CN101221044A - Device and method for large distance light parallel regulation - Google Patents
Device and method for large distance light parallel regulation Download PDFInfo
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- CN101221044A CN101221044A CNA2008100570885A CN200810057088A CN101221044A CN 101221044 A CN101221044 A CN 101221044A CN A2008100570885 A CNA2008100570885 A CN A2008100570885A CN 200810057088 A CN200810057088 A CN 200810057088A CN 101221044 A CN101221044 A CN 101221044A
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Abstract
The invention relates to a device and a method for the parallelism adjustment of large-distance light rays, and uses a collimate laser device (1) with high stability for emitting collimate laser and a polarization light splitter (2) for splitting light; a Lambada divided by four wave plate is respectively arranged on a reflecting light path and a transmittance light path of the polarization light splitter, and the fast axis direction of the wave plate forms an angle of 45 degrees with the polarization direction of the laser and then is reflected onto a plane reflector. The plane reflector is arranged on a guide rail pair with linear movement, and an autocollimator (9) and an electronic gradienter (13) are used for monitoring and leading the plane reflector to keep in the same state when moving for a larger distance. The light ray is led to reflect backwards in a light ray adjustment process and enter a same angle detector (8) in succession, and a two-dimensional reflector (6) is adjusted for leading the parallelism between two outgoing light rays to be lower than one arc second. The invention can further adjust the parallelism among a plurality of light beams in a large distance and measure the roll angle of the guide rail pair with linear movement.
Description
Technical field
The invention belongs to photoelectric detection technology field, the high precision adjustment of the depth of parallelism between particularly a kind of light.Utilize adjusted parallel beam can carry out the measurement of paralleism of two line slideways, can also carry out the rolling angle measurement of line slideway auxiliary itself.
Background technology
Parallel the debuging of step-by-step scanning photo-etching device mask plate work stage and silicon slice workpiece platform guide rail can utilize parallel rays to carry out depth of parallelism detection, and wherein the collimation of light is the reliability that directly has influence on the result who debugs.In addition, the numerically-controlled machine line slideway auxiliary need carry out rolling angle measurement, and the simplest measuring method is to utilize parallel rays to measure.Although can make light produce parallel rays,, be difficult to obtain the two-beam line parallel below 1 second of arc because pentagonal prism can only guarantee the vertical of a direction by two pentagonal prisms.
The object of the present invention is to provide a kind of laser parallel adjusting gear and method, adjust precision and be better than 1 second of arc with versatility, big distance.The parallel rays that utilizes the method to obtain can be used for greatly debuging rolling angle measurement with guide rail itself apart from the collimation between the guide rail.
Summary of the invention
The device of large distance light parallel adjustment is: the collimation laser device sends the collimation laser of high stability, through the polarizing beam splitter beam split.Wherein place λ/4 wave plates on the reflected light path of polarizing beam splitter, the quick shaft direction of wave plate and the polarization direction of laser are at 45, incide on the plane mirror again.And on the transmitted light path of polarizing beam splitter, place another one λ/4 wave plates, the quick shaft direction of wave plate and the polarization direction of laser are also at 45, again by the mirror reflection of a two-dimensional adjustable plane reflection, make that its reflection direction is parallel with the reflected light of polarizing beam splitter to be incided on the plane mirror.It is characterized in that: this plane mirror is placed on the guideway of a line slideway, and this guideway also can carry out Bidimensional small angle to be regulated.On this guideway, placed the high-precision electronic level meter, placed autocollimator at an end of line slideway, both are used for monitoring the variation that guideway moves the back two dimension angular for this.Make through the plane mirror after moving,, can get back to original original state by adjusting guideway.
Described plane mirror can also be placed on the guideway of vertical direction, and the electrolevel of placing a two dimension on guideway is monitored the variation of guideway two dimension angular.
Described collimator can be the multiple degrees of freedom colimated light system.
Described device can be by increasing the collimation between polarization spectroscope and λ/4 wave plates adjustment multi beam large distance light.
