror 2 and a third reflecting mirror 4, the moving unit further includes a third dichroic prism 15, a fourth reflecting mirror 18, a second four-quadrant detector 17, a fourth dichroic prism 19, a fifth reflecting mirror 21 and a third four-quadrant detector 22, the laser beam from the He-Ne laser enters the first dichroic prism 1 and is divided into a refracted beam N and a transmitted beam M, the refracted beam N is reflected by the second reflecting mirror 2 and then passes through the third dichroic prism 15 to enter the fourth reflecting mirror 18, the generated reflected beam enters the second four-quadrant detector 17, the transmitted beam M enters the second dichroic prism 3, the generated refracted beam is reflected by the third reflecting mirror 4 and then passes through the fourth dichroic prism 19 to enter the fifth reflecting mirror 21, the generated reflected beam enters the third four-quadrant detector 22, and during the linear movement along the guide rail by the moving unit, and (3) obtaining the yaw angle error and the pitch angle error of the linear guide rail by the displacement of the light spots detected by the second four-quadrant detector 17 and the third four-quadrant detector 22.
Further, the fixed unit further comprises a fourth four-quadrant detector 12, a fifth four-quadrant detector 13, a sixth reflector 16 and a seventh reflector 20, the refracted light of the laser generated by the third beam splitter prism 15 is reflected by the sixth reflector 16 and then enters the fourth four-quadrant detector 12, the refracted light of the laser generated by the fourth beam splitter prism 19 is reflected by the seventh reflector 20 and then enters the fifth four-quadrant detector 13, and in the process of linear motion of the moving unit along the guide rail, the light spot displacement detected by the fourth four-quadrant detector 12 and the fifth four-quadrant detector 13 obtains the roll angle error of the linear guide rail.
Furthermore, the preferred helium-neon laser that adopts the wavelength to be 632.8nm, the laser beam that it sent is single-frequency high power circular polarization light, has higher stability, receives less external disturbance.
Further, third light splitting prism 15 and fourth light splitting prism 19 are symmetrically arranged with respect to corner cube 14.
Further, the distance from the sixth mirror 16 to the third prism 15 is equal to the distance from the seventh mirror 20 to the fourth prism 19, and the reflected light beams generated by the sixth mirror 16 and the seventh mirror 20 are parallel to each other.
When the error measurement system of the high-precision linear guide rail provided by the invention is used for measurement, various errors can be decoupled and separated, and the measurement accuracy is improved. The systematic errors mainly originate from: manufacturing errors of optical devices, installation errors, circuit signal interference errors, influences of external environments such as temperature, humidity, vibration and the like.
The invention also provides a method for measuring errors by using the measuring system, which comprises the following steps:
(a) an error measuring system of a high-precision linear guide rail is built in a numerical control machine tool, and light path alignment debugging is carried out, wherein a fixed unit is installed on a fixed workbench or a fixed tripod, and a moving unit is installed on a moving workbench;
(b) starting the numerical control machine tool to enable the movable workbench to do linear motion along the linear guide rail, and acquiring position data of a group of light spots at intervals of a preset distance by using a four-quadrant detector, wherein the preset distance is preferably one tenth of the length of the linear guide rail;
(c) obtaining error information of each section of the linear guide rail according to the displacement of the light spot in the preset distance of each section, wherein the error information comprises one or more of straightness error, position error, yaw angle error, pitch angle error and roll angle error, and the error information comprises:
(i) assuming that the guide rail moves along the Z-axis direction, the linearity error is calculated by the formula:
wherein Δ X is a linear error of the linear guide in the X-axis direction, XQD1The displacement of the light spot detected by the first four-quadrant detector in the X direction within a preset distance is detected, delta Y is the straightness error of the linear guide rail in the Y direction, and Y is the displacement of the light spot detected by the first four-quadrant detector in the X directionQD1The displacement of the light spot detected by the first four-quadrant detector in the Y direction within a preset distance is detected;
(ii) the calculation formula of the position error is as follows:
wherein L is the measured value of the position of the linear guide rail, N is the number of interference fringes, lambda is the wavelength of the laser beam emitted by the helium-neon laser,
is the phase variation of the interference fringe;
(iii) the calculation formula of the yaw angle error is as follows:
wherein α is the yaw angle error of the linear guide rail, YQD2The displacement of the light spot detected by the second four-quadrant detector within the preset distance in the Y directionQD3D is the distance between the second four-quadrant detector and the third four-quadrant detector;
(iv) the calculation formula of the pitch angle error is as follows:
wherein β is the pitch angle error of the linear guide rail, XQD2The displacement of the light spot detected by the second four-quadrant detector within the preset distance in the X directionQD3The displacement of the light spot detected by a third four-quadrant detector in the preset distance in the X direction is detected;
(v) although the straightness error, the yaw angle error, the pitch angle error and the roll angle error are all coupled to the fourth four-quadrant detector and the fifth four-quadrant detector, since the third light splitting prism 15 and the fourth light splitting prism 19 are symmetrically distributed about the linear guide rail, displacement variations caused by errors caused by the straightness error, the yaw angle error and the pitch angle error on the fourth four-quadrant detector and the fifth four-quadrant detector are all equal, and therefore the calculation formula of the roll angle error is as follows:
wherein γ is the rolling angle error of the linear guide, YQD4The displacement of the light spot detected by the fourth four-quadrant detector within the preset distance in the Y directionQD5H is the distance between the light beams entering the fourth four-quadrant detector and the fifth four-quadrant detector, and h is the displacement of the light spot detected by the fifth four-quadrant detector in the preset distance in the Y direction.
