CN201187993Y - Device for large distance light parallel regulation - Google Patents

Device for large distance light parallel regulation Download PDF

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Publication number
CN201187993Y
CN201187993Y CNU2008200788058U CN200820078805U CN201187993Y CN 201187993 Y CN201187993 Y CN 201187993Y CN U2008200788058 U CNU2008200788058 U CN U2008200788058U CN 200820078805 U CN200820078805 U CN 200820078805U CN 201187993 Y CN201187993 Y CN 201187993Y
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CN
China
Prior art keywords
guideway
splitter
polarizing
plane mirror
laser
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2008200788058U
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Chinese (zh)
Inventor
匡翠方
李艳秋
刘丽辉
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Priority to CNU2008200788058U priority Critical patent/CN201187993Y/en
Application granted granted Critical
Publication of CN201187993Y publication Critical patent/CN201187993Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a long-distance light parallel adjusting device which belongs to the technical field of photoelectric detection. The device comprises a collimation laser device (1), a polarization optical splitter (2), a plane reflector (12) arranged on the reflected light path of the polarization optical splitter (2), a Gama/4 wave plate (3) arranged in the middle of the polarization optical splitter (2) and the polarization optical splitter (2), a two-dimensional adjustable plane reflector (5) arranged on the transmission light path of the polarization optical splitter (2), a second Gama/4 wave plate (4) arranged in the middle of the polarization optical splitter (2) and the two-dimensional adjustable plane reflector (5), a lens (7) arranged at a secondary reversely-reflected light path, and a detector (8) placed on the transmission light path of the lens (7), wherein, the plane reflector (12) is arranged on a guide rail pair (11) of a linear guide rail (10) and can adjust a two-dimensional angle. The device can simply adjust the large-distance parallel light beams and has high adjustment accuracy.