Described device can carry out the measurement of the depth of parallelism between rolling angle measurement or two guide rails by place a 4 quadrant detector respectively on two outgoing parallel rayss.
Large distance light parallel method of adjustment step of the present invention is:
(1) the collimation laser device sends stabilized lasers by the polarizing beam splitter beam split, is divided into perpendicular linear polarization S and parallel lines polarization P laser;
(2) block the transmitted light P of polarizing beam splitter with cardboard, make perpendicular linear polarization laser S see through λ/4 wave plates, become circularly polarized light, incide on the plane mirror, wherein the fast axle of λ/4 wave plates is at 45 with the S polarization direction;
(3) above-mentioned plane mirror is placed on the straight line guideway, also place a high-precision electronic level meter on the guideway, can read the pitch angle of guideway on the Y direction, write down the pitch angle reading of this moment, and on guideway, place another one plane mirror (second plane mirror), end at guide rail is placed a high precision collimator, and second plane mirror is used as the target mirror of collimator, writes down the reading of collimator.
(4) keep other motionless, adjusting first plane mirror makes reverse the returning of circular polarization light see through λ/4 wave plates for the second time, this moment, light became linearly polarized light by circularly polarized light, but the polarization direction has rotated 90 °, therefore, light sees through polarizing beam splitter and lens, incides on the detector, and make light incide the center of detector, take reading.
(5) cardboard of polarizing beam splitter back is taken away, be placed on the reflected light S that blocks polarizing beam splitter on the reflected light path of polarizing beam splitter.The transmitted light P of polarizing beam splitter sees through another one λ/4 wave plates, wherein the fast axle of λ/4 wave plates is at 45 with the P polarization direction, the polarized light that sees through this λ/4 wave plates also becomes circularly polarized light, by the 3rd plane reflection mirror reflection, the 3rd plane mirror is fixed on the two-dimensional adjustment device again.
(6) all devices are along with guide rail movement arrives correct position (two parallel rayss distance) on the guideway, and at this moment guideway has small angles shifts with respect to initial position on X and Y direction, so electrolevel and target mirror all have small variations.
(7) all devices are motionless relatively on the maintenance guideway, adjust the angular deflection of guideway on X and Y direction respectively, make the reading of electrolevel and collimator identical with the numerical value of writing down for the first time respectively.
(8) at this moment first plane mirror makes that the circular polarization light of the 3rd plane reflection mirror reflection is reverse to be returned, again through the 3rd level crossing, see through λ/4 wave plates for the second time, make circularly polarized light become linearly polarized light, but its direction of vibration has rotated 90 °, therefore light sees through lens through the polarizing beam splitter reflection, incides on the detector.
(9) regulate the 3rd plane mirror of two-dimensional adjustable, make the reverse position readings that incides the luminous point on the detector identical with the above-mentioned reading of writing down.
(10) withdraw the above-described cardboard that is in the light, collimator and be used for all things on auxiliary guide rail of adjusting and the guide rail, then two outgoing light are parallel rays.
Described method, its feature also is: after emergent ray is adjusted into parallel rays, on two outgoing parallel rayss, place a 4 quadrant detector respectively, when detector moves together along with separately guideway, write down the reading of each position correspondence respectively, these two resulting information of detector are carried out data processing, just can obtain the roll angle size of guideway or the depth of parallelism between two guide rails.
The present invention is applicable to and produces two bundles greatly apart from parallel rays, has following advantage:
1, adjusting gear is relative with method simple, can adjust big apart from parallel rays.
2, adjust the precision height, utilize the high stable collimation laser can adjust between the light collimation below 1 second of arc.
3, utilize the method can also adjust two collimations of restrainting between the above large distance light.
Description of drawings
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 is for adjusting big embodiment one apart from parallel beam light.
Fig. 2 is for adjusting big embodiment two apart from parallel beam light.
The embodiment that two parallel rayss that Fig. 3 adjusts for utilization carry out the measurement of paralleism between rolling angle measurement or two guide rails.
