CN108089323A - Fast steering mirror device and measuring system with novel rotary transition light path - Google Patents
Fast steering mirror device and measuring system with novel rotary transition light path Download PDFInfo
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- CN108089323A CN108089323A CN201810063289.XA CN201810063289A CN108089323A CN 108089323 A CN108089323 A CN 108089323A CN 201810063289 A CN201810063289 A CN 201810063289A CN 108089323 A CN108089323 A CN 108089323A
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- speculum
- light path
- fast steering
- steering mirror
- laser
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
This application discloses a kind of fast steering mirror devices with novel rotary transition light path.In the measuring method of tiny angle measurement based on PSD, light path is bigger, and resolution ratio is higher.For high-precision accurate measurement component, the particularly fast steering mirror component of optical, mechanical and electronic integration, the confined space limits optical path length, angular resolution usually only more than ten microradians, what the application proposed has the fast steering mirror device of novel rotary transition light path, space is made full use of, increases light path to improve resolution ratio.The fast steering mirror device can effectively improve angular resolution.
Description
Technical field
The application belongs to field of optical measuring technologies more particularly to a kind of fast steering mirror device and measuring system.
Background technology
Tiny angle measurement technology refers to reach the measurement accuracy of angle the differential of the arc to receiving the measurement technology of arc magnitude.
Tiny angle measurement technology field of manufacture of precision machinery, life science and medical domain, semiconductor industry,
There is very extensive application in the fields such as aerospace field.In field of manufacture of precision machinery, the premise and basis of microstoning
It is exactly the Technology of Precision Measurement of position quantity.Measurement is the support to processing and controlling, high-precision processing and control, it is necessary to use
More accurate measurement technology ensures.Therefore, minute angle amount, displacement measurement technology have become in entire industrial system
One most crucial technology.In life science and medical domain, the size of cell is other in the micron-scale, to realize cell interior
Operation, then require microscopical measurement accuracy more than nanometer scale.In semiconductor industry, with chip manufacturing process
0.5 micron, 0.35 micron of 32 nanometers, 22 nano-scale linewidth technology till now from the 90's, central processing unit is from monokaryon
Develop to eight cores, dominant frequency is increased to corresponding 3.8GHz from 60MHz, and corresponding is smaller volume, at stronger data
Reason ability.The development of these high-precision techniques also be unable to do without tiny angle measurement technology.In aerospace field, ultraprecise is examined
The some accurate corner control accuracies for being directed toward components surveyed in instrument, which have also reached, receives the order of magnitude of radian.Tiny angle measurement skill
A kind of concrete application of art is exactly in fast steering mirror technical aspect.
Fast steering mirror (fast anti-mirror) technology is a kind of effective technology measure of precise laser scanning.Fast anti-mirror is to adopt
Scanning mirror is driven with high angular resolution with the micro-displacement actuators part such as voice coil motor (VCA) or piezoelectric ceramics (PZT)
A kind of device of accurate control beam direction, inertia ratio Conventional carriers are much smaller, can increase substantially resonant frequency, with Gao Ling
Sensitivity, the sensor of high response speed are combined, and be may be constructed high-precision two-dimentional precise laser scanner, are greatly improved scanning
Bandwidth and response speed.Fast anti-mirror system controls the reflection side of laser beam by accurately controlling the deflection angle of speculum
To.
It is had a wide range of applications based on the tiny angle measurement system that PSD is integrated in fast anti-mirror technology.In minute angle
In terms of measurement, resolution ratio is important index.
The influence factor of the resolution ratio of PSD angle measurements mainly has the limitation of the resolution ratio of PSD components in itself, incident light to arrive
The optical path length length of PSD device photosurfaces influences, the non-linear effects of the photosurface of PSD, temperature drift etc..Due to photosensitive
The silicon sheet material in face can not be accomplished absolute uniform, therefore there is the nonlinearity errons of output on photosurface.The photosurface of PSD
A areas and B areas are divided into, the linearity in A areas is better than B areas.In order to improve the linearity in B areas, the output of PSD can also be missed
Difference is demarcated, and the preferable effect of religion can be obtained using interpolation algorithm.In addition can also be selected according to the resolution ratio of PSD components in itself
The sensor of higher resolution ratio is selected, in certain light path, corner is maintained in A areas, to reach the effect of the good linearity
Fruit reduces the influence of the error during the linearity is improved.