Description

The device that large distance light parallel is adjusted
Technical field
The utility model belongs to photoelectric detection technology field, the high precision adjustment of the depth of parallelism between particularly a kind of light.Utilize adjusted parallel beam can carry out the measurement of paralleism of two line slideways, can also carry out the rolling angle measurement of line slideway auxiliary itself.
Background technology
Parallel the debuging of step-by-step scanning photo-etching device mask plate work stage and silicon slice workpiece platform guide rail can utilize parallel rays to carry out depth of parallelism detection, and wherein the collimation of light is the reliability that directly has influence on the result who debugs.In addition, the numerically-controlled machine line slideway auxiliary need carry out rolling angle measurement, and the simplest measuring method is to utilize parallel rays to measure.Although can make light produce parallel rays,, be difficult to obtain the two-beam line parallel below 1 second of arc because pentagonal prism can only guarantee the vertical of a direction by two pentagonal prisms.
The purpose of this utility model is to provide a kind of laser parallel adjusting gear and method with versatility, big distance, adjusts precision and is better than 1 second of arc.The parallel rays that utilizes the method to obtain can be used for greatly debuging rolling angle measurement with guide rail itself apart from the collimation between the guide rail.
Summary of the invention
The device of large distance light parallel adjustment is: the collimation laser device sends the collimation laser of high stability, through the polarizing beam splitter beam split.Wherein place λ/4 wave plates on the reflected light path of polarizing beam splitter, the quick shaft direction of wave plate and the polarization direction of laser are at 45, incide on the plane mirror again.And on the transmitted light path of polarizing beam splitter, place another one λ/4 wave plates, the quick shaft direction of wave plate and the polarization direction of laser are also at 45, again by the mirror reflection of a two-dimensional adjustable plane reflection, make that its reflection direction is parallel with the reflected light of polarizing beam splitter to be incided on the plane mirror.It is characterized in that: this plane mirror is placed on the guideway of a line slideway, and this guideway also can carry out Bidimensional small angle to be regulated.On this guideway, placed the high-precision electronic level meter, placed autocollimator at an end of line slideway, both are used for monitoring the variation that guideway moves the back two dimension angular for this.Make through the plane mirror after moving,, can get back to original original state by adjusting guideway.
Described plane mirror can also be placed on the guideway of vertical direction, and the electrolevel of placing a two dimension on guideway is monitored the variation of guideway two dimension angular.
Described collimator can be the multiple degrees of freedom colimated light system.
Described device can be by increasing the collimation between polarization spectroscope and λ/4 wave plates adjustment multi beam large distance light.
Described device can carry out the measurement of the depth of parallelism between rolling angle measurement or two guide rails by place a 4 quadrant detector respectively on two outgoing parallel rayss.
Large distance light parallel method of adjustment step of the present utility model is:
(1) the collimation laser device sends stabilized lasers by the polarizing beam splitter beam split, is divided into perpendicular linear polarization S and parallel lines polarization P laser;
(2) block the transmitted light P of polarizing beam splitter with cardboard, make perpendicular linear polarization laser S see through λ/4 wave plates, become circularly polarized light, incide on the plane mirror, wherein the fast axle of λ/4 wave plates is at 45 with the S polarization direction;
(3) above-mentioned plane mirror is placed on the straight line guideway, also place a high-precision electronic level meter on the guideway, can read the pitch angle of guideway on the Y direction, write down the pitch angle reading of this moment, and on guideway, place another one plane mirror (second plane mirror), end at guide rail is placed a high precision collimator, and second plane mirror is used as the target mirror of collimator, writes down the reading of collimator.
(4) keep other motionless, adjusting first plane mirror makes reverse the returning of circular polarization light see through λ/4 wave plates for the second time, this moment, light became linearly polarized light by circularly polarized light, but the polarization direction has rotated 90 °, therefore, light sees through polarizing beam splitter and lens, incides on the detector, and make light incide the center of detector, take reading.
(5) cardboard of polarizing beam splitter back is taken away, be placed on the reflected light S that blocks polarizing beam splitter on the reflected light path of polarizing beam splitter.The transmitted light P of polarizing beam splitter sees through another one λ/4 wave plates, wherein the fast axle of λ/4 wave plates is at 45 with the P polarization direction, the polarized light that sees through this λ/4 wave plates also becomes circularly polarized light, by the 3rd plane reflection mirror reflection, the 3rd plane mirror is fixed on the two-dimensional adjustment device again.
(6) all devices are along with guide rail movement arrives correct position (two parallel rayss distance) on the guideway, and at this moment guideway has small angles shifts with respect to initial position on X and Y direction, so electrolevel and target mirror all have small variations.
(7) all devices are motionless relatively on the maintenance guideway, adjust the angular deflection of guideway on X and Y direction respectively, make the reading of electrolevel and collimator identical with the numerical value of writing down for the first time respectively.
(8) at this moment first plane mirror makes that the circular polarization light of the 3rd plane reflection mirror reflection is reverse to be returned, again through the 3rd level crossing, see through λ/4 wave plates for the second time, make circularly polarized light become linearly polarized light, but its direction of vibration has rotated 90 °, therefore light sees through lens through the polarizing beam splitter reflection, incides on the detector.
(9) regulate the 3rd plane mirror of two-dimensional adjustable, make the reverse position readings that incides the luminous point on the detector identical with the above-mentioned reading of writing down.
