CN102865834A - Even-number slit-type photoelectric auto-collimator - Google Patents
Even-number slit-type photoelectric auto-collimator Download PDFInfo
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- CN102865834A CN102865834A CN2012103756295A CN201210375629A CN102865834A CN 102865834 A CN102865834 A CN 102865834A CN 2012103756295 A CN2012103756295 A CN 2012103756295A CN 201210375629 A CN201210375629 A CN 201210375629A CN 102865834 A CN102865834 A CN 102865834A
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Abstract
High, good reliability Even-number slit-type photoelectric auto-collimator that the present invention provides a kind of precision. The Even-number slit-type photoelectric auto-collimator, including monochromatic source (1), narrow slit group (2), spectroscope (3), collimator objective (4), rotatable plane mirror (5) and the line array CCD (6) being arranged on spectroscope light splitting optical path set gradually on main optical path, the narrow slit group (2) is even number narrow slit, even number narrow slit is made of multiple equal in widths and equidistant parallel single slit, the number p of parallel list slit are as follows: p=2k, the spacing of each parallel single slit are as follows:
It the composite can be widely applied to high-precision small-angle accuracy test, reflecting mirror sound state small angle error high-acruracy survey, angular displacement sensor Angle Calibration, small angle measurement, high-precision table top or the verticality/flatness high-acruracy survey of workpiece of optical flat cold working part etc..
Description
Technical field
The present invention relates to a kind of high precision angular displacement detecting device, be specifically related to a kind of photoelectric auto-collimator.
Background technology
In the precision measurement field of measuring techniques, the fields of measurement such as the flatness that is widely used in small angle measurement, high precision Angle Calibration, guide rail of photoelectric auto-collimator, the flatness of precision surface plate, revolving table position uncertainty are the routine measurement instruments of department's indispensabilities such as machine-building, shipbuilding, Aero-Space, metrology and measurement, scientific research.Particularly aspect precision, ultraprecise location, irreplaceable effect is arranged more.It both can be used for separately engineering survey, also can be used as aiming and measurement component in the optical metrological instruments such as transit, angular instrument, optical comparator.
Because photoelectric auto-collimator essence is high-precision digital picture micrometric displacement detection system, changes slit type and become the key element that improves its precision.At present, used slit type mainly contains in the photoelectric auto-collimator: crosshair, circular hole, M shape/V-arrangement/N shape graduation, single slit, grating etc.Crosshair, circular hole etc. directly cooperate with planar array detector finishes two-dimensional measurement, is subject to the principle of work of face battle array device self, and its measuring speed and precision all can be restricted.The main combination with single linear CCD of M shape/V-arrangement/N shape graticule realized two-dimentional outer corner measurement, slit and line array CCD installation accuracy had relatively high expectations, and then affect measurement range and measuring accuracy.If adopt single slit, when then single slit was as image, image-element was only seamed wide, is unfavorable for improving precision.The appearance of optical grating photoelectric self-collimator is a kind of new exploration, and the type autocollimator obtains the angular displacement information of level crossing by the displacement of the Moire fringe of a pair of optical grating pair generation.Moire fringe displacement information not only with optical grating pair between the pitch difference of single grid line relevant, also with optical grating pair between angle relevant, cause such autocollimator higher to the installation of grating, the in addition complicacy of Moire fringe itself, to accurately locate it, higher to the later image processing requirements, Surveying Actual Precision and reliability also are restricted (if there is the error of explorer response or grating portrayal, impact will be even more serious).
Summary of the invention
The deficiency that exists for overcoming aforementioned background art, the present invention provide that a kind of precision is high, the even number narrow slit type photoelectric auto-collimator of good reliability.
Technical solution of the present invention is:
Even number narrow slit type photoelectric auto-collimator, be included in monochromatic source (1), narrow slit group (2), spectroscope (3), collimator objective (4), the rotating plane mirror (5) that sets gradually on the main optical path and the line array CCD (6) that arranges at the spectroscope light splitting optical path, narrow slit group (2) and line array CCD (6) conjugation, the light that light source (1) sends images in line array CCD (6) and locates by narrow slit group (2), is reflected back the spectroscope light splitting at plane mirror (5) after the spectroscope transmission; Its special character is:
Described narrow slit group (2) is the even number narrow slit, is comprised of a plurality of width and equally spaced parallel single slits of waiting, and the number p(of parallel single slit is the number p that single frames even number narrow slit image comprises parallel single slit) be:
P=2
k, wherein, k=1,2,3 ... (A);
The spacing of each parallel single slit is:
Based on above-mentioned basic technical scheme, the present invention has also carried out following optimization, improvement:
Above-mentioned light source specifically can adopt led light source, LASER Light Source etc.