The resolution ratio and light path of itself device of the angle resolution of PSD and PSD are related.Due in the high collection of some high-precisions
In the accurate measurement component of Cheng Du, it is desirable that light path module is fixed in the fixed mechanical structure of anteroposterior dimension, then is fixed in PSD
In the case of, the PSD angle resolutions improved in a limited space are a difficult points.
The content of the invention
The embodiment of the present application provides a kind of fast steering mirror device with novel rotary transition light path, makes full use of sky
Between, increase light path to improve resolution ratio.
The fast anti-lens device of the application, including novel rotary transition light path and fast steering mirror；The novel rotary transition
Light path includes：Laser, initial reflection mirror, beam splitting arrangement, the first speculum, the second speculum, the 3rd speculum and measurement
Speculum/rotation speculum and spot displacement sensor；
Wherein, 45 ° of angle between the first speculum and horizontal plane, angle between the second speculum and the first speculum
90 °, the 3rd speculum and the first mirror parallel.
Optionally, laser transmitting incident laser changes optical path direction by initial reflection mirror, by beam splitting arrangement, swashs
Light is radiated on measurement speculum/rotation speculum, when measuring speculum/rotation speculum rotational angle α, reflection laser with
Angle between incident laser is 2 α, and reflected light is reflected on the first speculum, by the reflecting surface of beam splitting arrangement successively
It is reflected between one speculum, the second speculum, the 3rd speculum, last reflected light passes through the 3rd speculum, and hot spot is radiated at light
On spot displacement sensor, by measuring the corner of speculum/rotation speculum rotation, hot spot is formed on spot displacement sensor
Movement, the corresponding angle of mobile displacement is corner to be measured.
Optionally, the spot displacement sensor is PSD sensors.
Optionally, the beam splitting arrangement is semi-transparent semi-reflecting lens；The laser is semiconductor laser.
Optionally, the light path meets following angular relationship：
Wherein, β represents corner to be measured, and d represents the shift length of the hot spot of spot displacement sensor receiving plane, L1/ 2 are
Beam splitting arrangement to measurement speculum/rotation speculum distance, L4For the second speculum to the distance of the 3rd speculum, L5For beam splitting
Device is to the distance of the first speculum, L6For the first speculum to the distance of the second speculum, L7For the 3rd speculum to hot spot position
The distance of displacement sensor.
Optionally, the light path of the fast anti-lens device is placed in a confined space, and the length of the confined space is
L1, it is highly L2, width L3。
Optionally, described device further includes：Speculum, voice coil motor coil, flexible hinge, voice coil motor iron core, shell,
Optical measurement components, the light path are located in optical measurement components.
The application also provides a kind of tiny angle measurement system, and the system comprises fast anti-lens device as described above, institutes
Measuring system is stated to further include：I/V conversion circuits, filter amplification circuit, A/D harvesters.
Optionally, the fast anti-mirror in the fast anti-lens device of the measuring system, can accurately generate micro-corner；It can demarcate
Result is exported with calibration.
Optionally, the measuring system further includes：Software secondary filtering device.
Optionally, in the measuring system, the spot displacement sensor is Two-dimensional PSD, photosurface size for 12 ×
12mm, resolution ratio are 1.5 μm；The good A areas radius of the linearity is 2.5mm, sensitivity 0.6A/W, and dark current maximum is
500Na, electrode resistance are 10k Ω, and test condition is 25 DEG C, and spectral response range is in 320nm-1060nm；Laser is selected
The laser of the 650nm of 3.3V or 5V.
The rotation light path of the fast steering mirror device of the application in the case of the similary confined space, can improve
Resolution ratio.The rotary-type light path can effectively improve angular resolution, by rotate light path set by light path by 108mm improve to
During 500mm, resolution ratio is increased to 3 μ rad by 14 μ rad.
Description of the drawings
It in order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of application.
Fig. 1 is PSD optical system for testing typical light paths schematic diagrames in the confined space；
Fig. 2 is according to rotary-type light path schematic diagram in the confined space of the embodiment of the present application；
Fig. 3 is the tiny angle measurement system rough schematic view based on fast anti-mirror in the application one embodiment；
Fig. 4 is PSD signal processing of circuit flow diagram in the application one embodiment；
Fig. 5 is the test data horizontal steps figure of common light path；
Fig. 6 is the test data horizontal steps figure that the application rotates light path；
Fig. 7 is the explosive view of fast anti-mirror (FSM) in the application one embodiment；
A kind of product model machine displaying figure that Fig. 8 is Fig. 3.