(10) withdraw the above-described cardboard that is in the light, collimator and be used for all things on auxiliary guide rail of adjusting and the guide rail, then two outgoing light are parallel rays.
Described method, its feature also is: after emergent ray is adjusted into parallel rays, on two outgoing parallel rayss, place a 4 quadrant detector respectively, when detector moves together along with separately guideway, write down the reading of each position correspondence respectively, these two resulting information of detector are carried out data processing, just can obtain the roll angle size of guideway or the depth of parallelism between two guide rails.
The utility model is applicable to and produces two bundles greatly apart from parallel rays, has following advantage:
1, adjusting gear is relative with method simple, can adjust big apart from parallel rays.
2, adjust the precision height, utilize the high stable collimation laser can adjust between the light collimation below 1 second of arc.
3, utilize the method can also adjust two collimations of restrainting between the above large distance light.
Description of drawings
Further specify the utility model below in conjunction with the drawings and specific embodiments.
Fig. 1 is for adjusting big embodiment one apart from parallel beam light.
Fig. 2 is for adjusting big embodiment two apart from parallel beam light.
The embodiment that two parallel rayss that Fig. 3 adjusts for utilization carry out the measurement of paralleism between rolling angle measurement or two guide rails.
Among the figure: 1-is the collimation laser instrument; 2-is a polarizing beam splitter; 3,4-is λ/4 wave plates; 5-is the facet catoptron; 6-is the two-dimensional adjustment device; 7-is convex lens; 8-is a 4 quadrant detector; 9-is a collimator; 10-is a line slideway; 11,11 '-be guideway; 12,12 '-be plane mirror; 13,13 ' is electrolevel; 14,14 ' is plane mirror; 15,15 ' is two-dimentional electrolevel; 16-is a 4 quadrant detector; 17-is a 4 quadrant detector;
Embodiment
Further specify the utility model below in conjunction with accompanying drawing.
Concrete adjustment process is as follows: collimation laser device 1 sends stabilized lasers by polarizing beam splitter 2 beam split, is divided into perpendicular linear polarization S and parallel lines polarization P laser.Block the transmitted light P of polarizing beam splitter with cardboard, make perpendicular linear polarization laser S see through λ/4 wave plates 3, wherein the fast axle of λ/4 wave plates 3 is at 45 with the S polarization direction, become circularly polarized light, incide on the plane mirror 12, plane mirror 12 is placed on the guideway 11, also place a high-precision electronic level meter 13 on the guideway 11, can read the pitch angle of guideway on the Y direction, write down the pitch angle reading of this moment, and on guideway 11, place another one plane mirror 14, place a high precision collimator 9 at an end of guide rail 10, plane mirror 14 is write down the reading of collimator 9 as the target mirror of collimator 9.Keep other motionless, adjusting plane mirror 12 makes reverse the returning of circular polarization light see through λ/4 wave plates 3 for the second time, this moment, light became linearly polarized light by circularly polarized light, but the polarization direction has rotated 90 °, therefore light sees through polarizing beam splitter 2 and lens 7, incide on the 4 quadrant detector 8, and make light incide the center of detector 8, take reading.The cardboard of polarizing beam splitter 2 back is taken away, be placed on the reflected light S that blocks polarizing beam splitter 2 on the reflected light path of polarizing beam splitter 2.The transmitted light P of polarizing beam splitter 2 sees through another one λ/4 wave plates 4, wherein the fast axle of λ/4 wave plates 4 is at 45 with the P polarization direction, the polarized light that sees through this λ/4 wave plates 4 also becomes circularly polarized light, and by plane mirror 5 reflections, plane mirror 5 is fixed on the two-dimensional adjustment device 6 again.All devices are along with guide rail 10 moves to correct position (two parallel rayss distance) on the guideway 11, at this moment guideway 11 ' has small angles shifts with respect to 11 on X and Y direction, so electrolevel 13 ' and target mirror 14 ' all have small variations, it is ' motionless with respect to 11 to keep guideway 11 ' to go up all devices, adjust the angular deflection of guideway 11 ' on X and Y direction respectively, make electrolevel 13 ' identical with the numerical value of writing down for the first time respectively with the reading of collimator 9.At this moment plane mirror 12 ' makes reverse the returning of circular polarization light of plane 5 reflections, see through λ/4 wave plates 4 for the second time through level crossing 5 again, make circularly polarized light become linearly polarized light, but its direction of vibration has rotated 90 °, therefore light is through polarizing beam splitter 2 reflections, see through lens 7, incide on the 4 quadrant detector 8.Regulate two-dimensional adjustable plane mirror 5, make the reverse position readings that incides the luminous point on the detector 8 identical with the above-mentioned reading of writing down.At last, withdraw the above-described cardboard that is in the light, collimator 9 and be used for all things on auxiliary guide rail of adjusting 10 and the guide rail, then two outgoing light are parallel rays.
Fig. 2 is second embodiment of the present utility model, and concrete adjustment process is the same with embodiment one.Its difference is, no longer needs collimator 9, and whole device is vertically placed, and the guideway of line slideway is also vertically placed, and utilizes a high-precision two-dimensional electrolevel 15 to monitor the guideway two dimension angular and changes.
Utilize adjusting gear and the method for above two kinds of embodiment can also adjust big apart from the collimation between the multi-beam.
The embodiment that Fig. 3 carries out the measurement of paralleism between rolling angle measurement or two guide rails for two parallel ray beams that utilize above device to adjust.On two outgoing parallel rayss, place a 4 quadrant detector 16 and 17 respectively.When detector 16 and 17 moves together along with separately guideway, write down the reading of each position correspondence respectively, through these two resulting information of detector of data processing, just can obtain the roll angle size of guideway or the depth of parallelism between two guide rails.