The wide b of the seam of each parallel single slit is: b=nP
d, wherein, n=1,2,3, P
dBe CCD pixel spacing; And n 〉=3 are better.
Want to obtain higher measuring accuracy, the focal length of collimator objective (4) can be longer, and the pixel number of line array CCD can be less, adopts corresponding even number narrow slit structure can obtain higher precision.
The present invention has the following advantages:
The even number narrow slit is as image object, and installation and later image processing requirements will be lower than grating; Compare with single slit, even number narrow slit image also has the image-elements such as slit separation, slit number except slit width, suitably selects width, spacing and the number of even number narrow slit, suitably adjusting on the later stage algorithm basis, is conducive to the elevator system precision.
The present invention can realize high-acruracy survey debuging in the lower situation of requirement, and reliability is high.The present invention can allow suitably to regulate the defocusing amount between line array CCD photosurface and the best image planes.
The present invention can be widely used in the high-precision small-angle accuracy test, the high-acruracy survey of the verticality/flatness of small angle measurement, high precision table top or the workpiece of catoptron sound attitude small angle error high-acruracy survey, angular displacement sensor Angle Calibration, optical flat cold working part etc.
Description of drawings
Fig. 1 is principle schematic of the present invention;
Fig. 2 is the signal output map of a line array CCD of the present invention.
Fig. 3 has represented that (this result is and the German MOLLER ELCOMAT of company 3000 type collimating light pipe accuracy comparison results the measuring accuracy result of the present invention in ± 15 ' scope, wherein, the German MOLLER ELCOMAT of company 3000 type collimating light pipes are ± 1050 " in measuring accuracy be ± 0.25 ").
Embodiment
As shown in Figure 1, even number narrow slit type photoelectric auto-collimator, be included in led light source assembly (1), even number narrow slit (2), spectroscope (3), collimator objective (4), the plane mirror (5) that sets gradually on the main optical path and the line array CCD (6) that arranges at the spectroscope light splitting optical path, even number narrow slit (2) and line array CCD (6) conjugation, the light that light source (1) sends is by even number narrow slit (2), through the spectroscope transmission, light is reflected back spectroscope through collimator objective (4) collimation by plane mirror (5), the spectroscope light splitting images in line array CCD (6) and locates.Wherein, a kind of real-time image acquisition as shown in Figure 2.When level crossing (5) rotates a low-angle (according to measurement demand, can be set to and to slowly run, adapt with the integral time of CCD itself), even number narrow slit image has the certain displacement amount at line array CCD, by transformational relation positional information is converted to angular metric, and angles of display changes in real time.
Among Fig. 1, the led light source assembly can adopt the red-light LED light source.Line array CCD adopts single linear CCD, and single pixel dimension and pixel spacing are 7 μ m, and single pixel dimension and pixel spacing also can be less; The even number narrow slit is comprised of parallel single slit of a plurality of same widths and spacing, and the number needs that single width even number narrow slit image comprises single slit satisfies:
p=2
k(k=1,2,3,…) （A）
The kerf spacing of even number narrow slit is:
When the even number narrow slit satisfied above-mentioned condition, the aliasing noise that the line array CCD sampling produces was inhibited, and obtains high image quality.
If the focal length of collimator objective (4) is f, the distance moving when the image drift of even number narrow slit is S, when tested level crossing (5) rotates θ, according to the autocollimation principle, has: S=ftan2 θ.If select the focal distance f=300mm of collimator objective (4), the single pixel dimension of line array CCD is 7 μ m, and the effective resolution of single pixel is:
Actual measuring accuracy often is lower than 2.4 ", satisfy above-mentioned condition (A)～(B) four narrow slit structures by employing, the focal distance f=300mm of collimator objective (4), acquisition limiting error in ± 15 ' scope is: ± 0.4 ".Four slit image that adopt as shown in Figure 2, corresponding the precision result that obtains is as shown in Figure 3.As shown in Figure 3, adopt the said structure pattern, substantially suitable in the precision of ± 15 ' interior measuring accuracy and ELCOMAT 3000 type collimating light pipes.
Want to obtain higher measuring accuracy, the focal length of collimator objective (4) can be longer, and the pixel number of line array CCD can be less, adopts corresponding even number narrow slit structure can obtain higher precision.