Specific embodiment
To enable present invention purpose, feature, advantage more apparent and understandable, below in conjunction with the application
The technical solution in the embodiment of the present application is clearly and completely described in attached drawing in embodiment, it is clear that described reality
It is only some embodiments of the present application to apply example, and not all embodiments.Based on the embodiment in the application, people in the art
Member's all other embodiments obtained without making creative work, shall fall in the protection scope of this application.
It is set it will be understood by those skilled in the art that the terms such as " first ", " second " in the application are only used for difference difference
Standby, module or parameter etc. neither represent any particular technology meaning, also do not indicate that the inevitable logical order between them.This Shen
Please in " connection " include be directly connected to, also include by transition piece connection, understandably, " connection " is at certain by skilled person
In the case of a little, also including non-contacting adjoining, such as magnetic adjoining etc..
Fig. 1 is PSD optical system for testing typical light paths in the confined space.As shown in Figure 1, the length, width and height of the confined space are respectively
L1、L2、L3, due to L1And L2All it is that size is fixed, wherein to meet the small space requirement of accurate device, the length of limited structural member
Wide high generally less than 10cm, when measuring the corner of speculum using PSD, light path is limited in laterally most long L1, it is longitudinal most long
L2, total light path is no more than L1+L2.As shown in Figure 1, light path isThis measurement for largely reducing PSD is differentiated
Rate.In the space of this restriction, the resolution ratio of PSD angle measurements is limited be subject to light path, and light path here refers to that speculum arrives
The optical path length of PSD.
According to resolution ratio and the relation of light path, the application proposes that a kind of new rotation increases light path and do not increase length
PSD receives optical path device.Assuming that α represents corner to be measured, d represents the shift length of the hot spot of PSD receiving planes.Then have：
Assuming that the PSD devices position resolution of itself is d0, according to formula 3：The distinguishable minimum angles of the light path：
Wherein：OrderThen have：
Make L=LIt is short, have：
d0Value micron dimension.From formula 5, α and L are inversely proportional, and L is bigger, and α is smaller.
Fig. 2 is the principle schematic of rotary-type light path.As shown in Fig. 2, increase by three on the basis of typical light paths shown in Fig. 1
Speculum 1,2,3 carries out multiple reflections so that light path increases longitudinal length in space in addition to original length, forms rotation
Type light path.This method makes full use of the confined space, cleverly increases light path.In Fig. 2, pressed from both sides between speculum 1 and baseplane
45 ° of angle, 90 ° of angle between speculum 2 and speculum 1, speculum 3 are parallel with speculum 1.Laser emits incident laser, warp
It crosses initial reflection mirror 0 and changes optical path direction, by beam splitter, laser is radiated on speculum 4, as 0 rotational angle α of speculum
When, the angle between reflection laser and incident laser is 2 α, and reflected light is reflected into following reflection by the reflecting surface of beam splitter
It on mirror 1, is reflected successively between three speculum 1-3, last reflected light passes through the last one speculum 3, and hot spot is radiated at PSD
On, by the angle of rotation, the movement of hot spot is formed in PSD, the corresponding angle of this displacement is exactly angle to be measured.
In rotary-type light path, the distance on width is make use of, total light path is：Assuming that β tables
Show corner to be measured, d represents the shift length of the hot spot of PSD receiving planes, has according to formula 1：
Wherein：OrderSo there are same formula 5, wherein LIt is longLength be far longer than LIt is short,
Then have：
Wherein LIt is long＞ LIt is short, so Δ β ＜ Δs α.
Length, width and height (the L of the confined space1、L2、L3) it is 7.6cm, 14cm, 14cm respectively.Light path overall length in Fig. 1 is LIt is short=
108mm.Rotary-type light path L in Fig. 2It is long=500mm wherein the PSD minimum resolutions selected are 1.5 μm, substitutes into 5 He of formula respectively
8 can be calculated：Δ α=13.89E-06, Δ β=3.00E- 06.