Among the figure: 1-is the collimation laser instrument; 2-is a polarizing beam splitter; 3,4-is λ/4 wave plates; 5-is the facet catoptron; 6-is the two-dimensional adjustment device; 7-is convex lens; 8-is a 4 quadrant detector; 9-is a collimator; 10-is a line slideway; 11,11 ' is guideway; 12,12 ' is plane mirror; 13,13 ' is electrolevel; 14,14 ' is plane mirror; 15,15 ' is two-dimentional electrolevel; 16-is a 4 quadrant detector; 17-is a 4 quadrant detector;
Embodiment
Further specify the present invention below in conjunction with accompanying drawing.
Concrete adjustment process is as follows: collimation laser device 1 sends stabilized lasers by polarizing beam splitter 2 beam split, is divided into perpendicular linear polarization S and parallel lines polarization P laser.Block the transmitted light P of polarizing beam splitter with cardboard, make perpendicular linear polarization laser S see through λ/4 wave plates 3, wherein the fast axle of λ/4 wave plates 3 is at 45 with the S polarization direction, become circularly polarized light, incide on the plane mirror 12, plane mirror 12 is placed on the guideway 11, also place a high-precision electronic level meter 13 on the guideway 11, can read the pitch angle of guideway on the Y direction, write down the pitch angle reading of this moment, and on guideway 11, place another one plane mirror 14, place a high precision collimator 9 at an end of guide rail 10, plane mirror 14 is write down the reading of collimator 9 as the target mirror of collimator 9.Keep other motionless, adjusting plane mirror 12 makes reverse the returning of circular polarization light see through λ/4 wave plates 3 for the second time, this moment, light became linearly polarized light by circularly polarized light, but the polarization direction has rotated 90 °, therefore light sees through polarizing beam splitter 2 and lens 7, incide on the 4 quadrant detector 8, and make light incide the center of detector 8, take reading.The cardboard of polarizing beam splitter 2 back is taken away, be placed on the reflected light S that blocks polarizing beam splitter 2 on the reflected light path of polarizing beam splitter 2.The transmitted light P of polarizing beam splitter 2 sees through another one λ/4 wave plates 4, wherein the fast axle of λ/4 wave plates 4 is at 45 with the P polarization direction, the polarized light that sees through this λ/4 wave plates 4 also becomes circularly polarized light, and by plane mirror 5 reflections, plane mirror 5 is fixed on the two-dimensional adjustment device 6 again.All devices are along with guide rail 10 moves to correct position (two parallel rayss distance) on the guideway 11, at this moment guideway 11 ' has small angles shifts with respect to 11 on X and Y direction, so electrolevel 13 ' all has small variations with target mirror 14, ' it is ' motionless with respect to 11 to go up all devices to keep guideway 11, ' angular deflection on X and Y direction makes electrolevel 13 ' identical with the numerical value of writing down for the first time respectively with the reading of collimator 9 to adjust guideway 11 respectively.At this moment plane mirror 12 ' makes reverse the returning of circular polarization light of plane 5 reflections, see through λ/4 wave plates 4 for the second time through level crossing 5 again, make circularly polarized light become linearly polarized light, but its direction of vibration has rotated 90 °, therefore light is through polarizing beam splitter 2 reflections, see through lens 7, incide on the 4 quadrant detector 8.Regulate two-dimensional adjustable plane mirror 5, make the reverse position readings that incides the luminous point on the detector 8 identical with the above-mentioned reading of writing down.At last, withdraw the above-described cardboard that is in the light, collimator 9 and be used for all things on auxiliary guide rail of adjusting 10 and the guide rail, then two outgoing light are parallel rays.
Fig. 2 is second embodiment of the present invention, and concrete adjustment process is the same with embodiment one.Its difference is, no longer needs collimator 9, and whole device is vertically placed, and the guideway of line slideway is also vertically placed, and utilizes a high-precision two-dimensional electrolevel 15 to monitor the guideway two dimension angular and changes.