Further, in the step (b), the light intensity signal of the light spot in the four-quadrant detector is converted into the position data of the light spot by using a data acquisition card, and the principle is as follows:
in the formula, σxIs the position coordinate of the spot in the X direction, σyIs the position coordinate of the light spot in the Y direction, k is the light spot coefficient, I1、I2、I3、I4Sequentially the light intensity signals detected by each quadrant in the four-quadrant detector.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (10)
1. An error measuring system of a high-precision linear guide, comprising a fixed unit and a moving unit, wherein:
the fixed unit is arranged on a fixed plane of the numerical control machine tool and comprises a He-Ne laser, a first beam splitter prism (1), a second beam splitter prism (3), a polarization beam splitter prism (5), a first 1/4 wave plate (9) and a first four-quadrant detector (10); the mobile unit is arranged on a mobile workbench of the numerical control machine tool and comprises a pyramid prism (14), and the pyramid prism (14) is arranged on an axis or a paraxial line;
laser beams emitted by the helium-neon laser sequentially pass through the first light splitting prism (1) and the second light splitting prism (3) to enter the polarization light splitting prism (5) and are divided into reflected light S light and transmitted light P light, the transmitted light P light enters the first 1/4 wave plate (9) to be modulated, the modulated light beams enter the pyramid prism (14), generated emergent light beams enter the semi-transmission semi-reflection mirror (11) and are divided into reflected light S ' light and transmitted light P ' light, the transmitted light P ' light enters the first four-quadrant detector (10), and in the process of linear motion of the moving unit along the guide rail, light spots detected by the first four-quadrant detector (10) are displaced to obtain the straightness error of the linear guide rail.
2. The system for measuring errors of a high precision linear guide according to claim 1, the fixed unit also comprises a single-point detector (6), a second 1/4 wave plate (7) and a first reflector (8), the reflected light S is reflected by the first reflecting mirror (8) after being modulated by the second 1/4 wave plate (7), the reflected light beam passes through the polarization beam splitter prism (5) after being modulated by the second 1/4 wave plate (7) and enters the single-point detector (6) as reference light, the reflected light S' enters the pyramid prism (14), the generated emergent light beam enters the first 1/4 wave plate (9) for modulation, the modulated light beam is reflected by the polarization beam splitter prism (5) and enters the single-point detector (6) as measuring light, and the position degree error of the linear guide rail is obtained by using interference fringe data of the measuring light and the reference light.
3. The error measuring system of high-precision linear guide according to claim 2, wherein the fixed unit further comprises a second reflecting mirror (2) and a third reflecting mirror (4), the moving unit further comprises a third dichroic prism (15), a fourth reflecting mirror (18), a second four-quadrant detector (17), a fourth dichroic prism (19), a fifth reflecting mirror (21), and a third four-quadrant detector (22), the laser beam emitted from the helium laser enters the first dichroic prism (1) and is divided into a refracted light N light and a transmitted light M light, the refracted light N light is reflected by the second reflecting mirror (2), passes through the third dichroic prism (15) and enters the fourth reflecting mirror (18), the generated reflected light enters the second four-quadrant detector (17), and the transmitted light M light enters the second dichroic prism (3), and the generated refracted light is reflected by the third reflector (4), passes through the fourth light-dividing prism (19) and enters the fifth reflector (21), the generated reflected light enters the third four-quadrant detector (22), and the light spots detected by the second four-quadrant detector (17) and the third four-quadrant detector (22) are displaced in the process of linear motion of the moving unit along the guide rail, so that the yaw angle error and the pitch angle error of the linear guide rail are obtained.