Fig. 3 is the tiny angle measurement system rough schematic view based on fast anti-mirror in the application one embodiment.In this reality
It applies in example, using the FSM of PI Corp. of U.S. model E-518 (a kind of fast mirror can accurately generate micro-corner).It will be anti-
It penetrates mirror to be fixed on the surface of the FSM devices of PI Corp., another side is mutually fixed with rotation light path.As shown in figure 3, wherein from a left side to
Right is rotation light path black box, FSM, 16 AD capture cards, computer, the controller of PI Corp.'s FSM instruments successively.Light path black box
It is stayed on the right side of device there are one circular hole, this facilitates the speculum by measured object surface to be put into.
Fig. 4 is PSD signal processing of circuit flow diagram in the application one embodiment.To the position electric current of PSD outputs
Signal amplify and filtering process doing after I/V conversions.Amplified voltage signal is AD converted by AD capture cards, meter
Calculation machine calculates and records data.It is transmitted in Fig. 4 using shielding line, preferably inhibits to introduce interference in transmission line, improve noise
Than.To verify the above method, actual measurement experiment has been carried out respectively, measurement data is respectively referring to shown in Tables 1 and 2.
1 common optical test path data of table
2 rotary-type optical test path data of table
Data acquisition is in table：Micro angular displacement is gradually generated by minute surface before E-518FSM, rotates 1 μ every time
Rad, corotation moves 34 times, while records test result.1000 points of continuous sampling do average treatment at each angular displacement.Table 1 is right
Light path is answered as 108mm, resolution ax α ' is 14.00E-06, and it is 500mm that table 2, which corresponds to light path, and resolution ax β ' is 3.00E-06.
In order to more intuitively observe resolution ratio improvement effect, referring to horizontal steps Fig. 5 and Fig. 6.
From Fig. 5, Fig. 6：The resolution ratio for rotating light path is far above the resolution ratio of common light path.Rotate light path resolution ratio about
For common light path resolution ratio 1/10th.
In a limited space, using light path is rotated, when light path is improved by 108mm to 500mm, resolution ratio is reached by 14 μ rad
To 3 μ rad, rotation light path angular resolution is about common light path angular resolution 1/10th.By facts have proved device reality
Resolution ratio is coincide substantially with theoretical resolution, which can improve resolution ratio in the case of the similary confined space.
The limited devices of optical path spaces such as component, Light Electrical one are directed toward available for some precisions.
Due to the stray light in device is more, by multiple reflections mirror reflection after occur multiple hot spots, PSD is received
Signal have certain interference；In preferred embodiment, to further improve precision, software secondary filtering can be done.
Fig. 7 is the explosive view of fast anti-lens device (FSM) in one embodiment.Described device includes：Speculum, speculum
Frame, voice coil motor coil, flexible hinge, voice coil motor iron core, shell, bottom cover, flexible hinge guard pin, optical measurement components,
Rear cover and plug etc., the rotation light path are located in optical measurement components.The speculum, reflector mount, voice coil motor
Coil, voice coil motor iron core, optical measurement components substantially sequentially connect.
A kind of product model machine displaying figure that Fig. 8 is Fig. 3.Wherein component a. is the actuator of FSM；Component b. is FSM
Controller；Each part of explosive view or component are located in component a. in Fig. 7.
The light source part of the embodiment of the present application is made of semiconductor laser and collimator, and it acts as generate to girdle the waist to the greatest extent may be used
The small collimated laser beam of energy.The effect of light path is light path amplification, and the light path formed using semi-transparent semi-reflecting lens and total reflection mirror can be with
Larger light path is realized in a smaller space.Signal processing is realized based on DSP, and function is included to the pre- of analog signal
Processing, analog signal are converted to digital filtering after digital signal and last measured value is shown.Rotation light path can have
Improve angular resolution in effect ground.
Embodiment of above is merely to illustrate the present invention, and not limitation of the present invention, in relation to the common of technical field
Technical staff without departing from the spirit and scope of the present invention, can also make a variety of changes and modification, therefore all
Equivalent technical solution falls within scope of the invention, and scope of patent protection of the invention should be defined by the claims.
Claims (10)
1. a kind of fast steering mirror device with novel rotary transition light path, which is characterized in that described device includes new
Rotary-type light path and fast steering mirror；The novel rotary transition light path includes：Laser, initial reflection mirror (0), beam splitting dress
Put, the first speculum (1), the second speculum (2), the 3rd speculum (3) and measurement speculum/rotation speculum (4), with
And spot displacement sensor；
Wherein, the first speculum (1) 45 ° of angle between horizontal plane, between the second speculum (2) and the first speculum (1)
90 ° of angle, the 3rd speculum (3) are parallel with the first speculum (1).