Utilize adjusting gear and the method for above two kinds of embodiment can also adjust big apart from the collimation between the multi-beam.
The embodiment that Fig. 3 carries out the measurement of paralleism between rolling angle measurement or two guide rails for two parallel ray beams that utilize above device to adjust.On two outgoing parallel rayss, place a 4 quadrant detector 16 and 17 respectively.When detector 16 and 17 moves together along with separately guideway, write down the reading of each position correspondence respectively, through these two resulting information of detector of data processing, just can obtain the roll angle size of guideway or the depth of parallelism between two guide rails.
Claims (8)
1. the device adjusted of a large distance light parallel, collimation laser device (1) sends the collimation laser of high stability, through polarizing beam splitter (2) beam split, wherein place λ/4 wave plates (3) on the reflected light path of polarizing beam splitter (2), λ/the quick shaft direction of 4 wave plates (3) and the polarization direction of laser are at 45, incide on the plane mirror (12) again; And on the transmitted light path of polarizing beam splitter (2), place another one λ/4 wave plates (4), the quick shaft direction of wave plate (4) and the polarization direction of laser are also at 45, again by a two-dimensional adjustable plane mirror (5) reflection, make that its reflection direction is parallel with the reflected light of polarizing beam splitter (2) to be incided a plane mirror (on 12 '), twice retrodirective reflection light successively incides on the same detector (8) by lens (7); It is characterized in that: plane mirror (12) is placed on guideway (11) platform of a line slideway (10), and this guideway (11) also can carry out Bidimensional small angle to be regulated; On guideway (11), placed high-precision electronic level meter (13), placed autocollimator (9) at an end of line slideway, both are used for monitoring the variation that guideway (11) moves the back two dimension angular for this; (12 '), (11 ') can be got back to original original state to plane mirror after making process mobile by adjusting guideway.
2. device as claimed in claim 1 is characterized in that: described collimator (9) can be the multiple degrees of freedom colimated light system.
3. device as claimed in claim 1, it is characterized in that: described plane mirror (12) can also be placed on the guideway (11) of vertical direction, and the electrolevel (15) of placing a two dimension on guideway is monitored the variation of guideway (11) two dimension angular.
4. device as claimed in claim 1 is characterized in that: can be by increasing the collimation between polarization spectroscope and λ/4 wave plates adjustment multi beam large distance light.
5. device as claimed in claim 1 is characterized in that: can carry out the measurement of the depth of parallelism between rolling angle measurement or two guide rails by place a 4 quadrant detector (16) and (17) respectively on two outgoing parallel rayss.
6. the method adjusted of a large distance light parallel is characterized in that described method step is:
A) collimation laser device (1) sends stabilized lasers by polarizing beam splitter (2) beam split, is divided into perpendicular linear polarization S and parallel lines polarization P laser;
B) block the transmitted light P of polarizing beam splitter (2) with cardboard, make perpendicular linear polarization laser S see through λ/4 wave plates, become circularly polarized light, incide on the plane mirror (12), wherein the fast axle of λ/4 wave plates is at 45 with the S polarization direction;
C) above-mentioned plane mirror (12) is placed on the straight line guideway (11), also place a high-precision electronic level meter (13) on the guideway (11), can read the pitch angle of guideway (11) on the Y direction, write down the pitch angle reading of this moment, and on guideway, place another one plane mirror (14) (second plane mirror), end at guide rail is placed a high precision collimator (9), second plane mirror (14) write down the reading of collimator as the target mirror of collimator;
D) keep other motionless, adjusting first plane mirror (12) makes reverse the returning of circular polarization light see through λ/4 wave plates (3) for the second time, this moment, light became linearly polarized light by circularly polarized light, but the polarization direction has rotated 90 °, therefore, light sees through polarizing beam splitter (2) and lens (7), incides on the detector (8), and make light incide the center of detector (8), take reading;