4. The system for measuring an error of a high-precision linear guide according to claim 3, the fixed unit also comprises a fourth four-quadrant detector (12), a fifth four-quadrant detector (13), a sixth reflector (16) and a seventh reflector (20), wherein the refracted light generated by the laser in the third beam splitter prism (15) enters the fourth four-quadrant detector (12) after being reflected by the sixth reflector (16), meanwhile, the refracted light generated by the laser in the fourth light splitting prism (19) enters the fifth four-quadrant detector (13) after being reflected by the seventh reflector (20), and in the process of linear motion along the guide rail by using the moving unit, and the fourth four-quadrant detector (12) and the fifth four-quadrant detector (13) detect the displacement of the light spot, and obtain the rolling angle error of the linear guide rail.
5. The system for measuring the error of the high-precision linear guide rail according to any one of claims 1 to 4, wherein the laser beam emitted by the He-Ne laser is single-frequency high-power circularly polarized light.
6. The high-precision linear guide error measurement system according to claim 3, wherein the third light splitting prism (15) and the fourth light splitting prism (19) are symmetrically arranged with respect to the corner cube (14).
7. The high-precision linear guide error measurement system according to claim 4, wherein the distance from the sixth mirror (16) to the third light splitting prism (15) is equal to the distance from the seventh mirror (20) to the fourth light splitting prism (19), and the reflected light beams generated by the sixth mirror (16) and the seventh mirror (20) are parallel to each other.
8. A method for measuring an error by using the error measuring system of the high-precision linear guide rail according to any one of claims 1 to 7, the method comprising the steps of:
(a) building an error measuring system of the high-precision linear guide rail in a numerical control machine tool and aligning and debugging a light path, wherein the fixed unit is installed on a fixed workbench or a fixed tripod, and the moving unit is installed on a moving workbench;
(b) starting the numerical control machine tool to enable the movable workbench to do linear motion along the linear guide rail, and collecting position data of a group of light spots at intervals of a preset distance by using a four-quadrant detector;
(c) and obtaining error information of each section of the linear guide rail according to the displacement of the light spot in the preset distance of each section.
9. The method for error measurement using an error measurement system of a high-precision linear guide according to claim 8, wherein in the step (c), the error information of the linear guide includes one or more of a linearity error, a position error, a yaw angle error, a pitch angle error, and a roll angle error.
10. The error measurement method of claim 9, wherein the straightness error is calculated by the formula:
wherein Δ X is a linear error of the linear guide in the X-axis direction, XQD1The displacement of the light spot detected by a first four-quadrant detector (10) in the X direction within a preset distance is represented by delta Y which is the straightness error of the linear guide rail in the Y directionQD1The displacement of the light spot detected by the first four-quadrant detector (10) in the Y direction within a preset distance is detected;
the calculation formula of the position error is as follows:
wherein L is the position measured value of the linear guide rail, N is the number of interference fringes, and lambda is the wavelength of the laser beam emitted by the helium-neon laser,
is the phase variation of the interference fringe;
the calculation formula of the yaw angle error is as follows:
wherein α is the yaw angle error of the linear guide rail, YQD2The displacement of the light spot detected by a second four-quadrant detector (17) within a preset distance in the Y directionQD3D is the displacement of the light spot detected by a third four-quadrant detector (22) in the Y direction within a preset distance, and the distance between the second four-quadrant detector and the third four-quadrant detector is d;
the pitch angle error is calculated by the following formula:
wherein β is the pitch angle error of the linear guide rail, XQD2The displacement of the light spot detected by a second four-quadrant detector (17) within a preset distance in the X directionQD3The displacement of the light spot detected by a third four-quadrant detector (22) in the preset distance in the X direction is detected;
the roll angle error is calculated by the following formula:
wherein γ is a rolling angle error of the linear guide, YQD4The displacement of the light spot detected by a fourth four-quadrant detector (12) within a preset distance in the Y directionQD5H is the displacement of the light spot detected by the fifth four-quadrant detector (13) in the Y direction within a preset distance, and h is the distance between the light beams entering the fourth four-quadrant detector (12) and the fifth four-quadrant detector (13).
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| CN201910380843.1A CN110160471B (en) | 2019-05-08 | 2019-05-08 | Error measurement system and method for high-precision linear guide rail |
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| CN114264255B (en) * | 2021-12-28 | 2023-06-13 | 中国科学院上海天文台 | Rolling angle measurement system and method based on interferometric displacement measurement system |
| CN116086360B (en) * | 2023-04-11 | 2023-07-04 | 季华实验室 | Straightness error separation device and straightness error separation method for large-stroke OLED (organic light emitting diode) ink-jet printer |
| CN116929250B (en) * | 2023-07-13 | 2024-03-12 | 中国科学院力学研究所 | Measuring device for angle error between parallel reflecting surfaces |
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