2. fast steering mirror device as described in claim 1, which is characterized in that laser emits incident laser, passes through
Initial reflection mirror (0) changes optical path direction, and by beam splitting arrangement, laser is radiated on measurement speculum/rotation speculum (4),
When measuring speculum/rotation speculum (4) rotational angle α, the angle between reflection laser and incident laser is 2 α, reflected light
By the reflecting surface of beam splitting arrangement, be reflected on the first speculum (1), successively the first speculum (1), the second speculum (2),
It being reflected between 3rd speculum (3), last reflected light passes through the 3rd speculum (3), and hot spot is radiated on spot displacement sensor,
The corner rotated by measuring speculum/rotation speculum (4) forms the movement of hot spot on spot displacement sensor, mobile
The corresponding angle of displacement be corner to be measured.
3. fast steering mirror device as claimed in claim 1 or 2, which is characterized in that the spot displacement sensor is
PSD sensors.
4. fast steering mirror device as claimed in claim 1 or 2, which is characterized in that the beam splitting arrangement is semi-transparent half
Anti- mirror；The laser is semiconductor laser.
5. such as claim 1-4 any one of them fast steering mirror devices, which is characterized in that the light path meets following
Angular relationship：
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Wherein, β represents corner to be measured, and d represents the shift length of the hot spot of spot displacement sensor receiving plane, L1It is filled for beam splitting
Put measurement speculum/rotation speculum (4) distance 2 times, L4For the second speculum (2) to the distance of the 3rd speculum (3),
L5For beam splitting arrangement to the distance of the first speculum (1), L6For the first speculum (1) to the distance of the second speculum (2), L7For
3rd speculum (3) arrives the distance of spot displacement sensor.
6. fast steering mirror device as claimed in claim 5, which is characterized in that the light path is placed in a limited sky
In, the length of the confined space is L1, it is highly L2, width L3。
7. such as claim 1-6 any one of them fast steering mirror devices, which is characterized in that described device further includes：
Speculum, voice coil motor coil, flexible hinge, voice coil motor iron core, shell, optical measurement components, the light path are located at optics
In measurement assembly.
8. a kind of tiny angle measurement system, the system comprises such as quick deflecting reflections of claim 1-7 any one of them
Lens device, which is characterized in that the measuring system further includes：I/V conversion circuits, filter amplification circuit, A/D harvesters.
9. measuring system as claimed in claim 8, which is characterized in that further include：Software secondary filtering device.
10. measuring system as claimed in claim 8 or 9, which is characterized in that the spot displacement sensor is Two-dimensional PSD,
Photosurface size is 12 × 12mm, and resolution ratio is 1.5 μm；The good A areas radius of the linearity be 2.5mm, sensitivity 0.6A/W, secretly
Current maxima is 500Na, and electrode resistance is 10k Ω, and test condition is 25 DEG C, and spectral response range is in 320nm-1060nm；
Laser selects the laser of the 650nm of 3.3V or 5V.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810063289.XA CN108089323A (en) | 2018-01-23 | 2018-01-23 | Fast steering mirror device and measuring system with novel rotary transition light path |
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|---|---|---|---|
| CN201810063289.XA CN108089323A (en) | 2018-01-23 | 2018-01-23 | Fast steering mirror device and measuring system with novel rotary transition light path |
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| CN108089323A true CN108089323A (en) | 2018-05-29 |
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| CN201810063289.XA Pending CN108089323A (en) | 2018-01-23 | 2018-01-23 | Fast steering mirror device and measuring system with novel rotary transition light path |
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| CN111007521A (en) * | 2019-12-09 | 2020-04-14 | 北京信息科技大学 | Laser active detection system and target identification method |
| CN111596279A (en) * | 2020-05-08 | 2020-08-28 | 山东大学 | Laser pointing stability control method |
| CN111596268A (en) * | 2020-05-08 | 2020-08-28 | 山东大学 | Laser beam angle deviation detection device |
| CN112558290A (en) * | 2019-09-25 | 2021-03-26 | 日本电产株式会社 | Driver and optical scanning device |
| CN116659420A (en) * | 2023-08-02 | 2023-08-29 | 江苏集萃苏科思科技有限公司 | System and method for measuring deflection angle |
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Application publication date: 20180529 |