The present invention can be widely used in the high-precision small-angle accuracy test, the high-acruracy survey of the verticality/flatness of small angle measurement, high precision table top or the workpiece of catoptron sound attitude small angle error high-acruracy survey, angular displacement sensor Angle Calibration, optical flat cold working part etc.
Claims (5)
1. even number narrow slit type photoelectric auto-collimator, be included in monochromatic source (1), narrow slit group (2), spectroscope (3), collimator objective (4), the rotating plane mirror (5) that sets gradually on the main optical path and the line array CCD (6) that arranges at the spectroscope light splitting optical path, narrow slit group (2) and line array CCD (6) conjugation, the light that light source (1) sends images in line array CCD (6) and locates by narrow slit group (2), is reflected back the spectroscope light splitting at plane mirror (5) after the spectroscope transmission; It is characterized in that:
Described narrow slit group (2) is the even number narrow slit, and the even number narrow slit is comprised of a plurality of width and equally spaced parallel single slits of waiting, and the number p of parallel single slit is:
P=2
k, wherein, k=1,2,3,
The spacing of each parallel single slit is:
Wherein, n=1,2,3, P=2
kBe single slot number, P
dBe CCD pixel spacing.
2. even number narrow slit type photoelectric auto-collimator according to claim 1, it is characterized in that: the wide b of the seam of each parallel single slit is: b=nP
d, wherein, n=1,2,3, P
dBe CCD pixel spacing.
3. even number narrow slit type photoelectric auto-collimator according to claim 2 is characterized in that: for b=nP
d, n gets the natural number more than or equal to 3.
4. even number narrow slit type photoelectric auto-collimator according to claim 3 is characterized in that: described light source employing led light source or LASER Light Source.
5. even number narrow slit type photoelectric auto-collimator according to claim 4 is characterized in that: the number 2≤p of described parallel single slit≤32.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698897A (en) * | 2013-12-30 | 2014-04-02 | 中国科学院西安光学精密机械研究所 | Infrared/visible dual-waveband photoelectric self-aligning system |
| CN103949775A (en) * | 2014-04-22 | 2014-07-30 | 中国科学院上海光学精密机械研究所 | Fast collimation method for light path of stereoscopic space laser |
| CN104197865A (en) * | 2014-09-25 | 2014-12-10 | 成都玄武光电有限公司 | Laser auto-collimator with laser beam guide function and implementation method thereof |
| CN108089323A (en) * | 2018-01-23 | 2018-05-29 | 北京信息科技大学 | Fast steering mirror device and measuring system with novel rotary transition light path |
| CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
| EP4124824A1 (en) * | 2021-07-30 | 2023-02-01 | Harbin Institute Of Technology | High-stability nano-radian-order angle measuring method and device based on drift value feedback |
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| JPH07239210A (en) * | 1994-02-28 | 1995-09-12 | Wacom Co Ltd | Coordinate detection device and posture detection device with it |
| CN202885788U (en) * | 2012-09-29 | 2013-04-17 | 中国科学院西安光学精密机械研究所 | Even-number slit-type photoelectric auto-collimator |
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2012
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Patent Citations (2)
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| JPH07239210A (en) * | 1994-02-28 | 1995-09-12 | Wacom Co Ltd | Coordinate detection device and posture detection device with it |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698897A (en) * | 2013-12-30 | 2014-04-02 | 中国科学院西安光学精密机械研究所 | Infrared/visible dual-waveband photoelectric self-aligning system |
| CN103698897B (en) * | 2013-12-30 | 2016-04-27 | 中国科学院西安光学精密机械研究所 | A kind of infrared/visible two waveband photoelectric auto-collimation system |
| CN103949775A (en) * | 2014-04-22 | 2014-07-30 | 中国科学院上海光学精密机械研究所 | Fast collimation method for light path of stereoscopic space laser |
| CN104197865A (en) * | 2014-09-25 | 2014-12-10 | 成都玄武光电有限公司 | Laser auto-collimator with laser beam guide function and implementation method thereof |
| CN104197865B (en) * | 2014-09-25 | 2017-02-15 | 成都玄武光电有限公司 | Implementation method of laser auto-collimator with laser beam guide function |
| CN108089323A (en) * | 2018-01-23 | 2018-05-29 | 北京信息科技大学 | Fast steering mirror device and measuring system with novel rotary transition light path |
| CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
| EP4124824A1 (en) * | 2021-07-30 | 2023-02-01 | Harbin Institute Of Technology | High-stability nano-radian-order angle measuring method and device based on drift value feedback |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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Application publication date: 20130109 |