E) cardboard of polarizing beam splitter (2) back is taken away, be placed on the reflected light S that blocks polarizing beam splitter (2) on the reflected light path of polarizing beam splitter (2); The transmitted light P of polarizing beam splitter (2) sees through another one λ/4 wave plates (4), wherein the fast axle of λ/4 wave plates (4) is at 45 with the P polarization direction, the polarized light that sees through this λ/4 wave plates (2) also becomes circularly polarized light, by the 3rd plane mirror (5) reflection, the 3rd plane mirror (5) is fixed on the two-dimensional adjustment device (6) again;
F) guideway (11) is gone up all devices along with guide rail movement arrives correct position (two parallel rayss distance), at this moment (11 ') have small angles shifts with respect to initial position (11) to guideway on X and Y direction, so ((14 ') all have small variations to electrolevel for 13 ') and target mirror;
G) (it is motionless relatively that 11 ') are gone up all devices, adjusts the angular deflection of guideway on X and Y direction respectively, and (reading of 13 ') and collimator (9) is identical with the numerical value of writing down for the first time respectively to make electrolevel to keep guideway;
H) at this moment plane mirror (12) makes that the circular polarization light of plane mirror (5) reflection is reverse to be returned, pass through level crossing (5) again, see through λ/4 wave plates (4) for the second time, make circularly polarized light become linearly polarized light, but its direction of vibration has rotated 90 °, therefore light sees through lens (7) through polarizing beam splitter (2) reflection, incides on the detector (8);
I) regulate the plane mirror (5) of two-dimensional adjustable (6), make the reverse position readings that incides the luminous point on the detector (8) identical with the above-mentioned reading of writing down;
J) withdraw the above-described cardboard that is in the light, collimator (9) and be used for all things on auxiliary guide rail of adjusting (10) and the guide rail, then two outgoing light are parallel rays.
7. method as claimed in claim 6 is characterized in that: can adjust the collimation between the multi beam large distance light by adjusting the catoptrical direction of polarization spectroscope that increases.
8. method as claimed in claim 6, it is characterized in that: after emergent ray is adjusted into parallel rays, on two outgoing parallel rayss, place a 4 quadrant detector (16) and (17) respectively, when move together along with separately guideway in detector (16) and (17), write down the reading of each position correspondence respectively, these two resulting information of detector are carried out data processing, just can obtain the roll angle size of guideway or the depth of parallelism between two guide rails.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008100570885A CN101221044B (en) | 2008-01-29 | 2008-01-29 | Device and method for large distance light parallel regulation |
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| CN2008100570885A CN101221044B (en) | 2008-01-29 | 2008-01-29 | Device and method for large distance light parallel regulation |
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| CN101221044B CN101221044B (en) | 2010-06-23 |
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| CN101872074A (en) * | 2010-06-13 | 2010-10-27 | 浙江大学 | Adjustment method of three pairwise vertical light |
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| CN101872074A (en) * | 2010-06-13 | 2010-10-27 | 浙江大学 | Adjustment method of three pairwise vertical light |
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| CN102175217B (en) * | 2010-11-23 | 2015-05-27 | 友达光电股份有限公司 | Inclination evaluation system and method thereof |
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| CN105353497A (en) * | 2015-12-04 | 2016-02-24 | 中国航空工业集团公司洛阳电光设备研究所 | Double-oscillating-mirror adjustment method |
| CN105353497B (en) * | 2015-12-04 | 2018-11-16 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of double pendulum mirror Method of Adjustment |
| CN105737793B (en) * | 2016-05-11 | 2018-06-15 | 西安中星测控有限公司 | Rolling angle measurement unit and measuring method |
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| CN110160471A (en) * | 2019-05-08 | 2019-08-23 | 华中科技大学 | A kind of error measuring system and method for high-precision linear guide |
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| CN113091652A (en) * | 2021-03-30 | 2021-07-09 | 大连理工大学 | Measuring system and method with rolling angle self-correcting function |
| CN113091652B (en) * | 2021-03-30 | 2022-01-04 | 大连理工大学 | Measuring system and method with rolling angle self-correcting function |
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