Claims (6)

1, a kind of device of large distance light parallel adjustment, comprise the collimation laser device (1) that can send the high stability collimation laser, polarizing beam splitter (2) to described laser beam split, be placed on the plane mirror (12) on polarizing beam splitter (2) reflected light path, be placed on λ/4 wave plates (3) at the angle at 45, polarization direction of polarizing beam splitter (2) and plane mirror (12) centre, quick shaft direction and laser; Be placed on the two-dimensional adjustable plane mirror (5) on polarizing beam splitter (2) transmitted light path, be placed on second λ/4 wave plates (4) at the angle at 45, polarization direction of polarizing beam splitter (2) and two-dimensional adjustable plane mirror (5) centre, quick shaft direction and laser; Be placed on the lens (7) on the retrodirective reflection light path twice, be placed on the detector (8) on lens (7) transmitted light path; It is characterized in that: plane mirror (12) is placed on the guideway (11) that can carry out the Bidimensional small angle adjusting of a line slideway (10).
2, device as claimed in claim 1 is characterized in that: on described guideway (11), placed high-precision electronic level meter (13), placed collimator (9) at an end of line slideway.
3, device as claimed in claim 2 is characterized in that: described collimator (9) can be the multiple degrees of freedom colimated light system.
4, device as claimed in claim 2 is characterized in that: comprise many groups polarizing beam splitter and λ/4 wave plates of adjusting collimation between the multi beam large distance light.
5, device as claimed in claim 2 is characterized in that: also be included in 4 quadrant detector (16) and (17) of placing respectively on the two outgoing parallel rayss.
6, device as claimed in claim 1 is characterized in that: described guideway (11) is gone up the two-dimentional electrolevel (15) that a monitoring of placement guideway (11) two dimension angular changes for vertically placing at guideway (11).
CNU2008200788058U 2008-01-29 2008-01-29 Device for large distance light parallel regulation Expired - Fee Related CN201187993Y (en)

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101221044B (en) * 2008-01-29 2010-06-23 北京理工大学 Device and method for large distance light parallel regulation
CN101872074A (en) * 2010-06-13 2010-10-27 浙江大学 Adjustment method of three pairwise vertical light
CN106052549A (en) * 2016-08-07 2016-10-26 哈尔滨工业大学 Combined zero-setting high-dynamic-precision long-working-distance auto-collimation device and method thereof
CN106225731A (en) * 2016-08-07 2016-12-14 哈尔滨工业大学 Combination zeroing high-precision laser big working distance autocollimation and method
CN106225728A (en) * 2016-08-07 2016-12-14 哈尔滨工业大学 The big working distance autocollimation of array zeroing high accuracy and method
CN106247991A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 Portable combined zeroing laser big working distance autocollimation and method
CN106247993A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 A kind of wide scope, big working distance autocollimation and method
CN106247992A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 A kind of high accuracy, wide scope and big working distance autocollimation and method
CN106323199A (en) * 2016-08-07 2017-01-11 哈尔滨工业大学 Combination zeroing laser large working distance auto-collimation device and method
CN106323198A (en) * 2016-08-07 2017-01-11 哈尔滨工业大学 High precision, wide range and large working distance laser auto-collimation device and method
CN106352814A (en) * 2016-08-07 2017-01-25 哈尔滨工业大学 Array zero setting high-dynamic-accuracy long-working-distance auto-collimation device and method
CN108956097A (en) * 2018-07-10 2018-12-07 北京理工大学 Light field measuring polarization state method, apparatus, computer equipment and storage medium
CN109387163A (en) * 2018-12-08 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of portable plain shaft parallelism calibration method of heavy caliber

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101221044B (en) * 2008-01-29 2010-06-23 北京理工大学 Device and method for large distance light parallel regulation
CN101872074A (en) * 2010-06-13 2010-10-27 浙江大学 Adjustment method of three pairwise vertical light
CN101872074B (en) * 2010-06-13 2011-07-20 浙江大学 Adjustment method of three pairwise vertical light
CN106247991B (en) * 2016-08-07 2018-11-06 哈尔滨工业大学 The big working distance autocollimation of portable combined zeroing laser and method
CN106225731A (en) * 2016-08-07 2016-12-14 哈尔滨工业大学 Combination zeroing high-precision laser big working distance autocollimation and method
CN106225728A (en) * 2016-08-07 2016-12-14 哈尔滨工业大学 The big working distance autocollimation of array zeroing high accuracy and method
CN106247991A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 Portable combined zeroing laser big working distance autocollimation and method
CN106247993A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 A kind of wide scope, big working distance autocollimation and method
CN106247992A (en) * 2016-08-07 2016-12-21 哈尔滨工业大学 A kind of high accuracy, wide scope and big working distance autocollimation and method
CN106323199A (en) * 2016-08-07 2017-01-11 哈尔滨工业大学 Combination zeroing laser large working distance auto-collimation device and method
CN106323198A (en) * 2016-08-07 2017-01-11 哈尔滨工业大学 High precision, wide range and large working distance laser auto-collimation device and method
CN106352814A (en) * 2016-08-07 2017-01-25 哈尔滨工业大学 Array zero setting high-dynamic-accuracy long-working-distance auto-collimation device and method
CN106052549A (en) * 2016-08-07 2016-10-26 哈尔滨工业大学 Combined zero-setting high-dynamic-precision long-working-distance auto-collimation device and method thereof
CN106225731B (en) * 2016-08-07 2018-11-09 哈尔滨工业大学 The big working distance autocollimation of combination zeroing high-precision laser and method
CN106247993B (en) * 2016-08-07 2018-11-09 哈尔滨工业大学 A kind of wide scope, big working distance autocollimation and method
CN106323199B (en) * 2016-08-07 2018-11-09 哈尔滨工业大学 The big working distance autocollimation of combination zeroing laser and method
CN106052549B (en) * 2016-08-07 2019-03-08 哈尔滨工业大学 The big working distance autocollimation of combination zeroing high dynamic precision and method
CN106247992B (en) * 2016-08-07 2019-01-29 哈尔滨工业大学 A kind of high-precision, wide scope and big working distance autocollimation and method
CN106323198B (en) * 2016-08-07 2019-01-29 哈尔滨工业大学 A kind of high-precision, wide scope and big working distance laser auto-collimation apparatus and method
CN106225728B (en) * 2016-08-07 2019-03-01 哈尔滨工业大学 The big working distance autocollimation of array zeroing high-precision and method
CN106352814B (en) * 2016-08-07 2019-03-01 哈尔滨工业大学 The big working distance autocollimation of array zeroing high dynamic precision and method
CN108956097A (en) * 2018-07-10 2018-12-07 北京理工大学 Light field measuring polarization state method, apparatus, computer equipment and storage medium
CN108956097B (en) * 2018-07-10 2020-07-31 北京理工大学 Light field polarization state measuring method and device, computer equipment and storage medium
CN109387163A (en) * 2018-12-08 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 A kind of portable plain shaft parallelism calibration method of heavy caliber

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Granted publication date: 20090128

Termination date: 20100129